CN103426345B - A kind of experimental provision of compact magnetic levitation worktable - Google Patents
A kind of experimental provision of compact magnetic levitation worktable Download PDFInfo
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- CN103426345B CN103426345B CN201310332512.3A CN201310332512A CN103426345B CN 103426345 B CN103426345 B CN 103426345B CN 201310332512 A CN201310332512 A CN 201310332512A CN 103426345 B CN103426345 B CN 103426345B
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Abstract
An experimental provision for compact magnetic levitation worktable, comprises stationary part and subpart, and described stationary part comprises base and is arranged at the cylindrical stator outer cover on base, and stator outer housing top arranges circular top cover; Described subpart comprises the mover be arranged in stator outer housing, and mover is fixed with support column, and support column is through top cover, and the top of support column arranges objective table; Described top cover is arranged and is used for vertically some first electromagnet of driving and some first current vortex sensors for detecting vertical direction displacement, stator outer housing sidewall is arranged and is used for some second electromagnet of horizontal drive and some second current vortex sensors for the displacement of detection level direction.The present invention is the experimental provision of the magnetic levitation worktable being suitable for precision positioning, the demand meeting Ultra-precision positioning designs, may be used for the location of photo-etching machine silicon chip platform, also may be used for Laser Processing or other need the occasion of micro displacement workbench, be especially suitable for and need vacuum, without friction occasion.
Description
Technical field
The invention belongs to Precision Machining and checkout equipment technical field, be specifically related to a kind of experimental provision of compact magnetic levitation worktable.
Background technology
Precision movement platform is widely used in IC manufacturing, micromachine assembling, biological cell operation, Ultra-precision Turning and measurement and micro-operation etc.But traditional superposing type two-dimensional localization platform cannot break away from its shortcoming in essence: positioning precision is low, response speed is slow, manufacturing cost is high, can not be used for vacuum super-clean environment etc.Replacement scheme common at present has: piezoelectric type precision movement platform, air-flotation type precision movement platform and electromagnetic levitation type precision movement platform.
Piezoelectric type precision movement platform Static stiffness is large, response is fast, and be usually used in hi-Fix scheme, but its range of movement is little, is usually no more than 100 μm, this shortcoming limits the application of locating platform in Long Distances occasion of Piezoelectric Ceramic.Although can by the measure of superposition, such as lever amplification or coarse positioning are in mode expander strokes such as fine positioning combinations, but because superposition measure often effectively cannot solve accurate measurement and positioning point, and the defect such as the dynamic response performance weakening system, the method is still not suitable for using in precision positioning.
Air suspension and in conjunction with linear electric motors drive be another precision positioning mode.This class type of drive supports by air and mover is separated with supporting surface, avoids the impact of friction force.But this kind of platform can not apply to vacuum environment.Add its rigidity low, easily cause the shortcomings such as dither, be therefore difficult to the demand meeting hi-Fix.
Compared with traditional superposing type two-dimensional localization platform, magnetic suspension platform has contactless Direct driver, low friction (without friction), without advantages such as backlasses, and has the application potential quality of vacuum environment, effectively prevent the weakness of piezoelectric type and air suspension.Therefore there is the potential quality of precision positioning.
Summary of the invention
The object of the present invention is to provide a kind of experimental provision of compact magnetic levitation worktable, meet the demand of Ultra-precision positioning, may be used for the location of photo-etching machine silicon chip platform, also may be used for Laser Processing or other need the occasion of micro displacement workbench.
For reaching above object, the present invention takes following technical scheme to be achieved:
The present invention includes stationary part and subpart, described stationary part comprises base and is arranged at the columnar stator outer housing on base, and the top of stator outer housing is provided with circular top cover; Described subpart comprises the mover be arranged in stator outer housing, and mover is fixed with support column, and support column is through top cover, and the top of support column arranges objective table; Described top cover being provided with and driving some first electromagnet of mover and some first current vortex sensors for detecting the displacement of mover vertical direction in the vertical direction, stator outer housing sidewall being provided with some second electromagnet for driving mover to move in the horizontal direction and some second current vortex sensors for detecting the displacement of mover horizontal direction.
Described mover top is hollow structure, and the top of mover is provided with mover cover plate, mover cover plate offers make support column pass mover cover plate to be fixed on through hole bottom mover.
The material of described mover is steel, and the material of objective table and support column is aluminium.
Described first electromagnet is 3, and evenly arranges along the circumference of top cover; Second electromagnet is 3, and circumference is evenly arranged on stator outer housing sidewall.
Described top cover arranges first current vortex sensor between adjacent two the first electromagnet, and adjacent first current vortex sensor becomes 60 degree of settings with the first electromagnet central angle; Between two the second electromagnet adjacent on stator outer housing, second current vortex sensor is set, and adjacent second current vortex sensor becomes 60 degree of settings with the second electromagnet central angle.
Described first electromagnet and the second electromagnet are I shape electromagnet.
Be frustum cone structure bottom described mover, base is provided with the groove matched with frustum cone structure; Base upper surface offers the hole for cabling, and base bottom offers wire lead slot.
In the horizontal direction of mover and and vertical direction on drive all adopt aspiration-type drive.
The xsect of described mover is regular hexagon.
Relative to prior art, the beneficial effect that the present invention has:
The present invention owing to arranging mover in stator outer housing, top cover is arranged some first electromagnet, stator outer housing arranges some second electromagnet, so mover in the vertical direction stable suspersion and the rotation around X, Y-axis can be made, and the motion of X, Y both direction in surface level and the rotation around vertical direction can be realized.Because in motion process zerofriction force therefore kinematic accuracy comparatively mechanical type greatly improve; And owing to driving by electromagnetic force, go for vacuum environment.The present invention is suitable for the test unit of the magnetic levitation worktable of accurately location at a high speed, overcome the shortcoming that traditional leading screw positioning precision is low, also overcome Piezoelectric Driving range of movement in prior art little, and air floating platform high frequency components etc. is not suitable for the shortcoming of Long Distances occasion.Magnetic levitation worktable experimental provision of the present invention is demand for meeting Ultra-precision positioning and designs, may be used for the location of photo-etching machine silicon chip platform, also may be used for Laser Processing or other need the occasion of micro displacement workbench, being especially suitable for needs vacuum, friction free application scenario.
Further, in the present invention, mover adopts top hollow-core construction, mover quality can be reduced on the one hand, on the other hand, through reasonable counterbalance design, make the center of gravity of mover in desirable position, can reducing because horizontal drive is to vertically driving the disturbance caused, realizing magnetic levitation worktable decoupling zero in design.Because the mover and mover top that adopt top hollow-core construction are emptied, so arrange mover cover plate on mover top, mover cover plate is used for the displacement detecting of vertical direction.
In the present invention, the bottom design of mover has frustum cone structure, coordinates the groove at base upper surface center, can realize the mover initial alignment in motion control.
In the present invention, stationary part is arranged on subpart periphery, and level and the driving that suspends all adopt aspiration-type suspension structure, and 3 I shape first electromagnet provide suspending power, and 3 I shape second electromagnet provide horizontal actuator force.Platform courses amount has 6, and controlled volume (degree of freedom) has 6, makes compact conformation of the present invention, irredundant.
In the present invention, stationary part is provided with six current vortex sensors, in six sensors, vertically installs on the cover board for three, measures the suspension attitude of mover; Three levels are arranged on the horizontal shift of stator outer housing being measured mover.In conjunction with the measured value of six sensors, the spatial attitude of objective table can be obtained, and the air gap of each electromagnet, for the closed-loop control of magnetic suspension platform.
In the present invention, drive part is on stationary part, and mover does not need lead-in wire, mover, in motion process, can not be subject to the traction of electric wire, does not have extra disturbance.Therefore mover does not need to consider heat dissipation problem, can not cause the additional disturbance to mover because of lead-in wire simultaneously.
In the present invention, the first electromagnet, the second electromagnet and first sensor, the second sensor all adopt 120 degree of matrix arrangement, but the first current vortex sensor and the first electromagnet, layout angle between the second current vortex sensor and the second electromagnet are 60 degree, effectively prevent because electromagnet magnetic field is on the impact of sensor accuracy class.
Accompanying drawing explanation
Fig. 1 is the structural representation of magnetic levitation worktable experimental provision of the present invention;
Fig. 2 is the vertical view after removing objective table and top cover in Fig. 1;
Fig. 3 is the structural representation of base and subpart in Fig. 1;
Fig. 4 is the cut-open view along A-A line in Fig. 3;
Fig. 5 is the enlarged drawing of encircled portion in Fig. 4;
Fig. 6 is the upward view of the base in Fig. 1;
Fig. 7 is the vertical view of the base in Fig. 1.
Wherein: 1, stator outer housing; 2, the first electromagnet; 3, support column; 4, objective table; 5, the first eddy current displacement sensor; 6, top cover; 7, the first nut; 8, the second current vortex sensor; 9, mover; 10, the second electromagnet; 11, mover cover plate; 12, base; 13, the second nut; 14, the first pin; 15, the second pin.
Embodiment
Below in conjunction with accompanying drawing, the present invention is elaborated.
See figure 1 ?2, the present invention includes stationary part and subpart, the columnar stator outer housing 1 that described stationary part comprises base 12 and is arranged on base 12, the top of stator outer housing 1 is provided with circular top cover 6; Described subpart comprises mover 9, mover 9 is arranged in stator outer housing 1, mover 9 adopts top hollow structure, and the hollow hexagonal structure that mover 9 processes for steel (namely mover 9 top being emptied), objective table 4 and support column 3 adopt aluminum profile extrusion to form, such one side can reduce mover quality, on the other hand, through reasonable counterbalance design, make the center of gravity of mover 9 in desirable position, can reducing because horizontal drive is to vertically driving the disturbance caused, realizing magnetic suspension platform decoupling zero in design.Because mover 9 top is emptied, so arrange mover cover plate 11 at mover 9 top, detected the displacement of mover 9 vertical direction by mover cover plate 11.
See figure 3 ?5, mover 9 is fixed with support column 3, the through hole that support column 3 is offered through top cap central and stator cover plate 11(and vertical direction current vortex sensor detection faces) on the through hole offered, be fixed on the bottom surface of mover 9 by the second pin 15, and the top of support column 3 arranges objective table 4, objective table 4 is fixed on support column 3 by the first pin 14.
See Fig. 1, on described top cover 6, circumference evenly arranges 3 and drives I shape first electromagnet 2, first electromagnet 2 of mover 9 to overcome the suspension that mover gravity realizes mover 9 vertical direction in the vertical direction; Described top cover 6 is also arranged 3 for detecting mover 9 vertical direction displacement and the first current vortex sensor 5 around transverse axis X, Y-axis corner, first current vortex sensor 5 is vertically arranged on top cover 6, and the first current vortex sensor 5 becomes 60 degree to arrange with the central angle of the first electromagnet 2; On stator outer housing 1 sidewall, circumference evenly arranges 3 I shape second electromagnet 10 for horizontal drive, second electromagnet 10 is fixed on stator outer housing 1 by the second nut 13, stator outer housing 1 sidewall is also arranged 3 for detecting the second current vortex sensor 8 of mover 9 horizontal shift, second current vortex sensor 8 is horizontally fixed on stator outer housing 1 by the first nut 7, and the second current vortex sensor 8 becomes 60 degree of settings with the central angle of the second electromagnet 10.Stator outer housing 1 except playing protective action, also for fixing horizontal drive I type second electromagnet 10 and the second current vortex sensor 8.
See Fig. 5, be frustum cone structure bottom mover 9, base 12 is provided with the groove matched with frustum cone structure, and the recessed circumferential on base 12 is inclined-plane, can realize the mover initial alignment in motion control; With reference to Fig. 6-7, base 12 for carry the matrix of each web member, and is designed with the lead channels of sensor and electromagnet.The upper surface of base 12 has various for cabling and the hole that is connected and fixed, and base 12 bottom offers wire lead slot, for walking lead-in wire.
The present invention mainly completes the control of motion to mover and position, finally realizes the motion control of object on objective table.The course of work is as follows: first, and produce attractive force by controller to 3 the first electromagnet 2 power supplies, mover 9 suspends, and through the position of vertical sensor 5 feedback, makes mover 9 be suspended to appointment vertical position, and is in steady state (SS); Then, 3 the second electromagnet 10 are powered, and fed back by the position of horizon sensor 8, make mover 9 move to specified level position.
According to the function of experimental provision each several part, experimental provision of the present invention is divided into suspension drive part and horizontal driving section:
Suspension drive part: the present invention adopts aspiration-type suspension structure, the suspension action of mover is (material of mover cover plate 11 is iron) that completed by the interaction of the first electromagnet 2 and mover cover plate 11, first electromagnet 2 is arranged on top cover 6 and maintains static, just right with mover 9 upper surface, electromagnetic force is produced after first electromagnet 2 is energized, mover 9 is attracted to move upward, the position of mover 9 is fed back to controller by three the first eddy current displacement sensors 5 vertically installed, controller regulates the input voltage of the first electromagnet 2 according to feedback signal, finally make stator 9 stable suspersion.
Horizontal driving section: the horizontal drive of mover 9 passes through the attractive force of surrounding three the second electromagnet 10 generations to mover 9 sidewall generation effect.After mover 9 is suspending stabilized, make it produce magnetic field to the second electromagnet 10 for control voltage, the attractive force produced by the second electromagnet 10 pairs of mover 9 sidewalls drives mover tangential movement.The position of mover 9 is fed back to controller by the second current vortex sensor 8 of three level installations, and controller, according to feedback information regulation output voltage, makes mover 9 move to preposition.
In the present invention mover in the horizontal direction and and vertical direction on drive all adopt aspiration-type drive.
With reference to Fig. 2, the first eddy current displacement sensor 5 adopted in the present invention and the second current vortex sensor 8 are eddy current displacement sensor.Uniform three the first eddy current displacement sensors 5 in top cover 6 centre position, measure the displacement of mover at vertical direction, be separated by 120 degree between adjacent two the first eddy current displacement sensors 5, the collimation of mover and surface level can be detected, grasp the suspension attitude of mover completely.Second current vortex sensor of horizontal direction adopts 120 degree, interval mode horizontally disposed, for detecting mover displacement in the horizontal direction equally.The xsect of mover 9 is regular hexagon, and the first electromagnet 2 is on top cover 6 and mover 9 relative set, can drive the suspension of mover 9 in the vertical direction.
Claims (6)
1. the experimental provision of a compact magnetic levitation worktable, it is characterized in that, comprise stationary part and subpart, described stationary part comprises base (12) and is arranged at the columnar stator outer housing (1) on base (12), and the top of stator outer housing (1) is provided with circular top cover (6); Described subpart comprises the mover (9) be arranged in stator outer housing (1), mover (9) is fixed with support column (3), support column (3) is through top cover (6), and the top of support column (3) arranges objective table (4); Described top cover (6) being provided with and driving some first electromagnet (2) of mover (9) and some first current vortex sensors (5) for detecting mover (9) vertical direction displacement in the vertical direction, stator outer housing (1) sidewall being provided with some second electromagnet (10) for driving mover (9) to move in the horizontal direction and some second current vortex sensors (8) for detecting mover (9) horizontal direction displacement;
Described mover (9) top is hollow structure, the top of mover (9) is provided with mover cover plate (11), mover cover plate (11) offers and makes support column (3) be fixed on the through hole of mover (9) bottom through mover cover plate (11);
Described first electromagnet (2) is 3, and evenly arranges along the circumference of top cover (6); Second electromagnet (10) is 3, and circumference is evenly arranged on stator outer housing (1) sidewall;
In the horizontal direction of mover (9) and and vertical direction on drive all adopt aspiration-type drive.
2. the experimental provision of a kind of compact magnetic levitation worktable according to claim 1, is characterized in that, the material of described mover (9) is steel, and the material of objective table (4) and support column (3) is aluminium.
3. the experimental provision of a kind of compact magnetic levitation worktable according to claim 1, it is characterized in that, between upper adjacent two the first electromagnet (2) of described top cover (6), first current vortex sensor (5) is set, and adjacent first current vortex sensor (5) becomes 60 degree of settings with the first electromagnet (2) central angle; Between upper two adjacent the second electromagnet (10) of stator outer housing (1), second current vortex sensor (8) is set, and adjacent second current vortex sensor (8) becomes 60 degree of settings with the second electromagnet (10) central angle.
4. the experimental provision of a kind of compact magnetic levitation worktable according to claim 1 or 3, is characterized in that, described first electromagnet (2) and the second electromagnet (10) are I shape electromagnet.
5. the experimental provision of a kind of compact magnetic levitation worktable according to claim 1, is characterized in that, described mover (9) bottom is frustum cone structure, and base (12) is provided with the groove matched with frustum cone structure; Base (12) upper surface offers the hole for cabling, and base (12) bottom offers wire lead slot.
6. the experimental provision of a kind of compact magnetic levitation worktable according to claim 1, is characterized in that, the xsect of described mover (9) is regular hexagon.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
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| CN201310332512.3A CN103426345B (en) | 2013-08-01 | 2013-08-01 | A kind of experimental provision of compact magnetic levitation worktable |
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| CN201310332512.3A CN103426345B (en) | 2013-08-01 | 2013-08-01 | A kind of experimental provision of compact magnetic levitation worktable |
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| CN103426345A CN103426345A (en) | 2013-12-04 |
| CN103426345B true CN103426345B (en) | 2016-03-30 |
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Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN109341569A (en) * | 2018-08-31 | 2019-02-15 | 先临三维科技股份有限公司 | Objective table and artificial tooth spatial digitizer |
| CN110542439B (en) * | 2019-10-16 | 2022-10-14 | 哈尔滨工业大学 | Inertial device residual moment measuring device and method based on three-dimensional air flotation |
| CN111732320A (en) * | 2020-07-10 | 2020-10-02 | 王莉红 | Sludge drying treatment system |
| CN112630708B (en) * | 2020-12-15 | 2022-09-23 | 中车株洲电机有限公司 | Electromagnet eddy current test device and method |
| CN113029235B (en) * | 2021-02-25 | 2021-09-10 | 哈尔滨工业大学 | Small-stroke nanoscale motion platform and heat-related hysteresis data measuring method |
| CN115263989B (en) * | 2022-07-27 | 2024-04-16 | 重庆交通大学 | Damping-adjustable eddy current damper |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| US5565665A (en) * | 1994-12-20 | 1996-10-15 | Biglari; Haik | Magnetic suspension seismometer |
| US6750625B2 (en) * | 2001-08-15 | 2004-06-15 | Nikon Corporation | Wafer stage with magnetic bearings |
| CN100444023C (en) * | 2004-10-14 | 2008-12-17 | 中国科学院电工研究所 | Accurate magnetic suspension worktable for photo etching under extra ultraviolet |
| CN101834550B (en) * | 2010-04-27 | 2012-01-04 | 西安交通大学 | Positioning device based on maglev planar motor |
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