CN103032514B - Zero-stiffness vibration isolator for double-layered aerostatic orthogonal decoupling and sliding knuckle bearing angular decoupling - Google Patents
Zero-stiffness vibration isolator for double-layered aerostatic orthogonal decoupling and sliding knuckle bearing angular decoupling Download PDFInfo
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Abstract
A zero-stiffness vibration isolator for double-layered aerostatic orthogonal decoupling and sliding knuckle bearing angular decoupling belongs to the technical field of precision vibration isolation. A sleeve and an aerostatic plate of a vibration isolator body are lubricated and supported by an aerostatic surface in between, the aerostatic plate and a lower mounting plate of the vibration isolator body are lubricated and supported by an aerostatic surface in between, a piston barrel and the sleeve of the vibration isolator body are lubricated and supported by an aerostatic surface in between, the degree of freedom of horizontal linear motion between the upper mounting plate and the lower mounting plate is decoupled by two layers of orthogonal aerostatic slideways, the degree of freedom of angular motion between the upper mounting plate and the lower mounting plate is decoupled by a sliding knuckle bearing, and voice coil motors, displacement sensors, limit switches, a controller and a driver are formed into a closed-loop feedback position control system, which can accurately control the relative position between the upper mounting plate and the lower mounting plate. The zero-stiffness vibration isolator has the characteristics of three-dimensional zero stiffness, high positioning precision and decoupling of the degree of freedom of linear motion and the degree of freedom of angular motion, and can effectively solve the problem of high-performance vibration isolation in ultra-precision measuring instruments and machining equipment, particularly in step scanning lithographic machines.
Description
Technical field
The invention belongs to accurate vibration isolation technical field, relate generally to the zero stiffness vibration isolator of a kind of double-deck air supporting crossing decoupling and the decoupling zero of arthrodia bearing angle.
Background technique
Along with improving constantly of ultraprecise processing and measuring accuracy, ambient vibration becomes the key factor that restriction ultraprecise process unit and surveying instrument precision and performance improve.Especially the vlsi circuit process unit that step-by-step scanning photo-etching device is representative, technology-intensive degree and complexity are high, key technical index has all reached the limit of prior art, represented the highest level of ultraprecise process unit, ultraprecise vibration isolation becomes the core key technology in this type of equipment; The live width of step-by-step scanning photo-etching device has reached 22nm and following, silicon chip positioning precision and alignment precision all reach several nanometers, and more than work stage movement velocity reaches 1m/s, work stage acceleration reaches tens times of gravity accleration, this has proposed new challenge to existing vibration isolation technique.First, lithography machine need to provide for metering system and photoetched object lens the working environment of " super quiet ", simultaneously again demand motive work stage at full speed with High acceleration motion, this anti-vibration performance to vibrating isolation system has proposed extremely harsh requirement, and the natural frequency of its three directions all needs to reach below 1Hz; Secondly, relative position between the each parts of lithography machine, the distance of for example photoetched object lens and silicon chip surface, all there is very strict requirement, and under the control in position closed loop feedback control system, require the relative positional accuracy between the upper and lower mounting plate of vibration isolator to reach 10 μ m magnitudes, the positioning precision of traditional vibration isolator can not meet the demands far away.
According to theory of vibration isolation, the natural frequency of passive type vibration isolator is directly proportional to rigidity, is inversely proportional to load quality, therefore under the certain prerequisite of load quality, the rigidity that reduces vibration isolator is the effective way that reduces natural frequency, improves low frequency and superlow frequency vibration isolating performance.There are the intrinsic contradictions of static bearing capacity and rigidity in the vibration isolator of the forms such as conventional air spring, restricted by the factor such as material behavior, structural rigidity, further reduce its rigidity, especially level very difficult to rigidity.For this problem, researcher is incorporated into " pendulum " formula structure in air cushion shock absorber, reaches object (the 1.Nikon Corporation.Vibration Isolator With Low Lateral Stiffness. U.S. Patent Publication No.: US20040065517A1 that reduces vibration isolator horizontal rigidity; 2.U.S.Philips Corporation.Positioning Device with a Force Actuator System for Compensating Center-of-gravity Displacements, and Lithographic Device Provided with Such A Positioning Device. U.S. Patent number: US005844664A).The method can reduce the horizontal rigidity of air cushion shock absorber to a certain extent, promotes its low frequency vibration isolation performance.The problem that the method exists is: restricted by material behavior and structural rigidity, vibration isolator is vertical limited to the amplitude of stiffness degradation with level; 2) the vertical and level of air cushion shock absorber is all very poor to positioning precision, cannot meet the requirement of photoetching process; 3) will reach lower horizontal rigidity needs larger pendulum length, causes vibration isolator height excessive, string membrane resonance easily occurs, poor stability.
By visible to the analysis of existing air cushion shock absorber technological scheme, existing air cushion shock absorber is difficult to meet the requirement of lithography machine to ultralow rigidity and high position precision.IDE company of Germany has proposed a kind of vibration isolator technological scheme (1.Integrated Dynamics Engineering GmbH.Isolatorgeometrie Eines Schwingungsisolationssystem. european patent number: EP1803965A2 of abandoning tradition rubber air spring; 2.Integrated Dynamics Engineering GmbH.Schwingungsisolationssystem Mit Pneumatischem Tiefpassfilter. european patent number: EP1803970A2; 3.Integrated Dynamics Engineering GmbH.Air Bearing with Consideration of High-Frequency Resonances. U.S. Patent Publication No.: US20080193061A1).This scheme adopts vertically carries out decoupling zero and vibration isolation to air bearing surface to the vibration of all directions with level, can reach extremely low rigidity and natural frequency.The problem that this scheme exists is: 1) in public technology scheme, vibration isolator cannot be realized accurate location; 2) in patent EP1803965A2, do not have the angular motion degrees of freedom around horizontal rotational shaft between upper and lower mounting plate, the angular rigidity of this direction and natural frequency are all very high; Patent EP1803970A2 and US20080193061A1 adopt block rubber to provide the angular motion degrees of freedom around horizontal rotational shaft for upper and lower mounting plate, but because block rubber angular rigidity is very large, cannot effectively carry out angular motion freedom decoupling, between angular motion freedom decoupling mechanism part, there is frictional force and introduce additional stiffness, restriction anti-vibration performance.
ASML company of Holland has also proposed similar vibration isolator technological scheme (1.U.S.Philips Corp, ASM Lithography B.V.Pneumatic Support Device with A Controlled Gas Supply, and Lithographic Device Provided with Such A Support Device. U.S. Patent number: US006144442A; 2.Koninklijke Philips Electronics N.V., ASM Lithography B.V.Lithographic Pneumatic Support Device with Controlled Gas Supply. International Patent Publication No.: WO99/22272; 3.ASML Netherlands B.V.Support Device, Lithographic Apparatus, and Device Manufacturing Method Employing A Supporting Device, and A Position Control System Arranged for Use in A Supporting Device. U.S. Patent number: US007084956B2; 4.ASML Netherlands B.V.Support Device, Lithographic Apparatus, and Device Manufacturing Method Employing A Supporting Device and A Position Control System Arranged for Use in A Supporting Device. european patent number: EP1486825A1).In patent US006144442A and WO99/22272, bleed pressure is carried out to closed-loop feedback control, reach and improve the stability of vibration isolator and the object of performance; In patent US007084956B2 and EP1486825A1, on upper mounting plate, be provided with vibration transducer, introduce with reference to vibration system simultaneously, promote the anti-vibration performance of vibration isolator by control algorithm.But the technological scheme that proposes still do not solve the accurate location of vibration isolator and the angular motion freedom decoupling problem of upper and lower mounting plate.
Summary of the invention
The object of the invention is for ultra precise measurement instrument and process unit, especially the vlsi circuit process unit such as step-by-step scanning photo-etching device is to the low natural frequency of vibration isolator, the an urgent demand of high position precision, the zero stiffness vibration isolator of a kind of double-deck air supporting crossing decoupling and the decoupling zero of arthrodia bearing angle is provided, vibration isolator all has approximate zero rigidity and extremely low natural frequency in three-dimensional, on, between lower installation board, can carry out accurately location and 3 d-line freedom of movement, angular motion freedom decoupling, thereby effectively solve ultra precise measurement instrument and process unit, especially the accurate vibration isolation problem in step-by-step scanning photo-etching device.
Technical solution of the present invention is:
The zero stiffness vibration isolator of a kind of double-deck air supporting crossing decoupling and the decoupling zero of arthrodia bearing angle, by upper mounting plate, lower installation board, clean compressed gas source, tracheae and vibration isolator main body composition, vibration isolator main body is arranged between upper mounting plate and lower installation board, clean compressed gas source is communicated with vibration isolator main body by tracheae, in the structure of described vibration isolator main body, the lower surface of sleeve and air supporting plate be lubricated and support by axial carrying plane air bearing surface, piston cylinder back-off is arranged in sleeve, and lubricate and support by radially carrying cylinder air bearing surface with sleeve, arthrodia bearing is arranged between piston cylinder and upper mounting plate, X is rigidly connected to lower surface and the air supporting plate of air-float guide rail, sleeve and X lubricate and guiding by X direction guiding rail air bearing surface to air-float guide rail, lower surface and the lower installation board of Y-direction air-float guide rail are rigidly connected, air supporting plate and lower installation board be lubricated and support by Z-direction bearing air-float face, air supporting plate and Y-direction air-float guide rail be lubricated and guiding by Y-direction guide rail air bearing surface, Z-direction voice coil motor, Z-direction displacement transducer and Z-direction limit switch are arranged between piston cylinder and sleeve, X is to voice coil motor, X is to displacement transducer, X is arranged between sleeve and air supporting plate to limit switch, Y-direction voice coil motor, Y-direction displacement transducer, Y-direction limit switch is arranged between air supporting plate and lower installation board, the driving force direction of Z-direction voice coil motor is vertical direction, X to the driving force direction of voice coil motor and Y-direction voice coil motor in horizontal plane and mutually vertical, X, Y, Z-direction displacement transducer and X, Y, line of action direction and the X of Z-direction limit switch, Y, the driving force direction of Z-direction voice coil motor is consistent, X, Y, Z-direction displacement transducer and X, Y, Z-direction limit switch are connected with the signal input part of controller respectively, and the signal output part of controller is connected with the signal input part of driver, and the signal output part of driver is connected with X, Y, Z-direction voice coil motor respectively.
In described piston cylinder, be provided with gas pressure sensor, piston cylinder is provided with suction port and solenoid valve, gas pressure sensor is connected with the signal input part of controller, and the signal output part of controller is connected with the signal input part of driver, and the signal output part of driver is connected with solenoid valve.
Described X, Y, Z-direction voice coil motor are cylinder type voice coil motor or plate voice coil motor.
Described X is single rail structure or two guide rail structure to air-float guide rail and Y-direction air-float guide rail.
Described X, Y, Z-direction displacement transducer are grating scale, magnetic railings ruler, appearance grid chi or linear potentiometer.
Described X, Y, Z-direction limit switch are mechanical type limit switch, Hall-type limit switch or photoelectric limit switch.
In described piston cylinder, gas pressure is 0.1MPa～0.8MPa.
Described axial carrying plane air bearing surface, the air-film thickness that radially carries cylinder air bearing surface, X direction guiding rail air bearing surface, Y-direction guide rail air bearing surface and Z-direction bearing air-float face are 10 μ m～20 μ m.
The diameter of the plane air bearing surface throttle orifice on cylinder air bearing surface throttle orifice and sleeve on described piston cylinder is φ 0.1mm～φ 1mm.
The good result of technological innovation of the present invention and generation is:
(1) the present invention has abandoned the vibration isolator technological scheme of tradition based on elastic element/mechanism, adopt axial carrying plane air bearing surface, radially carry cylinder air bearing surface respectively to level to carrying out decoupling zero and vibration isolation with vertical vibration, air bearing surface is without friction, rigidity is approximately zero, can make vibration isolator obtain approximate zero stiffness characteristic and outstanding superlow frequency vibration isolating performance, having solved prior art limited by structural rigidity, material behavior, rigidity is difficult to further reduction, the problem that rigidity and stability can not be taken into account.This is that the present invention is different from one of innovative point of prior art.
(2) the present invention adopts displacement transducer, limit switch, controller, driver and voice coil motor etc. to form the position closed loop feedback control system of vertical direction and substantially horizontal, relative position between upper and lower mounting plate is accurately controlled, positioning precision can reach 10 μ m levels and more than, the problem that can effectively solve that prior art scheme positioning precision is low, positioning precision and rigidity, anti-vibration performance can not be taken into account.This is two of the present invention's innovative point of being different from prior art.
(3) the present invention adopts Orthogonal Double-layer air-float guide rail and arthrodia bearing to carry out decoupling zero to the straight line motion degrees of freedom between the upper and lower mounting plate of vibration isolator and angular motion degrees of freedom, air-float guide rail is without friction and wear, it is less that arthrodia bearing is introduced additional angular rigidity, there is very large bearing capacity simultaneously, the technological scheme that can effectively solve the decoupling zero of existing employing elastomer introduce additional stiffness excessive, seriously restrict the problem such as natural frequency and low frequency vibration isolation performance.This is three of the present invention's innovative point of being different from prior art.
(4) the present invention adopts gas pressure sensor, solenoid valve and controller, driver etc. to form pressure closed loop feedback control system, the gas pressure of accurately controlling in sleeve makes it to keep constant, the thrust load of vibration isolator is carried out to gravitational equilibrium and compensation, radially carrying under the effect of cylinder air bearing surface, the piston cylinder of carry load gravity can freely slide up and down with zero stiffness along sleeve, thus the gravitational equilibrium of realizing ideal and zero stiffness vibration isolating effect.This is four of the present invention's innovative point of being different from prior art.
(5) the present invention adopts active actuators to carry out ACTIVE CONTROL to the relative position between upper and lower mounting plate, vibration isolator parameter can be according to being changed adjusting in real time by vibration isolation features of the object and working environment, thereby adapt to different operating modes, there is good flexibility, adaptability and stability.This is five of the present invention's innovative point of being different from prior art.
Brief description of the drawings
Fig. 1 is the structural representation of removing the zero stiffness vibration isolator of double-deck air supporting crossing decoupling after upper mounting plate and the decoupling zero of arthrodia bearing angle;
Fig. 2 is the cross-sectional view of the zero stiffness vibration isolator of double-deck air supporting crossing decoupling and the decoupling zero of arthrodia bearing angle;
Fig. 3 is axial carrying plane air bearing surface, radially carry the schematic diagram of cylinder air bearing surface and X direction guiding rail air bearing surface;
Fig. 4 is the schematic diagram of Y-direction guide rail air bearing surface and Z-direction bearing air-float face;
Fig. 5 is tube-in-tube structure schematic diagram;
Fig. 6 is the structural representation of arthrodia bearing;
Fig. 7 is the control structure block diagram of the zero stiffness vibration isolator of double-deck air supporting crossing decoupling and the decoupling zero of arthrodia bearing angle;
Fig. 8 is the schematic diagram of plane air bearing surface throttle orifice on sleeve;
Fig. 9 is the schematic diagram of cylinder air bearing surface throttle orifice on piston cylinder.
Piece number explanation in figure: 1 upper mounting plate, 2 lower installation boards, 3 clean compressed gas sources, 4 vibration isolator main bodys, 5 piston cylinders, 6 sleeves, 7 arthrodia bearings, 7a bearing support, 7b bearing support, 8X is to voice coil motor, 8a X is to motor iron yoke, 8b X is to magnetic steel of motor, 8c X is to motor coil skeleton, 8d X is to motor coil, 9Y is to voice coil motor, 10Z is to voice coil motor, 10a Z-direction motor iron yoke, 10b Z-direction magnetic steel of motor, 10c Z-direction motor coil skeleton, 10d Z-direction motor coil, 10e Z-direction motor transitional part, 11X is to displacement transducer, 11a X is to grating reading head transition piece, 11b X is to grating reading head, 11c X is to glass raster chi, 12Y is to displacement transducer, 13Z is to displacement transducer, 13a Z-direction grating reading head transition piece, 13b Z-direction grating reading head, 13c Z-direction glass raster chi, 14X is to limit switch, 14a X is to limiting stopper, 14b X is to Hall switch, 14c X is to limit switch transition piece, 14d X is to limiting stopper transition piece, 15Y is to limit switch, 16Z is to limit switch, 16a Z-direction limiting stopper, 16b Z-direction Hall switch, 16c Z-direction limit switch transition piece, 17 gas pressure sensors, 18 solenoid valves, 19 controllers, 20 drivers, 21 axial carrying plane air bearing surface, 22 radially carry cylinder air bearing surface, 23 suction ports, 24 plane air bearing surface throttle orifices, 25 cylinder air bearing surface throttle orifices, 26 tracheaes, 29X is to air-float guide rail, 30Y is to air-float guide rail, 31X direction guiding rail air bearing surface, 32Y direction guiding rail air bearing surface, 33Z is to bearing air-float face, 34 air supporting plates.
Embodiment
Provide specific embodiments of the invention below in conjunction with accompanying drawing.
The zero stiffness vibration isolator of a kind of double-deck air supporting crossing decoupling and the decoupling zero of arthrodia bearing angle, by upper mounting plate 1, lower installation board 2, clean compressed gas source 3, tracheae 26 and vibration isolator main body 4 form, vibration isolator main body 4 is arranged between upper mounting plate 1 and lower installation board 2, clean compressed gas source 3 is communicated with vibration isolator main body 4 by tracheae 26, in the structure of described vibration isolator main body 4, the lower surface of sleeve 6 and air supporting plate 34 be lubricated and support by axial carrying plane air bearing surface 21, piston cylinder 5 back-offs are arranged in sleeve 6, and lubricate and support by radially carrying cylinder air bearing surface 22 with sleeve 6, arthrodia bearing 7 is arranged between piston cylinder 5 and upper mounting plate 1, X is rigidly connected to lower surface and the air supporting plate 34 of air-float guide rail 29, sleeve 6 lubricates and guiding by X direction guiding rail air bearing surface 31 to air-float guide rail 29 with X, the lower surface of Y-direction air-float guide rail 30 and lower installation board 2 are rigidly connected, air supporting plate 33 and lower installation board 2 lubricated and support by Z-direction bearing air-float face 33, air supporting plate 34 lubricates and guiding by Y-direction guide rail air bearing surface 32 with Y-direction air-float guide rail 30, Z-direction voice coil motor 10, Z-direction displacement transducer 13 and Z-direction limit switch 16 are arranged between piston cylinder 5 and sleeve 6, X is to voice coil motor 8, X is to displacement transducer 11, X is arranged between sleeve 6 and air supporting plate 34 to limit switch 14, Y-direction voice coil motor 9, Y-direction displacement transducer 12, Y-direction limit switch 15 is arranged between air supporting plate 34 and lower installation board 2, the driving force direction of Z-direction voice coil motor 10 is vertical direction, X to the driving force direction of voice coil motor 8 and Y-direction voice coil motor 9 in horizontal plane and mutually vertical, X, Y, Z-direction displacement transducer 11, 12, 13 and X, Y, Z-direction limit switch 14, 15, 16 line of action direction and X, Y, Z-direction voice coil motor 8, 9, 10 driving force direction is consistent, X, Y, Z-direction displacement transducer 11,12,13 and X, Y, Z-direction limit switch 14,15,16 are connected with the signal input part of controller 19 respectively, the signal output part of controller 19 is connected with the signal input part of driver 20, and the signal output part of driver 20 is connected with X, Y, Z-direction voice coil motor 8,9,10 respectively.
The displacement of X, Y, Z-direction displacement transducer 11,12,13 couples of X, Y, 8,9,10 outputs of Z-direction voice coil motor is measured, and the stroke of X, Y, Z-direction limit switch 14,15,16 couples of X, Y, 8,9,10 motions of Z-direction voice coil motor limits; Controller 19 is according to the feedback signal of X, Y, Z-direction displacement transducer 11,12,13 and X, Y, Z-direction limit switch 14,15,16, and the relative position of controlling between X, Y, 8,9,10 pairs of upper and lower mounting plates 1,2 of Z-direction voice coil motor is accurately controlled.
In described piston cylinder 5, be provided with gas pressure sensor 17, piston cylinder 5 is provided with suction port 23 and solenoid valve 18, gas pressure sensor 17 is connected with the signal input part of controller 19, the signal output part of controller 19 is connected with the signal input part of driver 20, and the signal output part of driver 20 is connected with solenoid valve 18.
Described X, Y, Z-direction voice coil motor 8,9,10 are cylinder type voice coil motor or plate voice coil motor.
Described X is single rail structure or two guide rail structure to air-float guide rail 29 and Y-direction air-float guide rail 30.
Described X, Y, Z-direction displacement transducer 11,12,13 are grating scale, magnetic railings ruler, appearance grid chi or linear potentiometer.
Described X, Y, Z-direction limit switch 14,15,16 are mechanical type limit switch, Hall-type limit switch or photoelectric limit switch.
The interior gas pressure of described piston cylinder 5 is 0.1MPa～0.8MPa.
Described axial carrying plane air bearing surface 21, the air-film thickness that radially carries cylinder air bearing surface 22, X direction guiding rail air bearing surface 31, Y-direction guide rail air bearing surface 32 and Z-direction bearing air-float face 33 are 10 μ m～20 μ m.
The diameter of the plane air bearing surface throttle orifice 24 on cylinder air bearing surface throttle orifice 25 and sleeve 6 on described piston cylinder 5 is φ 0.1mm～φ 1mm.
Provide one embodiment of the present of invention below in conjunction with Fig. 1～Fig. 5, Fig. 7.In the present embodiment, in vibration isolator when work,, lower installation board 2 is arranged on the pedestal or basic framework of ground, instrument, upper mounting plate 1 be connected by the load of vibration isolation.X, Y, Z-direction voice coil motor 8,9,10 all adopt cylinder type voice coil motor.Taking X to voice coil motor 8 as example, it mainly comprises that X is to motor iron yoke 8a, X to magnetic steel of motor 8b, X to motor coil skeleton 8c, X to motor coil 8d.X is cylindrical shape to motor iron yoke 8a and X to motor coil skeleton 8c, and X is cylindrical to magnetic steel of motor 8b, and X is around in X on motor coil skeleton 8c to motor coil 8d.X forms the stator of motor to magnetic steel of motor 8b to motor iron yoke 8a and X, X forms the mover of motor to motor coil 8d to motor coil skeleton 8c and X.In Z-direction voice coil motor 10, Z-direction motor transitional part 10e provides the mounting structure of Z-direction motor coil skeleton 10c.When machine operation, in coil, pass to electric current, according to electromagnetic theory, hot-wire coil can be subject to the effect of voice coil loudspeaker voice coil power in magnetic field, can control the size and Orientation of motor output drive strength by controlling the size and Orientation of electric current.
X, Y, Z-direction displacement transducer 11,12,13 adopt grating scale.Taking Z-direction displacement transducer 13 as example, it mainly comprises the parts such as Z-direction grating reading head transition piece 13a, Z-direction grating reading head 13b and Z-direction glass raster chi 13c, and Z-direction grating reading head transition piece 13a provides the mounting structure of Z-direction grating reading head 13b.In grating scale when work,, Z-direction grating reading head 13b can detect the relative displacement of itself and Z-direction glass raster chi 13c, and gives controller 19 by signal conductor.
X, Y, Z-direction limit switch 14,15,16 adopt Hall-type limit switch.Taking Z-direction limit switch 16 as example, it mainly comprises the parts such as Z-direction limiting stopper 16a, Z-direction Hall switch 16b and Z-direction limit switch transition piece 16c.Two Z-direction Hall switch 16b install back-to-back, and two Z-direction limiting stopper 16a are metallic material, with relative installation of sensitivity end of Z-direction Hall switch 16b.Z-direction limit switch transition piece 16c provides the mounting structure of Z-direction Hall switch 16b.When limit switch work, in the time that Z-direction Hall switch 16b approaches Z-direction limiting stopper 16a, Z-direction Hall switch 16b provides limit signal, and gives controller 19 by signal conductor.
In the present embodiment, Z-direction voice coil motor 10, Z-direction displacement transducer 13 and Z-direction limit switch 16 are arranged between piston cylinder 5 and sleeve 6, and are installed in piston cylinder 5 inside.
Vibration isolator is realized in the following way to the carrying of load: clean compressed gas source 3 by tracheae 26, through solenoid valve 18, suction port 23 to the interior conveying clean compressed air of piston cylinder 5.Controller 19 is according to the feedback signal of gas pressure sensor 17, control the aperture of solenoid valve 18, adjusting is input to the gas flow in piston cylinder 5, thereby the pressure of regulating piston cylinder 5 interior clean compressed airs, clean compressed air is balanced each other, the gravity compensation of realizing ideal and zero stiffness vibration isolating effect to piston cylinder 5 active force and load, piston cylinder 5 upwards and the gravity that loads on other component on piston cylinder 5.
In the present embodiment, the pressure of piston cylinder 5 interior clean compressed airs is 0.4MPa, and the effective radius of piston cylinder 5 lower surfaces is 100mm, and the quality of single vibration isolator carrying is: m=p × π r
2/ g ≈ 1282kg, wherein p is gas pressure, p=0.4MPa, r is the effective radius of piston cylinder 5 lower surfaces, r=100mm, g is gravity accleration, g=9.8m/s
2.
Fig. 2 provides a kind of mode of execution of arthrodia bearing.Arthrodia bearing 7 is mainly made up of bearing support 7a and bearing support 7b, on bearing support 7b, there is concave spherical surface, form sliding movement pair with the protruding sphere on bearing support 7a, adopt liquid or solid oiling agent to be lubricated, the angular motion degrees of freedom between upper and lower mounting plate 1,2 is carried out to decoupling zero.
Fig. 6 provides the another kind of mode of execution of arthrodia bearing.On bearing support 7b, there is protruding sphere, and concave spherical surface on bearing support 7a forms sliding movement pair, adopt liquid or solid oiling agent to be lubricated, the angular motion degrees of freedom between upper and lower mounting plate 1,2 is carried out to decoupling zero.
Fig. 8 provides an embodiment of plane air bearing surface throttle orifice on sleeve.In the present embodiment, sleeve 6 lower surfaces are uniform 8 plane air bearing surface throttle orifices 24 along the circumferential direction around the center of circle, and diameter is φ 0.2mm.
Fig. 9 provides an embodiment of cylinder air bearing surface throttle orifice on piston cylinder.In the present embodiment, on piston cylinder 5 sidewalls, along the circumferential direction uniform two arrange cylinder air bearing surface throttle orifices 25, the quantity of every row's cylinder air bearing surface throttle orifice 25 is 8, and diameter is φ 0.2mm.
Claims (9)
1. the zero stiffness vibration isolator of a double-deck air supporting crossing decoupling and the decoupling zero of arthrodia bearing angle, by upper mounting plate (1), lower installation board (2), clean compressed gas source (3), tracheae (26) and vibration isolator main body (4) composition, vibration isolator main body (4) is arranged between upper mounting plate (1) and lower installation board (2), clean compressed gas source (3) is connected with vibration isolator main body (4) by tracheae (26), it is characterized in that: in the structure of described vibration isolator main body (4), the lower surface of sleeve (6) and air supporting plate (34) be lubricated and support by axial carrying plane air bearing surface (21), piston cylinder (5) back-off is arranged in sleeve (6), and lubricate and support by radially carrying cylinder air bearing surface (22) with sleeve (6), arthrodia bearing (7) is arranged between piston cylinder (5) and upper mounting plate (1), X is rigidly connected to lower surface and the air supporting plate (34) of air-float guide rail (29), sleeve (6) lubricates and guiding by X direction guiding rail air bearing surface (31) to air-float guide rail (29) with X, the lower surface of Y-direction air-float guide rail (30) and lower installation board (2) are rigidly connected, air supporting plate (34) and lower installation board (2) lubricated and support by Z-direction bearing air-float face (33), air supporting plate (34) lubricates and guiding by Y-direction guide rail air bearing surface (32) with Y-direction air-float guide rail (30), Z-direction voice coil motor (10), Z-direction displacement transducer (13) and Z-direction limit switch (16) are arranged between piston cylinder (5) and sleeve (6), X is to voice coil motor (8), X is to displacement transducer (11), X is arranged between sleeve (6) and air supporting plate (34) to limit switch (14), Y-direction voice coil motor (9), Y-direction displacement transducer (12), Y-direction limit switch (15) is arranged between air supporting plate (34) and lower installation board (2), the driving force direction of Z-direction voice coil motor (10) is vertical direction, X to the driving force direction of voice coil motor (8) and Y-direction voice coil motor (9) in horizontal plane and mutually vertical, X, Y, Z-direction displacement transducer (11, 12, 13) and X, Y, Z-direction limit switch (14, 15, 16) line of action direction and X, Y, Z-direction voice coil motor (8, 9, 10) driving force direction is consistent, X, Y, Z-direction displacement transducer (11,12,13) and X, Y, Z-direction limit switch (14,15,16) are connected with the signal input part of controller (19) respectively, the signal output part of controller (19) is connected with the signal input part of driver (20), and the signal output part of driver (20) is connected with X, Y, Z-direction voice coil motor (8,9,10) respectively.
2. the zero stiffness vibration isolator of double-deck air supporting crossing decoupling according to claim 1 and the decoupling zero of arthrodia bearing angle, it is characterized in that: in described piston cylinder (5), be provided with gas pressure sensor (17), piston cylinder (5) is provided with suction port (23) and solenoid valve (18), gas pressure sensor (17) is connected with the signal input part of controller (19), the signal output part of controller (19) is connected with the signal input part of driver (20), and the signal output part of driver (20) is connected with solenoid valve (18).
3. the zero stiffness vibration isolator of double-deck air supporting crossing decoupling according to claim 1 and the decoupling zero of arthrodia bearing angle, is characterized in that: described X, Y, Z-direction voice coil motor (8,9,10) are cylinder type voice coil motor or plate voice coil motor.
4. the zero stiffness vibration isolator of double-deck air supporting crossing decoupling according to claim 1 and the decoupling zero of arthrodia bearing angle, is characterized in that: described X is single rail structure or two guide rail structure to air-float guide rail (29) and Y-direction air-float guide rail (30).
5. the zero stiffness vibration isolator of double-deck air supporting crossing decoupling according to claim 1 and the decoupling zero of arthrodia bearing angle, is characterized in that: described X, Y, Z-direction displacement transducer (11,12,13) are grating scale, magnetic railings ruler, appearance grid chi or linear potentiometer.
6. the zero stiffness vibration isolator of double-deck air supporting crossing decoupling according to claim 1 and the decoupling zero of arthrodia bearing angle, is characterized in that: described X, Y, Z-direction limit switch (14,15,16) are mechanical type limit switch, Hall-type limit switch or photoelectric limit switch.
7. the zero stiffness vibration isolator of double-deck air supporting crossing decoupling according to claim 1 and the decoupling zero of arthrodia bearing angle, is characterized in that: the interior gas pressure of described piston cylinder (5) is 0.1MPa～0.8MPa.
8. the zero stiffness vibration isolator of double-deck air supporting crossing decoupling according to claim 1 and the decoupling zero of arthrodia bearing angle, is characterized in that: described axial carrying plane air bearing surface (21), the air-film thickness that radially carries cylinder air bearing surface (22), X direction guiding rail air bearing surface (31), Y-direction guide rail air bearing surface (32) and Z-direction bearing air-float face (33) are 10 μ m～20 μ m.
9. the zero stiffness vibration isolator of double-deck air supporting crossing decoupling according to claim 1 and the decoupling zero of arthrodia bearing angle, is characterized in that: the diameter of the plane air bearing surface throttle orifice (24) on cylinder air bearing surface throttle orifice (25) and sleeve (6) on described piston cylinder (5) is φ 0.1mm～φ 1mm.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
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| Publication number | Priority date | Publication date | Assignee | Title |
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| US6953109B2 (en) * | 2002-10-08 | 2005-10-11 | Nikon Corporation | Vibration isolator with low lateral stiffness |
| EP1803965A2 (en) * | 2005-12-30 | 2007-07-04 | Integrated Dynamics Engineering GmbH | Insulation geometry of a vibration insulation system |
| CN101398636A (en) * | 2008-09-17 | 2009-04-01 | 华中科技大学 | Precision vibration damping assembly and vibration damping platform composed of the assembly |
| CN101571675A (en) * | 2009-06-09 | 2009-11-04 | 上海微电子装备有限公司 | Balancing and positioning system for workpiece platform of photoetching machine |
| CN102734379A (en) * | 2012-06-09 | 2012-10-17 | 哈尔滨工业大学 | Active vibration isolating device based on composite support of electromagnetism and static-pressure air floatation |
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Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6953109B2 (en) * | 2002-10-08 | 2005-10-11 | Nikon Corporation | Vibration isolator with low lateral stiffness |
| EP1803965A2 (en) * | 2005-12-30 | 2007-07-04 | Integrated Dynamics Engineering GmbH | Insulation geometry of a vibration insulation system |
| CN101398636A (en) * | 2008-09-17 | 2009-04-01 | 华中科技大学 | Precision vibration damping assembly and vibration damping platform composed of the assembly |
| CN101571675A (en) * | 2009-06-09 | 2009-11-04 | 上海微电子装备有限公司 | Balancing and positioning system for workpiece platform of photoetching machine |
| CN102734379A (en) * | 2012-06-09 | 2012-10-17 | 哈尔滨工业大学 | Active vibration isolating device based on composite support of electromagnetism and static-pressure air floatation |
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