CN101158815A - Air-float magnetic controlled precision movement platform - Google Patents
Air-float magnetic controlled precision movement platform Download PDFInfo
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- CN101158815A CN101158815A CNA2007100454979A CN200710045497A CN101158815A CN 101158815 A CN101158815 A CN 101158815A CN A2007100454979 A CNA2007100454979 A CN A2007100454979A CN 200710045497 A CN200710045497 A CN 200710045497A CN 101158815 A CN101158815 A CN 101158815A
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Abstract
The present invention discloses an air-floating magnetic-control precision motion platform, which comprises a mover platform, a stator platform, a mover thrusting coil, a stator magnet permanent iron array and an x-y directional reflection mirror. The x-y directional reflection mirror is positioned at two sides of the top of the mover platform. The bottom edge of the mover platform is provided with an air-floating hole. The center of the mover platform is provided with a vacuum cavity. The mover thrusting coil is positioned at the inner side of the bottom of the mover platform. The stator magnet permanent iron array is fixed on the stator platform. The entire mover platform floats above the stator platform. The way of the arrangement of the mover thrusting coil is matched with that of the stator magnet permanent iron array. By adopting the air-floating magnetic-control precision motion platform of the present invention, fretting precision and positioning precision of micrometer/nanometer can be realized by the single mover air-floating magnetic-control precision motion platform while the precision motion of multi-working station and large stroke can be realized by a plurality of the mover air-floating magnetic-control precision motion platforms. As the mover platform floats above the stator platform, the mechanical friction between the platforms and the problem of the motion precision of the platform caused by the friction are avoided, and meanwhile a mover coil can be cooled.
Description
Technical field
The present invention relates to a kind of precise motion control device, relate in particular to a kind of air-float magnetic controlled precision movement platform of accurately control plane motion.
Background technology
Along with the continuous development of science and technology and industrial technology, human creativity is also constantly developing to microworld.Along with the development of micro fabrication now, make the more and more heavy machines of our periphery by small and exquisite and easily device replace.Yet along with the making size of devices is more and more littler, precision positioning operating system seems more and more important in micro fabrication.For example at aspects such as the photoetching of IC chip, micromachine manufacturing, precision measurements, it is particularly outstanding that the status of precise motion control device seems.Therefore, its research more and more is subjected to domestic and international researcher's favor.
Traditional motion platform adopts stacked guide rail structure, is connected by mechanical bearing between stator and the mover, so has mechanical friction in the mover motion process.Mechanical friction not only increases the frictional resistance of mover, makes moving component produce wearing and tearing, produces mechanical vibration and noise, has limited the platform motion precision.In addition, kinematic accuracy is subjected to the influence of supporting surface, and is very high to the accuracy requirement of supporting surface, the so also invisible platform cost of manufacture that increased.Simultaneously, the rigidity that drives of guide rail, stability, dynamics all image the operating characteristic of platform.Therefore, traditional motion platform does not more and more satisfy the ultraprecise location of Nano grade and the requirement of processing.
For ultraprecise locating platform technology, relevant both at home and abroad research institution and commercial company have all launched to explore widely and study, and have developed some and have the technical products and the commercial product of frontier nature.
In the research at home, utility model patent CN01202334.5 discloses and has been used for the plane by the fine operating platform of precision positioning.This operating platform is made up of motion platform, cushion block, lower platform, piezoelectric actuator etc.Owing to adopted the piezoelectric ceramics microdrive, guaranteed that this platform has higher kinematic accuracy, while has guaranteed continuity of movement transmission, has not had hysteresis, has not had the characteristics that rub, exempt to lubricate, do not have mechanical loss and mechanism's compactness because each revolute pair has all adopted flexible hinge.But above-mentioned platform can't be implemented in main road micrometer/nanometer bearing accuracy under big stroke and the high-speed application scenario.
Patent of invention CN200410026370.9 discloses the motion positions device that a kind of magnetic levitation magnetic drives, and exclusion principle gets up the mover platform suspension between permanent magnet and the multilayer energising dc coil owing to adopt, and direction of motion does not have mechanical obstacles, not friction.But the floating hysteresis effect that produces of its magnetic can further influence the kinematic accuracy of platform, ultra dense location of more difficult southerner and motion requirement, and the heat that the magnetic levitation coil produces also can further influence the kinetic property and the bearing accuracy of platform.
External relevant patent has the United States Patent (USP) us6054784 of Dutch ASML application; The United States Patent (USP) us6003200 of Massachusetts Institute Technology's application; The United States Patent (USP) us6750625 of Nikon application.
United States Patent (USP) us6054784 is the center with the geometric center of micromotion platform, be three groups of linear electric motors that 120 degree are spacedly distributed at circumferencial direction, the permanent magnet stator of three groups of linear electric motors is installed in fine motion mover platform bottom as one, and the mover coil of three groups of linear electric motors is fixedly connected on respectively on the stator base of micropositioner.By the electromagnetic force effect, there is not direct Mechanical Contact between micromotion platform and its base.By mutual electromagnetic force effect, realize micromotion platform on the x-y plane to three degree of freedom (x, y and R
2) fine adjustment.This platform is mainly used in microposition, and movement travel is little.
United States Patent (USP) us6003200 has proposed the high-accuracy motion platform that the floating magnetic of another kind of magnetic drives.It is with coil stationary on the stator platform, magnetic pole of the stator is installed on the mover platform.This platform can be realized the fine setting of 6 directions, has the precision height, and response speed is fast, and has certain movement travel.But this platform effect is lower, and thermal value is big, and working long hours to influence the serviceability of platform.
United States Patent (USP) us6750625 patent, its structure is that exposure desk is fixed on the framework of band air-float guide rail, and installs coil on the framework of air-float guide rail, has an effect by the magnet below platform, thereby reach the driving framework, drive the function of exposure desk motion.Its shortcoming is that the quality that drives is excessive.
Summary of the invention
The object of the present invention is to provide a kind of air-float magnetic controlled precision motion platform, can effectively solve the problem that the mechanical friction of conventional motion platform causes, and the big problem of other platform thermal values, realize x, y, R
zThe big stroke precise motion of the precisive plane motion of three degree of freedom and location and multistation.
To achieve the above object, air-float magnetic controlled precision movement platform of the present invention, it comprises the mover platform, the stator platform, mover thrust coil and stator permanent magnet array, x-y is to catoptron, x-y is positioned at the both sides of mover table top to catoptron, mover platform bottom margin is distributed with the air supporting hole, mover platform bottom centre is distributed with vacuum chamber, and mover thrust coil is positioned at mover platform bottom inside, and the stator permanent magnet array is fixed in the stator platform, whole mover platform suspension is on the stator platform, and mover thrust coil arrangement mode and stator permanent magnet volume array are complementary.
The mover platform of air-float magnetic controlled precision movement platform is one, and the stator platform also is one, and is complementary with the mover platform.
Mover platform bottom margin is circular, and bottom inside is distributed with the mover thrust coil that three groups of equal circumference distribute.Also be the equal circumference distribution with the permanent magnet array of the corresponding stator platform of mover platform.The mover platform of air-float magnetic controlled precision movement platform is a plurality of, and the stator platform is that same structure stator unit repeated arrangement is formed.The structure of mover platform is all identical, and the bottom margin of each mover platform is square, and bottom inside is distributed with move two thrust coils of two thrust coils and the motion of control y direction of control x direction.The relative bottom centre of the two thrust coils cross arrangement that two thrust coils and control y direction are moved of moving of control x direction is sphere of movements for the elephants.Arranging of the permanent magnet array of each stator unit of stator platform also is sphere of movements for the elephants.
The present invention utilizes gas bearing support to produce lift of gas and makes the mover platform suspension on the stator platform, avoided direct Mechanical Contact, has eliminated the friction and wear that relative motion causes, has overcome defectives such as grease, dust pollution.Vacuum bearing preload and air supporting damping make the mutual balance of air supporting lift and pull of vacuum realize the suspension of mover platform stable, response and high control accuracy fast.When the vacuum bearing produces vacuum simultaneously, have air communication and cross mover platform bottom thrust coil, can avoid coil heat that system dynamics is impacted implement effectively cooling by hot-wire coil.Single action subtype platform of the present invention can be realized micrometer/nanometer motion positions precision in the plane.Many movers of the present invention type platform can be realized the precision plane motion of the big stroke of multistation.
Description of drawings
By following examples and in conjunction with the description of its accompanying drawing, can further understand the specific structural features and the advantage of its invention.Wherein, accompanying drawing is:
Fig. 1 is the precision movement platform synoptic diagram.
Fig. 2 is a mover platform synoptic diagram of the present invention.
Fig. 3 is a stator platform synoptic diagram of the present invention.
Fig. 4 is the platform synoptic diagram of big many movers of stroke list stator precision positioning.
Fig. 5 is the mover platform synoptic diagram of big stroke motion platform.
Fig. 6 is the stator platform synoptic diagram of big stroke motion platform.
Embodiment
Fig. 1,2, the 3rd, the air-float magnetic controlled precision movement platform of the single stator type of single action of the present invention.It mainly applies to the short stroke motion, can make the micropositioner of ultraprecise plane positioning.Fig. 4,5, the 6th, the air-float magnetic controlled precision movement platform of many movers of the present invention list stator type.It can be used as the parallel big stroke precision movement platform of multistation.
As shown in Figure 1, the single stator type precision movement platform of single action of the present invention comprises suspensible mover platform 1 and stator platform 6.As shown in Figure 2, three groups of thrust coils 3 that equal circumference is uniform are arranged at single action sub-platform bottom, and the arragement direction of every group of thrust coil 3 all points to mover platform bottom centre position.The gas bearing support 2 of mover platform 1 is an outer annular structure, and outer annular rim is uniform-distribution with pore.Vacuum bearing 4 is circular cavity structures, is distributed in mover platform bottom centre.
The thrust coil 3 of mover platform 1 each group all embeds in the groove of permanent magnet stator array 5 of corresponding stator platform 6.The electromagnetic force of mover platform thrust coil 3 and 5 generations of permanent magnet stator array makes single action sub-platform 1 produce plane motion.The direction of motion of making a concerted effort determining mover platform 1 of electromagnetic force between three groups of coils and the permanent magnet array.Respectively organize the big I realization of coil current x, y, R by controlling these three groups of coils
zThe motion of three directions realizes the more accurate fine setting of electromagnetic actuation force by the control accuracy of adjustment coil 3 electric currents and the density of arranging of permanent magnet array 5 simultaneously, reaches the accurate motion and the location of above-mentioned three direction micrometer/nanometer levels.
The distance of mover platform 1 motion and location are main by x, and y realizes to catoptron 7.X, y is to the measurement light velocity of catoptron 7 by the outside laser interferometer of reflection, the move distance of auxiliary laser interferometer measurement mover platform.When mover platform no show assigned address, laser interferometer will further be sent motion control signal to control module, arrives assigned address or the default distance of having moved until motion platform, and control module will can not make the mover platform move once more.
Further, vacuum bearing 4 can allow air communication cross the thrust coil of mover platform bottom with the air supporting lift of gas bearing support 2 generations and the balance of pull of vacuum, can implement effectively to cool off to the coil of energising, avoid coil to cross heat affecting motion platform stability.
Motion when Fig. 4,5, the 6th, the air-float magnetic controlled motion platform synoptic diagram of many movers list stator, this plateform system can realize big many movers of stroke platform, and can realize the motion express delivery that needs and the bearing accuracy of requirement.Below such air-float magnetic controlled motion platform is further described.
Air-float magnetic controlled precision movement platform mover platform 8 shown in Figure 4 has a plurality of, and stator platform 10 is that same structure stator unit 9 repeated arrangement are formed.The structure of mover platform 8 is all identical, and it adopts mover console module 13 structures shown in Figure 5.Many movers console module 13 is suspended on the big stroke stator modules 10 by air supporting 15.
The mover platform structure of similar Fig. 2 of mover platform 13 as shown in Figure 5 also is to comprise x, and y is to the air supporting hole 15 of catoptron 11, mover console module bottom vacuum bearing 14, mover module bottom air supporting support.The feature of its difference single action sub-platform is that its bottom thrust coil is not the equal circumference three groups of coils that distribute, arrange to such an extent that coil is formed but be square by four groups: mover platform bottom surface disposed inboard has and is the four prescription shape coils 16 and 17 that sphere of movements for the elephants shape distributes, coil 16 is control x direction two phase coils, and coil 17 is control y direction two phase coils.These four groups of coil cross arrangements are distributed in inboard, the square bottom surface of mover platform.
With the stator platform 10 of many movers platform coupling as shown in Figure 6.The stator platform is to be formed by identical stator unit 9 repeated arrangement of structure, and the arrangement mode of the permanent magnet array of each stator unit 9 and coil 16 and 17 are complementary, and also is sphere of movements for the elephants shape and distributes.
The motion of each mover platform 13 of many movers platform all is separate.X on the mover platform 13, y act on the function of catoptron from single action sub-platform 1 to catoptron 11 is the same.Pneumatically supported implementation method is the same with single action sub-platform air supporting implementation method: realize the gentle buoyance lift equilibrium of forces of pull of vacuum by bottom centre's vacuum bearing 14 and gas bearing support 15.In size by each coil current in 16 liang of phase coils of control coil and 17 liang of phase coils of coil the size of each coil current realize coil 16 and 17 and stator unit 9 permanent magnet arrays between the size used of electromagnetic force cooperation and the control of direction.The same with the single action sub-platform, can realize the further raising of control accuracy by the permanent magnet array distribution density of coil 16 and 17 Current Control precision and stator platform unit 9 in the adjustment mover platform.Final many movers platform x, y, the R of realizing
zThe precise motion of three directions and location.
The air-float magnetic controlled motion platform of many movers list stator requires stator platform 10 to have higher planar smoothness and surface accuracy requirement, to realize the stable of mover console module 13 and big 10 air supporting gaps of stroke stator platform
Further, the air supporting principle makes the bottom have air communication equally and crosses mover coil, the effect of cooling energising mover coil 16 and 17 is arranged.
The air-float magnetic controlled motion platform of the single action single stator of son has fairly simple mover structure 1 and stator structure 6, precise motion and location that control simple (three groups of coils) realizes short stroke easily.It is complicated that the structure of mover structure 13 relative single action 1 of the air-float magnetic controlled motion platform of many movers list stator is wanted, control also can show complicated (four groups of coils) slightly, but the arrangement mode corresponding to the permanent magnet array of mover coil forms big stroke stator platform easily, is fit to motion and location that the mover platform carries out accurate big stroke.Because the motion of each mover platform of many movers platform is separate, both can realize the motion of the multistation that walks abreast, also can realize the many movers platform precise motion and the location of being undertaken by certain sequential requirement.
Claims (8)
1. air-float magnetic controlled precision movement platform,-comprise the mover platform, the stator platform, mover thrust coil, the stator permanent magnet array, with the both sides x-y that is positioned at the mover table top to catoptron, it is characterized in that: described mover platform bottom margin is distributed with the air supporting hole, mover platform bottom centre is distributed with vacuum chamber, mover thrust coil is positioned at mover platform bottom inside, the stator permanent magnet array is fixed in the stator platform, and whole mover platform suspension is on the stator platform, and mover thrust coil arrangement mode and stator permanent magnet volume array are complementary.
2. air-float magnetic controlled precision movement platform as claimed in claim 1 is characterized in that: described mover platform (1) is one, and described stator platform (6) also is one, and is complementary with mover platform (1).
3. air-float magnetic controlled precision movement platform as claimed in claim 2 is characterized in that: mover platform (1) bottom margin is for circular, and bottom inside is distributed with the mover thrust coil (3) that three groups of equal circumference distribute.
4. air-float magnetic controlled precision movement platform as claimed in claim 3 is characterized in that: also be the equal circumference distribution with the stator permanent magnet array (5) of the corresponding stator platform of mover platform (1) (6).
5. air-float magnetic controlled precision movement platform as claimed in claim 1 is characterized in that: described mover platform (8) is for a plurality of, and described stator platform (10) is that same structure stator unit (9) repeated arrangement is formed.
6. air-float magnetic controlled precision movement platform as claimed in claim 5, it is characterized in that: the structure of described mover platform is all identical, the bottom margin of each mover platform (13) is square, and bottom inside is distributed with the control x direction two thrust coils (17) that two thrust coils (16) and control y direction move that move.
7. air-float magnetic controlled precision movement platform as claimed in claim 6 is characterized in that: the relative bottom centre of two thrust coils (17) cross arrangement that two thrust coils (16) and control y direction are moved of moving of described control x direction is sphere of movements for the elephants.
8. air-float magnetic controlled precision movement platform as claimed in claim 7 is characterized in that: the arranging of permanent magnet array of each stator unit (9) of stator platform (10) also is sphere of movements for the elephants.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNA2007100454979A CN101158815A (en) | 2007-08-31 | 2007-08-31 | Air-float magnetic controlled precision movement platform |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNA2007100454979A CN101158815A (en) | 2007-08-31 | 2007-08-31 | Air-float magnetic controlled precision movement platform |
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Cited By (14)
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| CN101520606B (en) * | 2008-01-02 | 2011-07-20 | 西安交通大学 | Non-contact long-stroke multi-degree-of-freedom nanometer precision working table |
| CN102272914A (en) * | 2008-12-31 | 2011-12-07 | 伊雷克托科学工业股份有限公司 | Monolithic stage positioning system and method |
| WO2014094687A2 (en) * | 2012-12-19 | 2014-06-26 | Harbin Institute Of Technology | Magnetically suspended and plane-drove vibration isolator with zero stiffness whose angle degree of freedom is decoupled with a spherical air bearing |
| CN104097071A (en) * | 2013-04-10 | 2014-10-15 | 高明铁企业股份有限公司 | Positioning method for precision alignment platform |
| CN104117859A (en) * | 2013-04-25 | 2014-10-29 | 高明铁企业股份有限公司 | Positioning method of suspension type precise alignment platform |
| CN105425550A (en) * | 2016-01-14 | 2016-03-23 | 哈尔滨工业大学 | Moving coil gas-magnetism combined air-suspension double-workpiece-stage vector circular-arc exchange method and device based on staggered magnetic steel arrangement |
| CN107015573A (en) * | 2017-03-20 | 2017-08-04 | 歌尔科技有限公司 | The control method and system of electromagnetic motion platform |
| CN107030656A (en) * | 2017-05-09 | 2017-08-11 | 广东工业大学 | A kind of plane air-flotation workbench and control method based on bulk of optical feedback |
| CN109488686A (en) * | 2018-11-14 | 2019-03-19 | 哈尔滨工业大学 | One kind being based on the maglev linear motion device of gas |
| CN110431438A (en) * | 2017-03-15 | 2019-11-08 | 三星电子株式会社 | Method and its electronic equipment for test object |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN101520606B (en) * | 2008-01-02 | 2011-07-20 | 西安交通大学 | Non-contact long-stroke multi-degree-of-freedom nanometer precision working table |
| CN102272914B (en) * | 2008-12-31 | 2014-09-24 | 伊雷克托科学工业股份有限公司 | Monolithic stage positioning system and method |
| CN102272914A (en) * | 2008-12-31 | 2011-12-07 | 伊雷克托科学工业股份有限公司 | Monolithic stage positioning system and method |
| TWI498187B (en) * | 2008-12-31 | 2015-09-01 | Electro Scient Ind Inc | Monolithic stage positioning system and method |
| WO2014094687A3 (en) * | 2012-12-19 | 2014-08-14 | Harbin Institute Of Technology | Magnetically suspended and plane-drove vibration isolator |
| GB2519271B (en) * | 2012-12-19 | 2019-05-01 | Harbin Inst Technology | Magnetically suspended and plane-drove vibration isolator with zero stiffness whose angle degree of freedom is decoupled with a spherical air bearing |
| WO2014094687A2 (en) * | 2012-12-19 | 2014-06-26 | Harbin Institute Of Technology | Magnetically suspended and plane-drove vibration isolator with zero stiffness whose angle degree of freedom is decoupled with a spherical air bearing |
| GB2519271A (en) * | 2012-12-19 | 2015-04-15 | Harbin Inst Of Technology | Magnetically suspended and plane-drove vibration isolator |
| CN104097071A (en) * | 2013-04-10 | 2014-10-15 | 高明铁企业股份有限公司 | Positioning method for precision alignment platform |
| CN104117859A (en) * | 2013-04-25 | 2014-10-29 | 高明铁企业股份有限公司 | Positioning method of suspension type precise alignment platform |
| CN105425550A (en) * | 2016-01-14 | 2016-03-23 | 哈尔滨工业大学 | Moving coil gas-magnetism combined air-suspension double-workpiece-stage vector circular-arc exchange method and device based on staggered magnetic steel arrangement |
| CN110431438B (en) * | 2017-03-15 | 2023-09-15 | 三星电子株式会社 | Method for detecting object and electronic device thereof |
| CN110431438A (en) * | 2017-03-15 | 2019-11-08 | 三星电子株式会社 | Method and its electronic equipment for test object |
| CN107015573A (en) * | 2017-03-20 | 2017-08-04 | 歌尔科技有限公司 | The control method and system of electromagnetic motion platform |
| CN107015573B (en) * | 2017-03-20 | 2020-05-29 | 歌尔科技有限公司 | Control method and system of electromagnetic motion platform |
| CN107030656A (en) * | 2017-05-09 | 2017-08-11 | 广东工业大学 | A kind of plane air-flotation workbench and control method based on bulk of optical feedback |
| CN107030656B (en) * | 2017-05-09 | 2024-05-14 | 广东工业大学 | Optical feedback-based planar air-floatation workbench and control method |
| CN109488686A (en) * | 2018-11-14 | 2019-03-19 | 哈尔滨工业大学 | One kind being based on the maglev linear motion device of gas |
| CN109488686B (en) * | 2018-11-14 | 2019-07-16 | 哈尔滨工业大学 | One kind being based on the maglev linear motion device of gas |
| CN113589651A (en) * | 2020-04-30 | 2021-11-02 | 上海微电子装备（集团）股份有限公司 | Air bearing device and photoetching equipment |
| CN114114845A (en) * | 2020-08-31 | 2022-03-01 | 上海微电子装备（集团）股份有限公司 | Substrate transfer unit and substrate transfer device |
| CN113029235B (en) * | 2021-02-25 | 2021-09-10 | 哈尔滨工业大学 | Small-stroke nanoscale motion platform and heat-related hysteresis data measuring method |
| CN113029235A (en) * | 2021-02-25 | 2021-06-25 | 哈尔滨工业大学 | Small-stroke nanoscale motion platform and heat-related hysteresis data measuring method |
| CN113917800A (en) * | 2021-10-12 | 2022-01-11 | 哈尔滨工业大学 | High-dynamic ultra-precise multi-rotor workpiece table for photoetching machine |
| CN113917800B (en) * | 2021-10-12 | 2023-12-08 | 哈尔滨工业大学 | High-dynamic ultra-precise multi-rotor workpiece table for photoetching machine |
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