CN208819612U - A kind of high-precision spatial translation mini positioning platform - Google Patents

A kind of high-precision spatial translation mini positioning platform Download PDF

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Publication number
CN208819612U
CN208819612U CN201821833108.9U CN201821833108U CN208819612U CN 208819612 U CN208819612 U CN 208819612U CN 201821833108 U CN201821833108 U CN 201821833108U CN 208819612 U CN208819612 U CN 208819612U
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China
Prior art keywords
passive
pair
connector
rigid connector
flexible
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Expired - Fee Related
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CN201821833108.9U
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Chinese (zh)
Inventor
王保兴
曹毅
林苗
李巍
孟刚
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Jiangnan University
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Jiangnan University
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Abstract

The utility model provides a kind of high-precision spatial translation mini positioning platform, and it is small to can solve existing the concentrations flexibility Positioning platform movement stroke that declines, and is easy to appear stress and concentrates, the low problem of platform positioning accuracy.It includes pedestal, moving platform and three flexible branches, the compliant translational joint of flexible branch includes two groups of flexible strips being arranged symmetrically, it is parallel to each other with two flexible strips in group, two flexible strips in driving pair with group are connected by rigid connector one, first is passive secondary identical with the second passive auxiliary structure, one end of its two groups of flexible strips is commonly connected on rigid connector two, and the other end is commonly connected on rigid connector three;The rigid connector one of driving pair is affixed on the base, and flexible strip and piezoelectric ceramic actuator are connect with the first passive secondary rigid connector two respectively;First passive secondary rigid connector three is connect with the second passive secondary rigid connector two, and the second passive secondary rigid connector three and moving platform is affixed.

Description

A kind of high-precision spatial translation mini positioning platform
Technical field
The utility model relates to compliant mechanism field, specially a kind of high-precision spatial translation mini positioning platform.
Background technique
Compliant mechanism is using the flexible deformation of material come the novel mechanism of passing movement, since the kinematic pair in mechanism is Integrated flexible structure, so the shortcomings that influencing device longevity and precision there is no rigging error, friction, abrasion, gap etc..With The fields such as microelectronics, the micro manufacturing of photoelectron element, MEMS, bioengineering to the further of positioning accuracy request It improves, compliant mechanism is widely used in micro- positioning field and has immeasurable prospect, wherein space translation is micro- Locating platform is widely used in the systems such as the 3-D scanning of atomic force microscope, micro-nano operation, advanced sensing.Currently, tool The new configuration design of big stroke, high-precision and mobile decoupling is the research hotspot of space translation mini positioning platform.
Space translation mini positioning platform, which can be divided into, concentrates that flexibility declines locating platform and distribution flexibility declines locating platform, It is middle concentrate flexibility decline locating platform research it is more, and for distribution flexibility decline locating platform research it is less.Such as patent Number for ZL200620162291.5 utility model patent disclosed in three-translation orthogonal decoupling parallel micromotion platform and the patent No. A kind of mobile complete submissive parallel micromotion platform of space three-dimensional, belongs to collection disclosed in patent of invention for ZL201510228721.2 Middle flexibility declines locating platform, and branch used in the platform is mostly the flexible hinge structure with notch, and major defect is fortune Dynamic stroke is small, and structure is complicated, is easy stress concentration occur in incision, and can not achieve complete solution between each freedom of motion Coupling causes platform positioning accuracy not high.
Summary of the invention
For existing concentration flexibility decline branch used in locating platform mostly be the flexible hinge structure with notch, cause Its movement travel is small, and structure is complicated, is easy stress concentration occur in incision, and can not achieve between each freedom of motion Full decoupling, the technical problem for causing platform positioning accuracy not high, it is micro- fixed that the utility model provides a kind of high-precision spatial translation Bit platform belongs to distribution flexibility and declines locating platform, problem of stress concentration is not present, movement travel is big, and has been able to achieve Full decoupling, positioning accuracy are high.
Its technical solution is such that a kind of high-precision spatial translation mini positioning platform comprising pedestal, moving platform and three A flexibility branch, three flexible orthogonal thereto arrangements of branch, the both ends of the flexibility branch be respectively and fixedly connected to the pedestal and On the moving platform, the piezoelectric ceramic actuator for being respectively used to drive the flexible branch is also equipped on the pedestal, it is special Sign is: the flexibility branch includes three compliant translational joints and respectively driving pair, first are passively secondary and second is passive secondary, institute Stating compliant translational joint includes two groups of flexible strips being arranged symmetrically, parallel to each other with two flexible strips in group, described One end of two flexible strips in driving pair with group is connected by rigid connector one;Described first is passive secondary and described Second passive secondary structure is identical, and one end of flexible strip described in its two groups is commonly connected on rigid connector two, another End is commonly connected on rigid connector three;The driving pair is fixed on the pedestal by the rigid connector one, and The other end and the piezoelectric ceramic actuator of flexible strip described in its two groups respectively with the described first passive secondary rigidity Connector two connects, the described first passive secondary rigid connector three and the described second passive secondary rigid connector Two connections, the described second passive secondary rigid connector three and the moving platform are affixed;The driving pair, first quilt It is dynamic secondary orthogonal with the deformation direction of the flexible strip in the described second passive pair.
It is further characterized by:
The driving pair, the first passive secondary and described second passive pair are integrated machine-shaping.
The rigid connector one is plate-like structure.
The rigid connector two is U-shaped connector, and the rigid connector three is T-connecting piece, the U-shaped connector Both ends be respectively equipped with the flange to extend internally, one end difference of the wherein flexible strip described in one group in the described first passive pair It being connect with the inside bottom surface of the U-shaped connector, one end of flexible strip described in another group is connect with two flanges respectively, The other end of flexible strip described in two groups is connect with the level board of the T-connecting piece, and the vertical plate of the T-connecting piece is stretched The U-shaped connector out.
The other end of flexible strip described in two groups of the driving pair is connected to the described first passive secondary U-shaped In the two side walls of connector, the piezoelectric ceramic actuator is connected to the outer of the described first passive secondary U-shaped connector On the bottom surface of side, the vertical plate of the described first passive secondary T-connecting piece and the described second passive secondary U-shaped connector Outside bottom surface connection, and described second it is passive secondary relative to described first it is passive it is secondary rotate horizontally 90 °, described second is passive secondary The T-connecting piece vertical plate and the moving platform it is affixed.
The piezoelectric ceramic actuator is mounted on the pedestal by mounting bracket, the mounting bracket and the piezoelectricity Ceramic driver is respectively positioned on the outside of the pedestal, and the mounting bracket is fixed on the pedestal, the Piezoelectric Ceramic The fixing end of device is fixed in the mounting bracket, the driving end of the piezoelectric ceramic actuator pass through after the pedestal with it is described First passive secondary connection.
Three flexible branches spatially rotate 90 ° each other.
The beneficial effects of the utility model are:
The space translation mini positioning platform of the utility model, flexible branch is by driving pair, first passive secondary and the second quilt Dynamic secondary composition, each compliant translational joint includes two groups of flexible strips being arranged symmetrically, and two flexible strips in every group are mutual Parallel, driving pair, the first passive pair are orthogonal with the deformation direction of flexible strip in the second passive pair, to constitute distribution Flexibility formula space translation mini positioning platform, the deformation of material can be evenly distributed on entire reed, because concentrating without stress Phenomenon, movement travel is larger, and structure is simple, also, due to flexible strip be arranged symmetrically and it is driving pair, first passive secondary It is orthogonal with the deformation direction of flexible strip in the second passive pair, the parasitic error of kinematic pair is eliminated, thus may be implemented to put down Platform moves full decoupled, is remarkably improved the positioning accuracy of platform.
Detailed description of the invention
Fig. 1 is the overall structure diagram of the utility model;
Fig. 2 is the overall structure diagram (pedestal is not shown) of the utility model;
Fig. 3 is the structural schematic diagram of flexible branch;
Fig. 4 is driving pair and the first passive secondary connection relationship main view.
Appended drawing reference: 1- pedestal;2- moving platform;3- flexibility branch;4- piezoelectric ceramic actuator;5- mounting bracket;6- spiral shell Nail;7- flexible strip;8- rigid connector one;9- rigid connector two;10- rigid connector three;31- driving pair;32- first It is passive secondary;33- second is passive secondary;91- flange.
Specific embodiment
See Fig. 1 to Fig. 4, a kind of high-precision spatial translation mini positioning platform of the utility model comprising pedestal 1 is moved and put down 2, three flexible 3, three piezoelectric ceramic actuators 4 of branch of platform and three mounting brackets 5, as shown in Figure 1, pedestal 1 and moving platform 2 It is made of three orthogonal planes, three flexible branches 3 are orthogonal thereto to be arranged and be located at 1 inside of pedestal, and three mounting brackets 5 are distinguished On the outside of three orthogonal planes of pedestal 1, mounting bracket 5 is fixed on pedestal 1 by screw 6;The both ends of flexible branch 3 point It is not fixed on pedestal 1 and moving platform 2, the fixing end of piezoelectric ceramic actuator 4 is fixed in mounting bracket 5, and driving end is vertical It is connect after pedestal 1 with flexible branch 3;Flexible branch 3 includes three compliant translational joints, three compliant translational joints respectively based on The passive pair 32 of dynamic pair 31, first and the second passive pair 33, compliant translational joint include two groups of flexible strips being arranged symmetrically 7, and same group In two flexible strips 7 it is parallel to each other, in driving pair 31 with group two flexible strips 7 one end pass through rigid connector one 8 connections, the first passive pair 32 is identical with the structure of the second passive pair 33, and one end of its two groups of flexible strips 7 is commonly connected to On rigid connector 29, the other end is commonly connected on rigid connector 3 10;Driving pair 31 is solid by rigid connector 1 It connects on pedestal 1, and the other end of its two groups of flexible strips 7 and piezoelectric ceramic actuator 4 are rigid with the first passive pair 32 respectively Property connector 29 connect, the company of rigid connector 29 of the rigid connector 3 10 of the first passive pair 32 and the second passive pair 33 It connects, the rigid connector 3 10 and moving platform 2 of the second passive pair 33 are affixed;The passive pair 32 and second of driving pair 31, first is passive The deformation direction of flexible strip 7 in pair 33 is orthogonal.The platform of the utility model, the passive pair 32 of driving pair 31, first and the Two passive pairs 33 are integrated machine-shaping, compact-sized, reduce rigging error.
See that Fig. 2 to Fig. 4, rigid connector 1 are plate-like structure, rigid connector 29 is U-shaped connector, is rigidly connected Fitting 3 10 is T-connecting piece, and the both ends of U-shaped connector are respectively equipped with the flange 91 to extend internally, in the first passive pair 32 Wherein one end of one group of flexible strip 7 is connect with the inside bottom surface of U-shaped connector respectively, one end point of another group of flexible strip 7 It is not connect with two flanges 91, the other end of two groups of flexible strips 7 is connect with the level board of T-connecting piece, T-connecting piece Vertical plate stretches out U-shaped connector;The other end of two groups of flexible strips 7 of driving pair 31 is connected to the U of the first passive pair 32 In the two side walls of shape connector, piezoelectric ceramic actuator 4 is connected to the outside bottom surface of the U-shaped connector of the first passive pair 32 On, the vertical plate of the T-connecting piece of the first passive pair 32 is connect with the outside bottom surface of the U-shaped connector of the second passive pair 33, and Second passive pair 33 rotates horizontally 90 ° relative to the first passive pair 32, and the vertical plate of the T-connecting piece of the second passive pair 33 passes through Screw 6 and moving platform 2 are affixed.It is designed in this way, structure is simple, easy for installation convenient for integration processing.
See that Fig. 1, three flexible branches 3 spatially rotate 90 ° each other, be designed in this way, realize platform completely respectively to same Property, no matter how pedestal is put, and can guarantee that moving platform locomitivity on three translation directions is identical.
When work, piezoelectric ceramic actuator 4 drives corresponding flexible branch 3, makes the moving platform connecting with the flexibility branch 3 2 are translatable along the axial of the piezoelectric ceramic actuator 4, and full decoupled between three flexible branches 3, are independent of each other.

Claims (7)

  1. The mini positioning platform 1. a kind of high-precision spatial is translatable comprising the flexible branch of pedestal, moving platform and three, three described soft Property the orthogonal thereto arrangement of branch, it is described flexibility branch both ends be respectively and fixedly connected on the pedestal and the moving platform, the pedestal On be also equipped with the piezoelectric ceramic actuator for being respectively used to drive the flexible branch, it is characterised in that: the flexibility branch packet Three compliant translational joints and respectively driving pair, first passive secondary and the second passive pair are included, the compliant translational joint is including two groups The flexible strip being arranged symmetrically, it is parallel to each other with two flexible strips in group, with two institutes of group in the driving pair The one end for stating flexible strip is connected by rigid connector one;Described first passive secondary and the described second passive secondary structure phase Together, and one end of flexible strip described in its two groups is commonly connected on rigid connector two, and the other end is commonly connected to rigidity and connects On fitting three;The driving pair is fixed on the pedestal by the rigid connector one, and flexible strip described in its two groups The other end and the piezoelectric ceramic actuator connect respectively with the described first passive secondary rigid connector two, described the The one passive secondary rigid connector three is connect with the described second passive secondary rigid connector two, and described second is passive The secondary rigid connector three and the moving platform is affixed;The driving pair, the first passive pair and described second are passively The deformation direction of the flexible strip in pair is orthogonal.
  2. The mini positioning platform 2. a kind of high-precision spatial according to claim 1 is translatable, it is characterised in that: the driving pair, Described first passive secondary and the described second passive pair is integrated machine-shaping.
  3. The mini positioning platform 3. a kind of high-precision spatial according to claim 1 or 2 is translatable, it is characterised in that: the rigidity Connector one is plate-like structure.
  4. The mini positioning platform 4. a kind of high-precision spatial according to claim 1 or 2 is translatable, it is characterised in that: the rigidity Connector two be U-shaped connector, the rigid connector three be T-connecting piece, the both ends of the U-shaped connector be respectively equipped with to The flange of interior extension, one end of the wherein flexible strip described in one group in the described first passive pair respectively with the U-shaped connector Inside bottom surface connection, one end of flexible strip described in another group connect with two flanges respectively, flexibility spring described in two groups The other end of piece is connect with the level board of the T-connecting piece, and the vertical plate of the T-connecting piece stretches out the U-shaped connection Part.
  5. The mini positioning platform 5. a kind of high-precision spatial according to claim 4 is translatable, it is characterised in that: in the driving pair Two groups described in the other end of flexible strip be connected to the two side walls of the U-shaped connector in the described first passive pair On, the piezoelectric ceramic actuator is connected in the outside bottom surface of the U-shaped connector in the described first passive pair, and described the The outside bottom surface of the vertical plate of the T-connecting piece in one passive pair and the U-shaped connector in the described second passive pair Connection, and described second it is passive secondary relative to described first it is passive it is secondary rotate horizontally 90 °, the T in the described second passive pair The vertical plate of shape connector and the moving platform are affixed.
  6. The mini positioning platform 6. a kind of high-precision spatial according to claim 5 is translatable, it is characterised in that: the piezoelectric ceramics Driver is mounted on the pedestal by mounting bracket, and the mounting bracket and the piezoelectric ceramic actuator are respectively positioned on described The outside of pedestal, the mounting bracket are fixed on the pedestal, and the fixing end of the piezoelectric ceramic actuator is fixed in described In mounting bracket, the driving end of the piezoelectric ceramic actuator is connect after passing through the pedestal with the described first passive pair.
  7. The mini positioning platform 7. a kind of high-precision spatial according to claim 1 is translatable, it is characterised in that: three flexibilities Branch spatially rotates 90 ° each other.
CN201821833108.9U 2018-11-08 2018-11-08 A kind of high-precision spatial translation mini positioning platform Expired - Fee Related CN208819612U (en)

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Application Number Priority Date Filing Date Title
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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109256174A (en) * 2018-11-08 2019-01-22 江南大学 High-precision spatial translation mini positioning platform

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109256174A (en) * 2018-11-08 2019-01-22 江南大学 High-precision spatial translation mini positioning platform

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Granted publication date: 20190503

Termination date: 20191108