CN103047351B - Magnetic suspension zero-stiffness vibration isolator with coplanar air floatation orthogonal decoupling function and angular decoupling function by aid of flexible membrane - Google Patents
Magnetic suspension zero-stiffness vibration isolator with coplanar air floatation orthogonal decoupling function and angular decoupling function by aid of flexible membrane Download PDFInfo
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Abstract
The invention discloses a magnetic suspension zero-stiffness vibration isolator with a coplanar air floatation orthogonal decoupling function and an angular decoupling function by the aid of a flexible membrane, and belongs to the technical field of precision vibration isolation. Space between a sleeve of a vibration isolator body and a lower mounting plate is lubricated and supported by a magnetic suspension thrust bearing, the degree of freedom of horizontal linear movement between an upper mounting plate and the lower mounting plate is decoupled by coplanar orthogonal air floatation guide rails, the degree of freedom of angular movement between the upper mounting plate and the lower mounting plate is decoupled by the flexible membrane, and voice coil motors, displacement sensors, limit switches, a controller and a driver form a position closed-loop feedback control system to precisely control relative positions of the upper mounting plate and the lower mounting plate. The magnetic suspension zero-stiffness vibration isolator has the advantages of zero three-dimensional stiffness, high positioning precision and capabilities of sufficiently decoupling the degree of freedom of linear movement and sufficiently decoupling the degree of freedom of angular movement, and can effectively realize high-performance vibration isolation for ultra-precision measuring instruments and processing equipment, and particularly for step-scan lithography machines.
Description
Technical field
The invention belongs to accurate vibration isolation technical field, relate generally to the floating zero stiffness vibration isolator of magnetic of a kind of coplanar air supporting crossing decoupling and the decoupling zero of flexible membrane angle.
Background technique
Along with improving constantly of ultraprecise processing and measuring accuracy, ambient vibration becomes the key factor that restriction ultraprecise process unit and surveying instrument precision and performance improve.Especially the vlsi circuit process unit that step-by-step scanning photo-etching device is representative, technology-intensive degree and complexity are high, key technical index has all reached the limit of prior art, represented the highest level of ultraprecise process unit, ultraprecise vibration isolation becomes the core key technology in this type of equipment; The live width of step-by-step scanning photo-etching device has reached 22nm and following, silicon chip positioning precision and alignment precision all reach several nanometers, and more than work stage movement velocity reaches 1m/s, work stage acceleration reaches tens times of gravity accleration, this has proposed new challenge to existing vibration isolation technique.First, lithography machine need to provide for metering system and photoetched object lens the working environment of " super quiet ", simultaneously again demand motive work stage at full speed with High acceleration motion, this anti-vibration performance to vibrating isolation system has proposed extremely harsh requirement, and the natural frequency of its three directions all needs to reach below 1Hz; Secondly, relative position between each parts of lithography machine, the distance of photoetched object lens and silicon chip surface for example, all there is very strict requirement, and under the control in position closed loop feedback control system, require the relative positional accuracy between the upper and lower mounting plate of vibration isolator to reach 10 μ m magnitudes, the positioning precision of traditional vibration isolator can not meet the demands far away.
According to theory of vibration isolation, the natural frequency of passive type vibration isolator is directly proportional to rigidity, is inversely proportional to load quality, therefore under the certain prerequisite of load quality, the rigidity that reduces vibration isolator is the effective way that reduces natural frequency, improves low frequency and superlow frequency vibration isolating performance.There are the intrinsic contradictions of static bearing capacity and rigidity in the vibration isolator of the forms such as conventional air spring, restricted by the factors such as material behavior, structural rigidity, further reduce its rigidity, especially level very difficult to rigidity.For this problem, researcher is incorporated into " pendulum " formula structure in air cushion shock absorber, reaches object (the 1.Nikon Corporation.Vibration Isolator With Low Lateral Stiffness. U.S. Patent Publication No.: US20040065517A1 that reduces vibration isolator horizontal rigidity; 2.U.S.Philips Corporation.Positioning Device with a Force Actuator Systemfor Compensating Center-of-gravity Displacements, and Lithographic Device Provided with Such APositioning Device. U.S. Patent number: US005844664A).The method can reduce the horizontal rigidity of air cushion shock absorber to a certain extent, promotes its low frequency vibration isolation performance.The problem that the method exists is: restricted by material behavior and structural rigidity, vibration isolator is vertical limited to the amplitude of stiffness degradation with level; 2) the vertical and level of air cushion shock absorber is all very poor to positioning precision, cannot meet the requirement of photoetching process; 3) will reach lower horizontal rigidity needs larger pendulum length, causes vibration isolator height excessive, string membrane resonance easily occurs, poor stability.
By visible to the analysis of existing air cushion shock absorber technological scheme, existing air cushion shock absorber is difficult to meet the requirement of lithography machine to ultralow rigidity and high position precision.Germany IDE company has proposed a kind of vibration isolator technological scheme (1.Integrated Dynamics Engineering GmbH.Isolatorgeometrie EinesSchwingungsisolationssystem. european patent number: EP1803965A2 of abandoning tradition rubber air spring; 2.Integrated Dynamics EngineeringGmbH.Schwingungsisolationssystem Mit Pneumatischem Tiefpassfilter. european patent number: EP1803970A2; 3.Integrated Dynamics Engineering GmbH.Air Bearing with Consideration ofHigh-Frequency Resonances. U.S. Patent Publication No.: US20080193061A1).This scheme adopts vertically carries out decoupling zero and vibration isolation to air bearing surface to the vibration of all directions with level, can reach extremely low rigidity and natural frequency.The problem that this scheme exists is: 1) in public technology scheme, vibration isolator cannot be realized accurate location; 2) in patent EP1803965A2, do not have the angular motion degrees of freedom around horizontal rotational shaft between upper and lower mounting plate, the angular rigidity of this direction and natural frequency are all very high; Patent EP1803970A2 and US20080193061A1 adopt block rubber to provide the angular motion degrees of freedom around horizontal rotational shaft for upper and lower mounting plate, but because block rubber angular rigidity is very large, cannot effectively carry out angular motion freedom decoupling, between angular motion freedom decoupling mechanism components, there is frictional force and introduce additional stiffness, restriction anti-vibration performance.
Holland ASML company has also proposed similar vibration isolator technological scheme (1.U.S.Philips Corp, ASM LithographyB.V.Pneumatic Support Device with A Controlled Gas Supply, and Lithographic Device Providedwith Such A Support Device. U.S. Patent number: US006144442A; 2.Koninklijke Philips ElectronicsN.V., ASM Lithography B.V.Lithographic Pneumatic Support Device with Controlled Gas Supply. International Patent Publication No.: WO99/22272; 3.ASML Netherlands B.V.Support Device, LithographicApparatus, and Device Manufacturing Method Employing A Supporting Device, and A PositionControl System Arranged for Use in A Supporting Device. U.S. Patent number: US007084956B2; 4.ASML Netherlands B.V.Support Device, Lithographic Apparatus, and Device ManufacturingMethod Employing A Supporting Device and A Position Control System Arranged for Use in ASupporting Device. european patent number: EP1486825A1).In patent US006144442A and WO99/22272, bleed pressure is carried out to closed-loop feedback control, reach and improve the stability of vibration isolator and the object of performance; In patent US007084956B2 and EP1486825A1, on upper mounting plate, be provided with vibration transducer, introduce with reference to vibration system simultaneously, by control algorithm, promote the anti-vibration performance of vibration isolator.But the technological scheme that proposes still do not solve the accurate location of vibration isolator and the angular motion freedom decoupling problem of upper and lower mounting plate.
Summary of the invention
The object of the invention is for ultra precise measurement instrument and process unit, especially the vlsi circuit process unit such as step-by-step scanning photo-etching device is to the low natural frequency of vibration isolator, the an urgent demand of high position precision, the floating zero stiffness vibration isolator of magnetic of a kind of coplanar air supporting crossing decoupling and the decoupling zero of flexible membrane angle is provided, vibration isolator has three-dimensional approximate zero rigidity and extremely low natural frequency, on, between lower installation board, can accurately locate and 3 d-line freedom of movement, the abundant decoupling zero of angular motion degrees of freedom, thereby can effectively solve ultra precise measurement instrument and process unit, especially the accurate vibration isolation problem in step-by-step scanning photo-etching device.
The object of the present invention is achieved like this:
The floating zero stiffness vibration isolator of magnetic of a kind of coplanar air supporting crossing decoupling and the decoupling zero of flexible membrane angle, by upper mounting plate, lower installation board, clean compressed gas source, tracheae and vibration isolator main body form, vibration isolator main body is arranged between upper mounting plate and lower installation board, clean compressed gas source is connected with vibration isolator main body by tracheae, the structure of described vibration isolator main body is: the lower surface of sleeve and lower installation board float thrust-bearing by magnetic and lubricate and support, flexible membrane is arranged on the upper end of sleeve, and compress and sealing by trim ring, the top board of pressing plate assembly and press table are coaxially relative is fitted to the upper of flexible membrane, lower surface, and clamp flexible membrane, upper surface and the upper mounting plate of top board are rigidly connected, sleeve and X-direction air-float guide rail be lubricated and guiding by X-direction guide rail air bearing surface, X-direction air-float guide rail and lower installation board be lubricated and support by Z-direction bearing air-float face, Y-direction air-float guide rail and lower installation board are rigidly connected, the two ends of X-direction air-float guide rail and Y-direction air-float guide rail be lubricated and guiding by Y-direction guide rail air bearing surface, Z-direction voice coil motor, Z-direction displacement transducer and Z-direction limit switch are arranged between pressing plate assembly and sleeve, X-direction voice coil motor, X-direction displacement transducer, X-direction limit switch and Y-direction voice coil motor, Y-direction displacement transducer, Y-direction limit switch is arranged between sleeve and lower installation board, the driving force direction of Z-direction voice coil motor is vertical direction, the driving force direction of X-direction voice coil motor and Y-direction voice coil motor is in horizontal plane and mutually vertical, X, Y, Z-direction displacement transducer and X, Y, line of action direction and the X of Z-direction limit switch, Y, the driving force direction of Z-direction voice coil motor is consistent, X, Y, Z-direction displacement transducer and X, Y, Z-direction limit switch are connected with the signal input part of controller respectively, and the signal output part of controller is connected with the signal input part of driver, and the signal output part of driver is connected with X, Y, Z-direction voice coil motor respectively.
In described sleeve, be provided with gas pressure sensor, sleeve is provided with suction port and solenoid valve, and gas pressure sensor is connected with the signal input part of controller, and the signal output part of driver is connected with solenoid valve.
The configuration mode of the floating thrust-bearing of described magnetic is to be provided with permanent magnet at sleeve bottom surface sidewall, and at the relatively equipped electromagnetic coil of lower installation board upper surface sidewall, the floating gap thickness of magnetic is 0.01mm～1mm.
Described X, Y, Z-direction voice coil motor are cylinder type voice coil motor or plate voice coil motor.
Described X-direction air-float guide rail and Y-direction air-float guide rail are single rail structure or two guide rail structure.
Described X, Y, Z-direction displacement transducer are grating scale, magnetic railings ruler, appearance grid chi or linear potentiometer.
Described X, Y, Z-direction limit switch are mechanical type limit switch, Hall-type limit switch or photoelectric limit switch.
Described flexible membrane is rubber membrane.
In described sleeve, gas pressure is 0.1MPa～0.8MPa.
The good result of technological innovation of the present invention and generation is:
(1) the present invention adopts the floating thrust-bearing of magnetic to isolate Horizontal Vibration, the floating thrust-bearing of magnetic is without friction, without wearing and tearing, rigidity is approximately zero, can make vibration isolator obtain substantially horizontal approximate zero stiffness characteristics and outstanding superlow frequency vibration isolating performance, having solved prior art limited by structural rigidity, material behavior, vibration isolator horizontal rigidity is difficult to further reduction, the problem that rigidity and stability can not be taken into account.This is that the present invention is different from one of innovative point of prior art.
(2) the present invention adopts displacement transducer, limit switch, controller, driver and voice coil motor etc. to form position closed loop feedback control system, relative position between upper and lower mounting plate is accurately controlled, positioning precision can reach 10 μ m levels and more than, the problem that can effectively solve that prior art scheme positioning precision is low, positioning precision and rigidity, anti-vibration performance can not be taken into account.This is two of the present invention's innovative point of being different from prior art.
(3) the present invention adopts coplanar quadrature air-float guide rail to carry out decoupling zero to the horizontal rectilinear motion degrees of freedom between the upper and lower mounting plate of vibration isolator, air-float guide rail is without friction and wear, do not introduce additional stiffness, decoupling zero is effective, can make vibration isolator obtain high position precision and substantially horizontal zero stiffness characteristic; Adopt flexible membrane diagonal motion degrees of freedom to carry out decoupling zero, introduce additional angular rigidity less, the technological scheme that can effectively solve the decoupling zero of existing employing elastomer is introduced the problem of larger additional stiffness.This is three of the present invention's innovative point of being different from prior art.
(4) the present invention adopts gas pressure sensor, solenoid valve and controller, driver to form pressure closed loop feedback control system, the gas pressure of accurately controlling in sleeve makes it to keep constant, the thrust load of vibration isolator is carried out to gravitational equilibrium and compensation, near flexible membrane rigidity equilibrium position is approximately zero, the upper and lower pressing plate of carry load gravity can slide by approximate zero rigidity easy on and off, thus the gravity compensation of realizing ideal and zero stiffness vibration isolating effect.This is four of the present invention's innovative point of being different from prior art.
(5) the present invention adopts active actuators to carry out ACTIVE CONTROL to the relative position between upper and lower mounting plate, vibration isolator parameter can be according to being changed adjusting in real time by vibration isolation features of the object and working environment, thereby adapt to different operating modes, there is good flexibility, adaptability and stability.This is five of the present invention's innovative point of being different from prior art.
Accompanying drawing explanation
Fig. 1 floats the structural representation of zero stiffness vibration isolator for removing coplanar air supporting crossing decoupling after upper mounting plate and the magnetic of flexible membrane angle decoupling zero;
Fig. 2 is the cross-sectional view of the floating zero stiffness vibration isolator of magnetic of coplanar air supporting crossing decoupling and the decoupling zero of flexible membrane angle;
Fig. 3 is the schematic diagram of floating gap, X-direction guide rail air bearing surface and Z-direction bearing air-float face of magnetic;
Fig. 4 is the schematic diagram of Y-direction guide rail air bearing surface;
Fig. 5 is tube-in-tube structure schematic diagram;
Fig. 6 is the control structure block diagram of the floating zero stiffness vibration isolator of magnetic of coplanar air supporting crossing decoupling and the decoupling zero of flexible membrane angle.
Piece number explanation in figure: 1 upper mounting plate, 2 lower installation boards, 3 clean compressed gas sources, 4 vibration isolator main bodys, 5 flexible membranes, 6 sleeves, 7 pressing plate assemblies, 7a top board, 7b press table, 8X is to voice coil motor, 8a X-direction motor iron yoke, 8b X-direction magnetic steel of motor, 8c X-direction motor coil skeleton, 8d X-direction motor coil, 9Y is to voice coil motor, 10Z is to voice coil motor, 10a Z-direction motor iron yoke, 10b Z-direction magnetic steel of motor, 10c Z-direction motor coil skeleton, 10d Z-direction motor coil, 10e Z-direction motor transitional part, 11X is to displacement transducer, 11a X-direction grating reading head transition piece, 11b X-direction grating reading head, 11c X-direction glass raster chi, 12Y is to displacement transducer, 13Z is to displacement transducer, 13a Z-direction grating reading head transition piece, 13b Z-direction grating reading head, 13c Z-direction glass raster chi, 14X is to limit switch, 14aX is to limiting stopper, 14b X-direction Hall switch, 14c X-direction limit switch transition piece, 14dX is to limiting stopper transition piece, 15Y is to limit switch, 16Z is to limit switch, 16aZ is to limiting stopper, 16b Z-direction Hall switch, 16c Z-direction limit switch transition piece, 17 gas pressure sensors, 18 solenoid valves, 19 controllers, 20 drivers, 21 magnetic float gap, 22 trim rings, 23 suction ports, 24 magnetic float thrust-bearing, 24a permanent magnet, 24b electromagnetic coil, 26 tracheaes, 29X is to air-float guide rail, 30Y is to air-float guide rail, 31X direction guiding rail air bearing surface, 32Y direction guiding rail air bearing surface, 33Z is to bearing air-float face.
Embodiment
Below in conjunction with accompanying drawing, provide specific embodiments of the invention.
The floating zero stiffness vibration isolator of magnetic of a kind of coplanar air supporting crossing decoupling and the decoupling zero of flexible membrane angle, by upper mounting plate 1, lower installation board 2, clean compressed gas source 3, tracheae 26 and vibration isolator main body 4 form, vibration isolator main body 4 is arranged between upper mounting plate 1 and lower installation board 2, clean compressed gas source 3 is connected with vibration isolator main body 4 by tracheae 26, the structure of described vibration isolator main body 4 is: the lower surface of sleeve 6 and lower installation board 2 float thrust-bearing 24 by magnetic and lubricate and support, flexible membrane 5 is arranged on the upper end of sleeve 6, and compress and sealing by trim ring 22, the top board 7a of pressing plate assembly 7 is relative with press table 7b is fitted to the upper of flexible membrane 5, lower surface, and clamp flexible membrane 5, the upper surface of top board 7a and upper mounting plate 1 are rigidly connected, sleeve 6 lubricates and guiding by X-direction guide rail air bearing surface 31 with X-direction air-float guide rail 29, X-direction air-float guide rail 29 and lower installation board 2 lubricated and support by Z-direction bearing air-float face 33, Y-direction air-float guide rail 30 is rigidly connected with lower installation board 2, the two ends of X-direction air-float guide rail 29 and Y-direction air-float guide rail 30 be lubricated and guiding by Y-direction guide rail air bearing surface 32, Z-direction voice coil motor 10, Z-direction displacement transducer 13 and Z-direction limit switch 16 are arranged between pressing plate assembly 7 and sleeve 6, X-direction voice coil motor 8, X-direction displacement transducer 11, X-direction limit switch 14 and Y-direction voice coil motor 9, Y-direction displacement transducer 12, Y-direction limit switch 15 is arranged between sleeve 6 and lower installation board 2, the driving force direction of Z-direction voice coil motor 10 is vertical direction, the driving force direction of X-direction voice coil motor 8 and Y-direction voice coil motor 9 is in horizontal plane and mutually vertical, X, Y, Z- direction displacement transducer 11, 12, 13 and X, Y, Z- direction limit switch 14, 15, 16 line of action direction and X, Y, Z-direction voice coil motor 8, 9, 10 driving force direction is consistent, X, Y, Z- direction displacement transducer 11,12,13 and X, Y, Z- direction limit switch 14,15,16 are connected with the signal input part of controller 19 respectively, the signal output part of controller 19 is connected with the signal input part of driver 20, and the signal output part of driver 20 is connected with X, Y, Z-direction voice coil motor 8,9,10 respectively.
The displacement of X, Y, Z- direction displacement transducer 11,12,13 couples of X, Y, 8,9,10 outputs of Z-direction voice coil motor is measured, and the stroke of X, Y, Z- direction limit switch 14,15,16 couples of X, Y, 8,9,10 motions of Z-direction voice coil motor limits; Controller 19 is according to the feedback signal of X, Y, Z- direction displacement transducer 11,12,13 and X, Y, Z- direction limit switch 14,15,16, and the relative position of controlling between X, Y, 8,9,10 pairs of upper and lower mounting plates 1,2 of Z-direction voice coil motor is accurately controlled.
In described sleeve 6, be provided with gas pressure sensor 17, sleeve 6 is provided with suction port 23 and solenoid valve 18, and gas pressure sensor 17 is connected with the signal input part of controller 19, and the signal output part of driver 20 is connected with solenoid valve 18.
The configuration mode of the floating thrust-bearing 24 of described magnetic is to be provided with permanent magnet 24a at sleeve 6 bottom surface sidewalls, and at the relatively equipped electromagnetic coil 24b of lower installation board upper surface sidewall, the floating gap of magnetic 21 thickness are 0.01mm～1mm.
Described X, Y, Z-direction voice coil motor 8,9,10 are cylinder type voice coil motor or plate voice coil motor.
Described X-direction air-float guide rail 29 and Y-direction air-float guide rail 30 are single rail structure or two guide rail structure.
Described X, Y, Z- direction displacement transducer 11,12,13 are grating scale, magnetic railings ruler, appearance grid chi or linear potentiometer.
Described X, Y, Z- direction limit switch 14,15,16 are mechanical type limit switch, Hall-type limit switch or photoelectric limit switch.
Described flexible membrane 5 is rubber membrane.
The interior gas pressure of described sleeve 6 is 0.1MPa～0.8MPa.
Below in conjunction with Fig. 1～Fig. 6, provide one embodiment of the present of invention.In the present embodiment, in vibration isolator when work,, lower installation board 2 is arranged on the pedestal or basic framework of ground, instrument, upper mounting plate 1 with by the load of vibration isolation, be connected.X, Y, Z-direction voice coil motor 8,9,10 all adopt cylinder type voice coil motor.Take X-direction voice coil motor 8 as example, and it mainly comprises X-direction motor iron yoke 8a, X-direction magnetic steel of motor 8b, X-direction motor coil skeleton 8c, X-direction motor coil 8d.X-direction motor iron yoke 8a and X-direction motor coil skeleton 8c are cylindrical shape, and X-direction magnetic steel of motor 8b is cylindrical, and X-direction motor coil 8d is around on X-direction motor coil skeleton 8c.X-direction motor iron yoke 8a and X-direction magnetic steel of motor 8b form the stator of motor, and X-direction motor coil skeleton 8c and X-direction motor coil 8d form the mover of motor.In Z-direction voice coil motor 10, Z-direction motor transitional part 10e provides the mounting structure of Z-direction motor coil skeleton 10c.During machine operation, in coil, pass to electric current, according to electromagnetic theory, hot-wire coil can be subject to the effect of voice coil loudspeaker voice coil power in magnetic field, can control the size and Orientation of motor output drive strength by controlling the size and Orientation of electric current.
In the present embodiment, flexible membrane 5, trim ring 22 with the mounting type of sleeve 6 is: thread mill drilling along the circumferential direction on sleeve 6, on trim ring 22, flexible membrane 5, along the circumferential direction process through hole, adopt screw that trim ring 22 is compressed to flexible membranes 5 and be assemblied on sleeve 6, utilize the elasticity of flexible membrane 5 materials to play the effect of sealing.The mounting type of top board 7a, press table 7b and flexible membrane 5 is similar with it.
X, Y, Z- direction displacement transducer 11,12,13 adopt grating scale.Take Z-direction displacement transducer 13 as example, and it mainly comprises the parts such as Z-direction grating reading head transition piece 13a, Z-direction grating reading head 13b and Z-direction glass raster chi 13c, and Z-direction grating reading head transition piece 13a provides the mounting structure of Z-direction grating reading head 13b.In grating scale when work,, Z-direction grating reading head 13b can detect the relative displacement of itself and Z-direction glass raster chi 13c, and gives controller 19 by signal conductor.
X, Y, Z- direction limit switch 14,15,16 adopt Hall-type limit switch.Take Z-direction limit switch 16 as example, and it mainly comprises the parts such as Z-direction limiting stopper 16a, Z-direction Hall switch 16b and Z-direction limit switch transition piece 16c.Two Z-direction Hall switch 16b install back-to-back, and two Z-direction limiting stopper 16a are metallic material, with relative installation of sensitivity end of Z-direction Hall switch 16b.Z-direction limit switch transition piece 16c provides the mounting structure of Z-direction Hall switch 16b.During limit switch work, when Z-direction Hall switch 16b approaches Z-direction limiting stopper 16a, Z-direction Hall switch 16b provides limit signal, and gives controller 19 by signal conductor.
In the present embodiment, Z-direction voice coil motor 10, Z-direction displacement transducer 13 and Z-direction limit switch 16 are installed in the inside of sleeve 6.
Vibration isolator is realized in the following way to the carrying of load: clean compressed gas source 3 by tracheae 26, through solenoid valve 18, suction port 23 to the interior conveying clean compressed air of sleeve 6.Controller 19 is according to the feedback signal of gas pressure sensor 17, control the aperture of solenoid valve 18, adjusting is input to the gas flow in sleeve 6, thereby the pressure of regulating sleeve 6 interior clean compressed airs, balances each other the gravity of active force that clean compressed air makes progress to pressing plate assembly 7 and flexible membrane 5 and load and pressing plate assembly 7, the gravity that loads on other component on pressing plate assembly 7.In the equilibrium position of flexible membrane 5, the vertical stiffness of flexible membrane 5 is approximately zero, and lateral stiffness is very large with respect to the lateral stiffness of the floating thrust-bearing 24 of magnetic.Therefore, sleeve 6 can vertically move up and down with approximate zero rigidity near the equilibrium position of flexible membrane 5, thereby has outstanding superlow frequency vibration isolating performance.
In the present embodiment, the pressure of sleeve 6 interior clean compressed airs is 0.4MPa, and the effective radius of press table 7b and flexible membrane 5 lower surfaces is 100mm, and the quality of single vibration isolator carrying is: m=p * π r
2/ g ≈ 1282kg, wherein p is gas pressure intensity, p=0.4MPa, r is the effective radius of press table 7b and flexible membrane 5 lower surfaces, r=100mm, g is gravity accleration, g=9.8m/s
2.
Claims (9)
1. the floating zero stiffness vibration isolator of the magnetic of a coplanar air supporting crossing decoupling and the decoupling zero of flexible membrane angle, by upper mounting plate (1), lower installation board (2), clean compressed gas source (3), tracheae (26) and vibration isolator main body (4) form, vibration isolator main body (4) is arranged between upper mounting plate (1) and lower installation board (2), clean compressed gas source (3) is connected with vibration isolator main body (4) by tracheae (26), it is characterized in that: the structure of described vibration isolator main body (4) be the lower surface of sleeve (6) and lower installation board (2) by magnetic float thrust-bearing (24) lubricated with support, flexible membrane (5) is arranged on the upper end of sleeve (6), and compress and sealing by trim ring (22), the top board (7a) of pressing plate assembly (7) is relative with press table (7b) is fitted to the upper of flexible membrane (5), lower surface, and clamp flexible membrane (5), the upper surface of top board (7a) and upper mounting plate (1) are rigidly connected, sleeve (6) lubricates and guiding by X-direction guide rail air bearing surface (31) with X-direction air-float guide rail (29), X-direction air-float guide rail (29) and lower installation board (2) lubricated and support by Z-direction bearing air-float face (33), Y-direction air-float guide rail (30) is rigidly connected with lower installation board (2), the two ends of X-direction air-float guide rail (29) and Y-direction air-float guide rail (30) be lubricated and guiding by Y-direction guide rail air bearing surface (32), Z-direction voice coil motor (10), Z-direction displacement transducer (13) and Z-direction limit switch (16) are arranged between pressing plate assembly (7) and sleeve (6), X-direction voice coil motor (8), X-direction displacement transducer (11), X-direction limit switch (14) and Y-direction voice coil motor (9), Y-direction displacement transducer (12), Y-direction limit switch (15) is arranged between sleeve (6) and lower installation board (2), the driving force direction of Z-direction voice coil motor (10) is vertical direction, the driving force direction of X-direction voice coil motor (8) and Y-direction voice coil motor (9) is in horizontal plane and mutually vertical, X, Y, Z-direction displacement transducer (11, 12, 13) and X, Y, Z-direction limit switch (14, 15, 16) line of action direction and X, Y, Z-direction voice coil motor (8, 9, 10) driving force direction is consistent, X, Y, Z-direction displacement transducer (11,12,13) and X, Y, Z-direction limit switch (14,15,16) are connected with the signal input part of controller (19) respectively, the signal output part of controller (19) is connected with the signal input part of driver (20), and the signal output part of driver (20) is connected with X, Y, Z-direction voice coil motor (8,9,10) respectively.
2. the magnetic of coplanar air supporting crossing decoupling according to claim 1 and the decoupling zero of flexible membrane angle floats zero stiffness vibration isolator, it is characterized in that: in described sleeve (6), be provided with gas pressure sensor (17), sleeve (6) is provided with suction port (23) and solenoid valve (18), gas pressure sensor (17) is connected with the signal input part of controller (19), and the signal output part of driver (20) is connected with solenoid valve (18).
3. the magnetic of coplanar air supporting crossing decoupling according to claim 1 and the decoupling zero of flexible membrane angle floats zero stiffness vibration isolator, it is characterized in that: the configuration mode that described magnetic floats thrust-bearing (24) is to be provided with permanent magnet (24a) at sleeve (6) bottom surface sidewall, at the relatively equipped electromagnetic coil (24b) of lower installation board upper surface sidewall, it is 0.01mm～1mm that magnetic floats gap (21) thickness.
4. the floating zero stiffness vibration isolator of the magnetic of coplanar air supporting crossing decoupling according to claim 1 and the decoupling zero of flexible membrane angle, is characterized in that: described X, Y, Z-direction voice coil motor (8,9,10) are cylinder type voice coil motor or plate voice coil motor.
5. the floating zero stiffness vibration isolator of the magnetic of coplanar air supporting crossing decoupling according to claim 1 and the decoupling zero of flexible membrane angle, is characterized in that: described X-direction air-float guide rail (29) and Y-direction air-float guide rail (30) are single rail structure or two guide rail structure.
6. the floating zero stiffness vibration isolator of the magnetic of coplanar air supporting crossing decoupling according to claim 1 and the decoupling zero of flexible membrane angle, is characterized in that: described X, Y, Z-direction displacement transducer (11,12,13) are grating scale, magnetic railings ruler, appearance grid chi or linear potentiometer.
7. the floating zero stiffness vibration isolator of the magnetic of coplanar air supporting crossing decoupling according to claim 1 and the decoupling zero of flexible membrane angle, is characterized in that: described X, Y, Z-direction limit switch (14,15,16) are mechanical type limit switch, Hall-type limit switch or photoelectric limit switch.
8. the floating zero stiffness vibration isolator of the magnetic of coplanar air supporting crossing decoupling according to claim 1 and the decoupling zero of flexible membrane angle, is characterized in that: described flexible membrane (5) is rubber membrane.
9. the floating zero stiffness vibration isolator of the magnetic of coplanar air supporting crossing decoupling according to claim 1 and the decoupling zero of flexible membrane angle, is characterized in that: the interior gas pressure of described sleeve (6) is 0.1MPa～0.8MPa.
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| CN201210574819.XA CN103047351B (en) | 2012-12-19 | 2012-12-19 | Magnetic suspension zero-stiffness vibration isolator with coplanar air floatation orthogonal decoupling function and angular decoupling function by aid of flexible membrane |
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