CN103062317A - Vibration isolator with characteristics of two-dimensional flexible hinge angle decoupling and magnetic levitation plane drive positioning - Google Patents
Vibration isolator with characteristics of two-dimensional flexible hinge angle decoupling and magnetic levitation plane drive positioning Download PDFInfo
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- CN103062317A CN103062317A CN2012105758721A CN201210575872A CN103062317A CN 103062317 A CN103062317 A CN 103062317A CN 2012105758721 A CN2012105758721 A CN 2012105758721A CN 201210575872 A CN201210575872 A CN 201210575872A CN 103062317 A CN103062317 A CN 103062317A
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Abstract
The invention provides a vibration isolator with characteristics of two-dimensional flexible hinge angle decoupling and magnetic levitation plane drive positioning and belongs to the technical field of precise vibration isolating technologies. A sleeve of a vibration isolator main body and a lower installing plate are born though magnetic levitation action of a magnetic levitation plane motor, a piston barrel and the sleeve are respectively lubricated and supported through air floating faces, and angle motion freedom between an upper installing plate and the lower installing plate is decoupled through a two-dimensional flexible hinge. A motor, a displacement sensor, a limiting switch, a controller and a driver form a position closed loop feedback control system for accurately controlling opposite positions of the upper installing plate and the lower installing plate. The vibration isolator has the three-dimensional approximate zero stiffness, high positional accuracy and angle decoupling characteristics, can have ultra-low inherent frequency and prominent low-frequency/ultra-low-frequency vibration isolating performance, and accordingly and effectively solves the high-performance vibration isolating problem of a precise measuring instrument, a processing device and especially a step scan photo-etching machine.
Description
Technical field
The invention belongs to the accurate vibration isolation technical field, relate generally to the vibration isolator that the decoupling zero of a kind of two-dimension flexible hinge angle and maglev planar drive the location.
Background technique
Along with improving constantly of ultraprecise processing and measuring accuracy, ambient vibration becomes the key factor that restriction ultraprecise process unit and surveying instrument precision and performance improve.Especially step-by-step scanning photo-etching device is the vlsi circuit process unit of representative, technology-intensive degree and complexity are high, key technical index has all reached the limit of prior art, represented the highest level of ultraprecise process unit, the ultraprecise vibration isolation becomes the core key technology in this type of equipment; The live width of step-by-step scanning photo-etching device has reached 22nm and following, silicon chip Location accuracy and alignment precision all reach several nanometers, and the work stage movement velocity reaches more than the 1m/s, and the work stage acceleration reaches tens times of gravity accleration, and this has proposed new challenge to existing vibration isolation technique.At first, lithography machine need to provide for metering system and photoetched object lens the working environment of " super quiet ", simultaneously again the demand motive work stage at full speed with High acceleration motion, this anti-vibration performance to vibrating isolation system has proposed extremely harsh requirement, and the natural frequency of its three directions all needs to reach below the 1Hz; Secondly, relative position between each parts of lithography machine, the distance of photoetched object lens and silicon chip surface for example, all has very strict requirement, and be under the control of position closed loop feedback control system, require the relative positional accuracy between the upper and lower mounting plate of vibration isolator to reach 10 μ m magnitudes, the Location accuracy of traditional vibration isolator can not meet the demands far away.
According to theory of vibration isolation, the natural frequency of passive type vibration isolator is directly proportional with rigidity, is inversely proportional to load quality, therefore under the certain prerequisite of load quality, the rigidity that reduces vibration isolator is the effective way that reduces natural frequency, improves low frequency and superlow frequency vibration isolating performance.There are the intrinsic contradictions of static bearing capacity and rigidity in the vibration isolator of the forms such as conventional air spring, restricted by the factors such as material behavior, structural rigidity, and it is very difficult to rigidity further to reduce its rigidity, especially level.For this problem, the researcher is incorporated into " pendulum " formula structure in the air cushion shock absorber, reaches purpose (the 1.Nikon Corporation.Vibration Isolator With Low Lateral Stiffness. U.S. Patent Publication No.: US20040065517Al that reduces the vibration isolator horizontal rigidity; 2.U.S.Philips Corporation.Positioning Device with a Force Actuator Systemfor Compensating Center-of-gravity Displacements, and Lithographic Device Provided with Such APositioning Device. U.S. Patent number: US005844664A).The method can reduce the horizontal rigidity of air cushion shock absorber to a certain extent, promotes its low frequency vibration isolation performance.The problem that the method exists is: restricted by material behavior and structural rigidity, vibration isolator is vertical limited to the amplitude of stiffness degradation with level; 2) the vertical and level of air cushion shock absorber is all very poor to Location accuracy, can't satisfy the requirement of photoetching process; 3) will reach lower horizontal rigidity needs larger pendulum length, causes the vibration isolator height excessive, the string membrane resonance occurs easily, poor stability.
By to the analysis of existing air cushion shock absorber technological scheme as seen, existing air cushion shock absorber is difficult to satisfy lithography machine to the requirement of ultralow rigidity and high position precision.Germany IDE company has proposed a kind of vibration isolator technological scheme (1.Integrated Dynamics Engineering GmbH.Isolatorgeometrie EinesSchwingungsisolationssystem. european patent number: EP1803965A2 of abandoning tradition rubber air spring; 2.Integrated Dynamics EngineeringGmbH.Schwingungsisolationssystem Mit Pneumatischem Tiefpassfilter. european patent number: EP1803970A2; 3.Integrated Dynamics Engineering GmbH.Air Bearing with Consideration ofHigh-Frequency Resonances. U.S. Patent Publication No.: US20080193061A1).This scheme adopts vertical and level is carried out decoupling zero and vibration isolation to air bearing surface to the vibration of all directions, can reach extremely low rigidity and natural frequency.The problem that this scheme exists is: 1) in the public technology scheme, vibration isolator can't be realized accurate location; 2) among the patent EP1803965A2, do not have the angular motion degrees of freedom around horizontal rotational shaft between the upper and lower mounting plate, the angular rigidity of this direction and natural frequency are all very high; Patent EP1803970A2 and US20080193061A1 adopt block rubber to provide angular motion degrees of freedom around horizontal rotational shaft for upper and lower mounting plate, but because the block rubber angular rigidity is very large, can't effectively carry out the angular motion freedom decoupling, there is frictional force between the angular motion freedom decoupling mechanism components and introduces additional stiffness, restriction anti-vibration performance.
Holland ASML company has also proposed similar vibration isolator technological scheme (1.U.S.Philips Corp, ASM LithographyB.V.Pneumatic Support Device with A Controlled Gas Supply, and Lithographic Device Providedwith Such A Support Device. U.S. Patent number: US006144442A; 2.Koninklijke Philips ElectronicsN.V., ASM Lithography B.V.Lithographic Pneumatic Support Device with Controlled Gas Supply. International Patent Publication No.: WO99/22272; 3.ASML Netherlands B.V.Support Device, LithographicApparatus, and Device Manufacturing Method Employing A Supporting Device, and A PositionControl System Arranged for Use in A Supporting Device. U.S. Patent number: US007084956B2; 4.ASML Netherlands B.V.Support Device, Lithographic Apparatus, and Device ManufacturingMethod Employing A Supporting Device and A Position Control System Arranged for Use in ASupporting Device. european patent number: EP1486825A1).Among patent US006144442A and the WO99/22272 bleed pressure is carried out closed-loop feedback control, reach the stability of raising vibration isolator and the purpose of performance; Be provided with vibration transducer at upper mounting plate among patent US007084956B2 and the EP1486825A1, introduce simultaneously with reference to vibration system, promote the anti-vibration performance of vibration isolator by control algorithm.But the technological scheme that proposes still do not solve the accurate location of vibration isolator and the angular motion freedom decoupling problem of upper and lower mounting plate.
Summary of the invention
The objective of the invention is for ultra precise measurement instrument and process unit, especially the vlsi circuit process unit such as step-by-step scanning photo-etching device is to the low natural frequency of vibration isolator, the an urgent demand of high position precision, provide the decoupling zero of a kind of two-dimension flexible hinge angle and maglev planar to drive the vibration isolator of location, vibration isolator has three-dimensional approximate zero rigidity and extremely low natural frequency, on, can accurately locate and the angle decoupling zero between the lower installation board, thereby effectively solve ultra precise measurement instrument and process unit, especially the accurate vibration isolation problem in the step-by-step scanning photo-etching device.
The object of the present invention is achieved like this:
The decoupling zero of a kind of two-dimension flexible hinge angle and maglev planar drive the vibration isolator of location, by upper mounting plate, lower installation board, clean compressed gas source, tracheae and vibration isolator main body form, the vibration isolator main body is installed in upper mounting plate and lower installation board) between, clean compressed gas source is connected with the vibration isolator main body by tracheae, the structure of described vibration isolator main body is: the lower surface of sleeve and lower installation board carry by the floating gap of magnetic of the magnetic suspension effect formation of maglev planar motor, the piston cylinder back-off is installed in the sleeve, and with sleeve by radially carry the cylinder air bearing surface lubricated with support, two-dimension flexible hinge is installed between piston cylinder and the upper mounting plate, the Z-direction voice coil motor, Z-direction displacement transducer and Z-direction limit switch are installed between piston cylinder and the sleeve, the X-direction voice coil motor, the X-direction displacement transducer, X-direction limit switch and Y-direction voice coil motor, the Y-direction displacement transducer, the Y-direction limit switch is installed between sleeve and the lower installation board, the driving force direction of Z-direction voice coil motor and the X-direction driving force of maglev planar motor, Y-direction driving force direction is orthogonal in twos, the Z-direction displacement transducer, the line of action direction of Z-direction limit switch is consistent with the driving force direction of Z-direction voice coil motor, the X-direction displacement transducer, the line of action direction of X-direction limit switch is consistent with the X-direction driving force of maglev planar motor, the Y-direction displacement transducer, the line of action direction of Y-direction limit switch is consistent with the Y-direction driving force direction of maglev planar motor; X, Y, Z-direction displacement transducer are connected Y, Z-direction limit switch and are connected with the signal input part of controller respectively with X, the signal output part of controller is connected with the signal input part of driver, and the signal output part of driver respectively maglev planar motor, Z-direction voice coil motor connects.
Be provided with gas pressure sensor in the described piston cylinder, piston cylinder is provided with suction port and solenoid valve, and gas pressure sensor is connected with the signal input part of controller, and the signal output part of driver is connected with solenoid valve.
The configuration mode of described maglev planar motor is at sleeve bottom surface sidewall the maglev planar motor mover that connects without wire to be installed, at the relatively equipped maglev planar motor stator of lower installation board upper surface sidewall.
Described Z-direction voice coil motor is cylinder type voice coil motor or plate voice coil motor.
Described X, Y, Z-direction displacement transducer are grating scale, magnetic railings ruler, appearance grid chi or linear potentiometer.
Described X, Y, Z-direction limit switch are mechanical type limit switch, Hall-type limit switch or photoelectric limit switch.
Gas pressure is 0.1MPa～0.8MPa in the described piston cylinder.
The floating gap of magnetic between described maglev planar motor mover and the maglev planar motor stator is 0.01mm～1mm.
The good result of technological innovation of the present invention and generation is:
(1) the present invention has abandoned the vibration isolator technological scheme of tradition based on elastic element/mechanism, adopt maglev planar motor, radially carry the cylinder air bearing surface and respectively substantially horizontal and vertical vibration are carried out decoupling zero and vibration isolation, horizontal rigidity was approximately zero when the magnetic suspension bearing mode was exported without Locating driver power at motor, with air bearing surface, can make vibration isolator obtain approximate zero stiffness characteristics and outstanding superlow frequency vibration isolating performance, having solved prior art limited by structural rigidity, material behavior, rigidity is difficult to further reduction, rigidity and the stable problem that can not take into account.This is that the present invention is different from one of innovative point of prior art.
(2) the present invention adopts displacement transducer chi, limit switch, controller, driver and motor to consist of the position closed loop feedback control system, relative position between the upper and lower mounting plate is accurately controlled, Location accuracy can reach 10 μ m and more than, the problem that can solve effectively that prior art scheme Location accuracy is low, Location accuracy and rigidity and anti-vibration performance can not be taken into account.This is two of the present invention's innovative point of being different from prior art.
(3) the present invention adopts two-dimension flexible hinge that decoupling zero is carried out in the angular motion between the upper and lower mounting plate, two-dimension flexible hinge is without friction, without wearing and tearing, the additional angular rigidity of introducing can be ignored, and have very high bearing capacity, can effectively solve friction and wear that the existing method that adopts elastomer to carry out the angle decoupling zero exists, introduce the problem such as larger additional stiffness.This is three of the present invention's innovative point of being different from prior art.
(4) the present invention adopts gas pressure sensor, solenoid valve and controller, driver etc. to consist of the pressure closed loop feedback control system, accurately the gas pressure in the control sleeve makes it to keep constant, thrust load to vibration isolator is carried out gravitational equilibrium and compensation, under the effect of radially carrying the cylinder air bearing surface, the piston cylinder of carry load gravity can freely slide up and down with zero stiffness along sleeve, thus the gravitational equilibrium of realizing ideal and zero stiffness vibration isolating effect.This is four of the present invention's innovative point of being different from prior art.
(5) the present invention adopts active actuators that the relative position between the upper and lower mounting plate and the gas pressure in the piston cylinder are carried out ACTIVE CONTROL, the vibration isolator parameter can be according to being regulated in real time by vibration isolation features of the object and working environment variation, thereby adapt to different operating modes, have preferably flexibility, adaptability and stability.This is five of the present invention's innovative point of being different from prior art.
Description of drawings
Fig. 1 is the structural representation that the decoupling zero of two-dimension flexible hinge angle and maglev planar drive the vibration isolator of location;
Fig. 2 is the cross-sectional view that the decoupling zero of two-dimension flexible hinge angle and maglev planar drive the vibration isolator of location;
Fig. 3 is the structural representation that two one-dimensional flexible hinge orthogonal superpositions consist of a two-dimension flexible hinge;
Fig. 4 is the structural representation of cylindrical two-dimension flexible hinge;
Fig. 5 is the control structure block diagram that the decoupling zero of two-dimension flexible hinge angle and maglev planar drive the vibration isolator of location;
Fig. 6 is the schematic representation of cylinder air bearing surface throttle orifice on the piston cylinder.
Piece number explanation among the figure: 1 upper mounting plate, 2 lower installation boards, 3 clean compressed gas sources, 4 vibration isolator main bodys, 5 piston cylinders, 6 sleeves, 7 two-dimension flexible hinges, 10Z is to voice coil motor, 10a Z-direction motor iron yoke, 10b Z-direction magnetic steel of motor, 10c Z-direction motor coil skeleton, 10d Z-direction motor coil, 10e Z-direction motor transitional spare, 11X is to displacement transducer, 12Y is to displacement transducer, 12a Y-direction grating reading head transition piece, 12b Y-direction grating reading head, 12c Y-direction glass raster chi, 13Z is to displacement transducer, 13a Z-direction grating reading head transition piece, 13b Z-direction grating reading head, 13c Z-direction glass raster chi, 14X is to limit switch, 15Y is to limit switch, 15aY is to limiting stopper, 15b Y-direction Hall switch, 15c Y-direction limit switch transition piece, 15dY is to the limiting stopper transition piece, 16Z is to limit switch, 16a Z-direction limiting stopper, 16b Z-direction Hall switch, 16c Z-direction limit switch transition piece, 17 gas pressure sensors, 18 solenoid valves, 19 controllers, 20 drivers, 21 magnetic float the gap, 22 radially carry the cylinder air bearing surface, 23 suction ports, 24 maglev planar motors, 24a maglev planar motor mover, 24b maglev planar motor stator, 25 cylinder air bearing surface throttle orifices, 26 tracheaes, 27 cylindrical two-dimension flexible hinges.
Embodiment
Provide specific embodiments of the invention below in conjunction with accompanying drawing.
The decoupling zero of a kind of two-dimension flexible hinge angle and maglev planar drive the vibration isolator of location, by upper mounting plate 1, lower installation board 2, clean compressed gas source 3, tracheae 26 and vibration isolator main body 4 form, vibration isolator main body 4 is installed between upper mounting plate 1 and the lower installation board 2, clean compressed gas source 3 is connected with vibration isolator main body 4 by tracheae 26, the structure of described vibration isolator main body 4 is: the lower surface of sleeve 6 and lower installation board 2 carry by the floating gap 21 of magnetic of the magnetic suspension effect formation of maglev planar motor 24, piston cylinder 5 back-offs are installed in the sleeve 6, and with sleeve 6 by radially carry cylinder air bearing surface 22 lubricated with support, two-dimension flexible hinge 7 is installed between piston cylinder 5 and the upper mounting plate 1, Z-direction voice coil motor 10, Z-direction displacement transducer 13 and Z-direction limit switch 16 are installed between piston cylinder 5 and the sleeve 6, X-direction displacement transducer 11, X-direction limit switch 14 and Y-direction displacement transducer 12, Y-direction limit switch 15 is installed between sleeve 6 and the lower installation board 2, the driving force direction of Z-direction voice coil motor 10 and the X-direction driving force of maglev planar motor 24, Y-direction driving force direction is orthogonal in twos, Z-direction displacement transducer 13, the line of action direction of Z-direction limit switch 16 is consistent with the driving force direction of Z-direction voice coil motor 10, X-direction displacement transducer 11, the line of action direction of X-direction limit switch 14 is consistent with the X-direction driving force of maglev planar motor 24, Y-direction displacement transducer 12, the line of action direction of Y-direction limit switch 15 is consistent with the Y-direction driving force direction of maglev planar motor 24; X, Y, Z- direction displacement transducer 11,12,13 are connected Y, Z- direction limit switch 14,15,16 and are connected with the signal input part of controller 19 respectively with X, the signal output part of controller 19 is connected with the signal input part of driver 20, and the signal output part of driver 20 is connected with maglev planar motor 24, Z-direction voice coil motor 10 respectively.
X, Y, Z- direction displacement transducer 11,12,13 pairs of X, Y, Z-direction voice coil motor 8,9,10 displacements of exporting are measured, and X, Y, Z- direction limit switch 14,15,16 pairs of X, Y, Z-direction voice coil motor 8,9,10 strokes that move limit; Controller 19 is according to X, Y, Z- direction displacement transducer 11,12,13 and X, Y, Z- direction limit switch 14,15,16 feedback signal, and the relative position between control X, Y, Z-direction voice coil motor 8,9, the 10 pairs of upper and lower mounting plates 1,2 is accurately controlled.
Be provided with gas pressure sensor 17 in the described piston cylinder 5, piston cylinder 5 is provided with suction port 23 and solenoid valve 18, and gas pressure sensor 17 is connected with the signal input part of controller 19, and the signal output part of driver 20 is connected with solenoid valve 18.
The configuration mode of described magnetic maglev planar motor 24 is at sleeve 6 bottom surface sidewalls the maglev planar motor mover 24a that connects without wire to be installed, at the relatively equipped maglev planar motor stator 24b of lower installation board upper surface sidewall.
Described Z-direction voice coil motor 10 is cylinder type voice coil motor or plate voice coil motor.
Described X, Y, Z- direction displacement transducer 11,12,13 are grating scale, magnetic railings ruler, appearance grid chi or linear potentiometer.
Described X, Y, Z- direction limit switch 14,15,16 are mechanical type limit switch, Hall-type limit switch or photoelectric limit switch.
Described piston cylinder 5 interior gas pressures are 0.1MPa～0.8MPa.
The floating gap 21 of magnetic between described maglev planar motor mover 24a and the maglev planar motor stator 24b is 0.01mm～1mm.
Provide one embodiment of the present of invention below in conjunction with Fig. 1～Fig. 2, Fig. 5.In the present embodiment, in zero stiffness vibration isolator when work,, lower installation board 2 is installed on the pedestal or basic framework of ground, instrument, upper mounting plate 1 be connected by the load of vibration isolation.Z-direction voice coil motor 10 adopts the cylinder type voice coil motor, and it mainly comprises the parts such as Z-direction motor iron yoke 10a, Z-direction magnetic steel of motor 10b, Z-direction motor coil skeleton 10c, Z-direction motor coil 10d and Z-direction motor transitional spare 10e.Z-direction motor iron yoke 10a and Z-direction motor coil skeleton 10c are cylindrical shape, and Z-direction magnetic steel of motor 10b is cylindrical, and Z-direction motor coil 10d is around on the Z-direction motor coil skeleton 10c, and Z-direction motor transitional spare 10e provides the mounting structure of Z-direction motor coil skeleton 10c.Z-direction motor iron yoke 10a and Z-direction magnetic steel of motor 10b consist of motor stator, and Z-direction motor coil skeleton 10c, Z-direction motor coil 10d consist of the mover of motor.Z-direction motor transitional spare 10e provides the mounting structure of Z-direction motor coil skeleton 10c.Pass to electric current during machine operation in the coil, according to electromagnetic theory, hot-wire coil can be subject to the Lorentz force effect in magnetic field, can control the size and Orientation of motor output drive strength by the size and Orientation of control electric current.
X, Y, Z- direction displacement transducer 11,12,13 adopt grating scale.Take Z-direction displacement transducer 13 as example, it mainly comprises the parts such as Z-direction grating reading head transition piece 13a, Z-direction grating reading head 13b and Z-direction glass raster chi 13c, and Z-direction grating reading head transition piece 13a provides the mounting structure of Z-direction grating reading head 13b.In grating scale when work,, Z-direction grating reading head 13b can detect the relative displacement of itself and Z-direction glass raster chi 13c, and gives controller 19 by signal conductor.
X, Y, Z- direction limit switch 14,15,16 adopt the Hall-type limit switch.Take Z-direction limit switch 16 as example, it mainly comprises the parts such as Z-direction limiting stopper 16a, Z-direction Hall switch 16b and Z-direction limit switch transition piece 16c.Two Z-direction Hall switch 16b install back-to-back, and two Z-direction limiting stopper 16a are metallic material, with relative installation of sensitivity end of Z-direction Hall switch 16b.Z-direction limit switch transition piece 16c provides the mounting structure of Z-direction Hall switch 16b.In limit switch when work,, as Z-direction Hall switch 16b during near Z-direction limiting stopper 16a, Z-direction Hall switch 16b provides limit signal, and gives controller 19 by signal conductor.
In the present embodiment, Z-direction voice coil motor 10, Z-direction displacement transducer 13 and Z-direction limit switch 16 are installed between piston cylinder 5 and the sleeve 6, and are installed in piston cylinder 5 inside.
Vibration isolator is realized in the following way to the carrying of load: clean compressed gas source 3 by tracheae 26, through solenoid valve 18, suction port 23 to piston cylinder 5 interior conveying clean compressed airs.Controller 19 is according to the feedback signal of gas pressure sensor 17, the aperture of control solenoid valve 18, adjusting is input to the gas flow in the piston cylinder 5, thereby the pressure of regulating piston cylinder 5 interior clean compressed airs, make active force and load, the piston cylinder 5 that clean compressed air makes progress to piston cylinder 5 and the gravity that loads on other component on the piston cylinder 5 balance each other the gravity compensation of realizing ideal and zero stiffness vibration isolating effect.
In the present embodiment, the pressure of piston cylinder 5 interior clean compressed airs is made as 0.4Mpa, and the effective radius of piston cylinder 5 lower surfaces is 100mm, and then the quality of single vibration isolator carrying is: m=p * π r
2/ g ≈ 1282kg, wherein p is gas pressure, and p=0.4Mpa, r are the effective radius of piston cylinder 5 lower surfaces, and r=100mm, g are gravity accleration, g=9.8n/m
2
Fig. 3 provides an embodiment of two-dimension flexible hinge.In the present embodiment, two-dimension flexible hinge 7 is that two one-dimensional flexible hinge orthogonal superpositions consist of.
Fig. 4 provides another embodiment of two-dimension flexible hinge.In the present embodiment, thin, the thick cylindrical form in two ends in the middle of cylindrical two-dimension flexible hinge 27 is processed into.
Fig. 6 provides an embodiment of cylinder air bearing surface throttle orifice on the piston cylinder.In the present embodiment, along the circumferential direction uniform two arrange cylinder air bearing surface throttle orifices 25 on piston cylinder 5 sidewalls, the quantity of every row's cylinder air bearing surface throttle orifice 25 is 8, and diameter is φ 0.2mm.
Claims (8)
1. two-dimension flexible hinge angle decoupling zero and maglev planar drive the vibration isolator of location, by upper mounting plate (1), lower installation board (2), clean compressed gas source (3), tracheae (26) and vibration isolator main body (4) form, vibration isolator main body (4) is installed between upper mounting plate (1) and the lower installation board (2), clean compressed gas source (3) is connected with vibration isolator main body (4) by tracheae (26), it is characterized in that: the structure of described vibration isolator main body (4) is: the lower surface of sleeve (6) and lower installation board (2) carry by the floating gap (21) of magnetic of the magnetic suspension effect formation of maglev planar motor (24), piston cylinder (5) back-off is installed in the sleeve (6), and with sleeve (6) by radially carry cylinder air bearing surface (22) lubricated with support, two-dimension flexible hinge (7) is installed between piston cylinder (5) and the upper mounting plate (1), Z-direction voice coil motor (10), Z-direction displacement transducer (13) and Z-direction limit switch (16) are installed between piston cylinder (5) and the sleeve (6), X-direction displacement transducer (11), X-direction limit switch (14) and Y-direction displacement transducer (12), Y-direction limit switch (15) is installed between sleeve (6) and the lower installation board (2), the X-direction driving force of the driving force direction of Z-direction voice coil motor (10) and maglev planar motor (24), Y-direction driving force direction is orthogonal in twos, Z-direction displacement transducer (13), the line of action direction of Z-direction limit switch (16) is consistent with the driving force direction of Z-direction voice coil motor (10), X-direction displacement transducer (11), the line of action direction of X-direction limit switch (14) is consistent with the X-direction driving force of maglev planar motor (24), Y-direction displacement transducer (12), the line of action direction of Y-direction limit switch (15) is consistent with the Y-direction driving force direction of maglev planar motor (24); X, Y, Z-direction displacement transducer (11,12,13) are connected Y, Z-direction limit switch (14,15,16) and are connected with the signal input part of controller (19) respectively with X, the signal output part of controller (19) is connected with the signal input part of driver (20), and the signal output part of driver (20) is connected with maglev planar motor (24), Z-direction voice coil motor (10) respectively.
2. two-dimension flexible hinge angle according to claim 1 decoupling zero and maglev planar drive the vibration isolator of location, it is characterized in that: be provided with gas pressure sensor (17) in the described piston cylinder (5), piston cylinder (5) is provided with suction port (23) and solenoid valve (18), gas pressure sensor (17) is connected with the signal input part of controller (19), and the signal output part of driver (20) is connected with solenoid valve (18).
3. two-dimension flexible hinge angle according to claim 1 decoupling zero and maglev planar drive the vibration isolator of location, it is characterized in that: the configuration mode of described maglev planar motor (24) is at sleeve (6) bottom surface sidewall the maglev planar motor mover (24a) that connects without wire to be installed, at the relatively equipped maglev planar motor stator (24b) of lower installation board upper surface sidewall.
4. two-dimension flexible hinge angle according to claim 1 decoupling zero and maglev planar drive the vibration isolator of location, and it is characterized in that: described Z-direction voice coil motor (10) is cylinder type voice coil motor or plate voice coil motor.
5. two-dimension flexible hinge angle according to claim 1 decoupling zero and maglev planar drive the vibration isolator of location, it is characterized in that: described X, Y, Z-direction displacement transducer (11,12,13) are grating scale, magnetic railings ruler, appearance grid chi or linear potentiometer.
6. two-dimension flexible hinge angle according to claim 1 decoupling zero and maglev planar drive the vibration isolator of location, and it is characterized in that: described X, Y, Z-direction limit switch (14,15,16) are mechanical type limit switch, Hall-type limit switch or photoelectric limit switch.
7. two-dimension flexible hinge angle according to claim 1 decoupling zero and maglev planar drive the vibration isolator of location, and it is characterized in that: the interior gas pressure of described piston cylinder (5) is 0.1MPa～0.8MPa.
8. two-dimension flexible hinge angle according to claim 3 decoupling zero and maglev planar drive the vibration isolator of location, it is characterized in that: the floating gap (21) of the magnetic between described maglev planar motor mover (24a) and the maglev planar motor stator (24b) is 0.01mm～1mm.
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106179933A (en) * | 2016-06-29 | 2016-12-07 | 北京空间飞行器总体设计部 | One angular oscillation activator a little |
| CN109036495A (en) * | 2018-08-23 | 2018-12-18 | 三英精控（天津）科技有限公司 | A kind of Z-direction nanometer displacement locating platform based on flexible hinge |
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| CN106179933A (en) * | 2016-06-29 | 2016-12-07 | 北京空间飞行器总体设计部 | One angular oscillation activator a little |
| CN106179933B (en) * | 2016-06-29 | 2018-04-27 | 北京空间飞行器总体设计部 | A kind of angular oscillation driver a little |
| CN109036495A (en) * | 2018-08-23 | 2018-12-18 | 三英精控（天津）科技有限公司 | A kind of Z-direction nanometer displacement locating platform based on flexible hinge |
| CN109036495B (en) * | 2018-08-23 | 2021-02-19 | 三英精控（天津）科技有限公司 | Z-direction nanometer displacement positioning platform based on flexible hinge |
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| CN103062317B (en) | 2014-11-12 |
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