CN107907992A - The fast steering mirror actuation mechanism and start method of direct stress electromagnetic drive - Google Patents

The fast steering mirror actuation mechanism and start method of direct stress electromagnetic drive Download PDF

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Publication number
CN107907992A
CN107907992A CN201711258186.0A CN201711258186A CN107907992A CN 107907992 A CN107907992 A CN 107907992A CN 201711258186 A CN201711258186 A CN 201711258186A CN 107907992 A CN107907992 A CN 107907992A
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China
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direct stress
stress electromagnetic
electromagnetic actuator
support structure
mirror support
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CN201711258186.0A
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CN107907992B (en
Inventor
张丰
徐明龙
田征
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Xi'an Langwei Technology Co ltd
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Xian Jiaotong University
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    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/085Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting means being moved or deformed by electromagnetic means

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  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Reciprocating, Oscillating Or Vibrating Motors (AREA)
  • Micromachines (AREA)

Abstract

The fast steering mirror actuation mechanism and start method of a kind of direct stress electromagnetic drive, the actuation mechanism includes the hinged support of Universal flexible of mirror support structure, base and connection mirror support structure and base, further include the four direct stress electromagnetic actuators for being fixed on and being symmetric between mirror support structure and base on the hinged support of Universal flexible, four direct stress electromagnetic actuator bottoms are fixed on base, top is connected by operating bar with rod-type displacement amplifying mechanism, and rod-type displacement amplifying mechanism is connected with mirror support structure by straight beam type flexible hinge;The four direct stress electromagnetic actuator structure size is identical, including secured core, permanent magnet, magnet exciting coil, moves iron core;Four direct stress electromagnetic actuators are connected by its rod-type displacement amplifying mechanism with mirror support structure using straight beam type flexible hinge respectively;The present invention also provides the start method of the fast steering mirror, the characteristics of which has higher resolution ratio, and also compact-sized, fast response time.

Description

The fast steering mirror actuation mechanism and start method of direct stress electromagnetic drive
Technical field
The present invention relates to light beam orientation angle adjustment control technical field, and in particular to a kind of direct stress electromagnetic drive it is fast Fast deflection mirror actuation mechanism and start method.
Background technology
With the development of FreeSpace Laser Communications Technique, application of the light beam orientation angle adjusting mechanism in laser space communication More and more extensive, most light beam is directed toward adjusting mechanism and is broadly divided into Piezoelectric Driving and sound according to the difference of type of drive at present The characteristics of circle motor driving, Piezoelectric Driving is to make dynamic frequency height, and bandwidth range is big, but angle of regulation range is small, it is necessary to displacement Enlarger expands angle of regulation range, and power consumption is higher;Voice coil motor driving is to promote mirror surface structure using Ampere force, Its main feature is that driving force is big, small power consumption, angle of regulation range is big, but is limited by structural support rigidity, and frequency range is small, and Control electric current increases with the increase for adjusting angular range, and fever is serious, influences overall system performance.
The content of the invention
In order to solve the above-mentioned problems of the prior art, it is an object of the invention to provide a kind of direct stress electromagnetic drive Fast steering mirror actuation mechanism and start method, the mechanism structure is compact, has higher frequency range, larger is inclined Gyration adjustable range.
To achieve the above objectives, the present invention adopts the following technical scheme that:
A kind of fast steering mirror actuation mechanism of direct stress electromagnetic drive, including mirror support structure 6, base 7 with And the hinged support 16 of the Universal flexible of connection mirror support structure 6 and base 7, further include and be fixed on mirror support structure 6 and base 7 Between on the hinged 16 four direct stress electromagnetic actuators being symmetric of support of Universal flexible and be fixed on mirror support knot It is used for the capacitive displacement transducer 5 for detecting 6 deflection angle of mirror support structure, four direct stress electromagnetism between structure 6 and base 7 Actuator is respectively the first direct stress electromagnetic actuator 1, the second direct stress electromagnetic actuator 2, the 3rd direct stress electromagnetic actuator 3 With the 4th direct stress electromagnetic actuator 4, four direct stress electromagnetic actuator bottoms are bolted on base 7, and four just It is connected at the top of stress electromagnetic actuator by operating bar 10 with rod-type displacement amplifying mechanism 9, rod-type displacement amplifying mechanism 9 and minute surface Supporting structure 6 is connected by straight beam type flexible hinge 8.
The first direct stress electromagnetic actuator 1 includes C-shaped secured core 11, permanent magnet 12, magnet exciting coil 13 and movement Iron core 14;Magnet exciting coil 13 is wrapped in the both sides up and down of C-shaped secured core 11, and permanent magnet 12 is connected in C-shaped secured core 11 Portion, movement iron core 14 and permanent magnet 12 are consolidated by being located at the opening of C-shaped secured core 11 after silica gel pad adhesion with C-shaped 11 opening both ends of fixed core form air gap 15;The second direct stress electromagnetic actuator 2, the 3rd direct stress electromagnetic actuator 3 It is identical with the first direct stress electromagnetic actuator 1 with the structure size of the 4th direct stress electromagnetic actuator 4, the first direct stress electricity 1 and the 3rd direct stress electromagnetic actuator 3 of magnetic actuator rotates axial symmetry on Y and turns about the X axis, the second direct stress electromagnetic activation 2 and the 4th direct stress electromagnetic actuator 4 of device rotates axial symmetry on X and is rotated around Y-axis, and the X rotation axis and Y rotation axis are mutual Vertically and in the same plane;Operating bar 10 is connected with movement iron core 14 by rubber cushion blocks (17), the top of operating bar 10 and bar Formula displacement amplifying mechanism 9 connects.
The movement iron core 14 uses soft magnetic materials.
The mirror support structure 6, straight beam type flexible hinge 8, rod-type displacement amplifying mechanism 9 and operating bar 10 use duralumin Alloy material.
The C-shaped secured core 11 is embedded in hollow, rectangular enclosure.
A kind of start method of the fast steering mirror actuation mechanism of direct stress electromagnetic drive, just should to first 1 input current signal of power electromagnetic actuator, the magnet exciting coil 13 of energization can produce excitation field, and the excitation field direction is with electric current Direction change;Magnet exciting coil 13 produce excitation field be added to permanent magnet 12 generation DC bias magnetic field, fixed by C-shaped Air gap 15 between iron core 11 and movement iron core 14 is applied on movement iron core 14;When the side of excitation field and DC bias magnetic field To it is identical when, movement iron core 14 will be subject to the electromagnetism direct stress consistent with excitation field direction, and along 15 normal orientation of air gap Movement, produces start displacement;The start displacement is output to rod-type displacement amplifying mechanism 9 along operating bar 10, with rod-type displacement equations Mechanism 9 can produce deflection by the mirror support structure 6 that straight beam type flexible hinge 8 is connected;Capacitive displacement transducer 5 is real-time The deflection angle of mirror support structure 6 is monitored, and feeds back to direct stress electromagnetic actuator, realizes closed-loop control, improves minute surface branch The deflection angle degree of regulation of support structure 6;Since the start displacement that direct stress electromagnetic actuator produces is micron dimension, this The angular adjustment resolution ratio of invention can reach microradian level;Two groups of direct stress electromagnetic actuators being diagonally distributed are at the same time along opposite Direction start, realizes micro- angular deflection control in speculum two-dimensional quadrature direction.
Compared to the prior art the present invention, has the following advantages that:
1) in the present invention, using direct stress electromagnetic drive mode, compared to voice coil motor type of drive, using magnetic field superposition, Moving component is set to produce axial movement, driving force is big, and caloric value is few, and frequency range is big.
2) in the present invention, using direct stress electromagnetic drive mode, compared to piezoelectric actuator ultra-precision driving mode, power consumption is relatively low, rings Answer speed fast.
Brief description of the drawings
Fig. 1 is fast steering mirror actuation mechanism schematic diagram of the present invention.
Fig. 2 is direct stress electromagnetic actuator structure diagram of the present invention.
Fig. 3 is fast steering mirror actuation mechanism sectional view of the present invention.
Embodiment
Below in conjunction with drawings and the specific embodiments, the present invention is described in further detail.
As shown in Figure 1, a kind of fast steering mirror actuation mechanism of direct stress electromagnetic drive of the present invention, including minute surface branch Support structure 6, base 7 and the hinged support 16 of the Universal flexible of connection mirror support structure 6 and base 7, further include and are fixed on minute surface Between supporting structure 6 and base 7 on the hinged 16 four direct stress electromagnetic actuators being symmetric of support of Universal flexible and It is fixed on and is used for the capacitive displacement transducer for detecting 6 deflection angle of mirror support structure between mirror support structure 6 and base 7 5, four direct stress electromagnetic actuators are respectively the first direct stress electromagnetic actuator 1, the second direct stress electromagnetic actuator the 2, the 3rd 3 and the 4th direct stress electromagnetic actuator 4 of direct stress electromagnetic actuator, four direct stress electromagnetic actuator bottoms are bolted On base 7, it is connected at the top of four direct stress electromagnetic actuators by operating bar 10 with rod-type displacement amplifying mechanism 9, rod-type position Enlarger 9 is moved to be connected by straight beam type flexible hinge 8 with mirror support structure 6.
As the preferred embodiment of the present invention, the first direct stress electromagnetic actuator 1 include C-shaped secured core 11, Permanent magnet 12, magnet exciting coil 13 and movement iron core 14;Magnet exciting coil 13 is wrapped in the both sides up and down of C-shaped secured core 11, permanent magnetism Iron 12 is connected to the middle part of C-shaped secured core 11, and movement iron core 14 is with permanent magnet 12 by being fixed after silica gel pad adhesion positioned at C-shaped The opening of iron core 11, and form air gap 15 with 11 opening both ends of C-shaped secured core;The second direct stress electromagnetic actuator 2nd, the structure size of the 3rd direct stress electromagnetic actuator 3 and the 4th direct stress electromagnetic actuator 4 and the first direct stress electromagnetic activation Device 1 is identical, and the first direct stress electromagnetic actuator 1 and the 3rd direct stress electromagnetic actuator 3 rotate axial symmetry and around X on Y Axis rotates, and the second direct stress electromagnetic actuator 2 and the 4th direct stress electromagnetic actuator 4 rotate axial symmetry on X and turn around Y-axis Dynamic, the X rotation axis and Y rotation axis are mutually perpendicular to and in the same plane;Operating bar 10 passes through rubber pad with movement iron core 14 Block 17 connects, and the top of operating bar 10 is connected with rod-type displacement amplifying mechanism 9.
Mirror support structure 6 is connected with base 7 by the hinged support 16 of Universal flexible, four direct stress electromagnetic actuator installations On base 2, and symmetrical on the hinged support 16 of Universal flexible, in being diagonally distributed two-by-two.Two direct stress electricity being diagonally distributed Magnetic actuator is along the opposite driving force of the axial outbound course of operating bar 10, so as to produce moment of flexure so that 6 edge of mirror support structure Another axis deflects certain angle.Capacitive displacement transducer 5, capacitance are installed between base 7 and mirror support structure 6 Formula displacement sensor 5 is bolted on base 7, for detecting the deflection angle of mirror support structure 6, and feeds back to work Dynamic device, so as to form displacement closed loop feedback control, improves the angular adjustment precision of fast steering mirror.
As shown in Fig. 2, the first direct stress electromagnetic actuator 1 is embedded in hollow, rectangular shell including C-shaped secured core 11 Inside, permanent magnet 12 are installed on the middle part of C-shaped secured core 11.The top and bottom of C-shaped secured core 11 are wound with excitation wire Circle 13, movement iron core 14 are connected with permanent magnet 12, move the top and bottom of iron core 14 respectively at 11 external part of C-shaped secured core Lower part and top it is corresponding, form air gap 15.Permanent magnet 12 produces DC bias magnetic field, which moves along permanent magnet 12 Iron core 14, air gap 15, C-shaped secured core 11 form direct current biasing magnetic circuit.It is powered to magnet exciting coil 13, produces excitation field, should Magnetic field along magnet exciting coil 13, C-shaped secured core 11, air gap 15, move iron core 14, permanent magnet 12, C-shaped secured core 11 form encourage Magnetic magnetic circuit.Excitation field and the bigoted magnetic field of direct current are superimposed, produce electromagnetism direct stress, the direct stress direction and magnetic circuit direction one Cause, powered motion iron core 14 produces start displacement along 15 normal direction of air gap, changes the direction of 13 electrical current of magnet exciting coil, electromagnetism is just Stress also changes correspondingly direction, and the operating bar 10 being connected with movement iron core 14 can vertically move up and down, the athletic meeting Mirror support structure 6 is delivered to, when the collaboration start of diagonal two direct stress electromagnetic actuators, 6 edge of mirror support structure can be promoted Another diagonally opposed deflection.
As the preferred embodiment of the present invention, the mirror support structure 6, straight beam type flexible hinge 8, operating bar 10 and bar Formula displacement amplifying mechanism 9 uses duralumin, hard alumin ium alloy material.
As the preferred embodiment of the present invention, the movement iron core 14 uses soft magnetic materials.
As the preferred embodiment of the present invention, bolt uses non-magnetic bolt.
The present invention operation principle be:Give the first direct stress electromagnetic actuator 1 input current signal, the magnet exciting coil of energization 13 can produce excitation field, which changes with current direction;The excitation field that magnet exciting coil 13 produces is added to The DC bias magnetic field that permanent magnet 12 produces, fortune is applied to by the air gap 15 between C-shaped secured core 11 and movement iron core 14 In dynamic iron core 14;When excitation field is identical with the direction of DC bias magnetic field, movement iron core 14 will be subject to and excitation field The consistent electromagnetism direct stress in direction, and moved along 15 normal orientation of air gap, produce start displacement;The start displacement is along operating bar 10 Rod-type displacement amplifying mechanism 9 is output to, the minute surface branch being connected with rod-type displacement amplifying mechanism 9 by straight beam type flexible hinge 8 Support structure 6 can produce deflection;Capacitive displacement transducer 5 monitors the deflection angle of mirror support structure 6 in real time, and feeds back to just Stress electromagnetic actuator, realizes closed-loop control, improves the deflection angle degree of regulation of mirror support structure 6;Due to direct stress electricity The start displacement that magnetic actuator produces is micron dimension, therefore the angular adjustment resolution ratio of the present invention can reach microradian level; Two groups of direct stress electromagnetic actuator starts simultaneously in opposite directions being diagonally distributed, realize micro- angle in speculum two-dimensional quadrature direction Degree deflection control.

Claims (6)

  1. A kind of 1. fast steering mirror actuation mechanism of direct stress electromagnetic drive, it is characterised in that:Including mirror support structure (6), base (7) and the hinged support (16) of the Universal flexible of connection mirror support structure (6) and base (7), further include and are fixed on Four direct stress electromagnetism being symmetric between mirror support structure (6) and base (7) on the hinged support (16) of Universal flexible Actuator and be fixed between mirror support structure (6) and base (7) be used for detect mirror support structure (6) deflection angle Capacitive displacement transducer (5), four direct stress electromagnetic actuators be respectively the first direct stress electromagnetic actuator (1), second just Stress electromagnetic actuator (2), the 3rd direct stress electromagnetic actuator (3) and the 4th direct stress electromagnetic actuator (4), four direct stress Electromagnetic actuator bottom is bolted on base (7), passes through operating bar (10) at the top of four direct stress electromagnetic actuators It is connected with rod-type displacement amplifying mechanism (9), rod-type displacement amplifying mechanism (9) is flexible by straight beam type with mirror support structure (6) Hinge (8) connects.
  2. 2. a kind of fast steering mirror actuation mechanism of direct stress electromagnetic drive according to claim 1, its feature exist In:The first direct stress electromagnetic actuator (1) includes C-shaped secured core (11), permanent magnet (12), magnet exciting coil (13) and fortune Dynamic iron core (14);Magnet exciting coil (13) is wrapped in the both sides up and down of C-shaped secured core (11), and permanent magnet (12) is connected to C-shaped and consolidates In the middle part of fixed core (11), movement iron core (14) is with permanent magnet (12) by being located at C-shaped secured core (11) after silica gel pad adhesion Opening, and with C-shaped secured core (11) opening both ends form air gap (15);The second direct stress electromagnetic actuator (2), the structure size of the 3rd direct stress electromagnetic actuator (3) and the 4th direct stress electromagnetic actuator (4) and the first direct stress electricity Magnetic actuator (1) is identical, and the first direct stress electromagnetic actuator (1) and the 3rd direct stress electromagnetic actuator (3) are rotated on Y Axial symmetry simultaneously turns about the X axis, and the second direct stress electromagnetic actuator (2) and the 4th direct stress electromagnetic actuator (4) are on X rotation axis Symmetrical and rotated around Y-axis, the X rotation axis and Y rotation axis are mutually perpendicular to and in the same plane;Operating bar (10) and movement iron Core (14) is connected by rubber cushion blocks (17), is connected at the top of operating bar (10) with rod-type displacement amplifying mechanism (9).
  3. 3. a kind of fast steering mirror actuation mechanism of direct stress electromagnetic drive according to claim 1, its feature exist In:The movement iron core (14) uses soft magnetic materials.
  4. 4. a kind of fast steering mirror actuation mechanism of direct stress electromagnetic drive according to claim 1, its feature exist In:The mirror support structure (6), straight beam type flexible hinge (8), rod-type displacement amplifying mechanism (9) and operating bar (10) use Duralumin, hard alumin ium alloy material.
  5. 5. a kind of fast steering mirror actuation mechanism of direct stress electromagnetic drive according to claim 1, its feature exist In:The C-shaped secured core (11) is embedded in hollow, rectangular enclosure.
  6. A kind of 6. work of the fast steering mirror actuation mechanism of direct stress electromagnetic drive of claim 1 to 5 any one of them Dynamic method, it is characterised in that:To first direct stress electromagnetic actuator (1) input current signal, magnet exciting coil (13) meeting of energization Excitation field is produced, which changes with current direction;The excitation field that magnet exciting coil (13) produces is added to forever The DC bias magnetic field that magnet (12) produces, is made by the air gap (15) between C-shaped secured core (11) and movement iron core (14) Use on movement iron core (14);When excitation field is identical with the direction of DC bias magnetic field, movement iron core (14) will be subject to The electromagnetism direct stress consistent with excitation field direction, and moved along air gap (15) normal orientation, produce start displacement;The start position Move along operating bar (10) and be output to rod-type displacement amplifying mechanism (9), pass through straight beam type flexible hinge with rod-type displacement amplifying mechanism (9) The mirror support structure (6) that chain (8) is connected can produce deflection;Capacitive displacement transducer (5) monitors mirror support knot in real time The deflection angle of structure (6), and direct stress electromagnetic actuator is fed back to, realize closed-loop control, improve the inclined of mirror support structure (6) Gyration degree of regulation;Since the start displacement that direct stress electromagnetic actuator produces is micron dimension, the angle of the present invention Microradian level can be reached by adjusting resolution ratio;Two groups of direct stress electromagnetic actuator starts simultaneously in opposite directions being diagonally distributed, Realize micro- angular deflection control in speculum two-dimensional quadrature direction.
CN201711258186.0A 2017-12-01 2017-12-01 The fast steering mirror actuation mechanism and actuation method of direct stress electromagnetic drive Active CN107907992B (en)

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Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108761772A (en) * 2018-05-30 2018-11-06 中国科学院光电技术研究所 Frame type electric adjusting mirror mounted like mirror frame
CN111427148A (en) * 2020-04-01 2020-07-17 北京航空航天大学 Maxwell force driven quick deflection mirror
CN115728936A (en) * 2022-11-30 2023-03-03 西安交通大学 Two-degree-of-freedom deflection adjusting mechanism based on electromagnetic normal stress driving and control method
CN116719145A (en) * 2023-08-09 2023-09-08 北京瑞控信科技股份有限公司 Two-dimensional non-frame large-angle quick reflector

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CA2359554A1 (en) * 2000-11-03 2002-05-03 Ramaswamy Mahadevan Microelectromechanical optical switches including optical paths having optical loss equalization therebetween
CN1808186A (en) * 2006-02-09 2006-07-26 北京航空航天大学 Fast steering reflection mirror with giant magnetostrictive driver
CN102981244A (en) * 2012-12-25 2013-03-20 中国科学院长春光学精密机械与物理研究所 Two-dimensional large-diameter transmission-type quick reflecting mirror
CN103913838A (en) * 2014-02-21 2014-07-09 西安交通大学 Two-dimensional quick-deflection reflector actuating mechanism and actuating method thereof

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CA2359554A1 (en) * 2000-11-03 2002-05-03 Ramaswamy Mahadevan Microelectromechanical optical switches including optical paths having optical loss equalization therebetween
CN1808186A (en) * 2006-02-09 2006-07-26 北京航空航天大学 Fast steering reflection mirror with giant magnetostrictive driver
CN102981244A (en) * 2012-12-25 2013-03-20 中国科学院长春光学精密机械与物理研究所 Two-dimensional large-diameter transmission-type quick reflecting mirror
CN103913838A (en) * 2014-02-21 2014-07-09 西安交通大学 Two-dimensional quick-deflection reflector actuating mechanism and actuating method thereof

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108761772A (en) * 2018-05-30 2018-11-06 中国科学院光电技术研究所 Frame type electric adjusting mirror mounted like mirror frame
CN111427148A (en) * 2020-04-01 2020-07-17 北京航空航天大学 Maxwell force driven quick deflection mirror
CN111427148B (en) * 2020-04-01 2022-02-22 北京航空航天大学 Maxwell force driven quick deflection mirror
CN115728936A (en) * 2022-11-30 2023-03-03 西安交通大学 Two-degree-of-freedom deflection adjusting mechanism based on electromagnetic normal stress driving and control method
CN115728936B (en) * 2022-11-30 2024-05-17 西安交通大学 Two-degree-of-freedom deflection adjusting mechanism based on electromagnetic normal stress driving and control method
CN116719145A (en) * 2023-08-09 2023-09-08 北京瑞控信科技股份有限公司 Two-dimensional non-frame large-angle quick reflector
CN116719145B (en) * 2023-08-09 2023-12-29 北京瑞控信科技股份有限公司 Two-dimensional non-frame large-angle quick reflector

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