CN103062303A - Magnetic levitation zero-stiffness vibration isolator and vibration isolation system for air floatation ball bearing angle decoupling - Google Patents
Magnetic levitation zero-stiffness vibration isolator and vibration isolation system for air floatation ball bearing angle decoupling Download PDFInfo
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- CN103062303A CN103062303A CN2012105747873A CN201210574787A CN103062303A CN 103062303 A CN103062303 A CN 103062303A CN 2012105747873 A CN2012105747873 A CN 2012105747873A CN 201210574787 A CN201210574787 A CN 201210574787A CN 103062303 A CN103062303 A CN 103062303A
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Abstract
The invention relates to a magnetic levitation zero-stiffness vibration isolator and a vibration isolation system for air floatation ball bearing angle decoupling and belongs to the technical field of precise vibration isolation. The magnetic levitation zero-stiffness vibration isolator is characterized in that a sleeve and a lower installation board of a vibration isolator main body are supported by a magnetic levitation thrust bearing, a piston barrel and the sleeve are lubricated and supported by an air floatation surface, and the angle motion freedom between an upper installation board and the lower installation board is decoupled through an air floatation ball bearing. A voice coil motor, a displacement sensor, a limit switch, a controller and a driver form a position closed-loop feedback control system which accurately controls the relative positions of the upper installation board and the lower installation board. The magnetic levitation zero-stiffness vibration isolator has the characteristics of three-dimensional zero-stiffness, high positioning accuracy and angle decoupling, can obtain ultra-low inherent frequency and highlighted low frequency/ultra-low frequency vibration isolation performance, and accordingly effectively solves the problem of high-performance vibration isolation of ultra precise measurement instruments and processing devices, especially stepping scanning photo-etching machines.
Description
Technical field
The invention belongs to the accurate vibration isolation technical field, relate generally to the floating zero stiffness vibration isolator of magnetic and the vibrating isolation system of a kind of air-floating ball bearing angle decoupling zero.
Background technique
Along with improving constantly of ultraprecise processing and measuring accuracy, ambient vibration becomes the key factor that restriction ultraprecise process unit and surveying instrument precision and performance improve.Especially step-by-step scanning photo-etching device is the vlsi circuit process unit of representative, technology-intensive degree and complexity are high, key technical index has all reached the limit of prior art, represented the highest level of ultraprecise process unit, the ultraprecise vibration isolation becomes the core key technology in this type of equipment; The live width of step-by-step scanning photo-etching device has reached 22nm and following, silicon chip Location accuracy and alignment precision all reach several nanometers, and the work stage movement velocity reaches more than the 1m/s, and the work stage acceleration reaches tens times of gravity accleration, and this has proposed new challenge to existing vibration isolation technique.At first, lithography machine need to provide for metering system and photoetched object lens the working environment of " super quiet ", simultaneously again the demand motive work stage at full speed with High acceleration motion, this anti-vibration performance to vibrating isolation system has proposed extremely harsh requirement, and the natural frequency of its three directions all needs to reach below the 1Hz; Secondly, relative position between each parts of lithography machine, the distance of photoetched object lens and silicon chip surface for example, all has very strict requirement, and be under the control of position closed loop feedback control system, require the relative positional accuracy between the upper and lower mounting plate of vibration isolator to reach 10 μ m magnitudes, the Location accuracy of traditional vibration isolator can not meet the demands far away.
According to theory of vibration isolation, the natural frequency of passive type vibration isolator is directly proportional with rigidity, is inversely proportional to load quality, therefore under the certain prerequisite of load quality, the rigidity that reduces vibration isolator is the effective way that reduces natural frequency, improves low frequency and superlow frequency vibration isolating performance.There are the intrinsic contradictions of static bearing capacity and rigidity in the vibration isolator of the forms such as conventional air spring, restricted by the factors such as material behavior, structural rigidity, and it is very difficult to rigidity further to reduce its rigidity, especially level.For this problem, the researcher is incorporated into " pendulum " formula structure in the air cushion shock absorber, reaches purpose (the 1.Nikon Corporation.Vibration Isolator With Low Lateral Stiffness. U.S. Patent Publication No.: US20040065517A1 that reduces the vibration isolator horizontal rigidity; 2.U.S.Philips Corporation.Positioning Device with a Force Actuator Systemfor Compensating Center-of-gravity Displacements, and Lithographic Device Provided with Such APositioning Device. U.S. Patent number: US005844664A).The method can reduce the horizontal rigidity of air cushion shock absorber to a certain extent, promotes its low frequency vibration isolation performance.The problem that the method exists is: restricted by material behavior and structural rigidity, vibration isolator is vertical limited to the amplitude of stiffness degradation with level; 2) the vertical and level of air cushion shock absorber is all very poor to Location accuracy, can't satisfy the requirement of photoetching process; 3) will reach lower horizontal rigidity needs larger pendulum length, causes the vibration isolator height excessive, the string membrane resonance occurs easily, poor stability.
By to the analysis of existing air cushion shock absorber technological scheme as seen, existing air cushion shock absorber is difficult to satisfy lithography machine to the requirement of ultralow rigidity and high position precision.Germany IDE company has proposed a kind of vibration isolator technological scheme (1.Integrated Dynamics Engineering GmbH.Isolatorgeometrie EinesSchwingungsisolationssystem. european patent number: EP1803965A2 of abandoning tradition rubber air spring; 2.Integrated Dynamics EngineeringGmbH.Schwingungsisolationssystem Mit Pneumatischem Tiefpassfilter. european patent number: EP1803970A2; 3.Integrated Dynamics Engineering GmbH.Air Bearing with Consideration ofHigh-Frequency Resonances. U.S. Patent Publication No.: US20080193061A1).This scheme adopts vertical and level is carried out decoupling zero and vibration isolation to air bearing surface to the vibration of all directions, can reach extremely low rigidity and natural frequency.The problem that this scheme exists is: 1) in the public technology scheme, vibration isolator can't be realized accurate location; 2) among the patent EP1803965A2, do not have the angular motion degrees of freedom around horizontal rotational shaft between the upper and lower mounting plate, the angular rigidity of this direction and natural frequency are all very high; Patent EP1803970A2 and US20080193061A1 adopt block rubber to provide angular motion degrees of freedom around horizontal rotational shaft for upper and lower mounting plate, but because the block rubber angular rigidity is very large, can't effectively carry out the angular motion freedom decoupling, there is frictional force between the angular motion freedom decoupling mechanism components and introduces additional stiffness, restriction anti-vibration performance.
Holland ASML company has also proposed similar vibration isolator technological scheme (1.U.S.Philips Corp, ASM LithographyB.V.Pneumatic Support Device with A Controlled Gas Supply, and Lithographic Device Providedwith Such A Support Device. U.S. Patent number: US006144442A; 2.Koninklijke Philips ElectronicsN.V., ASM Lithography B.V.Lithographic Pneumatic Support Device with Controlled Gas Supply. International Patent Publication No.: WO99/22272; 3.ASML Netherlands B.V.Support Device, LithographicApparatus, and Device Manufacturing Method Employing A Supporting Device, and A PositionControl System Arranged for Use in A Supporting Device. U.S. Patent number: US007084956B2; 4.ASML Netherlands B.V.Support Device, Lithographic Apparatus, and Device ManufacturingMethod Employing A Supporting Device and A Position Control System Arranged for Use in ASupporting Device. european patent number: EP1486825A1).Among patent US006144442A and the WO99/22272 bleed pressure is carried out closed-loop feedback control, reach the stability of raising vibration isolator and the purpose of performance; Be provided with vibration transducer at upper mounting plate among patent US007084956B2 and the EP1486825A1, introduce simultaneously with reference to vibration system, promote the anti-vibration performance of vibration isolator by control algorithm.But the technological scheme that proposes still do not solve the accurate location of vibration isolator and the angular motion freedom decoupling problem of upper and lower mounting plate.
Summary of the invention
The objective of the invention is for an urgent demand of the vlsi circuit process units such as ultra precise measurement instrument and process unit, especially step-by-step scanning photo-etching device to the low natural frequency of vibration isolator, high position precision, the floating zero stiffness vibration isolator of magnetic and the vibrating isolation system of the decoupling zero of a kind of air-floating ball bearing angle are provided, vibration isolator has three-dimensional approximate zero rigidity and extremely low natural frequency, can accurately locate and the angle decoupling zero between the upper and lower mounting plate, thereby effectively solve accurate vibration isolation problem in ultra precise measurement instrument and process unit, the especially step-by-step scanning photo-etching device.
The object of the present invention is achieved like this:
The magnetic of a kind of air-floating ball bearing angle decoupling zero floats the zero stiffness vibration isolator, by upper mounting plate, lower installation board, clean compressed gas source, tracheae and vibration isolator main body form, the vibration isolator main body is installed between upper mounting plate and the lower installation board, clean compressed gas source is connected with the vibration isolator main body by tracheae, the structure of described vibration isolator main body is: the lower surface of sleeve and lower installation board are by the lubricated and support of the floating thrust-bearing of magnetic, the piston cylinder back-off is installed in the sleeve, and with sleeve by radially carry the cylinder air bearing surface lubricated with support, air-floating ball bearing is installed between piston cylinder and the upper mounting plate, the Z-direction voice coil motor, Z-direction displacement transducer and Z-direction limit switch are installed between piston cylinder and the sleeve, the X-direction voice coil motor, the X-direction displacement transducer, X-direction limit switch and Y-direction voice coil motor, the Y-direction displacement transducer, the Y-direction limit switch is installed between sleeve and the lower installation board, the driving force direction of Z-direction voice coil motor is vertical direction, the driving force direction of X-direction voice coil motor and Y-direction voice coil motor in horizontal plane and mutually vertical, X, Y, Z-direction displacement transducer and X, Y, line of action direction and the X of Z-direction limit switch, Y, the driving force direction of Z-direction voice coil motor is consistent; X, Y, Z-direction displacement transducer are connected Y, Z-direction limit switch and are connected with the signal input part of controller respectively with X, the signal output part of controller is connected with the signal input part of driver, and the signal output part of driver is connected with X, Y, Z-direction voice coil motor respectively.
Be provided with gas pressure sensor in the described piston cylinder, piston cylinder is provided with suction port and solenoid valve, and gas pressure sensor is connected with the signal input part of controller, and the signal output part of driver is connected with solenoid valve.
The configuration mode of the floating thrust-bearing of described magnetic is to be provided with permanent magnet at sleeve bottom surface sidewall, and at the relatively equipped electromagnetic coil of lower installation board upper surface sidewall, the floating gap thickness of magnetic is 0.01mm～1mm.
Described X, Y, Z-direction voice coil motor are cylinder type voice coil motor or plate voice coil motor.
Described X, Y, Z-direction displacement transducer are grating scale, magnetic railings ruler, appearance grid chi or linear potentiometer.
Described X, Y, Z-direction limit switch are mechanical type limit switch, Hall-type limit switch or photoelectric limit switch.
Gas pressure is 0.1MPa～0.8MPa in the described piston cylinder.
The vibrating isolation system that the floating zero stiffness vibration isolator of a kind of magnetic by the decoupling zero of air-floating ball bearing angle consists of, described vibrating isolation system comprises the floating zero stiffness vibration isolator of the magnetic of at least three air-floating ball bearing angles decoupling zero, and the floating zero stiffness vibration isolator of the magnetic of each air-floating ball bearing angle decoupling zero becomes polygonal to arrange.
Described vibrating isolation system comprises the floating zero stiffness vibration isolator of the magnetic of three air-floating ball bearing angles decoupling zero, and the floating zero stiffness vibration isolator triangularity of the magnetic of three air-floating ball bearing angles decoupling zero is arranged.
The good result of technological innovation of the present invention and generation is:
(1) the present invention has abandoned the vibration isolator technological scheme of tradition based on elastic element/mechanism, adopt the floating thrust-bearing of magnetic, radially carry the cylinder air bearing surface and respectively substantially horizontal and vertical vibration are carried out decoupling zero and vibration isolation, the floating thrust-bearing of magnetic and air bearing surface are without friction, without wearing and tearing, rigidity is approximately zero, can make vibration isolator obtain approximate zero stiffness characteristic and outstanding superlow frequency vibration isolating performance, having solved prior art limited by structural rigidity, material behavior, rigidity is difficult to further reduction, rigidity and the stable problem that can not take into account.This is that the present invention is different from one of innovative point of prior art.
(2) the present invention adopts displacement transducer chi, limit switch, controller, driver and voice coil motor etc. to consist of the position closed loop feedback control system of vertical direction and substantially horizontal, relative position between the upper and lower mounting plate is accurately controlled, Location accuracy can reach 10 μ m and more than, the problem that can solve effectively that prior art scheme Location accuracy is low, Location accuracy and rigidity and anti-vibration performance can not be taken into account.This is two of the present invention's innovative point of being different from prior art.
(3) the present invention adopts air-floating ball bearing that decoupling zero is carried out in the angular motion between the upper and lower mounting plate, air-floating ball bearing is without friction and wear, do not introduce additional angular rigidity, can effectively solve the problem that the existing method that adopts elastomer to carry out the angle decoupling zero is introduced more additional angular rigidity, restriction natural frequency and low frequency vibration isolation performance.This is three of the present invention's innovative point of being different from prior art.
(4) the present invention adopts gas pressure sensor, solenoid valve and controller, driver etc. to consist of the pressure closed loop feedback control system, accurately the gas pressure in the control sleeve makes it to keep constant, thrust load to vibration isolator is carried out gravitational equilibrium and compensation, under the effect of radially carrying the cylinder air bearing surface, the piston cylinder of carry load gravity can slide with approximate zero rigidity easy on and off along sleeve, thus the gravitational equilibrium of realizing ideal and zero stiffness vibration isolating effect.This is four of the present invention's innovative point of being different from prior art.
(5) the present invention adopts active actuators that the relative position between the upper and lower mounting plate and the gas pressure in the piston cylinder are carried out ACTIVE CONTROL, the vibration isolator parameter can be according to being regulated in real time by vibration isolation features of the object and working environment variation, thereby adapt to different operating modes, have preferably flexibility, adaptability and stability.This is five of the present invention's innovative point of being different from prior art.
Description of drawings
Fig. 1 is the structural representation of the floating zero stiffness vibration isolator of magnetic of air-floating ball bearing angle decoupling zero;
Fig. 2 is the three-dimensional cross-sectional view of the floating zero stiffness vibration isolator of magnetic of air-floating ball bearing angle decoupling zero;
Fig. 3 is the control structure block diagram of the floating zero stiffness vibration isolator of magnetic of air-floating ball bearing angle decoupling zero;
Fig. 4 is the schematic representation of cylinder air bearing surface throttle orifice and sphere air bearing surface throttle orifice on the piston cylinder;
Fig. 5 is the vibrating isolation system schematic representation that comprises the floating zero stiffness vibration isolator of magnetic of three air-floating ball bearing angles decoupling zero;
Fig. 6 is the vibrating isolation system schematic representation that comprises the floating zero stiffness vibration isolator of magnetic of four air-floating ball bearing angles decoupling zero.
Piece number explanation among the figure: 1 upper mounting plate, 2 lower installation boards, 3 clean compressed gas sources, 4 vibration isolator main bodys, 5 piston cylinders, 6 sleeves, 7 air-floating ball bearings, 8X is to voice coil motor, 9Y is to voice coil motor, 9a Y-direction motor iron yoke, 9b Y-direction magnetic steel of motor, 9c Y-direction motor coil skeleton, 9d Y-direction motor coil, 9e Y-direction motor transitional spare, 10Z is to voice coil motor, 10a Z-direction motor iron yoke, 10b Z-direction magnetic steel of motor, 10c Z-direction motor coil skeleton, 10d Z-direction motor coil, 10e Z-direction motor transitional spare, 11X is to displacement transducer, 12Y is to displacement transducer, 12a Y-direction grating reading head transition piece, 12b Y-direction grating reading head, 12c Y-direction glass raster chi, 13Z is to displacement transducer, 13a Z-direction grating reading head transition piece, 13b Z-direction grating reading head, 13c Z-direction glass raster chi, 14X is to limit switch, 15Y is to limit switch, 15aY is to limiting stopper, 15b Y-direction Hall switch, 15c Y-direction limit switch transition piece, 15d Y-direction limiting stopper transition piece, 16Z is to limit switch, 16a Z-direction limiting stopper, 16b Z-direction Hall switch, 16c Z-direction limit switch transition piece, 17 gas pressure sensors, 18 solenoid valves, 19 controllers, 20 drivers, 21 magnetic float the gap, 22 radially carry the cylinder air bearing surface, 23 suction ports, 24 magnetic float thrust-bearing, the 24a permanent magnet, the 24b electromagnetic coil, 25 cylinder air bearing surface throttle orifices, 26 tracheaes, 27 sphere air bearing surface, 28 sphere air bearing surface throttle orifices, 29 loads, the magnetic of 30 air-floating ball bearing angle decoupling zeros floats the zero stiffness vibration isolator.
Embodiment
Provide specific embodiments of the invention below in conjunction with accompanying drawing.
The magnetic of a kind of air-floating ball bearing angle decoupling zero floats the zero stiffness vibration isolator, by upper mounting plate 1, lower installation board 2, clean compressed gas source 3, tracheae 26 and vibration isolator main body 4 form, vibration isolator main body 4 is installed between upper mounting plate 1 and the lower installation board 2, clean compressed gas source 3 is connected with vibration isolator main body 4 by tracheae 26, the structure of described vibration isolator main body 4 is: the lower surface of sleeve 6 and lower installation board 2 are by floating the thrust-bearing 24 lubricated and supports of magnetic, piston cylinder 5 back-offs are installed in the sleeve 6, and with sleeve 6 by radially carry cylinder air bearing surface 22 lubricated with support, air-floating ball bearing 7 is installed between piston cylinder 5 and the upper mounting plate 1, Z-direction voice coil motor 10, Z-direction displacement transducer 13 and Z-direction limit switch 16 are installed between piston cylinder 5 and the sleeve 6, X-direction voice coil motor 8, X-direction displacement transducer 11, X-direction limit switch 14 and Y-direction voice coil motor 9, Y-direction displacement transducer 12, Y-direction limit switch 15 is installed between sleeve 6 and the lower installation board 2, the driving force direction of Z-direction voice coil motor 10 is vertical direction, the driving force direction of X-direction voice coil motor 8 and Y-direction voice coil motor 9 in horizontal plane and mutually vertical, X, Y, Z- direction displacement transducer 11,12,13 and X, Y, Z- direction limit switch 14,15,16 line of action direction and X, Y, Z-direction voice coil motor 8,9,10 driving force direction is consistent; X, Y, Z- direction displacement transducer 11,12,13 are connected Y, Z- direction limit switch 14,15,16 and are connected with the signal input part of controller 19 respectively with X, the signal output part of controller 19 is connected with the signal input part of driver 20, and the signal output part of driver 20 is connected with X, Y, Z-direction voice coil motor 8,9,10 respectively.
X, Y, Z- direction displacement transducer 11,12,13 pairs of X, Y, Z-direction voice coil motor 8,9,10 displacements of exporting are measured, and X, Y, Z- direction limit switch 14,15,16 pairs of X, Y, Z-direction voice coil motor 8,9,10 strokes that move limit; Controller 19 is according to X, Y, Z- direction displacement transducer 11,12,13 and X, Y, Z- direction limit switch 14,15,16 feedback signal, and the relative position between control X, Y, Z-direction voice coil motor 8,9, the 10 pairs of upper and lower mounting plates 1,2 is accurately controlled.
Be provided with gas pressure sensor 17 in the described piston cylinder 5, piston cylinder 5 is provided with suction port 23 and solenoid valve 18, and gas pressure sensor 17 is connected with the signal input part of controller 19, and the signal output part of driver 20 is connected with solenoid valve 18.
The configuration mode of the floating thrust-bearing 24 of described magnetic is to be provided with permanent magnet 24a at sleeve 6 bottom surface sidewalls, and at the relatively equipped electromagnetic coil 24b of lower installation board upper surface sidewall, the floating gap of magnetic 21 thickness are 0.01mm～1mm.
Described X, Y, Z-direction voice coil motor 8,9,10 are cylinder type voice coil motor or plate voice coil motor.
Described X, Y, Z- direction displacement transducer 11,12,13 are grating scale, magnetic railings ruler, appearance grid chi or linear potentiometer.
Described X, Y, Z- direction limit switch 14,15,16 are mechanical type limit switch, Hall-type limit switch or photoelectric limit switch.
Described piston cylinder 5 interior gas pressures are 0.1MPa～0.8MPa.
Described vibrating isolation system comprises the floating zero stiffness vibration isolator 30 of the magnetic of at least three air-floating ball bearing angles decoupling zero, and 30 one-tenth polygonals of the floating zero stiffness vibration isolator of the magnetic of each air-floating ball bearing angle decoupling zero are arranged.
Described vibrating isolation system comprises the floating zero stiffness vibration isolator 30 triangularities layout of magnetic of floating 30, three air-floating ball bearing angles of the zero stiffness vibration isolator decoupling zero of magnetic of three air-floating ball bearing angles decoupling zero.
Provide one embodiment of the present of invention below in conjunction with Fig. 1～Fig. 3.In the present embodiment, in zero stiffness vibration isolator when work,, lower installation board 2 is installed on the pedestal or basic framework of ground, instrument, upper mounting plate 1 be connected by the load of vibration isolation.X, Y, Z-direction voice coil motor 8,9,10 all adopt the cylinder type voice coil motor.Take Y-direction voice coil motor 9 as example, it mainly comprises the parts such as Y-direction motor iron yoke 9a, Y-direction magnetic steel of motor 9b, Y-direction motor coil skeleton 9c, Y-direction motor coil 9d and Y-direction motor transitional spare 9e.Y-direction motor iron yoke 9a and Y-direction motor coil skeleton 9c are cylindrical shape, and Y-direction magnetic steel of motor 9b is cylindrical, and Y-direction motor coil 9d is around on the Y-direction motor coil skeleton 9c, and Y-direction motor transitional spare 9e provides the mounting structure of Y-direction motor coil skeleton 9c.Y-direction motor iron yoke 9a and Y-direction magnetic steel of motor 9b consist of motor stator, and Y-direction motor coil skeleton 9c, Y-direction motor coil 9d consist of electric mover.Pass to electric current during machine operation in the coil, according to electromagnetic theory, hot-wire coil can be subject to the Lorentz force effect in magnetic field, can control the size and Orientation of motor output drive strength by the size and Orientation of control electric current.
The mounting type of air-floating ball bearing 7 is in the present embodiment: the lower surface of air-floating ball bearing 7 is installed on the piston cylinder 5, and by the 27 lubricated and supports of sphere air bearing surface, the upper surface of air-floating ball bearing 7 and upper mounting plate 1 are rigidly connected.
X, Y, Z- direction displacement transducer 11,12,13 adopt grating scale.Take Z-direction displacement transducer 13 as example, it mainly comprises the parts such as Z-direction grating reading head transition piece 13a, Z-direction grating reading head 13b and Z-direction glass raster chi 13c, and Z-direction grating reading head transition piece 13a provides the mounting structure of Z-direction grating reading head 13b.In grating scale when work,, Z-direction grating reading head 13b can detect the relative displacement of itself and Z-direction glass raster chi 13c, and gives controller 19 by signal conductor.
X, Y, Z- direction limit switch 14,15,16 adopt the Hall-type limit switch.Take Z-direction limit switch 16 as example, it mainly comprises the parts such as Z-direction limiting stopper 16a, Z-direction Hall switch 16b and Z-direction limit switch transition piece 16c.Two Z-direction Hall switch 16b install back-to-back, and two Z-direction limiting stopper 16a are metallic material, with relative installation of sensitivity end of Z-direction Hall switch 16b.Z-direction limit switch transition piece 16c provides the mounting structure of Z-direction Hall switch 16b.In limit switch when work,, as Z-direction Hall switch 16b during near Z-direction limiting stopper 16a, Z-direction Hall switch 16b provides limit signal, and gives controller 19 by signal conductor.
In the present embodiment, Z-direction voice coil motor 10, Z-direction displacement transducer 13 and Z-direction limit switch 16 are installed between piston cylinder 5 and the sleeve 6, and are installed in piston cylinder 5 inside.
Vibration isolator is realized in the following way to the carrying of load: clean compressed gas source 3 by tracheae 26, through solenoid valve 18, suction port 23 to piston cylinder 5 interior conveying clean compressed airs.Controller 19 is according to the feedback signal of gas pressure sensor 17, the aperture of control solenoid valve 18, adjusting is input to the gas flow in the piston cylinder 5, thereby the pressure of regulating piston cylinder 5 interior clean compressed airs, make active force that clean compressed air makes progress to piston cylinder 5 and the gravity of other component on load, piston cylinder 5 and loading and the piston cylinder 5 balance each other the gravity compensation of realizing ideal and zero stiffness vibration isolating effect.
In the present embodiment, the pressure of piston cylinder 5 interior clean compressed airs is 0.4Mpa, and the effective radius of piston cylinder 5 lower surfaces is 100mm, and then the quality of single vibration isolator carrying is: m=p * π r
2/ g ≈ 1282kg, wherein p is gas pressure, and p=0.4Mpa, r are the effective radius of piston cylinder 5 lower surfaces, and r=100mm, g are gravity accleration, g=9.8m/m
2
Fig. 4 provides an embodiment of cylinder air bearing surface throttle orifice and sphere air bearing surface throttle orifice on the piston cylinder.In the present embodiment, along the circumferential direction uniform two arrange cylinder air bearing surface throttle orifices 25 on piston cylinder 5 sidewalls, the quantity of every row's cylinder air bearing surface throttle orifice 25 is 8, and diameter is φ 0.2mm.8 the sphere air bearing surface throttle orifices 28 that along the circumferential direction evenly distribute around the center of circle on the concave spherical surface of piston cylinder 5 upper surfaces, diameter is φ 0.2mm.
Fig. 5 provides an embodiment of the vibrating isolation system of the floating zero stiffness vibration isolator of magnetic that comprises the decoupling zero of three air-floating ball bearing angles.In the present embodiment, load 29 is irregularly shaped metal stage body, and weight is 4 tons, adopts the floating zero stiffness vibration isolator 30 of magnetic of three air-floating ball bearing angles decoupling zero that it is carried out vibration isolation.The floating zero stiffness vibration isolator 30 of the magnetic of three air-floating ball bearing angles decoupling zero is an angle of load-supporting 29 respectively, triangularity is arranged, the pressure of regulating piston cylinder 5 interior clean compressed airs, active force and load 29, the piston cylinder 5 that clean compressed air makes progress to piston cylinder 5 and the total force that loads on component on the piston cylinder 5 are balanced each other, make piston cylinder 5 slide along sleeve 6 easy on and off.
Fig. 6 provides an embodiment of the vibrating isolation system of the floating zero stiffness vibration isolator of magnetic that comprises the decoupling zero of four air-floating ball bearing angles.In the present embodiment, load 29 is rectangular shape metal stage body, and weight is 8 tons, adopts the floating zero stiffness vibration isolator 30 of magnetic of four air-floating ball bearing angles decoupling zero that it is carried out vibration isolation.The floating zero stiffness vibration isolator 30 of the magnetic of four air-floating ball bearing angles decoupling zero is an angle of load-supporting 29 respectively, rectangularity is arranged, the pressure of regulating piston cylinder 5 interior clean compressed airs, active force and load 29, the piston cylinder 5 that clean compressed air makes progress to piston cylinder 5 and the total force that loads on component on the piston cylinder 5 are balanced each other, make piston cylinder 5 slide along sleeve 6 easy on and off.
Claims (9)
1. the magnetic of air-floating ball bearing angle decoupling zero floats the zero stiffness vibration isolator, by upper mounting plate (1), lower installation board (2), clean compressed gas source (3), tracheae (26) and vibration isolator main body (4) form, vibration isolator main body (4) is installed between upper mounting plate (1) and the lower installation board (2), clean compressed gas source (3) is connected with vibration isolator main body (4) by tracheae (26), it is characterized in that: the structure of described vibration isolator main body (4) is that lower surface and the lower installation board (2) of sleeve (6) lubricates and support by the floating thrust-bearing (24) of magnetic, piston cylinder (5) back-off is installed in the sleeve (6), and with sleeve (6) by radially carry cylinder air bearing surface (22) lubricated with support, air-floating ball bearing (7) is installed between piston cylinder (5) and the upper mounting plate (1), Z-direction voice coil motor (10), Z-direction displacement transducer (13) and Z-direction limit switch (16) are installed between piston cylinder (5) and the sleeve (6), X-direction voice coil motor (8), X-direction displacement transducer (11), X-direction limit switch (14) and Y-direction voice coil motor (9), Y-direction displacement transducer (12), Y-direction limit switch (15) is installed between sleeve (6) and the lower installation board (2), the driving force direction of Z-direction voice coil motor (10) is vertical direction, the driving force direction of X-direction voice coil motor (8) and Y-direction voice coil motor (9) in horizontal plane and mutually vertical, X, Y, Z-direction displacement transducer (11,12,13) and X, Y, Z-direction limit switch (14,15,16) line of action direction and X, Y, Z-direction voice coil motor (8,9,10) driving force direction is consistent; X, Y, Z-direction displacement transducer (11,12,13) are connected Y, Z-direction limit switch (14,15,16) and are connected with the signal input part of controller (19) respectively with X, the signal output part of controller (19) is connected with the signal input part of driver (20), and the signal output part of driver (20) is connected with X, Y, Z-direction voice coil motor (8,9,10) respectively.
2. the magnetic of air-floating ball bearing angle according to claim 1 decoupling zero floats the zero stiffness vibration isolator, it is characterized in that: be provided with gas pressure sensor (17) in the described piston cylinder (5), piston cylinder (5) is provided with suction port (23) and solenoid valve (18), gas pressure sensor (17) is connected with the signal input part of controller (19), and the signal output part of driver (20) is connected with solenoid valve (18).
3. the magnetic of air-floating ball bearing angle according to claim 1 decoupling zero floats the zero stiffness vibration isolator, it is characterized in that: the configuration mode that described magnetic floats thrust-bearing (24) is to be provided with permanent magnet (24a) at sleeve (6) bottom surface sidewall, at the relatively equipped electromagnetic coil (24b) of lower installation board upper surface sidewall, it is 0.01mm～1mm that magnetic floats gap (21) thickness.
4. the magnetic of air-floating ball bearing angle according to claim 1 decoupling zero floats the zero stiffness vibration isolator, and it is characterized in that: described X, Y, Z-direction voice coil motor (8,9,10) are cylinder type voice coil motor or plate voice coil motor.
5. the magnetic of air-floating ball bearing angle according to claim 1 decoupling zero floats the zero stiffness vibration isolator, it is characterized in that: described X, Y, Z-direction displacement transducer (11,12,13) are grating scale, magnetic railings ruler, appearance grid chi or linear potentiometer.
6. the magnetic of air-floating ball bearing angle according to claim 1 decoupling zero floats the zero stiffness vibration isolator, and it is characterized in that: described X, Y, Z-direction limit switch (14,15,16) are mechanical type limit switch, Hall-type limit switch or photoelectric limit switch.
7. the magnetic of air-floating ball bearing angle according to claim 1 decoupling zero floats the zero stiffness vibration isolator, and it is characterized in that: the interior gas pressure of described piston cylinder (5) is 0.1MPa～0.8MPa.
8. the magnetic by arbitrary described air-floating ball bearing angle decoupling zero in the claim 1 to 7 floats the vibrating isolation system that the zero stiffness vibration isolator consists of, it is characterized in that: described vibrating isolation system comprises the floating zero stiffness vibration isolator (30) of the magnetic of at least three air-floating ball bearing angles decoupling zero, and the floating zero stiffness vibration isolator (30) of the magnetic of each air-floating ball bearing angle decoupling zero becomes polygonal to arrange.
9. vibrating isolation system according to claim 8, it is characterized in that: described vibrating isolation system comprises the floating zero stiffness vibration isolator (30) of the magnetic of three air-floating ball bearing angles decoupling zero, and floating zero stiffness vibration isolator (30) triangularity of the magnetic of three air-floating ball bearing angles decoupling zero is arranged.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201210574787.3A CN103062303B (en) | 2012-12-19 | 2012-12-19 | The magnetic of air-floating ball bearing angle decoupling zero floats Zero-rigidity vibration isolator and vibrating isolation system |
Applications Claiming Priority (1)
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| CN201210574787.3A CN103062303B (en) | 2012-12-19 | 2012-12-19 | The magnetic of air-floating ball bearing angle decoupling zero floats Zero-rigidity vibration isolator and vibrating isolation system |
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2014094689A2 (en) * | 2012-12-19 | 2014-06-26 | Harbin Institute Of Technology | Magnetically suspended vibration isolator with zero stiffness whose angle degree of freedom is decoupled with a joint ball bearing |
| CN108945537A (en) * | 2018-08-31 | 2018-12-07 | 天津航天机电设备研究所 | Spacecraft three-dimensional zero-g simulator based on double-stage air floatation |
| CN109210073A (en) * | 2018-10-15 | 2019-01-15 | 杭州电子科技大学 | Assembly method when gas magnetic mixing flexural pivot joint and its use |
| CN109795724A (en) * | 2019-01-25 | 2019-05-24 | 上海卫星工程研究所 | Based on the integrated double super satellite platform experimental rigs of air floatation ball and the bearing of journals |
Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5844664A (en) * | 1995-05-30 | 1998-12-01 | U.S. Philips Corporation | Positioning device with a force actuator system for compensating center-of-gravity displacements, and lithographic device provided with such a positioning device |
| WO1999022272A1 (en) * | 1997-10-23 | 1999-05-06 | Koninklijke Philips Electronics N.V. | Lithographic pneumatic support device with controlled gas supply |
| EP1160628A2 (en) * | 2000-06-02 | 2001-12-05 | Asm Lithography B.V. | Supporting assembly for lithographic projection apparatus |
| US20040065517A1 (en) * | 2002-10-08 | 2004-04-08 | Watson Douglas C. | Vibration isolator with low lateral stiffness |
| CN101398636A (en) * | 2008-09-17 | 2009-04-01 | 华中科技大学 | Precision vibration damping assembly and vibration damping platform composed of the assembly |
| CN102543217A (en) * | 2012-01-20 | 2012-07-04 | 澳门大学 | Macro-micro driven bidimensional integrated micro positioning platform |
| CN102734379A (en) * | 2012-06-09 | 2012-10-17 | 哈尔滨工业大学 | Active vibration isolating device based on composite support of electromagnetism and static-pressure air floatation |
-
2012
- 2012-12-19 CN CN201210574787.3A patent/CN103062303B/en active Active
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5844664A (en) * | 1995-05-30 | 1998-12-01 | U.S. Philips Corporation | Positioning device with a force actuator system for compensating center-of-gravity displacements, and lithographic device provided with such a positioning device |
| WO1999022272A1 (en) * | 1997-10-23 | 1999-05-06 | Koninklijke Philips Electronics N.V. | Lithographic pneumatic support device with controlled gas supply |
| EP1160628A2 (en) * | 2000-06-02 | 2001-12-05 | Asm Lithography B.V. | Supporting assembly for lithographic projection apparatus |
| US20040065517A1 (en) * | 2002-10-08 | 2004-04-08 | Watson Douglas C. | Vibration isolator with low lateral stiffness |
| CN101398636A (en) * | 2008-09-17 | 2009-04-01 | 华中科技大学 | Precision vibration damping assembly and vibration damping platform composed of the assembly |
| CN102543217A (en) * | 2012-01-20 | 2012-07-04 | 澳门大学 | Macro-micro driven bidimensional integrated micro positioning platform |
| CN102734379A (en) * | 2012-06-09 | 2012-10-17 | 哈尔滨工业大学 | Active vibration isolating device based on composite support of electromagnetism and static-pressure air floatation |
Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2014094689A2 (en) * | 2012-12-19 | 2014-06-26 | Harbin Institute Of Technology | Magnetically suspended vibration isolator with zero stiffness whose angle degree of freedom is decoupled with a joint ball bearing |
| WO2014094689A3 (en) * | 2012-12-19 | 2014-08-14 | Harbin Institute Of Technology | Magnetically suspended vibration isolator with zero stiffness whose angle degree of freedom is decoupled with a joint ball bearing |
| GB2519272A (en) * | 2012-12-19 | 2015-04-15 | Harbin Inst Of Technology | Magnetically suspended vibration isolator with zero stiffness whose angle degree of freedom is decoupled with a joint ball bearing |
| US9423000B2 (en) | 2012-12-19 | 2016-08-23 | Harbin Institute Of Technology | Magnetically suspended vibration isolator with zero stiffness whose angle degree of freedom is decoupled with a joint ball bearing |
| GB2519272B (en) * | 2012-12-19 | 2019-08-07 | Harbin Inst Technology | Magnetically suspended vibration isolator with zero stiffness whose angle degree of freedom is decoupled with a joint ball bearing |
| CN108945537A (en) * | 2018-08-31 | 2018-12-07 | 天津航天机电设备研究所 | Spacecraft three-dimensional zero-g simulator based on double-stage air floatation |
| CN109210073A (en) * | 2018-10-15 | 2019-01-15 | 杭州电子科技大学 | Assembly method when gas magnetic mixing flexural pivot joint and its use |
| CN109210073B (en) * | 2018-10-15 | 2023-11-07 | 杭州电子科技大学 | Air-magnetic mixed spherical hinge joint and assembly method thereof during use |
| CN109795724A (en) * | 2019-01-25 | 2019-05-24 | 上海卫星工程研究所 | Based on the integrated double super satellite platform experimental rigs of air floatation ball and the bearing of journals |
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