CN111399169B - Rigid spherical hinge type high-precision quick reflector - Google Patents
Rigid spherical hinge type high-precision quick reflector Download PDFInfo
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- CN111399169B CN111399169B CN202010428215.9A CN202010428215A CN111399169B CN 111399169 B CN111399169 B CN 111399169B CN 202010428215 A CN202010428215 A CN 202010428215A CN 111399169 B CN111399169 B CN 111399169B
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
- G02B7/18—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors
- G02B7/182—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors for mirrors
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Abstract
A rigid spherical hinge type high-precision quick reflector comprises a base; a shell is fixed below the base, a flexible plate is arranged on the base, two piezoelectric ceramics are embedded in the base, a steel ball is embedded in the center of the upper side of the base, and the piezoelectric ceramics and the steel ball penetrate through the flexible plate; the upper side of base is fixed with the tripod through M2X 8 super short-end hexagon socket head cap screw, be fixed with the mirror holder through M2X 12 super short-end hexagon socket head cap screw on the tripod, install the lens between mirror holder and the tripod. The quick reflector adopts a central rigid spherical hinge type supporting structure, so that the bearing capacity and the impact resistance of the quick reflector are improved; the spring is pre-tightened and eliminates the gap, the flexible plate is adopted to improve the rotating rigidity of the Z axis to prevent the mechanism from rotating, the error caused by the gap and the rotation around the Z axis is eliminated, and the structure measurement precision is improved; the piezoelectric ceramic of the driving element adopts a hinge connection and a pre-pressing design, so that the service life of the quick reflector is prolonged while the quick response of the structure is ensured.
Description
Technical Field
The invention relates to the fields of laser, photoetching machines, aerospace and the like, in particular to a rigid spherical hinge type high-precision quick reflector.
Background
The main structural forms of the existing quick reflecting mirror are three, namely a flexible shaftless structure, a frame type structure and a rigid support hinge structure, wherein the flexible shaftless structure is a hot point of domestic and foreign research, and main driving elements are piezoelectric ceramics and a voice coil motor. The American Massachusetts technical research institute develops a flexible shaft type quick reflector, the American left-hand design institute designs a two-shaft flexible quick reflector to solve the problem of satellite attitude jitter, the Changchun optical machine designs a rigid bearing type quick reflector to accurately adjust and control the beam direction, and the flexible shaft type quick reflector becomes a research hotspot at home and abroad based on more and more purposes of the quick reflector; the flexible shaftless fast reflector has the advantages of simple structure and good stability, but has the defects of small bearing capacity, low rigidity and poor impact resistance. The rigid support hinge structure has the advantages of strong bearing capacity, impact resistance, larger friction resistance moment and limited response speed.
The present invention is an improvement to solve the above problems.
Disclosure of Invention
The invention aims to provide a rigid spherical hinge type high-precision quick reflector which has the characteristics of strong bearing capacity, impact resistance, high precision, quick response and simple structure, can quickly and accurately adjust the direction of a light beam, and is used for an optical precision instrument for adjusting and controlling the direction of the light beam.
The technical scheme adopted by the invention for solving the technical problem is as follows:
a rigid spherical hinge type high-precision quick reflector comprises a base.
A shell is fixed on the lower side of the base, a flexible plate is arranged on the base, two piezoelectric ceramics are embedded in the base, a steel ball is embedded in the center of the upper side of the base, and the piezoelectric ceramics and the steel ball penetrate through the flexible plate; the upper side of base is fixed with the tripod through M2X 8 super short-end hexagon socket head cap screw, be fixed with the mirror holder through M2X 12 super short-end hexagon socket head cap screw on the tripod, install the lens between mirror holder and the tripod.
Further, the base downside inlays and is equipped with two compression spring, two countersunk screw have been placed on the tripod, countersunk screw runs through flexbile plate, base and compression spring in proper order, countersunk screw's downside has connect the nut soon, compression spring's lower side end and the last side end butt of nut.
Furthermore, the steel ball and the two piezoelectric ceramics are in a right angle shape, and the two compression springs are respectively arranged between the steel ball and the piezoelectric ceramics.
Furthermore, a counter bore is formed in the center of the base, a first fixing hole is formed in the tripod, and the steel ball is arranged between the counter bore and the first fixing hole.
Furthermore, supporting ball heads are fixed on the upper side and the lower side of the piezoelectric ceramic, a mounting groove is formed in the base, and the piezoelectric ceramic is arranged in the mounting groove; the mounting groove has a first fixing hole formed in the upper side thereof, a second fixing hole is formed in the lower side thereof, a third fixing hole is formed in the triangular support, the supporting ball head on the lower side of the piezoelectric ceramic is clamped in the first fixing hole, and the supporting ball head on the upper side thereof is clamped in the third fixing hole.
Furthermore, the inner side wall of the lower end of the mirror bracket is provided with a step surface, and the edge of the upper side of the lens is clamped in the step surface.
Furthermore, a nut is screwed on the lower side of the M2X 8 ultra-short head hexagon socket head bolt, and the upper side of the nut is abutted with the lower side surface of the flexible plate; the groove of stepping down has all been seted up to adjacent both sides on the base, the nut is located the inslot of stepping down for connect tripod and flexplate.
Further, a wiring board is fixed in the housing, and a part of the wiring board extends to the outer side of the housing.
The invention has the advantages that:
the rigid spherical hinge type high-precision quick reflector provided by the invention adopts a central rigid spherical hinge type supporting structure, so that the bearing capacity and the impact resistance of the quick reflector are improved; the spring is pre-tightened and eliminates the gap, the flexible plate is adopted to improve the rotating rigidity of the Z axis to prevent the mechanism from rotating, the error caused by the gap and the rotation around the Z axis is eliminated, and the structure measurement precision is improved; the piezoelectric ceramics of the driving element adopts the design of hinge connection and prepressing, thereby ensuring the quick response of the structure and simultaneously prolonging the service life of the quick reflector; the reflector has the advantages of simple and direct realization of all functions, no complex mechanism parts, low manufacturing cost, low cost and wide application range.
Drawings
Fig. 1 is a schematic structural diagram of a rigid spherical hinge type high-precision fast reflector provided by the invention;
FIG. 2 is an exploded view of the mirror;
fig. 3 is a sectional view of the mirror.
Detailed Description
In order to make the technical means, the original characteristics, the achieved purposes and the effects of the invention easy to understand, the invention is further described with reference to the figures and the specific embodiments.
As shown in fig. 1 to 3, the rigid spherical hinge type high-precision fast reflector provided by the invention comprises a base 2; a shell 1 is fixed on the lower side of the base 2, a flexible plate 3 is arranged on the base 2, two piezoelectric ceramics 4 are embedded in the base 2, a steel ball 5 is embedded in the center of the upper side of the base 2, and the piezoelectric ceramics 4 and the steel ball 5 penetrate through the flexible plate 3; the upper side of base 2 is fixed with tripod 6 through M2X 8 super short-head hexagon socket head cap screw, be fixed with mirror holder 7 through M2X 12 super short-head hexagon socket head cap screw on the tripod 6, install lens 8 between mirror holder 7 and the tripod 6.
The base is a fixed part, the spectacle frame, the lens, the tripod and the flexible plate form a moving part, and the driving element is piezoelectric ceramic; the right center of the base is provided with a steel ball, and the ball head supporting points of the 2 piezoelectric ceramics and the steel ball are arranged in a right angle to realize three-point support of the moving part; the bearing capacity and the shock and vibration resisting capacity of the fast reflector can be enhanced by adopting the central spherical hinge type supporting drive.
The quick reflector has the advantages of being high in resolution, high in precision and fast in response, so that the requirement for a driving element is high, and the piezoelectric ceramic has the advantages of being large in driving force, fast in influence and high in resolution, so that the piezoelectric ceramic is selected as a driving part of the quick reflector.
The supporting ball heads at the two ends of the piezoelectric ceramic are respectively hinged with the tripod and the base together, so that the piezoelectric ceramic only bears pressure but not tensile force and shearing force; the piezoelectric ceramic drives the tripod to rotate around the steel ball through self expansion and contraction, so that the moving part integrally rotates; the linear motion stroke of the piezoelectric ceramics is nominal displacement of 20 mu m, the resolution ratio is 5Nm, the distance between the piezoelectric ceramics and the steel ball is 8.75mm, the angular stroke of the fast reflector lens is 2285 mu rad, and the angular resolution ratio is 0.57 mu rad.
In order to prevent the moving part from rotating around the Z direction, a flexible plate is arranged between the tripod and the base and connected with the base through a bolt to fix the flexible plate, the extending end part of the flexible plate is connected with the tripod through a bolt, the flexible plate is a steel plate with the thickness of 0.5mm, the torsional rigidity of the flexible plate is far greater than the bending rigidity, the tripod can be effectively prevented from rotating around the Z axis, and the normal work of the quick reflector is not influenced.
The invention is further provided with: 2 downside of base inlays and is equipped with two compression spring 9, two countersunk screw 10 have been placed on the tripod 6, countersunk screw 10 runs through flexoplate 3, base 2 and compression spring 9 in proper order, countersunk screw 10's downside has connect the nut 11 soon, compression spring 9's lower side end and the upside end butt of nut 11. Through adopting above-mentioned technical scheme, through the spring force effect of compression spring for the tripod hugs closely together with steel ball, piezoceramics's support bulb.
The compression spring is arranged in the middle of the steel ball and the piezoelectric ceramics and used for pressing the moving part on the base and simultaneously giving a pretightening force to the piezoelectric ceramics to ensure that the piezoelectric ceramics are in a compression state in the working process; by adopting a compression spring pre-tightening device, the installation clearance between parts can be eliminated, and the response time is improved; the characteristic that the torsional rigidity of the flexible plate is far greater than the bending rigidity is utilized to limit the rotational freedom of the fast reflector around the Z axis without influencing the normal work of the fast reflector, thereby improving the precision.
The invention is further provided with: the steel ball 5 and the two piezoelectric ceramics 4 are in a right angle shape, and the two compression springs 9 are respectively arranged between the steel ball 5 and the piezoelectric ceramics 4.
The invention is further provided with: the center of the base 2 is provided with a counter bore 21, the tripod 6 is provided with a first fixing hole 61, and the steel ball 5 is arranged between the counter bore 21 and the first fixing hole 61.
The invention is further provided with: supporting ball heads are fixed on the upper side and the lower side of the piezoelectric ceramic 4, an installation groove is formed in the base 2, and the piezoelectric ceramic 4 is arranged in the installation groove; second fixed orifices 62 have been seted up to the mounting groove downside, third fixed orifices 22 have been seted up on the tripod 6, the support bulb card of 4 downside of piezoceramics locates on second fixed orifices 62, the support bulb card of 4 upsides of piezoceramics locates the downside of third fixed orifices 22.
The invention is further provided with: the inner side wall of the lower end of the mirror bracket 7 is provided with a step surface, and the edge of the upper side of the lens 8 is clamped in the step surface. Through adopting above-mentioned technical scheme, through the setting of step face for the lens is difficult for droing.
The invention is further provided with: the lower side of the M2X 8 ultra-short head hexagon socket screw is screwed with a nut, and the upper side of the nut is abutted with the lower side surface of the flexible plate 3; the groove of stepping down 23 has all been seted up to adjacent both sides on the base 2, the nut is located the groove of stepping down 23 for connect set-square and flexonics board. Through adopting above-mentioned technical scheme, through the setting of the groove of stepping down for the base can not lead to the fact the interference to M2 x 8 super stub hexagon socket head cap screw and nut, and the nut of being convenient for connects soon.
The invention is further provided with: a wiring board 12 is fixed inside the housing 1, and a part of the wiring board 12 extends to the outside of the housing 1. Through adopting above-mentioned technical scheme, through the setting of wiring board, be convenient for carry out the wiring.
The performance indexes of the piezoelectric ceramics are as follows: dimension 5 x 18, nominal displacement 20 μm, electrostatic capacity 1.8 μ F, stiffness 60N/μm, maximum thrust 1600N, resolution 5 Nm; fast mirror indices: stroke 2285 μ rad, resolution 0.57 μ rad, total mass 0.21Kg, with moving part mass 0.109 Kg.
The working principle of the invention is as follows:
according to the technical scheme, on the basis of the existing quick reflector, the steel ball is used for replacing a traditional ball hinge, so that the rigid support of the quick reflector is realized, the weight of a moving part is transmitted to the base through the steel ball, the purposes of heavy load and vibration resistance are realized, meanwhile, the structure is simpler, and the friction torque can be effectively reduced; because the piezoelectric ceramics mainly bear compression load but cannot bear tension load and shearing load, ball head structures are pasted at two ends of the piezoelectric ceramics to realize the articulation of the two ends of the piezoelectric ceramics, and meanwhile, the pre-pressure of the compression spring acting on the piezoelectric ceramics is utilized to realize that the piezoelectric ceramics always works in a compression state; the compression spring presses the moving part on the base, so that the assembly clearance among all parts is eliminated; the flexible plate is limited to rotate around the Z axis by utilizing the characteristic that the torsional rigidity of the flexible plate is far greater than the bending rigidity; therefore, the fast reflector is high in bearing capacity, high in precision, fast in response, high in resolution and excellent in performance.
The above embodiments are merely illustrative of the technical concept and features of the present invention, and the purpose thereof is to enable those skilled in the art to understand the content of the present invention and implement the present invention, and not to limit the scope of the present invention, and all equivalent changes or modifications made according to the spirit of the present invention should be covered by the scope of the present invention.
Claims (1)
1. The utility model provides a high accuracy quick speculum of rigid spherical hinge formula, includes base (2), its characterized in that:
a shell (1) is fixed on the lower side of the base (2), a flexible plate (3) is arranged on the base (2), two piezoelectric ceramics (4) are embedded in the base (2), a steel ball (5) is embedded in the center of the upper side of the base (2), and the piezoelectric ceramics (4) and the steel ball (5) penetrate through the flexible plate (3); a tripod (6) is fixed on the upper side of the base (2) through an M2 multiplied by 8 ultra-short head inner hexagonal bolt, a spectacle frame (7) is fixed on the tripod (6) through an M2 multiplied by 12 ultra-short head inner hexagonal bolt, and a lens (8) is arranged between the spectacle frame (7) and the tripod (6);
the lower side of the base (2) is embedded with two compression springs (9), two countersunk screws (10) are placed on the tripod (6), the countersunk screws (10) sequentially penetrate through the flexible plate (3), the base (2) and the compression springs (9), nuts (11) are screwed on the lower sides of the countersunk screws (10), the lower side ends of the compression springs (9) are abutted to the upper side ends of the nuts (11), and the compression springs (9) are pre-pressed through the nuts (11);
the steel ball (5) and the two piezoelectric ceramics (4) are in a right-angle shape, and the two compression springs (9) are respectively arranged between the steel ball (5) and the piezoelectric ceramics (4);
a counter bore (21) is formed in the center of the base (2), a first fixing hole (61) is formed in the tripod (6), and the steel ball (5) is arranged between the counter bore (21) and the first fixing hole (61);
supporting ball heads are fixed on the upper side and the lower side of the piezoelectric ceramic (4), an installation groove is formed in the base (2), and the piezoelectric ceramic (4) is arranged in the installation groove; a second fixing hole (62) is formed in the lower side of the mounting groove, a third fixing hole (22) is formed in the tripod (6), a supporting ball head on the lower side of the piezoelectric ceramic (4) is clamped in the second fixing hole (62), and a supporting ball head on the upper side of the piezoelectric ceramic (4) is clamped in the lower side of the third fixing hole (22);
the inner side wall of the lower end of the spectacle frame (7) is provided with a step surface, and the edge of the upper side of the lens (8) is clamped in the step surface;
the lower side of the M2X 8 ultra-short head hexagon socket screw is screwed with a nut, and the upper side of the nut is abutted with the lower side surface of the flexible plate (3); the two adjacent sides of the base (2) are provided with abdicating grooves (23), and the nuts are positioned in the abdicating grooves (23) and used for connecting the tripod (6) and the flexible plate (3);
a wiring board (12) is fixed in the shell (1), and a part of the wiring board (12) extends to the outer side of the shell (1).
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CN202010428215.9A CN111399169B (en) | 2020-05-20 | 2020-05-20 | Rigid spherical hinge type high-precision quick reflector |
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CN202010428215.9A CN111399169B (en) | 2020-05-20 | 2020-05-20 | Rigid spherical hinge type high-precision quick reflector |
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CN111399169B true CN111399169B (en) | 2022-06-21 |
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Families Citing this family (3)
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CN114442256A (en) * | 2022-01-11 | 2022-05-06 | 智慧星空(上海)工程技术有限公司 | Flexible adjusting device for reflector |
CN115097594B (en) * | 2022-08-26 | 2023-01-31 | 北京瑞控信科技股份有限公司 | Large-caliber large-corner high-bandwidth voice coil motor fast-reflection mirror device |
CN117741904B (en) * | 2024-02-19 | 2024-04-16 | 中国科学院长春光学精密机械与物理研究所 | Bolt pre-tightening device for reflecting mirror assembly |
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CN110262036A (en) * | 2019-05-30 | 2019-09-20 | 中国科学院长春光学精密机械与物理研究所 | A kind of two dimension wide-angle fast steering mirror |
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CN102368162A (en) * | 2011-10-26 | 2012-03-07 | 中国科学院光电技术研究所 | Tracking system of large-angle fast steering mirror |
CN102647556A (en) * | 2012-03-19 | 2012-08-22 | 中国科学院上海技术物理研究所 | Quick reflector image stabilization system and method based on relevant detection of image |
CN103823302A (en) * | 2014-03-03 | 2014-05-28 | 重庆大学 | One-dimensional rapid control reflector |
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Effective date of registration: 20221221 Address after: 201800 J, building 6, 1288 Yecheng Road, Jiading District, Shanghai Patentee after: Shanghai Raewang Optical Technology Co.,Ltd. Address before: 200240 No. 690, Jiangchuan Road, Shanghai, Minhang District Patentee before: SHANGHAI DIANJI University |
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