JP5305380B2 - Actuator, positioning device - Google Patents

Description

  The present invention relates to an impact-type actuator that moves a moving member by oscillating the electromechanical transducers at different expansion and contraction speeds, and a positioning device using the actuator, and moves in the XY direction on a plane. The present invention relates to a drive mechanism capable of self-propelling.

  Conventionally, as a positioning device on a plane such as an XY table, driving by an electromagnetic method such as a stepping motor or a voice coil motor has been generally used.

  However, along with the recent miniaturization of electronic devices, there has been active development for downsizing the positioning device itself by using an electromechanical transducer element such as a piezoelectric element as an actuator for the drive system.

  For example, as disclosed in Patent Document 1 and Patent Document 2, there is a structure using a method called impact driving in which a driven member is moved by vibrating a piezoelectric element with different expansion and contraction speeds. It is disclosed.

Japanese Patent No. 3842993 JP 2006-81348 A

  However, the methods disclosed in Patent Documents 1 and 2 have a problem that the movable range of the driven member is limited by the length of the driving member, and the operation stroke cannot be increased. Further, since an elastic member such as a leaf spring is required to frictionally engage the driving member and the driven member, the structure becomes complicated and it is difficult to reduce the size. Further, in order to be movable in two dimensions of XY, two driving members and driven members are necessary for the fixed member (see FIG. 9 of Patent Document 2), and the thickness of the driving device is reduced. It was difficult to do.

  The present invention has been made to solve the above-described problems of the prior art. Specifically, the XY can increase the movement stroke and reduce the height of the apparatus with a simple structure. It is an object to provide an actuator that can move in two dimensions.

  According to the present invention, a driving body in which one end in each displacement direction of at least two electromechanical conversion elements is fixed to a magnet, and a driven body in which the other end in the displacement direction of the electromechanical conversion elements is fixed. A member and a fixing member that can be attracted to the magnet by a magnetic force, and the driven member and the driving body are made to vibrate by causing the electromechanical conversion element to vibrate with different expansion and contraction speeds. An actuator is obtained that moves relative to the fixed member.

  Further, according to the present invention, at least two electromechanical transducer elements each having one end in the displacement direction fixed to the magnet, and the other end of the electromechanical transducer element in the displacement direction are fixed. The driven member is composed of a fixed member and a driven member that can be attracted to the magnet by a magnetic force, and the driven member is caused to vibrate by varying the expansion and contraction speeds of the electromechanical conversion element. And an actuator that moves relative to the fixed member.

  In the actuator, the actuator includes an approximately rectangular parallelepiped magnet and an electromechanical conversion element in which one end in a displacement direction is fixed to each of two orthogonal surfaces of the magnet. can get.

  Further, in the above actuator, an actuator capable of more stable operation can be obtained by using a plurality of the driving bodies.

  In this case, the driven member or the fixing member to which the other end in the displacement direction of the electromechanical conversion element is fixed is obtained by cutting two diagonal portions from the flat plate into a rectangular shape as a portion where the driving body is arranged. Each of the two parts having a shape and cut out may have one end in the displacement direction of the electromechanical transducer element fixed to two orthogonal surfaces.

  In the actuator, the magnet may have a triangular cross-sectional shape, and one end of the electromechanical conversion element in the displacement direction may be fixed to three surfaces constituting the triangle of the magnet.

  Furthermore, according to the present invention, in each of the actuators described above, an actuator is obtained in which the driven member is supported by the fixing member via an elastic member.

  Furthermore, according to the present invention, a positioning device having any one of the actuators described above can be obtained.

  In the actuator according to the first aspect, at least two electromechanical transducer elements each having one end in the displacement direction fixed to the magnet and the other end of the electromechanical transducer element in the displacement direction are fixed. The driven member and the driving member are made to vibrate with different speeds of expansion and contraction of the electromechanical conversion element. Since the body is moved with respect to the fixed member, it is possible to move in a two-dimensional manner on the XY plane with a single driving body, and it is possible to reduce the size of the apparatus with respect to the conventional method. In addition, since the movable body can be moved two-dimensionally, the apparatus can be reduced in height. Furthermore, since the impact drive is performed using the attractive force between the magnet and the fixed member, a friction imparting member such as a leaf spring is not required, which simplifies the structure and reduces the size and costs. can get.

  In the actuator according to the first aspect, the driven member and the driving body move relative to the fixed member that can be attracted to the magnet. In the present invention, the driven member and the driving body can be attracted to the magnet. A structure in which the member moves is also possible.

  That is, in the actuator according to claim 2, at least two electromechanical transducer elements, each having one end in the displacement direction fixed to the magnet, and the other end of the electromechanical transducer element in the displacement direction are fixed. And a driven member that can be attracted to the magnet by a magnetic force. The driven member and the electromechanical conversion element are vibrated at different speeds of expansion and contraction. The driving body is moved with respect to the fixing member. Therefore, it is possible to move two-dimensionally on the XY plane with one driver.

  In the actuator according to claim 3, the shape of the magnet is a substantially rectangular parallelepiped, and one end in the displacement direction of the electromechanical conversion element is fixed to each of two orthogonal surfaces of the magnet, and the electromechanical conversion Since it is composed of a driven member to which the other end in the displacement direction of the element is fixed and a fixing member that can be attracted to the magnet by a magnetic force, the structure can be further simplified.

  In the actuator according to the fourth or fifth aspect, since a plurality of driving bodies are provided, the movement of the driven member can be stabilized, and an actuator having a large thrust and excellent position controllability can be obtained. Further, according to the prior art, the driven member can move only in the axial direction of the driving member. However, in the actuator of the present invention, by independently controlling a plurality of driving bodies, on the XY plane. An actuator capable of rotating is obtained.

  The actuator according to claim 6 is characterized in that the cross-sectional shape of the magnet is a triangle, and one end in the displacement direction of the electromechanical transducer is fixed to each of three surfaces constituting the triangle of the magnet. Therefore, the driven member can be moved in three directions with one driving body.

  In the actuator according to the seventh aspect, since the driven member is supported by the fixing member via the elastic member, an actuator excellent in translation on the XY plane can be obtained.

  According to the positioning device of the eighth aspect, since the positioning device having any one of the actuators described above is obtained, the structure of the positioning device can be simplified.

  Hereinafter, embodiments of the present invention will be described with reference to the drawings.

  FIG. 1 is a schematic diagram conceptually showing only the actuator driving body 101. FIG. 1 (a) relates to a side view, and FIG. 1 (b) shows a rightward direction indicated by a white arrow in FIG. 1 (a). It is related with the end view from.

  The driving body 101 has an approximately rectangular parallelepiped magnet 3 and one end in the displacement direction of the piezoelectric ceramic elements 1 and 2 made of a laminated piezoelectric ceramic as an electromechanical conversion element on each of two orthogonal surfaces of the magnet 3. Etc. are used for bonding.

  With respect to the polarity of the magnet 3, referring to FIG. 1 (a), the displacement direction of the piezoelectric ceramic elements 1 and 2 (directions A 1 and A 2 in FIG. 1) and the vertical direction (direction A 3 in FIG. 1) are set. This is to increase the suction force with the fixing member 5 as will be described later with reference to FIG. 2, and the polarity may be changed to another form depending on the required suction force.

  The material of the magnet 3 is not particularly limited, but it is preferable to use a neodymium or samarium-based material that can generate a strong attractive force when downsizing.

  As for the piezoelectric ceramic elements 1 and 2, a material and a structure can be appropriately selected as long as a predetermined displacement can be generated. However, a multilayer piezoelectric ceramic is used because it is small and the driving voltage can be reduced.

  Hereinafter, several examples will be given and the actuator of the present invention will be specifically described with reference to the drawings.

  2A and 2B show a basic configuration of the actuator 201 according to the first embodiment of the present invention. FIG. 2A shows an external plan view from the top surface direction, and FIG. 2B shows a side view (A4 direction). (Arrow view).

  The piezoelectric ceramic elements 1 and 2 are piezoelectric laminated ceramics having a cross-sectional dimension of 0.9 mm in length × 0.9 mm in width and 1.2 mm in height, and generate a displacement of approximately 0.5 μm with respect to an applied voltage of 30V. Something is used. The displacement generation direction is the stacking direction (directions A1 and A2 in FIG. 2).

  A neodymium magnet having a cross-sectional dimension of 1.2 mm x 1.0 mm and a height of 1.5 mm is bonded to one end face side of the piezoelectric ceramic elements 1 and 2 with a thermosetting epoxy resin. Thus, the driving body 101 was obtained. The magnetization direction of the magnet 3 was the height direction (A3 direction).

  The other ends of the piezoelectric ceramic elements 1 and 2 in the displacement direction are bonded to the driven member 4 using an epoxy resin or the like, and are attracted to the fixed member 5 made of a material that can be attracted to the magnet by the magnetic force of the magnet 3. ing.

  The piezoelectric ceramic elements 1 and 2 are connected to a power source (not shown) for applying a driving voltage.

  The material of the fixing member 5 is not particularly limited as long as it can be attracted to the magnet 3, but here, SUS430 is used. Further, the shape of the fixing member 5 can be arbitrarily set as long as the surface on which the magnet 3 is attracted is flat, but here, it is a flat plate of 20 mm long × 20 mm wide × 1 mm high. In this case, the attractive force between the magnet 3 and the fixing member 5 was about 0.49N.

  In the actuator 201 of the present invention, the driving body 101 and the driven member 4 move with respect to the fixed member 5, but the movement strokes in the case of Example 1 are respectively in the X direction and Y direction in FIG. About 15 mm. However, the movement stroke is not limited to the first embodiment, and can be further increased by increasing the vertical and horizontal dimensions of the fixing member 5.

  As will be described later, since the actuator 201 of the present invention uses the vibration generated by the piezoelectric ceramic elements 1 and 2 as a driving source, it is necessary to transmit the vibration to the magnet, but the weight of the driven member 4 is the weight of the magnet 3. By making it sufficiently larger, vibration can be efficiently transmitted to the magnet 3. Therefore, the material and dimensions of the driven member 4 may be appropriately designed and determined according to the attractive force of the magnet 3 and the amount of displacement generated by the piezoelectric ceramic elements 1 and 2. Here, as the driven member 4, the length is 5.0 mm × width 5.0 mm × width 2 mm, the thickness is 1.0 mm, and the material is aluminum. In this case, the weight was about three times that of the magnet 3.

  In FIG. 2, the driven member 4 and the fixed member 5 are in contact with each other. However, if the weight of the driven member 4 and the piezoelectric ceramic elements 1 and 2 can be supported by the magnetic force of the magnet 3, they are brought into contact with each other. There is no need. Although there is no need to limit the magnetizing direction of the magnet 3, it is set to the A3 direction shown in FIGS. 1 and 2 in order to increase the attractive force.

  In this actuator 201, the driven member 4 and the driving body 101 are made to vibrate with respect to the fixed member 5 by causing the piezoelectric ceramic element 1 or 2 to vibrate with different expansion and contraction speeds. In the expansion / contraction direction (directions A1 and A2 in FIG. 2).

  Hereinafter, the operation of the drive mechanism of the actuator 201 according to the first embodiment will be described in the case where the piezoelectric ceramic element 1 is driven. When the piezoelectric ceramic element 2 is driven, the operation principle is the same except that the moving direction is different by about 90 degrees.

  FIG. 3 shows a driving voltage with respect to time of the piezoelectric ceramic element 1 in the first embodiment, a displacement amount of the piezoelectric ceramic element 1, a driven member 4 and a driving body 101 (in FIG. 3, the driven member 4 and the driving body 101 are summarized. FIG. 6 is a timing chart showing the relationship of the movement amount to the “moving body”.

  When the actuator 201 of Example 1 is used, the resonance frequency of the piezoelectric ceramic element 1 is about 500 kHz or more. Therefore, when the frequency of the AC applied voltage (drive voltage) to the piezoelectric ceramic element 1 is about 50 kHz or less, the harmonic component Therefore, the input voltage waveform and the output displacement waveform are similar to each other.

  As shown in FIG. 3, when the time t1 and t2 having different slopes are set so as to satisfy the relationship of t1> t2 with respect to the triangular input voltage (drive voltage) waveform, the displacement amount of the piezoelectric ceramic element 1 is the time t1. It slowly grows over time and shrinks rapidly at time t2. Here, if the time t2 is set so that an acceleration equal to or greater than the maximum static friction force generated between the fixing member 5 and the magnet 3 is obtained, the magnet 3 is attracted to the fixing member 5 at the time t1, and the piezoelectric element is Only the driven member 4 moves due to the elongation of the ceramic element 1, and slip occurs between the fixed member 5 and the magnet 3 at time t2. For this reason, the driven member 4 and the driving body 101 extend in the extending direction of the piezoelectric ceramic element 1 relative to the fixed member 5 by the driving voltage for one cycle by the amount of extension during the time t1 (Y-axis direction in FIG. 2). Move to. If this is repeated continuously, the driven member 4 and the driving body 101 move continuously in one direction with respect to the fixed member 5.

  Therefore, if the duty ratio is defined by a relational expression of duty ratio = t1 / (t1 + t2) using time t1 and time t2, the speed and direction of movement can be controlled by changing the duty ratio.

  Here, the case where the waveform of the input voltage (driving voltage) having a triangular wave shape is given as shown in FIG. 3 is explained, but the input voltage (driving voltage) having a rectangular wave shape whose frequency is adjusted according to the shape of each component is described. Even if it is applied, the piezoelectric ceramic elements 1 and 2 can be similarly driven.

  By applying the driving voltage described above to the piezoelectric ceramic element 1 and the piezoelectric ceramic element 2, the driven member 4 and the driving body 101 can be moved in the expansion / contraction direction of each piezoelectric ceramic element. That is, a self-propelled actuator that can translate in two dimensions in the XY direction on the plane of the fixing member 5 can be obtained.

  The actuator 201 can be used as a positioning device on a plane such as an XY table.

  Here, one of the modifications of the first embodiment will be briefly described.

  FIG. 7 shows a basic configuration of an actuator 303 as a modified example of the first embodiment in the present invention. By fixing the driving body to a fixing member, a cover that can be attracted to the magnet with respect to the driving body. This is a case where the driving body moves. The figure (a) is related with a side view, The figure (b) is related with the top view from the upper surface direction in the A7-A7 section in (a).

  First, the manufacturing method (and structure) of the actuator 303 will be described.

  First, the driving body 105 was manufactured using the same piezoelectric ceramic elements 311 and 312 and the magnet 313 as those in the first embodiment.

  Next, a fixing member 314 having the same shape as the driven member 4 of Example 1 was prepared, and the driving body 105 was bonded to the fixing member 314 using an epoxy resin.

  Further, the fixing member 314 is bonded to the stationary member 315.

  Next, a flat plate having a material of SUS430 and a shape of 20 mm × 20 mm × thickness 0.5 mm was attracted to the magnet 313 as the driven member 316.

  Thus, the actuator 303 shown in FIG. 7 was obtained.

  Next, the operation of the actuator 303 will be described.

  When the same voltage waveform as in the first embodiment is applied to the piezoelectric ceramic elements 311 and 312, the driving body 105 does not move relative to the stationary member 315, and the driven member 316 moves. That is, in the first embodiment, the driving body 101 moves along with the driven member 4 while moving relative to the fixed member 5, whereas in the case of the actuator shown in FIG. 7, only the driven member 316 moves.

  In the actuator 303 of FIG. 7, the fixing member 314 is bonded to the stationary member 315, but the stationary member 315 becomes unnecessary by increasing the weight of the fixing member 314 compared to the driven member 316. In this case, the weight and dimensions of the fixing member 314 may be appropriately designed in consideration of the weight of the driven member 316.

  In the actuator 303 of FIG. 7, the driving body 105 and the driven member 316 are relatively equivalent to the relationship between the driving body 101 and the fixing member 5 of the first embodiment (FIG. 2), but are self-propelled actuators. is not. However, in FIG. 7, since the ceramic elements 311 and 312 are fixed to the stationary member 315, the arrangement of lead wires and the like for applying a voltage as compared with the actuator of the first embodiment (FIG. 2). There is an advantage that becomes easier.

  The above describes the case where the drive body is configured using two piezoelectric ceramic elements with the magnet shape being a substantially rectangular parallelepiped. However, the shape of the magnet and the number of piezoelectric ceramic elements are not limited to the above, and are necessary. Accordingly, the effect of the present invention can also be obtained by arbitrarily setting the magnet shape and using at least two piezoelectric ceramic elements. For example, the effect of the present invention can be obtained even when three piezoelectric ceramic elements are used with a triangular magnet cross section as in the driving body 104 of FIG.

  In the case of FIG. 6, the piezoelectric ceramic elements 20, 21, 22 are provided on three surfaces constituting the triangle, respectively, and are movable in three directions along the displacement direction of the piezoelectric ceramic elements 20, 21, 22.

  In the case of FIG. 6, a cutout portion 23 a having a triangular cross-sectional shape for housing the drive body 104 is provided in the center of the driven member 23.

  The actuator shown in FIG. 6 may have a structure in which the driven body that can be attracted to the magnet moves relative to the driving body by fixing the driving body to the fixing member as shown in FIG.

  In the actuator 202 of the present invention, by using a plurality of driving bodies composed of a magnet and two piezoelectric ceramic elements, the actuator 202 can be moved at a higher speed and at the same time can be rotated on the XY plane. FIG. 4 shows a basic configuration of the actuator 202 according to the second embodiment in the present invention, in which two drive bodies 102 and 103 are used. The figure (a) is related with the external appearance top view from the upper surface direction, The figure (b) is related with the side view (A5 direction arrow view) of (a).

  The driving bodies 102 and 103 were manufactured using the same piezoelectric ceramic elements and magnets as in Example 1, and the actuator 202 was bonded to the driven member 12 using epoxy resin in the arrangement shown in FIG. Here, the driven member 12 was cut from a rectangular flat plate of 10 mm in length × 10 mm in width × 1.0 mm in thickness into a rectangular 3 mm × 3 mm portion as a portion on which the driving bodies 102 and 103 are arranged. The shape was about 16 times that of the magnets 8 and 11. Further, only the magnets 8 and 11 are in contact with the fixed member 13, and the driven member 12 and the fixed member 13 are not in contact. Even if the driven member 12 and the fixed member 13 are configured to contact each other, the effect of the present invention can be obtained, but the speed is likely to decrease due to an increase in frictional force during movement.

  The piezoelectric ceramic elements 6, 7, 9, and 10 of the driving bodies 102 and 103 were fixed at the other ends in the displacement direction to two orthogonal surfaces of the two cut portions.

  When a driving voltage similar to that of the first embodiment is applied to the piezoelectric ceramic element 9 of the actuator 202, and simultaneously, a driving voltage is applied to the piezoelectric ceramic element 7 so that the speed of expansion and contraction is reversed from that of the piezoelectric ceramic element 9. The driven member 12 and the driving bodies 102 and 103 move in one direction (X direction in FIG. 4).

  Hereinafter, members that move relative to the fixed member 13 (the driven member 12 and the driving bodies 102 and 103) are collectively referred to as a moving body.

  In order to reverse the speed of expansion and contraction of the piezoelectric ceramic element, the duty ratio of the drive voltage may be changed. For example, when a voltage waveform having a duty ratio of 85% is input to the piezoelectric ceramic element 9, a voltage waveform having a duty ratio of 15% is input to the piezoelectric ceramic element 7. When a voltage waveform with a duty ratio of 15% is input to the piezoelectric ceramic element 9 and a voltage waveform with a duty ratio of 85% is input to the piezoelectric ceramic element 7, the moving body moves in the reverse direction.

  When voltage waveforms having a duty ratio of 85% and 15% are applied to the piezoelectric ceramic elements 6 and 10 in exactly the same manner, the moving body moves in one direction along the Y-axis direction of FIG.

  The duty ratio of the drive voltage is not limited to the above-described value, and may be determined by a design such as a required moving speed of the moving body.

  In the actuator 202 of the present invention, in addition to translational movement along the XY axis, rotational movement is also possible. For example, a drive voltage in which the duty ratio is set so that the moving body moves in the Y direction is applied to the piezoelectric ceramic element 6, and at the same time, the duty ratio is set so that the moving body moves in the −Y direction to the piezoelectric ceramic element 10. When the applied drive voltage is applied, it rotates clockwise about the center of gravity of the moving body. The moving body can also be rotated by applying a driving voltage having the same relationship as described above to the piezoelectric ceramic elements 7 and 9.

  The moving direction and moving speed of the moving body when a driving voltage was applied to each driving body of the actuators 201 and 202 in Examples 1 and 2 were measured. The amount of movement was measured with a laser displacement meter, and the movement speed was determined from the voltage application time. The measurement results are shown in Table 1. However, in the case of rotational movement, the approximate rotational speed is measured, and the result is shown in units of rpm.

  From the results in Table 1, it was confirmed that according to the present invention, it is possible to obtain an actuator capable of translational movement along the XY axis direction and capable of rotational movement.

  The structure of the second embodiment is such that, as in the modification shown in FIG. 7 in the first embodiment, the driven body that can be attracted to the magnet moves relative to the drive body by fixing the drive body to the fixing member. It is also possible to apply to the structure.

  Hereinafter, as a modification of the present invention, a description will be given of a case where an elastic member is installed between a fixed member or a stationary member supported by the fixed member and a driven member in order to improve the translation of the actuator. Although the moving stroke of the moving body is limited, it is effective in the first and second embodiments when it is desired to translate the moving body with high accuracy only in the XY direction without performing the rotating operation.

  As shown in FIG. 5, in the actuator 203, coil springs 14, 15, 16, and 17 as elastic members are installed between the stationary member 18 and the driven member 12.

  Here, the stationary member 18 is bonded to the fixing member 13. Further, both ends of each coil spring are fixed to the stationary member 18 and the driven member 12 by adhesion.

  The members excluding the coil springs 14, 15, 16, 17 and the stationary member 18 are the same as those in the second embodiment.

  The spring constants of the coil springs 14, 15, 16, and 17 may be determined as appropriate depending on the design, but here, those that generate a spring force of about 0.1 N with respect to a displacement of 1 mm were selected.

  By applying the same drive voltage as that of level c of Example 2 to the actuator 203 in FIG. 5, the moving body was moved by 300 μm in the Y direction. At this time, the inclination state of the end surface B of the driven member shown in FIG. 5B was measured by a laser autocollimator. Based on the state before the movement, the maximum value of the amount of change after moving 300 μm in the Y direction was obtained in units of angle (minute). It can be said that the smaller the inclination of the end face B, the more the actuator 203 can translate.

  Table 2 shows the measurement results. For comparison, the results in Example 2 are also shown.

  From Table 2, it was confirmed that translational movement was possible with high accuracy by supporting the driven member on the fixed member via an elastic member such as a coil spring as in Example 3.

  The structure of the third embodiment is such that, as in the modification shown in FIG. 7 in the first embodiment, the driven body that can be attracted to the magnet moves relative to the drive body by fixing the drive body to the fixing member. It is also possible to apply to the structure.

  In the above-described embodiment, it has been explained that each actuator of the present invention can be applied to a planar positioning device such as an XY table. However, the present invention is not limited to this and performs positioning. Can be applied to all structures you need.

An example of schematic structure of the drive body of this invention was shown, (a) is related with a side view, (b) is related with the end view from the right direction shown by the white arrow of (a). 1A and 1B show a basic configuration of an actuator 201 according to Embodiment 1 of the present invention, in which FIG. It is about. 7 is a timing chart illustrating a driving method according to the actuator 201 of the present invention, and illustrating a relationship among a driving voltage, a displacement amount of the piezoelectric ceramic element, and a moving amount of the moving body applied to the piezoelectric ceramic element with respect to time. FIGS. 2A and 2B show a basic configuration of an actuator 202 according to a second embodiment of the present invention, where FIG. 1A shows an external plan view from the top surface direction, and FIG. 2B shows a side view of FIG. It is about. FIGS. 3A and 3B show a basic configuration of an actuator 203 according to a third embodiment of the present invention, in which FIG. 3A is a plan view of an outer appearance from the upper surface direction, and FIG. It is about. The modification of this invention is shown, It is related with the external appearance top view from the upper surface direction of the drive body 104 and the to-be-driven member 23. FIG. The modification of this invention is shown, (a) is related with a side view, (b) is related with the top view from the upper surface direction in the A7-A7 cross section of (a).

Explanation of symbols

1, 2, 6, 7, 9, 10, 20, 21, 22, 311, 312 Piezoelectric ceramic element 3, 8, 11, 19, 313 Magnet 4, 12, 23, 316 Driven member 5, 13, 314 Fixed Member 14, 15, 16, 17 Coil spring 18, 315 Stationary member 101, 102, 103, 104, 105 Driver 201, 202, 203, 303 Actuator

Claims (7)

A driving body in which one end of each displacement direction of at least two electromechanical conversion elements is fixed to a magnet, a driven member to which the other end in the displacement direction of the electromechanical conversion element is fixed, and the magnet Consists of a fixing member that can be attracted by magnetic force,
The driven member has an L shape, and the other ends in the displacement direction of the electromechanical conversion element are fixed to two orthogonal surfaces,
An actuator characterized in that the driven member and the driving body move relative to the fixed member by oscillating the electromechanical conversion element with different expansion and contraction speeds. The drive body according to claim 1 ,
A cuboid magnet,
An electromechanical transducer in which one end in a displacement direction is fixed to each of two orthogonal surfaces of the magnet;
An actuator characterized by comprising: 3. The actuator according to claim 1, wherein the driving body is composed of a plurality. A driving body in which one end of each displacement direction of at least two electromechanical conversion elements is fixed to a magnet, a driven member to which the other end in the displacement direction of the electromechanical conversion element is fixed, and the magnet Consists of a fixing member that can be attracted by magnetic force,
The drive body consists of a plurality,
The driven member or the fixed member, to which the other end in the displacement direction of the electromechanical conversion element is fixed, has a shape in which two diagonal portions are cut out from a flat plate as a portion where a driving body is disposed. Have
In each of the two cut-out portions, the other end in the displacement direction of the electromechanical conversion element is fixed to two orthogonal surfaces,
The driven member and the driving body are made to vibrate with respect to the fixing member , or the driven member is connected to the driving body and the fixing member by causing the electromechanical conversion element to vibrate with different expansion and contraction speeds. An actuator characterized by moving relative to. A driving body in which one end of each displacement direction of at least two electromechanical conversion elements is fixed to a magnet, a driven member to which the other end in the displacement direction of the electromechanical conversion element is fixed, and the magnet Consists of a fixing member that can be attracted by magnetic force,
The magnet of the driving body has a triangular cross-sectional shape,
One end of the electromechanical conversion element in the displacement direction is fixed to the three surfaces constituting the triangle of the magnet,
The driven member and the driving body are made to vibrate with respect to the fixing member , or the driven member is connected to the driving body and the fixing member by causing the electromechanical conversion element to vibrate with different expansion and contraction speeds. An actuator characterized by moving relative to. In any one of claims 1 to 5, an actuator, characterized in that the driven member is supported by the fixing member via the elastic member. Positioning apparatus characterized by having an actuator according to any one of claims 1-6.

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