CN115728936B - Two-degree-of-freedom deflection adjusting mechanism based on electromagnetic normal stress driving and control method - Google Patents
Two-degree-of-freedom deflection adjusting mechanism based on electromagnetic normal stress driving and control method Download PDFInfo
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- CN115728936B CN115728936B CN202211528018.XA CN202211528018A CN115728936B CN 115728936 B CN115728936 B CN 115728936B CN 202211528018 A CN202211528018 A CN 202211528018A CN 115728936 B CN115728936 B CN 115728936B
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- 230000003068 static effect Effects 0.000 claims abstract description 11
- 230000033001 locomotion Effects 0.000 claims description 10
- 230000005284 excitation Effects 0.000 claims description 8
- 239000000696 magnetic material Substances 0.000 claims description 4
- 229910001069 Ti alloy Inorganic materials 0.000 claims description 3
- QJVKUMXDEUEQLH-UHFFFAOYSA-N [B].[Fe].[Nd] Chemical compound [B].[Fe].[Nd] QJVKUMXDEUEQLH-UHFFFAOYSA-N 0.000 claims description 3
- 239000000956 alloy Substances 0.000 claims description 3
- 239000000463 material Substances 0.000 claims description 3
- 229910001172 neodymium magnet Inorganic materials 0.000 claims description 3
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
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Abstract
A two-degree-of-freedom deflection adjusting mechanism based on electromagnetic normal stress driving and a control method thereof are provided, wherein the adjusting mechanism comprises a reflecting mirror, a shell integrating a mirror support and a rigidity guiding mechanism, a base, an upper magnetic conducting sheet, a lower magnetic conducting sheet, a permanent magnet, a central magnetic conducting rod, four electromagnetic driving units which are horizontally and symmetrically arranged and have the same structure, and a flexible Hooke hinge; the electromagnetic driving unit comprises a magnetic conduction rod and a coil; a working air gap is formed between the top end of the magnetic conduction rod and the upper magnetic conduction sheet; the permanent magnet generates static symmetrical magnetic flux and exciting magnetic flux generated by exciting coil energizing, electromagnetic force is generated in the working air gap, and the energizing mode of the exciting coil is changed, so that four groups of electromagnetic driving units work cooperatively, electromagnetic torque is formed by orthogonal arrangement of two groups of electromagnetic driving units and acts on the upper magnetic conducting sheets, the upper magnetic conducting sheets deflect around the x axis and the y axis, and two rotational degrees of freedom of the reflecting mirror around the x axis and the y axis are realized. The two-degree-of-freedom rapid control reflecting mirror has the advantages of simple structure, convenience in processing, high precision and the like.
Description
Technical Field
The invention relates to the technical field of micro-displacement precise adjustment and actuation, in particular to a two-degree-of-freedom deflection adjusting mechanism based on electromagnetic normal stress driving and a control method.
Background
Quick mirrors are very important core components in precision tracking systems for precisely controlling the beam direction. The fast reflecting mirror has fast response speed, high control precision and high resolution. The optical system can be used for correcting inclination errors in an optical path, stabilizing the direction of a light beam, and is widely applied to the fields of self-adaptive optics, laser communication, image stabilization, precise tracking, light beam control, target direction and the like. The fast reflecting mirror controls the high-frequency fast rotation of the reflecting mirror surface under the action of the driving element, so that the high-speed accurate pointing, stabilization and tracking of the light beam are realized. At present, the driving elements of the fast reflecting mirror on the market mainly comprise piezoelectric ceramics and voice coil motors, the stroke of the piezoelectric ceramics is smaller, generally only tens to tens micrometers, the driving voltage is hundreds of volts, and the piezoelectric ceramics is easy to damage; the voice coil motor driving mode has high response speed and long working stroke, but the structure is easy to be limited by structural rigidity, the fundamental frequency of the system is lower, and along with the increase of the structural rigidity, the control current of the voice coil motor is correspondingly increased, and the heating value is increased. Therefore, a driving method and mechanism with high precision, small volume and good reliability are needed.
Disclosure of Invention
In order to solve the problems in the prior art, the invention aims to provide a two-degree-of-freedom deflection adjusting mechanism based on electromagnetic normal stress driving and a control method thereof, which have the advantages of large driving force, small heating value, compact structure and wider working bandwidth compared with voice coil motor driving; compared with a piezoelectric driving mode, the piezoelectric driving type piezoelectric driving device is large in output displacement, low in power consumption and more reliable.
In order to achieve the above purpose, the invention adopts the following technical scheme:
Two degree of freedom beat adjustment mechanism based on electromagnetic normal stress drive, its characterized in that: the magnetic mirror comprises a reflecting mirror 1, a housing 2 integrating a mirror support and a reed, an upper magnetic conduction sheet 3, a flexible Hooke hinge 4, a central magnetic conduction rod 5, a permanent magnet 6, electromagnetic driving units 7 with the same structure, a lower magnetic conduction sheet 8 and a base 9, wherein the electromagnetic driving units are orthogonally arranged in pairs; the reflector 1 is fixed on the shell 2, the shell 2 is fixedly connected with the flexible Hooke hinge 4 through a bolt, the upper magnetic conducting sheet 3 is arranged between the shell 2 and the flexible Hooke hinge 4, a through hole is reserved at the position where the bolt passes, the flexible Hooke hinge 4 is fixedly connected with the base 9 through the bolt, the lower magnetic conducting sheet 8 is arranged between the flexible Hooke hinge 4 and the base 9, a through hole is reserved at the position where the bolt passes, the base 9 is fixedly connected with the shell 2 through the bolt, and the shell 2 is arranged above the base 9; the middle of the lower magnetic conduction sheet 8 is provided with a groove for placing the permanent magnet 6, the central magnetic conduction rod 5 is positioned above the permanent magnet 6, the bottom end of the central magnetic conduction rod 5 is provided with threads and fixedly connected with the lower magnetic conduction sheet 8 through the threads, the permanent magnet 6 is arranged between the central magnetic conduction rod 5 and the lower magnetic conduction sheet 8, the middle is provided with a through hole, and an air gap 10 is formed between the central magnetic conduction rod 5 and the upper magnetic conduction sheet 3; the outer ring of the lower magnetic conduction sheet 8 is provided with four through holes which are arranged in a pairwise orthogonal mode and are used for installing the electromagnetic driving unit 7, the electromagnetic driving unit 7 is fixedly connected with the base 9 through bolts, and the lower magnetic conduction sheet 8 is arranged between the electromagnetic driving unit 7 and the base 9; the stiffness guiding mechanism of the housing 2 and the flexible hook hinge 4 provide rotational stiffness in the x-axis and y-axis directions of the mirror 1, so that the mirror 1 can only achieve two rotational degrees of freedom about the x-axis and the y-axis; meanwhile, constraint rigidity is provided in the Z-axis direction, so that the translational degree of freedom of the reflector 1 is limited;
The four electromagnetic driving units have the same structure, and each electromagnetic driving unit comprises a magnetic conduction rod 7-1 and an excitation coil 7-2; the exciting coil 7-2 is wound between the upper card and the lower card of the magnetic conduction rod 7-1, and a wire slot is formed in the upper card; the top end of the magnetic conduction rod 7-1 and the bottom surface of the lower plane boss of the upper magnetic conduction sheet 3 form a working air gap 11; the upper magnetic conducting sheet 3, the central magnetic conducting rod 5, the lower magnetic conducting sheet 8, the magnetic conducting rod 7-1 and the working air gap 11 form a magnetic flux loop, the permanent magnet 6 generates static symmetrical magnetic flux, the static symmetrical magnetic flux is overlapped with dynamic exciting magnetic flux generated by energizing the exciting coil 7-2, electromagnetic positive stress is generated in the working air gap 11 between the upper magnetic conducting sheet 3 and the magnetic conducting rod 7-1 by the overlapped magnetic flux, the energizing mode of the exciting coil 7-2 is changed, four groups of electromagnetic driving units 7 work cooperatively, two groups of electromagnetic driving units are orthogonally arranged to form torque and act on the upper magnetic conducting sheet 3, the upper magnetic conducting sheet 3 rotates around the x axis and the y axis, the upper magnetic conducting sheet 3 is fixedly connected with the shell 2, and the motion of the upper magnetic conducting sheet is directly transmitted to the shell 2, so that the reflector 1 is pushed, and two rotational degrees of freedom of the reflector 1 around the x axis and the y axis are realized.
Eight strain sensing units are uniformly distributed in four directions of the flexible Hooke hinge 4, one group of eight strain sensing units are adhered to the first curved surface 12 and the second curved surface 13, the steering angle of the reflecting mirror 1 is detected in real time and fed back to a control system, and angle feedback control and angle closed-loop control are realized.
The shell 2, the flexible Hooke hinge 4 and the base 9 are made of titanium alloy materials.
The permanent magnet 6 is made of neodymium iron boron material with high remanence and coercive force; the upper magnetic conducting plate 3, the central magnetic conducting rod 5, the lower magnetic conducting plate 8 and the magnetic conducting rod 7-1 are all made of soft magnetic materials with high magnetic conductivity.
The two-degree-of-freedom deflection adjusting mechanism based on electromagnetic positive stress driving and the control method thereof input current signals with opposite phases to the exciting coils 7-2 of the same group of electromagnetic driving units 7, and the energized exciting coils 7-2 generate exciting magnetic fluxes, wherein the direction of the exciting magnetic fluxes changes along with the direction of the current; the dynamic excitation magnetic flux generated by the excitation coil 7-2 is superposed on the static symmetrical magnetic flux generated by the permanent magnet 6, the superposed magnetic flux acts on the upper magnetic conduction sheet 3, and electromagnetic positive stress is generated on the upper magnetic conduction sheet 3 along the thickness direction of the working air gap 11, and the upper magnetic conduction sheets 3 are orthogonally arranged in pairs to form torque and act on the upper magnetic conduction sheet 3, so that the upper magnetic conduction sheet 3 rotates around the x axis and the y axis, the upper magnetic conduction sheet 3 is fixedly connected with the shell 2, and the movement of the upper magnetic conduction sheet is directly transmitted to the shell 2, thereby pushing the reflector 1, and realizing two rotational degrees of freedom of the reflector 1 around the x axis and the y axis; the eight strain sensing units detect the steering angle of the mirror 1 in real time.
Compared with the prior art, the invention has the following advantages:
1) The invention adopts an electromagnetic force driving mode to realize the two-degree-of-freedom movement of the adjusting mechanism, has large driving force, high structural rigidity and high response speed, and is easy to process.
2) The two-degree-of-freedom adjusting mechanism driven by electromagnetic force is fixedly connected through the flexible hinge, so that the motion transmission loss generated by the electromagnetic driving unit is small, friction is avoided, and the motion precision is high. The sensing measurement unit and the rigidity guide mechanism are integrally designed, so that the stability of the device is improved, the structure is compact, and the space utilization rate is high.
Drawings
Fig. 1 is an exploded view of the present invention.
Fig. 2 is a semi-sectional assembly view of the present invention.
Fig. 3 is an isometric view of the flexible hook hinge of the present invention.
Fig. 4 is a schematic magnetic flux diagram of the present invention.
Detailed Description
The invention is described in further detail below with reference to the drawings and the detailed description.
As shown in fig. 1, the two-degree-of-freedom deflection adjusting mechanism based on electromagnetic normal stress driving comprises a reflecting mirror 1, a housing 2 integrating a mirror support and a reed, an upper magnetic conducting sheet 3, a flexible Hooke hinge 4, a central magnetic conducting rod 5, a permanent magnet 6, electromagnetic driving units 7 with the same structure, a lower magnetic conducting sheet 8 and a base 9, wherein the electromagnetic driving units are orthogonally arranged in pairs; the reflector 1 is fixed on the shell 2, the shell 2 is fixedly connected with the flexible Hooke hinge 4 through a bolt, the upper magnetic conducting sheet 3 is arranged between the shell 2 and the flexible Hooke hinge 4, a through hole is reserved at the position where the bolt passes, the flexible Hooke hinge 4 is fixedly connected with the base 9 through the bolt, the lower magnetic conducting sheet 8 is arranged between the flexible Hooke hinge 4 and the base 9, a through hole is reserved at the position where the bolt passes, the base 9 is fixedly connected with the shell 2 through the bolt, and the shell 2 is arranged above the base 9; the middle of the lower magnetic conduction sheet 8 is provided with a groove for placing the permanent magnet 6, the central magnetic conduction rod 5 is positioned above the permanent magnet 6, the bottom end of the central magnetic conduction rod 5 is provided with threads and fixedly connected with the lower magnetic conduction sheet 8 through the threads, the permanent magnet 6 is arranged between the central magnetic conduction rod 5 and the lower magnetic conduction sheet 8, the middle is provided with a through hole, and an air gap 10 is formed between the central magnetic conduction rod 5 and the upper magnetic conduction sheet 3; four through holes which are arranged in a pairwise orthogonal mode are reserved on the outer ring of the lower magnetic conduction sheet 8 and are used for installing the electromagnetic driving unit 7, the electromagnetic driving unit 7 is fixedly connected with the base 9 through bolts, and the lower magnetic conduction sheet 8 is arranged between the electromagnetic driving unit 7 and the base 9. The stiffness guiding mechanism of the housing 2 and the flexible hook hinge 4 provide rotational stiffness in the x-axis and y-axis directions of the mirror 1, so that the mirror 1 can only achieve two rotational degrees of freedom about the x-axis and the y-axis; and meanwhile, constraint rigidity is provided in the Z-axis direction, so that the translational degree of freedom of the reflector 1 is limited.
As shown in fig. 2, four electromagnetic driving units which are arranged in a group in an orthogonal manner are arranged in the adjusting mechanism, the four electromagnetic driving units have the same structure, and each electromagnetic driving unit comprises a magnetic conduction rod 7-1 and an exciting coil 7-2; the top end of the magnetic conduction rod 7-1 and the bottom surface of the lower plane boss of the upper magnetic conduction sheet 3 form a working air gap 11; the upper magnetic conducting sheet 3, the central magnetic conducting rod 5, the lower magnetic conducting sheet 8, the magnetic conducting rod 7-1 and the working air gap 11 form a magnetic flux loop, the permanent magnet 6 generates static symmetrical magnetic flux, the static symmetrical magnetic flux is overlapped with dynamic exciting magnetic flux generated by energizing the exciting coil 7-2, electromagnetic positive stress is generated in the working air gap 11 between the upper magnetic conducting sheet 3 and the magnetic conducting rod 7-1 by the overlapped magnetic flux, the energizing mode of the exciting coil 7-2 is changed, four groups of electromagnetic driving units 7 work cooperatively, two groups of electromagnetic driving units are orthogonally arranged to form torque and act on the upper magnetic conducting sheet 3, the upper magnetic conducting sheet 3 rotates around the x axis and the y axis, the upper magnetic conducting sheet 3 is fixedly connected with the shell 2, and the motion of the upper magnetic conducting sheet is directly transmitted to the shell 2, so that the reflector 1 is pushed, and two rotational degrees of freedom of the reflector 1 around the x axis and the y axis are realized.
As shown in fig. 3, eight strain sensing units are uniformly distributed in four directions of the flexible hook hinge 4, and are bonded on the first curved surface 12 and the second curved surface 13 in pairs, so as to detect the steering angle of the reflector 1 in real time.
As a preferred embodiment of the present invention, the housing 2, the flexible hook hinge 4 and the base 9 are made of titanium alloy materials.
As a preferred embodiment of the present invention, the permanent magnet 6 is made of a neodymium-iron-boron material with high remanence and coercivity; the upper magnetic conducting plate 3, the central magnetic conducting rod 5, the lower magnetic conducting plate 8 and the magnetic conducting rod 7-1 are all made of soft magnetic materials with high magnetic conductivity.
The working principle of the invention is as follows: as shown in fig. 4, the exciting coil 7a-2 of the electromagnetic driving unit a and the exciting coil 7b-2 of the electromagnetic driving unit b in the x-axis direction are supplied with current signals having opposite phases, and the exciting coil 7a-2 and the exciting coil 7b-2 energized together generate exciting magnetic fluxes having a counterclockwise direction; the dynamic excitation magnetic fluxes generated by the two excitation coils are superposed on the static symmetrical magnetic fluxes generated by the permanent magnet 6, the static symmetrical magnetic fluxes are downwards (-z) in the middle direction of the working air gap above the electromagnetic driving unit a and the electromagnetic driving unit b, the superposed magnetic fluxes act on the upper magnetic conducting sheet 3, and electromagnetic positive stress is generated on the upper magnetic conducting sheet 3 along the thickness direction of the working air gap 11, at the moment, the electromagnetic positive stress directions generated in the working air gap 11 above the electromagnetic driving unit a and the electromagnetic driving unit b are downwards (-z), and the electromagnetic positive stress in the working air gap 11 above the electromagnetic driving unit b is larger than the electromagnetic positive stress in the working air gap 11 above the electromagnetic driving unit a, so that the two positive stresses form a clockwise moment and act on the upper magnetic conducting sheet 3, the upper magnetic conducting sheet 3 is fixedly connected with the shell 2, and the movement of the upper magnetic conducting sheet 3 is directly transmitted to the shell 2, thereby pushing the reflector 1 to realize the anticlockwise rotation of the reflector 1 around the y axis; if the energizing current direction of the exciting coil 7a-2 and the exciting coil 7b-2 is changed, the mirror 1 will rotate clockwise around the y-axis; two electromagnetic drive units controlling the y-axis direction in the same way can realize clockwise or anticlockwise rotation around the x-axis.
The present invention is not disclosed in detail as being common general knowledge to a person skilled in the art.
The above description is merely illustrative of the embodiments of the present invention, and the scope of the present invention is not limited thereto, and any person skilled in the art should understand that the substitution or addition within the scope of the present invention is intended to be covered by the scope of the claims.
Claims (5)
1. Two degree of freedom beat adjustment mechanism based on electromagnetic normal stress drive, its characterized in that: the magnetic mirror comprises a reflecting mirror (1), a shell (2) integrating a mirror support and a rigidity guide mechanism, an upper magnetic conduction sheet (3), a flexible Hooke hinge (4), a central magnetic conduction rod (5), a permanent magnet (6), electromagnetic driving units (7) with the same structure, a lower magnetic conduction sheet (8) and a base (9), wherein the electromagnetic driving units are orthogonally arranged in pairs; the reflector (1) is fixed on the shell (2), the shell (2) is fixedly connected with the flexible Hooke hinge (4) through a bolt, the upper magnetic conduction sheet (3) is arranged between the shell (2) and the flexible Hooke hinge (4), a through hole is reserved at the position where the bolt passes, the flexible Hooke hinge (4) is fixedly connected with the base (9) through the bolt, the lower magnetic conduction sheet (8) is arranged between the flexible Hooke hinge (4) and the base (9), a through hole is reserved at the position where the bolt passes, the base (9) is fixedly connected with the shell (2) through the bolt, and the shell (2) is arranged above the base (9); a groove is reserved in the middle of the lower magnetic conduction sheet (8) and used for placing a permanent magnet (6), a central magnetic conduction rod (5) is positioned above the permanent magnet (6), the bottom end of the central magnetic conduction rod (5) is provided with threads and fixedly connected with the lower magnetic conduction sheet (8) through the threads, the permanent magnet (6) is arranged between the central magnetic conduction rod (5) and the lower magnetic conduction sheet (8), a through hole is reserved in the middle of the permanent magnet, and an air gap (10) is formed between the central magnetic conduction rod (5) and the upper magnetic conduction sheet (3); four through holes which are arranged in a pairwise orthogonal mode are reserved on the outer ring of the lower magnetic conduction sheet (8) and are used for installing the electromagnetic driving unit (7), the electromagnetic driving unit (7) is fixedly connected with the base (9) through bolts, and the lower magnetic conduction sheet (8) is arranged between the electromagnetic driving unit (7) and the base (9); the rigidity guiding mechanism of the shell (2) and the flexible Hooke hinge (4) provide rotational rigidity along the x-axis and y-axis directions of the reflecting mirror (1), so that the reflecting mirror (1) can only realize two rotational degrees of freedom around the x-axis and the y-axis; meanwhile, constraint rigidity is provided in the Z-axis direction, and translational freedom degree of the reflecting mirror (1) is limited;
The four electromagnetic driving units have the same structure, and each electromagnetic driving unit comprises a magnetic conduction rod (7-1) and an excitation coil (7-2); the top end of the magnetic conduction rod (7-1) and the bottom surface of the lower plane boss of the upper magnetic conduction sheet (3) form a working air gap (11); the upper magnetic conducting sheet (3), the central magnetic conducting rod (5), the lower magnetic conducting sheet (8), the magnetic conducting rod (7-1) and the working air gap (11) form a magnetic flux loop, the permanent magnet (6) generates static symmetrical magnetic flux, the static symmetrical magnetic flux is overlapped with dynamic exciting magnetic flux generated by energizing the exciting coil (7-2), electromagnetic force is generated in the working air gap (11) between the upper magnetic conducting sheet (3) and the magnetic conducting rod (7-1) by the overlapped magnetic flux, the energizing mode of the exciting coil (7-2) is changed, four groups of electromagnetic driving units (7) cooperatively work, two groups of electromagnetic driving units are orthogonally arranged to form torque and act on the upper magnetic conducting sheet (3), the upper magnetic conducting sheet (3) rotates around an x axis and a y axis, the upper magnetic conducting sheet (3) is fixedly connected with the shell (2), and the motion of the upper magnetic conducting sheet is directly transmitted to the shell (2), so that the reflecting mirror (1) is pushed, and two deflection motions of the reflecting mirror (1) around the x axis and the y axis are realized.
Eight strain sensing units in the reflector position detection system are uniformly distributed in four directions of the flexible Hooke hinge (4), are arranged on the first curved surface (12) and the second curved surface (13) in a group, and detect the steering angle of the reflector (1) in real time.
2. The two-degree-of-freedom yaw adjustment mechanism based on electromagnetic normal stress driving according to claim 1, wherein: the shell (2), the flexible Hooke hinge (4) and the base (9) are made of titanium alloy materials.
3. The two-degree-of-freedom yaw adjustment mechanism based on electromagnetic normal stress driving according to claim 1, wherein: the permanent magnet (6) is made of neodymium iron boron material with high remanence and coercive force; the upper magnetic conducting plate (3), the central magnetic conducting rod (5), the lower magnetic conducting plate (8) and the magnetic conducting rod (7-1) are made of soft magnetic materials with high magnetic conductivity.
4. The two-degree-of-freedom yaw adjustment mechanism based on electromagnetic normal stress driving according to claim 1, wherein: the fixing bolts are made of non-magnetic materials.
5. The control method of the two-degree-of-freedom yaw adjustment mechanism based on the electromagnetic normal stress driving according to any one of claims 1 to 4, wherein: the exciting coils (7-2) of the same group of electromagnetic driving units (7) are input with current signals with opposite phases, and the energized exciting coils (7-2) generate exciting magnetic fluxes, and the direction of the exciting magnetic fluxes changes along with the direction of the current; the dynamic excitation magnetic flux generated by the excitation coil (7-2) is superposed on the static symmetrical magnetic flux generated by the permanent magnet (6), the superposed magnetic flux acts on the upper magnetic conduction sheet (3) and generates electromagnetic force along the thickness direction of the working air gap (11) on the upper magnetic conduction sheet (3), electromagnetic torque is formed by orthogonal arrangement of two groups and acts on the upper magnetic conduction sheet (3), the upper magnetic conduction sheet (3) rotates around the x axis and the y axis, the upper magnetic conduction sheet (3) is fixedly connected with the shell (2), and the movement of the upper magnetic conduction sheet (3) is directly transmitted to the shell (2), so that the reflector (1) is pushed, and two rotational degrees of freedom of the reflector (1) around the x axis and the y axis are realized; the eight strain sensing units detect the steering angle of the reflecting mirror (1) in real time.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202211528018.XA CN115728936B (en) | 2022-11-30 | 2022-11-30 | Two-degree-of-freedom deflection adjusting mechanism based on electromagnetic normal stress driving and control method |
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| Application Number | Priority Date | Filing Date | Title |
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| CN202211528018.XA CN115728936B (en) | 2022-11-30 | 2022-11-30 | Two-degree-of-freedom deflection adjusting mechanism based on electromagnetic normal stress driving and control method |
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| CN115728936A CN115728936A (en) | 2023-03-03 |
| CN115728936B true CN115728936B (en) | 2024-05-17 |
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Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102486421A (en) * | 2010-12-03 | 2012-06-06 | 西安金和光学科技有限公司 | Six-dimensional force sensing device |
| CN107907992A (en) * | 2017-12-01 | 2018-04-13 | 西安交通大学 | The fast steering mirror actuation mechanism and start method of direct stress electromagnetic drive |
| CN115097593A (en) * | 2022-08-26 | 2022-09-23 | 北京瑞控信科技股份有限公司 | One-dimensional high-speed moving magnetic type flexible support quick reflector |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7019877B2 (en) * | 2003-03-25 | 2006-03-28 | Shpizel Matvey B | Light beam deflector |
| JP7228856B2 (en) * | 2018-10-15 | 2023-02-27 | パナソニックＩｐマネジメント株式会社 | Systems and methods for addressing pumping of thermal interface materials in high power laser systems |
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Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102486421A (en) * | 2010-12-03 | 2012-06-06 | 西安金和光学科技有限公司 | Six-dimensional force sensing device |
| CN107907992A (en) * | 2017-12-01 | 2018-04-13 | 西安交通大学 | The fast steering mirror actuation mechanism and start method of direct stress electromagnetic drive |
| CN115097593A (en) * | 2022-08-26 | 2022-09-23 | 北京瑞控信科技股份有限公司 | One-dimensional high-speed moving magnetic type flexible support quick reflector |
Non-Patent Citations (1)
| Title |
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| 音圈电机驱动型快速控制反射镜机械结构研究;徐新行;王兵;庄昕宇;陈宁;李莹;;长春理工大学学报(自然科学版);20110315(01);全文 * |
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