CN101520606B - Non-contact long-stroke multi-degree-of-freedom nanometer precision working table - Google Patents
Non-contact long-stroke multi-degree-of-freedom nanometer precision working table Download PDFInfo
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- CN101520606B CN101520606B CN2008100172040A CN200810017204A CN101520606B CN 101520606 B CN101520606 B CN 101520606B CN 2008100172040 A CN2008100172040 A CN 2008100172040A CN 200810017204 A CN200810017204 A CN 200810017204A CN 101520606 B CN101520606 B CN 101520606B
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Abstract
The invention discloses a nanometer precision working table of long stroke supported mixedly by electromagnetic drivers and a static pressure air thrust bearing, wherein the static pressure air thrustbearing is realized through the adoption of one air flotation block; and four independent electromagnetic drivers and four displacement sensors are adopted. Through coordinate conversion, decoupled c losed-loop control is carried out on the vertical displacement and the postures of the working table; four independent coils are adopted to be mounted on an iron core integrally processed with the working table on the supporting surface of the working table, which constitutes four independent electromagnetic drivers and realizes the single-stage long-stroke multi-degree-of-freedom working table. The working table has the advantages of simple and compact structure, non-coupling of a control system, inhibiting effect for measurement noise, no need of vacuum preloading, stable open loop of the electromagnetic drivers and inhibiting the vibration noise of the static pressure air thrust bearing; furthermore, the precision and control performance of the working table are higher than those of thestatic pressure air thrust bearing working table; and the thermal stability and the working stability of the working table are higher than those of a magnetic suspension working table.
Description
Technical field
The present invention relates to a kind of precision stage, particularly a kind of non-contact long-stroke multi-degree-of-freedom nanometer precision working table that adopts electromagnetic driver to carry out closed loop ACTIVE CONTROL and static pressure air thrust bearing mixing bearing.
Background technology
In recent years, semiconductor process techniques constantly develops, the large scale integrated circuit live width only has tens nanometer at present, simultaneously in order to improve process efficiency, the size of brilliant unit constantly increases, reach 12 inches-16 inches at present, therefore in the semiconductor machining exposure sources, required corresponding long-stroke multi-degree-of-freedom nanometer precision working table.This worktable not only will be fixed on preposition exactly with brilliant unit, and will implement small adjustment to the upright position and the attitude of brilliant unit, and calibration and motion control precision further improve, and working environment is harsh more.Long-stroke multi-degree-of-freedom nanometer precision working table also is widely used in ultraprecise processing and measures, as LCD processing technique equipment and optical lens processing, and nanometer control system such as atomic force microscope and optical devices calibration system etc.In a word, big stroke multi-degree-of-freedom nanometer precision working table is a gordian technique of semiconducter process equipment, ultraprecise processing and measurement and Mirae Nano Technologies Co., Ltd.'s development.
Coulomb friction is the major obstacle that realizes nanometer precision working table, often adopts the thick smart the two poles of the earth mode of motion or the noncontact mode of contact, avoids or greatly reduces static friction.Thick smart the two poles of the earth mode of motion is by there being the thick motion of static friction (comprising turning motor driving, feed screw nut transmission and guide rail) to realize big stroke motion, and superposeing one does not have the requirement that static friction electrostriction ceramics (PZT) reaches the motion control precision again.The transient state process of two drivers of thick smart the two poles of the earth mode has limited the total closed-loop bandwidth of system, and this mode complex structure, demarcates difficulty, the manufacturing cost height.Static pressure air suspension or magnetic are floating to be two kinds of technology that realize the contactless platform, because not contact, coulomb friction is very little, has perhaps avoided coulomb friction fully, can realize nanometer precision working table.What at first be applied to nanometer precision working table is the static pressure air guide rail, realizes long stroke nanometer precision motion.Thick quiet the two poles of the earth mode of motion and static pressure air guide rail can only be realized single shaft translation worktable, the diaxon worktable is made of two orthogonal single shaft translation systems, volume is big, the complex structure heaviness, a plurality of moving-members have increased moving mass and system inertia, for processing, assembling and demarcation very high accuracy requirement are arranged.
In order to overcome above problem, existing static pressure air thrust bearing and the magnetic levitation technology researched and proposed, this dual mode can realize that single-stage is single moving mass, long stroke and multivariant nanometer precision working table.Static pressure air thrust bearing does not need closed-loop control, 3 degree of freedom of worktable attitude and vertical direction are passive, depend on the design and the processing of bearing, plane 3 axial length stroke nanometer precision stage (H.Shinno are realized by 3 axial plane motor-driven in 3 on plane, H.Hashizume, H.Yoshioka, and et.al.X-Y-θ nano-positinoing table system for a mother machine.Annals of the CIRP .vol.53 (1), pp.337-340,2004.).The magnetic levitation worktable utilizes magnetic levitation technology and plane Driving technique (Carter FM, Galburt DN, Roux S.Magnetically levitated and driven reticlemaskingblade stage mechanism having six degrees freedom of motion.US Patent6,906,789; 2005., Li Lichuan, the magnetic suspension precision work stage of integrated circuit (IC) etching equipment, Chinese invention patent 200310108549,2003), realize the long stroke nanometer precision stage of 6DOF, comprise 3 on 3 of worktable attitude and vertical direction and plane.Compare with magnetic levitation technology, static pressure air thrust bearing worktable does not need closed-loop control, and is simple in structure, stable performance, and passive device does not generate heat, and analyzes and the designing technique maturation, and low cost of manufacture has had suitable commercial Application.Its major defect is 1) worktable attitude angle and vertical direction displacement be uncontrollable, and the supporting precision depends on the design and the processing of bearing; 2) rigidity and the bearing capacity of use negative pressure of vacuum preload adjustment pressure-feed air bearing; 3) gases at high pressure of generation static pressure air film make worktable generation autovibration to the white noise disturbance of worktable, have the principle mechanical vibration noise, have limited the further raising of Motion Resolution rate.For the advantages of ACTIVE CONTROL and static pressure air suspension is got up, electromagnetism static pressure air mixed precision bearing has been proposed, by electromagnetic driver pressure-feed air bearing is carried out closed-loop control, realized high rotating accuracy (Halem Khanfir, Mare Bonis, PhilippeRevel.Improving waviness in ultra precision turning by optimizing the dynamicbehavior of a spindle with magnetic bearings.International Journal of MachineTools﹠amp; Manufacture, 2005 (45): 841-848).Korea S science and technology SQ Lee of academy (KAIST) and DG Gweon have proposed the triangle precision stage (A new 3-DOFZ-tilts micropositioning system using electromagnetic actuators and air bearings.Precision Engineering 24 (2000) 24-31.) of 3 mixing bearings of a kind of employing, each mixing bearing is an incorporate electromagnetic driver and static pressure air thrust bearing, its carrying plane is circular, in the center of circle displacement transducer has been installed, around the center of circle 4 electromagnetic drivers have been installed evenly, each electromagnetic driver is made of a cover iron core and coil, has processed 4 throttle orifices at the center of each electromagnetic driver and has constituted static pressure air thrust bearings.Displacement transducer testing platform perpendicular displacement by each mixing bearing is also carried out closed-loop control, realizes vertical displacement of stage and 3 closed-loop controls of attitude.The major defect of this worktable is: 1) realize vertical and 3 closed-loop controls of attitude of worktable by 3 mixing bearing perpendicular displacements of control, controlled dynamics is coupled to build to touch with controller synthesis and analysis to system and brings difficulty, influences the dynamic property and the motion control precision of worktable.2) in order to obtain the symmetry of load and dynamic characteristic, the worktable shape can only be equilateral triangle, and often requires worktable to be shaped as the rectangle or the square of symmetry in using.3) incorporate electromagnetic driver and static pressure air thrust bearing mixing bearing complex structure, design, analysis, processing and installation difficulty.4) each mixing bearing has 1 displacement transducer and 4 electromagnetic drivers of evenly installing around displacement transducer, needing 4 electromagnetic driver equivalences during closed-loop control is that an electromagnetic driver on the center of circle is controlled, and this equivalence requires very high to electromagnetic driver electromagnetic parameter consistance and installation accuracy.These drawbacks limit the precision and the practical application of this worktable.
Summary of the invention
The objective of the invention is to overcome the shortcoming of above-mentioned prior art, a kind of active electromagnetic driver and static pressure air thrust bearing mixing bearing non-contact long-stroke multi-degree-of-freedom nanometer precision working table are provided, worktable is rectangle, contain square or circle, adopt 4 independent electromagnetic drivers and 1 static pressure air thrust bearing air supporting piece, worktable is detected by 4 displacement transducers in the displacement and the attitude of vertical direction, carries out closed-loop control.
Technical scheme of the present invention is achieved in that
The present invention includes Workbench base, the worktable moving part that matches with Workbench base is fixed with displacement transducer at worktable moving part lower surface, also is fixed with coil at worktable moving part lower surface, and displacement transducer and coil are alternately evenly arranged.Worktable moving part lower surface center fixation has the air supporting piece.The input of displacement transducer output electric signal has the control computer of analog quantity/digital quantity conversion (A/D) and digital quantity/analog quantity conversion (D/A), control computer output electric signal power input amplifier, and power amplifier output electric signal is to coil.Wherein, 4 independently coil alternately be installed on the carrying plane (face relative) of worktable moving part with 4 displacement transducer symmetries with Workbench base, the air supporting piece be installed in the one side the center.When pressure-air when snorkel feeds the air supporting piece by pipe adapter, air film of formation is suspended on the Workbench base worktable moving part between Workbench base and air supporting piece.The relative distance of 4 displacement transducer output services platform moving parts and pedestal by the coordinate transform corresponding with the displacement transducer installation site, is converted to the Displacement Feedback of 3 of vertical displacement of stage and attitudes.The control output of 3 axles is converted to the voltage or the electric current of 4 electromagnetic driver coils by the coordinate transform corresponding with the coil installation site, delivers to coil after the power amplification, realizes the closed-loop control of 3 of vertical displacement of stage and attitudes.Workbench base and worktable moving part all use ferromagnetic material.
The present invention is by electromagnetic driver closed-loop control and static pressure air thrust bearing, can be to the big stroke vertical displacement of stage of single-stage (single moving mass) and 3 axle closed-loop controls of attitude, little, the open loop stabilization of electromagnetic driver heating, worktable control accuracy resolution improves, dynamic characteristic and good stability do not need vacuum preload.
The present invention has the advantage of static pressure air thrust bearing and magnetic levitation worktable simultaneously, principal feature is as follows: 1) use electromagnetic driver that closed-loop control is carried out in displacement of bearing vertical direction and 3 of attitudes, to the stroke of 3 of table plane without limits, if adopt the plane Driving technique, can realize the long stroke nanometer precision stage of the single moving mass 6DOF of single-stage, the moving-member quality is little, and is simple in structure; 2) 6 performances of worktable of the present invention all depend on the performance of servo-drive system, have consistent motion control performance, and improve along with the raising of servo-drive system performance; 3) electromagnetic force preload, the rigidity of pressure-feed air bearing and bearing capacity etc. are adjustable, needing no vacuum preload negative pressure; 4) the electromagnetic driver ACTIVE CONTROL can suppress the mechanical vibration noise of static pressure air thrust bearing, further improves the Motion Resolution rate.5) owing to used static pressure air thrust bearing, electromagnetic driver open loop stabilization (magnetic levitation worktable open-loop unstable), so the worktable bearing capacity is big, it is little to generate heat, good stability.
Description of drawings
Fig. 1 is theory diagram of the present invention and coordinate definition figure, and wherein, Fig. 1 (a) is a theory diagram of the present invention; Fig. 1 (b) is coordinate definition figure of the present invention.
Fig. 2 is the synoptic diagram of worktable moving part 2 carrying planes of the present invention.
Specific embodiment
Accompanying drawing is specific embodiments of the invention, below in conjunction with accompanying drawing content of the present invention is described in further detail:
With reference to shown in Figure 1, the worktable moving part 2 that the present invention includes Workbench base 1 and match with Workbench base 1, be fixed with displacement transducer 3,4,5,6 at worktable moving part 2 lower surfaces, also be fixed with coil 7,8,9,10 at worktable moving part 2 lower surfaces, displacement transducer 3,4,5,6 and coil 7,8 are alternately evenly arranged.Worktable moving part 2 lower surface center fixation have air supporting piece 11. Displacement transducer 3,4,5,6 output electric signal inputs have the control computer 12 of analog quantity/digital quantity conversion (A/D) and digital quantity/analog quantity conversion (D/A), control computer 12 output electric signal power input amplifiers 13, power amplifier 13 output electric signal are to coil 4,5,6,7.
Principle of work of the present invention is: worktable moving part 2 externally compressed air gas source is given under the situation of air supporting piece 11 air feed, be suspended on the Workbench base 1, the relative distance of displacement transducer 3,4,5,6 surveying work stylobate seats 1 and moving part 2, displacement transducer 3,4,5,6 output translation displacement z
1, z
2, z
3, z
4Access Control computing machine 12 carries out the A/D conversion, and calculates worktable translation displacement z and angular displacement alpha by coordinate conversion I, β, and controller calculates controlled quentity controlled variable voltage or electric current c according to current displacement
z, c
α, c
β, add preload force voltage or electric current C
0, obtain the controlled quentity controlled variable of coil 7,8,9,10 through coordinate conversion II, after the D/A conversion,, carry out controlled quentity controlled variable voltage or electric current c after the power amplification by control computer 12 access power amplifiers 13
1, c
2, c
3, c
4Switch-on coil 7,8,9,10, to worktable moving part 2 vertical translation displacement z and attitude angular displacement alpha, β carries out closed-loop control, has realized the electromagnetic driver and the static pressure air thrust bearing mixing bearing of worktable moving part 2.
By displacement transducer 3,4,5,6 output translation displacement z
1, z
2, z
3, z
4The translation displacement z and the angular displacement alpha of evaluation work platform moving part 2, the coordinate conversion I of β is:
z＝(z
1+z
2+z
3+z
4)/4
α＝(z
1-z
3)/2b
β＝(z
2-z
4)/2a
By controlled quentity controlled variable voltage or electric current c
z, c
α, c
βCalculate coil 8,9,10 controlled quentity controlled variable voltages or electric current c
1, c
2, c
3, c
4Coordinate conversion II be:
c
1＝c
z+c
α-c
β-C
0/4
c
2＝c
z+c
α+c
β-C
0/4
c
3＝c
z-c
α+c
β-C
0/4
c
4＝c
z-c
α-c
β-C
0/4
2a is the centre distance of coil 9,10 among Fig. 1 (b) in the following formula, and 2b is the centre distance of coil 7,8 among Fig. 1 (b).
With reference to shown in Figure 2,, processed the blind hole 14,15,16,17 of 4 installation position displacement sensors 3,4,5,6 from the lower surface of worktable moving part 2.After displacement transducer 3,4,5,6 was fixedly finished, the lower surface of its end face and worktable moving part 2 at grade.
From the lower surface of worktable moving part 2,4 annular blind holes 14,15,16,17 that coil 7,8,9,10 is installed have been processed, middle cylinder the 18,19,20, the 21st, the iron core of coil 7,8,9,10.Iron core on coil 7,8,9,10 and the worktable moving part 2 constitutes 4 independently electromagnetic drivers, and the electromagnetic driver working gas gap is the distance of cylinder end face unshakable in one's determination to worktable moving part 2 bottom surfaces.Unshakable in one's determination and the worktable moving part 2 integrated processing of electromagnetic driver, material adopts electrical pure iron DT4, and the working gas gap span is at 0.2mm-0.4mm, make the installation site precision height of electromagnetic driver, consistency of performance is good, and power output is big, rapid dynamic response speed, power consumption is little.After coil 7,8,9,10 was fixedly finished, its end face did not exceed the lower surface of worktable moving part 2.Coil and iron core also can adopt the square-section.
The central authorities of worktable moving part 2 lower surfaces are cavitys 22, at cavity 22 centers air supporting piece 11 have been installed, and after fixedly finishing, the lower surface of its bearing surface and worktable moving part 2 at grade.Processed vent port 23,24,25,26 around the worktable moving part 2 worktable moving part 2 outsides and cavity 22 are communicated, the gas of cavity 22 central gas floating blocks 11 has been discharged.In the specific embodiment, 2 vent ports that diameter is 8mm have been processed on two long limits.If do not process vent port, the gas that air supporting piece 11 is discharged will further form air film between anchor ring outside worktable moving part 2 cavitys and Workbench base 1 upper surface, produce the permanent load of static pressure buoyancy, the power consumption of electromagnetic driver and heating are increased as electromagnetic driver.Static pressure air thrust bearing also can adopt round section air supporting piece.
The present invention is for worktable translation displacement z and angular displacement alpha, and the β axle adopts 4 independent electromagnetic drivers to carry out ACTIVE CONTROL by coordinate conversion.4 independent electromagnetic drivers are the minimum number that obtain symmetrical bearing performance.4 electromagnetic drivers of the present invention are coil 7,8,9,10 and the iron core of processing on worktable moving part 2, and simple and compact for structure, the error of introducing in the coordinate transformation calculations is little, is easy to installation and processing.
The magnetic field concentration of electromagnetic driver of the present invention is around Workbench base 1 and corresponding zone of coil and worktable moving part 2 coils 3,4,5,6,7, electromagnetic coupled between the electromagnetic driver can be ignored, and electromagnetic driver can be ignored with the disturbing magnetic field that the external space produces at Workbench base 1 and worktable moving part 2.
The present invention adopts 1 independently air supporting piece 11 formation static pressure air thrust bearing.Static pressure air thrust bearing designing and calculating complexity, processing difficulties.If processing static pressure air thrust bearing on the carrying plane of worktable moving part 2 then needs to carry out specialized designs at worktable moving part 2 and calculates and process, use 11 of air supporting pieces to avoid this problem.1 independently air supporting piece 11 be installed in the center of worktable moving part 2 carrying planes, guaranteed the symmetry of bearing performance.
The present invention adopts the distance of 4 displacement transducers, 3,4,5,6 testing platform moving parts 2 and Workbench base 1, be converted to worktable translation displacement z and angular displacement alpha by coordinate conversion, β axle current location, displacement transducer 3,4,5,6 and coil 7,8,9,10 even arranged alternate, guarantee mechanical symmetry, helped suppressing measuring error.
Electromagnetic driver and static pressure air thrust bearing mixing bearing worktable that the present invention realizes, table plane is a rectangle, square or circular complete plane, simple and compact for structure, worktable translation displacement z and angular displacement alpha, β axle ACTIVE CONTROL, control system does not have coupling, do not need vacuum preload, the electromagnetic driver open loop stabilization has suppressed static pressure air thrust bearing vibration noise, and performances such as precision increase.
Claims (5)
1. non-contact long-stroke multi-degree-of-freedom nanometer precision working table, comprise Workbench base (1) and the worktable moving part (2) that matches with Workbench base (1), it is characterized in that, be fixed with displacement transducer (3 at worktable moving part (2) lower surface, 4,5,6), also be fixed with coil (7 at worktable moving part (2) lower surface, 8,9,10), worktable moving part (2) lower surface center fixation has air supporting piece (11), said displacement transducer (3,4,5,6) and coil (7,8,9,10) alternately evenly arrange, said coil (7,8,9,10) and the iron core of processing on worktable moving part (2), constitute 4 independently electromagnetic drivers respectively, said air supporting piece (11) constitutes 1 static pressure air thrust bearing.
2. according to right 1 said nanometer precision working table, it is characterized in that, the end face of said displacement transducer (3,4,5,6) and the lower surface of worktable moving part (2) at grade, worktable moving part (2) upper surface is a complete planar working table plane.
3. according to right 1 said nanometer precision working table, it is characterized in that said Workbench base (1) and worktable moving part (2) adopt permeability magnetic material.
4. according to the said nanometer precision working table of claim 1, it is characterized in that, processed 4 from the lower surface of worktable moving part (2) coil (7 has been installed, 8,9,10) annular blind hole, middle cylinder (18,19,20,21) be coil (7,8,9,10) iron core, coil (7,8,9,10) fixedly finish after, its end face does not exceed the lower surface of worktable moving part (2), coil (7,8,9,10) and the iron core on the worktable moving part (2) constitute 4 independently electromagnetic drivers, the electromagnetic driver working gas gap is the distance of cylinder end face unshakable in one's determination to worktable moving part (2) bottom surface, and span is at 0.2mm-0.4mm.
5. according to the said nanometer precision working table of claim 1, it is characterized in that, the central authorities of worktable moving part (2) lower surface are cavitys (22), at the center of cavity (22) air supporting piece (11) has been installed, after fixedly finishing, the lower surface of its bearing surface and worktable moving part (2) has been processed vent port (23,24,25,26) worktable moving part (2) outside and cavity (22) is communicated at grade around the worktable moving part (2).
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Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101916113B (en) * | 2010-07-23 | 2012-08-15 | 江苏大学 | Automotive body gesture decoupling control method based on active suspension evaluation indicator |
| CN102723842B (en) * | 2012-07-09 | 2014-01-22 | 哈尔滨工业大学 | Multi-freedom and long travel magnetic suspension working bench |
| CN105003537B (en) * | 2015-07-14 | 2017-09-01 | 广东省自动化研究所 | The method and system suppressed based on gas suspension vibration signal |
| CN107214530B (en) * | 2017-07-28 | 2024-04-19 | 广东工业大学 | Ultra-precise air floatation positioning platform |
| CN112636636A (en) * | 2020-12-15 | 2021-04-09 | 南通速图科技有限公司 | Measurement and control system of large-scale corner electromagnetic suspension micro-mirror |
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| US5874820A (en) * | 1995-04-04 | 1999-02-23 | Nikon Corporation | Window frame-guided stage mechanism |
| CN2568620Y (en) * | 2002-08-08 | 2003-08-27 | 财团法人工业技术研究院 | Single layer multi-freedom gas static pressure nano positioning platform |
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| CN101158815A (en) * | 2007-08-31 | 2008-04-09 | 上海微电子装备有限公司 | Air-float magnetic controlled precision movement platform |
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2008
- 2008-01-02 CN CN2008100172040A patent/CN101520606B/en not_active Expired - Fee Related
Patent Citations (4)
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| US5874820A (en) * | 1995-04-04 | 1999-02-23 | Nikon Corporation | Window frame-guided stage mechanism |
| CN2568620Y (en) * | 2002-08-08 | 2003-08-27 | 财团法人工业技术研究院 | Single layer multi-freedom gas static pressure nano positioning platform |
| CN101075098A (en) * | 2007-04-27 | 2007-11-21 | 清华大学 | Ultrathin triple-freedom inching work table |
| CN101158815A (en) * | 2007-08-31 | 2008-04-09 | 上海微电子装备有限公司 | Air-float magnetic controlled precision movement platform |
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