WO2022199130A1

WO2022199130A1 - Galvanometer and projector

Info

Publication number: WO2022199130A1
Application number: PCT/CN2021/136593
Authority: WO
Inventors: 欧阳剑; 张聪; 胡震宇
Original assignee: 深圳市火乐科技发展有限公司
Priority date: 2021-03-22
Filing date: 2021-12-08
Publication date: 2022-09-29
Also published as: CN112698506A; CN112698506B

Abstract

A galvanometer and a projector. The galvanometer comprises a lens (10); a first mounting square frame (21), which is arranged on one side of the lens (10) and is fixedly connected to the lens (10); and a base (30), which encloses the outer side of the lens (10) and of the first mounting square frame (21). The first mounting square frame (21) comprises a first elastic sheet (211), which is fixedly connected to the lens (10); and a second elastic sheet (212), which is located on opposite side relative to the first elastic sheet (211) in a thickness direction of the lens (10) and is fixedly connected to the base (30), wherein a first piezoelectric element (41) is mounted at the position of the first mounting square frame (21) located between the first elastic sheet (211) and the second elastic sheet (212); and the first piezoelectric element (41) is configured to extend and retract in the direction parallel to a mirror face direction of the lens (10) after being electrified and to drive the first elastic sheet (211) and the second elastic sheet (212) to deform in the thickness direction of the lens (10), so as to drive the lens (10) to oscillate around a first axis. By means of the invention, the response speed of the galvanometer can be improved, and the lens (10) can be more easily returned to a stable state, such that the effect of amplifying the stroke can be achieved.

Description

Galvo and Projector

CROSS-REFERENCE TO RELATED APPLICATIONS

This disclosure claims the priority of a Chinese patent application with application number 202110304094.1 and titled "galvanometer and projector" filed with the China Patent Office on March 22, 2021, the entire contents of which are incorporated by reference in this disclosure.

technical field

The present disclosure relates to projection equipment, and in particular, to a galvanometer and a projector.

Background technique

In the application of digital micromirror device (DMD), in order to improve the pixels, the form of galvanometer is usually used, and the single pixel of the original projection source can be changed into multiple pixels by the swing of the mirror.

In the related art, the driving force for the swinging of the lens mainly comes from the voice coil motor, that is, the lens is fixed with the magnet, and the base part of the galvanometer is provided with a coil. There are many flaws in the way the voice coil motor is driven.

First, the large weight of the magnet will increase the weight of the entire moving part of the galvanometer, making it difficult to achieve a high transmission frequency. In addition, the magnet in this design solution is easily attracted by other magnetic devices in the galvanometer system (such as iron plates, speakers, etc.), which will lead to the introduction of uncontrollable additional magnetic force beyond the electromagnetic force used to drive the lens. Moreover, the support of the voice coil motor in the existing galvanometer adopts a reed structure, that is, the lens is supported on the base by the reed, and the swing of the lens relative to the base is realized by the electromagnetic drive of the voice coil motor and the support of the reed . However, since the coil and the magnet belong to the space-transmitting force and lack the connection of the intermediate solid parts, after the force is transmitted to the reed, the reed will swing back and forth in a small amplitude before entering the steady state position, which will cause the galvanometer to enter The time in the steady state position is longer, which in turn results in a slower response rate of the voice coil motor.

SUMMARY OF THE INVENTION

The purpose of the present disclosure is to provide a galvanometer and a projector equipped with the galvanometer, so as to at least solve the technical problem of the slow response rate of the galvanometer during use.

In order to achieve the above purpose, the present disclosure provides a galvanometer mirror, comprising:

lens;

a first mounting frame, arranged on one side of the lens, and fixedly connected with the lens; and

a base, wrapping around the outside of the lens and the first mounting frame,

Wherein, the first installation frame includes a first elastic sheet fixedly connected with the lens, and a first elastic sheet located on the opposite side of the first elastic sheet compared to the thickness direction of the lens and fixedly connected with the base the second elastic sheet, a first piezoelectric element is mounted on the position of the first installation frame between the first elastic sheet and the second elastic sheet, and the first piezoelectric element is configured to be energized Then, it can expand and contract in the direction parallel to the mirror surface of the lens, and drive the first elastic sheet and the second elastic sheet to deform in the thickness direction of the lens, so as to drive the lens to swing around the first axis.

Optionally, the first elastic sheet and the second elastic sheet respectively comprise raised portions, and the two raised portions are configured to protrude toward a direction away from each other, the lens and the base, respectively connected with the corresponding protrusions.

Optionally, the protruding portion is configured as a stepped structure, and the lens and the base are respectively connected to the top ends of the stepped structure.

Optionally, the galvanometer further includes a circuit board fixed on the base, and the positive electrode and the negative electrode of the first piezoelectric element are respectively connected to the circuit board through conductive glue.

Optionally, the first piezoelectric element includes a first surface facing the lens and a second surface facing away from the lens, one of the positive electrode and the negative electrode is located on the second surface, and the other is located on the second surface. One is located on the first face and wound from one end of the first piezoelectric element to the second face, and the positive and negative electrodes on the second face are spaced apart.

Optionally, both ends of the first piezoelectric element are respectively connected to the first mounting frame through non-conductive glue.

Optionally, the non-conductive glue is configured in a U-shape and clamped at the end of the first piezoelectric element.

Optionally, the galvanometer further includes a second installation frame disposed on the side of the lens adjacent to the first installation frame, and the second installation frame includes a fixed connection with the lens. The third elastic sheet, and the fourth elastic sheet located on the opposite side of the third elastic sheet in the thickness direction of the lens and fixedly connected with the base, the second mounting frame is installed on the There is a second piezoelectric element located between the third elastic sheet and the fourth elastic sheet, the second piezoelectric element is configured to be able to expand and contract parallel to the mirror surface direction of the lens after being energized, and drive the The third elastic sheet and the fourth elastic sheet are deformed in the thickness direction of the lens to drive the lens to swing around a second axis, wherein the first axis is perpendicular to the second axis.

Optionally, the second installation frame has the same structure as the first installation frame, and the second piezoelectric element has the same structure as the first piezoelectric element.

Optionally, the galvanometer further comprises a third installation frame disposed on the opposite side of the lens to the first installation frame, and a third installation frame disposed on the lens and the second installation frame. The fourth installation frame on the opposite side, the third installation frame and the fourth installation frame are respectively elastically connected between the lens and the base.

Optionally, the elastic coefficient of the third installation frame is lower than the elastic coefficient of the first installation frame, and the elastic coefficient of the fourth installation frame is lower than the elastic coefficient of the second installation frame.

Optionally, the galvanometer further comprises a first magnet, a second magnet arranged on the lens, a first sensor arranged on the base and corresponding to the position of the first magnet, and a first sensor arranged on the base a second sensor on the base and corresponding to the position of the second magnet.

Optionally, the lens is configured in a square shape, and the first magnet and the second magnet are disposed at opposite corners of the lens.

According to a second aspect of the present disclosure, there is also provided a projector including the galvanometer provided by the present disclosure.

Through the above technical solution, the first piezoelectric element is connected to the first installation frame, so as to drive the first elastic sheet and the second elastic sheet of the first installation frame along the thickness direction of the lens through the expansion and contraction of the first piezoelectric element Elastic deformation, thereby realizing the swing of the lens around the first axis. In the present disclosure, the driving force generated by the first piezoelectric element is directly transmitted to the lens through the connection with the first mounting frame. Compared with the driving method of the voice coil motor, the response speed of the galvanometer can be improved, and the lens can be more easily return to steady state. In addition, both the lens and the base are connected to the first piezoelectric element through elastic sheets that can be elastically deformed, so that the expansion and contraction of the first piezoelectric element can be fed back to the deformation of the two elastic sheets at the same time, and the deformation of the two elastic sheets The amount will be uniformly fed back into the swing amount of the lens, so that the effect of enlarging the stroke can be achieved.

Other features and advantages of the present disclosure will be described in detail in the detailed description that follows.

Description of drawings

The accompanying drawings are used to provide a further understanding of the present disclosure, and constitute a part of the specification, and together with the following detailed description, are used to explain the present disclosure, but not to limit the present disclosure. In the attached image:

1 is a schematic structural diagram of a galvanometer provided by an exemplary embodiment of the present disclosure;

2 is an exploded schematic view of a galvanometer provided by an exemplary embodiment of the present disclosure;

3 is a top view of a galvanometer provided by an exemplary embodiment of the present disclosure;

Fig. 4 is sectional view A in Fig. 3;

Fig. 5 is sectional view B in Fig. 3;

Fig. 6 is sectional view C in Fig. 5;

7 is a front view of a piezoelectric element provided by an exemplary embodiment of the present disclosure;

8 is a top view of a piezoelectric element provided by an exemplary embodiment of the present disclosure;

FIG. 9 is a schematic diagram of a lens rotating at different angles provided by an exemplary embodiment of the present disclosure;

10 is a schematic diagram of a galvanometer provided by an exemplary embodiment of the present disclosure replicating one pixel point into sixteen pixel points;

FIG. 11 is a schematic diagram of a galvanometer copying one pixel point into four pixel points in the prior art.

Description of reference numerals

10-lens, 21-first installation frame, 211-first elastic piece, 2110-first raised part, 212-second elastic piece, 2120-second raised part, 22-second installation frame, 23-Third installation frame, 24-Fourth installation frame, 30-Base, 41-First piezoelectric element, 411-Gap, 42-Second piezoelectric element, 50-Conductive glue, 60-Circuit board, 61-IC chip, 70-non-conductive glue, 81-first magnet, 82-second magnet, 91-first sensor, 92-second sensor.

Detailed ways

The specific embodiments of the present disclosure will be described in detail below with reference to the accompanying drawings. It should be understood that the specific embodiments described herein are only used to illustrate and explain the present disclosure, but not to limit the present disclosure.

In the present disclosure, unless otherwise stated, the directional words such as "upper and lower" are used for the convenience of description and are defined according to the usage habits of the components. For details, please refer to the drawing direction of FIG. , Outer" refers to the contours of the corresponding parts. The terms "first, second" and the like are used in this disclosure to distinguish one element from another and are not of order or importance. Furthermore, where the following description refers to the drawings, the same reference numbers in different drawings refer to the same or similar elements.

The present disclosure provides a galvanometer. Referring to FIGS. 1 to 3 , the galvanometer includes a lens 10 , a first mounting frame 21 disposed on one side of the lens 10 and fixedly connected to the lens 10 , and a first mounting frame 21 surrounding the lens 10 . and the base 30 on the outside of the first mounting frame 21 . 5 , the first installation frame 21 includes a first elastic sheet 211 fixedly connected to the lens 10 , and is located on the opposite side of the first elastic sheet 211 in the thickness direction of the lens 10 and is fixedly connected to the base 30 The second elastic sheet 212, the base 30 may include a base disposed at the bottom of the lens 10 and a side wall surrounding the circumference of the lens 10, the second elastic sheet 212 may be installed on the base of the base 30, the first elastic sheet 211 And the part of the second elastic sheet 212 for connecting with the lens 10 and the base 30 can extend along the surface of the elastic sheet to extend the mounting part to be connected with the lens 10 by glue, so as to increase the installation area of the elastic sheet with the lens 10 and the base 30 , to ensure stable installation. A first piezoelectric element 41 is installed on the first installation frame 21 at a position between the first elastic sheet 211 and the second elastic sheet 212 , for example, it can be connected at both ends of the first elastic sheet 211 and the second elastic sheet 212 There is an installation block, an installation groove may be formed on the installation block, and both ends of the first piezoelectric element 41 may be embedded in the installation groove by gluing. The first piezoelectric element 41 is configured to be able to expand and contract in the direction parallel to the mirror surface of the lens 10 after being energized, and to drive the first elastic sheet 211 and the second elastic sheet 212 to deform in the thickness direction of the lens 10, so as to drive the lens 10 to wind around the lens 10. One axis swings.

Taking the direction of the drawing in FIG. 5 as an example, the first axis is an axis extending in the left-right direction of the drawing. The first piezoelectric element 41 expands and contracts in the left-right direction of the drawing when energized. For example, when the two ends of the first piezoelectric element 41 are compressed toward the middle, the first elastic sheet 211 will be elastically deformed to protrude upward, and the second elastic sheet 212 will be elastically deformed to protrude downward. 30 is a fixed component, so the protrusion of the first elastic sheet 211 and the second elastic sheet 212 drives the side of the lens 10 connected with the first mounting frame 21 to swing upward around the first axis. Similarly, when the first piezoelectric element 41 is stretched, the first elastic sheet 211 and the second elastic sheet 212 will be deformed in the opposite direction, thereby driving the side of the lens 10 connected with the first mounting frame 21 to wrap around the first mounting frame 21. One axis swings down.

Through the above technical solution, the first piezoelectric element 41 is connected to the first installation frame 21 so as to drive the first elastic sheet 211 and the second elastic sheet 212 of the first installation frame 21 along the edge of the first installation frame 21 through the expansion and contraction of the first piezoelectric element 41 Elastic deformation occurs in the thickness direction of the lens 10, thereby realizing the swing of the lens 10 around the first axis. In the present disclosure, the driving force generated by the first piezoelectric element 41 is directly transmitted to the lens 10 through the connection with the first mounting frame 21. Compared with the driving method of the voice coil motor, the response speed of the galvanometer can be improved, and the It is easy to restore the lens 10 to a steady state. In addition, both the lens 10 and the base 30 are connected to the first piezoelectric element 41 through elastic sheets that can be elastically deformed, so that the expansion and contraction of the first piezoelectric element 41 can be fed back to the deformation of the two elastic sheets at the same time, while the two The deformation amount of the elastic sheet will be fed back uniformly into the swing amount of the lens 10 , so that the effect of enlarging the stroke can be achieved.

In order to facilitate the control of the deformation directions of the first elastic sheet 211 and the second elastic sheet 212 in response to the expansion and contraction of the first piezoelectric element 41 , the first elastic sheet 211 and the second elastic sheet 212 may respectively include protrusions, two protrusions The portions are configured to protrude in a direction away from each other, and the lens 10 and the base 30 are respectively connected with respective corresponding protruding portions. As shown in FIG. 5 , the first elastic piece 211 may include a first protruding portion 2110 protruding upward, and the second elastic piece 212 may include a second protruding portion 2120 protruding downward. When the first piezoelectric element 41 expands and contracts, the force will be transmitted to the convex portion through the elastic sheet, so that the deformation amount of the elastic sheet at the convex portion is maximized, so that the swinging stroke of the lens 10 is within the range of the first piezoelectric element 41 . On the basis of the expansion and contraction amount, the lens 10 and the base 30 can be connected at the position where the deformation amount of the elastic sheet is the largest, so as to enlarge the stroke to a greater degree. In order to facilitate control, the first elastic sheet 211 and the second elastic sheet 212 can be set to have the same structure, and the first raised portion 2110 and the second raised portion 2120 can also be set to have the same structure, and can be respectively set on the corresponding elastic sheet the middle position.

The structure of the protruding portion can be any structure that makes the middle of the elastic piece high and the two sides low. For example, in one embodiment, the elastic piece can be arranged in an arc shape as a whole to form the protruding portion. Or in another embodiment of the present disclosure, referring to FIG. 5 , the protruding portion can also be configured as a stepped structure, and the lens 10 and the base 30 are respectively connected to the top of the stepped structure, and the top here refers to the tops shown in FIG. 5 . , the uppermost end of the first raised portion 2110 and the lowermost end of the second raised portion 2120.

2 and 6 , the galvanometer further includes a circuit board 60 fixed on the base 30 , and an IC (Integrated Circuit, integrated circuit) chip 61 may be provided on the surface of the circuit board 60 through surface mount technology. The positive electrode and the negative electrode of the first piezoelectric element 41 are respectively connected to the circuit board 60 through the conductive glue 50 to control the electrification of the first piezoelectric element 41 . The conductive adhesive 50 can play both a connection function and a conductive function, and the conductive adhesive 50 can be connected to the ends of the first piezoelectric elements 41 respectively, so that the first piezoelectric elements 41 can easily expand and contract in the middle position.

FIG. 7 shows a front view of the first piezoelectric element 41 , and FIG. 8 shows a top view of the first piezoelectric element 41 . Referring to FIGS. 7 and 8 , the first piezoelectric element 41 may include a first piezoelectric element facing the lens 10 . (i.e. the inward facing side in FIG. 7 and the upper surface in FIG. 8) and the second side facing away from the lens 10 (i.e. the outward facing side in FIG. 7 and the lower surface in FIG. 8) , one of the positive electrode and the negative electrode is located on the second surface, the other is located on the first surface and is wound from one end of the first piezoelectric element 41 to the second surface, the positive electrode and the negative electrode on the second surface are spaced apart, That is, the gap portion 411 that electrically isolates the positive electrode and the negative electrode is formed on the second surface. Here, the gap portion 411 may be formed by not plating electrodes when manufacturing the piezoelectric element. The bold line in FIG. 8 is the electrode of the first piezoelectric element 41 shown in a schematic manner, and the thick line on the lower surface on the left side of the gap portion 411 may be one of a positive electrode and a negative electrode, and the gap portion 411 The thick line located on the lower surface on the right side of , and the thick line going up from the right end to the upper surface is the other of the positive electrode and the negative electrode. By arranging both the positive and negative terminals of the first piezoelectric element 41 on the second surface facing away from the lens 10, the connection with the circuit board 60 can be facilitated, so as to facilitate the spatial arrangement inside the galvanometer, which is also the amount of the galvanometer. production provides feasibility. Here, the gap portion 411 is arranged at a position close to the right side, and the ends of the positive electrode and the negative electrode can be arranged at both ends of the first piezoelectric element 41, so as to facilitate the expansion and contraction of the middle region of the first piezoelectric element 41, In order to ensure the stretchable amount of the first piezoelectric element 41 .

In the embodiment of the present disclosure, referring to FIGS. 5 and 6 , both ends of the first piezoelectric element 41 may be connected to the first mounting block 21 through non-conductive glue 70 , respectively. On the one hand, the non-conductive adhesive 70 can realize the connection between the first piezoelectric element 41 and the first mounting frame 21, and on the other hand, the positive and negative electrodes on the first and second surfaces can be isolated by the non-conductive adhesive 70. . Specifically, referring to the embodiment shown in FIG. 8 , the left end of the first piezoelectric element 41 in the drawing direction is connected to the non-conductive glue 70 , and the non-conductive glue 70 isolates the positive electrode and the negative electrode on the left side; and the above-mentioned gap The portion 411 is formed on the right side in the drawing direction of the second surface of the first piezoelectric element 41 , that is, on the right side to isolate the positive electrode and the negative electrode.

In one embodiment, the non-conductive glue 70 may be configured in a U shape and clamped at the end of the first piezoelectric element 41 , so as to be able to connect the first piezoelectric element 41 stably. The shape and size of the non-conductive glue 70 can be matched with the shape and size of the end of the first piezoelectric element 41 and the shape and size of the mounting groove of the first mounting frame 21 to ensure that the mounting structure is adapted, the arrangement is more reasonable, and the connection is more stable .

According to an embodiment of the present disclosure, referring to FIGS. 1 to 3 , the galvanometer may further include a second installation frame 22 disposed on the side of the lens 10 adjacent to the first installation frame 21 . The frame 22 includes a third elastic sheet fixedly connected with the lens 10, and a fourth elastic sheet located on the opposite side of the third elastic sheet in the thickness direction of the lens 10 and fixedly connected with the base 30. The second mounting frame A second piezoelectric element 42 is installed on the 22 between the third elastic sheet and the fourth elastic sheet. The second piezoelectric element 42 is configured to be able to expand and contract parallel to the mirror surface direction of the lens 10 after being energized, and drive the third elastic sheet and the fourth elastic sheet deforms in the thickness direction of the lens 10 to drive the lens 10 to swing around the second axis, wherein the first axis is perpendicular to the second axis. The second piezoelectric element 42 can also deform the third elastic sheet and the fourth elastic sheet through expansion and contraction as the first piezoelectric element 41 described above, thereby driving the lens 10 to rotate around the second axis, which will not be described in detail here. Here, referring to FIG. 3 , the first axis refers to the up-down direction of the drawing of FIG. 3 , and the second axis refers to the left-right direction of the drawing of FIG. 3 . The galvanometer in the embodiment of the present disclosure is provided with a first piezoelectric element 41 and a second piezoelectric element 42 at the same time, which can realize the biaxial swing of the lens 10, thereby improving the projection image quality.

The structure and installation method of the second installation frame 22 can be the same as the above-mentioned first installation frame 21, and the structure and installation method of the second piezoelectric element 42 can also be the same as the above-mentioned first piezoelectric element 41. It makes the swing of the lens 10 in the two axes easier to control. To avoid repetition, the second piezoelectric element 42 and the second mounting block 22 will not be described again here.

1 to 3 , the galvanometer may further include a third installation frame 23 disposed on the opposite side of the lens 10 to the first installation frame 21, and a third installation frame 23 disposed on the lens 10 opposite to the second installation frame 22 The fourth installation frame 24 on one side of the lens, the third installation frame 23 and the fourth installation frame 24 are respectively elastically connected between the lens 10 and the base 30 . The third installation frame 23 and the installation frame 24 are respectively used for supporting the lens 10 when the lens 10 swings. Specifically, in FIG. 3 , when the first installation frame 21 is deformed, the lens 10 will swing around the first axis formed at the corresponding position of the third installation frame 23 , that is, the lens 10 takes the left side as the The rotating shaft swings; when the second mounting frame 22 is deformed, the lens 10 will swing around the second axis formed at the corresponding position of the fourth mounting frame 24, that is, the lens 10 will swing with the lower side as the rotating shaft . In the embodiment of the present disclosure, piezoelectric elements may also be installed at the third mounting block 23 and the fourth mounting block 24 to jointly control the swing of the lens 10 . For example, when the first piezoelectric element 41 at the first mounting block 21 is compressed, the piezoelectric element at the third mounting block 23 can be stretched to control the opposite side of the lens 10, so that the lens 10 can be increased. Swing stroke.

When the third installation frame 23 and the fourth installation frame 24 only function as fixed supports, the elastic coefficient of the third installation frame 23 can be set to be lower than the elastic coefficient of the first installation frame 21, and the fourth installation frame The modulus of elasticity of the frame 24 is lower than the modulus of elasticity of the second mounting frame 22 . Here, the elastic coefficient refers to the ease of deformation of the related components as a whole, rather than for one of the local components. With this arrangement, the lens 10 can be stably supported on one side, and the swing degree of the lens 10 can be controlled on the other side.

2 to 4 , in the embodiment of the present disclosure, the galvanometer may further include a first magnet 81 , a second magnet 82 disposed on the lens 10 , a first magnet 81 disposed on the base 30 and corresponding to the position of the first magnet 81 . A sensor 91 and a second sensor 92 disposed on the base 30 and corresponding to the position of the second magnet 82 . The first magnet 81 and the second magnet 82 can be fixed on the side wall of the lens 10 by dispensing glue, and the first sensor 91 and the second sensor 92 can be respectively disposed below the corresponding magnets. The sensor can convert the sensed magnetic flux density into the positional relationship between the magnet and the sensor, so that the position of the magnet and the lens 10 on which the magnet is installed can be monitored. The position signal sensed by the sensor can be further amplified by the IC chip 61 arranged on the circuit board 60, so that the position signal read by the sensor can be read more accurately, and the position signal can be fed back into the swing of the lens 10. Angle or travel information of the lens 10 . At the same time, the position information is transmitted through the circuit board 60 and used as a feedback signal for controlling the current of the piezoelectric element, so as to compensate the driving current of the piezoelectric element correspondingly positively or negatively, so as to achieve a more precise driving and control of the lens 10 . position control. Here, the first sensor 91 and the second sensor 92 are provided, which can detect the swing position of the lens 10 around the first axis and the second axis, respectively, so as to control the driving current of the first piezoelectric element 41 and the second piezoelectric element 42 respectively. , so that the swing angle signal of the lens 10 around each axis can be split more accurately.

In the embodiment of the present disclosure, the swing of the lens 10 may be precisely controlled by other means. For example, SGS (Strain Gauge Sensor, resistance strain gauge sensor) is attached to the surface of the first piezoelectric element 41 and the second piezoelectric element 42 respectively. After the piezoelectric element is energized and deformed, the SGS will also generate strain. As a result, the resistance of the SGS will change, and the resistance change can be fed back to the chip 61 through the circuit board 60. The chip 61 can judge the swing angle of the mirror 10 through the resistance change, and can control the current of the driving piezoelectric element to control the mirror 10. Next action.

According to some embodiments, referring to FIG. 3 , the lens 10 may be configured in a square shape, and the first magnet 81 and the second magnet 82 may be disposed at opposite corners of the lens 10 . With this arrangement, the monitoring of the position information of the lens 10 swinging around the first axis and the second axis can be separated without interfering with each other, so that the detection result is more accurate and the driving of the lens 10 can be precisely controlled. In some embodiments, the lens 10 may also be configured in a circular or other shape, and the two magnets may be positioned at a distance apart to ensure accurate detection results as much as possible.

According to some embodiments, the first sensor 91 and the second sensor 92 may be linear Hall sensors or linear TMR (Tunnel Magneto-Resistive, tunnel magnetoresistive) sensors, and the present disclosure does not specifically limit the types of the sensors.

11 is a schematic diagram of a galvanometer in the prior art capable of replicating one pixel point into four pixel points, FIG. 9 is a schematic diagram of the swing angle of the lens 10 of the galvanometer provided by the present disclosure, and the left side of the figure shows that the lens 10 is wound around The swing angle of the first axis, the right side of the figure represents the swing angle of the lens 10 around the second axis, FIG. 10 shows a schematic diagram of using the galvanometer of the present disclosure to replicate one pixel point into sixteen pixel points. According to FIG. 9 to FIG. 11 , it can be concluded that the galvanometer provided by the present disclosure can meet the requirements of multi-stage transmission by setting piezoelectric elements and mounting frames, etc., so that the response frequency of the galvanometer is fast, and the feedback can be obtained through the above-mentioned feedback. The position of the mirror 10 can be precisely positioned by controlling, and the mirror 10 of the galvanometer needs less time to reach a steady state, and can achieve the purpose of enlarging the stroke, so that the effect of multiple pixel replication can be achieved.

The present disclosure also provides a projector including the above-mentioned galvanometer. The projector has all the beneficial effects of the above-mentioned galvanometer, which will not be repeated here.

The preferred embodiments of the present disclosure have been described above in detail with reference to the accompanying drawings. However, the present disclosure is not limited to the specific details of the above-mentioned embodiments. Various simple modifications can be made to the technical solutions of the present disclosure within the scope of the technical concept of the present disclosure. These simple modifications all fall within the protection scope of the present disclosure.

In addition, it should be noted that the various specific technical features described in the above-mentioned specific embodiments can be combined in any suitable manner unless they are inconsistent. In order to avoid unnecessary repetition, the present disclosure provides The combination method will not be specified otherwise.

In addition, the various embodiments of the present disclosure can also be arbitrarily combined, as long as they do not violate the spirit of the present disclosure, they should also be regarded as the contents disclosed in the present disclosure.

Claims

A galvanometer mirror, characterized in that it includes:

lens (10);

a first mounting frame (21), arranged on one side of the lens (10) and fixedly connected to the lens (10); and

a base (30) wrapped around the outer side of the lens (10) and the first mounting frame (21),

Wherein, the first installation frame (21) includes a first elastic sheet (211) fixedly connected with the lens (10), and a first elastic sheet (211) is located on the first elastic sheet (211) and is opposite to the lens (10). a second elastic sheet (212) on the opposite side in the thickness direction of ) and fixedly connected to the base (30), the first mounting frame (21) is located between the first elastic sheet (211) and the base (30). A first piezoelectric element (41) is installed between the second elastic sheets (212), and the first piezoelectric element (41) is configured to be able to follow a direction parallel to the mirror surface of the lens (10) after being electrified expands and contracts, and drives the first elastic sheet (211) and the second elastic sheet (212) to deform in the thickness direction of the lens (10), so as to drive the lens (10) to swing around the first axis .
The galvanometer according to claim 1, characterized in that, the first elastic sheet (211) and the second elastic sheet (212) respectively comprise protruding parts, and the two protruding parts are configured to face away from Protruding in the direction of each other, the lens (10) and the base (30) are respectively connected with their corresponding protruding parts.
The galvanometer according to claim 2, characterized in that, the protruding portion is configured as a stepped structure, and the lens (10) and the base (30) are respectively connected to the top ends of the stepped structure.
The galvanometer according to claim 1, characterized in that, the galvanometer further comprises a circuit board (60) fixed on the base (30), the positive electrode of the first piezoelectric element (41) and the The negative electrodes are respectively connected to the circuit board (60) through conductive glue (50).
The galvanometer according to claim 4, wherein the first piezoelectric element (41) comprises a first surface facing the lens (10) and a second surface facing away from the lens (10), One of the positive electrode and the negative electrode is located on the second surface, and the other is located on the first surface and is wound from one end of the first piezoelectric element (41) to the second surface , the positive and negative electrodes on the second side are spaced apart.
The galvanometer according to claim 5, characterized in that both ends of the first piezoelectric element (41) are respectively connected to the first mounting frame (21) through non-conductive glue (70).
The galvanometer according to claim 6, characterized in that, the non-conductive glue (70) is configured in a U-shape and clamped at the end of the first piezoelectric element (41).
The galvanometer according to any one of claims 1-7, characterized in that, the galvanometer further comprises a galvanometer disposed on the lens (10) adjacent to the first installation frame (21) The second installation frame (22) on the side, the second installation frame (22) includes a third elastic sheet fixedly connected with the lens (10), and a third elastic sheet located on the third elastic sheet is relatively A fourth elastic sheet on the opposite side of the lens (10) in the thickness direction and fixedly connected to the base (30), the second mounting frame (22) is mounted with a fourth elastic sheet located on the third elastic sheet and the second mounting frame (22). A second piezoelectric element (42) between the fourth elastic sheets, the second piezoelectric element (42) is configured to be able to expand and contract parallel to the mirror surface direction of the lens (10) after being energized, and drive the first piezoelectric element (42) The three elastic sheets and the fourth elastic sheet are deformed in the thickness direction of the lens (10) to drive the lens (10) to swing around a second axis, wherein the first axis and the second The axis is vertical.
The galvanometer according to claim 8, characterized in that the second installation frame (22) has the same structure as the first installation frame (21), and the second piezoelectric element (42) has the same structure as the first installation frame (21). A piezoelectric element (41) has the same structure.
The galvanometer mirror according to claim 8, characterized in that, the galvanometer mirror further comprises a third installation frame disposed on the opposite side of the lens (10) to the first installation frame (21) (23), and a fourth mounting block (24) provided on the opposite side of the lens (10) from the second mounting block (22), the third mounting block (23) and The fourth mounting frames (24) are respectively elastically connected between the lens (10) and the base (30).
The galvanometer according to claim 10, wherein the elastic coefficient of the third installation frame (23) is lower than the elastic coefficient of the first installation frame (21), and the fourth installation frame The modulus of elasticity of (24) is lower than the modulus of elasticity of the second mounting frame (22).
The galvanometer according to claim 8, characterized in that, the galvanometer further comprises a first magnet (81), a second magnet (82) arranged on the lens (10), and a first magnet (82) arranged on the base A first sensor (91) on (30) and corresponding to the position of the first magnet (81), and a second sensor (91) disposed on the base (30) and corresponding to the position of the second magnet (82) sensor (92).
The galvanometer according to claim 12, characterized in that the lens (10) is configured in a square shape, and the first magnet (81) and the second magnet (82) are arranged on the surface of the lens (10). diagonally.
A projector, characterized by comprising the galvanometer according to any one of claims 1-13.