CN103869464B - The flexible fast steering mirror of high accuracy - Google Patents
The flexible fast steering mirror of high accuracy Download PDFInfo
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- CN103869464B CN103869464B CN201410081008.5A CN201410081008A CN103869464B CN 103869464 B CN103869464 B CN 103869464B CN 201410081008 A CN201410081008 A CN 201410081008A CN 103869464 B CN103869464 B CN 103869464B
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- support plate
- flexible hinge
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- switching beam
- mirror
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- 239000002520 smart material Substances 0.000 claims abstract description 33
- 238000004026 adhesive bonding Methods 0.000 claims description 4
- 238000006073 displacement reaction Methods 0.000 abstract description 6
- 230000008901 benefit Effects 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 239000000203 mixture Substances 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- 230000004044 response Effects 0.000 description 2
- 230000003321 amplification Effects 0.000 description 1
- 238000004458 analytical method Methods 0.000 description 1
- 238000005452 bending Methods 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 238000012938 design process Methods 0.000 description 1
- 230000009977 dual effect Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 238000003199 nucleic acid amplification method Methods 0.000 description 1
- 230000001737 promoting effect Effects 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 238000012916 structural analysis Methods 0.000 description 1
- 230000001360 synchronised effect Effects 0.000 description 1
Abstract
The invention discloses a kind of high accuracy Larger Dynamic flexibility fast steering mirror, including base, the first support plate, the second support plate, the 3rd support plate, the first side plate, the second side plate, the 3rd side plate, the first smart material driver, the second smart material driver, top cover, the first switching beam, the second switching beam, the first flexible hinge, the second flexible hinge, the 3rd flexible hinge, the 4th flexible hinge, the 5th flexible hinge, pallet, mirror; During driver output displacement of the present invention driver output end produce to curve moment and deflection mirror surface in opposite direction, use the problem that effectively output reduces that is absent from during smart material driver, effective output can be improved on the contrary. The present invention effectively reduces and curves moment size, improves smart material driver reliability in structure is applied.
Description
Technical field
The present invention relates to a kind of high accuracy Larger Dynamic flexibility fast steering mirror, for alignment and stable light-beam in various optical systems.
Background technology
Fast steering mirror (hereinafter referred to as fast anti-mirror) is used for driving and stable light-beam in various optical systems. As the equipment of sensor, in astronomy telescope, laser communications system, very meaningful in the medium application of image stability, it has various structures form. Its performance indications include the bore of mirror, the size of required driving force, and banking motion couples with rectilinear motion, the change etc. of inclination angle and position, all become interactional part in the design process.
Fast anti-mirror has two kinds of motion modes: one-dimensional (single shaft driving) motion mode and two dimension (Two axle drive) motion mode. Single shaft drives and refers to that minute surface has 1 around controlling the degree of freedom that axle rotates. The maximum magnitude of its following range and the deflection of fast anti-mirror determines the scope that can compensate. Two axle drive refers to that fast anti-mirror can control axle around two vertical X-Y and produce two dimension rotating angle movement, and minute surface has 2 degree of freedom, and following range is expanded to two dimension. The fast anti-mirror of single driver single drive shaft and the fast anti-mirror of dual drive single drive shaft and the fast anti-mirror of three driver double driving shafts can be divided into again according to number of drives difference.
Can be divided into according to the fast anti-mirror structure of axle system kind and have the fast anti-mirror of rigidity and 2 kinds of the fast anti-mirror of flexibility. The fast anti-mirror of rigidity adopts traditional echanical shaft system, by driving mechanical axis to drive the deflection of reflecting mirror; Flexible fast anti-mirror structure adopts flexible hinge, when driving fast anti-mirror to run, flexible hinge forms one ' imaginary axis ', instead of mechanical axis and drive the synchronous axial system of reflecting mirror, flexible fast anti-mirror controls to require to set up a set of strict mathematical relationship between structural analysis and control system analysis, use technical difficulty less higher than the fast anti-mirror of rigidity and dynamic range, but adopt flexible hinge to coordinate the fast anti-mirror of flexibility of intelligent driver to have response is fast, precision high, without frictional dissipation and resonant frequency advantages of higher.
Summary of the invention
The invention aims to solve the problems referred to above, a kind of high accuracy Larger Dynamic flexibility fast steering mirror is proposed, quick deflecting mirror adopts the flexible beam type enlarger being connected with structure wall, fast in the response retaining flexible shaft system fast steering mirror, precision high, friction free advantage while improving resonant frequency further, is effectively improved the dynamic range of the fast anti-mirror of flexibility.
A kind of high accuracy Larger Dynamic flexibility fast steering mirror, including base, the first support plate, the second support plate, the 3rd support plate, the first side plate, the second side plate, the 3rd side plate, the first smart material driver, the second smart material driver, top cover, the first switching beam, the second switching beam, the first flexible hinge, the second flexible hinge, the 3rd flexible hinge, the 4th flexible hinge, the 5th flexible hinge, pallet, mirror;
First smart material driver, the second smart material driver lower end be connected with base respectively through screw, the first support plate, the second support plate, the 3rd support plate lower end be connected with base respectively through screw; First side plate both sides are connected by screw and the first support plate, the 3rd support plate; Second side plate both sides are connected by screw and the second support plate, the first support plate; 3rd side plate both sides are connected by screw and the second support plate and the 3rd support plate;
One end of first flexible hinge is connected by screw with the 3rd support plate upper end, and the other end is threaded connection the first switching beam; One end of second flexible hinge is connected by screw with the upper end of the second support plate, and the other end is threaded connection the second switching beam;
The outfan of the first smart material driver is through the through hole of the first switching beam and is connected with nut; The outfan of the second smart material driver is through the through hole of the second switching beam and is connected with nut;
First support plate, the second support plate, the 3rd support plate upper end be connected with top cover respectively through screw;
One end of 3rd flexible hinge is connected by screw with the first switching beam; One end of 5th flexible hinge is connected by screw with the second switching beam; One end of 4th flexible hinge is connected by screw with top cover;
The other end of the 3rd flexible hinge, the other end of the 4th flexible hinge, the 5th flexible hinge the other end be connected by screw with pallet respectively;
Mirror is connected on pallet by gluing;
Top cover has two grooves, and the first switching beam, the second switching beam, the first flexible hinge, the second flexible hinge and top cover are positioned at two grooves, do not contact with groove, are in same plane with top cover
It is an advantage of the current invention that:
(1) during driver output displacement driver output end produce to curve moment and deflection mirror surface in opposite direction, use the problem that effectively output reduces that is absent from during smart material driver, effective output can be improved on the contrary;
(2) effectively reduction curves moment size, improves smart material driver reliability in structure is applied;
(3) switching beam is connected with gripper shoe by flexible hinge, constitutes a lever displacement amplifying mechanism when driver works, the dynamic range of fast anti-mirror is greatly improved;
(4) rigidity of structure of fast anti-mirror strengthens, thus improve the resonant frequency of total;
The Two axle drive system that 2 yawing axis of (5) 3 flexible hinge compositions are constituted is effectively increased the execution precision of fast anti-mirror.
Accompanying drawing explanation
Fig. 1 is that existing intellectual material drives fast anti-mirror to be intended to;
Fig. 2 is the schematic diagram of the solution of the present invention;
Fig. 3 is the overall appearance schematic diagram of the present invention;
Fig. 4 is the concrete structure schematic diagram of the present invention;
In figure:
1-base 2-the first side plate 3-the first support plate
4-the second side plate 5-the second support plate 6-the 3rd side plate
7-the 3rd support plate 8-the first smart material driver 9-the second smart material driver
10-top cover 11-the first switching beam 12-the second switching beam
13-the first flexible hinge 14-the second flexible hinge 15-the 3rd flexible hinge
16-the 4th flexible hinge 17-the 5th flexible hinge 18-pallet
19-mirror
Detailed description of the invention
Below in conjunction with drawings and Examples, the present invention is described in further detail.
In fast anti-mirror structure the outfan of driver from minute surface center of rotation supporting hinges distance more close to the deflection angle that obtains more big, but owing in the fast anti-mirror system of the size limitation twin shaft of driver, driver output end cannot act directly on from the distance close to central supported hinge, current scheme is the active position of outfan simply to be moved axle by a rigidity adaptor to from the application point close to central supported hinge, as shown in Figure 1. This scheme is in use, one can be produced at driver output end when driver output displacement and identical with deflection mirror surface direction curve moment M, smart material driver is when bearing moment of flexure, internal core rod produces the flexural deformation identical with deflection mirror surface direction, the effectively output not only making driver is greatly reduced (being practically without the effect reaching to improve dynamic range), and the intelligent driver also making bending strength very low very easily damages. The displacement amplification device of present invention design and the gripper shoe of fast anti-mirror are connected by flexible hinge and effectively solve the problems referred to above, as in figure 2 it is shown, additionally adopt the Two axle drive system that 2 yawing axis of 3 flexible hinge compositions are constituted to be effectively increased the execution precision of fast anti-mirror simultaneously.
Embodiment 1:
A kind of high accuracy Larger Dynamic flexibility fast steering mirror of the present invention, as shown in Figure 3, Figure 4, including base the 1, first support plate the 3, second support plate the 5, the 3rd support plate the 7, first side plate the 2, second side plate the 4, the 3rd side plate the 6, first smart material driver the 8, second smart material driver 9, top cover the 10, first switching beam the 11, second switching beam the 12, first flexible hinge the 13, second flexible hinge the 14, the 3rd flexible hinge the 15, the 4th flexible hinge the 16, the 5th flexible hinge 17, pallet 18, mirror 19.
The lower end of first smart material driver the 8, second smart material driver 9 is connected with base 1 respectively through screw, and the lower end of first support plate the 3, second support plate the 5, the 3rd support plate 7 is connected with base 1 respectively through screw; First side plate 2 both sides are connected by screw and the first support plate the 3, the 3rd support plate 7; Second side plate 4 both sides are connected by screw and second support plate the 5, first support plate 3; 3rd side plate 6 both sides are connected with the second support plate 5 and the 3rd support plate 7 by screw;
One end of first flexible hinge 13 is connected by screw with the 3rd support plate 7 upper end, and the other end is threaded connection the first switching beam 11; One end of second flexible hinge 14 is connected by screw with the upper end of the second support plate 5, and the other end is threaded connection the second switching beam 12;
The outfan of the first smart material driver 8 is through the through hole of the first switching beam 11 and is connected with nut; The outfan of the second smart material driver 9 is through the through hole of the second switching beam 12 and is connected with nut;
The upper end of first support plate the 3, second support plate the 5, the 3rd support plate 7 is connected with top cover 10 respectively through screw;
One end of 3rd flexible hinge 15 is connected by screw with the first switching beam 11; One end of 5th flexible hinge 17 is connected by screw with the second switching beam 12; One end of 4th flexible hinge 16 is connected by screw with top cover 10;
The other end of the 3rd flexible hinge 15, the other end of the 4th flexible hinge 16, the 5th flexible hinge 17 the other end be connected by screw with pallet 18 respectively;
Mirror 19 is connected on pallet 18 by gluing.
Top cover 10 has two grooves, and first switching beam the 11, second switching beam the 12, first flexible hinge the 13, second flexible hinge 14 is positioned at two grooves with top cover 10, but does not contact with groove, is in same plane with top cover 10
Being fixed by screws in mounting seat by base 1, namely high accuracy Larger Dynamic flexibility fast steering mirror can start working. Driver output displacement during work, drives the rotation of switching beam, thus promoting the flexible hinge being connected with pallet the deflection driving pallet and minute surface, it is achieved the function of deflection mirror surface. Wherein smart material driver can use magnetic telescopic driver, piezoelectric actuator and voice coil motor etc., and flexible hinge can adopt the flexible hinge of the otch such as elliptical incision, straight circle otch.
Recording by experiment, adopt when using magnetic telescopic driver and elliptical incision flexible hinge the structural design in the present invention to compare traditional deflecting mirror structural design, dynamic range can improve 60%.
Implement 2:
If the smart material driver 9 removed in this structure, switching beam 12, flexible hinge 14, flexible hinge 17, other connects and structure remains unchanged, then may be constructed a flexible fast anti-mirror of single driver single drive shaft rotated around X-axis.
Claims (4)
1. the flexible fast steering mirror of high accuracy, including base, the first support plate, the second support plate, the 3rd support plate, the first side plate, the second side plate, the 3rd side plate, the first smart material driver, the second smart material driver, top cover, the first switching beam, the second switching beam, the first flexible hinge, the second flexible hinge, the 3rd flexible hinge, the 4th flexible hinge, the 5th flexible hinge, pallet, mirror;
First smart material driver, the second smart material driver lower end be connected with base respectively through screw, the first support plate, the second support plate, the 3rd support plate lower end be connected with base respectively through screw; First side plate both sides are connected with the first support plate, the 3rd support plate respectively by screw; Second side plate both sides are connected with the second support plate, the first support plate respectively by screw; 3rd side plate both sides are connected with the second support plate and the 3rd support plate respectively by screw;
One end of first flexible hinge is connected by screw with the 3rd support plate upper end, and the other end is threaded connection the first switching beam; One end of second flexible hinge is connected by screw with the upper end of the second support plate, and the other end is threaded connection the second switching beam;
The outfan of the first smart material driver is through the through hole of the first switching beam and is connected with nut; The outfan of the second smart material driver is through the through hole of the second switching beam and is connected with nut;
First support plate, the second support plate, the 3rd support plate upper end be connected with top cover respectively through screw;
One end of 3rd flexible hinge is connected by screw with the first switching beam; One end of 5th flexible hinge is connected by screw with the second switching beam; One end of 4th flexible hinge is connected by screw with top cover;
The other end of the 3rd flexible hinge, the other end of the 4th flexible hinge, the 5th flexible hinge the other end be connected by screw with pallet respectively;
Mirror is connected on pallet by gluing;
Top cover has two grooves, first switching beam, the first flexible hinge are positioned at a groove of top cover, second switching beam, the second flexible hinge are positioned at another groove of top cover, first switching beam, the second switching beam, the first flexible hinge and the second flexible hinge do not contact with groove, are in same plane with top cover.
2. the flexible fast steering mirror of a kind of high accuracy according to claim 1, described smart material driver adopts magnetic telescopic driver or piezoelectric actuator or voice coil motor.
3. the flexible fast steering mirror of a kind of high accuracy according to claim 1, described flexible hinge adopts elliptical incision or the flexible hinge of straight circle otch.
4. the flexible fast steering mirror of high accuracy, including base, the first support plate, the second support plate, the 3rd support plate, the first side plate, the second side plate, the 3rd side plate, the first smart material driver, top cover, the first switching beam, the first flexible hinge, the 3rd flexible hinge, the 4th flexible hinge, pallet, mirror;
The lower end of the first smart material driver is connected with base respectively through screw, the first support plate, the second support plate, the 3rd support plate lower end be connected with base respectively through screw; First side plate both sides are connected with the first support plate, the 3rd support plate respectively by screw; Second side plate both sides are connected with the second support plate, the first support plate respectively by screw; 3rd side plate both sides are connected with the second support plate and the 3rd support plate respectively by screw;
One end of first flexible hinge is connected by screw with the 3rd support plate upper end, and the other end is threaded connection the first switching beam;
The outfan of the first smart material driver is through the through hole of the first switching beam and is connected with nut;
First support plate, the second support plate, the 3rd support plate upper end be connected with top cover respectively through screw;
One end of 3rd flexible hinge is connected by screw with the first switching beam; One end of 4th flexible hinge is connected by screw with top cover;
The other end of the 3rd flexible hinge, the 4th flexible hinge the other end be connected by screw with pallet respectively;
Mirror is connected on pallet by gluing;
Top cover has two grooves, and the first switching beam, the first flexible hinge are positioned at one of them groove of top cover, do not contact with groove, are in same plane with top cover.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410081008.5A CN103869464B (en) | 2014-03-06 | 2014-03-06 | The flexible fast steering mirror of high accuracy |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410081008.5A CN103869464B (en) | 2014-03-06 | 2014-03-06 | The flexible fast steering mirror of high accuracy |
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| Publication Number | Publication Date |
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| CN103869464A CN103869464A (en) | 2014-06-18 |
| CN103869464B true CN103869464B (en) | 2016-06-15 |
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| CN201410081008.5A Expired - Fee Related CN103869464B (en) | 2014-03-06 | 2014-03-06 | The flexible fast steering mirror of high accuracy |
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Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN106597459B (en) * | 2016-11-30 | 2019-04-30 | 中国人民解放军陆军炮兵防空兵学院 | Laser Active denial system |
| CN109946830A (en) * | 2019-04-28 | 2019-06-28 | 广东工业大学 | A kind of laser deflection device |
Citations (4)
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|---|---|---|---|---|
| US6804039B1 (en) * | 2003-10-22 | 2004-10-12 | Reflectivity, Inc. | Multilayer hinge structures for micro-mirror arrays in projection displays |
| CN1808186A (en) * | 2006-02-09 | 2006-07-26 | 北京航空航天大学 | Fast steering reflection mirror with giant magnetostrictive driver |
| EP1892557A1 (en) * | 2006-08-25 | 2008-02-27 | Spatial Photonics, Inc. | High fill-ratio mirror-based spatial light modulator |
| CN102981243A (en) * | 2012-11-02 | 2013-03-20 | 华中科技大学 | Two-dimensional quick control reflecting mirror |
-
2014
- 2014-03-06 CN CN201410081008.5A patent/CN103869464B/en not_active Expired - Fee Related
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6804039B1 (en) * | 2003-10-22 | 2004-10-12 | Reflectivity, Inc. | Multilayer hinge structures for micro-mirror arrays in projection displays |
| CN1808186A (en) * | 2006-02-09 | 2006-07-26 | 北京航空航天大学 | Fast steering reflection mirror with giant magnetostrictive driver |
| EP1892557A1 (en) * | 2006-08-25 | 2008-02-27 | Spatial Photonics, Inc. | High fill-ratio mirror-based spatial light modulator |
| CN101144902A (en) * | 2006-08-25 | 2008-03-19 | 视频有限公司 | High fill-ratio mirror-based spatial light modulator |
| CN102981243A (en) * | 2012-11-02 | 2013-03-20 | 华中科技大学 | Two-dimensional quick control reflecting mirror |
Non-Patent Citations (2)
| Title |
|---|
| Werner C et al..Design of a long stroke translation stage for AFM.《International Journal of Machine Tools and Manufacture》.2009,第50卷(第2期), * |
| 王忠素 等..空间光学遥感器反射镜柔性支撑的设计.《光学 精密工程》.2010,第18卷(第8期), * |
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