CN110323919B - Micro-positioning device based on normal stress electromagnetic drive - Google Patents
Micro-positioning device based on normal stress electromagnetic drive Download PDFInfo
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- CN110323919B CN110323919B CN201910536869.0A CN201910536869A CN110323919B CN 110323919 B CN110323919 B CN 110323919B CN 201910536869 A CN201910536869 A CN 201910536869A CN 110323919 B CN110323919 B CN 110323919B
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02K—DYNAMO-ELECTRIC MACHINES
- H02K41/00—Propulsion systems in which a rigid body is moved along a path due to dynamo-electric interaction between the body and a magnetic field travelling along the path
- H02K41/02—Linear motors; Sectional motors
- H02K41/03—Synchronous motors; Motors moving step by step; Reluctance motors
- H02K41/031—Synchronous motors; Motors moving step by step; Reluctance motors of the permanent magnet type
Abstract
The invention discloses a micro-positioning device based on normal stress electromagnetic driving, which comprises a base, an animal ring, a flexible transmission assembly and a plurality of sets of normal stress electromagnetic actuators, wherein the base is provided with an installation cavity; the plurality of sets of normal stress electromagnetic actuators are annularly arranged on the base on the peripheral side of the rotor ring, and each normal stress electromagnetic actuator comprises a stator magnetic yoke and a coil winding wound on the stator magnetic yoke; the periphery of the rotor ring is provided with a plurality of contact heads which are in one-to-one correspondence with the stator magnet yokes, each stator magnet yoke is provided with a through groove, each contact head is positioned in the through groove corresponding to the stator magnet yoke, and a working air gap is formed between each contact head and the through groove. The micro-positioning device based on the normal stress electromagnetic drive has the advantages of simple and compact structure, large output force, high response speed, large movement range, high positioning precision, small rotational inertia and the like.
Description
Technical Field
The invention mainly relates to the technical field of optical imaging, in particular to a micro-positioning device based on normal stress electromagnetic driving.
Background
The high-precision micro-scanning device belongs to one kind of high-precision micro-positioning platform, and is one of indispensable parts in high-precision optical imaging and image stabilizing systems. At present, the driving mode of the scanning device usually adopts a voice coil motor or piezoelectric ceramics. The micro-scanning platform driven by piezoelectric ceramics generally has the advantages of ultrahigh resolution, high bandwidth, high output, high rigidity and the like, but the stroke driven by the piezoelectric ceramics is small, so that the scanning stroke of the piezoelectric ceramics driven micro-scanning platform is limited. The micro-scanning platform driven by the voice coil motor has the advantages of large scanning stroke, low system power consumption, simple structure and the like. Compared with a piezoelectric driving device, the scanning stroke of the voice coil motor with the same volume can be increased by 2-3 orders of magnitude, and meanwhile, higher motion resolution can be guaranteed, but the output of the voice coil motor is smaller, so that in order to improve the overall bandwidth and the dynamic performance of a system, the rigidity in the working direction has to be designed to be in a lower order of magnitude in the structural design, which usually causes the phenomena of loose overall structure, lower system resonant frequency, obvious parasitic motion and the like.
In addition to the above-mentioned problems, the high-precision micro scanning platform cannot simultaneously satisfy the requirements of small volume, high dynamic decoupling performance, no parasitic motion and the like no matter based on voice coil motor driving or piezoelectric ceramic driving. Most known micro scanning platforms can only control the movement in the working direction (X/Y direction), and the movement in the third rotation axis (around Z axis) can only be inhibited by increasing the rotation rigidity of the axis or configuring an additional decoupling module, which means that increasing the rotation rigidity of the third axis and sacrificing the volume of the structure are common solutions for effectively controlling the third axis. The micro scanning platform driven by piezoelectric ceramics cannot meet the rigid requirement of a large stroke, and the voice coil motor is selected as a driving device and cannot meet the requirements of large output, small size and the like.
Disclosure of Invention
The technical problem to be solved by the invention is as follows: aiming at the technical problems in the prior art, the invention provides the micro-positioning device based on the normal stress electromagnetic drive, which has the advantages of simple and compact structure, large output force, high response speed, large movement range, high positioning precision and small rotational inertia.
In order to solve the technical problems, the technical scheme provided by the invention is as follows:
a micro-positioning device based on normal stress electromagnetic driving comprises a base, a rotor ring, a flexible transmission assembly and a plurality of sets of normal stress electromagnetic actuators, wherein an installation cavity is formed in the base, and the rotor ring is installed in the installation cavity through the flexible transmission assembly; the plurality of sets of normal stress electromagnetic actuators are annularly arranged on the base on the peripheral side of the rotor ring, and each normal stress electromagnetic actuator comprises a stator magnetic yoke and a coil winding wound on the stator magnetic yoke; the periphery of the rotor ring is provided with a plurality of contact heads which are in one-to-one correspondence with the stator magnet yokes, each stator magnet yoke is provided with a through groove, each contact head is positioned in the through groove corresponding to the stator magnet yoke, and a working air gap is formed between each contact head and the through groove.
As a further improvement of the above technical solution:
and a permanent magnet is arranged between the adjacent stator magnetic yokes and is used for forming closed-loop bias magnetic flux passing through each stator magnetic yoke and the rotor ring.
And the base is provided with a containing groove for containing the contact head at the position of the through groove of the stator magnet yoke, and a position detection piece is arranged in the containing groove and is used for detecting the movement displacement and the deflection angle of the contact head so as to adjust the exciting current of the coil winding to form closed-loop control.
The position detection piece is an inductance type micro-displacement position sensor or a capacitance type micro-displacement position sensor and is positioned on the accommodating grooves on two sides of the contact head.
The flexible transmission assembly comprises an installation piece and an elastic connection piece, the installation piece is arranged in parallel with the elastic connection piece, the installation piece is installed on the base on the peripheral side of the installation cavity, one end of the elastic connection piece is connected with the installation piece, and the other end of the elastic connection piece is connected with the peripheral side of the rotor ring.
The mounting piece and the base are integrally formed.
The base is provided with a stator magnetic yoke slot and a coil winding slot, the stator magnetic yoke is installed in the stator magnetic yoke slot, and the coil winding is installed in the coil winding slot.
The four sets of the normal stress electromagnetic actuators are uniformly distributed on the base on the peripheral side of the rotor ring and are used for forming movement on two degrees of freedom on the plane where the base is located and rotary movement in the plane where the base is located.
The stator magnet yoke and the rotor ring are both made of laminated steel or soft magnetic alloy.
The base is made of stainless steel, titanium alloy, aluminum alloy or invar alloy.
Compared with the prior art, the invention has the advantages that:
(1) the micro-positioning device based on the normal stress electromagnetic drive adopts the linear normal stress electromagnetic actuator as the driving device of the power ring, has simple and compact structure, large output force, high response speed, large motion range, high positioning precision and small rotational inertia, and integrates the advantages of the voice coil motor and the piezoelectric ceramic drive.
(2) According to the micro-positioning device based on the normal stress electromagnetic drive, the permanent magnet is arranged between the adjacent stator magnet yokes and is used for forming closed-loop bias magnetic flux passing through each stator magnet yoke and the rotor ring, the closed-loop bias magnetic flux is matched with excitation magnetic flux, and the linearity of resultant force output in a limited range is guaranteed.
(3) According to the micro-positioning device based on the normal stress electromagnetic drive, the moving sub-ring and the flexible transmission assembly are fixed together, so that the micro-positioning device has the characteristics of no friction, no backlash, no assembly, no lubrication and the like, and can meet the performance requirements of a micro-positioning platform on high positioning accuracy, high and low speed stability, high accuracy retentivity and the like.
(4) The micro-positioning device based on the normal stress electromagnetic drive adopts the position detection piece to detect the moving displacement of the contact head on the moving sub-ring in real time and feed back the moving displacement to the control unit, and the control unit outputs the exciting current of the coil winding according to the moving displacement for closed-loop control of the position, so that the positioning precision is further improved.
(5) The micro-positioning device based on the normal stress electromagnetic drive is integrated on a final lens in an optical path of an imaging system, and the relative position of an image of a scenery relative to an infrared detector array is adjusted by quickly and accurately adjusting the position of the final lens in the optical path, so that the basic functions of sub-pixel image micro-scanning and sub-pixel precision image stabilization are achieved; the micro-positioning device can be conveniently integrated with the existing photoelectric stabilization platform, is installed on various mobile carriers, reduces the frequency aliasing of images by a positioning method on the premise of not increasing the pixel size of an imaging detector, improves the spatial sampling rate of an imaging system, and realizes super-resolution infrared imaging and ultra-precise image stabilization.
Drawings
Fig. 1 is a schematic perspective view of the present invention.
Fig. 2 is a schematic front view of the present invention.
Fig. 3 is a schematic perspective view of the present invention (with the cover removed).
Fig. 4 is a schematic front view of the present invention (with the cover removed).
Fig. 5 is a rear view structural diagram of the present invention.
FIG. 6 is a schematic view of the bias flux and excitation flux of the present invention.
The reference numbers in the figures denote: 1. a base; 101. a mounting cavity; 102. a cover body; 103. accommodating grooves; 2. an animal ring; 201. a contact head; 3. a flexible drive assembly; 301. mounting a sheet; 302. an elastic connecting sheet; 4. a positive stress electromagnetic actuator; 401. a stator yoke; 4011. a through groove; 402. a coil winding; 403. a working air gap; 5. a permanent magnet; 6. a position detecting member.
Detailed Description
The invention is further described below with reference to the figures and the specific embodiments of the description.
As shown in fig. 1 to 4, the micro positioning device based on normal stress electromagnetic driving of the present embodiment includes a base 1, a rotor ring 2, a flexible transmission assembly 3, and a plurality of sets of linear normal stress electromagnetic actuators 4, wherein the base 1 is provided with an installation cavity 101 at the middle portion, the rotor ring 2 is installed in the installation cavity 101 through the flexible transmission assembly 3, and the rotor ring 2 is used for installing an optical lens; a plurality of linear positive stress electromagnetic actuators 4 are annularly arranged on the base 1 on the peripheral side of the rotor ring 2; each linear positive stress electromagnetic actuator 4 includes a stator yoke 401 and a coil winding 402 wound on the stator yoke 401; a plurality of contact heads 201 corresponding to the stator yokes 401 one by one are arranged on the periphery of the rotor ring 2, through grooves 4011 are arranged on the stator yokes 401, the contact heads 201 are located in the through grooves 4011 of the corresponding stator yokes 401, and working air gaps 403 are formed between the contact heads 201 and the through grooves 4011. When the coil winding 402 is fed with an exciting current, magnetic fluxes with different sizes are generated in the working air gaps 403 on the two sides of the contact 201 to form electromagnetic resultant force in a certain direction, and displacement of the rotor ring 2 in a preset direction is finally realized under the mutual cooperation of the electromagnetic resultant force in each set of linear normal stress electromagnetic actuators 4.
The micro-positioning device based on the normal stress electromagnetic drive adopts the linear normal stress electromagnetic actuator 4 as the driving device of the power ring, has simple and compact structure, large output force, high response speed, large movement range, high positioning precision and small rotational inertia, and integrates the advantages of the voice coil motor and the piezoelectric ceramic drive.
The micro-positioning device based on the normal stress electromagnetic drive is integrated on a final lens in an optical path of an imaging system, and the relative position of an image of a scenery relative to an infrared detector array is adjusted by quickly and accurately adjusting the position of the final lens in the optical path, so that the basic functions of sub-pixel image micro-scanning and sub-pixel precision image stabilization are achieved; the micro-positioning device can be conveniently integrated with the existing photoelectric stabilization platform, is installed on various mobile carriers, reduces the frequency aliasing of images by a positioning method on the premise of not increasing the pixel size of an imaging detector, improves the spatial sampling rate of an imaging system, and realizes super-resolution infrared imaging and ultra-precise image stabilization.
In the present embodiment, the number of the linear normal stress electromagnetic actuators 4 is four, and the linear normal stress electromagnetic actuators 4 are uniformly distributed on the base 1 on the peripheral side of the rotor ring 2, specifically, the linear normal stress electromagnetic actuators 4 are located on the upper, lower, left, and right sides of the rotor ring 2, as shown in fig. 4, wherein two linear normal stress electromagnetic actuators 4 located in the X-axis direction are a group, and two linear normal stress electromagnetic actuators 4 located in the Y-axis direction are a group. Specifically, Excitation magnetic flux (Excitation flux) generated after the coil winding 402 is fed with the Excitation current forms a closed loop along the stator yoke 401 (as shown by a white solid line in fig. 6), the coil winding 402 generates alternating Excitation magnetic flux (Excitation flux) in each working air gap 403, and the direction and magnitude of the Excitation current are adjusted to control the magnetic flux directionThe direction and the size of the rotor ring 2 are controlled accurately. As shown in FIG. 6, when the two coil windings 402 in the X-axis direction are energized with the excitation current in the direction shown in FIG. 6, due to the superposition of the magnetic fields, the magnetic flux in the upper left and upper right working air gaps 403 increases, the magnetic flux in the lower left and lower right working air gaps 403 decreases, and the two working air gaps 403 on the left and two working air gaps 403 on the right will generate a resultant electromagnetic force F in the positive Y-axis directionY+The resultant electromagnetic force generates a thrust force in the positive direction of the Y axis, and the thrust force pushes the rotor ring 2 to generate corresponding motion displacement + Y, so that the rotor ring 2 moves. Of course, in other embodiments, the excitation current may be applied to the two coil windings 402 in the Y-axis direction, and finally the resultant electromagnetic force in the positive X-axis direction may be formed. Alternatively, in addition to this, an excitation current is applied to one of the coil windings 402 in the X-axis direction, thereby forming a rotational driving force in the XY plane (e.g., θ in fig. 6)zDirection). Of course, the number of the linear normal stress electromagnetic actuators 4 is not limited to this, and may be set to three, five or more, and the displacement and rotation of the rotor ring 2 in different directions can be realized by the mutual cooperation between the linear normal stress electromagnetic actuators 4.
Further, a permanent magnet 5 (e.g., a permanent magnet) is disposed between adjacent stator yokes 401 for forming a closed-loop bias flux (Biasing flux) passing through each stator yoke 401 and the mover ring 2. The bias magnetic flux generated by the permanent magnet 5 is shown by a black dotted line in fig. 6, the permanent magnet 5 generates permanent magnet bias magnetic flux in the working air gaps 403, and if the symmetry of the magnetic circuit is not considered, the bias magnetic flux in all the working air gaps 403 is equal in magnitude, and at this time, the bias driving force borne by the mover ring 2 is zero; the bias magnetic flux generated by the permanent magnet 5 is matched with the excitation magnetic flux, so that the linearity of resultant force output in a limited range is ensured. The permanent magnet 5 material is selected from samarium cobalt, neodymium iron boron and other high residual magnetic induction strength and high coercivity materials.
In the embodiment, the flexible transmission part is based on the principle of a compliant mechanism, and a 2-degree-of-freedom plane guide mechanism, namely a right-angle compliant beam parallel structure, is designed, and specifically comprises an installation sheet 301 and an elastic connection sheet 302, wherein the installation sheet 301 and the elastic connection sheet 302 are arranged in parallel, the installation sheet 301 is installed on the base 1 on the peripheral side of the installation cavity 101, one end of the elastic connection sheet 302 is connected with the elastic connection sheet 302, the other end of the elastic connection sheet 302 is connected with the peripheral side of the rotor ring 2, and the flexible transmission part is simple in structure. The flexible transmission assembly 3 has the characteristics of no friction, no backlash, no assembly, no lubrication and the like, and can meet the performance requirements of a micro-positioning platform on high positioning precision, high and low speed stability, high precision retentivity and the like.
In this embodiment, the base 1 is provided with an accommodating groove 103 for accommodating the contact 201 at the position of the through groove 4011 of the stator yoke 401, and a position detecting member 6 is provided in the accommodating groove 103, and is configured to detect a moving distance and a deflection angle of the contact 201 to adjust an exciting current of the coil winding 402 to form closed-loop control. The position detecting element 6 is an inductive micro-displacement position sensor, and is respectively located on the receiving slots 103 on both sides of the contact 201 to directly measure or measure the displacement and deflection angle of the contact 201 in a differential mode. As shown in fig. 3, the position detector 6 is integrated into the base 1 by using an inductive micro-displacement position sensor in combination with the structure of the base 1, so as to ensure a small overall size and a high measurement accuracy. The position detector 6 does not interfere with each magnetic flux, and can simultaneously and accurately measure the displacement of the contact 201 in the X-axis and Y-axis directions and the rotation angle in the XY plane. Of course, in other embodiments, a capacitive micro-displacement position sensor or other form of sensor may also be used, and is not limited herein as long as the sensor achieves the above functions.
In this embodiment, after the stress electromagnetic actuator 4 generates electromagnetic resultant force along a predetermined direction, the electromagnetic resultant force acts on the flexible transmission assembly 3 through the mover ring 2, the flexible transmission assembly 3 elastically deforms under the action of the electromagnetic resultant force and provides a restoring moment, and after the restoring moment is balanced with the electromagnetic resultant force, the end lens on the mover ring 2 outputs a predetermined movement displacement or angle, thereby achieving the purpose of adjusting the position of the light beam. At the moment, the inductive micro-displacement position sensor detects the moving displacement or angle of the contact 201 on the rotor ring 2 in real time and feeds the moving displacement or angle back to the control unit, and the control unit outputs the exciting current of the coil winding 402 according to the moving displacement or angle for closed-loop control of the position, so that the positioning precision is further improved.
In the embodiment, the stator magnetic yoke 401 and the rotor ring 2 are formed by stacking laminated steel (L) or are formed by processing Soft magnetic alloys (Soft magnetic composites), the rotor ring 2 is required to ensure processing precision and assembling precision and ensure a working gap of the rotor ring 2 between the stator magnetic yoke 401, the flexible transmission assembly 3 is processed by wire cutting slow-moving wires, the coil winding 402 is formed by wrapping a copper core or a silver core by an insulating material, the coil winding 402 is wound around the stator magnetic yoke 401 side by side layer and is mutually insulated, the number of turns and the external dimension of the winding are ensured during winding and are not larger than a specified dimension, and the insulating material is a high-grade high-temperature-resistant material and is ensured not to be melted under the condition of relative high temperature.
In this embodiment, the base 1 is a main body for assembling components (including the coil winding 402, the stator yoke 401, the permanent magnet 5, and the like) and connecting external systems in a matching manner (such as external screw via holes, mounting flanges, and the like), and is made of a titanium alloy material; the base 1 is provided with a stator yoke slot and a coil winding slot, the stator yoke 401 is installed in the stator yoke slot, the coil winding 402 is installed in the coil winding slot and is encapsulated by the cover 102, wherein a gap exists between the coil winding 402 and the coil winding slot of the base 1, and structural interference is avoided. In addition, the base 1 and the rotor ring 2 are integrally designed through the flexible transmission assembly 3, so that the motion positioning precision of the rotor ring 2 is guaranteed, and the later-stage assembly difficulty is reduced.
The above is only a preferred embodiment of the present invention, and the protection scope of the present invention is not limited to the above-mentioned embodiments, and all technical solutions belonging to the idea of the present invention belong to the protection scope of the present invention. It should be noted that modifications and embellishments within the scope of the invention may be made by those skilled in the art without departing from the principle of the invention.
Claims (9)
1. The micro-positioning device based on the normal stress electromagnetic driving is characterized by comprising a base (1), a rotor ring (2), a flexible transmission assembly (3) and a plurality of sets of normal stress electromagnetic actuators (4), wherein the base (1) is provided with an installation cavity (101), and the rotor ring (2) is installed in the installation cavity (101) through the flexible transmission assembly (3); a plurality of sets of normal stress electromagnetic actuators (4) are annularly arranged on the base (1) on the peripheral side of the rotor ring (2), and each normal stress electromagnetic actuator (4) comprises a stator magnetic yoke (401) and a coil winding (402) wound on the stator magnetic yoke (401); a plurality of contact heads (201) which are in one-to-one correspondence with the stator magnet yokes (401) are arranged on the peripheral side of the rotor ring (2), a through groove (4011) is formed in each stator magnet yoke (401), each contact head (201) is located in the through groove (4011) corresponding to the stator magnet yoke (401), and a working air gap (403) is formed between each contact head (201) and the through groove (4011);
the flexible transmission assembly (3) comprises an installation piece (301) and an elastic connecting piece (302), the installation piece (301) and the elastic connecting piece (302) are arranged in parallel, the installation piece (301) is installed on the base (1) on the peripheral side of the installation cavity (101), one end of the elastic connecting piece (302) is connected with the installation piece (301), and the other end of the elastic connecting piece is connected with the peripheral side of the rotor ring (2).
2. A micro positioning device based on a positive stress electromagnetic drive according to claim 1, characterized in that a permanent magnet (5) is arranged between adjacent stator yokes (401) for forming a closed loop bias flux through each stator yoke (401) and mover ring (2).
3. The micro positioning device based on the normal stress electromagnetic driving as claimed in claim 1, wherein a receiving groove (103) for receiving the contact head (201) is disposed on the base (1) at a position of the through groove (4011) of the stator yoke (401), and a position detecting member (6) is disposed in the receiving groove (103) for detecting a movement displacement and a deflection angle of the contact head (201) to adjust an excitation current of the coil winding (402) to form a closed-loop control.
4. The micro positioning device based on positive stress electromagnetic driving according to claim 3, wherein the position detecting element (6) is an inductive micro displacement position sensor or a capacitive micro displacement position sensor, and is located on the accommodating groove (103) at two sides of the contact head (201).
5. A positive-stress-electromagnetic-drive-based micropositioning device according to claim 1, wherein the mounting tab (301) is integrally formed with the base (1).
6. A micropositioning device based on a positive-stress electromagnetic drive according to any of claims 1 to 4, wherein a stator yoke slot, in which the stator yoke (401) is mounted, and a coil winding slot, in which the coil winding (402) is mounted, are provided on the base (1).
7. A micropositioning device based on a positive-stress electromagnetic drive according to any of claims 1 to 4, characterized in that the number of positive-stress electromagnetic actuators (4) is four, evenly distributed on the base (1) on the periphery of the rotor ring (2), for creating a movement in two degrees of freedom in the plane of the base (1) and a rotational movement in the plane of the base (1).
8. A micro positioning device based on a positive stress electromagnetic drive according to any of the claims 1 to 4, characterized in that the stator yoke (401) and the mover ring (2) are both made of laminated steel or soft magnetic alloy.
9. A micropositioning device based on a positive-stress electromagnetic drive according to any of claims 1 to 4, wherein the base (1) is a base made of stainless steel, titanium alloy, aluminum alloy or invar alloy.
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| CN201910536869.0A CN110323919B (en) | 2019-06-20 | 2019-06-20 | Micro-positioning device based on normal stress electromagnetic drive |
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| CN201910536869.0A CN110323919B (en) | 2019-06-20 | 2019-06-20 | Micro-positioning device based on normal stress electromagnetic drive |
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| CN110323919B true CN110323919B (en) | 2020-07-10 |
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| CN113175871B (en) * | 2021-04-29 | 2022-10-04 | 南京理工大学 | Positioning platform equipment |
| CN114253004A (en) * | 2021-12-26 | 2022-03-29 | 中国人民解放军国防科技大学 | Linear two-dimensional translation normal stress type electromagnetic micro-motion platform |
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| CN1838330B (en) * | 2006-04-21 | 2011-06-29 | 清华大学 | Electromagnetic force parallel-connection driving type plane 3-DOF micropositioner |
| JP5513834B2 (en) * | 2009-10-13 | 2014-06-04 | 台湾東電化股▲ふん▼有限公司 | Lens drive device |
| JP5079049B2 (en) * | 2009-11-17 | 2012-11-21 | 台湾東電化股▲ふん▼有限公司 | Lens drive device |
| CN107659208B (en) * | 2017-10-19 | 2019-02-26 | 西安交通大学 | Two-dimensional linear moving-iron type micro-angular displacement electromagnetic activation device and its actuation method |
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