CN1808186A - Fast steering reflection mirror with giant magnetostrictive driver - Google Patents
Fast steering reflection mirror with giant magnetostrictive driver Download PDFInfo
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- CN1808186A CN1808186A CN 200610002870 CN200610002870A CN1808186A CN 1808186 A CN1808186 A CN 1808186A CN 200610002870 CN200610002870 CN 200610002870 CN 200610002870 A CN200610002870 A CN 200610002870A CN 1808186 A CN1808186 A CN 1808186A
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Abstract
The invention discloses a great magnetic deformation fast reverse reflector which comprises: upper and lower shell body, polishing plating reflecting mirror, supporting board, base, turning mechanism, magnetic deformation driver A and magnetic deformation driver B; herein the upper shell body is packaged between the mirror base and supporting board of the polishing plating reflecting mirror, the lower shell is packaged between the supporting board and base, a power connecting head is provided on the lower shell body; magnetic deformation driver A and magnetic deformation driver B are installed between the supporting board and the base; the turning mechanism is provided between the mirror base and supporting board of the polishing plating reflecting mirror; the magnetic deformation driver A has the same structure with magnetic deformation driver B. The rapid turning reflecting mirror has the advantages of large dynamic range, of having band width correction function and of being able to realize high precision tracking in large range.
Description
Technical field
The present invention relates to a kind of catoptron that is applicable in astronomical telescope, laser communications, image stabilization, composite shaft precision tracking, the aiming optical system, specifically, be meant a kind of fast steering reflection mirror based on the giant magnetostriction material driver.
Background technology
Steering reflection mirror main performance index comprises following range, resonance frequency and effective minute surface size.Following range is the maximum magnitude of mirror deflection, has determined the scope of energy compensation correction; Resonance frequency is directly connected to the problem of control system bandwidth and response speed; Effectively the minute surface size is the clear aperature of catoptron, and its size influences the raising of structural resonance frequency.Each primary structure characterisitic parameter is interactional, need consider according to the system requirements balance when determining each parameter.
Steering reflection mirror mainly includes base, polishing metallic-membrane plating reflector, driver, catoptron support.Base should consider to have enough rigidity, so that the reacting force of driver does not influence the mode of oscillation of base.Catoptron should reduce quality as far as possible except surface figure accuracy requires, to improve structural resonance frequency.Drive performance influences following range, also influences structural resonance frequency, so require its load capacity strong, flexible stroke is big, and rigidity is high.Catoptron supports needs to keep catoptron in the motion of Control Shaft direction, not because of driving force influences reflecting mirror surface shape, limits other degree of freedom simultaneously, position stability, reliable.
Steering reflection mirror can be divided into two big classes according to its system drive, promptly by the fast anti-mirror of piezoelectric actuator driving and the fast anti-mirror system that is driven by voice coil motor.Wherein, the fast anti-mirror dynamic range of piezoelectricity is little, driving voltage is high, frequency band width, and the fast anti-mirror dynamic range of voice coil motor is big, but driving force is little and resonance frequency is low.Yet the optical transmission system of high power, long distance needs the fast steering reflection mirror of heavy caliber, high spud angle and high resonant frequency in the aerospace field.Use in order to adapt to widely, the existing bigger dynamic range of the anti-mirror of seeking quickness has the calibration capability of certain bandwidth again.Compare with piezoelectric, the big order of magnitude of the strain ratio piezoelectric of novel intelligent material-giant magnetostriction material, power output is 5 times of piezoelectric, and response speed is fast, frequency of operation is wide; Compare with voice coil motor, the giant magnetostrictive driver driver has very strong high thrust advantage.Therefore, design and development are fit to the novel drive system of above-mentioned requirements, to improve catoptron bore, inclination angle and resonance frequency, are challenging research topics.
Summary of the invention
The purpose of this invention is to provide a kind of fast steering reflection mirror with giant magnetostrictive driver, this steering reflection mirror is by two magnetic telescopic drivers and the steering mechanism that displacement is amplified, satisfy the heavy caliber demand of catoptron, improved the inclination angle scope and the resonance frequency of catoptron effectively.
A kind of fast steering reflection mirror with giant magnetostrictive driver of the present invention, include lower house, polishing metallic-membrane plating reflector, back up pad, base, steering mechanism, magnetic telescopic driver A and magnetic telescopic driver B, described upper shell is sleeved between the microscope base and back up pad of polishing metallic-membrane plating reflector, lower house is sleeved between back up pad and the base, and lower house is provided with power connection; Magnetic telescopic driver A and magnetic telescopic driver B are installed between described back up pad and the base; Between the microscope base of described polishing metallic-membrane plating reflector and the back up pad steering mechanism is installed; Described magnetic telescopic driver A is identical with described magnetic telescopic driver B structure;
The upper magnet yoke of described magnetic telescopic driver A, permanent-magnetic cylindrical, lower yoke, following permanent magnets, magnetostrictive rod and last permanent magnets constitute one road closed magnetic path; Upper magnet yoke, drive coil, lower yoke, following permanent magnets, magnetostrictive rod and last permanent magnets constitute another road closed magnetic path; Upper magnet yoke and lower yoke are located at permanent-magnetic cylindrical and drive coil two ends;
Described steering mechanism is made of adaptor A, adaptor B, back shaft and ball pivot connecting rod; One end of back shaft is connected the bottom of microscope base, and the other end is connected on the back up pad; The top of adaptor A is provided with connecting hole, and the bottom of adaptor A is provided with down connecting hole; The ball pivot connecting rod is placed in the last connecting hole of adaptor A, and the ball pivot connecting rod is placed in the last connecting hole of adaptor B;
Described fast steering reflection mirror with giant magnetostrictive driver, the upper end cover of its magnetic telescopic driver A and the upper end cover of magnetic telescopic driver B are half flange arrangement.
Described fast steering reflection mirror with giant magnetostrictive driver, its magnetic telescopic driver A and magnetic telescopic driver B installation site are on mutually perpendicular two axis of base.
Described fast steering reflection mirror with giant magnetostrictive driver, the take-off lever of its microscope base and magnetic telescopic driver A, the take-off lever of magnetic telescopic driver B and steering mechanism form displacement and amplify ball pivot.
Described fast steering reflection mirror with giant magnetostrictive driver, the following connecting hole of the take-off lever of its magnetic telescopic driver A and the adaptor A of steering mechanism is to flexibly connect, and the following connecting hole of the adaptor B of the take-off lever of magnetic telescopic driver B and steering mechanism is to flexibly connect.
Described fast steering reflection mirror with giant magnetostrictive driver, the take-off lever of its magnetic telescopic driver A and magnetic telescopic driver B and steering mechanism's acting in conjunction make the polishing metallic-membrane plating reflector that is installed on the microscope base make banking motion.
Described fast steering reflection mirror with giant magnetostrictive driver, the displacement output of its magnetic telescopic driver A and magnetic telescopic driver B is along its axial direction.
The advantage of fast steering reflection mirror with giant magnetostrictive driver of the present invention is: (1) is applicable to large caliber reflecting mirror; (2) physical construction can realize the motion of bidimensional high sensitivity corner, and its angle range is big; (3) rigidity of structure is good, the mechanical resonant frequency height; (4) adopt the driving pivot of novel giant magnetostriction material first as driver.
Description of drawings
Fig. 1 is the external structure of steering reflection mirror of the present invention.
Fig. 2 is the cut-away view of the steering reflection mirror of no outer cover.
Fig. 3 A is the cut-open view of magnetic telescopic driver.
Fig. 3 B is that the A of Fig. 3 A is to view.
Fig. 4 A is the structural drawing of steering mechanism.
Fig. 4 B is the cut-open view of adaptor.
Fig. 4 C is the structural drawing of microscope base.
Among the figure: 1. on the 113. ball pivot holes 121., 112. ball pivot holes, steering mechanism 101. microscope bases, 102. adaptor A 103. adaptor B104. ball pivot connecting rods, 105. ball pivot connecting rod 106. back shafts, 111. ball pivot holes on 207. times permanent magnets 208. of 122. times connecting holes of connecting hole, 2. magnetic telescopic driver B 201. upper end covers, 202. take-off lever 203. housings, 204. bottom end cover 205. permanent-magnetic cylindricals, 206. magnetostrictive rods permanent magnets 209. power output holes 210. installing holes 211. connecting holes 212. installing holes 213. springs 215. upper magnet yokes 216. lower yokes 217. excitation coils 3. magnetic telescopic driver A 301. upper end covers 4. speculums 401. mirrors cover 8. times outer cover 9. power connections of outer cover on 5. gripper shoes, 6. bases 7.
Embodiment
The present invention is described in further detail below in conjunction with accompanying drawing.
The present invention is a kind of fast steering reflection mirror with giant magnetostrictive driver, include lower house, polishing metallic-membrane plating reflector 4, back up pad 5, base 6, steering mechanism 1, magnetic telescopic driver A2 and magnetic telescopic driver B3, described upper shell 7 is sleeved between the microscope base 101 and back up pad 5 of polishing metallic-membrane plating reflector 4, lower house 8 is sleeved between back up pad 5 and the base 6, and lower house 8 is provided with power connection 9; Magnetic telescopic driver A2 and magnetic telescopic driver B3 are installed between described back up pad 5 and the base 6; Between the microscope base 101 of described polishing metallic-membrane plating reflector 4 and the back up pad 5 steering mechanism 1 is installed; Described magnetic telescopic driver A2 is identical with described magnetic telescopic driver B3 structure, shown in Fig. 1,2.
In the present invention, a kind of fast steering reflection mirror based on the giant magnetostriction material driver is provided, as the reflector apparatus of control bundle direction between target and receiver, can be applicable in astronomical telescope, laser communications, image stabilization, composite shaft precision tracking, the aiming optical system.The bidimensional fast steering reflection mirror as system drive, passes through displacement amplification and supporting mechanism and the hinged formation of microscope base by two giant magnetostrictive driver drivers.The giant magnetostrictive driver driver drives pivot by the conduct of directional solidification giant magnetostriction material rod.The existing big dynamic range of this fast steering reflection mirror has the calibration capability of certain bandwidth again, can realize that large-scale quick high accuracy follows the tracks of.
Shown in Fig. 3 A, 3B, magnetic telescopic driver has been used the structure of the giant magnetostrictive material vibration actuator of patent publication No. 03264617.8, and the structure of the disclosure has been carried out corresponding improvement handled, make the driver that uses in the present invention have higher magnetostriction performance.Magnetic telescopic driver A2 is the core driving element by magnetostrictive rod 206 (TbDyFe rod) in the present invention, it includes upper end cover 201, bottom end cover 204, stainless steel outer sleeve tube 203, permanent-magnetic cylindrical 205, drive coil 217, magnetostrictive rod 206, the outside of magnetostrictive rod 206 is with drive coil 217, the outside of drive coil 217 is with permanent-magnetic cylindrical 205, be provided with upper magnet yoke 215 and lower yoke 216 at the two ends of magnetostrictive rod 206, drive coil 217 and permanent-magnetic cylindrical 205, upper magnet yoke 215 and lower yoke 216 form a closed magnetic path.Stainless steel outer sleeve tube 203 is enclosed within the outside of permanent-magnetic cylindrical 205, and both ends are provided with upper end cover 201 and bottom end cover 204; Be separately installed with permanent magnets 208, following permanent magnets 207 at the two ends of magnetostrictive rod 206; Be provided with the hole of stretching out for take-off lever 202 on upper magnet yoke 215 and upper end cover 201, take-off lever 202 is equipped with dish spring 213 with upper end cover 201 bottom recesses places; Drive coil 217 provides excitation field for magnetostrictive rod 206, and the outside that permanent-magnetic cylindrical 205 is enclosed within drive coil 217 provides bias magnetic field for driving rod.The yoke at the two ends up and down of permanent-magnetic cylindrical 205, drive coil 217 and magnetostrictive rod 206 (upper magnet yoke 215, lower yoke 216) forms closed magnetic path.Upper magnet yoke 215 is cut fluted, cooperate with the flange of the upper end cover 201 (half flange plate structure) of take-off lever 202, with restriction driver take-off lever 202 along circumferentially rotating.Upper end cover 201 applies precompression for magnetostrictive rod 206 by dish spring 213 and take-off lever 202.Two Installation and Debugging holes 212 are arranged on the half flange upper end cover 201, on half flange section, be evenly distributed with three through holes, the support fixation effect is played in the upper end of driver with the upper backup pad 5 of fast steering reflection mirror.The bottom of bottom end cover 204 is provided with connecting hole 211 and mounting hole 210, and connecting hole 211 is used for realizing with base 6 fixing.The upper magnet yoke 215 of described magnetic telescopic driver A2, permanent-magnetic cylindrical 205, lower yoke 216, following permanent magnets 207, magnetostrictive rod 206 and last permanent magnets 208 constitute one road closed magnetic path; Upper magnet yoke 215, drive coil 217, lower yoke 216, following permanent magnets 207, magnetostrictive rod 206 and last permanent magnets 208 constitute another road closed magnetic paths.
As shown in Figure 2, magnetic telescopic driver A2 and magnetic telescopic driver B3 are installed on base 6 mutually perpendicular two axis.In mirror back surface, the bidimensional that catoptron utilizes the motion flexible and hinge of driver to produce respectively around the X-Y axle rotates along x axle and y axle for two giant magnetostrictive driver driver omnidirectional distribution.The bottom of driver is fixed on the pedestal of system, and output end of driver links to each other with the microscope base of catoptron with hinged form by displacement amplifying mechanism.Driver receives the drive signal from servo-drive system, produces displacement of the lines, is fulcrum with the central support shaft, thereby finishes the corner motion of mirror.Because system is with two driver quadrature arrangement, two rotating shaft x, y can not produce mobile, more can not mix.Fast steering reflection mirror with giant magnetostrictive driver is a new system, can be implemented in the driving on a large scale under load, the space invariance condition, reduces the non-linear of control system.Structure is simple relatively, and volume is less, and mirror quality is lighter.
Shown in Fig. 4 A, Fig. 4 B, steering mechanism 1 is made of adaptor A102, adaptor B103, back shaft 106 and ball pivot connecting rod; One end of back shaft 106 is connected the bottom of microscope base 104, and the other end is connected on the back up pad 5; The top of adaptor A102 is provided with connecting hole 121, and the bottom of adaptor A102 is provided with down connecting hole 122; Ball pivot connecting rod 104 is placed in the last connecting hole 121 of adaptor A102, and ball pivot connecting rod 105 is placed in the last connecting hole of adaptor B103.
In the present invention; metallic-membrane plating reflector sheet 4 is contained on the microscope base 101; can cover 401 with mirror when not using protects it; metallic-membrane plating reflector sheet 4 is supported by steering mechanism 1; in other words; be that back shaft 106 by the take-off lever of the take-off lever 202 of magnetic telescopic driver A2, magnetic telescopic driver B3 supports, and make the LASER Light Source of irradiation on the metallic-membrane plating reflector sheet 4 by the magnetostriction performance of driver, the point of irradiation that reflexes on the target through metallic-membrane plating reflector sheet 4 remains on the same point position.So microscope base 101 forms displacement amplification ball pivot with the take-off lever 202 of magnetic telescopic driver A2, take-off lever and the steering mechanism 1 of magnetic telescopic driver B3.
In the present invention, the control end joint 9 on the catoptron is used for being connected (shown in Figure 1) with the output signal end of catoptron control system.
The giant magnetostriction material driver that uses among the present invention is exported displacement measurement, its test result shows that driver is in horizontal positioned, output terminal load 1Kg mass, under the input current of ± 2A, the linear section of driver moves output and surpasses ± 40 μ m, after amplifying through displacement, under the minute surface condition of Φ 110mm bore, the angle range of this fast steering reflection mirror surpasses ± 10 fens, and mechanical resonant frequency surpasses 230Hz, and closed-loop bandwidth surpasses 60Hz.
Claims (8)
1, a kind of fast steering reflection mirror with giant magnetostrictive driver, include lower house, polishing metallic-membrane plating reflector (4), back up pad (5), base (6), it is characterized in that: also include steering mechanism (1), magnetic telescopic driver A (2) and magnetic telescopic driver B (3), described upper shell (7) is sleeved between the microscope base (101) and back up pad (5) of polishing metallic-membrane plating reflector (4), lower house (8) is sleeved between back up pad (5) and the base (6), and lower house (8) is provided with power connection (9); Magnetic telescopic driver A (2) and magnetic telescopic driver B (3) are installed between described back up pad (5) and the base (6); Between the microscope base (101) of described polishing metallic-membrane plating reflector (4) and the back up pad (5) steering mechanism (1) is installed; Described magnetic telescopic driver A (2) is identical with described magnetic telescopic driver B (3) structure;
The upper magnet yoke (215) of described magnetic telescopic driver A (2), permanent-magnetic cylindrical (205), lower yoke (216), following permanent magnets (207), magnetostrictive rod (206) and last permanent magnets (208) constitute one road closed magnetic path; Upper magnet yoke (215), drive coil (217), lower yoke (216), following permanent magnets (207), magnetostrictive rod (206) and last permanent magnets (208) constitute another road closed magnetic path; Upper magnet yoke (215) and lower yoke (216) are located at permanent-magnetic cylindrical (205) and drive coil (217) two ends;
Described steering mechanism (1) is made of adaptor A (102), adaptor B (103), back shaft (106) and ball pivot connecting rod; One end of back shaft (106) is connected the bottom of microscope base (104), and the other end is connected on the back up pad (5); The top of adaptor A (102) is provided with connecting hole (121), and the bottom of adaptor A (102) is provided with down connecting hole (122); Ball pivot connecting rod (104) is placed in the last connecting hole (121) of adaptor A (102), and ball pivot connecting rod (105) is placed in the last connecting hole of adaptor B (103);
2, fast steering reflection mirror with giant magnetostrictive driver according to claim 1 is characterized in that: the upper end cover (201) of magnetic telescopic driver A (2) and the upper end cover (301) of magnetic telescopic driver B (3) are half flange arrangement.
3, fast steering reflection mirror with giant magnetostrictive driver according to claim 1 is characterized in that: magnetic telescopic driver A (2) and magnetic telescopic driver B (3) installation site are on mutually perpendicular two axis of base (6).
4, fast steering reflection mirror with giant magnetostrictive driver according to claim 1 is characterized in that: microscope base (101) forms displacement amplification ball pivot with the take-off lever (202) of magnetic telescopic driver A (2), take-off lever and the steering mechanism (1) of magnetic telescopic driver B (3).
5, fast steering reflection mirror with giant magnetostrictive driver according to claim 1, it is characterized in that: the take-off lever (202) of magnetic telescopic driver A (2) is to flexibly connect with the following connecting hole (122) of the adaptor A (102) of steering mechanism (1), and the following connecting hole of the adaptor B (103) of the take-off lever of magnetic telescopic driver B (3) and steering mechanism (1) is to flexibly connect.
6, fast steering reflection mirror with giant magnetostrictive driver according to claim 1 is characterized in that: the take-off lever of magnetic telescopic driver A (2) and magnetic telescopic driver B (3) and steering mechanism (1) acting in conjunction make the polishing metallic-membrane plating reflector (4) that is installed on the microscope base (101) make banking motion.
7, fast steering reflection mirror with giant magnetostrictive driver according to claim 1 is characterized in that: the displacement output of magnetic telescopic driver A (2) and magnetic telescopic driver B (3) is along its axial direction.
8, fast steering reflection mirror with giant magnetostrictive driver according to claim 1 is characterized in that: the one dimension of steering reflection mirror or two dimensional motion adopt one, two or four giant magnetostrictive driver driver drives.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB2006100028708A CN100350280C (en) | 2006-02-09 | 2006-02-09 | Fast steering reflection mirror with giant magnetostrictive driver |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB2006100028708A CN100350280C (en) | 2006-02-09 | 2006-02-09 | Fast steering reflection mirror with giant magnetostrictive driver |
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| CN1808186A true CN1808186A (en) | 2006-07-26 |
| CN100350280C CN100350280C (en) | 2007-11-21 |
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| Application Number | Title | Priority Date | Filing Date |
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| CNB2006100028708A Expired - Fee Related CN100350280C (en) | 2006-02-09 | 2006-02-09 | Fast steering reflection mirror with giant magnetostrictive driver |
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Cited By (12)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN101482643B (en) * | 2009-02-23 | 2010-09-22 | 中国科学院光电技术研究所 | Bidimensional large-diameter fast control reflection mirror |
| CN102377363A (en) * | 2011-10-19 | 2012-03-14 | 北京航空航天大学 | Dual-permanent-magnet compensation bias magnetic circuit of giant magnetostrictive actuator |
| CN103433934A (en) * | 2013-09-16 | 2013-12-11 | 胡明建 | Designing method of externally-driven magnetic-latching parallel stepping oscillation plane |
| CN103475287A (en) * | 2013-09-24 | 2013-12-25 | 胡明建 | Design method of magnetic latching parallel-stepping and rotating extensible joint |
| CN103475288A (en) * | 2013-09-24 | 2013-12-25 | 胡明建 | Design method of magnetic latching parallel-stepping, rotating and swinging extensible joint |
| CN103465271A (en) * | 2013-09-23 | 2013-12-25 | 胡明建 | Design method for magnetic latching parallel stepping rotary oscillation joint |
| CN103869464A (en) * | 2014-03-06 | 2014-06-18 | 北京航空航天大学 | High-precision large-dynamic flexible rapid deflection mirror |
| CN107817542A (en) * | 2016-09-14 | 2018-03-20 | 卡尔蔡司Smt有限责任公司 | Optical module with tiltable optical surface |
| CN107907992A (en) * | 2017-12-01 | 2018-04-13 | 西安交通大学 | The fast steering mirror actuation mechanism and start method of direct stress electromagnetic drive |
| CN112346238A (en) * | 2020-11-02 | 2021-02-09 | 西安交通大学 | Piezoelectric two-dimensional fast reflecting mirror without axial displacement and driving and deflection angle measuring method |
| CN113791493A (en) * | 2021-06-03 | 2021-12-14 | 北京航空航天大学 | Quick reflector based on macro-micro two-stage composite actuation |
| CN114396450A (en) * | 2021-12-15 | 2022-04-26 | 合肥工业大学 | Magnetostrictive active suspension of power assembly |
Family Cites Families (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4655560A (en) * | 1985-08-05 | 1987-04-07 | United Technologies Corporation | Demagnetization compensated deformable magnetostrictive mirror |
| US5543670A (en) * | 1993-04-06 | 1996-08-06 | New Focus, Inc. | Magnetostrictive actuator for optical alignment screws |
| US5877432A (en) * | 1996-11-26 | 1999-03-02 | The University Of Dayton | Magnetostrictive actuator |
| US5880542A (en) * | 1997-05-30 | 1999-03-09 | Satcon Technology Corporation | Light reaction mass actuator |
| CN2461202Y (en) * | 2000-12-14 | 2001-11-21 | 郑立臣 | Over-magnetostriction material driver |
| CN2621239Y (en) * | 2003-06-19 | 2004-06-23 | 北京航空航天大学 | Super magnetostriction material vibration actuator |
| JP4007333B2 (en) * | 2004-03-19 | 2007-11-14 | ソニー株式会社 | Magnetostrictive actuator |
-
2006
- 2006-02-09 CN CNB2006100028708A patent/CN100350280C/en not_active Expired - Fee Related
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| CN101482643B (en) * | 2009-02-23 | 2010-09-22 | 中国科学院光电技术研究所 | Bidimensional large-diameter fast control reflection mirror |
| CN102377363A (en) * | 2011-10-19 | 2012-03-14 | 北京航空航天大学 | Dual-permanent-magnet compensation bias magnetic circuit of giant magnetostrictive actuator |
| CN102377363B (en) * | 2011-10-19 | 2014-05-28 | 北京航空航天大学 | Dual-permanent-magnet compensation bias magnetic circuit of giant magnetostrictive actuator |
| CN103433934A (en) * | 2013-09-16 | 2013-12-11 | 胡明建 | Designing method of externally-driven magnetic-latching parallel stepping oscillation plane |
| CN103433934B (en) * | 2013-09-16 | 2016-01-20 | 胡明建 | A kind of outer method for designing of driving magnetic and keeping parallel stepping plane of oscillation |
| CN103465271B (en) * | 2013-09-23 | 2015-11-11 | 胡明建 | A kind of magnetic keeps the method for designing in parallel stepping rotary oscillation joint |
| CN103465271A (en) * | 2013-09-23 | 2013-12-25 | 胡明建 | Design method for magnetic latching parallel stepping rotary oscillation joint |
| CN103475288B (en) * | 2013-09-24 | 2016-01-06 | 胡明建 | A kind of magnetic keeps the method for designing of parallel stepping rotary oscillation telescopic joint |
| CN103475287B (en) * | 2013-09-24 | 2015-12-23 | 胡明建 | A kind of magnetic keeps the method for designing in parallel stepping rotary extension joint |
| CN103475288A (en) * | 2013-09-24 | 2013-12-25 | 胡明建 | Design method of magnetic latching parallel-stepping, rotating and swinging extensible joint |
| CN103475287A (en) * | 2013-09-24 | 2013-12-25 | 胡明建 | Design method of magnetic latching parallel-stepping and rotating extensible joint |
| CN103869464B (en) * | 2014-03-06 | 2016-06-15 | 北京航空航天大学 | The flexible fast steering mirror of high accuracy |
| CN103869464A (en) * | 2014-03-06 | 2014-06-18 | 北京航空航天大学 | High-precision large-dynamic flexible rapid deflection mirror |
| CN107817542B (en) * | 2016-09-14 | 2021-08-10 | 卡尔蔡司Smt有限责任公司 | Optical module with tiltable optical surface |
| CN107817542A (en) * | 2016-09-14 | 2018-03-20 | 卡尔蔡司Smt有限责任公司 | Optical module with tiltable optical surface |
| CN107907992A (en) * | 2017-12-01 | 2018-04-13 | 西安交通大学 | The fast steering mirror actuation mechanism and start method of direct stress electromagnetic drive |
| CN112346238A (en) * | 2020-11-02 | 2021-02-09 | 西安交通大学 | Piezoelectric two-dimensional fast reflecting mirror without axial displacement and driving and deflection angle measuring method |
| CN112346238B (en) * | 2020-11-02 | 2021-10-22 | 西安交通大学 | Piezoelectric two-dimensional fast reflecting mirror without axial displacement and driving and deflection angle measuring method |
| CN113791493A (en) * | 2021-06-03 | 2021-12-14 | 北京航空航天大学 | Quick reflector based on macro-micro two-stage composite actuation |
| CN113791493B (en) * | 2021-06-03 | 2022-09-20 | 北京航空航天大学 | Quick reflector based on macro-micro two-stage composite actuation |
| CN114396450A (en) * | 2021-12-15 | 2022-04-26 | 合肥工业大学 | Magnetostrictive active suspension of power assembly |
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