CN103047355A - Electromagnetic damping vibration isolator with coplanar air floatation orthogonal decoupling function and angular decoupling function by aid of flexible membrane - Google Patents
Electromagnetic damping vibration isolator with coplanar air floatation orthogonal decoupling function and angular decoupling function by aid of flexible membrane Download PDFInfo
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- CN103047355A CN103047355A CN2012105752176A CN201210575217A CN103047355A CN 103047355 A CN103047355 A CN 103047355A CN 2012105752176 A CN2012105752176 A CN 2012105752176A CN 201210575217 A CN201210575217 A CN 201210575217A CN 103047355 A CN103047355 A CN 103047355A
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Abstract
The invention discloses an electromagnetic damping vibration isolator with a coplanar air floatation orthogonal decoupling function and an angular decoupling function by the aid of a flexible membrane, and belongs to the technical field of precision vibration isolation. Space between a sleeve of a vibration isolator body and a lower mounting plate is lubricated and supported by an air floatation plane, electromagnetic dampers are used for attenuating vibration energy and improving the positioning stability, the degree of freedom of horizontal linear movement between an upper mounting plate and the lower mounting plate is decoupled by coplanar orthogonal air floatation guide rails, the degree of freedom of angular movement between the upper mounting plate and the lower mounting plate is decoupled by the flexible membrane, and voice coil motors, displacement sensors, limit switches, a controller and a driver form a position closed-loop feedback control system to precisely control relative positions of the upper mounting plate and the lower mounting plate. The electromagnetic damping vibration isolator has the advantages of zero three-dimensional stiffness, high positioning precision and capabilities of sufficiently decoupling the degree of freedom of linear movement and sufficiently decoupling the degree of freedom of angular movement, and can effectively realize high-performance vibration isolation for ultra-precision measuring instruments and processing equipment, and particularly for step-scan lithography machines.
Description
Technical field
The invention belongs to the accurate vibration isolation technical field, relate generally to the electromagnetic damping vibration isolator of a kind of coplanar air supporting crossing decoupling and the decoupling zero of flexible membrane angle.
Background technique
Along with improving constantly of ultraprecise processing and measuring accuracy, ambient vibration becomes the key factor that restriction ultraprecise process unit and surveying instrument precision and performance improve.Especially step-by-step scanning photo-etching device is the vlsi circuit process unit of representative, technology-intensive degree and complexity are high, key technical index has all reached the limit of prior art, represented the highest level of ultraprecise process unit, the ultraprecise vibration isolation becomes the core key technology in this type of equipment; The live width of step-by-step scanning photo-etching device has reached 22nm and following, silicon chip Location accuracy and alignment precision all reach several nanometers, and the work stage movement velocity reaches more than the 1m/s, and the work stage acceleration reaches tens times of gravity accleration, and this has proposed new challenge to existing vibration isolation technique.At first, lithography machine need to provide for metering system and photoetched object lens the working environment of " super quiet ", simultaneously again the demand motive work stage at full speed with High acceleration motion, this anti-vibration performance to vibrating isolation system has proposed extremely harsh requirement, and the natural frequency of its three directions all needs to reach below the 1Hz; Secondly, relative position between each parts of lithography machine, the distance of photoetched object lens and silicon chip surface for example, all has very strict requirement, and be under the control of position closed loop feedback control system, require the relative positional accuracy between the upper and lower mounting plate of vibration isolator to reach 10 μ m magnitudes, the Location accuracy of traditional vibration isolator can not meet the demands far away.
According to theory of vibration isolation, the natural frequency of passive type vibration isolator is directly proportional with rigidity, is inversely proportional to load quality, therefore under the certain prerequisite of load quality, the rigidity that reduces vibration isolator is the effective way that reduces natural frequency, improves low frequency and superlow frequency vibration isolating performance.There are the intrinsic contradictions of static bearing capacity and rigidity in the vibration isolator of the forms such as conventional air spring, restricted by the factors such as material behavior, structural rigidity, further reduce its rigidity, especially level very difficult to rigidity.For this problem, the researcher is incorporated into " pendulum " formula structure in the air cushion shock absorber, reaches purpose (the 1.Nikon Corporation.Vibration Isolator With Low Lateral Stiffness. U.S. Patent Publication No.: US20040065517A1 that reduces the vibration isolator horizontal rigidity; 2.U.S.Philips Corporation.Positioning Device with a Force Actuator Systemfor Compensating Center-of-gravity Displacements, and Lithographic Device Provided with Such APositioning Device. U.S. Patent number: US005844664A).The method can reduce the horizontal rigidity of air cushion shock absorber to a certain extent, promotes its low frequency vibration isolation performance.The problem that the method exists is: restricted by material behavior and structural rigidity, vibration isolator is vertical limited to the amplitude of stiffness degradation with level; 2) the vertical and level of air cushion shock absorber is all very poor to Location accuracy, can't satisfy the requirement of photoetching process; 3) will reach lower horizontal rigidity needs larger pendulum length, causes the vibration isolator height excessive, the string membrane resonance easily occurs, poor stability.
By to the analysis of existing air cushion shock absorber technological scheme as seen, existing air cushion shock absorber is difficult to satisfy lithography machine to the requirement of ultralow rigidity and high position precision.Germany IDE company has proposed a kind of vibration isolator technological scheme (1.Integrated Dynamics Engineering GmbH.Isolatorgeometrie EinesSchwingungsisolationssystem. european patent number: EP1803965A2 of abandoning tradition rubber air spring; 2.Integrated Dynamics EngineeringGmbH.Schwingungsisolationssystem Mit Pneumatischem Tiefpassfilter. european patent number: EP1803970A2; 3.Integrated Dynamics Engineering GmbH.Air Bearing with Consideration ofHigh-Frequency Resonances. U.S. Patent Publication No.: US20080193061A1).This scheme adopts vertical and level is carried out decoupling zero and vibration isolation to air bearing surface to the vibration of all directions, can reach extremely low rigidity and natural frequency.The problem that this scheme exists is: 1) in the public technology scheme, vibration isolator can't be realized accurate location; 2) among the patent EP1803965A2, do not have the angular motion degrees of freedom around horizontal rotational shaft between the upper and lower mounting plate, the angular rigidity of this direction and natural frequency are all very high; Patent EP1803970A2 and US20080193061A1 adopt block rubber to provide angular motion degrees of freedom around horizontal rotational shaft for upper and lower mounting plate, but because the block rubber angular rigidity is very large, can't effectively carry out the angular motion freedom decoupling, there is frictional force between the angular motion freedom decoupling mechanism components and introduces additional stiffness, restriction anti-vibration performance.
Holland ASML company has also proposed similar vibration isolator technological scheme (1.U.S.Philips Corp, ASM LithographyB.V.Pneumatic Support Device with A Controlled Gas Supply, and Lithographic Device Providedwith Such A Support Device. U.S. Patent number: US006144442A; 2.Koninklijke Philips ElectronicsN.V., ASM Lithography B.V.Lithographic Pneumatic Support Device with Controlled Gas Supply. International Patent Publication No.: WO99/22272; 3.ASML Netherlands B.V.Support Device, LithographicApparatus, and Device Manufacturing Method Employing A Supporting Device, and A PositionControl System Arranged for Use in A Supporting Device. U.S. Patent number: US007084956B2; 4.ASML Netherlands B.V.Support Device, Lithographic Apparatus, and Device ManufacturingMethod Employing A Supporting Device and A Position Control System Arranged for Use in ASupporting Device. european patent number: EP1486825A1).Among patent US006144442A and the WO99/22272 bleed pressure is carried out closed-loop feedback control, reach the stability of raising vibration isolator and the purpose of performance; Be provided with vibration transducer at upper mounting plate among patent US007084956B2 and the EP1486825A1, introduce simultaneously with reference to vibration system, promote the anti-vibration performance of vibration isolator by control algorithm.But the technological scheme that proposes still do not solve the accurate location of vibration isolator and the angular motion freedom decoupling problem of upper and lower mounting plate.
Summary of the invention
The objective of the invention is for ultra precise measurement instrument and process unit, especially the vlsi circuit process unit such as step-by-step scanning photo-etching device is to the low natural frequency of vibration isolator, the an urgent demand of high position precision, the electromagnetic damping vibration isolator of a kind of coplanar air supporting crossing decoupling and the decoupling zero of flexible membrane angle is provided, vibration isolator has three-dimensional ultralow rigidity, ultralow natural frequency, on, can accurately locate and the 3 d-line freedom of movement between the lower installation board, the abundant decoupling zero of angular motion degrees of freedom can effectively solve ultra precise measurement instrument and process unit, especially the accurate vibration isolation problem in the step-by-step scanning photo-etching device.
Technical solution of the present invention is:
The electromagnetic damping vibration isolator of a kind of coplanar air supporting crossing decoupling and the decoupling zero of flexible membrane angle, by upper mounting plate, lower installation board, clean compressed gas source, tracheae and vibration isolator main body form, the vibration isolator main body is installed between upper mounting plate and the lower installation board, clean compressed gas source is connected with the vibration isolator main body by tracheae, in the structure of described vibration isolator main body, the lower surface of sleeve and lower installation board be lubricated and support by axial carrying plane air bearing surface, flexible membrane is installed in the upper end of sleeve, and by trim ring compression and sealing, the top board of pressing plate assembly is relative with press table to be fitted in the upper of flexible membrane, lower surface, and clamping flexible membrane, upper surface and the upper mounting plate of top board are rigidly connected, sleeve and X-direction air-float guide rail be lubricated and guiding by X-direction guide rail air bearing surface, X-direction air-float guide rail and lower installation board be lubricated and support by Z-direction bearing air-float face, Y-direction air-float guide rail and lower installation board are rigidly connected, and the two ends of X-direction air-float guide rail and Y-direction air-float guide rail be lubricated and guiding by Y-direction guide rail air bearing surface; Z-direction voice coil motor, Z-direction displacement transducer and Z-direction limit switch are installed between pressing plate assembly and the sleeve, and X-direction voice coil motor, X-direction displacement transducer, X-direction limit switch and Y-direction voice coil motor, Y-direction displacement transducer, Y-direction limit switch are installed between sleeve and the lower installation board; The driving force direction of Z-direction voice coil motor is vertical direction, the driving force direction of X-direction voice coil motor and Y-direction voice coil motor is in horizontal plane and mutually vertical, and the line of action direction of X, Y, Z-direction displacement transducer and X, Y, Z-direction limit switch is consistent with the driving force direction of X, Y, Z-direction voice coil motor; X, Y, Z-direction displacement transducer are connected Y, Z-direction limit switch and are connected with the signal input part of controller respectively with X, the signal output part of controller is connected with the signal input part of driver, and the signal output part of driver is connected with X, Y, Z-direction voice coil motor respectively; Along X-direction voice coil motor driving force direction the X-direction permanent magnet is installed at lower installation board upper surface sidewall and is consisted of the X-direction electromagnetic damper, along Y-direction voice coil motor driving force direction the Y-direction permanent magnet is installed at lower installation board upper surface sidewall and is consisted of the Y-direction electromagnetic damper, the pole orientation of X, Y-direction permanent magnet is perpendicular to the upper surface of lower installation board, and N, the S utmost point are alternately arranged, lower installation board adopts ferromagnetic material, and sleeve adopts non-magnetic good conductor material.
Be provided with gas pressure sensor in the described sleeve, sleeve is provided with suction port and solenoid valve, gas pressure sensor is connected with the signal input part of controller, and the signal output part of controller is connected with the signal input part of driver, and the signal output part of driver is connected with solenoid valve.
Described X, Y, Z-direction voice coil motor are cylinder type voice coil motor or plate voice coil motor.
Described X-direction air-float guide rail and Y-direction air-float guide rail are single rail structure or two guide rail structure.
Described X, Y, Z-direction displacement transducer are grating scale, magnetic railings ruler, appearance grid chi or linear potentiometer.
Described X, Y, Z-direction limit switch are mechanical type limit switch, Hall-type limit switch or photoelectric limit switch.
Described flexible membrane is rubber membrane.
Gas pressure is 0.1MPa～0.8MPa in the described sleeve.
The air-film thickness of described axial carrying plane air bearing surface, X-direction guide rail air bearing surface, Y-direction guide rail air bearing surface and Z-direction bearing air-float face is 10 μ m～20 μ m.
The good result of technological innovation of the present invention and generation is:
(1) the present invention adopts axial carrying plane air bearing surface that Horizontal Vibration is isolated, air bearing surface is approximately zero without friction, rigidity, can make vibration isolator obtain substantially horizontal approximate zero stiffness characteristics and outstanding superlow frequency vibration isolating performance, having solved prior art limited by structural rigidity, material behavior, the vibration isolator horizontal rigidity is difficult to further reduction, rigidity and the stable problem that can not take into account.This is that the present invention is different from one of innovative point of prior art.
(2) the present invention adopts displacement transducer, limit switch, controller, driver and voice coil motor etc. to consist of the position closed loop feedback control system of vertical direction and substantially horizontal, relative position between the upper and lower mounting plate is accurately controlled, Location accuracy can reach 10 μ m levels and more than, the problem that can solve effectively that prior art scheme Location accuracy is low, Location accuracy and rigidity, anti-vibration performance can not be taken into account.This is two of the present invention's innovative point of being different from prior art.
(3) the present invention adopts coplanar quadrature air-float guide rail that the horizontal rectilinear motion degrees of freedom between the upper and lower mounting plate of vibration isolator is carried out decoupling zero, air-float guide rail is without friction and wear, do not introduce additional stiffness, decoupling zero is effective, can make vibration isolator obtain high position precision and substantially horizontal zero stiffness characteristic; Adopt flexible membrane diagonal motion degrees of freedom to carry out decoupling zero, introduce additional angular rigidity less, the technological scheme that can effectively solve the decoupling zero of existing employing elastomer is introduced the problem of larger additional stiffness.This is three of the present invention's innovative point of being different from prior art.
(4) the present invention adopts gas pressure sensor, solenoid valve and controller, driver to consist of the pressure closed loop feedback control system, accurately gas pressure makes it to keep constant in the control sleeve, thrust load to vibration isolator is carried out gravitational equilibrium and compensation, near the flexible membrane rigidity equilibrium position is approximately zero, the upper and lower pressing plate of carry load gravity and upper mounting plate can ultralow rigidity slide up and down, thus the gravity compensation of realizing ideal and zero stiffness vibration isolating effect.This is four of the present invention's innovative point of being different from prior art.
(5) the present invention adopts active actuators that the relative position between the upper and lower mounting plate is carried out ACTIVE CONTROL, the vibration isolator parameter can be according to being changed in real time adjusting by vibration isolation features of the object and working environment, thereby adapt to different operating modes, have preferably flexibility, adaptability and stability.This is five of the present invention's innovative point of being different from prior art.
(6) the present invention proposes a kind of electromagnetic damper that replaces permanent magnet array based on magnetic pole, can be integrated in one with vibration isolator well, and have comparatively ideal linear damping characteristic, but the effective attenuation vibrational energy, reduce the overshoot of motor driving location, the stability of vibration isolator is provided.This is six of the present invention's innovative point of being different from prior art.
Description of drawings
Fig. 1 is the structural representation of the electromagnetic damping vibration isolator of removing coplanar air supporting crossing decoupling behind the upper mounting plate and the decoupling zero of flexible membrane angle;
Fig. 2 is the cross-sectional view of the electromagnetic damping vibration isolator of coplanar air supporting crossing decoupling and the decoupling zero of flexible membrane angle;
Fig. 3 is the schematic diagram of axial carrying plane air bearing surface, X-direction guide rail air bearing surface and Z-direction bearing air-float face;
Fig. 4 is the schematic diagram of Y-direction guide rail air bearing surface;
Fig. 5 is the tube-in-tube structure schematic diagram;
Fig. 6 is the control structure block diagram of the electromagnetic damping vibration isolator of coplanar air supporting crossing decoupling and the decoupling zero of flexible membrane angle;
Fig. 7 is the schematic diagram of air bearing surface throttle orifice in plane on the sleeve;
Fig. 8 is the part section structural representation of X, Y-direction electromagnetic damper;
Fig. 9 is that X, Y-direction permanent magnet are at a kind of mounting type schematic diagram of lower installation board upper surface sidewall;
Figure 10 is that X, Y-direction permanent magnet are at the another kind of mounting type schematic diagram of lower installation board upper surface sidewall.
Piece number explanation among the figure: 1 upper mounting plate, 2 lower installation boards, 3 clean compressed gas sources, 4 vibration isolator main bodys, 5 flexible membranes, 6 sleeves, 7 pressing plate assemblies, the 7a top board, the 7b press table, 8X is to voice coil motor, 8a X-direction motor iron yoke, 8b X-direction magnetic steel of motor, 8c X-direction motor coil skeleton, 8d X-direction motor coil, 9Y is to voice coil motor, 10Z is to voice coil motor, 10a Z-direction motor iron yoke, 10b Z-direction magnetic steel of motor, 10c Z-direction motor coil skeleton, 10d Z-direction motor coil, 10e Z-direction motor transitional spare, 11X is to displacement transducer, 11a X-direction grating reading head transition piece, 11b X-direction grating reading head, 11c X-direction glass raster chi, 12Y is to displacement transducer, 13Z is to displacement transducer, 13a Z-direction grating reading head transition piece, 13b Z-direction grating reading head, 13c Z-direction glass raster chi, 14X is to limit switch, 14a X-direction limiting stopper, 14b X-direction Hall switch, 14c X-direction limit switch transition piece, 14d X-direction limiting stopper transition piece, 15Y is to limit switch, 16Z is to limit switch, 16a Z-direction limiting stopper, 16b Z-direction Hall switch, 16c Z-direction limit switch transition piece, 17 gas pressure sensors, 18 solenoid valves, 19 controllers, 20 drivers, 21 axial carrying plane air bearing surface, 22 trim rings, 23 suction ports, 24 plane air bearing surface throttle orifices, 26 tracheaes, 29X is to air-float guide rail, 30Y is to air-float guide rail, 31X direction guiding rail air bearing surface, 32Y direction guiding rail air bearing surface, 33Z is to the bearing air-float face, 40X is to electromagnetic damper, 40AX is to permanent magnet, 41Y is to electromagnetic damper, 41AY is to permanent magnet.
Embodiment
Provide specific embodiments of the invention below in conjunction with accompanying drawing.
The electromagnetic damping vibration isolator of a kind of coplanar air supporting crossing decoupling and the decoupling zero of flexible membrane angle, by upper mounting plate 1, lower installation board 2, clean compressed gas source 3, tracheae 26 and vibration isolator main body 4 form, vibration isolator main body 4 is installed between upper mounting plate 1 and the lower installation board 2, clean compressed gas source 3 is connected with vibration isolator main body 4 by tracheae 26, in the structure of described vibration isolator main body 4, the lower surface of sleeve 6 and lower installation board 2 are by the 21 lubricated and supports of axial carrying plane air bearing surface, flexible membrane 5 is installed in the upper end of sleeve 6, and by trim ring 22 compressions and sealing, the top board 7a of pressing plate assembly 7 is relative with press table 7b to be fitted in the upper of flexible membrane 5, lower surface, and clamping flexible membrane 5, the upper surface of top board 7a and upper mounting plate 1 are rigidly connected, sleeve 6 lubricates and guiding by X-direction guide rail air bearing surface 31 with X-direction air-float guide rail 29, X-direction air-float guide rail 29 lubricates by Z-direction bearing air-float face 33 with lower installation board 2 and supports, Y-direction air-float guide rail 30 is rigidly connected with lower installation board 2, and the two ends of X-direction air-float guide rail 29 and Y-direction air-float guide rail 30 are by Y-direction guide rail air bearing surface 32 lubricated and guiding; Z-direction voice coil motor 10, Z-direction displacement transducer 13 and Z-direction limit switch 16 are installed between pressing plate assembly 7 and the sleeve 6, and X-direction voice coil motor 8, X-direction displacement transducer 11, X-direction limit switch 14 and Y-direction voice coil motor 9, Y-direction displacement transducer 12, Y-direction limit switch 15 are installed between sleeve 6 and the lower installation board 2; The driving force direction of Z-direction voice coil motor 10 is vertical direction, the driving force direction of X-direction voice coil motor 8 and Y-direction voice coil motor 9 in horizontal plane and mutually vertical, X, Y, Z- direction displacement transducer 11,12,13 consistent with X, Y, Z- direction limit switch 14,15,16 line of action direction and X, Y, Z-direction voice coil motor 8,9,10 driving force direction; X, Y, Z- direction displacement transducer 11,12,13 are connected Y, Z- direction limit switch 14,15,16 and are connected with the signal input part of controller 19 respectively with X, the signal output part of controller 19 is connected with the signal input part of driver 20, and the signal output part of driver 20 is connected with X, Y, Z-direction voice coil motor 8,9,10 respectively; Along X-direction voice coil motor 8 driving force directions X-direction permanent magnet 40A is installed at lower installation board 2 upper surface sidewalls and consists of X-direction electromagnetic damper 40, along Y-direction voice coil motor 9 driving force directions Y-direction permanent magnet 41A is installed at lower installation board 2 upper surface sidewalls and consists of Y-direction electromagnetic damper 41, the pole orientation of X, Y-direction permanent magnet 40A, 41A is perpendicular to the upper surface of lower installation board 2, and N, the S utmost point are alternately arranged, lower installation board 2 adopts ferromagnetic material, and sleeve 6 adopts non-magnetic good conductor material.
X, Y, Z- direction displacement transducer 11,12,13 pairs of X, Y, Z-direction voice coil motor 8,9,10 displacements of exporting are measured, and X, Y, Z- direction limit switch 14,15,16 pairs of X, Y, Z-direction voice coil motor 8,9,10 strokes that move limit; Controller 19 is according to X, Y, Z- direction displacement transducer 11,12,13 and X, Y, Z- direction limit switch 14,15,16 feedback signal, and the relative position between control X, Y, Z-direction voice coil motor 8,9, the 10 pairs of upper and lower mounting plates 1,2 is accurately controlled.
Be provided with gas pressure sensor 17 in the described sleeve 6, sleeve 6 is provided with suction port 23 and solenoid valve 18, gas pressure sensor 17 is connected with the signal input part of controller 19, the signal output part of controller 19 is connected with the signal input part of driver 20, and the signal output part of driver 20 is connected with solenoid valve 18.
Described X, Y, Z-direction voice coil motor 8,9,10 are cylinder type voice coil motor or plate voice coil motor.
Described X-direction air-float guide rail 29 and Y-direction air-float guide rail 30 are single rail structure or two guide rail structure.
Described X, Y, Z- direction displacement transducer 11,12,13 are grating scale, magnetic railings ruler, appearance grid chi or linear potentiometer.
Described X, Y, Z- direction limit switch 14,15,16 are mechanical type limit switch, Hall-type limit switch or photoelectric limit switch.
Described flexible membrane 5 is rubber membrane.
Described sleeve 6 interior gas pressures are 0.1MPa～0.8MPa.
The air-film thickness of described axial carrying plane air bearing surface 21, X-direction guide rail air bearing surface 31, Y-direction guide rail air bearing surface 32 and Z-direction bearing air-float face 33 is 10 μ m～20 μ m.
The diameter of the plane air bearing surface throttle orifice 24 on the described sleeve 6 is φ 0.1mm～φ 1mm.
Provide one embodiment of the present of invention below in conjunction with Fig. 1～Fig. 6.In the present embodiment, in vibration isolator when work,, lower installation board 2 is installed on the pedestal or basic framework of ground, instrument, upper mounting plate 1 be connected by the load of vibration isolation.X, Y, Z-direction voice coil motor 8,9,10 all adopt the cylinder type voice coil motor.Take X-direction voice coil motor 8 as example, it mainly comprises X-direction motor iron yoke 8a, X-direction magnetic steel of motor 8b, X-direction motor coil skeleton 8c, X-direction motor coil 8d.X-direction motor iron yoke 8a and X-direction motor coil skeleton 8c are cylindrical shape, and X-direction magnetic steel of motor 8b is cylindrical, and X-direction motor coil 8d is around on the X-direction motor coil skeleton 8c.X-direction motor iron yoke 8a and X-direction magnetic steel of motor 8b consist of the stator of motor, and X-direction motor coil skeleton 8c and X-direction motor coil 8d consist of the mover of motor.In the Z-direction voice coil motor 10, Z-direction motor transitional spare 10e provides the mounting structure of Z-direction motor coil skeleton 10c.Pass to electric current during machine operation in the coil, according to electromagnetic theory, hot-wire coil can be subject to the effect of voice coil loudspeaker voice coil power in magnetic field, can control the size and Orientation of motor output drive strength by the size and Orientation of control electric current.
In the present embodiment, flexible membrane 5, trim ring 22 with the mounting type of sleeve 6 is: thread mill drilling in the circumferential direction of the circle on sleeve 6, on trim ring 22, flexible membrane 5, process in the circumferential direction of the circle through hole, adopt screw that trim ring 22 is compressed flexible membranes 5 and be assemblied on the sleeve 6, utilize the elasticity of flexible membrane 5 materials to play the effect of sealing.The mounting type of top board 7a, press table 7b and flexible membrane 5 is similar with it.
X, Y, Z- direction displacement transducer 11,12,13 adopt grating scale.Take Z-direction displacement transducer 13 as example, it mainly comprises the parts such as Z-direction grating reading head transition piece 13a, Z-direction grating reading head 13b and Z-direction glass raster chi 13c, and Z-direction grating reading head transition piece 13a provides the mounting structure of Z-direction grating reading head 13b.In grating scale when work,, Z-direction grating reading head 13b can detect the relative displacement of itself and Z-direction glass raster chi 13c, and gives controller 19 by signal conductor.
X, Y, Z- direction limit switch 14,15,16 adopt the Hall-type limit switch.Take Z-direction limit switch 16 as example, it mainly comprises the parts such as Z-direction limiting stopper 16a, Z-direction Hall switch 16b and Z-direction limit switch transition piece 16c.Two Z-direction Hall switch 16b install back-to-back, and two Z-direction limiting stopper 16a are metallic material, with relative installation of sensitivity end of Z-direction Hall switch 16b.Z-direction limit switch transition piece 16c provides the mounting structure of Z-direction Hall switch 16b.In limit switch when work,, as Z-direction Hall switch 16b during near Z-direction limiting stopper 16a, Z-direction Hall switch 16b provides limit signal, and gives controller 19 by signal conductor.
In the present embodiment, Z-direction voice coil motor 10, Z-direction displacement transducer 13 and Z-direction limit switch 16 are installed in the inside of sleeve 6.
Vibration isolator is realized in the following way to the carrying of load: clean compressed gas source 3 by tracheae 26, through solenoid valve 18, suction port 23 to sleeve 6 interior conveying clean compressed airs.Controller 19 is according to the feedback signal of gas pressure sensor 17, the aperture of control solenoid valve 18, adjusting is input to the gas flow in the sleeve 6, thereby the pressure of regulating sleeve 6 interior clean compressed airs balances each other the gravity of active force that clean compressed air makes progress to pressing plate assembly 7 and flexible membrane 5 and load and pressing plate assembly 7, the gravity that loads on other component on the pressing plate assembly 7.In the equilibrium position of flexible membrane 5, the vertical stiffness of flexible membrane 5 is approximately zero, and lateral stiffness is then very large with respect to the lateral stiffness of axial carrying air bearing surface 21.Therefore, sleeve 6 can vertically move up and down with approximate zero rigidity near the equilibrium position of flexible membrane 5, thereby has outstanding superlow frequency vibration isolating performance.
In the present embodiment, the pressure of sleeve 6 interior clean compressed airs is 0.4Mpa, and the effective radius of press table 7b and flexible membrane 5 lower surfaces is 100mm, and then the quality of single vibration isolator carrying is: m=p * π r
2/ g ≈ 1282kg, wherein p is gas pressure, and p=0.4Mpa, r are the effective radius of press table 7b and flexible membrane 5 lower surfaces, and r=100mm, g are gravity accleration, g=9.8m/m
2
Fig. 7 provides an embodiment of air bearing surface throttle orifice in plane on the sleeve.In the present embodiment, sleeve 6 lower surfaces center in the circumferential direction of the circle uniform 8 plane air bearing surface throttle orifices 24 of the center of circle, and diameter is φ 0.2mm.
Provide an embodiment of X, Y-direction electromagnetic damper below in conjunction with Fig. 8, Fig. 9.In the present embodiment, vibration isolator has two X-direction electromagnetic dampers 40, two Y-direction electromagnetic dampers 41, consisted of by the X that is installed in lower installation board 2 upper surface sidewalls, Y-direction permanent magnet 40A, 41A array respectively, lower installation board 2 adopts No. 45 Steel materials, have higher permeability, sleeve 6 adopts the red copper materials, not magnetic conduction and have high conductivity.X, Y-direction permanent magnet 40A, 41A are elongate in shape, arrange along X, Y-direction voice coil motor 8,9 driving force direction respectively, and pole orientation is perpendicular to the upper surface of lower installation board 2, and N, the S utmost point alternately arrange.When sleeve 6 produces relative movement with lower installation board 2, sleeve 6 cutting magnetic lines and produce electric convolution and damping force, X, Y-direction damping force are directly proportional with X, the Y-direction speed of related movement of lower installation board 2 with sleeve 6, direction and X, Y-direction voice coil motor 8,9 driving force direction are consistent, thereby reach the consumption vibrational energy, improve the purpose of position stability.
Fig. 8, Figure 10 have provided another embodiment of X, Y-direction electromagnetic damper.In the present embodiment, vibration isolator has 40, one Y-direction electromagnetic dampers 41 of an X-direction electromagnetic damper, is made of the X that is installed in lower installation board 2 upper surface sidewalls, Y-direction permanent magnet 40A, 41A array respectively.X, Y-direction permanent magnet 40A, 41A are elongate in shape, arrange along X, Y-direction voice coil motor 8,9 driving force direction respectively, and pole orientation is perpendicular to the upper surface of lower installation board 2, and N, the S utmost point alternately arrange.
Claims (9)
1. the electromagnetic damping vibration isolator of a coplanar air supporting crossing decoupling and the decoupling zero of flexible membrane angle, by upper mounting plate (1), lower installation board (2), clean compressed gas source (3), tracheae (26) and vibration isolator main body (4) form, vibration isolator main body (4) is installed between upper mounting plate (1) and the lower installation board (2), clean compressed gas source (3) is connected with vibration isolator main body (4) by tracheae (26), it is characterized in that: in the structure of described vibration isolator main body (4), the lower surface of sleeve (6) and lower installation board (2) be lubricated and support by axial carrying plane air bearing surface (21), flexible membrane (5) is installed in the upper end of sleeve (6), and by trim ring (22) compression and sealing, the top board (7a) of pressing plate assembly (7) is relative with press table (7b) to be fitted in the upper of flexible membrane (5), lower surface, and clamping flexible membrane (5), the upper surface of top board (7a) and upper mounting plate (1) are rigidly connected, sleeve (6) lubricates and guiding by X-direction guide rail air bearing surface (31) with X-direction air-float guide rail (29), X-direction air-float guide rail (29) and lower installation board (2) lubricated and support by Z-direction bearing air-float face (33), Y-direction air-float guide rail (30) is rigidly connected with lower installation board (2), and the two ends of X-direction air-float guide rail (29) and Y-direction air-float guide rail (30) be lubricated and guiding by Y-direction guide rail air bearing surface (32); Z-direction voice coil motor (10), Z-direction displacement transducer (13) and Z-direction limit switch (16) are installed between pressing plate assembly (7) and the sleeve (6), and X-direction voice coil motor (8), X-direction displacement transducer (11), X-direction limit switch (14) and Y-direction voice coil motor (9), Y-direction displacement transducer (12), Y-direction limit switch (15) are installed between sleeve (6) and the lower installation board (2); The driving force direction of Z-direction voice coil motor (10) is vertical direction, the driving force direction of X-direction voice coil motor (8) and Y-direction voice coil motor (9) is in horizontal plane and mutually vertical, and the line of action direction of X, Y, Z-direction displacement transducer (11,12,13) and X, Y, Z-direction limit switch (14,15,16) is consistent with the driving force direction of X, Y, Z-direction voice coil motor (8,9,10); X, Y, Z-direction displacement transducer (11,12,13) are connected Y, Z-direction limit switch (14,15,16) and are connected with the signal input part of controller (19) respectively with X, the signal output part of controller (19) is connected with the signal input part of driver (20), and the signal output part of driver (20) is connected with X, Y, Z-direction voice coil motor (8,9,10) respectively; Along X-direction voice coil motor (8) driving force direction X-direction permanent magnet (40A) is installed at lower installation board (2) upper surface sidewall and is consisted of X-direction electromagnetic damper (40), along Y-direction voice coil motor (9) driving force direction Y-direction permanent magnet (41A) is installed at lower installation board (2) upper surface sidewall and is consisted of Y-direction electromagnetic damper (41), X, Y-direction permanent magnet (40A, pole orientation 41A) is perpendicular to the upper surface of lower installation board (2), and N, the S utmost point is alternately arranged, lower installation board (2) adopts ferromagnetic material, and sleeve (6) adopts non-magnetic good conductor material.
2. the electromagnetic damping vibration isolator of coplanar air supporting crossing decoupling according to claim 1 and the decoupling zero of flexible membrane angle, it is characterized in that: be provided with gas pressure sensor (17) in the described sleeve (6), sleeve (6) is provided with suction port (23) and solenoid valve (18), gas pressure sensor (17) is connected with the signal input part of controller (19), the signal output part of controller (19) is connected with the signal input part of driver (20), and the signal output part of driver (20) is connected with solenoid valve (18).
3. the electromagnetic damping vibration isolator of coplanar air supporting crossing decoupling according to claim 1 and the decoupling zero of flexible membrane angle, it is characterized in that: described X, Y, Z-direction voice coil motor (8,9,10) are cylinder type voice coil motor or plate voice coil motor.
4. the electromagnetic damping vibration isolator of coplanar air supporting crossing decoupling according to claim 1 and the decoupling zero of flexible membrane angle, it is characterized in that: described X-direction air-float guide rail (29) and Y-direction air-float guide rail (30) are single rail structure or two guide rail structure.
5. the electromagnetic damping vibration isolator of coplanar air supporting crossing decoupling according to claim 1 and the decoupling zero of flexible membrane angle is characterized in that: described X, Y, Z-direction displacement transducer (11,12,13) are grating scale, magnetic railings ruler, appearance grid chi or linear potentiometer.
6. the electromagnetic damping vibration isolator of coplanar air supporting crossing decoupling according to claim 1 and the decoupling zero of flexible membrane angle, it is characterized in that: described X, Y, Z-direction limit switch (14,15,16) are mechanical type limit switch, Hall-type limit switch or photoelectric limit switch.
7. the electromagnetic damping vibration isolator of coplanar air supporting crossing decoupling according to claim 1 and the decoupling zero of flexible membrane angle, it is characterized in that: described flexible membrane (5) is rubber membrane.
8. the electromagnetic damping vibration isolator of coplanar air supporting crossing decoupling according to claim 1 and the decoupling zero of flexible membrane angle, it is characterized in that: the interior gas pressure of described sleeve (6) is 0.1MPa～0.8MPa.
9. the electromagnetic damping vibration isolator of coplanar air supporting crossing decoupling according to claim 1 and the decoupling zero of flexible membrane angle, it is characterized in that: the air-film thickness of described axial carrying plane air bearing surface (21), X-direction guide rail air bearing surface (31), Y-direction guide rail air bearing surface (32) and Z-direction bearing air-float face (33) is 10 μ m～20 μ m.
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| CN201210575217.6A CN103047355B (en) | 2012-12-19 | 2012-12-19 | Electromagnetic damping vibration isolator with coplanar air floatation orthogonal decoupling function and angular decoupling function by aid of flexible membrane |
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| CN201210575217.6A CN103047355B (en) | 2012-12-19 | 2012-12-19 | Electromagnetic damping vibration isolator with coplanar air floatation orthogonal decoupling function and angular decoupling function by aid of flexible membrane |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111380464A (en) * | 2018-12-28 | 2020-07-07 | 上海微电子装备（集团）股份有限公司 | Installation device and installation method of grating ruler, grating measurement system and photoetching machine |
| CN115217889A (en) * | 2022-07-15 | 2022-10-21 | 哈尔滨工业大学 | Gas magnetic vibration isolation and active and passive damping transfer device for large-scale precision equipment |
Citations (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO1999005573A1 (en) * | 1997-07-22 | 1999-02-04 | Asm Lithography B.V. | Supporting device with gas bearing |
| CN1367744A (en) * | 1999-07-05 | 2002-09-04 | 动力发展有限公司 | Electromagnetic damper for vehicle suspension |
| CN1480787A (en) * | 2002-07-26 | 2004-03-10 | 尼康株式会社 | Damping device, flat table device and exposuring device |
| JP2006307932A (en) * | 2005-04-27 | 2006-11-09 | Sumitomo Heavy Ind Ltd | Vibration isolation system |
| EP1803965A2 (en) * | 2005-12-30 | 2007-07-04 | Integrated Dynamics Engineering GmbH | Insulation geometry of a vibration insulation system |
| US20080193061A1 (en) * | 2007-02-14 | 2008-08-14 | Integrated Dynamics Engineering Gmbh | Air bearing with consideration of high-frequency resonances |
| CN102470716A (en) * | 2009-07-10 | 2012-05-23 | 萱场工业株式会社 | Suspension device |
| CN102543217A (en) * | 2012-01-20 | 2012-07-04 | 澳门大学 | Macro-micro driven bidimensional integrated micro positioning platform |
| CN102734379A (en) * | 2012-06-09 | 2012-10-17 | 哈尔滨工业大学 | Active vibration isolating device based on composite support of electromagnetism and static-pressure air floatation |
-
2012
- 2012-12-19 CN CN201210575217.6A patent/CN103047355B/en active Active
Patent Citations (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO1999005573A1 (en) * | 1997-07-22 | 1999-02-04 | Asm Lithography B.V. | Supporting device with gas bearing |
| CN1367744A (en) * | 1999-07-05 | 2002-09-04 | 动力发展有限公司 | Electromagnetic damper for vehicle suspension |
| CN1480787A (en) * | 2002-07-26 | 2004-03-10 | 尼康株式会社 | Damping device, flat table device and exposuring device |
| JP2006307932A (en) * | 2005-04-27 | 2006-11-09 | Sumitomo Heavy Ind Ltd | Vibration isolation system |
| EP1803965A2 (en) * | 2005-12-30 | 2007-07-04 | Integrated Dynamics Engineering GmbH | Insulation geometry of a vibration insulation system |
| US20080193061A1 (en) * | 2007-02-14 | 2008-08-14 | Integrated Dynamics Engineering Gmbh | Air bearing with consideration of high-frequency resonances |
| CN102470716A (en) * | 2009-07-10 | 2012-05-23 | 萱场工业株式会社 | Suspension device |
| CN102543217A (en) * | 2012-01-20 | 2012-07-04 | 澳门大学 | Macro-micro driven bidimensional integrated micro positioning platform |
| CN102734379A (en) * | 2012-06-09 | 2012-10-17 | 哈尔滨工业大学 | Active vibration isolating device based on composite support of electromagnetism and static-pressure air floatation |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111380464A (en) * | 2018-12-28 | 2020-07-07 | 上海微电子装备（集团）股份有限公司 | Installation device and installation method of grating ruler, grating measurement system and photoetching machine |
| CN111380464B (en) * | 2018-12-28 | 2021-05-07 | 上海微电子装备（集团）股份有限公司 | Installation device and installation method of grating ruler, grating measurement system and photoetching machine |
| CN115217889A (en) * | 2022-07-15 | 2022-10-21 | 哈尔滨工业大学 | Gas magnetic vibration isolation and active and passive damping transfer device for large-scale precision equipment |
| CN115217889B (en) * | 2022-07-15 | 2023-11-24 | 哈尔滨工业大学 | Large-scale precision equipment gas magnetic vibration isolation and active and passive damping transfer device |
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| CN103047355B (en) | 2015-02-11 |
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