CN113917642B - Series-parallel coupling multi-degree-of-freedom optical element precision adjusting platform - Google Patents
Series-parallel coupling multi-degree-of-freedom optical element precision adjusting platform Download PDFInfo
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- CN113917642B CN113917642B CN202111114453.3A CN202111114453A CN113917642B CN 113917642 B CN113917642 B CN 113917642B CN 202111114453 A CN202111114453 A CN 202111114453A CN 113917642 B CN113917642 B CN 113917642B
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Abstract
The invention discloses a series-parallel coupling multi-degree-of-freedom optical element precision adjusting platform, which solves the problems that the traditional optical element adjusting platform cannot simultaneously give consideration to multi-degree-of-freedom precision adjustment and the adjusting platform has low complexity and high reliability; the first micro-nano driving component in the first-level adjusting mechanism can drive the optical element to translate along the Z direction and rotate around the X and Y directions, and the second micro-nano driving component in the second-level adjusting mechanism can drive the optical element to translate along the X and Y directions, so that the multi-dimensional high-precision adjustment of the spatial position of the optical element in the optical system is realized, and the performance index of the optical system is improved.
Description
Technical Field
The invention relates to an adjusting platform of an optical element, in particular to a series-parallel coupling multi-degree-of-freedom optical element precise adjusting platform.
Background
The photoelectric measuring system/equipment is an important support in the fields of national defense, scientific exploration, social livelihood and the like, and the performance index of the optical system as the eye of the photoelectric measuring equipment determines the efficiency of the photoelectric measuring system/equipment. The optical system essentially regulates and redistributes the light energy through the precise layout of optical elements with different forms, and the realization of the performance index of the optical system depends on the high-precision (um and nm level) spatial arrangement of the optical elements.
The complication and the motorization of the space non-cooperative target require a relatively larger field of view and higher stability and precision of a visual axis (LOS) of an optical system; the air-to-ground target search requires more efficient large-scale push-broom; public transportation record monitoring requires high resolution imaging, detection of more targets. The realization of the optical correlation performance indexes such as larger visual field, higher scanning efficiency, higher resolution and the like all takes the precise control of the spatial position of the optical element as a realization means.
The continuous progress of science and technology puts forward increasingly high performance index requirements on an optical system, and the traditional optical element adjusting platform cannot meet the requirement of accurate adjustment and control of the current optical element.
The traditional quick reflector can only adjust two-dimensional rotation freedom degree generally, and has no effect on the requirement of focusing action (generally along the translation direction of an optical axis);
a typical scanning mechanism can only realize two-dimensional translation in a plane and cannot adjust the rotation amount;
the mature commercial Stewart six-freedom-degree adjusting table can realize multi-freedom-degree adjustment, but due to the fact that a highly-coupled dynamic model of the adjusting table causes singular characteristics such as dead points and instability, complex and precise kinematic solution needs to be carried out, high requirements are made on a control system, and the system complexity is high.
Disclosure of Invention
In order to solve the problems that the traditional optical element adjusting platform cannot simultaneously give consideration to multi-degree-of-freedom precise adjustment and the adjusting platform is low in complexity and high in reliability, the invention provides a series-parallel coupling multi-degree-of-freedom optical element precise adjusting platform.
The basic implementation principle of the invention is as follows:
the micro-nano linear motor is selected as a driving element, and the compliant unit is used as a supporting and guiding mechanism of the load, so that the multi-dimensional high-precision adjustment of the optical element is realized.
The technical scheme adopted by the invention for solving the technical problems is as follows:
a series-parallel coupling multi-degree-of-freedom optical element precision adjusting platform is characterized in that: comprises a supporting seat, a primary adjusting mechanism and a secondary adjusting mechanism;
the supporting seat is used for mounting the adjusted optical element;
the first-stage adjusting mechanism comprises a first-stage frame and a first micro-nano driving assembly;
the primary framework comprises an upper layer guide sheet, a support column and a lower layer bottom plate; the upper layer guide sheet and the lower layer bottom plate are arranged in parallel and connected through three support columns; a support seat is arranged on the upper layer guide sheet;
the number of the first micro-nano driving assemblies is at least three, the first micro-nano driving assemblies are uniformly arranged on a lower bottom plate of the primary frame, and flexible driving ends of the at least three first micro-nano driving assemblies penetrate through the upper guide sheet and are connected with the supporting seat;
the second-stage adjusting mechanism comprises a second micro-nano driving assembly, a flexible guide rod and a base;
two second micro-nano driving components are arranged and are fixedly arranged on the base, the driving ends of the second micro-nano driving components are connected with the lower bottom plate,
at least three flexible guide rods are uniformly distributed; one end of the flexible guide rod is fixedly connected with the base, and the other end of the flexible guide rod penetrates through the lower bottom plate and is fixedly connected with the side lug of the support column;
under the driving of at least three first micro-nano driving assemblies, the restraint of the upper layer guide sheet and the guiding action of the flexible guide rod, the supporting seat has the freedom degrees of rotation around the X, Y shaft and translation along the Z direction;
under the driving of the two second micro-nano driving components and the action of the flexible guide rod, the supporting seat has the freedom degree of translation along the X, Y axis.
Further, the upper layer guide sheet is integrally processed and formed by adopting slow-moving wires, and the rigidity of the upper layer guide sheet in six directions needs to meet the following conditions:
wherein k isx1，ky1，kz1Respectively representing the translational rigidity of the upper layer guide sheet along X, Y, Z three directions; k is a radical ofRx1，kRy1，kRz1Respectively representing the rotational rigidity of the upper layer guide sheet around X, Y, Z in three directions;
further, the thickness of the upper layer guide sheet is less than 1.5 mm.
Further, the first micro-nano driving assembly comprises a first micro-nano linear motor and a flexible rod; the lower end of the flexible rod is connected with the displacement output end of the first micro-nano linear motor, and the upper end of the flexible rod penetrates through the upper layer guide sheet and then is connected with the supporting seat.
Further, the flexible rod comprises a top part, a deformation part and a fixing part which are sequentially arranged from top to bottom; the top is used for being connected with the supporting seat, the deformation portion is used for providing the displacement amount of Z-direction translation and the rotation amount of rotation around X and Y axes, and the fixing portion is used for being connected with the displacement output end of the micro-nano linear motor.
Further, the length L of the deformation part1And diameter phid1The conditions to be met are as follows:
furthermore, the flexible guide rod comprises a guide section, a deformation section and a fixing section which are sequentially arranged from top to bottom; the guide section with the side ear fixed connection of support column, the deformation section is used for providing the translation displacement volume of X, Y direction, the canned paragraph is used for linking firmly with the base.
Further, the length L of the deformation section2And diameter phid2The conditions to be satisfied are:
further, the second micro-nano driving assembly is a second micro-nano linear motor.
Furthermore, the supporting seat is a triangular structure provided with a hollowed lightening hole, and the optical element to be adjusted is fixed in a gluing mode.
The invention has the beneficial effects that:
1. the invention is based on the upper layer guide sheet and the flexible rod of the first-stage adjusting mechanism, the flexible guide rod of the second-stage adjusting mechanism and the micro-nano linear motor to form a flexible serial-parallel adjusting platform.
2. The first-stage adjusting mechanism and the second-stage adjusting mechanism adopted by the invention basically realize a friction-free configuration, have high action resolution and can realize high-frequency, high-precision and high-resolution action adjustment in an elastic deformation range.
3. Compared with a classic Stewart platform, the two-stage adjusting structure in a series-parallel connection mode is adopted, modeling and driving control are greatly simplified, and the method is particularly suitable for occasions with high index customization degree.
4. The adjusting platform has the advantages of small number of parts, simple and compact structural form, integrated processing and manufacturing, no light blocking effect, convenient assembly and debugging and flexible customization of an interface with an optical element.
5. The invention adopts the micro-nano linear motor as the driving source, can achieve the nano-scale adjustment precision within the millimeter-scale adjustment range, and obviously improves the precision compared with the traditional adjustment modes such as a lead screw with a gap and the like.
Drawings
FIG. 1 is a schematic view of the present invention.
Fig. 2 is a cross-sectional view of fig. 1.
Fig. 3 is an assembled perspective view when the optical element is not mounted.
Fig. 4 is a structural view of a primary frame.
FIG. 5 is a schematic top view of a one-level adjustment structure;
FIG. 6 is a schematic top view of a two-level adjustment structure;
FIG. 7 is a schematic view of a flexible rod.
Fig. 8 is a schematic view of a flexible guide rod.
The reference numbers are as follows:
1-optical element, 2-supporting seat, 3-first-level adjusting mechanism, 4-second-level adjusting mechanism, 5-first-level frame, 6-first micro-nano driving assembly, 7-upper-layer guide sheet, 8-supporting column, 9-lower-layer bottom plate, 10-first micro-nano linear motor, 11-flexible rod, 111-top, 112-deformation part, 113-fixing part, 12-second micro-nano driving assembly, 13-flexible guide rod, 131-guide section, 132-deformation section, 133-fixing section and 14-base.
Detailed Description
In order to make the aforementioned objects, features and advantages of the present invention comprehensible, specific embodiments accompanied with figures are described in detail below, and it is apparent that the described embodiments are a part of the embodiments of the present invention, not all of the embodiments. All other embodiments, which can be obtained by a person skilled in the art without making any creative effort based on the embodiments in the present invention, shall fall within the protection scope of the present invention.
In the following description, numerous specific details are set forth in order to provide a thorough understanding of the present invention, but the present invention may be practiced in other ways than those specifically described and will be readily apparent to those of ordinary skill in the art without departing from the spirit of the present invention, and therefore the present invention is not limited to the specific embodiments disclosed below.
Meanwhile, in the description of the present invention, it should be noted that the terms "upper, lower, inner and outer" and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, and are only for convenience of describing the present invention and simplifying the description, but do not indicate or imply that the referred device or element must have a specific orientation, be constructed in a specific orientation and operate, and thus, cannot be construed as limiting the present invention. Furthermore, the terms first, second, or third are used for descriptive purposes only and are not to be construed as indicating or implying relative importance.
The terms "mounted, connected and connected" in the present invention are to be understood broadly, unless otherwise explicitly specified or limited, for example: can be fixedly connected, detachably connected or integrally connected: they may be mechanically, electrically, or directly connected, or indirectly connected through intervening media, or may be interconnected between two elements. The specific meanings of the above terms in the present invention can be understood in specific cases to those skilled in the art.
The invention provides a series-parallel coupling multi-degree-of-freedom optical element precision adjusting platform which is divided into a primary adjusting mechanism and a secondary adjusting mechanism which are connected in series, wherein the optical element can be driven to translate along the Z direction and rotate around the X direction and the Y direction through a first micro-nano driving assembly in the primary adjusting mechanism, and the optical element can be driven to translate along the X direction and the Y direction through a second micro-nano driving assembly in the secondary adjusting mechanism, so that the multi-dimensional high-precision adjustment of the spatial position of the optical element in an optical system is realized, and the performance index of the optical system is improved.
It should be noted that: in this embodiment, the Z direction is the optical axis direction of the optical element, and the X and Y directions are two directions perpendicular to the optical axis direction;
as shown in fig. 1-3, a series-parallel coupled multi-degree-of-freedom optical element precision adjustment platform has the following specific structure: comprises a supporting seat 2, a primary adjusting mechanism 3 and a secondary adjusting mechanism 4;
the supporting seat 2 is used for mounting the adjusted optical element 1, and forms an adjusting object of the precision adjusting platform together with the optical element 1, a triangular structure with hollowed lightening holes is adopted as a light weight design, and the adjusted optical element is reliably and fixedly connected with the supporting seat by epoxy glue, so that the surface type precision of an optical surface is ensured.
The primary adjusting mechanism 3 comprises a primary frame 5 and a first micro-nano driving assembly 6;
as shown in fig. 4, the primary frame 5 includes upper guide fins 7, support columns 8, and a lower floor 9; the upper layer guide sheet 7 and the lower layer bottom plate 9 are arranged in parallel, and the upper layer guide sheet 7 and the lower layer bottom plate 9 are connected through three support columns 8; the upper layer guide sheet 7 is provided with a supporting seat 2;
in this embodiment, the upper layer guide plate 7 is integrally formed by slow-moving wires, the thickness of the upper layer guide plate 7 is generally less than 1.5mm, and the rigidity of the upper layer guide plate in 6 degrees of freedom meets the following requirements:
wherein k isx1，ky1，kz1Respectively representing the translational rigidity of the upper layer guide sheet along X, Y, Z three directions; k is a radical of formulaRx1，kRy1，kRz1Respectively representing the rotational rigidity of the upper layer guide sheet around X, Y, Z in three directions;
the number of the first micro-nano driving components 6 is three, the first micro-nano driving components are uniformly arranged on a lower bottom plate 9 of the primary framework, and flexible driving ends of the three first micro-nano driving components 6 penetrate through upper guide pieces 7 to be connected with the supporting seat 2;
specifically, as shown in fig. 7, the first micro-nano driving assembly 6 includes a first micro-nano linear motor 10 and a flexible rod 11; the flexible rod 11 comprises a top part 111, a deformation part 112 and a fixing part 113 which are arranged in sequence from top to bottom; the top part 111 is used for being connected with the supporting seat 2, the deformation part 112 is used for providing displacement of Z-direction translation and rotation amount around X and Y axes, the fixing part 113 is used for being connected with the displacement output end of the first micro-nano linear motor 10, and the length L of the deformation part 112 of the flexible rod 111And diameter phid1The conditions to be satisfied are:
because the flexible guide rod has larger flexibility in bending around the X axis and the Y axis and has larger rigidity along the Z-direction pulling and pressing direction, the flexible guide rod releases the freedom degrees of rotation around the X, Y axis and translation around the Z axis in combination with the rigidity characteristic of the upper layer guide sheet 3.
The second-stage adjusting mechanism 4 comprises a second micro-nano driving component 12, a flexible guide rod 13 and a base 14;
two second micro-nano driving assemblies 12 are fixedly arranged on the base 14, and driving ends of the second micro-nano driving assemblies 12 are connected with the lower bottom plate 9; in this embodiment, the second micro-nano driving assembly 12 is a second micro-nano linear motor;
specifically, as shown in FIG. 8, a flexible guideThe number of the direction rods 13 is three, and the direction rods are uniformly distributed; the flexible guide rod 13 comprises a guide section 131, a deformation section 132 and a fixing section 133 which are sequentially arranged from top to bottom; the guide section 131 is fixedly connected with the side ear 81 of the supporting column 8, the deformation section 132 is used for providing X and Y translational displacement, the fixing section 133 is used for fixedly connecting with the base 14, and the length L of the deformation section 132 of the flexible guide rod2And a diameter phid2The conditions to be satisfied are:
the bending section coefficient W and the tension and compression stiffness EA of the flexible guide rod can be described as follows:
due to the greater bending flexibility of the flexible guide bar in the direction X, Y, it releases the translational degree of freedom in the direction X, Y, constraining the remaining degrees of freedom.
Based on the above description of the overall structure and various components of the adjustment platform, the installation and adjustment process of the adjustment platform will now be described:
assembly process
Firstly, fixedly connecting a support seat 2 with an upper layer guide sheet 7 at corresponding positions, respectively connecting three flexible rods 11 with three first micro-nano linear motors 10 to form three first micro-nano driving assemblies 6, installing the three first micro-nano driving assemblies 6 on a lower layer bottom plate 9 and corresponding to three connecting positions on the support seat 2, connecting the support seat 2, the upper layer guide sheet 7 and the three first micro-nano driving assemblies 6, and finally fixedly connecting an optical element 1 on the support seat 2 by using epoxy glue;
then, two second micro-nano linear motors 12 are installed on a base 14, as shown in the right side of fig. 4, 3 flexible guide rods 13 are installed on the base 14 and correspond to the positions of the supporting columns 8, and finally, the 3 flexible guide rods 13 are fixedly connected with the side lugs 81 of the supporting columns 8, so that the series-parallel coupling multi-degree-of-freedom precision adjusting platform is formed.
Application process
The process of the primary adjusting mechanism comprises the following steps:
the 3 first micro-nano linear motors 10 are uniformly distributed on the circumference in a coordinated driving mode, and three freedom degrees of the optical element 1 can be adjusted through combined deformation of the upper layer guide sheet 7 and the flexible rod 11. The process specifically comprises the following steps: referring to fig. 1 and 5, two first micro-nano linear motors 10 (motors a and B in the figure) are driven in the same direction and in the same value, and the other first micro-nano linear motor 10 (motor C in the figure) is driven in the opposite direction, so that the rotation motion around the X axis can be realized; or two first micro-nano linear motors 0 (a motor and a motor C in the figure) are driven in a reverse equivalent mode, and the other first micro-nano linear motor 10 (a motor B in the figure) does not participate in movement, so that the rotation motion around the Y axis can be realized; the three first micro-nano linear motors 10 are driven in the same direction and in an equivalent manner, so that translation along the Z axis can be realized;
the process of the secondary adjusting mechanism comprises the following steps:
through the drive of the second micro-nano linear motor, the two-degree-of-freedom motion of the second-level adjusting mechanism 4 is realized by combining the deformation of the flexible guide rod 13, and the two-degree-of-freedom motion specifically comprises the following steps: referring to fig. 1 and fig. 6, under the drive of one second micro-nano linear motor, the translational adjustment of the first-level adjusting mechanism 3, the supporting seat 2 and the optical element 1 along the X direction can be realized, and under the drive of the other second micro-nano linear motor, the translational adjustment of the first-level adjusting mechanism 3, the supporting seat 2 and the optical element 1 along the Y direction can be realized;
from the above, the first and second adjustment mechanisms of the present invention are all parallel coupled adjustment in the present stage, and are connected in series between the two adjustment mechanisms. The intra-stage coupling motion can be accurately controlled through a decoupling algorithm, and the inter-stage series connection has a one-to-one decoupling relation, so that the control is simple and easy. The series-parallel coupling integrated adjusting table has the advantages that a needed control system is simpler on the premise of ensuring multi-degree-of-freedom accurate adjustment.
Claims (10)
1. A series-parallel coupling multi-degree-of-freedom optical element precision adjusting platform is characterized in that: comprises a supporting seat, a primary adjusting mechanism and a secondary adjusting mechanism;
the supporting seat is used for mounting the adjusted optical element;
the first-stage adjusting mechanism comprises a first-stage frame and a first micro-nano driving assembly;
the first-level frame comprises an upper-layer guide sheet, a support column and a lower-layer bottom plate; the upper layer guide sheet and the lower layer bottom plate are arranged in parallel and connected through three support columns; a support seat is arranged on the upper layer guide sheet;
the number of the first micro-nano driving assemblies is at least three, the first micro-nano driving assemblies are uniformly arranged on a lower bottom plate of the primary frame, and flexible driving ends of the at least three first micro-nano driving assemblies penetrate through the upper guide sheet and are connected with the supporting seat;
the second-stage adjusting mechanism comprises a second micro-nano driving assembly, a flexible guide rod and a base;
two second micro-nano driving components are arranged and are fixedly arranged on the base, the driving ends of the second micro-nano driving components are connected with the lower bottom plate,
at least three flexible guide rods are uniformly distributed; one end of the flexible guide rod is fixedly connected with the base, and the other end of the flexible guide rod penetrates through the lower bottom plate and is fixedly connected with the side lug of the support column;
under the driving of at least three first micro-nano driving assemblies, the restraint of the upper layer guide sheet and the guiding action of the flexible guide rod, the supporting seat has the freedom degrees of rotation around the X, Y shaft and translation along the Z direction;
under the driving of the two second micro-nano driving assemblies and the action of the flexible guide rod, the supporting seat has the freedom degree of translation along an X, Y axis.
2. The series-parallel coupling multi-degree-of-freedom optical element precision adjustment platform according to claim 1, characterized in that: the upper layer guide sheet is integrally processed and formed by slow-speed wire feeding, and the rigidity of the upper layer guide sheet in six directions needs to meet the following conditions:
wherein k isx1，ky1，kz1Respectively representing the translational rigidity of the upper layer guide sheet along X, Y, Z three directions; k is a radical ofRx1，kRy1，kRz1The rotational stiffness of the upper layer guide vane around X, Y, Z is shown.
3. The series-parallel coupling multiple degree of freedom optical element fine adjustment platform according to claim 1 or 2, characterized in that: the thickness of the upper layer guide sheet is less than 1.5 mm.
4. The series-parallel coupling multi-degree-of-freedom optical element precision adjustment platform according to claim 3, characterized in that: the first micro-nano driving assembly comprises a first micro-nano linear motor and a flexible rod; the lower end of the flexible rod is connected with the displacement output end of the first micro-nano linear motor, and the upper end of the flexible rod penetrates through the upper layer guide sheet and then is connected with the supporting seat.
5. The series-parallel coupling multi-degree-of-freedom optical element precision adjustment platform according to claim 4, characterized in that: the flexible rod comprises a top part, a deformation part and a fixing part which are sequentially arranged from top to bottom; the top be used for with the supporting seat is connected, the displacement volume that the deformation portion was used for providing Z to the translation to and around the rotatory amount of rotation of X, Y axle, the fixed part be used for with receive a little level linear electric motor displacement output and be connected.
6. The series-parallel coupling multi-degree-of-freedom optical element precision adjustment platform according to claim 5, characterized in that: length L of the deformation portion1And a diameter phid1The conditions to be satisfied are:
7. the series-parallel coupling multi-degree-of-freedom optical element precision adjustment platform according to claim 1, characterized in that: the flexible guide rod comprises a guide section, a deformation section and a fixing section which are sequentially arranged from top to bottom; the guide section with the side ear fixed connection of support column, the deformation section is used for providing the translation displacement volume of X, Y direction, the canned paragraph is used for linking firmly with the base.
8. The series-parallel coupled multi-degree-of-freedom optical element precision adjustment platform of claim 7, wherein: length L of the deformation section2And diameter phid2The conditions to be satisfied are:
9. the series-parallel coupling multi-degree-of-freedom optical element precision adjustment platform according to claim 1, characterized in that: the second micro-nano driving assembly is a second micro-nano linear motor.
10. The series-parallel coupling multi-degree-of-freedom optical element precision adjustment platform according to claim 1, characterized in that: the supporting seat is of a triangular structure provided with hollowed lightening holes, and the optical element to be adjusted is fixed in a gluing mode.
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