CN103047344A - Double-layer orthogonal air floatation decoupling and rolling knuckle bearing angular decoupling magnetic levitation vibration isolator - Google Patents

Double-layer orthogonal air floatation decoupling and rolling knuckle bearing angular decoupling magnetic levitation vibration isolator Download PDF

Info

Publication number
CN103047344A
CN103047344A CN2012105746885A CN201210574688A CN103047344A CN 103047344 A CN103047344 A CN 103047344A CN 2012105746885 A CN2012105746885 A CN 2012105746885A CN 201210574688 A CN201210574688 A CN 201210574688A CN 103047344 A CN103047344 A CN 103047344A
Authority
CN
China
Prior art keywords
vibration isolator
decoupling
air
voice coil
magnetic
Prior art date
Application number
CN2012105746885A
Other languages
Chinese (zh)
Other versions
CN103047344B (en
Inventor
谭久彬
崔俊宁
王雷
Original Assignee
哈尔滨工业大学
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 哈尔滨工业大学 filed Critical 哈尔滨工业大学
Priority to CN201210574688.5A priority Critical patent/CN103047344B/en
Publication of CN103047344A publication Critical patent/CN103047344A/en
Application granted granted Critical
Publication of CN103047344B publication Critical patent/CN103047344B/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Abstract

The invention belongs to the technical field of precision vibration isolation and relates to a double-layer orthogonal air floatation decoupling and rolling knuckle bearing angular decoupling magnetic levitation vibration isolator. A magnetic levitation thrust bearing is used for bearing between a sleeve of a vibration isolator body and an air floatation plate, air floatation surfaces are used for lubricating and supporting between the air floatation plate and a lower mounting plate as well as between a piston cylinder and the sleeve, degree of freedom of horizontal linear motion between an upper mounting plate and the lower mounting plate is decoupled by double-layer orthogonal air floatation guide rails, degree of freedom of angular motion between the upper mounting plate and the lower mounting plate is decoupled by a rolling knuckle bearing, and voice coil motors, displacement sensors, limit switches, a controller and a drive form a position closed-loop feedback control system so as to precisely control the relative position of the upper mounting plate and the lower mounting plate. The magnetic levitation vibration isolator has the advantages of zero three-dimensional rigidity, high positioning precision and decoupling of degree of freedom of linear motion and degree of freedom of angular motion, and is capable of effectively meeting the requirements of ultra-precise measuring instruments and processing equipment, particularly of step-scan lithography machines on high-performance vibration isolation.

Description

The floating vibration isolator of the magnetic of double-deck air supporting crossing decoupling and the decoupling zero of rolling joint shaft bearing angle
Technical field
The invention belongs to the accurate vibration isolation technical field, relate generally to the floating vibration isolator of magnetic of a kind of double-deck air supporting crossing decoupling and the decoupling zero of rolling joint shaft bearing angle.
Background technique
Along with improving constantly of ultraprecise processing and measuring accuracy, ambient vibration becomes the key factor that restriction ultraprecise process unit and surveying instrument precision and performance improve.Especially step-by-step scanning photo-etching device is the vlsi circuit process unit of representative, technology-intensive degree and complexity are high, key technical index has all reached the limit of prior art, represented the highest level of ultraprecise process unit, the ultraprecise vibration isolation becomes the core key technology in this type of equipment; The live width of step-by-step scanning photo-etching device has reached 22nm and following, silicon chip Location accuracy and alignment precision all reach several nanometers, and the work stage movement velocity reaches more than the 1m/s, and the work stage acceleration reaches tens times of gravity accleration, and this has proposed new challenge to existing vibration isolation technique.At first, lithography machine need to provide for metering system and photoetched object lens the working environment of " super quiet ", simultaneously again the demand motive work stage at full speed with High acceleration motion, this anti-vibration performance to vibrating isolation system has proposed extremely harsh requirement, and the natural frequency of its three directions all needs to reach below the 1Hz; Secondly, relative position between each parts of lithography machine, the distance of photoetched object lens and silicon chip surface for example, all has very strict requirement, and be under the control of position closed loop feedback control system, require the relative positional accuracy between the upper and lower mounting plate of vibration isolator to reach 10 μ m magnitudes, the Location accuracy of traditional vibration isolator can not meet the demands far away.
According to theory of vibration isolation, the natural frequency of passive type vibration isolator is directly proportional with rigidity, is inversely proportional to load quality, therefore under the certain prerequisite of load quality, the rigidity that reduces vibration isolator is the effective way that reduces natural frequency, improves low frequency and superlow frequency vibration isolating performance.There are the intrinsic contradictions of static bearing capacity and rigidity in the vibration isolator of the forms such as conventional air spring, restricted by the factors such as material behavior, structural rigidity, further reduce its rigidity, especially level very difficult to rigidity.For this problem, the researcher is incorporated into " pendulum " formula structure in the air cushion shock absorber, reaches purpose (the 1.Nikon Corporation.Vibration Isolator With Low Lateral Stiffness. U.S. Patent Publication No.: US20040065517A1 that reduces the vibration isolator horizontal rigidity; 2.U.S.Philips Corporation.Positioning Device with a Force Actuator Systemfor Compensating Center-of-gravity Displacements, and Lithographic Device Provided with Such APositioning Device. U.S. Patent number: US005844664A).The method can reduce the horizontal rigidity of air cushion shock absorber to a certain extent, promotes its low frequency vibration isolation performance.The problem that the method exists is: restricted by material behavior and structural rigidity, vibration isolator is vertical limited to the amplitude of stiffness degradation with level; 2) the vertical and level of air cushion shock absorber is all very poor to Location accuracy, can't satisfy the requirement of photoetching process; 3) will reach lower horizontal rigidity needs larger pendulum length, causes the vibration isolator height excessive, the string membrane resonance easily occurs, poor stability.
By to the analysis of existing air cushion shock absorber technological scheme as seen, existing air cushion shock absorber is difficult to satisfy lithography machine to the requirement of ultralow rigidity and high position precision.Germany IDE company has proposed a kind of vibration isolator technological scheme (1.Integrated Dynamics Engineering GmbH.Isolatorgeometrie EinesSchwingungsisolationssystem. european patent number: EP1803965A2 of abandoning tradition rubber air spring; 2.Integrated Dynamics EngineeringGmbH.Schwingungsisolationssystem Mit Pneumatischem Tiefpassfilter. european patent number: EP1803970A2; 3.Integrated Dynamics Engineering GmbH.Air Beating with Consideration ofHigh-Frequency Resonances. U.S. Patent Publication No.: US20080193061A1).This scheme adopts vertical and level is carried out decoupling zero and vibration isolation to air bearing surface to the vibration of all directions, can reach extremely low rigidity and natural frequency.The problem that this scheme exists is: 1) in the public technology scheme, vibration isolator can't be realized accurate location; 2) among the patent EP1803965A2, do not have the angular motion degrees of freedom around horizontal rotational shaft between the upper and lower mounting plate, the angular rigidity of this direction and natural frequency are all very high; Patent EP1803970A2 and US20080193061A1 adopt block rubber to provide angular motion degrees of freedom around horizontal rotational shaft for upper and lower mounting plate, but because the block rubber angular rigidity is very large, can't effectively carry out the angular motion freedom decoupling, there is frictional force between the angular motion freedom decoupling mechanism components and introduces additional stiffness, restriction anti-vibration performance.
Holland ASML company has also proposed similar vibration isolator technological scheme (1.U.S.Philips Corp, ASM LithographyB.V.Pneumatic Support Device with A Controlled Gas Supply, and Lithographic Device Providedwith Such A Support Device. U.S. Patent number: US006144442A; 2.Koninklijke Philips ElectronicsN.V., ASM Lithography B.V.Lithographic Pneumatic Support Device with Controlled Gas Supply. International Patent Publication No.: WO99/22272; 3.ASML Netherlands B.V.Support Device, LithographicApparatus, and Device Manufacturing Method Employing A Supporting Device, and A PositionControl System Arranged for Use in A Supporting Device. U.S. Patent number: US007084956B2; 4.ASML Netherlands B.V.Support Device, Lithographic Apparatus, and Device ManufacturingMethod Employing A Supporting Device and A Position Control System Arranged for Use in ASupporting Device. european patent number: EP1486825A1).Among patent US006144442A and the WO99/22272 bleed pressure is carried out closed-loop feedback control, reach the stability of raising vibration isolator and the purpose of performance; Be provided with vibration transducer at upper mounting plate among patent US007084956B2 and the EP1486825A1, introduce simultaneously with reference to vibration system, promote the anti-vibration performance of vibration isolator by control algorithm.But the technological scheme that proposes still do not solve the accurate location of vibration isolator and the angular motion freedom decoupling problem of upper and lower mounting plate.
Summary of the invention
The objective of the invention is for ultra precise measurement instrument and process unit, especially the vlsi circuit process unit such as step-by-step scanning photo-etching device is to the low natural frequency of vibration isolator, the an urgent demand of high position precision, the floating vibration isolator of magnetic of a kind of double-deck air supporting crossing decoupling and the decoupling zero of rolling joint shaft bearing angle is provided, vibration isolator all has approximate zero rigidity and extremely low natural frequency in three-dimensional, on, can accurately locate and the 3 d-line freedom of movement between the lower installation board, the angular motion freedom decoupling, thus ultra precise measurement instrument and process unit effectively solved, especially the accurate vibration isolation problem in the step-by-step scanning photo-etching device.
The object of the present invention is achieved like this:
The magnetic of a kind of double-deck air supporting crossing decoupling and the decoupling zero of rolling joint shaft bearing angle floats vibration isolator, by upper mounting plate, lower installation board, clean compressed gas source, tracheae and vibration isolator main body form, the vibration isolator main body is installed between upper mounting plate and the lower installation board, clean compressed gas source is communicated with the vibration isolator main body by tracheae, the structure of described vibration isolator main body is: the lower surface of sleeve and air supporting plate be lubricated and support by the floating thrust-bearing of magnetic, the piston cylinder back-off is installed in the sleeve, and with sleeve by radially carry the cylinder air bearing surface lubricated with support, the rolling joint shaft bearing is installed between piston cylinder and the upper mounting plate, the lower surface of X-direction air-float guide rail and air supporting plate are rigidly connected, sleeve and X-direction air-float guide rail be lubricated and guiding by X-direction guide rail air bearing surface, lower surface and the lower installation board of Y-direction air-float guide rail are rigidly connected, air supporting plate and lower installation board lubricate by Z-direction bearing air-float face and support, and air supporting plate and Y-direction air-float guide rail be lubricated and guiding by Y-direction guide rail air bearing surface; The Z-direction voice coil motor, Z-direction displacement transducer and Z-direction limit switch are installed between piston cylinder and the sleeve, the X-direction voice coil motor, the X-direction displacement transducer, the X-direction limit switch is installed between sleeve and the air supporting plate, the Y-direction voice coil motor, the Y-direction displacement transducer, the Y-direction limit switch is installed between air supporting plate and the lower installation board, the driving force direction of Z-direction voice coil motor is vertical direction, the driving force direction of X-direction voice coil motor and Y-direction voice coil motor in horizontal plane and mutually vertical, X, Y, Z-direction displacement transducer and X, Y, line of action direction and the X of Z-direction limit switch, Y, the driving force direction of Z-direction voice coil motor is consistent; X, Y, Z-direction displacement transducer are connected Y, Z-direction limit switch and are connected with the signal input part of controller respectively with X, the signal output part of controller is connected with the signal input part of driver, and the signal output part of driver is connected with X, Y, Z-direction voice coil motor respectively.
Be provided with gas pressure sensor in the described piston cylinder, piston cylinder is provided with suction port and solenoid valve, and gas pressure sensor is connected with the signal input part of controller, and the signal output part of driver is connected with solenoid valve.
The configuration mode of the floating thrust-bearing of described magnetic is to be provided with permanent magnet at sleeve bottom surface sidewall, and at the relatively equipped electromagnetic coil of lower installation board upper surface sidewall, the floating gap thickness of magnetic is 0.01mm~1mm.
Described X, Y, Z-direction voice coil motor are cylinder type voice coil motor or plate voice coil motor.
Described X-direction air-float guide rail and Y-direction air-float guide rail are single rail structure or two guide rail structure.
Described X, Y, Z-direction displacement transducer are grating scale, magnetic railings ruler, appearance grid chi or linear potentiometer.
Described X, Y, Z-direction limit switch are mechanical type limit switch, Hall-type limit switch or photoelectric limit switch.
Gas pressure is 0.1MPa~0.8MPa in the described piston cylinder.
The good result of technological innovation of the present invention and generation is:
(1) the present invention has abandoned the vibration isolator technological scheme of tradition based on elastic element/mechanism, adopt the floating thrust-bearing of magnetic, radially carry the cylinder air bearing surface respectively to level to carrying out decoupling zero and vibration isolation with vertical vibration, the floating thrust-bearing of magnetic and air bearing surface are without friction, rigidity is approximately zero, can make vibration isolator obtain approximate zero stiffness characteristic and outstanding superlow frequency vibration isolating performance, having solved prior art limited by structural rigidity, material behavior, rigidity is difficult to further reduction, rigidity and the stable problem that can not take into account.This is that the present invention is different from one of innovative point of prior art.
(2) the present invention adopts displacement transducer, limit switch, controller, driver and voice coil motor etc. to consist of the position closed loop feedback control system of vertical direction and substantially horizontal, relative position between the upper and lower mounting plate is accurately controlled, Location accuracy can reach 10 μ m levels and more than, the problem that can solve effectively that prior art scheme Location accuracy is low, Location accuracy and rigidity, anti-vibration performance can not be taken into account.This is two of the present invention's innovative point of being different from prior art.
(3) the present invention adopts Orthogonal Double-layer air-float guide rail and rolling joint shaft bearing that the straight line motion degrees of freedom between the upper and lower mounting plate of vibration isolator and angular motion degrees of freedom are carried out decoupling zero, the additional stiffness of the friction of air-float guide rail and rolling joint shaft bearing, wearing and tearing and introducing can be ignored, and can effectively solve the existing technological scheme of elastomer decoupling zero that adopts and introduce the problems such as larger additional stiffness.This is three of the present invention's innovative point of being different from prior art.
(4) the present invention adopts gas pressure sensor, solenoid valve and controller, driver etc. to consist of the pressure closed loop feedback control system, accurately the gas pressure in the control sleeve makes it to keep constant, thrust load to vibration isolator is carried out gravitational equilibrium and compensation, under the effect of radially carrying the cylinder air bearing surface, the piston cylinder of carry load gravity can freely slide up and down with zero stiffness along sleeve, thus the gravitational equilibrium of realizing ideal and zero stiffness vibration isolating effect.This is four of the present invention's innovative point of being different from prior art.
(5) the present invention adopts active actuators that the relative position between the upper and lower mounting plate and the gas pressure in the piston cylinder are carried out ACTIVE CONTROL, the vibration isolator parameter can be according to being changed in real time adjusting by vibration isolation features of the object and working environment, thereby adapt to different operating modes, have preferably flexibility, adaptability and stability.This is five of the present invention's innovative point of being different from prior art.
Description of drawings
Fig. 1 floats the structural representation of vibration isolator for removing double-deck air supporting crossing decoupling and the magnetic of rolling joint shaft bearing angle decoupling zero behind the upper mounting plate;
Fig. 2 is the cross-sectional view of the floating vibration isolator of magnetic of double-deck air supporting crossing decoupling and the decoupling zero of rolling joint shaft bearing angle;
Fig. 3 is the floating gap of magnetic, radially carries the schematic diagram of cylinder air bearing surface and X-direction guide rail air bearing surface;
Fig. 4 is the schematic diagram of Z-direction bearing air-float face and Y-direction guide rail air bearing surface;
Fig. 5 is the tube-in-tube structure schematic diagram;
Fig. 6 is the ball retainer structural representation of the rolling joint shaft bearing of single ball;
Fig. 7 is the rolling joint shaft bearing structural representation that is abound with ball;
Fig. 8 is the control structure block diagram of the floating vibration isolator of magnetic of double-deck air supporting crossing decoupling and the decoupling zero of rolling joint shaft bearing angle;
Fig. 9 is the schematic diagram of cylinder air bearing surface throttle orifice on the piston cylinder.
Piece number explanation among the figure: 1 upper mounting plate, 2 lower installation boards, 3 clean compressed gas sources, 4 vibration isolator main bodys, 5 piston cylinders, 6 sleeves, 7 rolling joint shaft bearings, the 7a bearing support, the 7b ball retainer, the 7c ball, the 7d bearing support, 8X is to voice coil motor, 8a X-direction motor iron yoke, 8b X-direction magnetic steel of motor, 8c X-direction motor coil skeleton, 8d X-direction motor coil, 9Y is to voice coil motor, 10Z is to voice coil motor, 10a Z-direction motor iron yoke, 10b Z-direction magnetic steel of motor, 10c Z-direction motor coil skeleton, 10d Z-direction motor coil, 10e Z-direction motor transitional spare, 11X is to displacement transducer, 11a X-direction grating reading head transition piece, 11b X-direction grating reading head, 11c X-direction glass raster chi, 12Y is to displacement transducer, 13Z is to displacement transducer, 13a Z-direction grating reading head transition piece, 13b Z-direction grating reading head, 13c Z-direction glass raster chi, 14X is to limit switch, 14a X-direction limiting stopper, 14b X-direction Hall switch, 14c X-direction limit switch transition piece, 14d X-direction limiting stopper transition piece, 15Y is to limit switch, 16Z is to limit switch, 16a Z-direction limiting stopper, 16b Z-direction Hall switch, 16c Z-direction limit switch transition piece, 17 gas pressure sensors, 18 solenoid valves, 19 controllers, 20 drivers, 21 magnetic float the gap, 22 radially carry the cylinder air bearing surface, 23 suction ports, 24 magnetic float thrust-bearing, the 24a permanent magnet, the 24b electromagnetic coil, 25 cylinder air bearing surface throttle orifices, 26 tracheaes, 29X is to air-float guide rail, 30Y is to air-float guide rail, 31X direction guiding rail air bearing surface, 32Y direction guiding rail air bearing surface, 33Z is to the bearing air-float face, 34 air supporting plates.
Embodiment
Provide specific embodiments of the invention below in conjunction with accompanying drawing.
The magnetic of a kind of double-deck air supporting crossing decoupling and the decoupling zero of rolling joint shaft bearing angle floats vibration isolator, by upper mounting plate 1, lower installation board 2, clean compressed gas source 3, tracheae 26 and vibration isolator main body 4 form, vibration isolator main body 4 is installed between upper mounting plate 1 and the lower installation board 2, clean compressed gas source 3 is communicated with vibration isolator main body 4 by tracheae 26, the structure of described vibration isolator main body 4 is: the lower surface of sleeve 6 and air supporting plate 34 are by floating the thrust-bearing 24 lubricated and supports of magnetic, piston cylinder 5 back-offs are installed in the sleeve 6, and with sleeve 6 by radially carry cylinder air bearing surface 22 lubricated with support, rolling joint shaft bearing 7 is installed between piston cylinder 5 and the upper mounting plate 1, the lower surface of X-direction air-float guide rail 29 and air supporting plate 34 are rigidly connected, sleeve 6 lubricates and guiding by X-direction guide rail air bearing surface 31 with X-direction air-float guide rail 29, the lower surface of Y-direction air-float guide rail 30 and lower installation board 2 are rigidly connected, air supporting plate 33 lubricates by Z-direction bearing air-float face 33 with lower installation board 2 and supports, and air supporting plate 34 lubricates and guiding by Y-direction guide rail air bearing surface 32 with Y-direction air-float guide rail 30; Z-direction voice coil motor 10, Z-direction displacement transducer 13 and Z-direction limit switch 16 are installed between piston cylinder 5 and the sleeve 6, X-direction voice coil motor 8, X-direction displacement transducer 11, X-direction limit switch 14 is installed between sleeve 6 and the air supporting plate 34, Y-direction voice coil motor 9, Y-direction displacement transducer 12, Y-direction limit switch 15 is installed between air supporting plate 34 and the lower installation board 2, the driving force direction of Z-direction voice coil motor 10 is vertical direction, the driving force direction of X-direction voice coil motor 8 and Y-direction voice coil motor 9 in horizontal plane and mutually vertical, X, Y, Z-direction displacement transducer 11,12,13 and X, Y, Z-direction limit switch 14,15,16 line of action direction and X, Y, Z-direction voice coil motor 8,9,10 driving force direction is consistent; X, Y, Z-direction displacement transducer 11,12,13 are connected Y, Z-direction limit switch 14,15,16 and are connected with the signal input part of controller 19 respectively with X, the signal output part of controller 19 is connected with the signal input part of driver 20, and the signal output part of driver 20 is connected with X, Y, Z-direction voice coil motor 8,9,10 respectively.
X, Y, Z-direction displacement transducer 11,12,13 pairs of X, Y, Z-direction voice coil motor 8,9,10 displacements of exporting are measured, and X, Y, Z-direction limit switch 14,15,16 pairs of X, Y, Z-direction voice coil motor 8,9,10 strokes that move limit; Controller 19 is according to X, Y, Z-direction displacement transducer 11,12,13 and X, Y, Z-direction limit switch 14,15,16 feedback signal, and the relative position between control X, Y, Z-direction voice coil motor 8,9, the 10 pairs of upper and lower mounting plates 1,2 is accurately controlled.
Be provided with gas pressure sensor 17 in the described piston cylinder 5, piston cylinder 5 is provided with suction port 23 and solenoid valve 18, and gas pressure sensor 17 is connected with the signal input part of controller 19, and the signal output part of driver 20 is connected with solenoid valve 18.
The configuration mode of the floating thrust-bearing 24 of described magnetic is to be provided with permanent magnet 24a at sleeve 6 bottom surface sidewalls, and at the relatively equipped electromagnetic coil 24b of lower installation board upper surface sidewall, the floating gap of magnetic 21 thickness are 0.01mm~1mm.
Described X, Y, Z-direction voice coil motor 8,9,10 are cylinder type voice coil motor or plate voice coil motor.
Described X-direction air-float guide rail 29 and Y-direction air-float guide rail 30 are single rail structure or two guide rail structure.
Described X, Y, Z-direction displacement transducer 11,12,13 are grating scale, magnetic railings ruler, appearance grid chi or linear potentiometer.
Described X, Y, Z-direction limit switch 14,15,16 are mechanical type limit switch, Hall-type limit switch or photoelectric limit switch.
Described piston cylinder 5 interior gas pressures are 0.1MPa~0.8MPa.
Described axial carrying plane air bearing surface 21, the air-film thickness that radially carries cylinder air bearing surface 22, X-direction guide rail air bearing surface 31, Y-direction guide rail air bearing surface 32 and Z-direction bearing air-float face 33 are 10 μ m~20 μ m.
Cylinder air bearing surface throttle orifice 25 on the described piston cylinder 5 and the diameter of the plane air bearing surface throttle orifice 24 on the sleeve 6 are φ 0.1mm~φ 1mm.
Provide one embodiment of the present of invention below in conjunction with Fig. 1~Fig. 5, Fig. 8.In the present embodiment, in vibration isolator when work,, lower installation board 2 is installed on the pedestal or basic framework of ground, instrument, upper mounting plate 1 be connected by the load of vibration isolation.X, Y, Z-direction voice coil motor 8,9,10 all adopt the cylinder type voice coil motor.Take X-direction voice coil motor 8 as example, it mainly comprises X-direction motor iron yoke 8a, X-direction magnetic steel of motor 8b, X-direction motor coil skeleton 8c, X-direction motor coil 8d.X-direction motor iron yoke 8a and X-direction motor coil skeleton 8c are cylindrical shape, and X-direction magnetic steel of motor 8b is cylindrical, and X-direction motor coil 8d is around on the X-direction motor coil skeleton 8c.X-direction motor iron yoke 8a and X-direction magnetic steel of motor 8b consist of the stator of motor, and X-direction motor coil skeleton 8c and X-direction motor coil 8d consist of the mover of motor.In the Z-direction voice coil motor 10, Z-direction motor transitional spare 10e provides the mounting structure of Z-direction motor coil skeleton 10c.Pass to electric current during machine operation in the coil, according to electromagnetic theory, hot-wire coil can be subject to the effect of voice coil loudspeaker voice coil power in magnetic field, can control the size and Orientation of motor output drive strength by the size and Orientation of control electric current.
X, Y, Z-direction displacement transducer 11,12,13 adopt grating scale.Take Z-direction displacement transducer 13 as example, it mainly comprises the parts such as Z-direction grating reading head transition piece 13a, Z-direction grating reading head 13b and Z-direction glass raster chi 13c, and Z-direction grating reading head transition piece 13a provides the mounting structure of Z-direction grating reading head 13b.In grating scale when work,, Z-direction grating reading head 13b can detect the relative displacement of itself and Z-direction glass raster chi 13c, and gives controller 19 by signal conductor.
X, Y, Z-direction limit switch 14,15,16 adopt the Hall-type limit switch.Take Z-direction limit switch 16 as example, it mainly comprises the parts such as Z-direction limiting stopper 16a, Z-direction Hall switch 16b and Z-direction limit switch transition piece 16c.Two Z-direction Hall switch 16b install back-to-back, and two Z-direction limiting stopper 16a are metallic material, with relative installation of sensitivity end of Z-direction Hall switch 16b.Z-direction limit switch transition piece 16c provides the mounting structure of Z-direction Hall switch 16b.In limit switch when work,, as Z-direction Hall switch 16b during near Z-direction limiting stopper 16a, Z-direction Hall switch 16b provides limit signal, and gives controller 19 by signal conductor.
In the present embodiment, Z-direction voice coil motor 10, Z-direction displacement transducer 13 and Z-direction limit switch 16 are installed between piston cylinder 5 and the sleeve 6, and are installed in piston cylinder 5 inside.
Vibration isolator is realized in the following way to the carrying of load: clean compressed gas source 3 by tracheae 26, through solenoid valve 18, suction port 23 to piston cylinder 5 interior conveying clean compressed airs.Controller 19 is according to the feedback signal of gas pressure sensor 17, the aperture of control solenoid valve 18, adjusting is input to the gas flow in the piston cylinder 5, thereby the pressure of regulating piston cylinder 5 interior clean compressed airs, make active force and load, the piston cylinder 5 that clean compressed air makes progress to piston cylinder 5 and the gravity that loads on other component on the piston cylinder 5 balance each other the gravity compensation of realizing ideal and zero stiffness vibration isolating effect.
In the present embodiment, the pressure of piston cylinder 5 interior clean compressed airs is 0.4Mpa, and the effective radius of piston cylinder 5 lower surfaces is 100mm, and then the quality of single vibration isolator carrying is: m=p * π γ 2/ g ≈ 1282kg, wherein p is gas pressure, and p=0.4Mpa, r are the effective radius of piston cylinder 5 lower surfaces, and r=100mm, g are gravity accleration, g=9.8m/m 2
Provide an embodiment of single ball rolling joint shaft bearing below in conjunction with Fig. 2, Fig. 6.In the present embodiment, the chief component parts of rolling joint shaft bearing 7 comprise bearing support 7a, ball retainer 7b, ball 7c and bearing support 7d, ball 7c is single uniform around axial direction, ball retainer 7b has circular hole in the position of corresponding ball 7c, and the position of ball 7c is kept by ball retainer 7b.
Fig. 7 provides an embodiment who is abound with ball rolling joint shaft bearing.In the present embodiment, ball 7c evenly is abound with on the acting surface of bearing support 7a and bearing support 7d, and ball retainer 7b is the sphere form, and has circular hole in the position of corresponding ball 7c, and the position of ball 7c is kept by ball retainer 7b.
Fig. 9 provides an embodiment of cylinder air bearing surface throttle orifice on the piston cylinder.In the present embodiment, uniform two arrange cylinder air bearing surface throttle orifices 25 in the circumferential direction of the circle on piston cylinder 5 sidewalls, the quantity of every row's cylinder air bearing surface throttle orifice 25 is 8, and diameter is φ 0.2mm.

Claims (8)

1. the floating vibration isolator of the magnetic of a double-deck air supporting crossing decoupling and the decoupling zero of rolling joint shaft bearing angle, by upper mounting plate (1), lower installation board (2), clean compressed gas source (3), tracheae (26) and vibration isolator main body (4) form, vibration isolator main body (4) is installed between upper mounting plate (1) and the lower installation board (2), clean compressed gas source (3) is connected with vibration isolator main body (4) by tracheae (26), it is characterized in that: the structure of described vibration isolator main body (4) is lower surface and air supporting plate (34) lubricated and support by the floating thrust-bearing (24) of magnetic of sleeve (6), piston cylinder (5) back-off is installed in the sleeve (6), and with sleeve (6) by radially carry cylinder air bearing surface (22) lubricated with support, rolling joint shaft bearing (7) is installed between piston cylinder (5) and the upper mounting plate (1), the lower surface of X-direction air-float guide rail (29) and air supporting plate (34) are rigidly connected, sleeve (6) lubricates and guiding by X-direction guide rail air bearing surface (31) with X-direction air-float guide rail (29), the lower surface of Y-direction air-float guide rail (30) and lower installation board (2) are rigidly connected, air supporting plate (34) lubricates by Z-direction bearing air-float face (33) with lower installation board (2) and supports, and air supporting plate (34) lubricates and guiding by Y-direction guide rail air bearing surface (32) with Y-direction air-float guide rail (30); Z-direction voice coil motor (10), Z-direction displacement transducer (13) and Z-direction limit switch (16) are installed between piston cylinder (5) and the sleeve (6), X-direction voice coil motor (8), X-direction displacement transducer (11), X-direction limit switch (14) is installed between sleeve (6) and the air supporting plate (34), Y-direction voice coil motor (9), Y-direction displacement transducer (12), Y-direction limit switch (15) is installed between air supporting plate (34) and the lower installation board (2), the driving force direction of Z-direction voice coil motor (10) is vertical direction, the driving force direction of X-direction voice coil motor (8) and Y-direction voice coil motor (9) in horizontal plane and mutually vertical, X, Y, Z-direction displacement transducer (11,12,13) and X, Y, Z-direction limit switch (14,15,16) line of action direction and X, Y, Z-direction voice coil motor (8,9,10) driving force direction is consistent; X, Y, Z-direction displacement transducer (11,12,13) are connected Y, Z-direction limit switch (14,15,16) and are connected with the signal input part of controller (19) respectively with X, the signal output part of controller (19) is connected with the signal input part of driver (20), and the signal output part of driver (20) is connected with X, Y, Z-direction voice coil motor (8,9,10) respectively.
2. the magnetic of double-deck air supporting crossing decoupling according to claim 1 and the decoupling zero of rolling joint shaft bearing angle floats vibration isolator, it is characterized in that: be provided with gas pressure sensor (17) in the described piston cylinder (5), piston cylinder (5) is provided with suction port (23) and solenoid valve (18), gas pressure sensor (17) is connected with the signal input part of controller (19), and the signal output part of driver (20) is connected with solenoid valve (18).
3. the magnetic of double-deck air supporting crossing decoupling according to claim 1 and the decoupling zero of rolling joint shaft bearing angle floats vibration isolator, it is characterized in that: the configuration mode that described magnetic floats thrust-bearing (24) is to be provided with permanent magnet (24a) at sleeve (6) bottom surface sidewall, at the relatively equipped electromagnetic coil (24b) of lower installation board upper surface sidewall, it is 0.01mm~1mm that magnetic floats gap (21) thickness.
4. the magnetic of double-deck air supporting crossing decoupling according to claim 1 and the decoupling zero of rolling joint shaft bearing angle floats vibration isolator, and it is characterized in that: described X, Y, Z-direction voice coil motor (8,9,10) are cylinder type voice coil motor or plate voice coil motor.
5. the magnetic of double-deck air supporting crossing decoupling according to claim 1 and the decoupling zero of rolling joint shaft bearing angle floats vibration isolator, and it is characterized in that: described X-direction air-float guide rail (29) and Y-direction air-float guide rail (30) are single rail structure or two guide rail structure.
6. the magnetic of double-deck air supporting crossing decoupling according to claim 1 and the decoupling zero of rolling joint shaft bearing angle floats vibration isolator, it is characterized in that: described X, Y, Z-direction displacement transducer (11,12,13) are grating scale, magnetic railings ruler, appearance grid chi or linear potentiometer.
7. the magnetic of double-deck air supporting crossing decoupling according to claim 1 and the decoupling zero of rolling joint shaft bearing angle floats vibration isolator, and it is characterized in that: described X, Y, Z-direction limit switch (14,15,16) are mechanical type limit switch, Hall-type limit switch or photoelectric limit switch.
8. the magnetic of double-deck air supporting crossing decoupling according to claim 1 and the decoupling zero of rolling joint shaft bearing angle floats vibration isolator, and it is characterized in that: the interior gas pressure of described piston cylinder (5) is 0.1MPa~0.8MPa.
CN201210574688.5A 2012-12-19 2012-12-19 Double-layer orthogonal air floatation decoupling and rolling knuckle bearing angular decoupling magnetic levitation vibration isolator Active CN103047344B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201210574688.5A CN103047344B (en) 2012-12-19 2012-12-19 Double-layer orthogonal air floatation decoupling and rolling knuckle bearing angular decoupling magnetic levitation vibration isolator

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201210574688.5A CN103047344B (en) 2012-12-19 2012-12-19 Double-layer orthogonal air floatation decoupling and rolling knuckle bearing angular decoupling magnetic levitation vibration isolator

Publications (2)

Publication Number Publication Date
CN103047344A true CN103047344A (en) 2013-04-17
CN103047344B CN103047344B (en) 2015-07-08

Family

ID=48060114

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201210574688.5A Active CN103047344B (en) 2012-12-19 2012-12-19 Double-layer orthogonal air floatation decoupling and rolling knuckle bearing angular decoupling magnetic levitation vibration isolator

Country Status (1)

Country Link
CN (1) CN103047344B (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108732941A (en) * 2018-05-31 2018-11-02 青岛理工大学 A kind of control system and emulation mode of multidimensional magnetic levitation vibration isolation platform

Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5844664A (en) * 1995-05-30 1998-12-01 U.S. Philips Corporation Positioning device with a force actuator system for compensating center-of-gravity displacements, and lithographic device provided with such a positioning device
WO1999022272A1 (en) * 1997-10-23 1999-05-06 Koninklijke Philips Electronics N.V. Lithographic pneumatic support device with controlled gas supply
US20040065517A1 (en) * 2002-10-08 2004-04-08 Watson Douglas C. Vibration isolator with low lateral stiffness
US20050018160A1 (en) * 2003-06-13 2005-01-27 Asml Netherlands B.V. Supporting device, lithographic apparatus, and device manufacturing method employing a supporting device, and a position control system arranged for use in a supporting device
EP1803965A2 (en) * 2005-12-30 2007-07-04 Integrated Dynamics Engineering GmbH Insulation geometry of a vibration insulation system
CN101398636A (en) * 2008-09-17 2009-04-01 华中科技大学 Precision vibration damping assembly and vibration damping platform composed of the assembly
CN201604761U (en) * 2009-11-27 2010-10-13 重庆建设摩托车股份有限公司 Beach vehicle rear shock absorber joint structure
CN102543217A (en) * 2012-01-20 2012-07-04 澳门大学 Macro-micro driven bidimensional integrated micro positioning platform
CN102734379A (en) * 2012-06-09 2012-10-17 哈尔滨工业大学 Active vibration isolating device based on composite support of electromagnetism and static-pressure air floatation

Patent Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5844664A (en) * 1995-05-30 1998-12-01 U.S. Philips Corporation Positioning device with a force actuator system for compensating center-of-gravity displacements, and lithographic device provided with such a positioning device
WO1999022272A1 (en) * 1997-10-23 1999-05-06 Koninklijke Philips Electronics N.V. Lithographic pneumatic support device with controlled gas supply
US20040065517A1 (en) * 2002-10-08 2004-04-08 Watson Douglas C. Vibration isolator with low lateral stiffness
US20050018160A1 (en) * 2003-06-13 2005-01-27 Asml Netherlands B.V. Supporting device, lithographic apparatus, and device manufacturing method employing a supporting device, and a position control system arranged for use in a supporting device
EP1803965A2 (en) * 2005-12-30 2007-07-04 Integrated Dynamics Engineering GmbH Insulation geometry of a vibration insulation system
CN101398636A (en) * 2008-09-17 2009-04-01 华中科技大学 Precision vibration damping assembly and vibration damping platform composed of the assembly
CN201604761U (en) * 2009-11-27 2010-10-13 重庆建设摩托车股份有限公司 Beach vehicle rear shock absorber joint structure
CN102543217A (en) * 2012-01-20 2012-07-04 澳门大学 Macro-micro driven bidimensional integrated micro positioning platform
CN102734379A (en) * 2012-06-09 2012-10-17 哈尔滨工业大学 Active vibration isolating device based on composite support of electromagnetism and static-pressure air floatation

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108732941A (en) * 2018-05-31 2018-11-02 青岛理工大学 A kind of control system and emulation mode of multidimensional magnetic levitation vibration isolation platform

Also Published As

Publication number Publication date
CN103047344B (en) 2015-07-08

Similar Documents

Publication Publication Date Title
US7293337B2 (en) Machining apparatus
US7959141B2 (en) Stage apparatus
CN102943839B (en) Precision positioning vibration isolation platform
CN1306247C (en) Macro/micro driven large travel high-speed nano-precision plane positioning system
US9145945B2 (en) Active vibration isolation device based on electromagnetic and aerostatic floatation
US20190341837A1 (en) Electrodynamic actuator and electrodynamic excitation device
JP6253778B2 (en) Halbach array and magnetic floating damper employing the Halbach array
US7036408B2 (en) Lenslathe with vibration cancelling arrangement
CN101270988B (en) Multi-shaft inertial sensor and method for measuring multi-shaft translation and rotation acceleration
CN104033535B (en) A kind of three-dimensional vibration isolating device being applicable to low-frequency vibration
US10661399B2 (en) Single-drive rigid-flexible coupling precision motion platform and realization method and application thereof
KR0166987B1 (en) Weight supporting apparatus
CN101364052B (en) Active vibration damping system and forecast control method thereof
WO2011113347A1 (en) Nanometer-precision six-degree-of-freedom magnetic suspension micro-motion table and application thereof
WO2015018236A1 (en) Six-degree-of-freedom active vibration isolation apparatus
CN101382178B (en) Active vibration damping and vibration isolating device and active vibration damping and vibration isolating system
CN103592824B (en) Two-degree-of-freedom high-precision large-stroke air-bearing workpiece platform
WO2009003348A1 (en) Micro displacement worktable with six degrees of freedom
CN104105941A (en) Coordinate measuring machine with constrained counterweight
JPH10259851A (en) Active vibration isolation device
CN100535631C (en) Air-float magneto motive friction-free suspension device
CN103291832B (en) Magnetic levitation vibration isolation platform
TW200305194A (en) Method, system, and apparatus for management of reaction loads in a lithography system
Hoque et al. Development of a three-axis active vibration isolator using zero-power control
CN102223984A (en) Bearing arrangement having a magnetic bearing segment, and method for controlling a or the bearing arrangement

Legal Events

Date Code Title Description
C06 Publication
PB01 Publication
C10 Entry into substantive examination
SE01 Entry into force of request for substantive examination
C14 Grant of patent or utility model
GR01 Patent grant