CN107462880A - A kind of two-sided fast steering reflection mirror structure - Google Patents

A kind of two-sided fast steering reflection mirror structure Download PDF

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Publication number
CN107462880A
CN107462880A CN201710760247.7A CN201710760247A CN107462880A CN 107462880 A CN107462880 A CN 107462880A CN 201710760247 A CN201710760247 A CN 201710760247A CN 107462880 A CN107462880 A CN 107462880A
Authority
CN
China
Prior art keywords
actuator
angle
pedestal
displacement
screw
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN201710760247.7A
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Chinese (zh)
Inventor
贾建军
刘重飞
李康
张亮
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shanghai Institute of Technical Physics of CAS
Original Assignee
Shanghai Institute of Technical Physics of CAS
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shanghai Institute of Technical Physics of CAS filed Critical Shanghai Institute of Technical Physics of CAS
Priority to CN201710760247.7A priority Critical patent/CN107462880A/en
Publication of CN107462880A publication Critical patent/CN107462880A/en
Pending legal-status Critical Current

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Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01SRADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S7/00Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
    • G01S7/48Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S17/00
    • G01S7/481Constructional features, e.g. arrangements of optical elements
    • G01S7/4811Constructional features, e.g. arrangements of optical elements common to transmitter and receiver
    • G01S7/4812Constructional features, e.g. arrangements of optical elements common to transmitter and receiver transmitted and received beams following a coaxial path

Abstract

The present invention discloses a kind of two-sided fast steering reflection mirror device, and it includes:Double mirror, actuator, base, flexible support, eyeglass erecting bed and displacement transducer.Needing that light beam is carried out pointing to tracking and receiving and dispatching coaxial application scenario, need to carry out angle compensation to the light beam launched when receiving echo, the echo angle synchronization that lens device is difficult the scan angle and compensation for accomplishing to launch is pointed to using two, and use the two sides of same eyeglass that the uniformity of corner can be effectively ensured, the angle for enabling echo effective compensation to launch, realize that the angle received on detector is relatively stable.Carry out receiving and dispatching coaxial error in pointing it is an advantage of the current invention that greatly reducing and pointing to mirror with two light beams, while installing space can be saved, be convenient to operation control again.

Description

A kind of two-sided fast steering reflection mirror structure
Technical field:
The present invention relates to a kind of two-sided fast steering reflection mirror system, and in particular to realizes that laser radar field light beam points to Tracking adjustment and transmitting-receiving are coaxial.
Background technology:
Two-sided fast steering reflection mirror mentioned in this article controls beam direction as between transmitting light source and reception light source Optical precision device, integrate light, mechanical, electrical technology, there is fast response time, precision is high, outstanding advantages of high resolution, The fields such as laser communication, image stabilization, adaptive optics, composite shaft precision tracking have been widely used in it, especially in air Field of optical applications, must be requested that optical system accurately can quickly control the sensing of light beam, and to compensate atmospheric perturbation, carrier shakes Dynamic common caused light beam deflection.Needing light beam to receive and dispatch coaxial application scenario, needing when receiving echo to launching Light beam carries out angle compensation.Lens device is pointed to due to not eliminable machine error and random system errors using two, it is difficult to Accomplish that the echo angle for the scan angle and compensation launched is synchronous, cause precision to be hardly higher than 3 μ rad.And use same reflection The uniformity of corner can be effectively ensured in the positive and negative of mirror, enable echo effective compensation launch angle (error can as little as 0.5 μ Rad) so that the angle received on detector is relatively stable.
Traditional fast anti-mirror is typically rigidly tied using compensating the mechanical oscillation of carrier low-frequency high-amplitude as main purpose using multiaxis Structure, axle are supported by precision bearing, more using voice coil motor as actuator, but voice coil motor response speed can not be overcome slower, The shortcomings that resonant frequency is low, and mechanical precision is low.This traditional rigid mechanical structural behaviour can only achieve the resolution of sub- milliradian Rate and tens hertz bandwidths, while such Standard is complicated, debugging is difficult, and rotary inertia is big.
The present invention uses a kind of compliant mechanism, and zero clearance, the feature of zero friction cause dynamic lag error to substantially reduce.Together When system use in the more and more ripe piezoelectric ceramics of accurate control field as actuator, the actuator small volume, power output Greatly, resonant frequency is high, and fast response time, especially, the size that Piezoelectric Ceramic only relies on extra electric field just being capable of Da Yana The displacement resolution of meter level, this be Ultra-precision positioning and micro-displacement control in other drivers it is incomparable.To make up The shortcomings that piezoelectric ceramics stroke is small, a kind of lever displacement amplifying mechanism is designed, actuator output displacement can be amplified about 6~10 Times.The resistance-strain flowmeter sensor that traditional fast anti-mirror uses is different from, the system carries out closed loop using capacitive displacement transducer, It is contactless to make system stiffness better, also overcome the temperature drift phenomenon that strain ga(u)ge is difficult to avoid that.
Coherent laser radar requires very high to Beam Wave-Front, and detector field of view of receiver is smaller.Remote coherent laser radar To effectively reduce Laser emission energy in system, generally transmitting laser beam is very narrow, and to avoid the factors such as mirror-reflection, adopts With off-axis transmitting-receiving light path.The light beam to launching is needed in the application scenario for needing to be scanned light beam, when receiving echo Carry out angle compensation.It is difficult the echo angle synchronization for the scan angle and compensation for accomplishing to launch using two scanning lens devices. And use the positive and negative of same reflection mirror that the uniformity of corner can be effectively ensured, reach the angle of echo energy effective compensation transmitting, So that the angle received on detector is relatively stable.
The content of the invention:
It is an object of the invention to meet that laser radar optical axis launch angle is synchronous with receiving angle, design a kind of big angle The high two-sided fast steering reflection mirror structure of response of high-resolution is spent, makes while realizing that adjustment optical axis points to, to meet the angle of departure It is synchronous with acceptance angle angle.
The method of the present invention be in coherent laser receives and dispatches coaxial smart tracking system, transmitting laser action in speculum just Face, reflexes to the tracking target peripheral region of required sensing, and capacitive displacement transducer detects closed-loop control data and made Respective feedback, change the control voltage of piezoelectric ceramics, adjust mirror deflecting angle.
The two-sided fast steering deflecting mirror of the inventive method can be realized as shown in figure 1, including:It is actuator 1, pedestal 2, soft Property mechanism 3, eyeglass erecting bed 4, double mirror 5, pre-loading screw 6, pad 7 and displacement transducer 8.
Described actuator 1 is piezoelectric ceramics displacement actuator;Described pedestal 2 is have four displacement amplifying mechanisms one Body formula platform;Described compliant mechanism 3 is the support bar for having three layers of elastic sheet flexible hinge;Described eyeglass erecting bed 4 is There is the ring-type ellipse platform of bonding boss face;Described double mirror 5 is the oval eyeglass that two sides is minute surface.Described is pre- Tight screw 6 is the screw that end is bulb shape.Described pad 7 is square invar piece;Described displacement transducer 8 is condenser type Displacement transducer.
The actuator 1 is by Wear Characteristics of Epoxy Adhesive in the bottom of pedestal 2.The hinged base of the compliant mechanism 3 by screw with The displacement amplifying mechanism end connection on the top of pedestal 2.The back of eyeglass erecting bed 4 is connected by screw with compliant mechanism 3.Institute Double mirror 5 is stated to be connected to by Wear Characteristics of Epoxy Adhesive in the convex plane of erecting bed 4.The pre-loading screw 6 is fixed on the top of pedestal 2 Displacement amplifying mechanism, while to actuator 1 adjust pretightning force.The pad 7 is by epoxy cement in the upper surface of actuator 1. The capacitive displacement transducer 8 is fixed on pedestal 2 by screw.
The present invention is directed to fast steering reflection mirror duplex scanning demand, has carried out mirror structure, supporting way, flexible hinge The analysis and design of chain structure, displacement equations structure, it is determined that suitable for two-sided quick turn of laser transmitting-receiving coaxial angle compensation To the structure of speculum.
The method have the advantages that:
Traditional fast anti-mirror is typically one side work, and is difficult to accomplish big stroke high-resolution simultaneously, and this is two-sided quick Steering reflection mirror, as actuator, ensure that high accuracy, while design displacement amplifying mechanism and ensure fast anti-mirror using piezoelectric ceramics Larger stroke;Unique three ply board shape flexible hinge, there can be good flexibility this side up, while ensure structure at other Direction has enough rigidity, and control bandwidth is higher.Closed loop is carried out by capacitive displacement transducer, precision and stability are more It is good, stable occasion is pointed in the coaxial light beam of laser transmitting-receiving, this two-sided fast anti-mirror can replace two single-sweeps used in the past Mirror carries out angle compensation to receiving light beam, and precision is higher, there is good development prospect.
Brief description of the drawings:
Fig. 1 is the two-sided fast mirror system construction drawing using the present invention;
Fig. 2 is base displacement amplifying mechanism schematic diagram.
Embodiment:
The actuator 1 be Suzhou Pan Te electricity Tao Science and Technology Ltd.s production piezoelectric ceramic micro-displacement actuator, size For 5 × 5 × 36mm cuboid, output displacement is proportional with applying voltage, under nominal voltage 150V effects, exportable maximum 40 μm of displacement.The base 2 is mounting seat, and four actuators, base upper design two-stage Grazing condition lever position are arranged in bottom Enlarger is moved, the output displacement of actuator 1 is put 6~10 times and reaches lever end.The compliant mechanism 3 is four columnar stays Bar, bar medium design go out three layers of lamellar flexible hinge.The eyeglass erecting bed 4 is the fixed platform of double mirror 5, front Design four pieces of symmetrical raised smooth flats.The double mirror 5 is thick 7mm devitrified glass eyeglass, and section is major axis 75mm, short axle 50mm ellipse, speculum front are processed as full minute surface, and back side central area is processed as major axis 35mm, short axle 25mm concentration ellipse minute surface.The pre-loading screw 6 is M3 screws, and head is processed into hemispherical put with guarantee and contacted, given simultaneously Piezoelectric actuator 1 adjusts pretightning force.The pad 7 is that length and width are identical with actuator 1, and thickness is 2mm invar piece, is protected Actuator 1 is without damage.The capacitive displacement transducer 8 is the capacitive displacement transducer of German EPSILON companies, to The movement position for detecting double mirror 5 feeds back so as to provide.
According to actuator parameters, actuator 2 produces vertical displacement under driving voltage.The output displacement effect of actuator 2 In the displacement amplifying mechanism one-level amplification middle part A points of base 1, when at A points by displacement straight up, B points are equivalent to thick stick Bar fulcrum so that the displacement being amplified at D, this amplifies for one-level;When equally, using C as fulcrum, the displacement at D makes enlarger The vertical displacement amplified again is obtained at the E of structure end, this amplifies for two level.The flexible hinge 3 that is displaced through amplified at final E passes Eyeglass erecting bed 4 is handed to, and then double mirror 5 is produced deflection.Capacitive displacement transducer 8 detects double mirror 5 Actual deflection amount and giving feed back, readjusting driving voltage makes double mirror 5 deflect to required position.

Claims (1)

1. a kind of two-sided fast steering reflection mirror structure, including:Actuator (1), pedestal (2), compliant mechanism (3), eyeglass installation Platform (4), double mirror (5), pre-loading screw (6), pad (7) and displacement transducer (8);It is characterized in that:
Described actuator (1) is piezoelectric ceramics displacement actuator;Described pedestal (2) is have four displacement amplifying mechanisms one Body formula platform;Described compliant mechanism (3) is the support bar for having three layers of elastic sheet flexible hinge;Described eyeglass erecting bed (4) it is to have the ring-type ellipse platform for being bonded boss face;Described double mirror (5) is the oval eyeglass that two sides is minute surface; Described pre-loading screw (6) is the screw that end is bulb shape;Described pad (7) is square invar piece;Described displacement passes Sensor (8) is capacitive displacement transducer.
The actuator (1) is by Wear Characteristics of Epoxy Adhesive on pedestal (2);The hinged base of the compliant mechanism (3) by screw with The displacement amplifying mechanism end connection on pedestal (2) top;Eyeglass erecting bed (4) back passes through screw and compliant mechanism (3) Connection;The double mirror (5) is connected to by Wear Characteristics of Epoxy Adhesive in the convex plane of erecting bed (4);The pre-loading screw (6) is solid Due to pedestal (2) top, while give actuator (1) adjustment pretightning force;The pad (7) is by epoxy cement in actuator (1) Upper surface;The capacitive displacement transducer (8) is fixed on pedestal (2) by screw.
CN201710760247.7A 2017-08-30 2017-08-30 A kind of two-sided fast steering reflection mirror structure Pending CN107462880A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201710760247.7A CN107462880A (en) 2017-08-30 2017-08-30 A kind of two-sided fast steering reflection mirror structure

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Application Number Priority Date Filing Date Title
CN201710760247.7A CN107462880A (en) 2017-08-30 2017-08-30 A kind of two-sided fast steering reflection mirror structure

Publications (1)

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CN107462880A true CN107462880A (en) 2017-12-12

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Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108732745A (en) * 2018-08-18 2018-11-02 重庆巅慧科技有限公司 A kind of one-dimensional rapid control reflector
CN109029124A (en) * 2018-08-21 2018-12-18 广东工业大学 Displacement amplifying mechanism, laser deflection device and the anti-unmanned plane laser gun of machine-carried type
CN111399169A (en) * 2020-05-20 2020-07-10 上海电机学院 Rigid spherical hinge type high-precision quick reflector

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102323656A (en) * 2011-09-28 2012-01-18 哈尔滨工业大学 High-frequency response two-dimensional micro angular deflection control reflector based on double-shaft flexible hinge
CN104034510A (en) * 2014-06-12 2014-09-10 中国科学院上海技术物理研究所 Portable photoelectric tracking performance detection device

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102323656A (en) * 2011-09-28 2012-01-18 哈尔滨工业大学 High-frequency response two-dimensional micro angular deflection control reflector based on double-shaft flexible hinge
CN104034510A (en) * 2014-06-12 2014-09-10 中国科学院上海技术物理研究所 Portable photoelectric tracking performance detection device

Non-Patent Citations (3)

* Cited by examiner, † Cited by third party
Title
刘重飞等: "一种双面快速转向反射镜结构设计与分析", 《机械科学与技术》 *
夏永泉等: "用于航空遥感的二维像移补偿镜的设计", 《红外》 *
宋盛等: "压电驱动双面快速指向镜的设计", 《光学精密工程》 *

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108732745A (en) * 2018-08-18 2018-11-02 重庆巅慧科技有限公司 A kind of one-dimensional rapid control reflector
CN109029124A (en) * 2018-08-21 2018-12-18 广东工业大学 Displacement amplifying mechanism, laser deflection device and the anti-unmanned plane laser gun of machine-carried type
CN111399169A (en) * 2020-05-20 2020-07-10 上海电机学院 Rigid spherical hinge type high-precision quick reflector
CN111399169B (en) * 2020-05-20 2022-06-21 上海电机学院 Rigid spherical hinge type high-precision quick reflector

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Application publication date: 20171212