CN115728936A - Two-degree-of-freedom deflection adjusting mechanism based on electromagnetic normal stress driving and control method - Google Patents
Two-degree-of-freedom deflection adjusting mechanism based on electromagnetic normal stress driving and control method Download PDFInfo
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Abstract
A two-degree-of-freedom deflection adjusting mechanism based on electromagnetic normal stress driving and a control method thereof are disclosed, wherein the adjusting mechanism comprises a reflector, a shell integrating a reflector holder and a rigidity guide mechanism, a base, an upper magnetic conduction sheet, a lower magnetic conduction sheet, a permanent magnet, a central magnetic conduction rod, four electromagnetic driving units which are horizontally and symmetrically arranged and have the same structure and a flexible hooke hinge; the electromagnetic driving unit comprises a magnetic conduction rod and a coil; a working air gap is formed between the top end of the magnetic conducting rod and the upper magnetic conducting sheet; the permanent magnet generates static symmetrical magnetic flux which is superposed with excitation magnetic flux generated by electrifying the excitation coil, electromagnetic force is generated in a working air gap, the electrifying mode of the excitation coil is changed, four groups of electromagnetic driving units work cooperatively, electromagnetic torque is formed by arranging every two groups of the electromagnetic driving units in an orthogonal mode and acts on the upper magnetic conductive sheet, the upper magnetic conductive sheet deflects around the x axis and the y axis, and two rotational degrees of freedom of the reflector around the x axis and the y axis are realized. The two-degree-of-freedom rapid control reflector has the advantages of simple structure, convenience in processing, high precision and the like.
Description
Technical Field
The invention relates to the technical field of micro-displacement precise adjustment actuation, in particular to a two-degree-of-freedom deflection adjusting mechanism based on electromagnetic normal stress driving and a control method.
Background
The fast mirror is a very important core device in a precision tracking system, and is used for precisely controlling the direction of a light beam. The fast reflection mirror has the advantages of high response speed, high control precision and high resolution. The method can be used for correcting the inclination error in the optical path and stabilizing the pointing direction of the light beam, and is widely applied to the fields of adaptive optics, laser communication, image stabilization, precise tracking, light beam control, target pointing and the like. The fast reflecting mirror controls the high-frequency fast rotation of the reflecting mirror surface under the action of the driving element, and the high-speed accurate pointing, stabilization and tracking of the light beam are realized. At present, the driving elements of the quick reflection mirror on the market are mainly piezoelectric ceramics and voice coil motors, the stroke of the piezoelectric ceramics is small and is only dozens of microns to dozens of microns generally, the driving voltage needs hundreds of volts and is easy to damage; the voice coil motor driving mode is high in response speed and long in working stroke, but the structure is easily limited by structural rigidity, the fundamental frequency of the system is low, the control current of the voice coil motor is correspondingly improved along with the increase of the structural rigidity, and the heating amount is increased accordingly. Therefore, a driving mode and a driving mechanism with high precision, small volume and good reliability are needed.
Disclosure of Invention
In order to solve the problems in the prior art, the invention aims to provide a two-degree-of-freedom deflection adjusting mechanism based on electromagnetic normal stress driving and a control method thereof, and compared with the driving of a voice coil motor, the two-degree-of-freedom deflection adjusting mechanism has the advantages of large driving force, small heat productivity, compact structure and wider working bandwidth; compared with a piezoelectric driving mode, the piezoelectric driving type piezoelectric actuator has the advantages of large output displacement, low power consumption and high reliability.
In order to achieve the above purpose, the invention adopts the following technical scheme:
the utility model provides a two degree of freedom beat adjustment mechanism based on electromagnetism normal stress drive which characterized in that: the device comprises a reflector 1, a shell 2 integrating a reflector holder and a reed, an upper magnetic conductive sheet 3, a flexible Hooke hinge 4, a central magnetic conductive rod 5, a permanent magnet 6, two groups of electromagnetic driving units 7 which are orthogonally arranged and have the same structure, a lower magnetic conductive sheet 8 and a base 9; the reflector 1 is fixed on a shell 2, the shell 2 is fixedly connected with a flexible hooke hinge 4 through a bolt, an upper magnetic conductive sheet 3 is arranged between the shell 2 and the flexible hooke hinge 4, a through hole is reserved at a bolt passing position, the flexible hooke hinge 4 is fixedly connected with a base 9 through a bolt, a lower magnetic conductive sheet 8 is arranged between the flexible hooke hinge 4 and the base 9, a through hole is reserved at a bolt passing position, the base 9 is fixedly connected with the shell 2 through a bolt, and the shell 2 is arranged above the base 9; a groove is reserved in the middle of the lower magnetic conductive plate 8 and used for placing the permanent magnet 6, the central magnetic conductive rod 5 is positioned above the permanent magnet 6, the bottom end of the central magnetic conductive rod 5 is provided with threads and fixedly connected with the lower magnetic conductive plate 8 through the threads, the permanent magnet 6 is arranged between the central magnetic conductive rod 5 and the lower magnetic conductive plate 8, a through hole is reserved in the middle, and an air gap 10 is formed between the central magnetic conductive rod 5 and the upper magnetic conductive plate 3; four through holes which are arranged in an orthogonal mode in pairs are reserved in the outer ring of the lower magnetic conductive sheet 8 and used for installing the electromagnetic driving unit 7, the electromagnetic driving unit 7 is fixedly connected with the base 9 through bolts, and the lower magnetic conductive sheet 8 is arranged between the electromagnetic driving unit 7 and the base 9; the rigidity guide mechanism of the shell 2 and the flexible Hooke hinge 4 provide rotation rigidity along the x-axis and y-axis directions of the reflector 1, so that the reflector 1 can only realize two rotational degrees of freedom around the x-axis and the y-axis; meanwhile, constraint rigidity is provided in the Z-axis direction, and the translation freedom degree of the reflector 1 is limited;
the four electromagnetic driving units have the same structure, and each electromagnetic driving unit comprises a magnetic conducting rod 7-1 and an excitation coil 7-2; the magnet exciting coil 7-2 is wound between the upper card and the lower card of the magnetic conducting rod 7-1, and the upper card is provided with a wire slot; the top end of the magnetic conducting rod 7-1 and the bottom surface of the boss of the lower plane of the upper magnetic conducting plate 3 form a working air gap 11; the upper magnetic conductive plate 3, the central magnetic conductive rod 5, the lower magnetic conductive plate 8, the magnetic conductive rod 7-1 and the working air gap 11 form a magnetic flux loop, the permanent magnet 6 generates static symmetrical magnetic flux which is superposed with dynamic excitation magnetic flux generated by electrifying the excitation coil 7-2, the superposed magnetic flux generates electromagnetic positive stress in the working air gap 11 between the upper magnetic conductive plate 3 and the magnetic conductive rod 7-1, the electrifying mode of the excitation coil 7-2 is changed, four groups of electromagnetic driving units 7 work cooperatively, a group of two magnetic driving units are orthogonally arranged in pairs to form torque and act on the upper magnetic conductive plate 3, so that the upper magnetic conductive plate 3 rotates around an x axis and a y axis, the upper magnetic conductive plate 3 is fixedly connected with the shell 2, and the motion of the upper magnetic conductive plate is directly transmitted to the shell 2, thereby pushing the reflector 1 and realizing two rotational degrees of freedom of the reflector 1 around the x axis and the y axis.
Eight strain sensing units are uniformly distributed in four directions of the flexible Hooke hinge 4, every two strain sensing units are bonded on the first curved surface 12 and the second curved surface 13 in a group, the steering angle of the reflector 1 is detected in real time and fed back to the control system, and angle feedback control and angle closed-loop control are achieved.
The shell 2, the flexible Hooke hinge 4 and the base 9 are all made of titanium alloy materials.
The permanent magnet 6 is made of neodymium iron boron material with high remanence and coercive force; the upper magnetic conductive sheet 3, the central magnetic conductive rod 5, the lower magnetic conductive sheet 8 and the magnetic conductive rod 7-1 are made of soft magnetic materials with high magnetic conductivity.
The two-degree-of-freedom deflection adjusting mechanism based on electromagnetic normal stress driving and the control method are characterized in that current signals with opposite phases are input to the excitation coils 7-2 of the electromagnetic driving units 7 in the same group, the electrified excitation coils 7-2 generate excitation magnetic fluxes, and the directions of the excitation magnetic fluxes change along with the directions of the currents; the dynamic excitation magnetic flux generated by the excitation coil 7-2 is superposed on the static symmetrical magnetic flux generated by the permanent magnet 6, the superposed magnetic flux acts on the upper magnetic conductive sheet 3, electromagnetic normal stress is generated on the upper magnetic conductive sheet 3 along the thickness direction of the working air gap 11, the two magnetic conductive sheets are orthogonally arranged in a group to form torque and act on the upper magnetic conductive sheet 3, so that the upper magnetic conductive sheet 3 rotates around the x axis and the y axis, the upper magnetic conductive sheet 3 is fixedly connected with the shell 2, and the motion of the upper magnetic conductive sheet is directly transmitted to the shell 2, so that the reflector 1 is pushed, and two rotational degrees of freedom of the reflector 1 around the x axis and the y axis are realized; the eight strain sensing units detect the steering angle of the reflecting mirror 1 in real time.
Compared with the prior art, the invention has the following advantages:
1) The invention adopts an electromagnetic force driving mode to realize two-degree-of-freedom motion of the adjusting mechanism, and has the advantages of large driving force, high structural rigidity, high response speed and easy processing.
2) The two-degree-of-freedom adjusting mechanism driven by the electromagnetic force is fixedly connected through the flexible hinge, so that the motion transmission loss generated by the electromagnetic driving unit is small, no friction exists, and the motion precision is high. The sensing measurement unit and the rigidity guide mechanism are integrally designed, so that the stability of the device is improved, the structure is compact, and the space utilization rate is high.
Drawings
Fig. 1 is an exploded view of the present invention.
Fig. 2 is a half-section assembly view of the present invention.
Fig. 3 is an isometric view of a flexible hooke hinge of the present invention.
Fig. 4 is a schematic view of the magnetic flux of the present invention.
Detailed Description
The invention is described in further detail below with reference to the following figures and specific embodiments.
As shown in fig. 1, a two-degree-of-freedom yaw adjusting mechanism based on electromagnetic normal stress driving comprises a reflector 1, a housing 2 integrating a reflector holder and a reed, an upper magnetic conductive sheet 3, a flexible hooke hinge 4, a central magnetic conductive rod 5, a permanent magnet 6, a pair of electromagnetic driving units 7 which are arranged orthogonally and have the same structure, a lower magnetic conductive sheet 8 and a base 9; the reflector 1 is fixed on a shell 2, the shell 2 is fixedly connected with a flexible hooke hinge 4 through a bolt, an upper magnetic conductive sheet 3 is arranged between the shell 2 and the flexible hooke hinge 4, a through hole is reserved at a bolt passing position, the flexible hooke hinge 4 is fixedly connected with a base 9 through a bolt, a lower magnetic conductive sheet 8 is arranged between the flexible hooke hinge 4 and the base 9, a through hole is reserved at a bolt passing position, the base 9 is fixedly connected with the shell 2 through a bolt, and the shell 2 is arranged above the base 9; a groove is reserved in the middle of the lower magnetic conductive plate 8 and used for placing the permanent magnet 6, the central magnetic conductive rod 5 is positioned above the permanent magnet 6, the bottom end of the central magnetic conductive rod 5 is provided with threads and fixedly connected with the lower magnetic conductive plate 8 through the threads, the permanent magnet 6 is arranged between the central magnetic conductive rod 5 and the lower magnetic conductive plate 8, a through hole is reserved in the middle, and an air gap 10 is formed between the central magnetic conductive rod 5 and the upper magnetic conductive plate 3; four through holes which are arranged in a pairwise orthogonal mode are reserved in the outer ring of the lower magnetic conductive sheet 8 and used for installing the electromagnetic driving unit 7, the electromagnetic driving unit 7 is fixedly connected with the base 9 through bolts, and the lower magnetic conductive sheet 8 is arranged between the electromagnetic driving unit 7 and the base 9. The rigidity guide mechanism of the shell 2 and the flexible Hooke hinge 4 provide rotation rigidity along the x-axis and y-axis directions of the reflector 1, so that the reflector 1 can only realize two rotational degrees of freedom around the x-axis and the y-axis; meanwhile, constraint rigidity is provided in the Z-axis direction, and the translation freedom degree of the reflector 1 is limited.
As shown in fig. 2, four electromagnetic driving units which are arranged in a group two by two and are orthogonally arranged are arranged in the adjusting mechanism, the four electromagnetic driving units have the same structure, and each electromagnetic driving unit comprises a magnetic conducting rod 7-1 and an excitation coil 7-2; the top end of the magnetic conducting rod 7-1 and the bottom surface of the boss of the lower plane of the upper magnetic conducting plate 3 form a working air gap 11; the upper magnetic conductive plate 3, the central magnetic conductive rod 5, the lower magnetic conductive plate 8, the magnetic conductive rod 7-1 and the working air gap 11 form a magnetic flux loop, the permanent magnet 6 generates static symmetrical magnetic flux which is superposed with dynamic excitation magnetic flux generated by electrifying the excitation coil 7-2, the superposed magnetic flux generates electromagnetic positive stress in the working air gap 11 between the upper magnetic conductive plate 3 and the magnetic conductive rod 7-1, the electrifying mode of the excitation coil 7-2 is changed, four groups of electromagnetic driving units 7 work cooperatively, a group of two magnetic driving units are orthogonally arranged in pairs to form torque and act on the upper magnetic conductive plate 3, so that the upper magnetic conductive plate 3 rotates around an x axis and a y axis, the upper magnetic conductive plate 3 is fixedly connected with the shell 2, and the motion of the upper magnetic conductive plate is directly transmitted to the shell 2, thereby pushing the reflector 1 and realizing two rotational degrees of freedom of the reflector 1 around the x axis and the y axis.
As shown in fig. 3, eight strain sensing units are uniformly distributed in four directions of the flexible hooke hinge 4, and a group of eight strain sensing units are bonded on the first curved surface 12 and the second curved surface 13 in pairs to detect the steering angle of the reflector 1 in real time.
In a preferred embodiment of the present invention, the housing 2, the flexible hooke hinge 4 and the base 9 are made of titanium alloy material.
As a preferred embodiment of the present invention, the permanent magnet 6 is made of a neodymium iron boron material with high remanence and coercive force; the upper magnetic conductive sheet 3, the central magnetic conductive rod 5, the lower magnetic conductive sheet 8 and the magnetic conductive rod 7-1 are made of soft magnetic materials with high magnetic conductivity.
The working principle of the invention is as follows: as shown in fig. 4, current signals with opposite phases are input to the exciting coil 7a-2 of the electromagnetic driving unit a and the exciting coil 7b-2 of the electromagnetic driving unit b in the x-axis direction, and the energized exciting coil 7a-2 and the energized exciting coil 7b-2 jointly generate an exciting magnetic flux, wherein the exciting magnetic flux direction is in a counterclockwise direction; the dynamic excitation magnetic flux generated by the two excitation coils is superposed on the static symmetrical magnetic flux generated by the permanent magnet 6, the static symmetrical magnetic flux is downward (-z) in the direction of a working air gap above the electromagnetic driving unit a and the electromagnetic driving unit b, the superposed magnetic flux acts on the upper magnetic conductive sheet 3, electromagnetic positive stress is generated on the upper magnetic conductive sheet 3 along the thickness direction of the working air gap 11, at the moment, the electromagnetic positive stress directions generated in the working air gap 11 above the electromagnetic driving unit a and the electromagnetic driving unit b are downward (-z), and the electromagnetic positive stress in the working air gap 11 above the electromagnetic driving unit b is greater than the electromagnetic positive stress in the working air gap 11 above the electromagnetic driving unit a, so that the two positive stresses form a clockwise torque and act on the upper magnetic conductive sheet 3, the upper magnetic conductive sheet 3 rotates anticlockwise around the y axis, the upper magnetic conductive sheet 3 is fixedly connected with the shell 2, the motion of the upper magnetic conductive sheet 3 is directly transmitted to the shell 2, so that the reflector 1 is pushed, and the reflector 1 rotates anticlockwise around the y axis is realized; if the direction of the current of the excitation coil 7a-2 and the excitation coil 7b-2 is changed, the reflector 1 rotates clockwise around the y axis; similarly, two electromagnetic driving units for controlling the direction of the y axis can realize clockwise or anticlockwise rotation around the x axis.
The present invention is not disclosed in detail as belonging to the common general knowledge of a person skilled in the art.
The above description is only an embodiment of the present invention, and the scope of the present invention is not limited thereto, and any person skilled in the art can understand that the replacement or addition and subtraction within the technical scope of the present invention shall be covered within the scope of the present invention, therefore, the scope of the present invention shall be subject to the protection scope of the claims.
Claims (5)
1. A two-degree-of-freedom deflection adjusting mechanism based on electromagnetic normal stress driving is characterized in that: the device comprises a reflector (1), a shell (2) integrating a reflector holder and a rigidity guide mechanism, an upper magnetic conductive sheet (3), a flexible Hooke hinge (4), a central magnetic conductive rod (5), a permanent magnet (6), a pair of electromagnetic driving units (7) which are orthogonally arranged and have the same structure, a lower magnetic conductive sheet (8) and a base (9); the reflector (1) is fixed on the shell (2), the shell (2) is fixedly connected with the flexible hooke hinge (4) through a bolt, the upper magnetic conductive sheet (3) is arranged between the shell (2) and the flexible hooke hinge (4), a through hole is reserved at the position where the bolt passes through, the flexible hooke hinge (4) is fixedly connected with the base (9) through the bolt, the lower magnetic conductive sheet (8) is arranged between the flexible hooke hinge (4) and the base (9), a through hole is reserved at the position where the bolt passes through, the base (9) is fixedly connected with the shell (2) through the bolt, and the shell (2) is arranged above the base (9); a groove is reserved in the middle of the lower magnetic conductive sheet (8) and used for placing the permanent magnet (6), the central magnetic conductive rod (5) is positioned above the permanent magnet (6), the bottom end of the central magnetic conductive rod (5) is provided with threads and fixedly connected with the lower magnetic conductive sheet (8) through the threads, the permanent magnet (6) is arranged between the central magnetic conductive rod (5) and the lower magnetic conductive sheet (8), a through hole is reserved in the middle, and an air gap (10) is formed between the central magnetic conductive rod (5) and the upper magnetic conductive sheet (3); four through holes which are arranged in an orthogonal mode in pairs are reserved on the outer ring of the lower magnetic conductive sheet (8) and used for mounting the electromagnetic driving unit (7), the electromagnetic driving unit (7) is fixedly connected with the base (9) through bolts, and the lower magnetic conductive sheet (8) is arranged between the electromagnetic driving unit (7) and the base (9); the rigidity guide mechanism and the flexible Hooke hinge (4) of the shell (2) provide rotation rigidity along the directions of the x axis and the y axis of the reflector (1), so that the reflector (1) can only realize two rotational degrees of freedom around the x axis and the y axis; meanwhile, constraint rigidity is provided in the Z-axis direction, and the translational degree of freedom of the reflector (1) is limited;
the four electromagnetic driving units have the same structure, and each electromagnetic driving unit comprises a magnetic conducting rod (7-1) and an excitation coil (7-2); the top end of the magnetic conducting rod (7-1) and the bottom surface of the boss of the lower plane of the upper magnetic conducting plate (3) form a working air gap (11); the upper magnetic conductive sheet (3), the central magnetic conductive rod (5), the lower magnetic conductive sheet (8), the magnetic conductive rod (7-1) and the working air gap (11) form a magnetic flux loop, the permanent magnet (6) generates static symmetrical magnetic flux and is superposed with dynamic excitation magnetic flux generated by electrifying the excitation coil (7-2), the superposed magnetic flux generates electromagnetic force in the working air gap (11) between the upper magnetic conductive sheet (3) and the magnetic conductive rod (7-1), the electrifying mode of the excitation coil (7-2) is changed, four groups of electromagnetic driving units (7) work cooperatively, a group of two groups of electromagnetic driving units are orthogonally arranged to form torque and act on the upper magnetic conductive sheet (3), the upper magnetic conductive sheet (3) rotates around an x axis and a y axis, the upper magnetic conductive sheet (3) is fixedly connected with the shell (2), and the motion of the upper magnetic conductive sheet is directly transmitted to the shell (2), so that the reflector (1) is pushed, and two deflection motions of the reflector (1) around the x axis and the y axis are realized.
Eight strain sensing units in the reflector position detection system are uniformly distributed in four directions of the flexible Hooke hinge (4), and are arranged on the first curved surface (12) and the second curved surface (13) in a group two by two to detect the steering angle of the reflector (1) in real time.
2. The two-degree-of-freedom yaw adjusting mechanism based on electromagnetic positive stress driving as claimed in claim 1, wherein: the shell (2), the flexible Hooke hinge (4) and the base (9) are all made of titanium alloy materials.
3. The two-degree-of-freedom yaw adjusting mechanism based on electromagnetic normal stress driving as claimed in claim 1, wherein: the permanent magnet (6) is made of neodymium iron boron material with high remanence and coercive force; the upper magnetic conductive sheet (3), the central magnetic conductive rod (5), the lower magnetic conductive sheet (8) and the magnetic conductive rod (7-1) are made of soft magnetic materials with high magnetic conductivity.
4. The two-degree-of-freedom yaw adjusting mechanism based on electromagnetic positive stress driving as claimed in claim 1, wherein: the bolts for fixing are all made of non-magnetic materials.
5. The method for controlling the two-degree-of-freedom yaw adjusting mechanism based on electromagnetic normal stress driving as claimed in any one of claims 1 to 4, wherein: inputting current signals with opposite phases to exciting coils (7-2) of electromagnetic driving units (7) in the same group, and generating exciting magnetic flux by the energized exciting coils (7-2), wherein the direction of the exciting magnetic flux changes along with the direction of the current; the dynamic excitation magnetic flux generated by the excitation coil (7-2) is superposed on the static symmetrical magnetic flux generated by the permanent magnet (6), the superposed magnetic flux acts on the upper magnetic conductive sheet (3), electromagnetic force is generated on the upper magnetic conductive sheet (3) along the thickness direction of the working air gap (11), two magnetic conductive sheets are orthogonally arranged in a group to form electromagnetic torque and act on the upper magnetic conductive sheet (3), so that the upper magnetic conductive sheet (3) rotates around the x axis and the y axis, the upper magnetic conductive sheet (3) is fixedly connected with the shell (2), and the motion of the upper magnetic conductive sheet (3) is directly transmitted to the shell (2), thereby pushing the reflector (1) and realizing two rotational degrees of freedom of the reflector (1) around the x axis and the y axis; the eight strain sensing units detect the steering angle of the reflector (1) in real time.
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| Application Number | Priority Date | Filing Date | Title |
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| CN202211528018.XA CN115728936B (en) | 2022-11-30 | 2022-11-30 | Two-degree-of-freedom deflection adjusting mechanism based on electromagnetic normal stress driving and control method |
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| CN202211528018.XA CN115728936B (en) | 2022-11-30 | 2022-11-30 | Two-degree-of-freedom deflection adjusting mechanism based on electromagnetic normal stress driving and control method |
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Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20040190097A1 (en) * | 2003-03-25 | 2004-09-30 | Shpizel Matvey B. | Light beam deflector |
| CN102486421A (en) * | 2010-12-03 | 2012-06-06 | 西安金和光学科技有限公司 | Six-dimensional force sensing device |
| CN107907992A (en) * | 2017-12-01 | 2018-04-13 | 西安交通大学 | The fast steering mirror actuation mechanism and start method of direct stress electromagnetic drive |
| US20200119511A1 (en) * | 2018-10-15 | 2020-04-16 | Bryan Lochman | Systems and methods for addressing pumping of thermal interface materials in high-power laser systems |
| CN115097593A (en) * | 2022-08-26 | 2022-09-23 | 北京瑞控信科技股份有限公司 | One-dimensional high-speed moving magnetic type flexible support quick reflector |
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2022
- 2022-11-30 CN CN202211528018.XA patent/CN115728936B/en active Active
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20040190097A1 (en) * | 2003-03-25 | 2004-09-30 | Shpizel Matvey B. | Light beam deflector |
| CN102486421A (en) * | 2010-12-03 | 2012-06-06 | 西安金和光学科技有限公司 | Six-dimensional force sensing device |
| CN107907992A (en) * | 2017-12-01 | 2018-04-13 | 西安交通大学 | The fast steering mirror actuation mechanism and start method of direct stress electromagnetic drive |
| US20200119511A1 (en) * | 2018-10-15 | 2020-04-16 | Bryan Lochman | Systems and methods for addressing pumping of thermal interface materials in high-power laser systems |
| CN115097593A (en) * | 2022-08-26 | 2022-09-23 | 北京瑞控信科技股份有限公司 | One-dimensional high-speed moving magnetic type flexible support quick reflector |
Non-Patent Citations (1)
| Title |
|---|
| 徐新行;王兵;庄昕宇;陈宁;李莹;: "音圈电机驱动型快速控制反射镜机械结构研究", 长春理工大学学报(自然科学版), no. 01, 15 March 2011 (2011-03-15) * |
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