CN102323656B - High-frequency response two-dimensional micro angular deflection control reflector based on double-shaft flexible hinge - Google Patents
High-frequency response two-dimensional micro angular deflection control reflector based on double-shaft flexible hinge Download PDFInfo
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Abstract
The invention discloses a high-frequency response two-dimensional micro angular deflection control reflector based on a double-shaft flexible hinge, and belongs to a light beam control device. The high-frequency response two-dimensional micro angular deflection control reflector based on the double-shaft flexible hinge comprises a reflector, a two-dimensional deflection mechanism based on the double-shaft flexible hinge, a drive mechanism and a control system, wherein the reflector is fixedly assembled on a rigid platform of the two-dimensional deflection mechanism based on the double-shaft flexible hinge; an incident light beam is emitted after being reflected by the reflector; and the control system controls a positive micro drive mechanism and a negative micro drive mechanism to push the rigid platform at a high speed along a negative position and a positive position respectively at symmetric positions, so that the reflector on the rigid platform deflects at a micro angle to realize the direction control of the emitted light beam; and a displacement sensor of the control system feeds the rotation angle information of the reflector back to a computer system to adjust the micro deflection angle of the reflector in real time. The high-frequency response two-dimensional micro angular deflection control reflector based on the double-shaft flexible hinge has the characteristics of no-coupling and no-axial translation in a two-dimensional deflecting direction, and high response speed.
Description
Technical field
The invention belongs to the Beam Control technical field, relate generally to the little angular swing control reflecting mirror of a kind of high-frequency response two-dimensional based on the shaft flexible hinge.
Background technology
Little angular swing control reflecting mirror is usually used in the optical system, and the quick angle deflection of control light beam realizes that the correction for direction of light beam is with stable.As being used for proofreading and correct the integral inclination of Beam Wave-Front in the ADAPTIVE OPTICS SYSTEMS; Be used in the wireless light communication technical field realizing that the aligning of light beam is with stable; Be used for the large area scanning of laser beam in the laser radar and to slewing and the tracking of target; Be used for realizing the stable of beam direction in superlaser and the precise alignment field.In the application of these optical systems, in order to improve the Beam Control precision, obtain good compensation, tracking and control effect, the ability that requires the quick deflection control device of light beam must have high angular deflection sensitivity and respond fast, be high angular sensitivity and high frequency sound, and require to have simultaneously larger angle scanning scope in some occasions such as laser radars.
At present, the quick deflection control method of light beam includes the mechanical type beam deflector, and traditional mechanical type beam deflector mainly is based on universal joint or the flexible hinge structure realizes, is to use more a kind of beam deflection mode at present.
The gimbals structure is that catoptron is installed on the gimbals, the catoptron that rotarily drives by gimbals is realized at any angle deflection of outgoing beam, the advantage of gimbals structure is to realize the beam deflection of Maximum Space angle, but carry out the deflection control of light beam with this gimbals structure, all need operate whole frame, because rack construction inertia is large, frequency band is narrow, low-response, it is difficult reaching high precision, and the beam deflection that is only suitable for doing in medium accuracy or the low speed situation is controlled.
Little angular swing control reflecting mirror based on the flexible hinge structure has compact conformation, without characteristics such as frictional dissipations, utilize piezoelectric ceramics or voice coil motor driver to promote flexible hinge or directly promote catoptron and realize angular deflection, owing to adopt piezoelectric ceramics or the voice coil motor driver of high displacement sensitivity, can realize very high beam deflection sensitivity, but the response speed during its quick deflection often is subject to the resonance frequency restriction of flexible hinge self, the resonance frequency that how to improve flexible hinge is the problem that needs research, and the flexible hinge structure produces coupling easily on the two-dimensional deflection direction when carrying out two dimension angular deflection.
The people such as the Li Xinyang of Photoelectric Technology Inst., Chinese Academy of Sciences have made the two-dimensional high speed tilting mirror of single-point flexible support unsymmetric structure, the dynamic mathematical models of fast steering mirror mechanical resonant have been set up according to measurement data, the mechanical resonant that the Adoption Network filtering technique reduces inclined mirror is proposed, so that the control stiffness of fast steering mirror and control bandwidth have all obtained larger improvement.But the method does not solve the problem of mechanical resonant from system architecture, and the dynamic mathematical models in the method directly can have influence on the effect of network filtering, set up accurately relatively difficulty of dynamic mathematical models, limited the further raising of control stiffness and bandwidth.
The people such as the Zhu Heng of Photoelectric Technology Inst., Chinese Academy of Sciences propose a kind of analysis of fast piezo steering mirror based on the thin plate radial support, added the thin plate radial support at eyeglass and driver junction, in order to limit radial deflection, increase simultaneously axial rigidity, the integral rigidity that has effectively improved tilting mirror distributes, and has improved the resonance frequency of original structure tilting mirror.But structure is complicated, and is higher to installation requirement, and drive point is less apart from the distance of catoptron center of rotation, has limited the angular resolution of system.
The people such as National University of Defense Technology model roc are at patent of invention " based on the light beam precision pointing device of the resolution multiplied compliant mechanism " (application number: CN 101794020.A) of application in 2010, the resolution multiplied lever construction of a kind of employing is proposed, the characteristics of the proportional variation of two ends displacement of utilization multiplication lever improve the angular resolution of system, has compact conformation, bearing accuracy is high, the angular resolution high, but because parallel conductive is chip architecture of the spring to the flexible hinge of compliant mechanism and resolution multiplied lever, the response speed of system is lower, can't use in the situation that needs respond fast.
Novel mechanical type beam deflector mainly contains decentered lens formula, rotating prism formula, eccentric microlens array formula, controlled microprism array formula.
The decentered lens formula beam deflector that the people such as the J.Gibson of U.S. Dayton university propose, with confocal placement of former and later two lens, previous lens are fixed, realize the angular deflection of outgoing beam with respect to the transverse translation of last lens by rear lens, compare with traditional mechanical type deflection structure, have without spin optical axis, the large characteristics such as (can reach 45 °) of deflection angle; The national dedicated fiducial device that is used for the linearity measurement of planeness that USSR (Union of Soviet Socialist Republics) is set up is used a kind of same structure, incident beam is converted to the translation of outgoing beam by the translation of rear lens with respect to the angle variation of optical axis, realize outgoing beam with respect to the angular deflection of incident beam, to reach the purpose of proofreading and correct beam angle drift amount; The people such as J.Gibson also propose a kind of rotary wedge lens type beam deflector, and two two gummed De-dispersion prism wedges are staggered relatively, and two prism wedges rotatablely move as circumference take incident beam as turning axle, realize the deflection of outgoing beam direction; More than two kinds of beam deflectors all can reach resolving power 1mrad, deflection speed 1rad/s and greater than 45 ° two dimension angular range of deflection.Owing to adopt the motion of lens, prism wedge to realize beam deflection in the device, volume, quality and power consumption do not improve, the beam deflection response speed is difficult to be improved, and the two-dimension translational of lens produces coupling, the complexity of control procedure that rotatablely moves of two prism wedges easily.
The A.Akatay of Turkey Koc university and H.Urey propose a kind of high resolution microlens array beam deflector that adopts binary optical to make, be that several microns microlens array forms by a pair of spacing, front group is positive lens, rear group is negative lens, collimated light focuses on behind positive lens, then become collimated light through negative lens, when producing horizontal relative motion between the positive and negative lens arra, the direction of outgoing collimated light beam will deflect again.Utilize micro optical element to replace the traditional optical element, can effectively reduce volume, quality and the power consumption of beam deflection system, this lens only need very little relative displacement output beam will produce very large angular deflection, lens arra is less, it is just less to reach the relative displacement that identical deflection needs, therefore the sweep speed of this scanner can reach very high, but scanning angle less (can reach the several years), transmitance is low, the manufacture craft of micro optical element is the key factor that determines its performance, and engineering is still immature in using at present.
The people such as the N.R.Smith of U.S. Cincinnati university propose the beam deflection device of the wetting little prism wedge of a kind of electricity (EMPs), the fluent material of certain refractive index of in microdischarge cavities, packing into, liquid ground connection, the both sides of cavity are two battery lead plates, when two-plate is imposed different voltage, liquid upper surface in the cavity will be with the different inclined-planes that present different angles of polar plate voltage, consist of the angle of wedge with the liquid bottom surface, become a little prism wedge that the angle of wedge is controlled, change the angle of wedge of little prism wedge by the polar plate voltage of control cavity both sides, realize the deflection control to the light beam shooting angle.The maximum deflection angle of light beam is relevant with the refractive index of used fluent material in the method, the beam deflection scope that realizes can reach 30 °, response speed is Millisecond, in the method because the existence of cavity wall so that light beam by the time have to a certain degree a loss, voltage during use between the battery lead plate of cavity wall both sides need to reach tens volts, and in order to increase the beam deflection angle, voltage difference between the needs increase battery lead plate is to increase the angle of wedge of the little prism wedge of liquid, and the spacing between the battery lead plate is that micron is to the millimeter magnitude, thereby in cavity, form very strong electric field, cause easily puncture, and the manufacturing process more complicated of this device.
Summary of the invention
Purpose of the present invention is exactly to provide a kind of high-frequency response two-dimensional based on the shaft flexible hinge little angular swing control reflecting mirror in order to overcome the deficiencies in the prior art, reaches rapid dynamic response speed, can realize simultaneously the purpose of two-dimentional little angular deflection.
The object of the present invention is achieved like this:
The little angular swing control reflecting mirror of a kind of high-frequency response two-dimensional based on the shaft flexible hinge, be fixedly mounted with the shaft flexible hinge in the base upper surface, rigid platfor vertically places on the output terminal of shaft flexible hinge, and around the shaft flexible hinge two-dimentional little angular deflection occurs, consist of two-dimensional deflection mechanism by base, shaft flexible hinge and rigid platfor; Catoptron fits on the rigid platfor upper surface admittedly, and catoptron, rigid platfor, shaft flexible hinge and base center are coaxial; Driving mechanism is made of four piezoelectric ceramic actuators, corresponding drive power supply for piezoelectric ceramics and securing member, wherein four piezoelectric ceramic actuators are fitted on the base by securing member is uniform, and two corresponding piezoelectric ceramic actuators consist of one group, and two groups of piezoelectric ceramic actuators arrange with respect to the orthogonal deflection rotational symmetry of shaft flexible hinge respectively; Four displacement transducers and computer system consist of control system, and described four displacement transducers are fitted on the base with respect to shaft flexible hinge symmetry, and contact cooperation with rigid platfor; Wire is communicated with displacement transducer with drive power supply for piezoelectric ceramics, drive power supply for piezoelectric ceramics with computer system host, computer system host respectively with piezoelectric ceramic actuator.
Piezoelectric ceramic actuator and drive power supply for piezoelectric ceramics are respectively electrostrictive actuator and drive source or magnetic telescopic driver and drive source or voice coil motor driver and drive source in the little angular swing control reflecting mirror of described high-frequency response two-dimensional based on the shaft flexible hinge.
Displacement transducer is capacitive transducer or inductance sensor or current vortex sensor in the little angular swing control reflecting mirror of described high-frequency response two-dimensional based on the shaft flexible hinge.
Distinguishing feature of the present invention and advantage are:
1, the present invention adopts the shaft flexible hinge to realize little angular deflection of two-dimensional quadrature direction, utilizes the shaft flexible hinge not produce angle coupling and interference on the two-dimensional quadrature yawing moment, can produce accurately high sensitivity micro-angular displacement;
2, on the two-dimensional deflection direction, utilize respectively among the present invention dual drive in symmetric position respectively along the both forward and reverse directions driven in synchronism, catoptron is had at a high speed without the dynamic tracking response characteristic that lags behind; By optimizing width and the thickness of shaft flexible hinge, can when two-dimensional deflection, obtain on all four response characteristic; And shaft flexible hinge greatly axial rigidity can limit the axial displacement of catoptron when deflection.
Description of drawings
Fig. 1 is the overall assembly structure synoptic diagram of the present invention;
Fig. 2 is the overall disassemblying structure synoptic diagram of the present invention;
Fig. 3 is base and shaft flexible hinge among Fig. 1, rigid platfor assembly connection structural representation;
Among Fig. 4 (a) be base and shaft flexible hinge among Fig. 1, rigid platfor assembly connection structure y to front elevation, be that base and shaft flexible hinge among Fig. 1, rigid platfor assembly connection structure x are to front elevation (b);
Piece number explanation among the figure: 1, catoptron, 2, rigid platfor, 3, piezoelectric ceramic actuator, 4, base, 5, the shaft flexible hinge, 6, displacement transducer, 7, securing member, 8, drive power supply for piezoelectric ceramics, 9, computer system.
Embodiment
Below in conjunction with accompanying drawing specific embodiments of the present invention are described in detail.
The little angular swing control reflecting mirror of a kind of high-frequency response two-dimensional based on the shaft flexible hinge, be fixedly mounted with shaft flexible hinge 5 in base 4 upper surfaces, rigid platfor 2 vertically places on the output terminal of shaft flexible hinge 5, and around shaft flexible hinge 5 two-dimentional little angular deflection occurs, consist of two-dimensional deflection mechanism by base 4, shaft flexible hinge 5 and rigid platfor 2; Catoptron 1 fits on rigid platfor 2 upper surfaces admittedly, and catoptron 1, rigid platfor 2, shaft flexible hinge 5 and base 4 centers are coaxial; Driving mechanism is made of four piezoelectric ceramic actuators 3, corresponding drive power supply for piezoelectric ceramics 8 and securing member 7, wherein four piezoelectric ceramic actuators 3 are by securing member 7 uniform being fitted on the base 4, and corresponding two piezoelectric ceramic actuators 4 consist of one group, and two groups of piezoelectric ceramic actuators 4 arrange with respect to the orthogonal deflection rotational symmetry of shaft flexible hinge 5 respectively; Four displacement transducers 6 and computer system 9 consist of control system, and described four displacement transducers 6 are fitted on the base 4 with respect to shaft flexible hinge 5 symmetries, and contact cooperation with rigid platfor 2; Wire is communicated with displacement transducer 6 with drive power supply for piezoelectric ceramics 8, drive power supply for piezoelectric ceramics 8 with computer system 9 main frames, computer system 9 main frames respectively with piezoelectric ceramic actuator 3.
Piezoelectric ceramic actuator 3 and drive power supply for piezoelectric ceramics 8 are respectively electrostrictive actuator and drive source or magnetic telescopic driver and drive source or voice coil motor driver and drive source.
Displacement transducer 6 is capacitive transducer or inductance sensor or current vortex sensor.
During operation, as a certain space angle (α of needs catoptron 1 deflection
x, α
y) time, four road output voltages of control system control piezoelectric ceramics power supply 8, drive respectively four piezoelectric ceramic actuators 3, the drive point of piezoelectric ceramic actuator 3 on rigid platfor 2 is L apart from the distance at rigid platfor 2 centers, 3 two one group of four piezoelectric ceramic actuator, place with respect to the orthogonal deflection rotational symmetry of shaft flexible hinge 5 respectively, two piezoelectric ceramic actuators 3 in each group are all worked in differential mode, namely one positive-displacement occurs, the negative sense displacement occurs in another, the two displacement is identical, opposite direction, and amount of displacement is respectively: sx=L * tan α
x, s
y=L * tan α
yPiezoelectric ceramic actuator 3 promotes rigid platfor 2 makes catoptron 1 that space angle deflection occur around the center, 6 two one group of four displacement transducer is worked in differential mode respectively, the corner information of rigid platfor 2 is fed back to computer system 9, computer system 9 is controlled the displacement that piezoelectric ceramic actuator 3 is exported in real time according to the corner information of displacement transducer 6 feedbacks, thus the deflection angle of accurate adjustment catoptron 1.The present invention has two-dimentional light beam deflection control ability, without coupling, shaftless to translation, and has identical dynamically quick tracking response ability at two-dimensional directional in the deflection of two-dimensional directional.
Claims (2)
1. little angular swing control reflecting mirror of the high-frequency response two-dimensional based on the shaft flexible hinge, it is characterized in that: be fixedly mounted with shaft flexible hinge (5) in base (4) upper surface, rigid platfor (2) vertically places on the output terminal of shaft flexible hinge (5), and around shaft flexible hinge (5) two-dimentional little angular deflection occurs, consist of two-dimensional deflection mechanism by base (4), shaft flexible hinge (5) and rigid platfor (2); Catoptron (1) fits on rigid platfor (2) upper surface admittedly, and catoptron (1), rigid platfor (2), shaft flexible hinge (5) and base (4) center are coaxial; Driving mechanism is made of four piezoelectric ceramic actuators (3), corresponding drive power supply for piezoelectric ceramics (8) and securing member (7), wherein four piezoelectric ceramic actuators (3) are fitted on the base (4) by securing member (7) is uniform, and corresponding two piezoelectric ceramic actuators (4) consist of one group, and two groups of piezoelectric ceramic actuators (4) arrange with respect to the orthogonal deflection rotational symmetry of shaft flexible hinge (5) respectively; Four displacement transducers (6) and computer system (9) consist of control system, described four displacement transducers (6) are fitted on the base (4) with respect to shaft flexible hinge (5) symmetry, and contact cooperation with rigid platfor (2); Wire is communicated with displacement transducer (6) with drive power supply for piezoelectric ceramics (8), drive power supply for piezoelectric ceramics (8) with computer system (9) main frame, computer system (9) main frame respectively with piezoelectric ceramic actuator (3).
2. the little angular swing control reflecting mirror of the high-frequency response two-dimensional based on the shaft flexible hinge according to claim 1 is characterized in that displacement transducer (6) is capacitive transducer or inductance sensor or current vortex sensor.
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| Application Number | Priority Date | Filing Date | Title |
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| CN201110290112.1A CN102323656B (en) | 2011-09-28 | 2011-09-28 | High-frequency response two-dimensional micro angular deflection control reflector based on double-shaft flexible hinge |
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| CN201110290112.1A CN102323656B (en) | 2011-09-28 | 2011-09-28 | High-frequency response two-dimensional micro angular deflection control reflector based on double-shaft flexible hinge |
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| CN102323656A CN102323656A (en) | 2012-01-18 |
| CN102323656B true CN102323656B (en) | 2013-03-20 |
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