CN103062303B - The magnetic of air-floating ball bearing angle decoupling zero floats Zero-rigidity vibration isolator and vibrating isolation system - Google Patents
The magnetic of air-floating ball bearing angle decoupling zero floats Zero-rigidity vibration isolator and vibrating isolation system Download PDFInfo
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Abstract
The magnetic of air-floating ball bearing angle decoupling zero floats Zero-rigidity vibration isolator and vibrating isolation system belongs to accurate vibration isolation technical field, float thrust-bearing by magnetic between the sleeve of vibration isolator main body and lower installation board to carry out carrying, being undertaken lubricating by air bearing surface between piston cylinder and sleeve and support, angular motion degrees of freedom between upper mounting plate and lower installation board carries out decoupling zero by air-floating ball bearing, voice coil motor, displacement transducer, limit switch and controller, driver form position closed loop feedback control system, accurately control the relative position of upper and lower mounting plate; The present invention has three-dimensional zero stiffness, high position precision and angle Decoupling Characteristics, extremely low natural frequency and outstanding low frequency/superlow frequency vibration isolating performance can be obtained, thus effectively solve the high-performance vibration isolation problems in ultra precise measurement instrument and process unit, especially step-by-step scanning photo-etching device.
Description
Technical field
The invention belongs to accurate vibration isolation technical field, the magnetic relating generally to the decoupling zero of a kind of air-floating ball bearing angle floats Zero-rigidity vibration isolator and vibrating isolation system.
Background technique
Along with improving constantly of Ultra-precision Turning and measuring accuracy, ambient vibration becomes the key factor that restriction Ultra-precision Turning equipment improves with surveying instrument precision and performance.Especially step-by-step scanning photo-etching device is the vlsi circuit process unit of representative, technology-intensive degree and complexity high, key technical index all reaches the limit of prior art, represent the highest level of Ultra-precision Turning equipment, precision isolation system becomes the core key technology in this type of equipment; The live width of step-by-step scanning photo-etching device has reached 22nm and following, silicon chip positioning precision and alignment precision all reach a few nanometer, and work stage movement velocity reaches more than 1m/s, work stage acceleration reaches tens times of gravity accleration, and this proposes new challenge to existing vibration isolation technique.First, lithography machine needs for metering system and photoetched object lens provide the working environment of " super quiet ", need again to drive simultaneously work stage at full speed with High acceleration motion, this proposes extremely harsh requirement to the anti-vibration performance of vibrating isolation system, and the natural frequency in its three directions all needs to reach below 1Hz; Secondly, relative position between each parts of lithography machine, the distance of such as photoetched object lens and silicon chip surface, all there is very strict requirement, and under the control being in position closed loop feedback control system, require that the relative positional accuracy between the upper and lower mounting plate of vibration isolator reaches 10 μm of magnitudes, the positioning precision of traditional vibration isolator can not meet the demands far away.
According to theory of vibration isolation, the natural frequency of passive type vibration isolator is directly proportional to rigidity, be inversely proportional to load quality, therefore, under the prerequisite that load quality is certain, the rigidity reducing vibration isolator is the effective way reducing natural frequency, improve low frequency and superlow frequency vibration isolating performance.There are the intrinsic contradictions of static bearing capacity and rigidity in the vibration isolator of the forms such as conventional air bellows, restrict by the factor such as material behavior, structural rigidity simultaneously, will reduce its rigidity, especially level further very difficult to rigidity.For this problem, " pendulum " formula structure is incorporated in air cushion shock absorber by researcher, reaches object (the 1.Nikon Corporation.Vibration Isolator With Low Lateral Stiffness. U.S. Patent Publication No.: US20040065517A1 reducing vibration isolator horizontal rigidity; 2.U.S.Philips Corporation.Positioning.Device with a Force Actuator System for Compensating Center-of-gravity Displacements, and Lithographic Device Provided with Such A Positioning Device. U.S. Patent number: US005844664A).The method can reduce the horizontal rigidity of air cushion shock absorber to a certain extent, promotes its low frequency vibration isolation performance.The method Problems existing is: 1) restrict by material behavior and structural rigidity, the vertical limited extent reduced to rigidity with level of vibration isolator; 2) the vertical and level of air cushion shock absorber is all very poor to positioning precision, cannot meet the requirement of photoetching process; 3) lower horizontal rigidity to be reached and need larger pendulum length, cause vibration isolator height excessive, easily string membrane resonance occurs, poor stability.
By visible to the analysis of existing air cushion shock absorber technological scheme, existing air cushion shock absorber is difficult to meet the requirement of lithography machine to ultralow rigidity and high position precision.IDE company of Germany proposes a kind of vibration isolator technological scheme (1.Integrated Dynamics Engineering GmbH.Isolatorgeometrie Eines Schwingungsisolationssystem. european patent number: EP 1803965A2 of abandoning tradition rubber air spring; 2.Integrated Dynamics Engineering GmbH.Schwingungsisolationssystem Mit Pneumatischem Tiefpassfilter. european patent number: EP 1803970A2; 3.Integrated Dynamics Engineering GmbH.Air Bearing with Consideration of High-Frequency Resonances. U.S. Patent Publication No.: US20080193061A1).Program employing is vertical carries out decoupling zero and vibration isolation to air bearing surface to the vibration of all directions with level, can reach extremely low rigidity and natural frequency.Program Problems existing is: 1) in public technology scheme, vibration isolator cannot realize accurate location; 2), in patent EP1803965A2, there is not the angular motion degrees of freedom around horizontal rotational shaft between upper and lower mounting plate, the angular rigidity in this direction and natural frequency are all very high; Patent EP1803970A2 and US20080193061A1 adopts block rubber to provide angular motion degrees of freedom around horizontal rotational shaft for upper and lower mounting plate, but because block rubber angular rigidity is very large, effectively cannot carry out angular motion freedom decoupling, there is frictional force between angular motion freedom decoupling mechanism part and introduce additional stiffness, restriction anti-vibration performance.
ASML company of Holland it is also proposed similar vibration isolator technological scheme (1.U.S.Philips Corp, ASM Lithography B.V. Pneumatic Support Device with A Controlled Gas Supply, and Lithographic Device Provided with Such A Support Device. U.S. Patent number: US006144442A; 2.Koninklijke Philips Electronics N.V., ASM Lithography B.V. Lithographic Pneumatic Support Device with Controlled Gas Supply. International Patent Publication No.: WO99/22272; 3.ASML Netherlands B.V. Support Device, Lithographic Apparatus, and Device Manufacturing Method Employing A Supporting Device, and A Position Control System Arranged for Use in A Supporting Device. U.S. Patent number: US007084956B2; 4.ASML Netherlands B.V.Support Device, Lithographic Apparatus, and Device Manufacturing Method Employing A Supporting Device and A Position Control System Arranged for Use in A Supporting Device. european patent number: EP1486825A1).In patent US006144442A and WO99/22272, closed-loop feedback control is carried out to bleed pressure, reach and improve the stability of vibration isolator and the object of performance; On upper mounting plate, be provided with vibration transducer in patent US007084956B2 and EP1486825A1, introduce with reference to vibration system simultaneously, promoted the anti-vibration performance of vibration isolator by control algorithm.But propose technological scheme and still do not solve the accurate location of vibration isolator and the angular motion freedom decoupling problem of upper and lower mounting plate.
Summary of the invention
The object of the invention is for vlsi circuit process units such as ultra precise measurement instrument and process units, especially step-by-step scanning photo-etching device an urgent demand of the low natural frequency of vibration isolator, high position precision, the magnetic of a kind of air-floating ball bearing angle decoupling zero is provided to float Zero-rigidity vibration isolator and vibrating isolation system, vibration isolator has three-dimensional approximate zero rigidity and extremely low natural frequency, accurately location and angle decoupling zero can be carried out between upper and lower mounting plate, thus effectively solve the accurate vibration isolation problem in ultra precise measurement instrument and process unit, especially step-by-step scanning photo-etching device.
The object of the present invention is achieved like this:
The magnetic of air-floating ball bearing angle decoupling zero floats a Zero-rigidity vibration isolator, by upper mounting plate, lower installation board, clean compressed gas source, tracheae and vibration isolator main body composition, vibration isolator main body is arranged between upper mounting plate and lower installation board, clean compressed gas source is connected with vibration isolator main body by tracheae, the structure of described vibration isolator main body is: the lower surface of sleeve and lower installation board float thrust-bearing by magnetic and lubricate and support, piston cylinder back-off is arranged in sleeve, and lubricate with sleeve by the radial cylinder air bearing surface that carries and support, air-floating ball bearing is arranged between piston cylinder and upper mounting plate, Z-direction voice coil motor, Z-direction displacement transducer and Z-direction limit switch are arranged between piston cylinder and sleeve, and X is to voice coil motor, X is to displacement transducer, X is to limit switch and Y-direction voice coil motor, Y-direction displacement transducer, Y-direction limit switch is arranged between sleeve and lower installation board, and the driving force direction of Z-direction voice coil motor is vertical direction, and X is mutually vertical in horizontal plane to the driving force direction of voice coil motor and Y-direction voice coil motor, X, Y, Z-direction displacement transducer and X, Y, the line of action direction of Z-direction limit switch and X, Y, the driving force direction of Z-direction voice coil motor is consistent, X, Y, Z-direction displacement transducer are connected with the signal input part of controller respectively with X, Y, Z-direction limit switch, and the signal output part of controller is connected with the signal input part of driver, and the signal output part of driver is connected with X, Y, Z-direction voice coil motor respectively.
Be provided with gas pressure sensor in described piston cylinder, piston cylinder is provided with suction port and solenoid valve, and gas pressure sensor is connected with the signal input part of controller, and the signal output part of driver is connected with solenoid valve.
The configuration mode that described magnetic floats thrust-bearing is provided with permanent magnet at sleeve bottom surface sidewall, and at the relatively equipped electromagnetic coil of lower installation board upper surface sidewall, it is 0.01mm ~ 1mm that magnetic floats gap thickness.
Described X, Y, Z-direction voice coil motor are cylinder type voice coil motor or plate voice coil motor.
Described X, Y, Z-direction displacement transducer are grating scale, magnetic railings ruler, appearance grid chi or linear potentiometer.
Described X, Y, Z-direction limit switch are mechanical type limit switch, Hall-type limit switch or photoelectric limit switch.
In described piston cylinder, gas pressure is 0.1MPa ~ 0.8MPa.
A kind of magnetic by the decoupling zero of air-floating ball bearing angle floats the vibrating isolation system that Zero-rigidity vibration isolator is formed, the magnetic that described vibrating isolation system comprises the decoupling zero of at least three air-floating ball bearing angles floats Zero-rigidity vibration isolator, and the magnetic of each air-floating ball bearing angle decoupling zero floats Zero-rigidity vibration isolator and becomes polygonal to arrange.
The magnetic that described vibrating isolation system comprises the decoupling zero of three air-floating ball bearing angles floats Zero-rigidity vibration isolator, and the magnetic of three air-floating ball bearing angles decoupling zero floats Zero-rigidity vibration isolator triangularity and arranges.
The good result of technological innovation of the present invention and generation is:
(1) the present invention has abandoned the vibration isolator technological scheme of tradition based on elastic element/mechanism, adopt magnetic to float thrust-bearing, radial carrying cylinder air bearing surface carries out decoupling zero and vibration isolation to substantially horizontal and vertical vibration respectively, magnetic floats thrust-bearing and air bearing surface without rubbing, without wearing and tearing, rigidity is approximately zero, vibration isolator can be made to obtain approximate zero stiffness characteristic and outstanding superlow frequency vibration isolating performance, solve prior art to limit by structural rigidity, material behavior, rigidity is difficult to further reduction, the problem that rigidity and stability can not be taken into account.This is one of the present invention's innovative point being different from prior art.
(2) the present invention adopts displacement transducer chi, limit switch, controller, driver and voice coil motor etc. to form the position closed loop feedback control system of vertical direction and substantially horizontal, relative position between upper and lower mounting plate is accurately controlled, positioning precision can reach 10 μm and more than, effectively can solve that prior art positioning precision is low, problem that positioning precision and rigidity and anti-vibration performance can not be taken into account.This is the innovative point two that the present invention is different from prior art.
(3) the present invention adopts air-floating ball bearing to carry out decoupling zero to the angular motion between upper and lower mounting plate, air-floating ball bearing is without friction and wear, do not introduce additional angular rigidity, effectively can solve existing employing elastomer and carry out the more additional angular rigidity of method introducing of angle decoupling zero, restrict the problem of natural frequency and low frequency vibration isolation performance.This is the innovative point three that the present invention is different from prior art.
(4) the present invention adopts gas pressure sensor, solenoid valve and controller, driver etc. to form pressure closed loop feedback control system, gas pressure in accurate control sleeve makes it to keep constant, gravitational equilibrium and compensation are carried out to the thrust load of vibration isolator, under the effect of radial direction carrying cylinder air bearing surface, the piston cylinder of carry load gravity freely up and down can slide along sleeve with approximate zero rigidity, thus the gravitational equilibrium of realizing ideal and zero stiffness vibration isolating effect.This is the innovative point four that the present invention is different from prior art.
(5) the present invention adopts active actuators to carry out ACTIVE CONTROL to the relative position between upper and lower mounting plate and the gas pressure in piston cylinder, vibration isolator parameter can regulate in real time according to being changed by vibration isolation features of the object and working environment, thus adapt to different operating modes, there is good flexibility, adaptability and stability.This is the innovative point five that the present invention is different from prior art.
Accompanying drawing explanation
Fig. 1 is the structural representation that the magnetic of air-floating ball bearing angle decoupling zero floats Zero-rigidity vibration isolator;
Fig. 2 is the D profile structural representation that the magnetic of air-floating ball bearing angle decoupling zero floats Zero-rigidity vibration isolator;
Fig. 3 is the control structure block diagram that the magnetic of air-floating ball bearing angle decoupling zero floats Zero-rigidity vibration isolator;
Fig. 4 is the schematic diagram of cylinder air bearing surface throttle orifice and sphere air bearing surface throttle orifice on piston cylinder;
Fig. 5 is the vibrating isolation system schematic diagram that the magnetic comprising the decoupling zero of three air-floating ball bearing angles floats Zero-rigidity vibration isolator.
Fig. 6 is the vibrating isolation system schematic diagram that the magnetic comprising the decoupling zero of four air-floating ball bearing angles floats Zero-rigidity vibration isolator.
In figure, piece number illustrates: 1 upper mounting plate, 2 lower installation boards, 3 clean compressed gas sources, 4 vibration isolator main bodys, 5 piston cylinders, 6 sleeves, 7 air-floating ball bearings, 8 X are to voice coil motor, 9 Y-direction voice coil motors, 9a Y-direction motor iron yoke, 9b Y-direction magnetic steel of motor, 9c Y-direction motor coil framework, 9d Y-direction motor coil, 9e Y-direction motor transitional part, 10 Z-direction voice coil motors, 10a Z-direction motor iron yoke, 10b Z-direction magnetic steel of motor, 10c Z-direction motor coil framework, 10d Z-direction motor coil, 10e Z-direction motor transitional part, 11 X are to displacement transducer, 12 Y-direction displacement transducers, 12a Y-direction grating reading head transition piece, 12b Y-direction grating reading head, 12c Y-direction glass raster chi, 13 Z-direction displacement transducers, 13a Z-direction grating reading head transition piece, 13b Z-direction grating reading head, 13c Z-direction glass raster chi, 14 X are to limit switch, 15 Y-direction limit switches, 15a Y-direction limiting stopper, 15b Y-direction Hall switch, 15c Y-direction limit switch transition piece, 15d Y-direction limiting stopper transition piece, 16 Z-direction limit switches, 16a Z-direction limiting stopper, 16b Z-direction Hall switch, 16c Z-direction limit switch transition piece, 17 gas pressure sensors, 18 solenoid valves, 19 controllers, 20 drivers, 21 magnetic float gap, 22 radial carrying cylinder air bearing surface, 23 suction ports, 24 magnetic float thrust-bearing, 24a permanent magnet, 24b electromagnetic coil, 25 cylinder air bearing surface throttle orifices, 26 tracheaes, 27 sphere air bearing surface, 28 sphere air bearing surface throttle orifices, 29 loads, the magnetic of 30 air-floating ball bearing angle decoupling zeros floats Zero-rigidity vibration isolator.
Embodiment
Specific embodiments of the invention are provided below in conjunction with accompanying drawing.
The magnetic of air-floating ball bearing angle decoupling zero floats a Zero-rigidity vibration isolator, by upper mounting plate 1, lower installation board 2, clean compressed gas source 3, tracheae 26 and vibration isolator main body 4 form, vibration isolator main body 4 is arranged between upper mounting plate 1 and lower installation board 2, clean compressed gas source 3 is connected with vibration isolator main body 4 by tracheae 26, the structure of described vibration isolator main body 4 is: the lower surface of sleeve 6 and lower installation board 2 float thrust-bearing 24 by magnetic and lubricate and support, piston cylinder 5 back-off is arranged in sleeve 6, and lubricate with sleeve 6 by the radial cylinder air bearing surface 22 that carries and support, air-floating ball bearing 7 is arranged between piston cylinder 5 and upper mounting plate 1, Z-direction voice coil motor 10, Z-direction displacement transducer 13 and Z-direction limit switch 16 are arranged between piston cylinder 5 and sleeve 6, and X is to voice coil motor 8, X is to displacement transducer 11, X is to limit switch 14 and Y-direction voice coil motor 9, Y-direction displacement transducer 12, Y-direction limit switch 15 is arranged between sleeve 6 and lower installation board 2, and the driving force direction of Z-direction voice coil motor 10 is vertical direction, and X is mutually vertical in horizontal plane to the driving force direction of voice coil motor 8 and Y-direction voice coil motor 9, X, Y, Z-direction displacement transducer 11, 12, 13 and X, Y, Z-direction limit switch 14, 15, the line of action direction of 16 and X, Y, Z-direction voice coil motor 8, 9, the driving force direction of 10 is consistent, X, Y, Z-direction displacement transducer 11,12,13 are connected with the signal input part of controller 19 respectively with X, Y, Z-direction limit switch 14,15,16, the signal output part of controller 19 is connected with the signal input part of driver 20, and the signal output part of driver 20 is connected with X, Y, Z-direction voice coil motor 8,9,10 respectively.
The displacement that X, Y, Z-direction displacement transducer 11,12,13 couples of X, Y, Z-direction voice coil motor 8,9,10 export is measured, and the stroke that X, Y, Z-direction limit switch 14,15,16 couples of X, Y, Z-direction voice coil motor 8,9,10 move limits; Controller 19 is according to the feedback signal of X, Y, Z-direction displacement transducer 11,12,13 and X, Y, Z-direction limit switch 14,15,16, and control X, Y, Z-direction voice coil motor 8,9,10 accurately control the relative position between upper and lower mounting plate 1,2.
Be provided with gas pressure sensor 17 in described piston cylinder 5, piston cylinder 5 is provided with suction port 23 and solenoid valve 18, and gas pressure sensor 17 is connected with the signal input part of controller 19, and the signal output part of driver 20 is connected with solenoid valve 18.
The configuration mode that described magnetic floats thrust-bearing 24 is provided with permanent magnet 24a at sleeve 6 bottom surface sidewall, and at the relatively equipped electromagnetic coil 24b of lower installation board upper surface sidewall, it is 0.01mm ~ 1mm that magnetic floats gap 21 thickness.
Described X, Y, Z-direction voice coil motor 8,9,10 are cylinder type voice coil motor or plate voice coil motor.
Described X, Y, Z-direction displacement transducer 11,12,13 are grating scale, magnetic railings ruler, appearance grid chi or linear potentiometer.
Described X, Y, Z-direction limit switch 14,15,16 are mechanical type limit switch, Hall-type limit switch or photoelectric limit switch.
In described piston cylinder 5, gas pressure is 0.1MPa ~ 0.8MPa.
The magnetic that described vibrating isolation system comprises the decoupling zero of at least three air-floating ball bearing angles floats Zero-rigidity vibration isolator 30, and the magnetic of each air-floating ball bearing angle decoupling zero floats Zero-rigidity vibration isolator 30 one-tenth polygonal and arranges.
The magnetic that described vibrating isolation system comprises the decoupling zero of three air-floating ball bearing angles floats Zero-rigidity vibration isolator 30, and the magnetic of three air-floating ball bearing angles decoupling zero floats Zero-rigidity vibration isolator 30 triangularity and arranges.
One embodiment of the present of invention are provided below in conjunction with Fig. 1 ~ Fig. 3.In the present embodiment, during Zero-rigidity vibration isolator work, lower installation board 2 is arranged on ground, the pedestal of instrument or basic framework, and upper mounting plate 1 is connected with by the load of vibration isolation.X, Y, Z-direction voice coil motor 8,9,10 all adopt cylinder type voice coil motor.For Y-direction voice coil motor 9, it mainly comprises the parts such as Y-direction motor iron yoke 9a, Y-direction magnetic steel of motor 9b, Y-direction motor coil framework 9c, Y-direction motor coil 9d and Y-direction motor transitional part 9e.Y-direction motor iron yoke 9a and Y-direction motor coil framework 9c is cylindrical shape, and Y-direction magnetic steel of motor 9b is cylindrical, and Y-direction motor coil 9d is around on Y-direction motor coil framework 9c, and Y-direction motor transitional part 9e provides the mounting structure of Y-direction motor coil framework 9c.Y-direction motor iron yoke 9a and Y-direction magnetic steel of motor 9b forms motor stator, and Y-direction motor coil framework 9c, Y-direction motor coil 9d form electric mover.Pass to electric current in coil during machine operation, according to electromagnetic theory, hot-wire coil can be subject to Lorentz force effect in magnetic field, can be controlled the size and Orientation of motor output drive strength by the size and Orientation controlling electric current.
In the present embodiment, the mounting type of air-floating ball bearing 7 is: the lower surface of air-floating ball bearing 7 is arranged on piston cylinder 5, and is lubricated by sphere air bearing surface 27 and support, and upper surface and the upper mounting plate 1 of air-floating ball bearing 7 are rigidly connected.
X, Y, Z-direction displacement transducer 11,12,13 adopt grating scale.For Z-direction displacement transducer 13, it mainly comprises the parts such as Z-direction grating reading head transition piece 13a, Z-direction grating reading head 13b and Z-direction glass raster chi 13c, and Z-direction grating reading head transition piece 13a provides the mounting structure of Z-direction grating reading head 13b.During grating scale work, the relative displacement of itself and Z-direction glass raster chi 13c can detect by Z-direction grating reading head 13b, and gives controller 19 by signal conductor.
X, Y, Z-direction limit switch 14,15,16 adopt Hall-type limit switch.For Z-direction limit switch 16, it mainly comprises the parts such as Z-direction limiting stopper 16a, Z-direction Hall switch 16b and Z-direction limit switch transition piece 16c.Two Z-direction Hall switch 16b install back-to-back, and two Z-direction limiting stopper 16a are metallic material, are mounted opposite with the sensitivity end of Z-direction Hall switch 16b.Z-direction limit switch transition piece 16c provides the mounting structure of Z-direction Hall switch 16b.During limit switch work, when Z-direction Hall switch 16b is close to Z-direction limiting stopper 16a, Z-direction Hall switch 16b provides limit signal, and gives controller 19 by signal conductor.
In the present embodiment, Z-direction voice coil motor 10, Z-direction displacement transducer 13 and Z-direction limit switch 16 are installed between piston cylinder 5 and sleeve 6, and it is inner to be arranged on piston cylinder 5.
The carrying of vibration isolator to load realizes in the following way: clean compressed gas source 3 by tracheae 26, carry clean compressed air through solenoid valve 18, suction port 23 in piston cylinder 5.Controller 19 is according to the feedback signal of gas pressure sensor 17, the aperture of Controlling solenoid valve 18, regulate the gas flow be input in piston cylinder 5, thus the pressure of clean compressed air in regulating piston cylinder 5, make clean compressed air to piston cylinder 5 active force upwards and load, piston cylinder 5 and to load and the gravity of other component on piston cylinder 5 balances each other, the gravity compensation of realizing ideal and zero stiffness vibration isolating effect.
In the present embodiment, in piston cylinder 5, the pressure of clean compressed air is 0.4MPa, and the effective radius of piston cylinder 5 lower surface is 100mm, then the quality of single vibration isolator carrying is: m=p × π r
2/ g ≈ 1282kg, wherein p is gas pressure, and p=0.4MPa, r are the effective radius of piston cylinder 5 lower surface, and r=100mm, g are gravity accleration, g=9.8m/s
2.
Fig. 4 provides an embodiment of cylinder air bearing surface throttle orifice and sphere air bearing surface throttle orifice on piston cylinder.In the present embodiment, piston cylinder 5 sidewall along the circumferential direction uniform two arranges cylinder air bearing surface throttle orifices 25, and the quantity of often arranging cylinder air bearing surface throttle orifice 25 is 8, and diameter is φ 0.2mm.The concave spherical surface of piston cylinder 5 upper surface is along the circumferential direction uniformly distributed 8 sphere air bearing surface throttle orifices 28 around the center of circle, diameter is φ 0.2mm.
Fig. 5 provides the embodiment that the magnetic comprising the decoupling zero of three air-floating ball bearing angles floats the vibrating isolation system of Zero-rigidity vibration isolator.In the present embodiment, load 29 is irregularly shaped metal stage body, and weight is 4 tons, adopts the magnetic of three air-floating ball bearing angles decoupling zero to float Zero-rigidity vibration isolator 30 and carries out vibration isolation to it.The magnetic of three air-floating ball bearing angles decoupling zero floats an angle of Zero-rigidity vibration isolator 30 difference load-supporting 29, triangularity is arranged, the pressure of clean compressed air in regulating piston cylinder 5, clean compressed air is balanced each other to piston cylinder 5 active force upwards and load 29, piston cylinder 5 and the total force that loads on component on piston cylinder 5, makes piston cylinder 5 freely up and down can slide along sleeve 6.
Fig. 6 provides the embodiment that the magnetic comprising the decoupling zero of four air-floating ball bearing angles floats the vibrating isolation system of Zero-rigidity vibration isolator.In the present embodiment, load 29 is rectangular shape metal stage body, and weight is 8 tons, adopts the magnetic of four air-floating ball bearing angles decoupling zero to float Zero-rigidity vibration isolator 30 and carries out vibration isolation to it.The magnetic of four air-floating ball bearing angles decoupling zero floats an angle of Zero-rigidity vibration isolator 30 difference load-supporting 29, rectangularity is arranged, the pressure of clean compressed air in regulating piston cylinder 5, clean compressed air is balanced each other to piston cylinder 5 active force upwards and load 29, piston cylinder 5 and the total force that loads on component on piston cylinder 5, makes piston cylinder 5 freely up and down can slide along sleeve 6.
Claims (9)
1. the magnetic of air-floating ball bearing angle decoupling zero floats a Zero-rigidity vibration isolator, by upper mounting plate (1), lower installation board (2), clean compressed gas source (3), tracheae (26) and vibration isolator main body (4) composition, vibration isolator main body (4) is arranged between upper mounting plate (1) and lower installation board (2), clean compressed gas source (3) is connected with vibration isolator main body (4) by tracheae (26), it is characterized in that: the structure of described vibration isolator main body (4) is that the lower surface of sleeve (6) and lower installation board (2) float thrust-bearing (24) by magnetic and lubricate and support, piston cylinder (5) back-off is arranged in sleeve (6), and lubricate with sleeve (6) by the radial cylinder air bearing surface (22) that carries and support, air-floating ball bearing (7) is arranged between piston cylinder (5) and upper mounting plate (1), Z-direction voice coil motor (10), Z-direction displacement transducer (13) and Z-direction limit switch (16) are arranged between piston cylinder (5) and sleeve (6), and X is to voice coil motor (8), X is to displacement transducer (11), X is to limit switch (14) and Y-direction voice coil motor (9), Y-direction displacement transducer (12), Y-direction limit switch (15) is arranged between sleeve (6) and lower installation board (2), the driving force direction of Z-direction voice coil motor (10) is vertical direction, X is mutually vertical in horizontal plane to the driving force direction of voice coil motor (8) and Y-direction voice coil motor (9), X, Y, Z-direction displacement transducer (11, 12, 13) and X, Y, Z-direction limit switch (14, 15, 16) line of action direction and X, Y, Z-direction voice coil motor (8, 9, 10) driving force direction is consistent, X, Y, Z-direction displacement transducer (11,12,13) are connected with the signal input part of controller (19) respectively with X, Y, Z-direction limit switch (14,15,16), the signal output part of controller (19) is connected with the signal input part of driver (20), and the signal output part of driver (20) is connected with X, Y, Z-direction voice coil motor (8,9,10) respectively.
2. the magnetic of air-floating ball bearing angle according to claim 1 decoupling zero floats Zero-rigidity vibration isolator, it is characterized in that: in described piston cylinder (5), be provided with gas pressure sensor (17), piston cylinder (5) is provided with suction port (23) and solenoid valve (18), gas pressure sensor (17) is connected with the signal input part of controller (19), and the signal output part of driver (20) is connected with solenoid valve (18).
3. the magnetic of air-floating ball bearing angle according to claim 1 decoupling zero floats Zero-rigidity vibration isolator, it is characterized in that: the configuration mode that described magnetic floats thrust-bearing (24) is provided with permanent magnet (24a) at sleeve (6) bottom surface sidewall, at the relatively equipped electromagnetic coil (24b) of lower installation board upper surface sidewall, it is 0.01mm ~ 1mm that magnetic floats gap (21) thickness.
4. the magnetic of air-floating ball bearing angle according to claim 1 decoupling zero floats Zero-rigidity vibration isolator, it is characterized in that: described X, Y, Z-direction voice coil motor (8,9,10) are cylinder type voice coil motor or plate voice coil motor.
5. the magnetic of air-floating ball bearing angle according to claim 1 decoupling zero floats Zero-rigidity vibration isolator, it is characterized in that: described X, Y, Z-direction displacement transducer (11,12,13) are grating scale, magnetic railings ruler, appearance grid chi or linear potentiometer.
6. the magnetic of air-floating ball bearing angle according to claim 1 decoupling zero floats Zero-rigidity vibration isolator, it is characterized in that: described X, Y, Z-direction limit switch (14,15,16) are mechanical type limit switch, Hall-type limit switch or photoelectric limit switch.
7. the magnetic of air-floating ball bearing angle according to claim 1 decoupling zero floats Zero-rigidity vibration isolator, it is characterized in that: described piston cylinder (5) interior gas pressure is 0.1MPa ~ 0.8MPa.
8. one kind is floated by the magnetic of described air-floating ball bearing angle decoupling zero arbitrary in claim 1 to 7 vibrating isolation system that Zero-rigidity vibration isolator forms, it is characterized in that: the magnetic that described vibrating isolation system comprises the decoupling zero of at least three air-floating ball bearing angles floats Zero-rigidity vibration isolator (30), the magnetic of each air-floating ball bearing angle decoupling zero floats Zero-rigidity vibration isolator (30) and becomes polygonal to arrange.
9. vibrating isolation system according to claim 8, it is characterized in that: the magnetic that described vibrating isolation system comprises the decoupling zero of three air-floating ball bearing angles floats Zero-rigidity vibration isolator (30), the magnetic of three air-floating ball bearing angles decoupling zero floats Zero-rigidity vibration isolator (30) triangularity and arranges.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201210574787.3A CN103062303B (en) | 2012-12-19 | 2012-12-19 | The magnetic of air-floating ball bearing angle decoupling zero floats Zero-rigidity vibration isolator and vibrating isolation system |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201210574787.3A CN103062303B (en) | 2012-12-19 | 2012-12-19 | The magnetic of air-floating ball bearing angle decoupling zero floats Zero-rigidity vibration isolator and vibrating isolation system |
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| CN103062303A CN103062303A (en) | 2013-04-24 |
| CN103062303B true CN103062303B (en) | 2015-07-29 |
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| CN103047346B (en) * | 2012-12-19 | 2014-06-11 | 哈尔滨工业大学 | Magnetic suspension zero-stiffness vibration isolator with angular decoupling function by aid of rolling joint bearing and vibration isolation system with magnetic suspension zero-stiffness vibration isolator |
| CN108945537A (en) * | 2018-08-31 | 2018-12-07 | 天津航天机电设备研究所 | Spacecraft three-dimensional zero-g simulator based on double-stage air floatation |
| CN109210073B (en) * | 2018-10-15 | 2023-11-07 | 杭州电子科技大学 | Air-magnetic mixed spherical hinge joint and assembly method thereof during use |
| CN109795724B (en) * | 2019-01-25 | 2020-07-14 | 上海卫星工程研究所 | Double-super-satellite platform test device based on integration of air floating ball and journal bearing |
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| EP1160628B1 (en) * | 2000-06-02 | 2007-07-18 | ASML Netherlands B.V. | Lithographic projection apparatus with a supporting assembly |
| US6953109B2 (en) * | 2002-10-08 | 2005-10-11 | Nikon Corporation | Vibration isolator with low lateral stiffness |
| CN102543217B (en) * | 2012-01-20 | 2013-10-23 | 澳门大学 | Macro-micro driven bidimensional integrated micro positioning platform |
| CN102734379B (en) * | 2012-06-09 | 2013-12-11 | 哈尔滨工业大学 | Active vibration isolating device based on composite support of electromagnetism and static-pressure air floatation |
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| US5844664A (en) * | 1995-05-30 | 1998-12-01 | U.S. Philips Corporation | Positioning device with a force actuator system for compensating center-of-gravity displacements, and lithographic device provided with such a positioning device |
| WO1999022272A1 (en) * | 1997-10-23 | 1999-05-06 | Koninklijke Philips Electronics N.V. | Lithographic pneumatic support device with controlled gas supply |
| CN101398636A (en) * | 2008-09-17 | 2009-04-01 | 华中科技大学 | Precision vibration damping assembly and vibration damping platform composed of the assembly |
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