CN110531482A - A kind of flexible high-precision time mirror assembly focus adjusting mechanism - Google Patents
A kind of flexible high-precision time mirror assembly focus adjusting mechanism Download PDFInfo
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- CN110531482A CN110531482A CN201910801917.4A CN201910801917A CN110531482A CN 110531482 A CN110531482 A CN 110531482A CN 201910801917 A CN201910801917 A CN 201910801917A CN 110531482 A CN110531482 A CN 110531482A
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
- G02B7/18—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors
- G02B7/182—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors for mirrors
Abstract
The invention discloses a kind of flexible high-precision time mirror assembly focus adjusting mechanisms, and solving traditional focusing mode, structure is complicated, focusing accuracy is poor, clamping stagnation easily occurs in focussing process, and the problem of focus adjusting mechanism processing and assembly complexity.The focus adjusting mechanism include: including chassis, fixed ring, flexible support guiding mechanism, by spy ring flat-plate, piezoelectric actuator, flexible amplification mechanism and measurement feedback transducer；Chassis, fixed ring are successively installed by spy ring flat-plate, flexible support guiding mechanism, installation is by time mirror assembly of focusing on flexible support guiding mechanism, piezoelectric actuator and flexible amplification mechanism are multiple, and multiple for providing the driving mechanism of focusing amount with being combined into one by one；Multiple driving mechanisms are mounted between chassis and support guide mechanism, and measurement feedback transducer is mounted on the displacement on chassis and for measuring time mirror assembly of focusing.
Description
Technical field
The invention belongs to optical technical fields, and in particular to a kind of flexible high-precision time mirror assembly focus adjusting mechanism.
Background technique
Focus adjusting mechanism is the significant components in optical-mechanical system.The optical instruments such as ground telescope, theodolite are due to using ring
The influence of the factors such as border temperature variation causes to change along optical axis optical element spacing, will cause system aberration；Space camera is even more
The influence for bearing the harsh mechanical environments such as vibration, impact, the high/low temperature of launching phase may cause image quality decline.For
Above situation adjusts defocusing amount by focusing system, is the key link and important means of guarantee system image quality.
Imaging optical system is generally made of multiple optical elements with different role.Primary and secondary microscope group to be imaged determine
Effect, the requirement to optical interval is very strict, is based on this, and tradition focusing is more prone to select the light insensitive to optical interval
It learns element (corrective lens (eye protection) etc.) and is used as focusing lens.This regulative mode needs biggish focusing amount and lower focusing resolution ratio.It is common
Focus adjusting mechanism have feed screw nut and cam mechanism.Leadscrew-nut mechanism expense is lower, but it is easy clamping stagnation in extreme position；
Cam mechanism high reliablity, focusing is accurate, but its design is processed and assembled complex.
Summary of the invention
The object of the present invention is to provide a kind of flexible high-precision time mirror assembly focus adjusting mechanisms, solve traditional focusing mode knot
Structure is complicated, focusing accuracy is poor, clamping stagnation easily occurs in focussing process, and the problem of focus adjusting mechanism processing and assembly complexity.
Basic Design thinking of the invention is:
Using piezoelectric actuator as power source, flexible amplification mechanism is cooperated to form driving mechanism, meets focusing position
Output quantity is moved, while support and guiding mechanism using flexible support guiding mechanism as secondary mirror, realizes the high-precision focusing of secondary mirror.
The technical solution adopted by the present invention to solve the technical problems is:
A kind of flexible high-precision time mirror assembly focus adjusting mechanism, including chassis, fixed ring, flexible support guiding mechanism, visited
Ring flat-plate, piezoelectric actuator, flexible amplification mechanism and measurement feedback transducer；
Chassis includes horizonal base plate and circumferential at least three vertical support arms being evenly arranged on horizonal base plate outer；Vertically
Support arm one end and the horizonal base plate outer are connected, and the other end and the fixed ring are connected so that horizonal base plate with it is described solid
Determine ring keeping parallelism；
Flexible support guiding mechanism includes spider and is evenly distributed in spider outer round surface, and along spider diameter
To outwardly directed at least six groups of flexibility arm components；
Flexible arm component is along the radial direction of spider successively by first connecting portion, flexible part and second connecting portion group
At；
Recess portion compatible with the flexible support guiding mechanism shape is equipped with by the sub-mirror seat bottom surface for secondary mirror assembly of focusing,
Flexible support guiding mechanism is integrally embedded in the recess portion and is fixed in recess portion by first connecting portion, while flexible part and
Outside the protruding sub-mirror seat of two interconnecting pieces；
Fixed ring is connected by least six second connecting portions with flexible support guiding mechanism；
The sub-mirror seat bottom surface for time mirror assembly of being focused is fixed on by spy ring flat-plate；At least three protrusions are equipped with by spy ring flat-plate；
Piezoelectric actuator and flexible amplification mechanism are at least three；Each piezoelectric actuator and each
Flexible amplification mechanism is coupled, and forms a driving mechanism；At least three driving mechanisms are evenly arranged on horizonal base plate；At least three
The output end of a driving mechanism is connect with the spider；
Feedback transducer at least three is measured, fixation is inserted on the horizonal base plate, and respectively with described at least three
A raised position corresponds.
Further, in order to amplify focusing amount, above-mentioned flexible amplification mechanism include top flexible hinge, two side arms and
Middle part flexible arm；
The domed structure of top flexible hinge, the both ends of top flexible hinge are connect at the top of two side arms respectively, and are pushed up
Angle of portion's flexible hinge respectively between two side arms is α, and α is greater than 90 °；
Middle part flexible arm is mounted between two side arms, and far from the top of side arm；
Piezoelectric actuator is mounted between two side arms, and is located at below the middle part flexible arm.
The flexible amplification mechanism is actually two-stage flexibility enlarged structure, and two side arms and middle part flexible arm constitute the first order
Lever amplifying mechanism, two side arms and top flexible hinge constitute triangle amplification mechanism, are being guaranteed by two-stage enlarged structure
Under conditions of flexible amplification mechanism displacement output accuracy is met the requirements, displacement output quantity is also improved, meets required
Focusing requires.
Further, the displacement of above-mentioned flexible amplification mechanism meets following relationship:
Wherein, l1For the vertical range between the central axes and middle part flexible arm central axes of piezoelectric actuator；
l2For the vertical range between middle part flexible arm central axes and top flexible hinge and side arm link position center；
θT=α -90 °；
lPZTThe displacement of piezoelectric actuator output；
Further, above-mentioned flexible amplification mechanism is made of titanium alloy T c10 material, and by being careful, slivers processing method is formed
Top flexible hinge, two side arms and middle part flexible arm.
Further, above-mentioned top flexible hinge middle-of-chain opens up countersunk head through-hole, correspondingly, is provided on the spider
Screw hole corresponding with the countersunk head lead to the hole site, top flexible hinge are realized by sunk screw and spider and are connected.
Further, for the ease of processing, while to ensure that the rigidity of flexible support guiding mechanism meets requirement, on
It states flexible part to be made of four thin bars, four thin bars are installed between first connecting portion and second connecting portion, and first connects
It is hollow structure between socket part, second connecting portion and four thin bars.In fact, first connecting portion in flexible arm component, second
Interconnecting piece and four thin bars between the two are the integrated structures processed by slow wire feeding.
Further, for the ease of installing and dismounting, between above-mentioned first connecting portion and the recess portion, second connecting portion and solid
Determine between ring and is connected by sunk screw between spy ring flat-plate and the sub-mirror seat bottom surface for time mirror assembly of being focused.
Further, above-mentioned piezoelectric actuator is column, and the output displacement of piezoelectric actuator is less than or equal to
100um。
Further, above-mentioned piezoelectric actuator structure pre-tighten or gluing by way of be mounted on two side arms it
Between.
Further, the center of above-mentioned spider offers lightening hole.
The beneficial effects of the present invention are:
1, the driving that focus adjusting mechanism of the present invention is constituted using piezoelectric actuator cooperation flexible amplification mechanism
Mechanism can provide sufficiently high displacement resolution under the premise of guaranteeing enough displacement drives, guarantee the focusing of submicron order
Precision, compared to traditional focusing mode, control mode is greatly simplified, and motion credibility is higher；Meanwhile it being oriented to using flexible support
Mechanism, compared to traditional mechanisms such as traditional feed screw nut, cam mechanisms, deformation primarily rests on the flexible deformation of flexible part
On, the friction and viscous in movement is completely eliminated, while its is non-maintaining, can use in a variety of environment such as vacuum, high/low temperature,
There is no special lubrication needs, completely avoids interference and pollution to optical system yet.
2, the present invention use by spider and flexible support guiding mechanism that at least 6 groups of flexibility arm components are constituted, it is ensured that
It only has lesser rigidity along optical axis direction, other directional stiffness are larger, off-axis rigidity ratio with higher is meeting it
Reliable support protection is provided under the premise of optical axis direction guide function for time mirror assembly.
3, the flexible part structure that four thin bars of use of the invention are constituted, it is easy to process, while can satisfy flexible support
The rigidity requirement of guiding mechanism entirety.
4, focus adjusting mechanism amount of parts disclosed in this invention is few, structure type is simple and compact, will not be to optical system
It brings and blocks the harm such as light, while being convenient for assembling and setting.
5, focus adjusting mechanism disclosed in this invention can reach tens nanometers of focusing essence in grade focusing range ability
Degree, while the inclined light shaft amount in gamut scope within 1 rad will be carried out using closed-loop control, compared to there are gaps
The focusing mode such as lead screw, precision significantly improves.
Detailed description of the invention
Fig. 1 is that focus adjusting mechanism installs schematic perspective view after time mirror assembly.
Fig. 2 is that focus adjusting mechanism installs assembling structure schematic cross-sectional view after time mirror assembly.
Fig. 3 is that focus adjusting mechanism does not install flexible support guiding mechanism and perspective view when by spy ring flat-plate.
Fig. 4 is flexible support guiding mechanism, by the assembling schematic diagram of spy ring flat-plate and secondary mirror assembly.
Fig. 5 is the perspective view of flexible amplification mechanism.
Fig. 6 is the front view of flexible amplification mechanism.
Fig. 7 is the schematic diagram of driving mechanism.
Fig. 8 is the perspective view of flexible support guiding mechanism.
Fig. 9 is the front view of flexible support guiding mechanism.
Appended drawing reference is as follows:
1- chassis, 2- fixed ring, 3- flexible support guiding mechanism, 4- are flexible by spy ring flat-plate, 5- piezoelectric actuator, 6-
Enlarger, 7- measure feedback transducer, the vertical support arm of 8- horizonal base plate, 9-, 10- spider, 11- flexibility arm component, 12-
First connecting portion, 13- flexible part, 14- second connecting portion, 15- protrusion, the top 16- driving mechanism, the 17- side flexible hinge 18-
Flexible arm, 20- thin bar, 21- lightening hole, 22- mirror assembly, 23- secondary mirror, 24- sub-mirror seat in the middle part of arm, 19-.
Specific embodiment
To keep the purpose of the present invention, advantages and features clearer, below in conjunction with the drawings and specific embodiments to the present invention
A kind of flexible high-precision time mirror assembly focus adjusting mechanism proposed is described in further detail.According to following explanation and claim
Book, advantages and features of the invention will become apparent from.It should be understood that attached drawing is all made of very simplified form and using non-
Accurately ratio, only for the purpose of facilitating and clarifying the purpose of the embodiments of the invention；Secondly, the structure that attached drawing is shown
Often a part of practical structures；Again, the emphasis that each attached drawing needs to show is different, uses different ratios sometimes.
Structure composition
A kind of flexible high-precision time mirror assembly focus adjusting mechanism, mainly includes chassis 1, fixed ring 2, flexible support guiding mechanism
3, by spy ring flat-plate 4, piezoelectric actuator 5, flexible amplification mechanism 6 and measurement feedback transducer 7；
As shown in Figure 1-3, chassis 1 includes horizonal base plate 8 and circumferential at least three be evenly arranged on 8 outer of horizonal base plate
Vertical support arm 9 (vertical support arm is 6 in the present embodiment)；Vertical 9 one end of support arm and 8 outer of horizonal base plate are solid
Even, the other end and the fixed ring 2 are connected, so that horizonal base plate 8 and 2 keeping parallelism of fixed ring；Horizonal base plate 8 and fixation
The region formed between ring 2 is for installing driving mechanism 16；
As shown in Fig. 1,2,8 and 9, flexible support guiding mechanism 3 includes spider 10 and is evenly distributed in spider
10 outer round surface, and at least six groups of flexibility arm components 11 (the flexible arm group in the present embodiment extended radially out along spider 10
Part is 6 groups)；As shown in Figure 8 and Figure 9, each group include flexible arm component 11 along spider 10 radial direction successively by
First connecting portion 12, flexible part 13 and second connecting portion 14 form；
As shown in figure 4,24 bottom surface of sub-mirror seat for time mirror assembly 22 of being focused is equipped with and 3 shape of flexible support guiding mechanism
The compatible recess portion of shape, flexible support guiding mechanism 3 is whole to be embedded in the recess portion and is fixed on recess portion by first connecting portion 12
It is interior that (first connecting portion is provided with countersunk head through-hole in the present embodiment, and corresponding recess portion bottom surface is provided with threaded hole, flexible support guiding
Mechanism is inlaid in the recess portion of sub-mirror seat bottom surface by sunk screw fixation), at the same flexible part 13 and second connecting portion 14 to
(the protruding purpose of flexible part is to need to provide deformation space, the protruding mesh of second connecting portion outside outer stretching sub-mirror seat
Be to be connect with fixed ring)；
Fixed ring 2 be connected with flexible support guiding mechanism 5 by six second connecting portions 14 (in the present embodiment fixed ring and
It is connected between six second connecting portions using sunk screw)；
24 bottom surface of sub-mirror seat for time mirror assembly 22 of being focused is fixed on by spy ring flat-plate 4；At least three are equipped with by spy ring flat-plate 4
The purpose of protrusion 15 (the present embodiment protrusions are 3), the setting of the protrusion 15 is to provide measuring point to measurement feedback transducer 7；
As shown in Figures 3 and 5, piezoelectric actuator 5 and flexible amplification mechanism 6 are at least three and (press in the present embodiment
Electroceramics actuator and flexible amplification mechanism are 3)；Each piezoelectric actuator 5 and each flexible amplification mechanism 6
It is coupled, forms a driving mechanism 16；At least three driving mechanisms 16 are evenly arranged on horizonal base plate 8；At least three drivings
The output end of mechanism 16 is connect with the spider 10；
Feedback transducer 7 at least three (it is 3 that feedback transducer is measured in the present embodiment) is measured, fixation is inserted into institute
It states on horizonal base plate 8, and (specific fit system is: measurement feedback sense with three protrusions, 15 position one-to-one correspondence respectively
Device 7 passes through horizonal base plate 8, measures the corresponding contact of protrusion 10 of the measuring head of feedback transducer 7).
When being focused, piezoelectric actuator 5 is powered, and starts to generate micro-displacement amount, and pass through flexible amplification
Mechanism 6 passes to flexible support guiding mechanism 3 after amplifying displacement, the flexible part 13 of flexible support guiding mechanism 3 generates shape
Become, the first connecting portion 12 of flexible support guiding mechanism 3 generates displacement along the direction of optical axis together with secondary mirror assembly, to realize
The focusing of secondary mirror.
In addition, in the present embodiment, the specific structure to some components is needed to make following explanation:
Driving mechanism
As illustrated in figs. 5-7, driving mechanism is constituted by piezoelectric actuator 5 and flexible amplification mechanism 6, there is submillimeter
The focusing amount of grade.Theoretically there is inverse piezoelectric property of the piezoelectric actuator 5 based on ceramic material infinite height displacement to differentiate
Rate, its displacement output depends on resolution ratio of control voltage in practical control.Another key property of piezoelectric actuator 5 is it
Output displacement is small, and the conventional output quantity that is displaced is in lPZTWithin the scope of≤100um.Therefore, for the secondary mirror focusing amount of submillimeter level, pressure
Electroceramics actuator output displacement is insufficient, needs to cooperate flexible amplification mechanism 6.Flexible amplification mechanism 6 is weak using structure partial
The lesser characteristic of link rigidity mentions under conditions of guaranteeing that displacement output accuracy is met the requirements in conjunction with triangle/lever amplification principle
Height displacement output quantity, reaches the requirement of focusing amount.The specific structure of flexible amplification mechanism 6 includes 17, two sides of top flexible hinge
Arm 18 and middle part flexible arm 19；(signified top flexible hinge is domes to the domed structure of top flexible hinge 17 herein
Purpose be that it is possible to make top flexible hinge and two side arms to constitute triangle amplification mechanisms, further promote displacement
Amount), the both ends of top flexible hinge 17 are connected at the top of two side arms 18 respectively, and top flexible hinge 17 respectively with two sides
Angle between arm 18 is α, and α is greater than 90 °；Middle part flexible arm 19 is mounted between two side arms 18, and is pushed up far from side arm 18
Portion；Piezoelectric actuator 5 is mounted between two side arms 18, and is located at 19 lower section of middle part flexible arm.Flexibility amplification
Mechanism 6 is actually two-stage flexibility enlarged structure, and two side arms 18 and middle part flexible arm 19 constitute first order lever amplifying mechanism,
Two side arms 18 and top flexible hinge 17 constitute triangle amplification mechanism, ensure that the flexibility puts by two-stage enlarged structure
Under conditions of great institutions displacement output accuracy is met the requirements, displacement output quantity is also improved, required focusing requirement is met.
Meanwhile flexible amplification mechanism 6 uses fatigue behaviour and the preferable titanium alloy of comprehensive mechanical property in the present embodiment
Tc10 is material, processes top 17, two side arms 18 of flexible hinge and middle part flexible arm in such a way that slow wire feeding is processed
19。
And piezoelectric actuator 5 uses column structure, the position that thus driving mechanism known to theory analysis can be provided
Shifting amount calculation formula are as follows:
lFH=β1β2lPZT；
β1For the displacement equations multiple based on lever principle,
β2For the displacement equations multiple based on triangle principle,
l1For the vertical range between the central axes and middle part flexible arm central axes of piezoelectric actuator；
l2For the vertical range between middle part flexible arm central axes and top flexible hinge and side arm link position center；
θT=α -90 °；
lPZTThe displacement of piezoelectric actuator output.
It can also be arc-shaped flexibility that described top flexible hinge, which can be straight beam type flexible hinge structure, in the present embodiment
Hinge arrangement is to eliminate transmission process using elastic material micro-strain and its characteristic automatically replied based on principle
Idle running and mechanical friction can obtain the displacement resolution of superelevation.
Measure feedback transducer
Control when measurement feedback transducer 7 is used to focus to focusing amount guarantees that the secondary mirror optical axis displacement of 3 points of drivings is full
While sufficient focusing amount, the rigid body displacement of other five freedom degrees guarantees in the error range of permission.
Fixed ring
Fixed ring 2 provides the installation foundation with camera main-body for entire mechanism, guarantees secondary mirror and focusing component before focusing
Relatively fixed position relationship.
Flexible support guiding mechanism
As shown in Figure 8 and Figure 9, flexible support guiding mechanism 3 includes that the flexible arm component 11 of 6 groups of circumference uniform distributions forms, single
First connecting portion 12 and second connecting portion 14 are rectangle in a flexibility arm component 11, and flexible part 13 includes four thin bars 20, four
Thin bar 131 is installed between first connecting portion 12 and second connecting portion 14, and first connecting portion 12,14 and of second connecting portion
It is rectangular hollow structure between four thin bars 20, therefore single flexible arm component is integrally in rectangular parallelepiped structure.It, should in the present embodiment
The first connecting portion of flexible arm component, second connecting portion and four thin bars between the two are processed by slow wire feeding
Integrated structure.
The basic size of thin bar 20 is width in flexible part, thick, height is respectively And h.Individually
Flexible arm component 11 is along optical axis direction translational stiffness ksWith above-mentioned wide, high, thick characteristic size formation function relationshipUniformly distributed flexible arm component 11 is in parallel at circumferential 6 forms along axis freedom of motion ka,
Both sides relation is ka=6ks.The radial translation rigidity k of flexible arm component 11rAnd the torsion stiffness k around optical axisnCompared to kaFor phase
To relatively large.Ratio kr/ka、kn/kaIt is defined as off-axis rigidity ratio, and kr/ka≥20、kn/ka≥20.Fixed flexibility arm component 11
One end only has translation freedoms, other freedom degrees are by Complete Bind.The flexible support guiding that 6 flexible arm components 11 form
Mechanism 3 only has lesser rigidity along optical axis direction, other directional stiffness are larger, and off-axis rigidity ratio with higher is meeting
Reliable support protection is provided for time mirror assembly under the premise of its optical axis direction guide function, flexible part is in addition to using four thin bars
The mode of composition, other, which also can be used, can generate the mode of flexible deformation, for example, by using thin-wall construction.
In addition to this, in order to keep the mechanism more reasonable, optimization design is also provided in the present embodiment:
1, for the ease of installing and dismounting, between first connecting portion 12 and the recess portion, second connecting portion 14 and fixed ring 2 it
Between and passed through sunk screw connection between spy ring flat-plate 4 and the sub-mirror seat bottom surface for time mirror assembly of being focused.
2, piezoelectric actuator 5 is mounted between two side arms 18 by way of structure preload or gluing.
3, the center of spider 10 offers lightening hole 21, referring to Fig. 8 and Fig. 9.
4, the centre of top flexible hinge 17 opens up countersunk head through-hole, correspondingly, be provided on the spider 10 with it is described
The corresponding screw hole of countersunk head lead to the hole site, top flexible hinge 17 are realized by sunk screw and spider 10 and are connected.
It is described, now the adjustment step of the focusing structure is made set forth below based on such as preceding structure to focus adjusting mechanism:
Step 1: chassis 1 being fixed in fixed ring 2 with screw first, piezoelectric actuator 5 is mounted on flexibility and is put
Driving mechanism 16 is formed on great institutions 6, and three groups of 16 circumference uniform distributions of driving mechanism after assembling are then fixed on to the water of chassis 1
On flat underside 8, measurement feedback transducer 7 is fixed on horizonal base plate 8 by screw, forms the non-athletic portion of secondary mirror focus adjusting mechanism
Part composition, and non-moving parts is fixed on a platform entirely through fixed ring 2, as shown in Figure 4；
Step 2: secondary mirror 23 is fixed in sub-mirror seat 24 by forms such as cementing and threaded rings, to form secondary mirror
Component 22；
Step 3: will be fixed on 24 bottom surface of sub-mirror seat by spy ring flat-plate 9 by screw, flexible support guiding mechanism 3 be embedded in into
In the recess portion of 24 bottom surface of sub-mirror seat, and by the first connecting portion 12 of flexible support guiding mechanism 3 by with 24 bottom surface of sub-mirror seat
Recess portion be threadedly coupled, meanwhile, 10 screw thread of spider of the output ends of three groups of driving mechanisms 16 and flexible support guiding mechanism 3 connects
It connects, to form the motion parts of secondary mirror focus adjusting mechanism, as shown in Figure 5；
Step 4: motion parts are passed through into the second connecting portion 14 of flexible support guiding mechanism 3 and the fixation of non-athletic part
Ring 2 is threadedly coupled, and completes system installation.It should be pointed out that the second connecting portion 14 of flexible support guiding mechanism 3 due to it is solid
Determine the connection of ring 2, non-athletic part will be belonged to, the first connecting portion 12 of flexible support guiding mechanism 3, will due to connecting with sub-mirror seat
Belong to motion parts, it can be seen that, flexible support guiding mechanism 3 will be the bridge for connecting non-athletic part and motion parts.
Step 5: to the threshold voltages such as three groups of driving mechanisms 16 while input, then driving mechanism is inverse in piezoelectric actuator 5
Under piezoelectric effect and flexible amplification mechanism 6 act on, generating along system optical axis direction values is β1β2lPZTDisplacement, push
Motion parts (Fig. 5) are along optical axis direction precise motion.On the one hand the generation of precise motion movement depends on flexible support Guiding machine
The guiding role of flexible arm component 11 in structure 3, on the other hand dependent on arm component 11 flexible in flexible support guiding mechanism 3 along light
The lesser rigidity of axis direction.Three groups of measurement feedback transducers 7, which receive in motion parts, forms closed loop control by the displacement of spy ring flat-plate 4
System, and can be used as control input and real-time multidimensional compensation is carried out to the heeling error and shaking volume of optical axis in motion process.
To sum up, the present invention mainly pushes flexible support guiding by the piezoelectric actuator with flexible amplification mechanism
Secondary mirror high-precision motion in mechanism realizes that secondary mirror spatial position high-precision is adjusted in optical system, and then update the system aberration,
Guarantee image quality.
It should be noted last that foregoing description is only the description to present pre-ferred embodiments, not to model of the present invention
Any restriction enclosed, any change, the modification that field those of ordinary skill of the present invention does according to the disclosure above content, belongs to weigh
The protection scope of sharp claim.
Claims (10)
1. a kind of flexible high-precision time mirror assembly focus adjusting mechanism, it is characterised in that: including chassis, fixed ring, flexible support guiding
Mechanism, by spy ring flat-plate, piezoelectric actuator, flexible amplification mechanism and measurement feedback transducer；
Chassis includes horizonal base plate and circumferential at least three vertical support arms being evenly arranged on horizonal base plate outer；Vertical support
Arm one end and the horizonal base plate outer are connected, and the other end and the fixed ring are connected, so that horizonal base plate and the fixed ring
Keeping parallelism；
Flexible support guiding mechanism includes spider and is evenly distributed in spider outer round surface, and along spider it is radial to
At least six groups of flexibility arm components of outer stretching；
Flexible arm component is successively made of first connecting portion, flexible part and second connecting portion along the radial direction of spider；
Recess portion compatible with the flexible support guiding mechanism shape is equipped with by the sub-mirror seat bottom surface for secondary mirror assembly of focusing, it is flexible
Support guide mechanism is integrally embedded in the recess portion and is fixed in recess portion by first connecting portion, while flexible part and the second company
Outside the protruding sub-mirror seat of socket part；
Fixed ring is connected by least six second connecting portions with flexible support guiding mechanism；
The sub-mirror seat bottom surface for time mirror assembly of being focused is fixed on by spy ring flat-plate；At least three protrusions are equipped with by spy ring flat-plate；
Piezoelectric actuator and flexible amplification mechanism are at least three；Each piezoelectric actuator and each flexibility
Enlarger is coupled, and forms a driving mechanism；At least three driving mechanisms are evenly arranged on horizonal base plate；At least three drive
The output end of motivation structure is connect with the spider；
Feedback transducer at least three is measured, fixation is inserted on the horizonal base plate, and convex with described at least three respectively
Position is played to correspond.
2. flexible high-precision according to claim 1 time mirror assembly focus adjusting mechanism, it is characterised in that: the flexibility enlarger
Structure includes top flexible hinge, two side arms and middle part flexible arm；
The domed structure of top flexible hinge, the both ends of top flexible hinge are connect at the top of two side arms respectively, and top is soft
Property angle of the hinge respectively between two side arms be α, and α is greater than 90 °；
Middle part flexible arm is mounted between two side arms, and far from the top of side arm；
Piezoelectric actuator is mounted between two side arms, and is located at below the middle part flexible arm.
3. flexible high-precision according to claim 2 time mirror assembly focus adjusting mechanism, it is characterised in that: the flexibility enlarger
The displacement of structure meets following relationship:
Wherein, l1For the vertical range between the central axes and middle part flexible arm central axes of piezoelectric actuator；
l2For the vertical range between middle part flexible arm central axes and top flexible hinge and side arm link position center；
θT=α -90 °；
lPZTThe displacement of piezoelectric actuator output.
4. flexible high-precision according to claim 3 time mirror assembly focus adjusting mechanism, it is characterised in that: the flexibility enlarger
Structure is made of titanium alloy T c10 material, and it is soft to form top flexible hinge, two side arms and middle part by slivers processing method of being careful
Property arm.
5. flexible high-precision according to claim 4 time mirror assembly focus adjusting mechanism, it is characterised in that: the top flexible hinge
Middle-of-chain opens up countersunk head through-hole, correspondingly, screw hole corresponding with the countersunk head lead to the hole site is provided on the spider,
Top flexible hinge is realized by sunk screw and spider and is connected.
6. flexible high-precision according to claim 1 or 2 time mirror assembly focus adjusting mechanism, it is characterised in that: the flexible part
Including four thin bars, four thin bars are installed between first connecting portion and second connecting portion, and first connecting portion, the second company
It is hollow structure between socket part and four thin bars.
7. flexible high-precision according to claim 1 time mirror assembly focus adjusting mechanism, it is characterised in that: the first connecting portion
Between the recess portion, between second connecting portion and fixed ring and by the sub-mirror seat bottom surface of spy ring flat-plate and time mirror assembly of being focused
Between pass through sunk screw connect.
8. flexible high-precision according to claim 1 time mirror assembly focus adjusting mechanism, it is characterised in that: the piezoelectric ceramics causes
Dynamic device is column, and the output displacement of piezoelectric actuator is less than or equal to 100um.
9. flexible high-precision according to claim 2 time mirror assembly focus adjusting mechanism, it is characterised in that: piezoelectric actuator
It is mounted between two side arms by way of structure preload or gluing.
10. flexible high-precision according to claim 1 time mirror assembly focus adjusting mechanism, it is characterised in that: the spider
Center offers lightening hole.
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN111474662A (en) * | 2020-06-04 | 2020-07-31 | 中国科学院长春光学精密机械与物理研究所 | High-rigidity horizontal focusing mechanism with compact structure |
| CN111624729A (en) * | 2020-05-29 | 2020-09-04 | 中国科学院长春光学精密机械与物理研究所 | Fast reflector |
| CN113126238A (en) * | 2021-03-26 | 2021-07-16 | 中国科学院西安光学精密机械研究所 | Secondary mirror focusing method, space optical camera and design method thereof |
| CN113917642A (en) * | 2021-09-23 | 2022-01-11 | 中国科学院西安光学精密机械研究所 | Series-parallel coupling multi-degree-of-freedom optical element precision adjusting platform |
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| CN111624729A (en) * | 2020-05-29 | 2020-09-04 | 中国科学院长春光学精密机械与物理研究所 | Fast reflector |
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| CN111474662A (en) * | 2020-06-04 | 2020-07-31 | 中国科学院长春光学精密机械与物理研究所 | High-rigidity horizontal focusing mechanism with compact structure |
| CN111474662B (en) * | 2020-06-04 | 2021-09-28 | 中国科学院长春光学精密机械与物理研究所 | High-rigidity horizontal focusing mechanism with compact structure |
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| CN113917642B (en) * | 2021-09-23 | 2022-07-19 | 中国科学院西安光学精密机械研究所 | Series-parallel coupling multi-degree-of-freedom optical element precision adjusting platform |
| CN114442256A (en) * | 2022-01-11 | 2022-05-06 | 智慧星空(上海)工程技术有限公司 | Flexible adjusting device for reflector |
| WO2024016428A1 (en) * | 2022-07-21 | 2024-01-25 | 深圳市群晖智能科技股份有限公司 | Piezoelectric actuation assembly, lens module, camera module, and electronic device |
| CN116974035A (en) * | 2023-08-16 | 2023-10-31 | 同济大学 | High-precision three-screw linkage secondary mirror focusing mechanism |
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