CN100585454C - High-precision 2-D rotary regulation mechanism - Google Patents
High-precision 2-D rotary regulation mechanism Download PDFInfo
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- CN100585454C CN100585454C CN200810187609A CN200810187609A CN100585454C CN 100585454 C CN100585454 C CN 100585454C CN 200810187609 A CN200810187609 A CN 200810187609A CN 200810187609 A CN200810187609 A CN 200810187609A CN 100585454 C CN100585454 C CN 100585454C
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Abstract
The invention provides a high-precision bi-dimensional rotation adjustment gear which is applied in the adjustment technology field of the high-precision optical system. The adjustment gear is mainly composed of a base, a first adjusting component, a second adjusting component, a third adjusting component and a forth adjusting component. The base is circular wholly and provided with two sets of elastic structures, the first of which is arranged on the top surface of the base and the second of which is arranged on the bottom of the base. The two sets of the elastic structures are perpendicular mutually on the base. The second adjusting component and the forth adjusting component are respectively installed on the side face of the first set of elastic structure on the base by two screws. The first adjusting component and the third adjusting component are respectively installed on the side face of the second set of elastic structure on the base by two screws. The invention has the advantages of simple structure, low manufacturing cost, high control precision, and no lost motion, no creep or Abbe error.
Description
Technical field
The present invention is applied to the integration techno logy field of high-precision optical system, relates to a kind of high precision two-dimensional rotating and regulating mechanism.
Background technology
High precision two-dimensional rotating and regulating mechanism all can be used in a lot of fields, such as in the butt joint each other of precision component, instrument, very wide application is arranged in high-precision optical system particularly.Along with the reach of science, requirement to precision is also more and more higher, the platform complex structure is transferred in existing bidimensional rotation, the manufacturing cost height, and existence is adjusted, bearing accuracy is low, backlash is arranged in the to-and-fro movement, response lag, there is shortcoming such as creep during motion, the more important thing is that existing bidimensional rotation adjustment platform is difficult to that the required parts of debuging will be adjusted face and overlaps with the rotation center of adjusting mechanism, when certain direction rotation, all can there be Abbe error to exist like this, must carries out compensation of error by adjustment other degree of freedom for eliminating Abbe error.Bring difficulty for so high-precision assembling and butt joint, cause development work efficient low, the development cost height, the cycle is long.
Summary of the invention
The purpose of this invention is to provide a kind of high precision two-dimensional rotating and regulating mechanism, it is simple in structure, low cost of manufacture, and the no backlash of moving, nothing is creeped, and is easy to reach control accuracy, no Abbe error.
In order to achieve the above object, technical scheme of the present invention is as follows:
High precision two-dimensional rotating and regulating mechanism, mainly by base, first adjusts assembly, second adjusts assembly, the 3rd adjusts assembly and the 4th adjusts the assembly composition, base integral body is annular, which is provided with two groups of elastic constructions, first group of elastic construction is positioned at the end face of base, second group of elastic construction is positioned at the bottom surface of base, two groups of elastic construction positions on base are vertical mutually, second adjusts assembly and the 4th adjusts assembly and is installed on the side of first group of elastic construction of base by two screws respectively, and first adjusts assembly and the 3rd adjusts assembly and be installed on the side of second group of elastic construction of base by two screws respectively.
It is identical that the above-mentioned first adjustment assembly, second is adjusted assembly, the 3rd adjustment assembly, the 4th is adjusted modular construction; First group of above-mentioned elastic construction mainly is made up of first elastic construction that is symmetrically distributed in base top surface and second elastic construction, described second group of elastic construction mainly is made up of the 3rd elastic construction that is symmetrically distributed in base end face and the 4th elastic construction, and the bottom surface of above-mentioned four elastic constructions is equipped with flexure strip; The above-mentioned first adjustment assembly, second is adjusted assembly, the 3rd adjustment assembly and the 4th is adjusted assembly and is made up of a jacking block and an adjustment handwheel respectively, described jacking block is the derby with threaded hole, first unthreaded hole and second unthreaded hole, above-mentioned four adjustment assemblies pass first unthreaded hole by two screws respectively and second unthreaded hole is fixed on the side of base elastic construction, described adjustment handwheel comprises a screw rod, and this screw rod is installed in the threaded hole of jacking block.
The invention has the beneficial effects as follows: simple in structure, cheap for manufacturing cost; Because of its adjustment to rotary freedom is that elastic deformation by the base elastic construction realizes, so the degree of freedom of each spinning direction is separate, the no backlash of moving, nothing is creeped, and is easy to reach control accuracy, and Tu Chu advantage is the existence that does not have Abbe error the most.
Description of drawings
Fig. 1 is the structural representation of high precision two-dimensional rotating and regulating mechanism of the present invention.
Fig. 2 is a understructure synoptic diagram of the present invention.
Fig. 3 is an adjustment handwheel structural representation of the present invention.
Fig. 4 is an ejecting block synoptic diagram of the present invention.
Fig. 5 utilizes one of high precision two-dimensional rotating and regulating mechanism supporting reflex mirror of the present invention to implement synoptic diagram.
Among the figure: 1, base, 2, first adjusts assembly, and 3, second adjusts assembly, 4, the 3rd adjust assembly, the 5, the 4th adjusts assembly, and 6, screw, 7, first elastic construction, 8, second elastic construction, the 9, the 3rd elastic construction, 10, the 4th elastic construction, 11, flexure strip, 12, screw rod, 13, threaded hole, 14, first unthreaded hole, 15, second unthreaded hole, 16, debug parts, 17, high precision two-dimensional rotating and regulating mechanism, 18, other adjusting mechanisms.
Embodiment
Below in conjunction with accompanying drawing the present invention is done description in further detail:
As shown in Figure 1, high precision two-dimensional rotating and regulating mechanism of the present invention mainly is made up of with four identical adjustment assemblies of structure base 1, adjust assembly for four and promptly first adjust assembly 2, second adjusts assembly 3, the 3rd adjusts assembly 4 and the 4th adjusts assembly 5, the material of base 1 is the metal of good toughness, can select arbitrarily according to actual conditions, generally can use titanium alloy, spring steel etc., base 1 integral body is annular, which is provided with two groups of elastic constructions, two groups of elastic constructions and base 1 one are processed to form, first group of elastic construction is positioned at the end face of base 1, second group of elastic construction is positioned at the bottom surface of base 1, two groups of elastic construction positions on base 1 are vertical mutually, second adjust assembly 3 and the 4th adjust assembly 5 respectively the screw 6 by two M4 be installed on the side of first group of elastic construction of base 1, first adjust assembly 2 and the 3rd adjust assembly 4 respectively the screw 6 by two M4 be installed on the side of second group of elastic construction of base 1.
As shown in Figure 2, first group of elastic construction mainly is made up of first elastic construction 7 and second elastic construction 8, and first elastic construction 7 and second elastic construction 8 are symmetrically distributed in the end face of base 1; Second group of elastic construction mainly is made up of the 3rd elastic construction 9 and the 4th elastic construction 10, the 3rd elastic construction 9 and the 4th elastic construction 10 are symmetrically distributed in the bottom surface of base 1, the bottom surface of above-mentioned four elastic constructions is equipped with very thin flexure strip 11, flexure strip 11 and the machine-shaping of elastic construction one, flexure strip 11 is the good metal of toughness with the material of elastic construction, can select arbitrarily according to actual conditions, generally can use titanium alloy, spring steel etc.
In conjunction with Fig. 3 and shown in Figure 4, first adjusts assembly 2, the second adjustment assembly 3, the 3rd adjustment assembly 4 and the 4th adjustment assembly 5 is made up of a jacking block and an adjustment handwheel respectively, described jacking block is the derby with threaded hole 13, first unthreaded hole 14 and second unthreaded hole 15, can adopt 45# steel through Quenching Treatment, above-mentioned four adjust assemblies respectively the screw 6 by two M4 pass first unthreaded hole 14 and second unthreaded hole 15 is fixed on the side of base 1 elastic construction, described adjustment handwheel comprises a screw rod 12, and this screw rod 12 is installed in the threaded hole 13 of jacking block.Adjust handwheel and can be changed to electrically drivenly, also can be changed to the differential screw device, adjust precision to improve according to the precision of required adjustment.
Debug the screw of parts by four M6 and be connected with first elastic construction 7 of base 1, the upper surface of second elastic construction 8, for the elimination Abbe error should with debug first elastic construction 7 of the surfaces of revolution of the required adjustment of parts with base 1, the upper surface of second elastic construction 8 overlaps.
When the present invention works, adjusting handwheel by rotation makes the flexure strip 11 of two groups of elastic constructions of base 1 produce distortion, thereby make two groups of elastic constructions edge rotation center rotation separately respectively of base 1, and then make the end face coplane of the elastic construction of the surfaces of revolution of being debug the required adjustment of parts and base 1, promptly eliminate Abbe error.
As shown in Figure 5, debug the screw of parts 16 by four M6 and be connected with the end face of one group of elastic construction of the base 1 of high precision two-dimensional rotating and regulating mechanism 17 of the present invention, high precision two-dimensional rotating and regulating mechanism 17 is connected with other adjusting mechanisms 18 by the screw of four M6.By regulating the adjustment handwheel of high precision two-dimensional rotating and regulating mechanism 17, the end face of being debug parts 16 is rotated a certain angle, and then make and debug parts 16 and do no Abbe error and rotatablely move, thereby reached the adjustment purpose.
The present invention utilizes the strain of base 1 elastic construction to realize the rotary freedom accent of no Abbe error Whole, be have do not have creep, the reseting precision height, response is fast, cost is low, the height of being convenient to the advantages such as processing and manufacturing The precision two-dimensional rotating and regulating mechanism.
Claims (3)
1, high precision two-dimensional rotating and regulating mechanism, it is characterized in that, this adjusting mechanism comprises base (1), first adjusts assembly (2), second adjusts assembly (3), the 3rd adjusts assembly (4) and the 4th adjusts assembly (5), base (1) integral body is annular, which is provided with two groups of elastic constructions, first group of elastic construction is positioned at the end face of base (1), it mainly is made up of first elastic construction (7) that is symmetrically distributed in base (1) end face and second elastic construction (8), second group of elastic construction is positioned at the bottom surface of base (1), it mainly is made up of the 3rd elastic construction (9) that is symmetrically distributed in base (1) bottom surface and the 4th elastic construction (10), the bottom surface of above-mentioned four elastic constructions is equipped with flexure strip (11), and two groups of elastic construction positions on base (1) are vertical mutually; The second adjustment assembly (3) and the 4th is adjusted assembly (5) and is installed on the side of first elastic construction (7) and second elastic construction (8) by two screws (6) respectively, and the first adjustment assembly (2) and the 3rd is adjusted assembly (4) and is installed on the side of the 4th elastic construction (10) and the 3rd elastic construction (9) by two screws (6) respectively.
2, high precision two-dimensional rotating and regulating mechanism as claimed in claim 1 is characterized in that, it is identical that the described first adjustment assembly (2), second is adjusted assembly (3), the 3rd adjustment assembly (4), the 4th is adjusted assembly (5) structure.
3, high precision two-dimensional rotating and regulating mechanism as claimed in claim 1 or 2, it is characterized in that, described first adjusts assembly (2), second adjusts assembly (3), the 3rd adjustment assembly (4) and the 4th is adjusted assembly (5) and is made up of a jacking block and an adjustment handwheel respectively, described jacking block is for having threaded hole (13), the derby of first unthreaded hole (14) and second unthreaded hole (15), above-mentioned four adjustment assemblies pass first unthreaded hole (14) by two screws (6) respectively and second unthreaded hole (15) is fixed on the side of base (1) elastic construction, described adjustment handwheel comprises a screw rod (12), and this screw rod (12) is installed in the threaded hole (13) of jacking block.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN200810187609A CN100585454C (en) | 2008-12-29 | 2008-12-29 | High-precision 2-D rotary regulation mechanism |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN200810187609A CN100585454C (en) | 2008-12-29 | 2008-12-29 | High-precision 2-D rotary regulation mechanism |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN101441327A CN101441327A (en) | 2009-05-27 |
| CN100585454C true CN100585454C (en) | 2010-01-27 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN200810187609A Expired - Fee Related CN100585454C (en) | 2008-12-29 | 2008-12-29 | High-precision 2-D rotary regulation mechanism |
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| CN (1) | CN100585454C (en) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101710204B (en) * | 2009-11-13 | 2011-04-20 | 中国科学院光电技术研究所 | Lens eccentricity fine-tuning mechanism in projection photoetching objective lens |
| CN102628980B (en) * | 2012-04-19 | 2013-12-25 | 中国科学院上海光学精密机械研究所 | Reflecting mirror adjusting frame with unmovable rotating center |
| CN102809800A (en) * | 2012-07-26 | 2012-12-05 | 北京国科世纪激光技术有限公司 | Light guiding module for adjusting light path between boxes |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1403849A (en) * | 2001-09-04 | 2003-03-19 | 三星电子株式会社 | Fine orientation adjustment arrangement using for optical instrument |
| WO2006102908A1 (en) * | 2005-02-22 | 2006-10-05 | Hentze-Lissotschenko Patentverwaltungs Gmbh & Co. Kg | Device for receiving, orienting and adjusting an optical component |
| CN1908735A (en) * | 2006-08-11 | 2007-02-07 | 中国科学院上海光学精密机械研究所 | Precision optical adjusting rack |
| CN1991333A (en) * | 2005-12-30 | 2007-07-04 | 财团法人工业技术研究院 | Zero-Abbe error measuring system and its method |
| CN101131830A (en) * | 2006-08-21 | 2008-02-27 | 船井电机株式会社 | Optical pickup device |
-
2008
- 2008-12-29 CN CN200810187609A patent/CN100585454C/en not_active Expired - Fee Related
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1403849A (en) * | 2001-09-04 | 2003-03-19 | 三星电子株式会社 | Fine orientation adjustment arrangement using for optical instrument |
| WO2006102908A1 (en) * | 2005-02-22 | 2006-10-05 | Hentze-Lissotschenko Patentverwaltungs Gmbh & Co. Kg | Device for receiving, orienting and adjusting an optical component |
| CN1991333A (en) * | 2005-12-30 | 2007-07-04 | 财团法人工业技术研究院 | Zero-Abbe error measuring system and its method |
| CN1908735A (en) * | 2006-08-11 | 2007-02-07 | 中国科学院上海光学精密机械研究所 | Precision optical adjusting rack |
| CN101131830A (en) * | 2006-08-21 | 2008-02-27 | 船井电机株式会社 | Optical pickup device |
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| CN101441327A (en) | 2009-05-27 |
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