JP2006307932A - Vibration isolation system - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a vibration isolation system capable of accurately controlling a horizontal attitude of a vibration isolation table without depending on gravity positions of a moving body moving at high speed and a body of the vibration isolation system. <P>SOLUTION: The vibration isolation system comprises a stage controlling means 40 for recognizing a coordinates position of a X-Y stage 17, a gravity position calculating means 49 for calculating a gravity position G2 of the body 11 of the vibration isolation system, first compensating means 41A and 42A for compensating calculated values of a motion mode in response to the gravity position G2 of the body 11 of the vibration isolation system to first calculating means 41 and 42, second compensating means 43A and 44A for compensating calculated values of a motion mode in response to the gravity position G2 of the body 11 of the vibration isolation system to second calculating means 43 and 44, control amount compensating means 45A and 46A for compensating first and second control amounts in response to the gravity position G2 of the body 11 of the vibration isolation system to first and second control amount compensating means 45 and 46, and an actuator controlling means 47 for controlling an actuator in response to the first and second control amounts. <P>COPYRIGHT: (C)2007,JPO&INPIT

Description

  The present invention relates to a vibration isolation device, and more particularly to a vibration isolation device including a moving body that moves on a vibration isolation table.

  In an apparatus such as an electron microscope or a semiconductor exposure apparatus equipped with a moving body (for example, an XY stage) with high moving accuracy, vibration isolation from the outside is performed and the moving body is movably disposed. An anti-vibration device is provided for controlling so as to be in a horizontal state.

  The anti-vibration device includes an anti-vibration device body and control means that performs overall control of the anti-vibration device body. The vibration isolator main body includes, for example, a vibration isolation table, a stage that moves on the vibration isolation table, a vibration isolation support mechanism that supports the vibration isolation table with respect to the floor, and isolates vibrations from the floor. It comprises an actuator that drives the shaking table to be in a horizontal state, and a sensor that detects fluctuations in the vibration damping table.

  The sensor includes a first sensor that detects fluctuations in the vertical (Z-axis) direction of the vibration isolation table, and a second sensor that detects fluctuations in the horizontal two axes (X-axis and Y-axis) directions of the vibration isolation table. Composed. The actuator is composed of a first actuator that drives the vibration isolation table in the vertical direction and a second actuator that drives the vibration isolation table in the horizontal direction.

The control means obtains a calculated value of each motion mode based on the detection signal of the sensor, obtains a control amount of the first and second actuators from the calculated value of the motion mode, and first and second according to the control amount. The actuator is driven so that the position of the vibration isolation table becomes horizontal. More specifically, the control unit the calculated value of motion modes of the first computed Z-axis direction from a detection signal of the sensor, calculated value of motion modes theta _x-direction (rotational direction of the X axis), and theta Based on the calculated value of the motion mode in the _y direction (Y-axis rotation direction), the control amount of the first actuator is obtained to control the first actuator, and the horizontal 2 calculated from the second detection signal. Based on the calculated value of the motion mode in the axial direction and the calculated value of the motion mode in the _θz direction (the rotation direction of the Z axis), the control amount of the second actuator is obtained and the second actuator is controlled (for example, (See Patent Document 1).
Japanese Patent Laid-Open No. 10-259851

  Here, with reference to FIGS. 1-4, the relationship between the gravity center position of the vibration isolator main body and the inclination of the vibration isolation table will be described. 1-4 is a figure for demonstrating the relationship between the gravity center position of a vibration isolator main body, and the inclination of a vibration isolation stand. 1 to 4, the X direction and the Y direction indicate a horizontal biaxial direction, and the Z direction indicates a vertical direction. G1 is a gravity center position of the vibration isolation device main body 100 when the moving body 102 is located at the center of the vibration isolation table 101 (hereinafter referred to as “center of gravity position G1”), and G1 ′ is a movement body 102 of the vibration isolation table 101. The center of gravity position (hereinafter referred to as “center of gravity position G1 ′”) and F1, F2 (F1 = F2) of the vibration isolation device main body 100 when moved in the X direction from the center of Hereinafter, “holding forces F1, F2” and F3, F4 (F3 = F4) are forces from the second actuator applied in the Y direction of the vibration isolation base 101 (hereinafter referred to as “forces F3, F4”). L1, L2 (L1 = L2) are distances from the gravity center position G1 to the force point to which the holding forces F1, F2 are applied (hereinafter referred to as “distances L1, L2”), L1 ′, L2 ′ (L1 ′). <L2 ′) is from the gravity center position G1 ′ to the force point to which the forces F3 and F4 are applied. Shows the distance (hereinafter, "the distance L1 ', L2' '), respectively.

As shown in FIG. 1, when the moving body 102 is located at the center of the vibration isolation table 101, F1 · L1 and F2 · L2 are equal, and the moment in the rotational direction of the Y axis passing through the gravity center position G1 is In order to balance, the vibration isolation base 101 does not tilt in the θ _y direction with respect to the horizontal state. However, as shown in FIG. 2, when the moving body 102 moves and the gravity center position G1 of the vibration isolation device main body 100 changes to the gravity center position G1 ′, F1 · L1 ′ <F2 · L2 ′ is satisfied. The moment in the rotational direction of the Y axis passing through the gravity center position G1 is not balanced, and the vibration isolation table 101 is tilted in the θ _y direction. For the same reason, when the center of gravity of the vibration isolator main body 100 is G1 'is thus inclined anti-vibration table 101 in theta _x-direction with respect to the horizontal state.

As shown in FIG. 3, when the forces F3 and F4 are applied to the vibration isolation table 101 with the moving body 102 positioned at the center of the vibration isolation table 101, F3 · L1 and F4 · L2 are equal, since the rotation direction of the moment of Z axis passing through the center of gravity position G1 are balanced, vibration isolation table 101 will not be inclined to theta _z-direction with respect to the horizontal state. However, as shown in FIG. 4, when the movable body 102 moves and the gravity center position G1 of the vibration isolation device main body 100 changes to the gravity center position G1 ′, F3 · L1 ′ <F4 · L2 ′. The moment in the rotational direction of the Z axis passing through the center of gravity position G1 cannot be balanced, and the vibration isolation table 101 is tilted in the _θz direction by the rotational force in the turning direction about the center of gravity position G1 ′.

  In the conventional vibration isolator, control is performed on the assumption that the center of gravity position of the vibration isolator body 100 does not change due to the movement of the moving body 102. When precise control is performed, the center of gravity position of the vibration isolator body 100 moves. The tilt of the vibration isolation table 101 caused by the above becomes important, and it becomes difficult to control the vibration isolation table 101 so that the posture of the vibration isolation table 101 is in a horizontal state. In particular, in the case of a vibration isolator that performs step-and-repeat at high speed, or when the difference between the weight of the moving body and the weight of the vibration isolation table is small, the vibration isolation table is easily tilted, and the above problem becomes significant.

  Therefore, the present invention has been made in view of the above circumstances, and accurately controls the position of the vibration isolation table to be in a horizontal state without depending on the position of the center of gravity of the movable body and the vibration isolation device main body that move at high speed. An object of the present invention is to provide an anti-vibration device that can perform the above operation.

  In order to solve the above-mentioned problems, the present invention is characterized by the following measures.

  The invention according to claim 1 is a vibration isolation table that movably supports a moving body, and a detection means that detects vibrations from the outside and detects fluctuations in the vertical direction and the horizontal biaxial direction of the vibration isolation table. , A vibration isolator body having a vibration isolator unit having an actuator for displacing the vibration isolator in the vertical direction and the horizontal biaxial direction, and a movement for controlling the movement of the moving body and recognizing the coordinate position of the moving body Body control means, first calculation means for obtaining a calculation value of the first motion mode related to the vertical direction of the vibration isolation table, the horizontal two-axis direction, and the rotation direction based on the detection signal of the detection means, A control amount calculation means for obtaining a control amount to be supplied to the actuator based on the calculation value of the first motion mode, and a control means having an actuator control means for controlling the actuator based on the control amount. The control means includes a center-of-gravity position calculation means for obtaining a center-of-gravity position of the vibration isolation device main body based on the coordinate position of the movable body, and the first calculation means includes the center of gravity of the vibration isolation device main body. It is characterized by comprising first correction means for correcting the calculated value of the first motion mode according to the position.

  The invention according to claim 2 is characterized in that the control amount calculation means includes control amount correction means for correcting the control amount of the actuator in accordance with the position of the center of gravity of the vibration isolation device body.

  The invention described in claim 3 is characterized in that the detection means is a displacement sensor.

According to a fourth aspect of the present invention, the detection means includes a first detection means and a second detection means,
The first detection means is composed of a displacement sensor, and the second detection means is composed of an acceleration sensor.

  According to a fifth aspect of the present invention, there is provided a second computing means for obtaining a computed value of the second motion mode related to the vertical direction, the horizontal biaxial direction, and the rotational directions of the vibration isolation table based on the detection signal of the acceleration sensor. And a second correction means for correcting the calculated value of the second motion mode in accordance with the position of the center of gravity of the vibration isolator body, the control amount calculating means, Based on the calculated values of the first and second motion modes corrected by the first and second correction means, the control amount of the actuator is obtained, and the control amount correction means responds to the position of the center of gravity of the vibration isolator body. Thus, the control amount of the actuator is corrected.

  According to a sixth aspect of the present invention, the control means further comprises storage means for storing the center of gravity position of the vibration isolator main body corresponding to the coordinate position of the moving body, and the center of gravity position calculating means includes the storage means. The center of gravity position data of the vibration isolator main body corresponding to the coordinate position of the moving body is read from the inside.

  The invention described in claim 7 is characterized in that the moving body is an XY stage that moves in a horizontal biaxial direction on the vibration isolation table.

  The invention according to claim 8 is characterized in that the actuator is an air spring or a voice coil motor.

  According to the present invention, the center-of-gravity position calculation means for obtaining the center-of-gravity position of the vibration isolator body based on the coordinate position of the moving body, and the first motion mode based on the center-of-gravity position of the vibration isolation apparatus body. First correcting means for correcting the calculated value of the vertical axis, and the control amount calculating means balances the moment in the rotational direction of the vertical axis and the moment in the rotational direction of the two horizontal axes passing through the center of gravity of the vibration isolator body. If the moving body moves at a high speed or the moving body moves, the center of gravity position of the vibration isolator body is greatly displaced. Even in this case, the vibration isolation table can be controlled with high accuracy so that the posture of the vibration isolation table becomes horizontal.

  Next, embodiments of the present invention will be described with reference to the drawings.

  FIG. 5 is a schematic configuration diagram of a vibration isolation device according to an embodiment of the present invention. 6 is a cross-sectional view of the vibration isolator body, and FIG. 7 is a plan view of the vibration isolator body. 5 to 7, the XY (X axis and Y axis) direction is a horizontal biaxial direction, the Z (Z axis) direction is a vertical direction, and G2 varies as the XY stage 17 moves. The center of gravity position of the vibration isolator body 11 (hereinafter referred to as “center of gravity position G2”) and G3 indicate the center of gravity position of the vibration isolation base 13 (hereinafter referred to as “center of gravity position G3”).

  As shown in FIG. 5, the vibration isolator 10 of the present embodiment includes a vibration isolator main body 11 and a control unit 12 that performs overall control of the vibration isolator main body 11. The vibration isolator 10 removes vibrations from the outside, and the vibration isolator 13 on which the movable body (in the case of the present embodiment, the XY stage 17) is movably disposed is placed in a horizontal state. For example, the present invention is applied to an electron microscope, a semiconductor exposure apparatus, or the like provided with a stage with high movement accuracy.

5 to 7, the vibration isolation device main body 11 includes a vibration isolation table 13 that supports an XY stage 17 that is a movable body, and vibration isolation units 15 and 16. The vibration isolation table 13 has a rectangular parallelepiped shape and is supported on the floor 14 via vibration isolation units 15 and 16. Further, the rigid motion of the vibration isolation table 13 is based on the XYZ coordinate system, and the X-axis direction, the Y-axis direction, the Z-axis (vertical axis) direction, the X-axis rotation direction θ _x , and the Y-axis rotation direction θ _y. And six motion modes (also referred to as “vibration modes”) in the rotation direction θ _z of the Z axis.

  The XY stage 17 is placed on the vibration isolation table 13, and recognizes the X stage that moves in the X axis direction, the Y stage that moves in the Y axis direction, and the coordinate positions of the X stage and the Y stage. X linear scale and Y linear scale (not shown). The X linear scale is for recognizing the X-axis coordinate position of the XY stage 17. The Y linear scale is for recognizing the coordinate position of the XY stage 17 on the Y axis.

  The vibration isolation unit 15 is provided at three of the four corners of the vibration isolation table 13, and the vibration isolation unit 16 is provided at the remaining one (see FIG. 7). The vibration isolation units 15 and 16 support the vibration isolation table 13 with respect to the floor 14, and are used for vibration isolation from the floor 14 and for adjusting the vibration isolation table 13 to be in a horizontal state. .

  FIG. 8 is a cross-sectional view of the vibration isolation unit. Next, the vibration isolation unit 15 will be described with reference to FIG. The vibration isolation unit 15 includes a base member 18, a floating member 22, vibration isolation support mechanisms 26 and 27, first and second actuators 33 and 34, first and second displacement sensors 36 and 37, First and second acceleration sensors 38 and 39 are provided.

  The base member 18 is disposed on the floor 14 and includes a plate body 19 and a protrusion 21 formed integrally with the plate body 19. The floating member 22 includes a frame body 23 and a projecting portion 24 that is integrally formed on the frame body 23. The levitation member 22 is supported by the base member 18 via vibration isolation support mechanisms 26 and 27. The frame body 23 is shaped to surround the protruding portion 21. A space for arranging the vibration isolation support mechanisms 26 and 27, the first and second actuators 33 and 34, and the second displacement sensor 37 is formed between the frame body 23 and the protruding portion 21. . The protrusion 24 directly supports the vibration isolation table 13. The protrusion 24 is fixed to the vibration isolation table 13 by, for example, screw fastening.

  The vibration isolation support mechanism 26 is provided so as to connect the side surface 21B of the protruding portion 21 and the frame body 23 facing the side surface 21B of the protruding portion 21. The anti-vibration support mechanism 26 supports the floating member 22 from the horizontal direction (X-axis direction or Y-axis direction) and also removes the horizontal vibration transmitted from the outside.

  The vibration isolation support mechanism 27 is provided so as to connect the upper surface 21A of the protruding portion 21 and the frame body 23 facing the upper surface 21A of the protruding portion 21. The vibration isolation support mechanism 27 is for supporting the floating member 22 from the vertical direction and for isolating the vertical vibration transmitted from the outside. The anti-vibration support mechanisms 26 and 27 can be composed of, for example, a spring and a dashpot.

FIG. 9 is a diagram illustrating an example of an arrangement position of the actuator. The first actuator 33 is provided so as to connect the upper surface 21A of the protruding portion 21 and the frame body 23 facing the upper surface 21A of the protruding portion 21. The first actuator 33 is for displacing the vibration isolation table 13 in the Z-axis direction. The vibration isolator body 11 of the present embodiment is provided with four first actuators 33 (hereinafter referred to as “first actuators 33 _{z1 to} 33 _z4 ”). The first actuators 33 _{z1 to} 33 _z4 can be disposed at positions as shown in FIG. 9, for example.

The second actuator 34 is provided to connect the side surface 21B of the protruding portion 21 and the frame body 23 facing the side surface 21B of the protruding portion 21. The second actuator 34 is for displacing the vibration isolation table 13 in the horizontal direction (X-axis direction or Y-axis direction). The vibration isolator main body 11 of the present embodiment includes second actuators 34 _x1 and 34 _x2 that displace the vibration isolation table 13 in the X-axis direction, and a second actuator that displaces the vibration isolation table 13 in the Y-axis direction. 34 _y1 and 34 _y2 are provided. The second actuators 34 _x1 , 34 _x2 , 34 _y1 , 34 _y2 can be disposed at positions as shown in FIG. 9, for example.

  The 1st and 2nd actuators 33 and 34 are for making the attitude | position of the vibration isolator 13 into a horizontal state. For example, an air spring or a voice coil motor can be used for the first and second actuators 33 and 34. For example, when air springs are used as the first and second actuators 33 and 34, the first and second actuators 33 and 34 can be reduced in size compared to the case where a voice coil motor is used. Can do.

FIG. 10 is a diagram illustrating an example of the arrangement positions of the displacement sensor and the acceleration sensor. The first displacement sensor 36 serving as the first detection means is provided on the upper surface 19 </ b> A of the plate body 19. The first displacement sensor 36 is for detecting the displacement of the vibration isolation table 13 in the Z-axis direction. The vibration isolator body 11 of the present embodiment is provided with three first displacement sensors 36 (hereinafter referred to as “first displacement sensors 36 _z1 , 36 _z2 , 36 _z3 ”). The first displacement sensor 36 _z1 detects the detection signal D _z1 , the first displacement sensor 36 _z2 detects the detection signal D _z2 , and the first displacement sensor 36 _z3 detects the detection signal D _z3 . These detection signals D _z1 , D _z2 , D _z3 are transmitted to the first calculation means 41 described later (see FIG. 11).

The second displacement sensor 37 serving as the first detection means is provided on the side surface 21 </ b> C of the protruding portion 21. The second displacement sensor 37 is for detecting the displacement of the vibration isolation table 13 in the X-axis direction and the Y-axis direction. The vibration isolator body 11 of the present embodiment is provided with three second displacement sensors 37 (hereinafter referred to as “second displacement sensors 37 _x1 , 37 _x2 , 37 _y1 ”). The second displacement sensors 37 _x1 and 37 _x2 are sensors that detect the displacement of the vibration isolation table 13 in the X-axis direction, and the second displacement sensor 37 _y1 detects the displacement of the vibration isolation table 13 in the Y-axis direction. Sensor. The second displacement sensor 37 _x1 detects the detection signal D _x1 , the second displacement sensor 37 _x2 detects the detection signal D _x2 , and the second displacement sensor 37 _y1 detects the detection signal D _y1 . These detection signals D _x1 , D _x2 , D _y1 are transmitted to the first calculating means 42 described later (see FIG. 11).

The first and second displacement sensors 36 and 37 may be provided at a position away from the gravity center position G3 of the vibration isolation table 13. At a position away from the gravity center position G3 of the vibration isolation table 13, when the vibration isolation table 13 tilts, the fluctuation of the vibration isolation table 13 becomes larger than a position close to the gravity center position G3. Therefore, it is possible to easily detect the displacement of the vibration isolation table 13 by providing the first and second displacement sensors 36 and 37 at positions away from the gravity center position G3 of the vibration isolation table 13. The first and second displacement sensors 36 _z1 , 36 _z2 , 36 _z3 , 37 _x1 , 37 _x2 , and 37 _y1 can be disposed at positions as shown in FIG. 10, for example.

The first acceleration sensor 38 serving as the second detection means is provided on the upper surface 23 </ b> A of the frame body 23. The first acceleration sensor 38 is for detecting vibration in the Z-axis direction of the vibration isolation table 13. The vibration isolator main body 11 of the present embodiment is provided with three first acceleration sensors 38 (hereinafter referred to as “first acceleration sensors 38 _z1 , 38 _z2 , 38 _z3 ”). The first acceleration sensor 38 _z1 detects the detection signal A _z1 , the first acceleration sensor 38 _z2 detects the detection signal A _z2 , and the first acceleration sensor 38 _z3 detects the detection signal A _z3 . The detection signals A _z1 , A _z2 , A _z3 are transmitted to the second calculation means 43 described later (see FIG. 11).

The second acceleration sensor 39 as the second detection means is provided on the side surface 23 </ b> B of the frame body 23. The second acceleration sensor 39 is for detecting vibration in the XY direction of the vibration isolation table 13. The vibration isolator body 11 of the present embodiment is provided with three second acceleration sensors 39 (hereinafter referred to as “second acceleration sensors 39 _x1 , 39 _x2 , 39 _y1 ”). The second acceleration sensors 39 _x1 and 39 _x2 are sensors that detect vibrations in the X-axis direction of the vibration isolation table 13, and the second acceleration sensor 39 _y1 detects vibrations in the Y-axis direction of the vibration isolation table 13. Sensor. The second acceleration sensor 39 _x1 detects the detection signal A _x1 , the second acceleration sensor 39 _x2 detects the detection signal A _x2 , and the second acceleration sensor 39 _y1 detects the detection signal A _y1 . These detection signals A _x1 , A _x2 , A _y1 are transmitted to the second calculating means 44 described later (see FIG. 11).

  The first and second acceleration sensors 38 and 39 may be provided at positions away from the gravity center position G3 of the vibration isolation table 13. At a position away from the gravity center position G3 of the vibration isolation table 13, when the vibration isolation table 13 is tilted, the vibration of the vibration isolation table 13 becomes larger than a position near the gravity center position G3 of the vibration isolation table 13. Therefore, by providing the first and second acceleration sensors 38 and 39 at positions away from the center of gravity position G3 of the vibration isolation table 13, it is possible to easily detect the vibration of the vibration isolation table 13. The first and second acceleration sensors 38 and 39 can be disposed at positions as shown in FIG. 10, for example.

The vibration isolation unit 16 includes a base member 18, a floating member 22, vibration isolation support mechanisms 26 and 27, a first actuator 33 _z3, and a second actuator 34 _y2 . The vibration isolation unit 16 is configured by removing the first and second displacement sensors 36 and 37 and the first and second acceleration sensors 38 and 39 from the structure of the vibration isolation unit 15.

  Next, the control means 12 is demonstrated with reference to FIG.5 and FIG.11. FIG. 11 is a diagram for explaining processing performed by the control means. In FIG. 11, a1 to a12 indicate input values (hereinafter referred to as “input values a1 to a12”) for bringing the vibration isolation table 13 into a predetermined state. Moreover, the specific numerical value of the input values a7 to a12 is 0.

  The control means 12 includes a stage control means 40, which is a moving body control means, a gravity center position calculation means 48, a storage means 49, first calculation means 41 and 42, second calculation means 43 and 44, and a control. The calculation units 51 to 54, first and second control amount calculation means 45 and 46, and actuator control means 47 are included.

The stage control means 40 is connected to the XY stage 17 and the gravity center position calculation means 48. The stage control means 40 performs overall control of the XY stage 17. The stage control unit 40 recognizes the coordinate position of the XY stage 17 on the vibration isolation table 13 from the X linear scale and the Y linear scale, and transmits the coordinate position of the XY stage 17 to the gravity center position calculation unit 48. In the following description, the coordinate position of the XY stage 17 that changes as the XY stage 17 moves on the vibration isolation table 13 is (x, y) = (17 _x , 17 _y ).

The center-of-gravity position calculation unit 48 includes a stage control unit 40, first and second calculation units 41, 42, 43, 44, first and second control amount calculation units 45, 46, and a storage unit 49. It is connected. Center-of-gravity position computing unit 48, based on the coordinate position of the X-Y stage 17 which is transmitted from the stage control unit 40 (17 _x, 17 _y), corresponding to the coordinate position of the X-Y stage 17 (17 _x, 17 _y) Centroid position G2 of the vibration isolator main body 11 (hereinafter referred to as “(x, y, z) = (G2 _x , G2 _y , G2 _z )”), and the X coordinate of the centroid position G2 and The Y coordinate data G2 _x and G2 _y are transmitted to the first and second calculating means 41, 42, 43 and 44 and the first and second control amount calculating means 45 and 46, respectively. In the case of having a storage means 49 as will be described later, the center-of-gravity position calculation means 48 instead of calculating the center-of-gravity position (G2 _x , G2 _y , G2 _z ) when the XY stage 17 moves, by the storage means 49 The data of the gravity center position (G2 _x , G2 _y , G2 _z ) of the vibration isolator body 11 corresponding to the coordinate position (17 _x , 17 _y ) of the XY stage 17 is read.

The storage means 49 is connected to the gravity center position calculation means 48. The storage unit 49 stores data (G2 _x , G2 _y , G2 _z ) of the center of gravity position (G2 _x , G2 _y , G2 _z ) of the vibration isolator body 11 corresponding to various coordinate positions (17 _x , 17 _y ) of the XY stage 17 acquired in advance. Mapping data).

As described above, the data of the gravity center position (G2 _x , G2 _y , G2 _z ) of the vibration isolator body 11 corresponding to various coordinate positions (17 _x , 17 _y ) of the XY stage 17 is acquired and stored in advance. By storing the data of the centroid position (G2 _x , G2 _y , G2 _z ) in the means 49, the centroid position calculating means 48 corresponds to the coordinate position (17 _x , 17 _y ) of the XY stage 17 from the storage means 49. It is possible to read the data of the center of gravity position (G2 _x , G2 _y , G2 _z ). Thereby, the gravity center position calculation means 48 needs to obtain the gravity center position (G2 _x , G2 _y , G2 _z ) of the vibration isolator body 11 based on the coordinate position (17 _x , 17 _y ) of the XY stage 17. Therefore, the processing speed of the control means 12 can be improved.

The first calculation means 41 has a first correction means 41A, and is connected to the first displacement sensors 36 _z1 , 36 _z2 , 36 _z3 , the gravity center position calculation means 48, and the control calculation unit 51. ing. Based on the detection signals D _z1 , D _z2 , D _z3 from the first displacement sensors 36 _z1 , 36 _z2 , 36 _z3 , the first calculation means 41 calculates the Z-axis motion mode calculation value M _zD , The calculated value Mθ _xD of the motion mode in the rotation direction θ _x of the X axis and the calculated value Mθ yD of the motion mode in the rotation direction θ _y of the Y axis are obtained, and the first correction means 41A _uses the first correction means 41A. The motion mode calculation values M _zD , Mθ _xD , and Mθ _yD (calculation values of the first motion mode) are corrected according to the X-coordinate and Y-coordinate data G2 _x and G2 _y of the gravity center position G2. That is, the correction by the first correction means 41A takes into account the distance from the center of gravity position G2 to the positions where the first displacement sensors 36 _z1 , 36 _z2 , 36 _z3 are _disposed , and the center of gravity position G2 of the vibration isolation device main body 11. Is performed so that the moments in the rotational directions θ _x and θ _y of the two horizontal axes centering on are balanced. The corrected motion mode calculation values M _zD , Mθ _xD , and Mθ _yD are transmitted to the control calculation unit 51.

The first calculation means 42 having the first correction means 42A performs the correction and calculation processing according to the following equation (1). In the following equation (1), the coordinate position of the first displacement sensor 36 _z1 is (x, y, z) = (36 _z1x , 36 _z1y , 36 _z1z ), and the coordinate position of the first displacement sensor 36 _z2 is (x , Y, z) = (36 _z2x , 36 _z2y , 36 _z2z ), the coordinate position of the first displacement sensor 36 _z3 is (x, y, z) = (36 _z3x , 36 _z3y , 36 _z3z ), the vibration isolator The center-of-gravity position G2 of the main body 11 is (x, y, z) = (G2 _x , G2 _y , G2 _z ).

このように、第１の演算手段４１に第１の補正手段４１Ａを設け、除振装置本体１１の重心位置Ｇ２に応じて、運動モードの演算値Ｍ_zD，Ｍθ_xD，Ｍθ_yDを補正することにより、除振装置本体１１の重心位置Ｇ２を中心とする水平２軸の回転方向θ_x，θ_yのモーメントがそれぞれ釣り合うような運動モードの演算値Ｍ_zD，Ｍθ_xD，Ｍθ_yDを求めることができる。これにより、Ｘ−Ｙステージ１７が高速で移動した場合や、Ｘ−Ｙステージ１７の移動により除振装置本体１１の重心位置が大きく変位した場合でも、除振台１３の姿勢が水平状態となるように制御することが可能となる。

As described above, the first correction unit 41A is provided in the first calculation unit 41, and the calculation values M _zD , Mθ _xD , and Mθ _yD of the motion mode are corrected according to the center of gravity position G2 of the vibration isolation device body 11. Thus, the operation values M _zD , Mθ _xD , and Mθ _yD of the motion modes in which the moments in the rotational directions θ _x and θ _y of the two horizontal axes centering on the gravity center position G2 of the vibration isolator body 11 are balanced are obtained. it can. Thereby, even when the XY stage 17 moves at a high speed or when the position of the center of gravity of the vibration isolation device main body 11 is greatly displaced due to the movement of the XY stage 17, the posture of the vibration isolation table 13 becomes horizontal. It becomes possible to control.

The first calculation means 42 includes first correction means 42A, and is connected to the second displacement sensors 37 _x1 , 37 _x2 , 37 _y1 , the gravity center position calculation means 48, and the control calculation unit 52. ing. Based on the detection signals D _x1 , D _x2 , and D _y1 from the second displacement sensors 37 _x1 , 37 _x2 , and 37 _y1 , the first calculating means 42 calculates the operation value M _xD of the motion mode in the X-axis direction, a calculated value M _yD modes of motion of the Y-axis, with obtaining a calculated value M.theta _zD the rotational direction of the movement modes of the Z-axis, X-coordinate of the barycentric position G2 of the first correction means 42A divided by the vibration apparatus main body 11 and The motion mode operation values M _xD , My _D , and Mθ _zD (operation values of the first motion mode) are corrected in accordance with the Y coordinate data G2 _x and G2 _y . That is, the correction by the first correction means 42A takes into account the distances from the center of gravity position G2 to the positions at which the second displacement sensors 37 _x1 , 37 _x2 , 37 _y1 are _disposed , and the center of gravity position G2 of the vibration isolator body 11 Are performed so that the moments in the rotation direction θ _z of the Z-axis centering on each of them are balanced. The corrected operation values M _xD , My _D , and Mθ _zD of the motion mode are transmitted to the control calculation unit 52.

The first calculation means 42 having the first correction means 42A performs the correction and calculation processing according to the following equation (2). In the following equation (2), the coordinates of the second displacement sensor 37 _z1 are (x, y, z) = (37 _z1x , 37 _z1y , 37 _z1z ), and the coordinates of the second displacement sensor 37 _z2 are (x , Y, z) = (37 _z2x , 37 _z2y , 37 _z2z ), and the coordinates of the second displacement sensor 37 _z3 are (x, y, z) = (37 _z3x , 37 _z3y , 37 _z3z ).

このように、第１の演算手段４２に第１の補正手段４２Ａを設け、除振装置本体１１の重心位置Ｇ２に応じて、運動モードの演算値Ｍ_xD，Ｍ_yD，Ｍθ_zDを補正することにより、除振装置本体１１の重心位置Ｇ２を中心とするＺ軸の回転方向θ_zのモーメントが釣り合うような運動モードの演算値Ｍ_xD，Ｍ_yD，Ｍθ_zDを求めることができる。これにより、Ｘ−Ｙステージ１７が高速で移動した場合や、Ｘ−Ｙステージ１７の移動により除振装置本体１１の重心位置が大きく変位した場合でも、除振台１３の姿勢が水平状態となるように制御することが可能となる。

In this way, the first correction means 42A is provided in the first calculation means 42, and the motion mode calculation values M _xD , My _D , and Mθ _zD are corrected according to the center of gravity position G2 of the vibration isolation device body 11. Thus, the operation values M _xD , My _D , and Mθ _zD of the motion modes in which the moments in the rotation direction θ _z of the Z axis centering on the gravity center position G2 of the vibration isolation device body 11 can be obtained. Thereby, even when the XY stage 17 moves at a high speed or when the position of the center of gravity of the vibration isolation device main body 11 is greatly displaced due to the movement of the XY stage 17, the posture of the vibration isolation table 13 becomes horizontal. It becomes possible to control.

The second calculation means 43 has second correction means 43A, and is connected to the first acceleration sensors 38 _z1 , 38 _z2 , 38 _z3 , the gravity center position calculation means 48, and the control calculation unit 53. ing. Based on the detection signals A _z1 , A _z2 , A _z3 from the first acceleration sensors 38 _z1 , 38 _z2 , 38 _z3 , the second calculating means 43 calculates the operation value M _zA of the motion mode in the Z-axis direction, A calculated value Mθ _xA of the motion mode in the X-axis rotation direction θ _x and a calculated value Mθ _yA of the motion mode in the Y-axis rotation direction θ _y are obtained, and the second correction unit 43A uses the second correction means 43A. The motion mode calculation values M _zA , Mθ _xA , Mθ _yA (calculation values of the second motion mode) are corrected in accordance with the X-coordinate and Y-coordinate data G2 _x and G2 _y of the gravity center position G2. That is, the correction by the second correction means 43A takes into account the distance from the center of gravity position G2 to the positions where the first acceleration sensors 38 _z1 , 38 _z2 , 38 _z3 are _disposed , and the center of gravity position G2 of the vibration isolation device main body 11. Is performed so that the moments in the rotational directions θ _x and θ _y of the two horizontal axes centering on are balanced. The corrected operation values M _zA , Mθ _xA and Mθ _yA of the motion mode are transmitted to the control calculation unit 53.

The second calculation means 43 having the second correction means 43A performs the correction and calculation processing according to the following equation (3). In the following equation (3), the coordinates of the first acceleration sensor 38 _z1 are (x, y, z) = (38 _z1x , 38 _z1y , 38 _z1z ), and the coordinates of the first acceleration sensor 38 _z2 are (x , Y, z) = (38 _z2x , 38 _z2y , 38 _z2z ), and the coordinates of the first acceleration sensor 38 _z3 are (x, y, z) = (38 _z3x , 38 _z3y , 38 _z3z ).

このように、第２の演算手段４３に第２の補正手段４３Ａを設け、除振装置本体１１の重心位置Ｇ２に応じて、運動モードの演算値Ｍ_zA，Ｍθ_xA，Ｍθ_yAを補正することにより、除振装置本体１１の重心位置Ｇ２を中心とする水平２軸の回転方向θ_x，θ_yのモーメントがそれぞれ釣り合うような運動モードの演算値Ｍ_zA，Ｍθ_xA，Ｍθ_yAを求めることができる。これにより、Ｘ−Ｙステージ１７が高速で移動した場合や、Ｘ−Ｙステージ１７の移動により除振装置本体１１の重心位置が大きく変位した場合でも、除振台１３の姿勢が水平状態となるように制御することが可能となる。

In this way, the second calculating means 43 is provided with the second correcting means 43A, and the motion mode calculated values M _zA , Mθ _xA , Mθ _yA are corrected according to the gravity center position G2 of the vibration isolation device body 11. Thus, the operation values M _zA , Mθ _xA , and Mθ _yA of the motion modes in which the moments in the rotation directions θ _x and θ _y of the two horizontal axes centered on the center of gravity position G2 of the vibration isolator body 11 are balanced are obtained. it can. Thereby, even when the XY stage 17 moves at a high speed or when the position of the center of gravity of the vibration isolation device main body 11 is greatly displaced due to the movement of the XY stage 17, the posture of the vibration isolation table 13 becomes horizontal. It becomes possible to control.

The second calculation means 44 includes second correction means 44A, and is connected to the second acceleration sensors 39 _x1 , 39 _x2 , 39 _y1 , the gravity center position calculation means 48, and the control calculation unit 54. ing. Based on the detection signals A _x1 , A _x2 , A _y1 from the second acceleration sensors 39 _x1 , 39 _x2 , 39 _y1 , the fourth calculation means 44 calculates the X-axis motion mode calculation value M _xA , a calculated value M _yA modes of motion of the Y-axis, with obtaining a calculated value M.theta _zA modes of motion in the rotational direction theta _z of the Z-axis, X the center of gravity G2 of the second correcting means 44A divided by the isolation device main body 11 The motion mode operation values M _xA , M _yA , Mθ _zA (operation values of the second motion mode) are corrected according to the coordinate and Y coordinate data G2 _x , G2 _y . That is, the correction by the second correction means 44A takes into account the distance from the center of gravity position G2 to the positions where the second acceleration sensors 39 _x1 , 39 _x2 , 39 _y1 are _disposed , and the center of gravity position G2 of the vibration isolator body 11. Are performed so that the moments in the rotation direction θ _z of the Z-axis centering on each of them are balanced. Corrected motion mode of operation value M _xA, M _yA, Mθ _zA is sent to the control arithmetic unit 54.

The 2nd calculating means 44 which has the 2nd correction means 44A performs the said correction | amendment and calculation by following (4) Formula. In the following equation (4), the coordinates of the second acceleration sensor 39 _z1 are (x, y, z) = (39 _z1x , 39 _z1y , 39 _z1z ), and the coordinates of the second acceleration sensor 39 _z2 are (x , Y, z) = (39 _z2x , 39 _z2y , 39 _z2z ), and the coordinates of the second acceleration sensor 39 _z3 are (x, y, z) = (39 _z3x , 39 _z3y , 39 _z3z ).

このように、第２の演算手段４４に第２の補正手段４４Ａを設け、除振装置本体１１の重心位置Ｇ２に応じて、運動モードの演算値Ｍ_xA，Ｍ_yA，Ｍθ_zAを補正することにより、除振装置本体１１の重心位置Ｇ２を中心とするＺ軸の回転方向θ_zのモーメントが釣り合うような運動モードの演算値Ｍ_xA，Ｍ_yA，Ｍθ_zAを求めることができる。これにより、Ｘ−Ｙステージ１７が高速で移動した場合や、Ｘ−Ｙステージ１７の移動により除振装置本体１１の重心位置が大きく変位した場合でも、除振台１３の姿勢が水平状態となるように制御することが可能となる。

Thus, the second correction means 44A provided in the second arithmetic unit 44, in accordance with the gravity center position G2 of the vibration isolator main body 11, to correct the calculated value M _xA motion mode, M _yA, the M.theta _zA the calculated value M _xA modes of motion, such as the moment in the rotational direction theta _z balances the Z axis around the gravity center position G2 of the vibration isolator main body 11, M _yA, it can be determined M.theta _zA. Thereby, even when the XY stage 17 moves at a high speed or when the position of the center of gravity of the vibration isolation device main body 11 is greatly displaced due to the movement of the XY stage 17, the posture of the vibration isolation table 13 becomes horizontal. It becomes possible to control.

The control calculation unit 51 includes control calculation units 51 </ b> A to 51 </ b> C and is connected to the first calculation means 41. The control calculation units 51A to 51C are for performing PID control. When the motion mode calculation value M _zD1 obtained by adding the input value a1 to the motion mode calculation value M _zD is input, the control calculation unit 51A outputs the motion mode calculation value M _zD2 . When the motion mode calculation value Mθ _xD1 obtained by adding the input value a2 to the motion mode calculation value Mθ _xD is input, the control calculation unit 51B outputs the motion mode calculation value Mθ _xD2 . When the motion mode calculation value Mθ _yD1 obtained by _adding the input value a3 to the motion mode calculation value Mθ _yD is input, the control calculation unit 51C outputs the motion mode calculation value Mθ _yD2 . For example, a PID filter, a low-pass filter, a high-pass filter, or the like can be used for the control arithmetic units 51A to 51C.

The control calculation unit 52 includes control calculation units 52 </ b> A to 52 </ b> C and is connected to the first calculation means 42. The control arithmetic units 52A to 52C are for performing PID control on the input data. When the motion mode computation value M _xD1 obtained by adding the input value a4 to the motion mode computation value M _xD is input, the control computation unit 52A outputs the motion mode computation value M _xD2 . When the motion mode calculation value _MyD1 obtained by adding the input value a5 to the motion mode calculation value _MyD is input, the control calculation unit 52B outputs the motion mode calculation value _MyD2 . When the motion mode calculation value Mθ _zD1 obtained by adding the input value a6 to the motion mode calculation value Mθ _zD is input, the control calculation unit 52C outputs the motion mode calculation value Mθ _zD2 . For example, a PID filter, a low-pass filter, a high-pass filter, or the like can be used for the control arithmetic units 52A to 52C.

The control calculation unit 53 includes control calculation units 53 </ b> A to 53 </ b> C and is connected to the second calculation unit 43. The control arithmetic units 53A to 53C are for performing PID control. When the motion mode calculation value M _zA1 obtained by adding the input value a7 to the motion mode calculation value M _zA is input, the control calculation unit 53A outputs the motion mode calculation value M _zA2 . Control calculation unit 53B is when the operation value M.theta _xA1 motion mode operation value M.theta _xA input value a8 is applied motion mode is inputted, and outputs the calculated value M.theta _xA2 motion mode. When the motion mode calculation value Mθ _yA1 obtained by adding the input value a9 to the motion mode calculation value Mθ _yA is input, the control calculation unit 53C outputs the motion mode calculation value Mθ _yA2 . For example, a PID filter, a low-pass filter, a high-pass filter, or the like can be used for the control arithmetic units 53A to 53C.

The control calculation unit 54 includes control calculation units 54 </ b> A to 54 </ b> C and is connected to the fourth calculation unit 44. The control calculation units 54A to 54C are for performing PID control on the input data. When the motion mode computation value M _xA1 obtained by adding the input value a10 to the motion mode computation value M _xA is input, the control computation unit 54A outputs the motion mode computation value M _xA2 . The control calculation unit 54B, when the calculated value M.theta _YA1 motion mode in which the input value a11 added to the calculated value M _yA motion mode is inputted, and outputs the calculated value M _YA2 motion mode. When the motion mode computation value Mθ _zA1 obtained by adding the input value a12 to the motion mode computation value Mθ _zA is input, the control computation unit 54C outputs the motion mode computation value Mθ _zA2 . For example, a PID filter, a low-pass filter, a high-pass filter, or the like can be used for the control arithmetic units 54A to 54C.

The first control amount calculation means 45 has a control amount correction means 45 A and is connected to the actuator control means 47. The first control amount calculation means 45, the calculated value M _z modes of motion consisting calculated value M _ZD2, M _ZA2 the motion mode, calculation value M.theta _RxD2 the motion mode, calculation value of motion modes consisting M.theta _xA2 M.theta _x And a first control amount F _z1 ˜ necessary for controlling the first actuators 33 _{z1 to} 33 _z4 based on the motion mode calculated values Mθ _y consisting of the motion mode calculated values Mθ _yD2 and Mθ _yA2. In addition to obtaining F _z4 , the control amount correction means 45A corrects the first control amounts F _{z1 to} F _z4 in accordance with the X coordinate and Y coordinate data G2 _x and G2 _y of the gravity center position G2 of the vibration isolation device body 11. Do. In other words, the correction by the control amount correction means 45A takes into account the distance from the center of gravity position G2 to the position where the first actuators 33 _{z1 to} 33 _z4 are _disposed , and the horizontal centering on the center of gravity position G2 of the vibration isolator body 11 is taken into account. This is performed so that the moments of the biaxial rotation directions θ _x and θ _y are balanced. The corrected first control amounts F _{z1 to} F _z4 are transmitted to the actuator control means 47.

The first control amount calculation means 45 having the control amount correction means 45A performs the correction and calculation processing according to the following equation (5). In the following equation (5), the coordinates of the first actuator 33 _z1 are (x, y, z) = (33 _z1x , 33 _z1y , 33 _z1z ), and the coordinates of the first actuator 33 _z2 are (x, y , Z) = (33 _z2x , 33 _z2y , 33 _z2z ), and the coordinates of the first actuator 33 _z3 are (x, y, z) = (33 _z3x , 33 _z3y , 33 _z3z ).

このように、第１の制御量演算手段４５に制御量補正手段４５Ａを設け、除振装置本体１１の重心位置Ｇ２に応じて、第１の制御量Ｆ_z1〜Ｆ_z4を補正することにより、除振装置本体１１の重心位置Ｇ２を中心とする水平２軸の回転方向θ_x，θ_yのモーメントがそれぞれ釣り合うような第１の制御量Ｆ_z1〜Ｆ_z4を求めることができる。これにより、Ｘ−Ｙステージ１７が高速で移動した場合や、Ｘ−Ｙステージ１７の移動により除振装置本体１１の重心位置が大きく変位した場合でも、除振台１３の姿勢が水平状態となるように制御することが可能となる。

In this way, the first control amount calculation unit 45 is provided with the control amount correction unit 45A, and by correcting the first control amounts F _{z1 to} F _z4 according to the center of gravity position G2 of the vibration isolation device body 11, The first control amounts F _{z1 to} F _z4 can be obtained so that the moments of the rotational directions θ _x and θ _y of the two horizontal axes centered on the gravity center position G2 of the vibration isolator body 11 are balanced. Thereby, even when the XY stage 17 moves at a high speed or when the position of the center of gravity of the vibration isolation device main body 11 is greatly displaced due to the movement of the XY stage 17, the posture of the vibration isolation table 13 becomes horizontal. It becomes possible to control.

The second control amount calculation means 46 has a control amount correction means 46 A, and is connected to the actuator control means 47. Second control amount calculation means 46, the calculated value M _x of motion modes consisting calculated value M _RxD2, M _xA2 the motion mode, calculation value M _y modes of motion consisting calculated value M _YD2, M _YA2 motion mode And a motion mode computation value Mθ _z consisting of motion mode computation values Mθ _zD2 and Mθ _zA2 , the second actuators necessary for controlling the second actuators 34 _x1 , 34 _x2 , 34 _y1 , 34 _y2 . The control amounts F _x1 , F _x2 , F _y1 , and F _y2 are obtained, and the control amount correction unit 46A calculates the second in accordance with the X coordinate and Y coordinate data G2 _x , G2 _y of the gravity center position G2 of the vibration isolation device body 11. The control amounts F _x1 , F _x2 , F _y1 , and F _y2 are corrected. That is, the correction by the control amount correction means 46A is performed by taking into consideration the distances from the center of gravity position G2 to the positions where the second actuators 34 _x1 , 34 _x2 , 34 _y1 , and 34 _y2 are _disposed. This is performed so that the moments in the rotation direction θ _z of the Z axis centering on G2 are balanced. The corrected second control amounts F _x1 , F _x2 , F _y1 , F _y2 are transmitted to the actuator control means 47.

The second control amount calculation means 46 having the control amount correction means 46A performs the correction and calculation processing according to the following equation (6). In the following equation (6), the coordinates of the second actuator 34 _z1 are (x, y, z) = (34 _z1x , 34 _z1y , 34 _z1z ), and the coordinates of the second actuator 34 _z2 are (x, y , Z) = (34 _z2x , 34 _z2y , 34 _z2z ), and the coordinates of the second actuator 34 _z3 are (x, y, z) = (34 _z3x , 34 _z3y , 34 _z3z ).

このように、第２の制御量演算手段４６に制御量補正手段４６Ａを設け、除振装置本体１１の重心位置Ｇ２に応じて、第２の制御量Ｆ_x1，Ｆ_x2，Ｆ_y1，Ｆ_y2を補正することにより、除振装置本体１１の重心位置Ｇ２を中心とするＺ軸の回転方向θ_zのモーメントが釣り合うような第２の制御量Ｆ_x1，Ｆ_x2，Ｆ_y1，Ｆ_y2を求めることができる。これにより、Ｘ−Ｙステージ１７が高速で移動した場合や、Ｘ−Ｙステージ１７の移動により除振装置本体１１の重心位置が大きく変位した場合でも、除振台１３の姿勢が水平状態となるように制御することが可能となる。

As described above, the control amount correction unit 46A is provided in the second control amount calculation unit 46, and the second control amounts F _x1 , F _x2 , F _y1 , and F _y2 are determined according to the gravity center position G2 of the vibration isolation device body 11. Are corrected to obtain second control amounts F _x1 , F _x2 , F _y1 , and F _y2 that balance the moment in the rotation direction θ _z of the Z axis centered on the center of gravity position G2 of the vibration isolation device body 11. be able to. Thereby, even when the XY stage 17 moves at a high speed or when the position of the center of gravity of the vibration isolation device main body 11 is greatly displaced due to the movement of the XY stage 17, the posture of the vibration isolation table 13 becomes horizontal. It becomes possible to control.

The actuator control means 47 is connected to the first and second control amount calculation means 45 and 46 and the first and second actuators 33 _{z1 to} 33 _z4 , 34 _x1 , 34 _x2 , 34 _y1 and 34 _y2. Yes. The actuator control means 47 outputs a driving amount corresponding to each of the corrected first and second control amounts F _{z1 to} F _z4 , F _x1 , F _x2 , F _y1 , F _y2 , and the first driving amount is determined by this driving amount. The first and second actuators 33 _{z1 to} 33 _z4 , 34 _x1 , 34 _x2 , 34 _y1 and 34 _y2 are controlled.

As described above, according to the vibration isolator 10 of the present embodiment, the moments in the rotation directions θ _x and θ _y of the two horizontal axes passing through the gravity center position G2 of the vibration isolator body 11 are balanced. First control amounts F _{z1 to} F _z4 are obtained, and second control amounts F _x1 , F _x2 , F _y1 , F _y2 and the moments in the rotation direction θ _z of the Z axis passing through the center of gravity position G2 are balanced. The first and second actuators 33 are output by the actuator control means 47 to output drive amounts corresponding to the first and second control amounts F _{z1 to} F _z4 , F _x1 , F _x2 , F _y1 , F _y2. , 34, even when the XY stage 17 moves at a high speed or when the center of gravity position G2 of the vibration isolation device body 11 is greatly displaced by the movement of the XY stage 17, Accurately control the posture to be horizontal Can.

The preferred embodiments of the present invention have been described in detail above. However, the present invention is not limited to the specific embodiments, and various modifications and changes can be made within the scope of the present invention described in the claims. It can be changed. In the vibration isolator 10 according to the present embodiment, the vibration isolation units 15 are provided at three of the four corners of the vibration isolation table 13, but the vibration isolation units 15 are provided at all four corners of the vibration isolation table 13. Also good. As in the vibration isolator 10 of the present embodiment, the vibration isolation units 15 are provided at all four corners of the vibration isolation table 13 by providing the vibration isolation units 15 at three of the four corners of the vibration isolation table 13. Compared to the case, the number of the sensors 36 to 39 can be reduced, so that the cost of the vibration isolation device 10 can be reduced. Further, when the moving body moves in the X-axis direction, the Y-axis direction, and the Z-axis direction, the data G2 _x , G2 _y of the X coordinate, Y coordinate, and Z coordinate of the gravity center position G2 of the vibration isolation device body 11 , G2 _z , the same effect can be obtained by performing the same correction as that of the vibration isolator 10 of the present embodiment.

  The present invention can be applied to an anti-vibration device that can be accurately controlled so that the posture of the anti-vibration table is in a horizontal state without depending on the position of the center of gravity of the movable body that moves at high speed and the main body of the anti-vibration device.

FIG. 6 is a diagram (No. 1) for explaining the relationship between the position of the center of gravity of the vibration isolation device body and the inclination of the vibration isolation table. FIG. 10 is a diagram (No. 2) for explaining the relationship between the position of the center of gravity of the vibration isolation device body and the inclination of the vibration isolation table. FIG. 10 is a diagram (No. 3) for explaining the relationship between the position of the center of gravity of the vibration isolation device body and the inclination of the vibration isolation table. FIG. 10 is a diagram (No. 4) for explaining the relationship between the position of the center of gravity of the vibration isolation device body and the inclination of the vibration isolation table. It is a schematic block diagram of the vibration isolator which concerns on one embodiment of this invention. It is sectional drawing of a vibration isolator main body. It is a top view of a vibration isolator main body. It is sectional drawing of a vibration isolation unit. It is the figure which showed an example of the arrangement | positioning position of an actuator. It is the figure which showed an example of the arrangement | positioning position of a displacement sensor and an acceleration sensor. It is a figure for demonstrating the process which a control means performs.

Explanation of symbols

DESCRIPTION OF SYMBOLS 10 Anti-vibration apparatus 11 Anti-vibration apparatus main body 12 Control means 13 Anti-vibration stand 14 Floor 15, 16 Anti-vibration unit 17 XY stage 18 Base member 19 Plate body 21, 24 Protrusion part 19A, 21A, 23A Upper surface 21B, 21C, 23B Side surface 22 Floating member 23 Frame body 26, 27 Anti-vibration support mechanism 33, 33 _{z1 to} 33 _z4 First actuator 34, 34 _x1 , 34 _x2 , 34 _y1 , 34 _y2 Second actuator 36, 36 _z1 , 36 _z2 , 36 _z3 first displacement sensor 37, 37 _x1 , 37 _x2 , 37 _y1 second displacement sensor 38, 38 _z1 , 38 _z2 , 38 _z3 first acceleration sensor 39, 39 _x1 , 39 _x2 , 39 _y1 second Acceleration sensor 40 Stage control means 41, 42 First calculation means 41A, 42A First correction means 43, 44 Second calculation means 43A, 44A Second correction hand 45 First control amount calculation means 45A, 46A Control amount correction means 46 Second control amount calculation means 47 Actuator control means 48 Center of gravity position calculation means 49 Storage means 51-54, 51A-51C, 52A-52C, 53A-53C , 54a to 54c control calculation unit a1~a12 input value _{D z1, D z2, D z3} , D x1, D x2, D y1, A z1, A z2, A z3, A x1, A x2, A y1 detection signal F _z1 to F _z4 first control amount _{F x1, F x2, F y1} , F y2 second control quantity G1, G1 ', G2, G3 centroid position

Claims (8)

A vibration isolator that movably supports the moving body;
A vibration isolator having a detection means for detecting fluctuations in the vertical direction and the horizontal biaxial direction of the vibration isolation table and an actuator for displacing the vibration isolation table in the vertical direction and the horizontal biaxial direction while isolating vibrations from the outside. A vibration isolator body comprising a unit;
The moving body control means for controlling the movement of the moving body and recognizing the coordinate position of the moving body, and the vertical direction of the vibration isolation table, the horizontal biaxial direction, and the rotation directions thereof based on the detection signal of the detection means First calculation means for calculating a calculated value of the first motion mode with respect to the control, a control amount calculating means for determining a control amount supplied to the actuator based on the calculated value of the first motion mode, and based on the control amount And a vibration isolation device comprising a control means having an actuator control means for controlling the actuator,
The control means includes a center-of-gravity position calculation means for obtaining a center-of-gravity position of the vibration isolation device main body based on the coordinate position of the movable body
The vibration isolator according to claim 1, wherein the first calculator includes a first correction unit that corrects a calculated value of the first motion mode in accordance with the position of the center of gravity of the vibration isolator body.   2. The vibration isolation device according to claim 1, wherein the control amount calculation means includes control amount correction means for correcting the control amount of the actuator in accordance with the position of the center of gravity of the vibration isolation device body.   The vibration isolator according to claim 1 or 2, wherein the detecting means comprises a displacement sensor. The detection means has a first detection means and a second detection means,
3. The vibration isolation device according to claim 1, wherein the first detection unit includes a displacement sensor, and the second detection unit includes an acceleration sensor. 4. Based on the detection signal of the acceleration sensor, there is provided a second calculation means for calculating a calculation value of the second motion mode with respect to the vertical direction, the horizontal biaxial direction of the vibration isolation table, and the rotation direction thereof, and the second According to the gravity center position of the vibration isolator main body, the calculation means further includes second correction means for correcting the calculation value of the second motion mode,
The control amount calculation means obtains the control amount of the actuator based on the calculated values of the first and second motion modes corrected by the first and second correction means, and the vibration isolation by the control amount correction means. The vibration isolation device according to any one of claims 1 to 4, wherein the control amount of the actuator is corrected in accordance with the position of the center of gravity of the device main body. The control means further includes a storage means in which the position of the center of gravity of the vibration isolator body corresponding to the coordinate position of the moving body is stored,
6. The center-of-gravity position calculation means reads data of the center-of-gravity position of the vibration isolator main body corresponding to the coordinate position of the moving object from the storage means. Vibration isolator.   The vibration isolator according to any one of claims 1 to 6, wherein the movable body is an XY stage that moves in a horizontal biaxial direction on the vibration isolation table.   The vibration isolator according to any one of claims 1 to 7, wherein the actuator is an air spring or a voice coil motor.

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