CN103062286B - Zero stiffness vibration isolator for flexible membrane angle decoupling and vibration isolation system formed by same - Google Patents
Zero stiffness vibration isolator for flexible membrane angle decoupling and vibration isolation system formed by same Download PDFInfo
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Abstract
The invention provides a zero stiffness vibration isolator for flexible membrane angle decoupling and a vibration isolation system formed by the same and belongs to the technical field of precision vibration isolation. A sleeve of a vibration isolator main body and a lower installation plate are lubricated and supported through an air floating surface, angular motion freedom degree between an upper installation plate and the lower installation plate is decoupled through a flexible membrane, a position closed-loop feedback control system is formed by a voice coil motor, a displacement sensor, a limit switch, a controller and an actuator to perform accurate control on the relative position of the upper installation plate and the lower installation plate. The zero stiffness vibration isolator for the flexible membrane angle decoupling and the vibration isolation system formed by the zero stiffness vibration isolator have the advantages of being free of three-dimensional stiffness, high in positioning accuracy and angle decoupling and capable of obtaining very low inherent frequency and prominent low frequency/ultra-low frequency vibration isolation performance, thereby effectively solving problem of high-performance vibration isolation in ultra-precise measurement devices and processing devices, in particular to step scanning photoetching machines.
Description
Technical field
The invention belongs to accurate vibration isolation technical field, relate generally to the zero stiffness vibration isolator of a kind of flexible membrane angle decoupling zero and the vibrating isolation system being formed by it.
Background technique
Along with improving constantly of ultraprecise processing and measuring accuracy, ambient vibration becomes the key factor that restriction ultraprecise process unit and surveying instrument precision and performance improve.Especially the vlsi circuit process unit that step-by-step scanning photo-etching device is representative, technology-intensive degree and complexity are high, key technical index has all reached the limit of prior art, represented the highest level of ultraprecise process unit, ultraprecise vibration isolation becomes the core key technology in this type of equipment; The live width of step-by-step scanning photo-etching device has reached 22nm and following, silicon chip positioning precision and alignment precision all reach several nanometers, and more than work stage movement velocity reaches 1m/s, work stage acceleration reaches tens times of gravity accleration, this has proposed new challenge to existing vibration isolation technique.First, lithography machine need to provide for metering system and photoetched object lens the working environment of " super quiet ", simultaneously again demand motive work stage at full speed with High acceleration motion, this anti-vibration performance to vibrating isolation system has proposed extremely harsh requirement, and the natural frequency of its three directions all needs to reach below 1Hz; Secondly, relative position between the each parts of lithography machine, the distance of for example photoetched object lens and silicon chip surface, all there is very strict requirement, and under the control in position closed loop feedback control system, require the relative positional accuracy between the upper and lower mounting plate of vibration isolator to reach 10 μ m magnitudes, the positioning precision of traditional vibration isolator can not meet the demands far away.
According to theory of vibration isolation, the natural frequency of passive type vibration isolator is directly proportional to rigidity, is inversely proportional to load quality, therefore under the certain prerequisite of load quality, the rigidity that reduces vibration isolator is the effective way that reduces natural frequency, improves low frequency and superlow frequency vibration isolating performance.There are the intrinsic contradictions of static bearing capacity and rigidity in the vibration isolator of the forms such as conventional air spring, restricted by the factor such as material behavior, structural rigidity, further reduce its rigidity, especially level very difficult to rigidity.For this problem, researcher is incorporated into " pendulum " formula structure in air cushion shock absorber, reaches object (the 1.Nikon Corporation.Vibration Isolator With Low Lateral Stiffness. U.S. Patent Publication No.: US20040065517A1 that reduces vibration isolator horizontal rigidity; 2.U.S.Philips Corporation.PositioningDevice with a Force Actuator System for Compensating Center-of-gravity Displacements, and Lithographic Device Provided with Such A Positioning Device. U.S. Patent number: US005844664A).The method can reduce the horizontal rigidity of air cushion shock absorber to a certain extent, promotes its low frequency vibration isolation performance.The problem that the method exists is: restricted by material behavior and structural rigidity, vibration isolator is vertical limited to the amplitude of stiffness degradation with level; 2) the vertical and level of air cushion shock absorber is all very poor to positioning precision, cannot meet the requirement of photoetching process; 3) will reach lower horizontal rigidity needs larger pendulum length, causes vibration isolator height excessive, string membrane resonance easily occurs, poor stability.
By visible to the analysis of existing air cushion shock absorber technological scheme, existing air cushion shock absorber is difficult to meet the requirement of lithography machine to ultralow rigidity and high position precision.IDE company of Germany has proposed a kind of vibration isolator technological scheme (1.Integrated Dynamics Engineering GmbH.Isolatorgeometrie Eines Schwingungsisolationssystem. european patent number: EP1803965A2 of abandoning tradition rubber air spring; 2.Integrated Dynamics Engineering GmbH.Schwingungsisolationssystem Mit Pneumatischem Tiefpassfilter. european patent number: EP1803970A2; 3.Integrated Dynamics Engineering GmbH.Air Bearing with Consideration of High-Frequency Resonances. U.S. Patent Publication No.: US20080193061A1).This scheme adopts vertically carries out decoupling zero and vibration isolation to air bearing surface to the vibration of all directions with level, can reach extremely low rigidity and natural frequency.The problem that this scheme exists is: 1) in public technology scheme, vibration isolator cannot be realized accurate location; 2) in patent EP1803965A2, do not have the angular motion degrees of freedom around horizontal rotational shaft between upper and lower mounting plate, the angular rigidity of this direction and natural frequency are all very high; Patent EP1803970A2 and US20080193061A1 adopt block rubber to provide the angular motion degrees of freedom around horizontal rotational shaft for upper and lower mounting plate, but because block rubber angular rigidity is very large, cannot effectively carry out angular motion freedom decoupling, between angular motion freedom decoupling mechanism part, there is frictional force and introduce additional stiffness, restriction anti-vibration performance.
ASML company of Holland has also proposed similar vibration isolator technological scheme (1.U.S.Philips Corp, ASM Lithography B.V.Pneumatic Support Device with A Controlled Gas Supply, and Lithographic Device Provided with Such A Support Device. U.S. Patent number: US006144442A; 2.Koninklijke Philips Electronics N.V., ASM Lithography B.V. Lithographic Pneumatic Support Device with Controlled Gas Supply. International Patent Publication No.: WO99/22272; 3.ASML Netherlands B.V. Support Device, Lithographic Apparatus, and Device Manufacturing Method Employing A Supporting Device, and A Position Control System Arranged for Use in A Supporting Device. U.S. Patent number: US007084956B2; 4.ASML Netherlands B.V.Support Device, Lithographic Apparatus, andDevice Manufacturing Method Employing A Supporting Deviceand A Position Control System Arranged for Use in A Supporting Device. european patent number: EP1486825A1).In patent US006144442A and WO99/22272, bleed pressure is carried out to closed-loop feedback control, reach and improve the stability of vibration isolator and the object of performance; In patent US007084956B2 and EP1486825A1, on upper mounting plate, be provided with vibration transducer, introduce with reference to vibration system simultaneously, promote the anti-vibration performance of vibration isolator by control algorithm.But the technological scheme that proposes still do not solve the accurate location of vibration isolator and the angular motion freedom decoupling problem of upper and lower mounting plate.
Summary of the invention
The object of the invention is for an urgent demand of vlsi circuit process unit to the low natural frequency of vibration isolator, high position precision such as ultra precise measurement instrument and process unit, especially step-by-step scanning photo-etching devices, the zero stiffness vibration isolator of a kind of flexible membrane angle decoupling zero and the vibrating isolation system being made up of it are provided, vibration isolator has three-dimensional ultralow rigidity and extremely low natural frequency, between upper and lower mounting plate, can accurately locate and angle decoupling zero, thereby effectively solve the accurate vibration isolation problem in ultra precise measurement instrument and process unit, especially step-by-step scanning photo-etching device.
Technical solution of the present invention is:
The zero stiffness vibration isolator of a kind of flexible membrane angle decoupling zero, by upper mounting plate, lower installation board, clean compressed gas source, tracheae and vibration isolator main body composition, vibration isolator main body is arranged between upper mounting plate and lower installation board, clean compressed gas source is connected with vibration isolator main body by tracheae, in the structure of described vibration isolator main body, the lower surface of sleeve and lower installation board be lubricated and support by axial carrying plane air bearing surface, flexible membrane is arranged on the upper end of sleeve, and compress and sealing by trim ring, the top board of pressing plate assembly and press table are coaxially arranged on the upper of flexible membrane, lower surface, and clamp flexible membrane, upper surface and the upper mounting plate of top board are rigidly connected, Z-direction voice coil motor, Z-direction displacement transducer and Z-direction limit switch are arranged between pressing plate assembly and sleeve, X is to voice coil motor, X is to displacement transducer, X is to limit switch and Y-direction voice coil motor, Y-direction displacement transducer, Y-direction limit switch is arranged between sleeve and lower installation board, the driving force direction of Z-direction voice coil motor is vertical direction, X to the driving force direction of voice coil motor and Y-direction voice coil motor in horizontal plane and mutually vertical, X, Y, Z-direction displacement transducer and X, Y, line of action direction and the X of Z-direction limit switch, Y, the driving force direction of Z-direction voice coil motor is consistent, X, Y, Z-direction displacement transducer and X, Y, Z-direction limit switch are connected with the signal input part of controller respectively, and the signal output part of controller is connected with the signal input part of driver, and the signal output part of driver is connected with X, Y, Z-direction voice coil motor respectively.
In described sleeve, be provided with gas pressure sensor, sleeve is provided with suction port and solenoid valve, gas pressure sensor is connected with the signal input part of controller, and the signal output part of controller is connected with the signal input part of driver, and the signal output part of driver is connected with solenoid valve.
Described X, Y, Z-direction voice coil motor are cylinder type voice coil motor or plate voice coil motor.
Described X, Y, Z-direction displacement transducer are grating scale, magnetic railings ruler, appearance grid chi or linear potentiometer.
Described X, Y, Z-direction limit switch are mechanical type limit switch, Hall-type limit switch or photoelectric limit switch.
Described flexible membrane is rubber membrane.
In described sleeve, gas pressure is 0.1MPa～0.8MPa.
The air-film thickness of described axial carrying plane air bearing surface is 10 μ m～20 μ m.
The diameter of the plane air bearing surface throttle orifice on described sleeve is φ 0.1mm～φ 1mm.
The vibrating isolation system being formed by the zero stiffness vibration isolator of flexible membrane angle decoupling zero, described vibrating isolation system comprises the zero stiffness vibration isolator of at least three flexible membrane angles decoupling zero, the zero stiffness vibration isolator of each flexible membrane angle decoupling zero becomes polygonal to arrange.
The good result of technological innovation of the present invention and generation is:
(1) the present invention adopts axial carrying plane air bearing surface to isolate Horizontal Vibration, air bearing surface is approximately zero without friction, rigidity, can make vibration isolator obtain substantially horizontal approximate zero stiffness characteristics and outstanding superlow frequency vibration isolating performance, having solved prior art limited by structural rigidity, material behavior, vibration isolator horizontal rigidity is difficult to further reduction, the problem that rigidity and stability can not be taken into account.This is that the present invention is different from one of innovative point of prior art.
(2) the present invention adopts displacement transducer, limit switch, controller, driver and voice coil motor etc. to form the position closed loop feedback control system of vertical direction and substantially horizontal, relative position between upper and lower mounting plate is accurately controlled, positioning precision can reach 10 μ m levels and more than, the problem that can effectively solve that prior art scheme positioning precision is low, positioning precision and rigidity, anti-vibration performance can not be taken into account.This is two of the present invention's innovative point of being different from prior art.
(3) the present invention adopts flexible membrane diagonal motion degrees of freedom to carry out decoupling zero, and flexible membrane, without friction, without wearing and tearing, is introduced additional angular rigidity and can be ignored, and the technological scheme that can effectively solve the decoupling zero of existing employing elastomer is introduced the problem of larger additional stiffness.This is three of the present invention's innovative point of being different from prior art.
(4) the present invention adopts gas pressure sensor, solenoid valve and controller, driver to form pressure closed loop feedback control system, the gas pressure of accurately controlling in sleeve makes it to keep constant, the thrust load of vibration isolator is carried out to gravitational equilibrium and compensation, near flexible membrane rigidity equilibrium position is approximately zero, the upper and lower pressing plate of carry load gravity and upper mounting plate can ultralow rigidity slide up and down, thus the gravity compensation of realizing ideal and zero stiffness vibration isolating effect.This is four of the present invention's innovative point of being different from prior art.
(5) the present invention adopts active actuators to carry out ACTIVE CONTROL to the relative position between upper and lower mounting plate, vibration isolator parameter can be according to being changed adjusting in real time by vibration isolation features of the object and working environment, thereby adapt to different operating modes, there is good flexibility, adaptability and stability.This is five of the present invention's innovative point of being different from prior art.
Brief description of the drawings
Fig. 1 is the structural representation of the zero stiffness vibration isolator of flexible membrane angle decoupling zero;
Fig. 2 is the cross-sectional view of the zero stiffness vibration isolator of flexible membrane angle decoupling zero;
Fig. 3 is the control structure block diagram of the zero stiffness vibration isolator of flexible membrane angle decoupling zero;
Fig. 4 is the schematic diagram of plane air bearing surface throttle orifice on sleeve;
Fig. 5 is the vibrating isolation system schematic diagram that the zero stiffness vibration isolator of three flexible membrane angles decoupling zero forms;
Fig. 6 is the vibrating isolation system schematic diagram that the zero stiffness vibration isolator of four flexible membrane angles decoupling zero forms.
Piece number explanation in figure: 1 upper mounting plate, 2 lower installation boards, 3 clean compressed gas sources, 4 vibration isolator main bodys, 5 flexible membranes, 6 sleeves, 7 pressing plate assemblies, 7a top board, 7b press table, 8X is to voice coil motor, 9Y is to voice coil motor, 9a Y-direction motor iron yoke, 9bY is to magnetic steel of motor, 9cY is to motor coil skeleton, 9dY is to motor coil, 9eY is to motor transitional part, 10Z is to voice coil motor, 10a Z-direction motor iron yoke, 10b Z-direction magnetic steel of motor, 10c Z-direction motor coil skeleton, 10d Z-direction motor coil, 10e Z-direction motor transitional part, 11X is to displacement transducer, 12Y is to displacement transducer, 12aY is to grating reading head transition piece, 12b Y-direction grating reading head, 12c Y-direction glass raster chi, 13Z is to displacement transducer, 13a Z-direction grating reading head transition piece, 13b Z-direction grating reading head, 13c Z-direction glass raster chi, 14X is to limit switch, 15Y is to limit switch, 15aY is to limiting stopper, 15b Y-direction Hall switch, 15c Y-direction limit switch transition piece, 15d Y-direction limiting stopper transition piece, 16Z is to limit switch, 16a Z-direction limiting stopper, 16b Z-direction Hall switch, 16c Z-direction limit switch transition piece, 17 gas pressure sensors, 18 solenoid valves, 19 controllers, 20 drivers, 21 axial carrying plane air bearing surface, 22 trim rings, 23 suction ports, 24 plane air bearing surface throttle orifices, 25 loads, 26 tracheaes, the zero stiffness vibration isolator of 27 flexible membrane angle decoupling zeros.
Embodiment
Provide specific embodiments of the invention below in conjunction with accompanying drawing.
The zero stiffness vibration isolator of a kind of flexible membrane angle decoupling zero, by upper mounting plate 1, lower installation board 2, clean compressed gas source 3, tracheae 26 and vibration isolator main body 4 form, vibration isolator main body 4 is arranged between upper mounting plate 1 and lower installation board 2, clean compressed gas source 3 is connected with vibration isolator main body 4 by tracheae 26, in the structure of described vibration isolator main body 4, the lower surface of sleeve 6 and lower installation board 2 be lubricated and support by axial carrying plane air bearing surface 21, flexible membrane 5 is arranged on the upper end of sleeve 6, and compress and sealing by trim ring 22, top board 7a and the press table 7b of pressing plate assembly 7 are coaxially arranged on the upper of flexible membrane 5, lower surface, and clamp flexible membrane 5, the upper surface of top board 7a and upper mounting plate 1 are rigidly connected, Z-direction voice coil motor 10, Z-direction displacement transducer 13 and Z-direction limit switch 16 are arranged between pressing plate assembly 7 and sleeve 6, X is to voice coil motor 8, X is to displacement transducer 11, X is to limit switch 14 and Y-direction voice coil motor 9, Y-direction displacement transducer 12, Y-direction limit switch 15 is arranged between sleeve 6 and lower installation board 2, the driving force direction of Z-direction voice coil motor 10 is vertical direction, X to the driving force direction of voice coil motor 8 and Y-direction voice coil motor 9 in horizontal plane and mutually vertical, X, Y, Z-direction displacement transducer 11, 12, 13 and X, Y, Z-direction limit switch 14, 15, 16 line of action direction and X, Y, Z-direction voice coil motor 8, 9, 10 driving force direction is consistent, X, Y, Z-direction displacement transducer 11,12,13 and X, Y, Z-direction limit switch 14,15,16 are connected with the signal input part of controller 19 respectively, the signal output part of controller 19 is connected with the signal input part of driver 20, and the signal output part of driver 20 is connected with X, Y, Z-direction voice coil motor 8,9,10 respectively.
The displacement of X, Y, Z-direction displacement transducer 11,12,13 couples of X, Y, 8,9,10 outputs of Z-direction voice coil motor is measured, and the stroke of X, Y, Z-direction limit switch 14,15,16 couples of X, Y, 8,9,10 motions of Z-direction voice coil motor limits; Controller 19 is according to the feedback signal of X, Y, Z-direction displacement transducer 11,12,13 and X, Y, Z-direction limit switch 14,15,16, and the relative position of controlling between X, Y, 8,9,10 pairs of upper and lower mounting plates 1,2 of Z-direction voice coil motor is accurately controlled.
In described sleeve 6, be provided with gas pressure sensor 17, sleeve 6 is provided with suction port 23 and solenoid valve 18, gas pressure sensor 17 is connected with the signal input part of controller 19, the signal output part of controller 19 is connected with the signal input part of driver 20, and the signal output part of driver 20 is connected with solenoid valve 18.
Described X, Y, Z-direction voice coil motor 8,9,10 are cylinder type voice coil motor or plate voice coil motor.
Described X, Y, Z-direction displacement transducer 11,12,13 are grating scale, magnetic railings ruler, appearance grid chi or linear potentiometer.
Described X, Y, Z-direction limit switch 14,15,16 are mechanical type limit switch, Hall-type limit switch or photoelectric limit switch.
Described flexible membrane 5 is rubber membrane.
The interior gas pressure of described sleeve 6 is 0.1MPa～0.8MPa.
The air-film thickness of described axial carrying plane air bearing surface 21 is 10 μ m～20 μ m.
The diameter of the plane air bearing surface throttle orifice 24 on described sleeve 6 is φ 0.1mm～φ 1mm.
The vibrating isolation system being formed by the zero stiffness vibration isolator of flexible membrane angle decoupling zero, described vibrating isolation system comprises the zero stiffness vibration isolator 27 of at least three flexible membrane angles decoupling zero, 27 one-tenth polygonals of zero stiffness vibration isolator of each flexible membrane angle decoupling zero are arranged.
Provide one embodiment of the present of invention below in conjunction with Fig. 1～Fig. 3.In the present embodiment, in vibration isolator when work,, lower installation board 2 is arranged on the pedestal or basic framework of ground, instrument, upper mounting plate 1 be connected by the load of vibration isolation.X, Y, Z-direction voice coil motor 8,9,10 all adopt cylinder type voice coil motor.Taking Y-direction voice coil motor 9 as example, it mainly comprises the parts such as Y-direction motor iron yoke 9a, Y-direction magnetic steel of motor 9b, Y-direction motor coil skeleton 9c, Y-direction motor coil 9d and Y-direction motor transitional part 9e.Y-direction motor iron yoke 9a and Y-direction motor coil skeleton 9c are cylindrical shape, and Y-direction magnetic steel of motor 9b is cylindrical, and it is upper that Y-direction motor coil 9d is around in Y-direction motor coil skeleton 9c, and Y-direction motor transitional part 9e provides the mounting structure of Y-direction motor coil skeleton 9c.Y-direction motor iron yoke 9a and Y-direction magnetic steel of motor 9b form motor stator, and Y-direction motor coil skeleton 9c, Y-direction motor coil 9d form electric mover.When machine operation, in coil, pass to electric current, according to electromagnetic theory, hot-wire coil can be subject to Lorentz force effect in magnetic field, can control the size and Orientation of motor output drive strength by controlling the size and Orientation of electric current.
In the present embodiment, flexible membrane 5, trim ring 22 with the mounting type of sleeve 6 is: thread mill drilling along the circumferential direction on sleeve 6, on trim ring 22, flexible membrane 5, along the circumferential direction process through hole, adopt screw that trim ring 22 is compressed to flexible membrane 5 and be assemblied on sleeve 6, utilize the elasticity of flexible membrane 5 materials to play the effect of sealing.The mounting type of top board 7a, press table 7b and flexible membrane 5 is similar with it.
X, Y, Z-direction displacement transducer 11,12,13 adopt grating scale.Taking Z-direction displacement transducer 13 as example, it mainly comprises the parts such as Z-direction grating reading head transition piece 13a, Z-direction grating reading head 13b and Z-direction glass raster chi 13c, and Z-direction grating reading head transition piece 13a provides the mounting structure of Z-direction grating reading head 13b.In grating scale when work,, Z-direction grating reading head 13b can detect the relative displacement of itself and Z-direction glass raster chi 13c, and gives controller 19 by signal conductor.
X, Y, Z-direction limit switch 14,15,16 adopt Hall-type limit switch.Taking Z-direction limit switch 16 as example, it mainly comprises the parts such as Z-direction limiting stopper 16a, Z-direction Hall switch 16b and Z-direction limit switch transition piece 16c.Two Z-direction Hall switch 16b install back-to-back, and two Z-direction limiting stopper 16a are metallic material, with relative installation of sensitivity end of Z-direction Hall switch 16b.Z-direction limit switch transition piece 16c provides the mounting structure of Z-direction Hall switch 16b.When limit switch work, in the time that Z-direction Hall switch 16b approaches Z-direction limiting stopper 16a, Z-direction Hall switch 16b provides limit signal, and gives controller 19 by signal conductor.
In the present embodiment, Z-direction voice coil motor 10, Z-direction displacement transducer 13 and Z-direction limit switch 16 are installed in the inside of sleeve 6.
Vibration isolator is realized in the following way to the carrying of load: clean compressed gas source 3 by tracheae 26, through solenoid valve 18, suction port 23 to the interior conveying clean compressed air of sleeve 6.Controller 19 is according to the feedback signal of gas pressure sensor 17, control the aperture of solenoid valve 18, adjusting is input to the gas flow in sleeve 6, thereby the pressure of regulating sleeve 6 interior clean compressed airs, the gravity that make the gravity of clean compressed air to active force upwards of pressing plate assembly 7 and flexible membrane 5 and load and pressing plate assembly 7, loads on other component on pressing plate assembly 7 balances each other.In the equilibrium position of flexible membrane 5, the vertical stiffness of flexible membrane 5 is approximately zero, and lateral stiffness is very large with respect to the lateral stiffness of axial carrying air bearing surface 21.Therefore, sleeve 6 can vertically move up and down with approximate zero rigidity near the equilibrium position of flexible membrane 5, thereby has outstanding superlow frequency vibration isolating performance.
In the present embodiment, the pressure of sleeve 6 interior clean compressed airs is 0.4MPa, and the effective radius of press table 7b and flexible membrane 5 lower surfaces is 100mm, and the quality of single vibration isolator carrying is: m=p × π r
2/ g ≈ 1282kg, wherein p is gas pressure, p=0.4MPa, r is the effective radius of press table 7b and flexible membrane 5 lower surfaces, r=100mm, g is gravity accleration, g=9.8m/s
2.
Fig. 4 provides an embodiment of plane air bearing surface throttle orifice on sleeve.In the present embodiment, sleeve 6 lower surfaces are uniform 8 plane air bearing surface throttle orifices 24 along the circumferential direction around the center of circle, and diameter is φ 0.2mm.
Fig. 5 provides an embodiment of the zero stiffness vibration isolator formation vibrating isolation system of three flexible membrane angles decoupling zero.In the present embodiment, load 25 is subtriangular metal stage body, and weight is 4 tons, adopts the zero stiffness vibration isolator 27 of three flexible membrane angles decoupling zero to carry out vibration isolation to it, zero stiffness vibration isolator 27 angle of load-supporting 25 respectively of three flexible membrane angles decoupling zero, triangularity is arranged.
Fig. 6 provides an embodiment of the zero stiffness vibration isolator formation vibrating isolation system of four flexible membrane angles decoupling zero.In the present embodiment, load 25 is rectangular metal stage body, and weight is 8 tons, adopts the zero stiffness vibration isolator 27 of four flexible membrane angles decoupling zero to carry out vibration isolation to it, zero stiffness vibration isolator 27 angle of load-supporting 25 respectively of four flexible membrane angles decoupling zero, rectangularity is arranged.
Claims (10)
1. the zero stiffness vibration isolator of flexible membrane angle decoupling zero, by upper mounting plate (1), lower installation board (2), clean compressed gas source (3), tracheae (26) and vibration isolator main body (4) composition, vibration isolator main body (4) is arranged between upper mounting plate (1) and lower installation board (2), clean compressed gas source (3) is connected with vibration isolator main body (4) by tracheae (26), it is characterized in that: in the structure of described vibration isolator main body (4), the lower surface of sleeve (6) and lower installation board (2) be lubricated and support by axial carrying plane air bearing surface (21), flexible membrane (5) is arranged on the upper end of sleeve (6), and compress and sealing by trim ring (22), the top board (7a) of pressing plate assembly (7) is coaxially arranged on the upper of flexible membrane (5) with press table (7b), lower surface, and clamp flexible membrane (5), the upper surface of top board (7a) and upper mounting plate (1) are rigidly connected, Z-direction voice coil motor (10), Z-direction displacement transducer (13) and Z-direction limit switch (16) are arranged between pressing plate assembly (7) and sleeve (6), X is to voice coil motor (8), X is to displacement transducer (11), X is to limit switch (14) and Y-direction voice coil motor (9), Y-direction displacement transducer (12), Y-direction limit switch (15) is arranged between sleeve (6) and lower installation board (2), the driving force direction of Z-direction voice coil motor (10) is vertical direction, X to the driving force direction of voice coil motor (8) and Y-direction voice coil motor (9) in horizontal plane and mutually vertical, X, Y, Z-direction displacement transducer (11, 12, 13) and X, Y, Z-direction limit switch (14, 15, 16) line of action direction and X, Y, Z-direction voice coil motor (8, 9, 10) driving force direction is consistent, X, Y, Z-direction displacement transducer (11,12,13) and X, Y, Z-direction limit switch (14,15,16) are connected with the signal input part of controller (19) respectively, the signal output part of controller (19) is connected with the signal input part of driver (20), and the signal output part of driver (20) is connected with X, Y, Z-direction voice coil motor (8,9,10) respectively.
2. the zero stiffness vibration isolator of flexible membrane angle according to claim 1 decoupling zero, it is characterized in that: in described sleeve (6), be provided with gas pressure sensor (17), sleeve (6) is provided with suction port (23) and solenoid valve (18), gas pressure sensor (17) is connected with the signal input part of controller (19), the signal output part of controller (19) is connected with the signal input part of driver (20), and the signal output part of driver (20) is connected with solenoid valve (18).
3. the zero stiffness vibration isolator of flexible membrane angle according to claim 1 decoupling zero, is characterized in that: described X, Y, Z-direction voice coil motor (8,9,10) are cylinder type voice coil motor or plate voice coil motor.
4. the zero stiffness vibration isolator of flexible membrane angle according to claim 1 decoupling zero, is characterized in that: described X, Y, Z-direction displacement transducer (11,12,13) are grating scale, magnetic railings ruler, appearance grid chi or linear potentiometer.
5. the zero stiffness vibration isolator of flexible membrane angle according to claim 1 decoupling zero, is characterized in that: described X, Y, Z-direction limit switch (14,15,16) are mechanical type limit switch, Hall-type limit switch or photoelectric limit switch.
6. the zero stiffness vibration isolator of flexible membrane angle according to claim 1 decoupling zero, is characterized in that: described flexible membrane (5) is rubber membrane.
7. the zero stiffness vibration isolator of flexible membrane angle according to claim 1 decoupling zero, is characterized in that: the interior gas pressure of described sleeve (6) is 0.1MPa～0.8MPa.
8. the zero stiffness vibration isolator of flexible membrane angle according to claim 1 decoupling zero, is characterized in that: the air-film thickness of described axial carrying plane air bearing surface (21) is 10 μ m～20 μ m.
9. the zero stiffness vibration isolator of flexible membrane angle according to claim 1 decoupling zero, is characterized in that: the diameter of the plane air bearing surface throttle orifice (24) on described sleeve (6) is φ 0.1mm～φ 1mm.
10. the vibrating isolation system being formed by the zero stiffness vibration isolator of arbitrary described flexible membrane angle decoupling zero in claim 1 to 9, it is characterized in that: described vibrating isolation system comprises the zero stiffness vibration isolator (27) of at least three flexible membrane angles decoupling zero, the zero stiffness vibration isolator (27) of each flexible membrane angle decoupling zero becomes polygonal to arrange.
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| CN102819186A (en) * | 2012-09-07 | 2012-12-12 | 天津大学 | 3T1R four-degrees-of-freedom precise location workbench |
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| JP3800966B2 (en) * | 2001-02-13 | 2006-07-26 | 東海ゴム工業株式会社 | Pneumatically controlled damper |
| US8282281B2 (en) * | 2007-02-14 | 2012-10-09 | Integrated Dynamics Engineering Gmbh | Air bearing with consideration of high-frequency resonances |
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| CN1587739A (en) * | 2004-10-11 | 2005-03-02 | 北京航空航天大学 | Six freedom super magnetostrictive active vibration control platform |
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| CN102141110A (en) * | 2011-01-24 | 2011-08-03 | 北京航空航天大学 | Hydraulic vibration active isolation platform |
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| CN102819186A (en) * | 2012-09-07 | 2012-12-12 | 天津大学 | 3T1R four-degrees-of-freedom precise location workbench |
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