CN101290808B - 3 freedom degrees ultra-precise micro displacement workbench - Google Patents
3 freedom degrees ultra-precise micro displacement workbench Download PDFInfo
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- CN101290808B CN101290808B CN2008100479453A CN200810047945A CN101290808B CN 101290808 B CN101290808 B CN 101290808B CN 2008100479453 A CN2008100479453 A CN 2008100479453A CN 200810047945 A CN200810047945 A CN 200810047945A CN 101290808 B CN101290808 B CN 101290808B
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Abstract
The invention discloses a three degree of freedom ultraprecise microdrive worktable, wherein the motions of the worktable in X, Y and theta directions are provided by four linear motors vertically arranged on the outer frame and the inner frame of the microdrive worktable; the movers of the linear motors are arranged at the inside of the outer frame, while the stators are arranged at the outside of the inner frame; the vertical support of the outer frame is realized through the four round air bearings arranged at the four corners of the bottom of the outer frame; the vertical support of the inner frame is respectively realized through an annular air bearing and a round vacuum pretightening suction cup; and the position information of the microdrive worktable is measured by a first plane and a second plane vertically arranged on a carrying platform and matched with a laser interferometer. The three degree of freedom ultraprecise microdrive worktable can realize motions of heavy load, great inertia and high precision; the travel of the platform in X and Y directions is 2mm; the angle of rotation of theta is 0.002rad; the positioning precision in X and Y directions reaches to 5nm; and the precision of the angle of rotation is 0.25 mu rad. The microdrive worktable can be used in equipment such as a mask aligner, an ultraprecise numerically controlled machine tool and a biochip scanner and so on.
Description
Technical field
The present invention relates to a kind of precision equipment, be specially a kind of 3 freedom degree ultra-precise micro displacement workbench, this worktable can be applicable to High Definition Systems technical fields such as lithographic equipment, precision machine tool, precision measurement equipment, also can be used for bioengineering equipment.
Background technology
The nanoscale micro displacement workbench provides the article carrying platform of a precision positioning and rapid movement for being engaged in nanometer manufacturing and measurement.Along with the development of ultraprecise in-process measurement equipment such as integrated circuit manufacturing, in continuous increase, the performance to worktable has also proposed very high requirement simultaneously to the demand of nanoscale micro displacement workbench.Have PI, Anord, Feinmess company can make micropositioner on the international market at present, wherein the micropositioner of PI company manufacturing adopts planar motor to drive, and can reach nano-precision, but only can bear the load about 235g; The micropositioner of Anord company manufacturing can long stroke motion, but precision is lower, only can reach micron order; The micropositioner of Feinmess company manufacturing can only carry out short stroke, the fine motion of low precision, all be not suitable for being applied in heavy load, at a high speed, high-precision occasion.
Publication number is CN1921026A, Chinese patent literature on 02 28th, 2007 provided a kind of " X-Y-θ Three Degree Of Freedom micromotion platform " in open day, this product is realized three-degree-of-freedom motion and control by secondary physical construction, use resiliency supported physical construction to realize three-shaft linkage, adopt three linear motor driving, X to the driving force of two motors not on same axis, by resiliency supported X is transmitted inside panel to motion, Y to motion then by being fixed on Y on the platform to motor direct-drive, this platform adopts precise grating sensor feedback position signalling, form the closed loop moving control system, its bearing accuracy only is 150nm.This platform bearing accuracy is lower, and because X need transmit by resiliency supported to motion, has therefore introduced the error of elastic deformation, and this error is difficult to control.
Summary of the invention
The purpose of this invention is to provide a kind of 3 freedom degree ultra-precise micro displacement workbench, this worktable has heavy load, big inertia, little stroke, high-precision characteristics.
A kind of 3 freedom degree ultra-precise micro displacement workbench provided by the invention, it is characterized in that: four symmetrical respectively four jiaos of being installed in the outside framework bottom of circular air-bearing, circular vacuum pretension sucker is embedded in the annular air-bearing, the annular air-bearing is connected with bracing frame, circular vacuum pretension sucker, annular air-bearing and bracing frame are formed the gas foot of band vacuum pretension, this gas foot is installed in the bottom of inner frame with supporting micropositioner inner frame, and the central shaft of gas foot overlaps with the central shaft of inner frame;
Outside framework is the rectangular parallelepiped of hollow, and inner frame is the rectangular parallelepiped that has groove all around that is positioned at outside framework; On the geometric center of four sidewalls that are installed in outside framework inside of first to fourth linear motor stator electric symmetry, first to fourth linear motor rotor symmetry is installed on the geometric center of four sidewalls of inner frame, and first to fourth linear motor stator electric is suspended in respectively in the groove of first to fourth linear motor rotor;
Article carrying platform is installed on the inner frame, first, second level crossing is bonded on the article carrying platform, the material of first, second level crossing is identical with shape, and first level crossing is parallel with a limit of article carrying platform, and the center line of first level crossing and second level crossing is the angle of 90 degree.
The present invention is directed to the bottleneck of the little stroke that runs in the existing ultraprecise motion platform development, high precision, heavy load, a kind of 3 freedom degree ultra-precise micro displacement workbench is provided.The present invention has utilized the characteristics of linear electric motors heavy loads, by coordinating the combination of 4 linear electric motors of control, overcome the shortcoming of linear electric motors low precision, single-degree-of-freedom, has realized the plane motion of heavy load, high precision, 3DOF.The worktable that the present invention proposes adopts single layer structure, utilize laser interferometer to carry out the measurement and the feedback of signal, directly drive by 4 linear electric motors, X and Y to motor on same plane, there is not the transmission of motion, reduced propagation of error, improved the precision of micropositioner, bearing accuracy can reach 5nm.Particularly, the present invention possesses following effect and advantage:
(1) adopts 4 linear electric motors to carry out the planar three freedom motion, overcome the little shortcoming of planar motor load, can be used for heavy load, multivariant workplace;
(2) air supporting supporting construction has guaranteed vertical rigidity much larger than direction of motion, thereby vertical fluctuation is minimum when making platform motion, does not influence the plane motion precision of platform;
(3) linear motor stator electric is fixed on the outside framework, does not participate in the motion of micropositioner, can not increase the movement load of micropositioner;
(4) in motion process, linear motor stator electric is suspended in the groove of mover, does not have direct Mechanical Contact between stator and mover, and therefore not wearing and tearing can not cause kinematic error.
Description of drawings
Fig. 1 is the structural representation of 3 freedom degree ultra-precise micro displacement workbench of the present invention;
Fig. 2 is an A-A cut-open view shown in Figure 1.
Embodiment
Further specify structure of the present invention and principle of work below in conjunction with design example and accompanying drawing.This design can be used as the micropositioner in the ultraprecise positioning equipment, and the stroke of X and Y direction is not more than ± 1mm, and the setting range of angle direction is less than 0.002rad.
As shown in Figure 1, 2, the present invention includes with lower member: outside framework 1, first to fourth linear motor stator electric 2,11,17,19, first to fourth linear motor rotor 3,10,16,18, inner frame 4, first web joint 5, second web joint 9, article carrying platform 6, first level crossing 7, second level crossing 8, air-bearing bracing frame 12, annular air-bearing 13, circular vacuum pretension sucker 14, pedestal 15, first and second circular air-bearing 20, the third and fourth circular air-bearings 21.
Four symmetrical respectively four jiaos of being installed in outside framework 1 bottom of circular air-bearing 20, supporting micropositioner outside framework 1 is suspended on the pedestal 15 outside framework 1.Circular vacuum pretension sucker 14 is embedded in the annular air-bearing 13, annular air-bearing 13 adopts bolt to be connected with bracing frame 12, the gas foot of the band vacuum pretension that the three forms passes the bottom that outside framework 1 is installed in inner frame 4, supporting micropositioner inner frame 4, the central shaft of gas foot overlaps with the central shaft of inner frame 4.Outside framework 1 can link to each other with other ambient systems, also can be fixed on the pedestal.Outside framework is the rectangular parallelepiped of hollow, on the geometric center of four sidewalls that are installed in outside framework 1 inside of first to fourth linear motor stator electric, 2,11,17,19 symmetries, as shown in Figure 2.First to fourth linear motor rotor, 3,10,16,18 symmetries are installed on the geometric center of four outer walls of inner frame 4.First to fourth linear motor stator electric 2,11,17,19 is suspended in respectively in the groove of first to fourth linear motor rotor 3,10,16,18, does not have direct Mechanical Contact between stator and mover.Inner frame 4 links to each other with article carrying platform 6 by first web joint 5, second web joint 9, first web joint 5, second web joint, 9 symmetries be installed in inner frame 4 tops, its line of centres is crossed the center that inner frame 4 is grown limits.First level crossing 7 and second level crossing 8 that are used for laser measurement are bonded in article carrying platform 6, first level crossing 7 and second level crossing, 8 materials and shape are all identical, first level crossing 7 is parallel with the corresponding edge of article carrying platform 6 during installation, and the center line of first level crossing 7 and second level crossing 8 is the angle of 90 degree.
Micropositioner proposed by the invention is directly driven by 4 linear electric motors 2-3,10-11,16-17,18-19, without any middle transmission link, has eliminated machine error, has reduced the control difficulty, realizes precision positioning easily.Under the coordinative role of 4 motor 2-3,10-11,16-17,18-19, realize the planar three freedom motion of micropositioner, detailed process is: drive 2 X and produce required X to motion to linear electric motors 2-3,10-11, drive 2 Y and produce required Y to motion, by the required rotational angle of cooperation generation of 4 motor 2-3,10-11,16-17,18-19 to linear electric motors 16-17,18-19.Under motor-driven, first to fourth linear motor rotor 3,10,16,18 drives article carrying platform 6 and moves together, realizes the fine motion of article carrying platform with respect to outside framework 1 and first to fourth linear motor stator electric 2,11,17,19.Owing to adopted air- flotation system 12,13,14,20 to support, the vertical rigidity of micropositioner is very high, and error vertical when having guaranteed platform motion can not influence kinematic accuracy.Platform is detected, controls and driven by the closed-loop control system of being formed between laser interferometer and the driving mechanism, to realize fast accurately location.
3 freedom degree ultra-precise micro displacement workbench is carrying object, and to carry out the concrete motion process of point-to-point as follows: after the target that host computer provided is determined, X instructs relative X to move to motor stator 17,19 to motor stator 2,11 and Y to electric mover 3,10 with the numerical value that Y provides according to control system to electric mover 16,18, and linear motor rotor 3,10,16,18 drive article carrying platforms 6 move to and need the position; According to the feedback information of laser interferometer, on the system-computed micropositioner physical location of silicon chip and with the error of target location, motor is accepted accurately to locate after the instruction, eliminates error; Closed-loop control system duplicate detection and action reach the requirement of 5nm and 0.25 μ rad until bearing accuracy.
This platform can be used in the biotechnological devices such as ultraprecise numerically-controlled machine, litho machine, precision measurement equipment, biochip point sample instrument and biochip scanner.
Claims (1)
1. 3 freedom degree ultra-precise micro displacement workbench is characterized in that:
Four circular air-bearings (20) symmetry respectively are installed in four jiaos of outside framework (1) bottom, circular vacuum pretension sucker (14) is embedded in the annular air-bearing (13), annular air-bearing (13) is connected with bracing frame (12), circular vacuum pretension sucker (14), annular air-bearing (13) and bracing frame (12) are formed the gas foot of band vacuum pretension, this gas foot is installed in the bottom of inner frame (4) with supporting micropositioner inner frame (4), and the central shaft of gas foot overlaps with the central shaft of inner frame (4);
Outside framework (1) is the rectangular parallelepiped of hollow, and inner frame (4) is for being positioned at the rectangular parallelepiped that has groove all around of outside framework (1); On the geometric center that is installed in four inner sidewalls of outside framework (1) of first to fourth linear motor stator electric (2,11,17,19) symmetry, first to fourth linear motor rotor (3,10,16,18) symmetry is installed on the geometric center of four sidewalls of inner frame (4), and first to fourth linear motor stator electric (2,11,17,19) is suspended in respectively in the groove of first to fourth linear motor rotor (3,10,16,18);
Article carrying platform (6) is installed on the inner frame (4), first, second level crossing (7,8) is bonded on the article carrying platform (6), the material of first, second level crossing (7,8) is identical with shape, first level crossing (7) is parallel with a limit of article carrying platform (6), and the center line of first level crossing (7) and second level crossing (8) is the angle of 90 degree.
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| CN2008100479453A CN101290808B (en) | 2008-06-06 | 2008-06-06 | 3 freedom degrees ultra-precise micro displacement workbench |
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| CN2008100479453A CN101290808B (en) | 2008-06-06 | 2008-06-06 | 3 freedom degrees ultra-precise micro displacement workbench |
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| CN101290808B true CN101290808B (en) | 2010-04-14 |
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Families Citing this family (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101770182B (en) * | 2010-01-22 | 2011-06-22 | 天津大学 | Three-degree of freedom flexible precision positioning workbench |
| CN101963271B (en) * | 2010-09-29 | 2012-06-20 | 上海微电子装备有限公司 | Bracket capable of improving modal performance |
| CN102678748B (en) * | 2011-03-07 | 2014-07-16 | 上海微电子装备有限公司 | Split type air foot |
| CN102736423B (en) * | 2011-04-02 | 2015-08-26 | 上海微电子装备有限公司 | Bearing table, error compensation measurement mechanism and error compensating method |
| CN102756271B (en) * | 2012-07-19 | 2014-10-22 | 清华大学 | Four-freedom-degree precision platform using electromagnetic support |
| CN103790963B (en) * | 2012-11-02 | 2017-02-08 | 上海微电子装备有限公司 | Split air foot and plane guide device |
| CN105157560B (en) * | 2015-05-29 | 2018-02-02 | 山东大学 | A kind of three-freedom degree precision laser detector |
| CN107240423B (en) * | 2017-07-13 | 2022-12-13 | 中国科学院苏州生物医学工程技术研究所 | Three-dimensional nanometer workstation based on flexible hinge |
| CN111082596B (en) * | 2019-12-23 | 2022-04-15 | 安徽机电职业技术学院 | Freedom degree multi-azimuth micropositioner comprising two-freedom degree actuating mechanism |
| CN112319056B (en) * | 2020-09-18 | 2021-12-14 | 季华实验室 | Nozzle adjusting device and adjusting method thereof and ink-jet printing equipment |
| CN112461264B (en) * | 2020-11-20 | 2023-04-11 | 大连理工大学 | Nano manufacturing equipment for quartz hemispherical harmonic oscillator |
| CN112498732B (en) * | 2020-12-15 | 2022-07-12 | 西安飞机工业（集团）有限责任公司 | Multi-degree-of-freedom floating platform for narrow space assembly and assembly method |
| CN117325333B (en) * | 2023-10-07 | 2024-04-23 | 沈阳工业大学 | Dicing equipment for semiconductor wafer |
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