CN110531482B - Flexible high-precision secondary mirror assembly focusing mechanism - Google Patents
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- CN110531482B CN110531482B CN201910801917.4A CN201910801917A CN110531482B CN 110531482 B CN110531482 B CN 110531482B CN 201910801917 A CN201910801917 A CN 201910801917A CN 110531482 B CN110531482 B CN 110531482B
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Abstract
The invention discloses a flexible high-precision secondary lens assembly focusing mechanism, which solves the problems of complex structure, poor focusing precision, easy clamping stagnation in the focusing process and complex machining and assembling of the focusing mechanism in the traditional focusing mode. This focusing mechanism includes: the device comprises a bottom frame, a fixing ring, a flexible supporting and guiding mechanism, a detected ring plate, a piezoelectric ceramic actuator, a flexible amplifying mechanism and a measurement feedback sensor; the flexible support guide mechanism is provided with a secondary lens assembly to be focused, and a plurality of piezoelectric ceramic actuators and flexible amplification mechanisms are matched one by one to form a plurality of driving mechanisms for providing focusing amount; a plurality of driving mechanisms are installed between the base frame and the supporting and guiding mechanism, and a measuring feedback sensor is installed on the base frame and used for measuring the displacement of the focusing secondary mirror assembly.
Description
Technical Field
The invention belongs to the technical field of optics, and particularly relates to a flexible high-precision secondary mirror assembly focusing mechanism.
Background
The focusing mechanism is an important component in opto-mechanical systems. The distance between optical elements along an optical axis is changed due to the influence of the change of factors such as the use environment temperature and the like of optical instruments such as a ground-based telescope, a theodolite and the like, so that system aberration is caused; the space camera is further subjected to the influence of severe mechanical environments such as vibration, impact, high and low temperature and the like in the emission stage, and the imaging quality is possibly reduced. Aiming at the above situation, the defocusing amount is adjusted by the focusing system, which is a key link and an important means for ensuring the image quality of the system.
The imaging optical system is generally composed of a plurality of optical elements having different functions. The primary and secondary mirrors are responsible for imaging, which imposes very strict requirements on the optical spacing, on the basis of which conventional focusing tends to select optical elements (correction mirrors, etc.) that are insensitive to the optical spacing as focusing mirrors. This adjustment requires a large amount of focusing and a low focusing resolution. Common focusing mechanisms include lead screw nuts and cam mechanisms. The screw nut mechanism has low cost, but is easy to be blocked at the limit position; the cam mechanism has high reliability and accurate focusing, but the design, processing and assembly of the cam mechanism are complex.
Disclosure of Invention
The invention aims to provide a flexible high-precision secondary lens assembly focusing mechanism, which solves the problems that the traditional focusing mode is complex in structure, poor in focusing precision, easy to clamp stagnation in the focusing process and complex in machining and assembling of the focusing mechanism.
The basic design idea of the invention is as follows:
the piezoelectric ceramic actuator is used as a power source, the driving mechanism is formed by matching with the flexible amplifying mechanism, the focusing displacement output quantity is met, and meanwhile, the flexible supporting and guiding mechanism is used as a secondary mirror supporting and guiding mechanism, so that the high-precision focusing of the secondary mirror is realized.
The technical scheme adopted by the invention for solving the technical problems is as follows:
a flexible high-precision secondary lens assembly focusing mechanism comprises a bottom frame, a fixing ring, a flexible supporting and guiding mechanism, a detected ring plate, a piezoelectric ceramic actuator, a flexible amplifying mechanism and a measurement feedback sensor;
the bottom frame comprises a horizontal bottom plate and at least three vertical supporting arms which are uniformly distributed on the outer edge of the horizontal bottom plate in the circumferential direction; one end of the vertical supporting arm is fixedly connected with the outer edge of the horizontal bottom plate, and the other end of the vertical supporting arm is fixedly connected with the fixing ring, so that the horizontal bottom plate and the fixing ring are kept parallel;
the flexible supporting and guiding mechanism comprises a central disc and at least six groups of flexible arm assemblies which are uniformly distributed on the outer circle surface of the central disc along the circumferential direction and extend outwards along the radial direction of the central disc;
the flexible arm component consists of a first connecting part, a flexible part and a second connecting part in sequence along the radial direction of the central disc;
a concave part matched with the shape of the flexible supporting and guiding mechanism is arranged on the bottom surface of the secondary lens base of the secondary lens assembly to be focused, the flexible supporting and guiding mechanism is integrally embedded into the concave part and fixed in the concave part through a first connecting part, and meanwhile, the flexible part and the second connecting part extend out of the secondary lens base;
the fixing ring is connected with the flexible support guide mechanism through at least six second connecting parts;
the detected ring plate is fixed on the bottom surface of the secondary lens seat of the secondary lens assembly to be focused; the probed ring plate is provided with at least three bulges;
the number of the piezoelectric ceramic actuators and the number of the flexible amplifying mechanisms are at least three; each piezoelectric ceramic actuator is matched and installed with each flexible amplifying mechanism to form a driving mechanism; at least three driving mechanisms are uniformly distributed on the horizontal bottom plate; the output ends of at least three driving mechanisms are connected with the central disc;
and at least three measurement feedback sensors are fixedly inserted on the horizontal bottom plate and respectively correspond to the at least three protruding positions one by one.
Further, in order to amplify the focusing amount, the flexible amplifying mechanism comprises a top flexible hinge, two side arms and a middle flexible arm;
the top flexible hinge is of an arch structure, two ends of the top flexible hinge are respectively connected with the tops of the two side arms, an included angle between the top flexible hinge and each of the two side arms is α, and α is larger than 90 degrees;
the middle flexible arm is arranged between the two side arms and is far away from the tops of the side arms;
the piezoceramic actuator is arranged between the two side arms and is positioned below the middle flexible arm.
The flexible amplifying mechanism is actually a two-stage flexible amplifying structure, the two side arms and the middle flexible arm form a first-stage lever amplifying mechanism, the two side arms and the top flexible hinge form a triangular amplifying mechanism, and the two-stage amplifying mechanism further improves displacement output quantity and meets the required focusing requirement under the condition that the displacement output precision of the flexible amplifying mechanism meets the requirement.
Further, the displacement of the flexible amplifying mechanism satisfies the following relation:
wherein l1In the form of piezoceramic actuatorsThe vertical distance between the axis and the central axis of the middle flexible arm;
l2the vertical distance between the central axis of the middle flexible arm and the center of the connecting position of the top flexible hinge and the side arm;
θT＝α-90°；
lPZTthe displacement amount output by the piezoceramic actuator;
further, the flexible amplifying mechanism is made of a titanium alloy Tc10 material, and a top flexible hinge, two side arms and a middle flexible arm are formed through a slow wire processing method.
Furthermore, a countersunk through hole is formed in the middle of the top flexible hinge, correspondingly, a screw hole corresponding to the countersunk through hole is formed in the central disc, and the top flexible hinge is connected with the central disc through a countersunk screw.
Further, for the convenience of processing, simultaneously in order to ensure that the rigidity of the flexible supporting and guiding mechanism meets the use requirements, the flexible part comprises four thin rods, the four thin rods are all installed between the first connecting part and the second connecting part, and hollow structures are arranged among the first connecting part, the second connecting part and the four thin rods. In fact, the first connecting part, the second connecting part and the four thin rods between the first connecting part and the second connecting part in the flexible arm component are integrated structures processed by slow-walking wires.
Furthermore, in order to facilitate mounting and dismounting, the first connecting part is connected with the concave part, the second connecting part is connected with the fixing ring, and the detected ring plate is connected with the bottom surface of the secondary lens seat of the secondary focusing lens assembly through countersunk screws.
Further, the piezoelectric ceramic actuator is columnar, and the output displacement of the piezoelectric ceramic actuator is less than or equal to 100 um.
Further, the piezoceramic actuator is arranged between the two side arms in a structural pre-tightening or gluing mode.
Furthermore, the center of the central disc is provided with a lightening hole.
The invention has the beneficial effects that:
1. the focusing mechanism adopted by the invention adopts a driving mechanism formed by matching a piezoelectric ceramic actuator with a flexible amplifying mechanism, can provide high enough displacement resolution and ensure submicron-level focusing precision on the premise of ensuring enough displacement driving, and compared with the traditional focusing mode, the control mode is greatly simplified and the motion reliability is higher; meanwhile, the flexible supporting guide mechanism is adopted, compared with the traditional mechanisms such as a traditional lead screw nut and a traditional cam mechanism, the deformation of the flexible supporting guide mechanism is mainly established on the elastic deformation of the flexible part, the friction and the viscosity in the movement are completely eliminated, meanwhile, the flexible supporting guide mechanism is maintenance-free, can be used in various environments such as vacuum, high and low temperature and the like, has no special lubricating requirements, and also completely avoids the interference and the pollution to an optical system.
2. The flexible support guide mechanism formed by the central disc and at least 6 groups of flexible arm assemblies ensures that the flexible support guide mechanism has smaller rigidity only along the optical axis direction, has larger rigidity in other directions and higher off-axis rigidity ratio, and provides reliable support protection for the secondary mirror assembly on the premise of meeting the guide function of the secondary mirror assembly in the optical axis direction.
3. The flexible part structure formed by four thin rods is easy to process, and can meet the integral rigidity requirement of the flexible support guide mechanism.
4. The focusing mechanism disclosed by the invention has the advantages of small number of parts, simple and compact structural form, no harm such as light blocking and the like to an optical system, and convenience in assembly and debugging.
5. The focusing mechanism disclosed by the invention can achieve focusing precision of dozens of nanometers in a millimeter-scale focusing range, and meanwhile, the optical axis inclination within 1 arc second in the full-range can be realized by adopting closed-loop control, so that the precision is obviously improved compared with a lead screw and other focusing modes with gaps.
Drawings
Fig. 1 is a schematic perspective view of a focusing mechanism after a secondary mirror assembly is installed.
FIG. 2 is a schematic sectional view of an assembly structure of the focusing mechanism after the secondary mirror assembly is installed.
FIG. 3 is a perspective view of the focusing mechanism without the flexible support guide mechanism and the probed ring plate.
FIG. 4 is an assembly view of the flexible support guide mechanism, the probed ring plate and the secondary mirror assembly.
Fig. 5 is a perspective view of a flexible amplifying mechanism.
Fig. 6 is a front view of a flexible amplification mechanism.
Fig. 7 is a schematic view of the drive mechanism.
Fig. 8 is a perspective view of the flexible support guide mechanism.
Fig. 9 is a front view of the flexible support guide mechanism.
The reference numbers are as follows:
1-underframe, 2-fixed ring, 3-flexible support guide mechanism, 4-ring-detected plate, 5-piezoceramic actuator, 6-flexible amplification mechanism, 7-measurement feedback sensor, 8-horizontal bottom plate, 9-vertical support arm, 10-central disk, 11-flexible arm component, 12-first connecting part, 13-flexible part, 14-second connecting part, 15-bulge, 16-driving mechanism, 17-top flexible hinge 18-side arm, 19-middle flexible arm, 20-thin rod, 21-lightening hole, 22-secondary mirror component, 23-secondary mirror and 24-secondary mirror seat.
Detailed Description
To further clarify the objects, advantages and features of the present invention, a flexible high precision secondary mirror assembly focusing mechanism according to the present invention will be described in detail with reference to the accompanying drawings and specific examples. Advantages and features of the present invention will become apparent from the following description and from the claims. It should be noted that: the drawings are in simplified form and are not to precise scale, the intention being solely for the convenience and clarity of illustrating embodiments of the invention; secondly, the structures shown in the drawings are often part of the actual structure; again, the drawings may require different emphasis, sometimes on different proportions.
Structural assembly
A flexible high-precision secondary lens assembly focusing mechanism mainly comprises an underframe 1, a fixed ring 2, a flexible supporting guide mechanism 3, a detected ring plate 4, a piezoelectric ceramic actuator 5, a flexible amplifying mechanism 6 and a measurement feedback sensor 7;
as shown in fig. 1-3, the base frame 1 includes a horizontal bottom plate 8 and at least three vertical supporting arms 9 (6 vertical supporting arms in this embodiment) uniformly distributed on the outer edge of the horizontal bottom plate 8 in the circumferential direction; one end of the vertical supporting arm 9 is fixedly connected with the outer edge of the horizontal bottom plate 8, and the other end of the vertical supporting arm is fixedly connected with the fixing ring 2, so that the horizontal bottom plate 8 is parallel to the fixing ring 2; the area formed between the horizontal bottom plate 8 and the fixed ring 2 is used for mounting the driving mechanism 16;
as shown in fig. 1, 2, 8 and 9, the flexible support guide mechanism 3 includes a central disc 10 and at least six sets of flexible arm assemblies 11 (6 sets in the present embodiment) which are uniformly distributed on the outer circumferential surface of the central disc 10 along the circumferential direction and radially extend outwards along the central disc 10; as shown in fig. 8 and 9, each group including the flexible arm assembly 11 is composed of a first connecting portion 12, a flexible portion 13, and a second connecting portion 14 in this order along the radial direction of the central disk 10;
as shown in fig. 4, the bottom surface of the secondary lens base 24 of the secondary lens assembly 22 to be focused is provided with a concave portion adapted to the shape of the flexible support guide mechanism 3, the flexible support guide mechanism 3 is integrally embedded in the concave portion and fixed in the concave portion through the first connecting portion 12 (in this embodiment, the first connecting portion is provided with a countersunk through hole, the corresponding bottom surface of the concave portion is provided with a threaded hole, the flexible support guide mechanism is fixedly embedded in the concave portion of the bottom surface of the secondary lens base through a countersunk screw), and meanwhile, the flexible portion 13 and the second connecting portion 14 extend outward from the outside of the secondary lens base (the outward extension of the flexible portion is to provide a deformation space, and the outward extension of the second connecting portion is to connect with the fixing;
the fixed ring 2 is connected with the flexible support guide mechanism 5 through six second connecting parts 14 (in the embodiment, the fixed ring is connected with the six second connecting parts through countersunk screws);
the detected ring plate 4 is fixed on the bottom surface of a secondary lens seat 24 of the secondary focusing lens assembly 22; the detected ring plate 4 is provided with at least three bulges 15 (3 bulges in the embodiment), and the bulges 15 are arranged for providing measuring points for the measurement feedback sensor 7;
as shown in fig. 3 and 5, each of the piezoceramic actuators 5 and the flexible amplification mechanisms 6 is at least three (in the present embodiment, each of the piezoceramic actuators and the flexible amplification mechanisms is 3); each piezoelectric ceramic actuator 5 is matched with each flexible amplifying mechanism 6 to form a driving mechanism 16; at least three driving mechanisms 16 are uniformly distributed on the horizontal bottom plate 8; the output ends of at least three driving mechanisms 16 are connected with the central disk 10;
at least three (3 in this embodiment) measurement feedback sensors 7 are fixedly inserted into the horizontal bottom plate 8, and respectively correspond to the three protrusions 15 in a one-to-one manner (specifically, the measurement feedback sensors 7 penetrate through the horizontal bottom plate 8, and a measurement head of each measurement feedback sensor 7 contacts with the corresponding protrusion 10).
When focusing is needed, the piezoelectric ceramic actuator 5 is electrified to generate a micro displacement, the displacement is amplified by the flexible amplifying mechanism 6 and then transmitted to the flexible supporting guide mechanism 3, the flexible part 13 of the flexible supporting guide mechanism 3 is deformed, and the first connecting part 12 of the flexible supporting guide mechanism 3 and the secondary mirror assembly generate displacement along the direction of the optical axis, so that focusing of the secondary mirror is realized.
In addition, in the present embodiment, the following explanation is required for the specific structure of some components:
driving mechanism
As shown in fig. 5 to 7, the driving mechanism is constituted by the piezoelectric ceramic actuator 5 and the flexible amplification mechanism 6, and has a focusing amount in the submillimeter range. The piezoceramic actuator 5 theoretically has infinitely high displacement resolution based on the inverse piezoelectric characteristics of the ceramic material, and the displacement output thereof in actual control depends on the resolution of the control voltage. Another important characteristic of the piezoceramic actuator 5 is that it has a small output displacement, with a conventional displacement output at lPZTIs less than or equal to 100 um. Therefore, for the sub-mirror focusing amount of the submillimeter order, the output displacement of the piezoelectric ceramic actuator is insufficient, and the flexible amplification mechanism 6 needs to be matched. The flexible amplifying mechanism 6 utilizes the characteristic that the local weak link of the structure has low rigidity, combines the principle of triangle/lever amplification, improves the displacement output quantity under the condition of ensuring that the displacement output precision meets the requirement, and meets the requirement of focusing quantity. The specific structure of the flexible amplification mechanism 6 comprises a top flexible hinge 17, two side arms 18 and a middle flexible arm 19; top flexibleThe flexible hinge 17 is of an arch structure (the top flexible hinge is of an arch structure, and aims to enable the top flexible hinge and the two side arms to form a triangular amplification mechanism to further increase displacement), two ends of the top flexible hinge 17 are respectively connected with the tops of the two side arms 18, an included angle between the top flexible hinge 17 and the two side arms 18 is α and α is larger than 90 degrees, the middle flexible arm 19 is installed between the two side arms 18 and is far away from the tops of the side arms 18, the piezoelectric ceramic actuator 5 is installed between the two side arms 18 and is located below the middle flexible arm 19, the flexible amplification mechanism 6 is actually of a two-stage flexible amplification structure, the two side arms 18 and the middle flexible arm 19 form a first-stage lever amplification mechanism, the two side arms 18 and the top flexible hinge 17 form a triangular amplification mechanism, and displacement output quantity is increased under the condition that displacement output precision of the flexible amplification mechanism meets requirements through the two-stage amplification mechanism, and the required focusing requirements are met.
Meanwhile, in the embodiment, the flexible amplifying mechanism 6 is made of titanium alloy Tc10 with good fatigue performance and comprehensive mechanical performance, and the top flexible hinge 17, the two side arms 18 and the middle flexible arm 19 are processed in a slow-wire-moving processing mode.
And the piezoelectric ceramic actuator 5 adopts a columnar structure, so that theoretical analysis shows that the displacement calculation formula provided by the driving mechanism is as follows:
lFH＝β1β2lPZT；
β1for the displacement amplification based on the lever principle,
β2for the displacement magnification based on the principle of triangulation,
l1the vertical distance between the central axis of the piezoelectric ceramic actuator and the central axis of the middle flexible arm is set;
l2is flexible at the middle partThe vertical distance between the arm central axis and the centers of the connecting positions of the top flexible hinge and the side arms;
θT＝α-90°；
lPZTthe displacement amount output by the piezoceramic actuator.
The top flexible hinge in the embodiment can be a straight beam type flexible hinge structure or a circular arc type flexible hinge structure, and based on the principle, the characteristics of micro deformation and automatic recovery of elastic materials are utilized, idle running and mechanical friction in the transmission process are eliminated, and ultrahigh displacement resolution can be obtained.
Measurement feedback sensor
The measurement feedback sensor 7 is used for controlling the focusing amount during focusing, and ensures that the displacement of the optical axis of the secondary mirror driven by the three points meets the focusing amount, and meanwhile, the displacements of rigid bodies with other five degrees of freedom are ensured to be within an allowable error range.
Fixing ring
The fixing ring 2 provides a mounting base for the whole mechanism and a camera body, and ensures the relative fixed position relation of the focusing assembly and the lens before focusing.
Flexible support guide mechanism
As shown in fig. 8 and 9, the flexible support guide mechanism 3 comprises 6 groups of flexible arm assemblies 11 which are circumferentially and uniformly distributed, the first connecting portion 12 and the second connecting portion 14 in a single flexible arm assembly 11 are rectangular, the flexible portion 13 comprises four thin rods 20, the four thin rods 131 are all installed between the first connecting portion 12 and the second connecting portion 14, and rectangular hollow structures are arranged among the first connecting portion 12, the second connecting portion 14 and the four thin rods 20, so that the single flexible arm assembly is integrally in a rectangular structure. In this embodiment, the first connecting portion, the second connecting portion and the four thin rods therebetween of the flexible arm assembly are integrated structures processed by slow-walking wires.
The thin rod 20 in the flexible portion has the basic dimensions of width, thickness and height
And h. Single flexible arm assembly 11 translational stiffness k in the optical axis directionsIs in functional relation with the wide, high and thick characteristic dimensions
The flexible arm assemblies 11 are uniformly distributed at the position of 6 peripheral directions and are connected in parallel to form the freedom degree k of motion along the shaftaThe relationship between the two is ka＝6ks. Radial translational stiffness k of flexible arm assembly 11rAnd torsional stiffness k about the optical axisnCompared with kaAre relatively large. Ratio kr/ka、kn/kaDefined as the off-axis stiffness ratio, and kr/ka≥20、kn/kaNot less than 20. One end of the flexible arm assembly 11 is fixed and has only translational degrees of freedom, the other degrees of freedom being fully constrained. The flexible supporting and guiding mechanism 3 consisting of the 6 flexible arm assemblies 11 only has smaller rigidity along the optical axis direction, has larger rigidity in other directions and higher off-axis rigidity ratio, provides reliable supporting protection for the secondary mirror assembly on the premise of meeting the guiding function of the optical axis direction, and the flexible part can also adopt other modes capable of generating elastic deformation, such as a thin-wall structure, besides the mode of consisting of four thin rods.
In addition, in order to make the mechanism more reasonable, the embodiment further provides the following optimized design:
1. in order to facilitate the mounting and dismounting, the first connecting part 12 and the concave part, the second connecting part 14 and the fixing ring 2, and the probed ring plate 4 and the bottom surface of the secondary lens base of the secondary focusing lens assembly are connected through countersunk screws.
2. The piezoceramic actuator 5 is mounted between the two side arms 18 by structural pretensioning or gluing.
3. The center plate 10 is provided with a lightening hole 21 in the center, see fig. 8 and 9.
4. The middle of the top flexible hinge 17 is provided with a countersunk through hole, correspondingly, the central disc 10 is provided with a screw hole corresponding to the countersunk through hole, and the top flexible hinge 17 is connected with the central disc 10 through a countersunk screw.
Based on the structural description of the focusing mechanism as before, the following explanation is now made on the adjustment steps of the focusing mechanism:
step 1: firstly, fixedly connecting an underframe 1 to a fixing ring 2 by using screws, mounting a piezoelectric ceramic actuator 5 on a flexible amplifying mechanism 6 to form a driving mechanism 16, then, uniformly and circumferentially and fixedly connecting three groups of assembled driving mechanisms 16 to a horizontal bottom plate 8 of the underframe 1, fixing a measurement feedback sensor 7 on the horizontal bottom plate 8 by using screws to form a non-moving part assembly of a secondary mirror focusing mechanism, and integrally fixing the non-moving part on a platform by using the fixing ring 2, as shown in fig. 4;
step 2: the secondary reflector 23 is fixed in the secondary reflector seat 24 in a gluing mode, a threaded pressing ring mode and the like, so that a secondary reflector assembly 22 is formed;
and step 3: the detected ring plate 9 is fixedly connected to the bottom surface of the secondary lens base 24 through screws, the flexible support guide mechanism 3 is embedded into a concave part of the bottom surface of the secondary lens base 24 and is in threaded connection with the concave part of the bottom surface of the secondary lens base 24 through a first connecting part 12 of the flexible support guide mechanism 3, and meanwhile, the output ends of the three groups of driving mechanisms 16 are in threaded connection with a central disc 10 of the flexible support guide mechanism 3, so that a moving part of the secondary lens focusing mechanism is formed, as shown in fig. 5;
and 4, step 4: and connecting the moving part with the fixing ring 2 of the non-moving part through the second connecting part 14 of the flexible support guide mechanism 3 in a threaded manner to complete system installation. It is noted that the second connection 14 of the flexible support guide 3 will belong to the non-moving part due to its connection to the fixed ring 2 and the first connection 12 of the flexible support guide 3 will belong to the moving part due to its connection to the secondary mirror mount, whereby it can be seen that the flexible support guide 3 will be a bridge connecting the non-moving part and the moving part.
In summary, the present invention mainly uses the piezoelectric ceramic actuator with the flexible amplifying mechanism to push the secondary mirror in the flexible supporting and guiding mechanism to move with high precision, so as to realize the high precision adjustment of the spatial position of the secondary mirror in the optical system, further correct the system aberration, and ensure the imaging quality.
Finally, it should be noted that the above description is only for describing the preferred embodiments of the present invention, and not for limiting the scope of the present invention, and that any changes and modifications made by those skilled in the art according to the above disclosure are all within the scope of the appended claims.
Claims (10)
1. The utility model provides a flexible high accuracy secondary mirror subassembly focusing mechanism which characterized in that: the device comprises a bottom frame, a fixing ring, a flexible supporting and guiding mechanism, a detected ring plate, a piezoelectric ceramic actuator, a flexible amplifying mechanism and a measurement feedback sensor;
the bottom frame comprises a horizontal bottom plate and at least three vertical supporting arms which are uniformly distributed on the outer edge of the horizontal bottom plate in the circumferential direction; one end of the vertical supporting arm is fixedly connected with the outer edge of the horizontal bottom plate, and the other end of the vertical supporting arm is fixedly connected with the fixing ring, so that the horizontal bottom plate and the fixing ring are kept parallel;
the flexible supporting and guiding mechanism comprises a central disc and at least six groups of flexible arm assemblies which are uniformly distributed on the outer circle surface of the central disc along the circumferential direction and extend outwards along the radial direction of the central disc;
the flexible arm component consists of a first connecting part, a flexible part and a second connecting part in sequence along the radial direction of the central disc;
a concave part matched with the shape of the flexible supporting and guiding mechanism is arranged on the bottom surface of the secondary lens base of the secondary lens assembly to be focused, the flexible supporting and guiding mechanism is integrally embedded into the concave part and fixed in the concave part through a first connecting part, and meanwhile, the flexible part and the second connecting part extend out of the secondary lens base;
the fixing ring is connected with the flexible support guide mechanism through at least six second connecting parts;
the detected ring plate is fixed on the bottom surface of the secondary lens seat of the secondary lens assembly to be focused; the probed ring plate is provided with at least three bulges;
the number of the piezoelectric ceramic actuators and the number of the flexible amplifying mechanisms are at least three; each piezoelectric ceramic actuator is matched and installed with each flexible amplifying mechanism to form a driving mechanism; at least three driving mechanisms are uniformly distributed on the horizontal bottom plate; the output ends of at least three driving mechanisms are connected with the central disc;
and at least three measurement feedback sensors are fixedly inserted on the horizontal bottom plate and respectively correspond to the at least three protruding positions one by one.
2. The flexible high precision secondary mirror assembly focusing mechanism of claim 1, wherein: the flexible amplifying mechanism comprises a top flexible hinge, two side arms and a middle flexible arm;
the top flexible hinge is of an arch structure, two ends of the top flexible hinge are respectively connected with the tops of the two side arms, an included angle between the top flexible hinge and each of the two side arms is α, and α is larger than 90 degrees;
the middle flexible arm is arranged between the two side arms and is far away from the tops of the side arms;
the piezoceramic actuator is arranged between the two side arms and is positioned below the middle flexible arm.
3. The flexible high precision secondary mirror assembly focusing mechanism of claim 2, wherein: the displacement of the flexible amplifying mechanism satisfies the following relational expression:
wherein l1The vertical distance between the central axis of the piezoelectric ceramic actuator and the central axis of the middle flexible arm is set;
l2the vertical distance between the central axis of the middle flexible arm and the center of the connecting position of the top flexible hinge and the side arm;
θT＝α-90°；
lPZTthe displacement amount output by the piezoceramic actuator.
4. The flexible high precision secondary mirror assembly focusing mechanism of claim 3, wherein: the flexible amplification mechanism is made of a titanium alloy Tc10 material, and a top flexible hinge, two side arms and a middle flexible arm are formed by a slow-wire-walking processing method.
5. The flexible high precision secondary mirror assembly focusing mechanism of claim 4, wherein: the middle of the top flexible hinge is provided with a countersunk through hole, correspondingly, the central disc is provided with a screw hole corresponding to the countersunk through hole, and the top flexible hinge is connected with the central disc through a countersunk screw.
6. The flexible high precision secondary mirror assembly focusing mechanism of claim 1 or 2, wherein: the flexible portion comprises four thin rods, the four thin rods are all installed between the first connecting portion and the second connecting portion, and hollow structures are arranged among the first connecting portion, the second connecting portion and the four thin rods.
7. The flexible high precision secondary mirror assembly focusing mechanism of claim 1, wherein: the first connecting portion with between the concave part, between second connecting portion and the solid fixed ring and by visiting between the ring board and by focusing secondary mirror base bottom surface all through countersunk screw connection.
8. The flexible high precision secondary mirror assembly focusing mechanism of claim 1, wherein: the piezoceramic actuator is columnar, and the output displacement of the piezoceramic actuator is less than or equal to 100 um.
9. The flexible high precision secondary mirror assembly focusing mechanism of claim 2, wherein: the piezoceramic actuator is arranged between the two side arms in a structural pre-tightening or gluing mode.
10. The flexible high precision secondary mirror assembly focusing mechanism of claim 1, wherein: the center of the central disc is provided with a lightening hole.
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| CN111624729B (en) * | 2020-05-29 | 2021-09-17 | 中国科学院长春光学精密机械与物理研究所 | Fast reflector |
| CN111474662B (en) * | 2020-06-04 | 2021-09-28 | 中国科学院长春光学精密机械与物理研究所 | High-rigidity horizontal focusing mechanism with compact structure |
| CN113126238B (en) * | 2021-03-26 | 2022-03-25 | 中国科学院西安光学精密机械研究所 | Secondary mirror focusing method, space optical camera and design method thereof |
| CN113917642B (en) * | 2021-09-23 | 2022-07-19 | 中国科学院西安光学精密机械研究所 | Series-parallel coupling multi-degree-of-freedom optical element precision adjusting platform |
| CN114442256A (en) * | 2022-01-11 | 2022-05-06 | 智慧星空(上海)工程技术有限公司 | Flexible adjusting device for reflector |
| CN115308872A (en) * | 2022-07-21 | 2022-11-08 | 深圳市群晖智能科技股份有限公司 | Piezoelectric actuating assembly, lens module, camera module and electronic equipment |
| CN116974035A (en) * | 2023-08-16 | 2023-10-31 | 同济大学 | High-precision three-screw linkage secondary mirror focusing mechanism |
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| KR100832850B1 (en) * | 2007-01-29 | 2008-05-28 | 주식회사 이오테크닉스 | Polygon mirror housing and method of compensation align-errors in the polygon mirror housing using the same |
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| CN108227110A (en) * | 2018-01-30 | 2018-06-29 | 中国科学院上海技术物理研究所 | A kind of speculum adjusts and fixing device |
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| CN106873117A (en) * | 2016-12-28 | 2017-06-20 | 中国科学院长春光学精密机械与物理研究所 | A kind of space optical remote sensor secondary mirror focusing compliant motion mechanism |
| CN108871405A (en) * | 2018-04-12 | 2018-11-23 | 中国科学院西安光学精密机械研究所 | Visible calibra- tion device on a kind of star of space optics telescope |
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