CN103365108A - Control method based on gravity compensator - Google Patents
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- CN103365108A CN103365108A CN2012101040045A CN201210104004A CN103365108A CN 103365108 A CN103365108 A CN 103365108A CN 2012101040045 A CN2012101040045 A CN 2012101040045A CN 201210104004 A CN201210104004 A CN 201210104004A CN 103365108 A CN103365108 A CN 103365108A
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Abstract
The invention discloses a vertical control policy and parameter calibration method based on a gravity compensator. The gravity compensator can balance an object gravity and provides a driving force of vertical movement of an object in Z, Rx and Ry directions; the gravity compensator is connected with a vertical motor loop in parallel; the gravity compensator comprises three independent gas paths; the gravity compensator and the vertical motor commonly use three logic shafts in the vertical direction; signals are divided into two paths after passing through the logic shafts; one path controls the vertical motor; and the other path controls the gravity compensator.
Description
Technical field
The present invention relates to a kind of precise motion equipment, relate in particular to a kind of control method based on gravity compensator.
Background technology
In the precise motion equipment, object gravity is larger on the impact of catenary motion, need to take measures to compensate.In litho machine in recent years, generally adopt gravity compensator to add the combination of vertical motor, the gravity of the special balance drive object of gravity compensator (being called for short GC), the most common with gas-powered, also have by magnetic suspension or spring driven, vertical motor then is responsible for driving the catenary motion of object, carries out decoupling zero control.
Detailed introduction to gravity compensator in the prior art can be with reference to US6337484.As shown in patent US6337484, this technical scheme is with level and the separately control of catenary motion of micropositioner.Gravity compensator is adopted in vertical driving, comprises a cylinder and a Z-direction Lorentz(Lorentz) motor, cylinder and Lorentz motor parallel, vertical driving comprises altogether three groups of gravity compensators.Cylinder provides stable static force, balance micropositioner gravity.The Lorentz motor provides dynamic force, drives the micropositioner catenary motion.Design level and rotation air-bearing make it have X, Y, Rx, Ry, Rz direction degree of freedom in the gravity compensator, do decoupling motion by Lorentz motor-driven object with respect to lower floor's object.This patent only relates to the structure of gravity compensator, does not relate to the control strategy of gravity compensator and the open or introduction of controlling the correction of parameter.
In the precise motion equipment of the prior art, adopt three pneumatic gravity compensator to come the scheme of indemnity body weight power more common, but simultaneously still rare for the control strategy of three gravity compensators.At present known gravity compensator control target is: one, indemnity body weight power; Two, participating in Z-direction drives.In the control strategy for gravity compensator of the prior art, make the cylinder of three gravity compensators share a gas circuit, so the pneumatic servo loop only has one, and can only regulate an atmospheric pressure value.Its shortcoming is when object exists to tilt, and a gas circuit is difficult to adjustment.Calibration parameter only has the actuator biasing in addition, is unfavorable for improving the control accuracy of gravity compensator.
Summary of the invention
In order to overcome the shortcoming that exists in the prior art, the invention provides a kind of new control method based on gravity compensator, in order to realize that object is at the precise motion of Z, Rx, Ry direction.
In order to realize the foregoing invention purpose, the present invention discloses a kind of control method based on gravity compensator, it is characterized in that, comprising:
Step 1: described gravity compensator and vertical motor loop Parallel Control object are done Three Degree Of Freedom Z, Rx, Ry motion, described gravity compensator and vertical motor share three respectively logic axles corresponding with described Three Degree Of Freedom, and described gravity compensator provides the driving force of object at described three-degree-of-freedom motion;
Step 2: signal is divided into vertical Electric Machine Control path and gravity compensator control loop behind three logic axis' control devices, described gravity compensator control loop comprises three independent gas circuits;
Step 3: the parameter to described gravity compensator control loop is calibrated, and uses the parameter after calibrating to participate in the gravity compensator control loop to control described gravity compensator.
Wherein, the gravity compensator control loop has the Open loop and closed loop function in the described step 2, and gravity compensator balance static weight during open loop participates in the dynamic driving force compensating during closed loop.
Wherein, parameter to be calibrated is followed successively by in the described step 3: the proportional pressure valve factor, actuator biasing and gain balance matrix, and the described proportional pressure valve factor is 3, and described actuator biasing has 3, and described gain balance matrix is 3 * 3 rank, and 9 elements are arranged.
Wherein, the gravity compensator control loop comprises in the described step 2: the described proportional pressure valve factor, described actuator biasing, described gain balance matrix, measuring system, gravity compensator controller, gravity compensator unit, proportional pressure valve and feedforward setting value.
Wherein, the calibration steps of the described proportional pressure valve factor specifically comprises:
Step 1.1: described gravity compensator control loop disconnects, and described actuator biasing zero clearing arranges described feedforward setting value;
Step 1.2: measure the air pressure of air cavity inside, gravity compensator unit, the proportional pressure valve factor after obtaining calibrating according to the piston area of described air pressure and gravity compensator.
Wherein, the calibration equation of the described proportional pressure valve factor is:
，
Wherein
iValue be 1 to 3,
Factor i,
Cal The proportional pressure valve factor after the calibration,
Factor i,
Old Be the proportional pressure valve factor before the calibration, F is the feedforward setting value,
P i The air pressure of gravity compensator air cavity inside,
S i Be
iThe piston area of individual gravity compensator.
Wherein, the calibration of described actuator biasing is calculated according to the output of logic axis controller, and adopts the actuator biasing after iterative method calculates calibration.
Wherein, the calibration steps of described actuator biasing specifically comprises:
Step 2.1: described gravity compensator control loop disconnects, and described feedforward setting value is set, described actuator biasing zero clearing;
Step 2.2: use the proportional pressure valve factor after calibrating, vertical Electric Machine Control path closed loop, three logic axle setting values are 0;
Step 2.3: follow the trail of the output of logic axis controller, average;
Step 2.4: calculate the increment of gravity compensator power output, in the actuator biasing, the actuator after obtaining calibrating is setovered before the calibration that is added to again;
Step 2.5: repeating step 2.3 and 2.4, until the increment of all gravity compensator power outputs all less than setting value, is calibrated and is finished.
Wherein, the calibration equation of described actuator biasing is:
Wherein,
,
Offset 1,
Old ,
Offset 2,
Old ,
Offset 3,
Old Setover for calibrating front actuator,
Offset 1,
Cal ,
Offset 2,
Cal ,
Offset 3,
Cal Be the biasing of the actuator after the calibration,
F Z ,
T Rx ,
T Ry Be respectively the output of the logic axis controller of Z, Rx, Ry, GB is the gain balance matrix, gets initial design values, Δ
FIncrement for the gravity compensator power output.
Wherein, the calibration of the described gain balance matrix method that adopts the computational logic between centers mutually to crosstalk is come the calculated gains balancing matrix.
Wherein, the calibration steps of described gain balance matrix specifically comprises:
Step 3.1: calibrate vertical motor servo loop, use the proportional pressure valve factor and actuator biasing after calibrating, make vertical motor closed loop, logic axle setting value is 0, and the gravity compensator control loop is closed;
Step 3.2: calculate the output of output, Ry axle logic controller of Z logic axle set point acceleration, Rx logic axis controller with respect to the deviation of mean value separately, calculate the Z degree of freedom Rx degree of freedom, Z degree of freedom are crosstalked and crosstalk coefficient to the Ry degree of freedom, upgrade the coefficient of correspondence of gain balance matrix;
Step 3.3: calculate Rx to the crosstalking and upgrade the coefficient of correspondence of gain balance matrix of Z and Ry degree of freedom, and calculate Ry crosstalking and upgrade the coefficient of correspondence of gain balance matrix Z and Rx degree of freedom;
Step 3.4: before will calibrating with calibration after the gain balance matrix compare, if the variable quantity of all elements of gain balance matrix less than set-point, then calibration finishes, and continues to calculate otherwise return step 3.2.
The gravity compensator control method that exists in the prior art is controlled based on single gas circuit, only calibrates a parameter simultaneously: the actuator biasing, calibration steps is based on the measurement of differential sensor.Gravity compensator control method among the present invention, based on three gas circuit control strategies, calibrate simultaneously three kinds of parameters: the proportional pressure valve factor, actuator biasing and gain balance matrix, one has 15 parameters.The proportional pressure valve factor and gain balance matrix are the newly-increased school item of surveying, and actuator bias calibration method therefor is different from known method.Three calibration items carry out in order, and are full decoupled.By the calibration of three parameters, can make the control loop performance under the gravity compensator Open loop and closed loop state reach optimum.
Description of drawings
Can be by following detailed Description Of The Invention and appended graphic being further understood about the advantages and spirit of the present invention.
Fig. 1 is the topology layout synoptic diagram of the gravity compensator of the first embodiment of the present invention;
Fig. 2 is the control loop figure of the gravity compensator of the first embodiment of the present invention;
Fig. 3 is the topology layout synoptic diagram of the gravity compensator of the second embodiment of the present invention;
Fig. 4 is the control loop figure of the gravity compensator of the second embodiment of the present invention;
Fig. 5 is gravity compensator parametric calibration process flow diagram involved in the present invention.
Embodiment
Describe specific embodiments of the invention in detail below in conjunction with accompanying drawing.
The invention provides a kind of vertical control method based on gravity compensator, but this gravity compensator counterbalance body weight power also provides the driving force of object catenary motion in Z, Rx, Ry direction, this gravity compensator is in parallel with vertical motor loop, this gravity compensator comprises three independent gas circuits, this gravity compensator and vertical motor share vertical three logic axles, signal is divided into two-way behind this logic axle, one tunnel this vertical motor of control, and this gravity compensator is controlled on another road.
Fig. 1 is the topology layout synoptic diagram of the gravity compensator of the first embodiment of the present invention.As shown in fig. 1, gravity compensator adopts general air floating structure, and layout is triangle.1 is the work stage plummer, i.e. Moving Objects or title moving object.The barycenter of work stage plummer 1 is at an O.The 2nd, gravity compensator adopts three gravity compensator 2a, 2b, 2c to be isosceles triangle and arranges in the whole system, provides respectively an aerodynamic force along vertical, and three aerodynamic force make up the gravity of balance work stage plummer 1.The 3rd, vertical motor, three motor 3a, 3b, 3c are isosceles triangle to be arranged, with three gravity compensator alternative arrangement, provides respectively a motor force along vertical, drives work stage plummer 1 and does Three Degree Of Freedom (Z, Rx, Ry) motion vertical.The Z direction refers to the direction perpendicular with surface level in the present invention, directions X refers to the direction parallel with surface level, Y-direction refers to parallel with surface level and vertical with directions X direction, and the Rx direction refers to the direction around the X-axis rotation, and the Ry direction refers to the direction around the Y-axis rotation.
Fig. 2 is the control loop figure of the gravity compensator of the first embodiment of the present invention.As shown in Figure 2, moving object 1 vertical Three Degree Of Freedom Z, Rx, Ry control simultaneously, and therefore three servo logic axles are arranged.After the logic axis controller, signal is divided into two-way: the first via is used for controlling vertical motor, and the second the tunnel is used for controlling gravity compensator.Vertical motor and gravity compensator Parallel Control moving object 1.The vertical Electric Machine Control passage of the first via is: vertical motor GB matrix, vertical motor, Workpiece platform structure, measuring system.Among Fig. 2,103a, 103b, 103c are the controller outgoing positions, and 104a, 104b, 104c are the measuring system outgoing positions, and 105a, 105b, 105c are feedforward setting value outgoing positions.This first via control channel is current techique, repeats no more.The the second road gravity compensator control loop comprises: gravity compensator GB matrix, GC controller, feedforward setting value, actuator biasing, the proportional pressure valve factor, proportional pressure valve, GC unit, Workpiece platform structure and measuring system.Introduce in detail this GC control loop below with reference to Fig. 2.
The gravity compensator control loop has the Open loop and closed loop function, and gravity compensator balance static weight during open loop participates in the dynamic driving force compensating during closed loop.In this gravity compensator control loop, gain balance GB matrix is responsible for the control of logic axle Z, Rx, Ry is converted to the power output of three GC.The power output of three GC is passed through respectively corresponding GC1 controller, GC2 controller and GC3 controller, and the GC controller is responsible for the GC power output is regulated.In the middle of GC controller and the feedforward setting value logic switch 101a, 101b, 101c are arranged, be responsible for respectively the Open loop and closed loop control of the GC of corresponding gas circuit.The actuator biasing provides a modified value, and to guarantee that moving object 1 can be floated exactly and not inclination under the effect of feedforward setting value, same, this actuator biasing is revised respectively for three gas circuits.The proportional pressure valve factor be used for to be offset the gain of proportional pressure valve and proportional pressure valve to the variation of the gas circuit pressure between the gravity compensator unit.The parts of more than introducing are the digitial controller parts.The parts of below introducing are hardware component, comprise proportional pressure valve, GC unit, Workpiece platform structure, do not give unnecessary details herein.In the GC unit, pressure transducer 102a, 102b, 102c are installed, be respectively applied to measure the atmospheric pressure value of three road GC air cavity inside.The control of moving object 1 relies on measuring system to carry out close-loop feedback, and measuring system is converted to the numerical value of institute's survey sensor physical axis measured value Z, Rx, the Ry of vertical three logic axles.
The parameter that needs in the gravity compensator control loop of the first embodiment to calibrate has three kinds: the proportional pressure valve factor, actuator biasing and gain balance matrix.Wherein, the described proportional pressure valve factor has 3, and described actuator biasing has 3, and described gain balance matrix has 9 elements.The calibration of described three kinds of parameters is carried out in order, and is full decoupled.The detailed calibration flow process of described gravity compensator parameter is seen following the 3rd section.
Fig. 3 is the topology layout synoptic diagram of the gravity compensator of the second embodiment of the present invention.Three gravity compensator 2a, 2b, 2c overlap with three vertical motor 3a, 3b, 3c layouts, and each position gravity compensator and motor parallel are connected on the work stage plummer 1.Described gravity compensator control strategy stands good, and described gravity compensator parameter calibrating method stands good.
Fig. 4 is the control loop figure of the gravity compensator of the second embodiment of the present invention.As shown in Figure 4, moving object 1 vertical Three Degree Of Freedom Z, Rx, Ry control simultaneously, and therefore three servo logic axles are arranged.After the logic axis controller, signal is divided into two-way: the first via is used for controlling vertical motor, and the second the tunnel is used for controlling gravity compensator, vertical motor and gravity compensator, Parallel Control moving object 1.Compare with disclosed control method in the first embodiment, GC controller and GC feedforward setting value are on vertical logic axle, not on the gas circuit physical axis.The GB matrix is converted to gas circuit physical axis acting force with logic axle acting force after the feedforward setting value.In the described GC parametric calibration, the calibration of the proportional pressure valve factor is still independent and unaffected, and the calibration of actuator biasing and gain balance matrix is coupled, and prerequisite needs repeatedly calibration each other.
The gravity compensator parametric calibration, wherein the proportional pressure valve factor, actuator bias calibration are tested under the gravity compensator open loop situations, and the gain balance matrix is aligned under the gravity compensator closed loop state and tests.Calibration steps is as described below.The calibration flow process as shown in Figure 5.
The first step, the calibration of the proportional pressure valve factor
Remember that 3 proportional pressure valve factors are respectively:
Factor 1,
Factor 2,
Factor 3, before the calibration be:
Factor 1,
Old ,
Factor 2,
Old ,
Factor 3,
Old , after the calibration be:
Factor 1,
Cal ,
Factor 2,
Cal ,
Factor 3,
Cal
1.1a judge whether to enter this proportional pressure valve factor calibration steps, if "Yes" then enters step 1.1; If "No" then judges whether to enter actuator bias calibration step;
1.1 all GC control loop switches 101 disconnect;
1.2 all GC actuator biasing zero clearings;
1.3 all GC feedforward setting values are set to
F
1.4 read respectively the reading of 3 GC pressure transducers (102a, 102b, 102c)
P i (
i=1,2,3), average respectively;
The proportioning valve factor after 1.5 calculating is calibrated according to following formula:
Wherein:
S i Be
iThe piston area of individual GC is got design load.
Second step, actuator bias calibration
Remember that 3 actuator biasings are respectively:
Offset 1 ,
Offset 2 ,
Offset 3 , before the calibration be:
Offset 1,
Old ,
Offset 2,
Old ,
Offset 3,
Old , after the calibration be:
Offset 1,
Cal ,
Offset 2,
Cal ,
Offset 3,
Cal
2.1a judge whether to enter actuator bias calibration step, if "Yes" then enters step 2.1; If "No" then judges whether to enter gain balance matrix calibration steps;
2.1 all GC control loop switches 101 disconnect;
2.2 all GC feedforward setting values are set to initial value;
2.3 all GC actuator biasings
Offset i Zero clearing;
2.4 use the proportional pressure valve factor after the calibration
Factor i,
Cal
2.5 vertical motor closed loop, logic axle setting value are (0,0,0);
2.6 follow the trail of 103a, 103b, 103c position Z, Rx, the output of Ry logic axis controller, average respectively and obtain [
F Z ,
T Rx ,
T Ry ];
2.7 calculate the increment [Δ of 3 GC power according to following formula
F GC1 , Δ
F GC2 , Δ
F GC3 ]:
Wherein: GB is the gain balance matrix of GC, gets initial design values.
2.8 the increment [Δ with 3 GC power
F GC1 , Δ
F GC2 , Δ
F GC3 ] the original biasing of the GC that is added to
Offset I, old On, the actuator biasing after obtaining calibrating, as follows:
2.9 repeating step 2.6 ~ 2.8, until the increment [Δ of 3 GC power
F GC1 , Δ
F GC2 , Δ
F GC3 ] all less than certain setting value, calibration finishes.
The 3rd step, the calibration of gain balance matrix
After the proportional pressure valve factor and actuator bias calibration finished, it is optimum that GC open loop control performance has reached.For making GC closed loop servo performance reach optimum, need the gain balance matrix in the calibration GC loop.
It is complete, namely complete to the loop alignment 104 positions from 103 positions among Fig. 2 that calibration-gain balancing matrix, prerequisite are that vertical motor servo loop has been calibrated.Described loop alignment object and calibration steps have belonged to common knowledge, do not set forth herein.
The gain balance matrix form of GC is as follows:
3.1a judge whether to enter gain balance matrix calibration steps, if "Yes" then enters step 3.1; If "No", then flow process finishes;
3.1 judge vertical motor loop whether calibrate complete, if "Yes" then enters step 3.2; If "No", then flow process finishes;
3.2 use the proportional pressure valve factor and actuator biasing after the calibration;
3.3 vertical motor closed loop, logic axle setting value are (0,0,0);
3.4 all GC control loop switch 101 closures;
3.5 at first calculate Z crosstalking to Rx and Ry direction;
3.6 make Z axis centered by initial point, move reciprocatingly;
3.7 follow the trail of the Z axis set point acceleration of 105a position
Z_setpacc, the 103b position Rx axis controller output
Rx_ctrlout, the 103c position Ry axis controller output
Ry_ctrlout
3.8 calculate Z axis set point acceleration, the output of Rx axis controller, the output of Ry axis controller with respect to the deviation of mean value separately, as follows:
According to following formula calculate Z-direction to Rx to, Z-direction to Ry to crosstalk
Z2Rx,
Z2Ry, and calculate crosstalk coefficient
H Z2Rx ,
H Z2Ry :
·······?(
)
Wherein:
Z_Default_massBe the default quality (design load) of moving object 1 in Z-direction.
According to H
Z2RxAnd H
Z2RyPress following formula and upgrade gain balance matrix first row coefficient:
3.9 in like manner, calculating Rx crosstalks to Z and Ry direction, upgrades gain balance matrix secondary series coefficient;
3.10 in like manner, calculating Ry crosstalks to Z and Rx direction, upgrades gain balance matrix the 3rd row coefficient;
3.11 the gain balance matrix of calibrating after front and the calibration compares, if the variable quantity of all elements less than certain set-point, is then calibrated end, otherwise is back to step 3.5, continuation is tested.
The vertical control method of gravity compensator among the present invention based on three gas circuit control strategies, is calibrated three parameters: the proportional pressure valve factor, actuator biasing and gain balance matrix simultaneously.The proportional pressure valve factor and gain balance matrix are the newly-increased school item of surveying, and actuator bias calibration method therefor is different from known method.Three calibration items carry out in order, and are full decoupled.By the calibration of three parameters, can make the control loop performance under the gravity compensator Open loop and closed loop state reach optimum.
Disclosed in this instructions is preferred embodiment of the present invention, and above embodiment is only in order to illustrate technical scheme of the present invention but not limitation of the present invention.All those skilled in the art all should be within the scope of the present invention under this invention's idea by the available technical scheme of logical analysis, reasoning, or a limited experiment.
Claims (11)
1. the control method based on gravity compensator is characterized in that, comprising:
Step 1: described gravity compensator and vertical motor loop Parallel Control object are done Three Degree Of Freedom Z, Rx, Ry motion, described gravity compensator and vertical motor share three respectively logic axles corresponding with described Three Degree Of Freedom, and described gravity compensator provides the driving force of object at described three-degree-of-freedom motion;
Step 2: signal is divided into vertical Electric Machine Control path and gravity compensator control loop behind three logic axis' control devices, described gravity compensator control loop comprises three independent gas circuits;
Step 3: the parameter to described gravity compensator control loop is calibrated, and uses the parameter after calibrating to participate in the gravity compensator control loop to control described gravity compensator.
2. control method as claimed in claim 1 is characterized in that, the gravity compensator control loop has the Open loop and closed loop function in the described step 2, and gravity compensator balance static weight during open loop participates in the dynamic driving force compensating during closed loop.
3. control method as claimed in claim 1, it is characterized in that, parameter to be calibrated is followed successively by in the described step 3: the proportional pressure valve factor, actuator biasing and gain balance matrix, the described proportional pressure valve factor is 3, described actuator biasing has 3, described gain balance matrix is 3 * 3 rank, and 9 elements are arranged.
4. control method as claimed in claim 3, it is characterized in that, the gravity compensator control loop comprises in the described step 2: the described proportional pressure valve factor, described actuator biasing, described gain balance matrix, measuring system, gravity compensator controller, gravity compensator unit, proportional pressure valve and feedforward setting value.
5. control method as claimed in claim 5 is characterized in that, the calibration steps of the described proportional pressure valve factor specifically comprises:
Step 1.1: described gravity compensator control loop disconnects, and described actuator biasing zero clearing arranges described feedforward setting value;
Step 1.2: measure the air pressure of air cavity inside, gravity compensator unit, the proportional pressure valve factor after obtaining calibrating according to the piston area of described air pressure and gravity compensator.
6. control method as claimed in claim 7 is characterized in that, the calibration equation of the described proportional pressure valve factor is:
Wherein
iValue be 1 to 3,
Factor i,
Cal The proportional pressure valve factor after the calibration,
Factor i,
Old Be the proportional pressure valve factor before the calibration, F is the feedforward setting value,
P i The air pressure of gravity compensator air cavity inside,
S i Be
iThe piston area of individual gravity compensator.
7. control method as claimed in claim 5 is characterized in that, the calibration of described actuator biasing is calculated according to the output of logic axis controller, and adopts the actuator biasing after iterative method calculates calibration.
8. control method as claimed in claim 8 is characterized in that, the calibration steps of described actuator biasing specifically comprises:
Step 2.1: described gravity compensator control loop disconnects, and described feedforward setting value is set, described actuator biasing zero clearing;
Step 2.2: use the proportional pressure valve factor after calibrating, vertical Electric Machine Control path closed loop, three logic axle setting values are 0;
Step 2.3: follow the trail of the output of logic axis controller, average;
Step 2.4: calculate the increment of gravity compensator power output, in the actuator biasing, the actuator after obtaining calibrating is setovered before the calibration that is added to again;
Step 2.5: repeating step 2.3 and 2.4, until the increment of all gravity compensator power outputs all less than setting value, is calibrated and is finished.
9. control method as claimed in claim 9 is characterized in that, the calibration equation of described actuator biasing is:
Wherein,,
Offset 1,
Old ,
Offset 2,
Old ,
Offset 3,
Old Setover for calibrating front actuator,
Offset 1,
Cal ,
Offset 2,
Cal ,
Offset 3,
Cal Be the biasing of the actuator after the calibration,
F Z ,
T Rx ,
T Ry Be respectively the output of the logic axis controller of Z, Rx, Ry, GB is the gain balance matrix, gets initial design values, Δ
FIncrement for the gravity compensator power output.
10. control method as claimed in claim 5 is characterized in that, the method that the calibration of described gain balance matrix adopts the computational logic between centers mutually to crosstalk is come the calculated gains balancing matrix.
11. control method as claimed in claim 12 is characterized in that, the calibration steps of described gain balance matrix specifically comprises:
Step 3.1: calibrate vertical motor servo loop, use the proportional pressure valve factor and actuator biasing after calibrating, make vertical motor closed loop, logic axle setting value is 0, and the gravity compensator control loop is closed;
Step 3.2: calculate the output of output, Ry axle logic controller of Z logic axle set point acceleration, Rx logic axis controller with respect to the deviation of mean value separately, calculate the Z degree of freedom Rx degree of freedom, Z degree of freedom are crosstalked and crosstalk coefficient to the Ry degree of freedom, upgrade the coefficient of correspondence of gain balance matrix;
Step 3.3: calculate Rx to the crosstalking and upgrade the coefficient of correspondence of gain balance matrix of Z and Ry degree of freedom, and calculate Ry crosstalking and upgrade the coefficient of correspondence of gain balance matrix Z and Rx degree of freedom;
Step 3.4: before will calibrating with calibration after the gain balance matrix compare, if the variable quantity of all elements of gain balance matrix less than set-point, then calibration finishes, and continues to calculate otherwise return step 3.2.
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| US6021991A (en) * | 1997-03-19 | 2000-02-08 | Canon Kabushiki Kaisha | Active anti-vibration apparatus |
| JP2000228343A (en) * | 1999-02-04 | 2000-08-15 | Canon Inc | Active vibration-isolating device, projection aligner, and device-manufacturing method |
| US6202492B1 (en) * | 1996-04-05 | 2001-03-20 | Nikon Corporation | Anti-vibration apparatus and exposure apparatus |
| JP2006307932A (en) * | 2005-04-27 | 2006-11-09 | Sumitomo Heavy Ind Ltd | Vibration isolation system |
| CN101364052A (en) * | 2008-10-08 | 2009-02-11 | 上海微电子装备有限公司 | Active vibration damping system and forecast control method thereof |
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Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6202492B1 (en) * | 1996-04-05 | 2001-03-20 | Nikon Corporation | Anti-vibration apparatus and exposure apparatus |
| US6021991A (en) * | 1997-03-19 | 2000-02-08 | Canon Kabushiki Kaisha | Active anti-vibration apparatus |
| JP2000228343A (en) * | 1999-02-04 | 2000-08-15 | Canon Inc | Active vibration-isolating device, projection aligner, and device-manufacturing method |
| JP2006307932A (en) * | 2005-04-27 | 2006-11-09 | Sumitomo Heavy Ind Ltd | Vibration isolation system |
| CN101364052A (en) * | 2008-10-08 | 2009-02-11 | 上海微电子装备有限公司 | Active vibration damping system and forecast control method thereof |
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