CN103062291A - Rolling knuckle bearing angle decoupling electromagnetic damping zero-stiffness vibration isolator - Google Patents
Rolling knuckle bearing angle decoupling electromagnetic damping zero-stiffness vibration isolator Download PDFInfo
- Publication number
- CN103062291A CN103062291A CN2012105742719A CN201210574271A CN103062291A CN 103062291 A CN103062291 A CN 103062291A CN 2012105742719 A CN2012105742719 A CN 2012105742719A CN 201210574271 A CN201210574271 A CN 201210574271A CN 103062291 A CN103062291 A CN 103062291A
- Authority
- CN
- China
- Prior art keywords
- vibration isolator
- voice coil
- coil motor
- piston cylinder
- limit switch
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Images
Landscapes
- Vibration Prevention Devices (AREA)
Abstract
A rolling knuckle bearing angle decoupling electromagnetic damping zero-stiffness vibration isolator belongs to the technical field of precision vibration isolation. Lubrication and supporting between a sleeve of a vibration isolator main body and a lower installation plate and between a piston cylinder and the sleeve are carried out through an air floatation face respectively, an electromagnetic damping device is used for damping vibration energy and improving location stability, freedom of angular motion between the upper installation plate and the lower installation plate is decoupled through a rolling knuckle bearing, and a position closed loop feedback control system is formed by a voice coil motor, a displacement sensor, a limit switch, a controller and a driver to accurately control relative locations of the upper installation plate and the lower installation plate. The vibration isolator has characteristics of zero three-dimensional stiffness, high positional accuracy and angular decoupling, can have low inherent frequency and prominent low frequency and ultra-low frequency vibration isolation performance, and can effectively solve high-performance vibration isolation problems of ultra-precise measurement device and processing equipment, in particular to a step scanning photoetching machine.
Description
Technical field
The invention belongs to the accurate vibration isolation technical field, relate generally to a kind of electromagnetic damping zero stiffness vibration isolator of the joint shaft bearing angle decoupling zero of rolling.
Background technique
Along with improving constantly of ultraprecise processing and measuring accuracy, ambient vibration becomes the key factor that restriction ultraprecise process unit and surveying instrument precision and performance improve.Especially step-by-step scanning photo-etching device is the vlsi circuit process unit of representative, technology-intensive degree and complexity are high, key technical index has all reached the limit of prior art, represented the highest level of ultraprecise process unit, the ultraprecise vibration isolation becomes the core key technology in this type of equipment; The live width of step-by-step scanning photo-etching device has reached 22nm and following, silicon chip Location accuracy and alignment precision all reach several nanometers, and the work stage movement velocity reaches more than the 1m/s, and the work stage acceleration reaches tens times of gravity accleration, and this has proposed new challenge to existing vibration isolation technique.At first, lithography machine need to provide for metering system and photoetched object lens the working environment of " super quiet ", simultaneously again the demand motive work stage at full speed with High acceleration motion, this anti-vibration performance to vibrating isolation system has proposed extremely harsh requirement, and the natural frequency of its three directions all needs to reach below the 1Hz; Secondly, relative position between each parts of lithography machine, the distance of photoetched object lens and silicon chip surface for example, all has very strict requirement, and be under the control of position closed loop feedback control system, require the relative positional accuracy between the upper and lower mounting plate of vibration isolator to reach 10 μ m magnitudes, the Location accuracy of traditional vibration isolator can not meet the demands far away.
According to theory of vibration isolation, the natural frequency of passive type vibration isolator is directly proportional with rigidity, is inversely proportional to load quality, therefore under the certain prerequisite of load quality, the rigidity that reduces vibration isolator is the effective way that reduces natural frequency, improves low frequency and superlow frequency vibration isolating performance.There are the intrinsic contradictions of static bearing capacity and rigidity in the vibration isolator of the forms such as conventional air spring, restricted by the factors such as material behavior, structural rigidity, and it is very difficult to rigidity further to reduce its rigidity, especially level.For this problem, the researcher is incorporated into " pendulum " formula structure in the air cushion shock absorber, reaches purpose (the 1.Nikon Corporation.Vibration Isolator With Low Lateral Stiffness. U.S. Patent Publication No.: US20040065517A1 that reduces the vibration isolator horizontal rigidity; 2.U.S.Philips Corporation.Positioning Device with a Force Actuator Systemfor Compensating Center-of-gravity Di splacements, and Lithographic Device Provided with Such APositioning Device. U.S. Patent number: US005844664A).The method can reduce the horizontal rigidity of air cushion shock absorber to a certain extent, promotes its low frequency vibration isolation performance.The problem that the method exists is: restricted by material behavior and structural rigidity, vibration isolator is vertical limited to the amplitude of stiffness degradation with level; 2) the vertical and level of air cushion shock absorber is all very poor to Location accuracy, can't satisfy the requirement of photoetching process; 3) will reach lower horizontal rigidity needs larger pendulum length, causes the vibration isolator height excessive, the string membrane resonance occurs easily, poor stability.
By to the analysis of existing air cushion shock absorber technological scheme as seen, existing air cushion shock absorber is difficult to satisfy lithography machine to the requirement of ultralow rigidity and high position precision.Germany IDE company has proposed a kind of vibration isolator technological scheme (1.Integrated Dynamics Engineering GmbH.Isolatorgeometrie EinesSchwingungsisolationssystem. european patent number: EP1803965A2 of abandoning tradition rubber air spring; 2.Integrated Dynamics EngineeringGmbH.Schwingungsisolationssystem Mit Pneumatischem Tiefpassfilter. european patent number: EP1803970A2; 3.Integrated Dynamics Engineering GmbH.Air Bearing with Consideration ofHigh-Frequency Resonances. U.S. Patent Publication No.: US20080193061A1).This scheme adopts vertical and level is carried out decoupling zero and vibration isolation to air bearing surface to the vibration of all directions, can reach extremely low rigidity and natural frequency.The problem that this scheme exists is: 1) in the public technology scheme, vibration isolator can't be realized accurate location; 2) among the patent EP1803965A2, do not have the angular motion degrees of freedom around horizontal rotational shaft between the upper and lower mounting plate, the angular rigidity of this direction and natural frequency are all very high; Patent EP1803970A2 and US20080193061A1 adopt block rubber to provide angular motion degrees of freedom around horizontal rotational shaft for upper and lower mounting plate, but because the block rubber angular rigidity is very large, can't effectively carry out the angular motion freedom decoupling, there is frictional force between the angular motion freedom decoupling mechanism components and introduces additional stiffness, restriction anti-vibration performance.
Holland ASML company has also proposed similar vibration isolator technological scheme (1.U.S.Philips Corp, ASM LithographyB.V.Pneumatic Support Device with A Controlled Gas Supply, and Lithographic Device Providedwith Such A Support Device. U.S. Patent number: US006144442A; 2.Koninklijke Philips ElectronicsN.V., ASM Lithography B.V.Lithographic Pneumatic Support Device with Controlled Gas Supply. International Patent Publication No.: WO99/22272; 3.ASML Netherlands B.V.Support Device, LithographicApparatus, and Device Manufacturing Method Employing A Supporting Device, and A PositionControl System Arranged for Use in A Supporting Device. U.S. Patent number: US007084956B2; 4.ASML Netherlands B.V.Support Device, Lithographic Apparatus, and Device ManufacturingMethod Employing A Supporting Device and A Position Control System Arranged for Use in ASupporting Device. european patent number: EP1486825A1).Among patent US006144442A and the WO99/22272 bleed pressure is carried out closed-loop feedback control, reach the stability of raising vibration isolator and the purpose of performance; Be provided with vibration transducer at upper mounting plate among patent US007084956B2 and the EP1486825A1, introduce simultaneously with reference to vibration system, promote the anti-vibration performance of vibration isolator by control algorithm.But the technological scheme that proposes still do not solve the accurate location of vibration isolator and the angular motion freedom decoupling problem of upper and lower mounting plate.
Summary of the invention
The objective of the invention is for an urgent demand of the vlsi circuit process units such as ultra precise measurement instrument and process unit, especially step-by-step scanning photo-etching device to the low natural frequency of vibration isolator, high position precision, a kind of electromagnetic damping zero stiffness vibration isolator of the joint shaft bearing angle decoupling zero of rolling is provided, vibration isolator has three-dimensional approximate zero rigidity and the characteristic of extremely hanging down natural frequency, can accurately locate and the angle decoupling zero between the upper and lower mounting plate, thereby effectively solve accurate vibration isolation problem in ultra precise measurement instrument and process unit, the especially step-by-step scanning photo-etching device.
Technical solution of the present invention is:
A kind of electromagnetic damping zero stiffness vibration isolator of the joint shaft bearing angle decoupling zero of rolling, by upper mounting plate, lower installation board, clean compressed gas source, tracheae and vibration isolator main body form, the vibration isolator main body is installed in upper mounting plate and lower installation board) between, clean compressed gas source is connected with the vibration isolator main body by tracheae, in the structure of described vibration isolator main body, the lower surface of sleeve and lower installation board be lubricated and support by axial carrying plane air bearing surface, the piston cylinder back-off is installed in the sleeve, and with sleeve by radially carry the cylinder air bearing surface lubricated with support, the rolling joint shaft bearing is installed between piston cylinder and the upper mounting plate, the Z-direction voice coil motor, the Z-direction displacement transducer, the Z-direction limit switch is installed between piston cylinder and the sleeve, the X-direction voice coil motor, the X-direction displacement transducer, X-direction limit switch and Y-direction voice coil motor, the Y-direction displacement transducer, the Y-direction limit switch is installed between sleeve and the lower installation board; The driving force direction of Z-direction voice coil motor is vertical direction, the driving force direction of X-direction voice coil motor and Y-direction voice coil motor is in horizontal plane and mutually vertical, and the line of action direction of X, Y, Z-direction displacement transducer and X, Y, Z-direction limit switch is consistent with the driving force direction of X, Y, Z-direction voice coil motor; X, Y, Z-direction displacement transducer are connected Y, Z-direction limit switch and are connected with the signal input part of controller respectively with X, the signal output part of controller is connected with the signal input part of driver, and the signal output part of driver is connected with X, Y, Z-direction voice coil motor respectively; Along X-direction voice coil motor driving force direction the X-direction permanent magnet is installed at lower installation board upper surface sidewall and is consisted of the X-direction electromagnetic damper, along Y-direction voice coil motor driving force direction the Y-direction permanent magnet is installed at lower installation board upper surface sidewall and is consisted of the Y-direction electromagnetic damper, along Z-direction voice coil motor driving force direction the Z-direction permanent magnet is installed at piston cylinder external cylindrical surface sidewall and is consisted of the Z-direction electromagnetic damper, X, the pole orientation of Y-direction permanent magnet is perpendicular to the upper surface of lower installation board, and N, the S utmost point is alternately arranged, the pole orientation of Z-direction permanent magnet is perpendicular to the external cylindrical surface of piston cylinder, and N, the S utmost point is alternately arranged, piston cylinder and lower installation board adopt ferromagnetic material, and sleeve adopts non-magnetic good conductor material.
Be provided with gas pressure sensor in the described piston cylinder, piston cylinder is provided with suction port and solenoid valve, gas pressure sensor is connected with the signal input part of controller, and the signal output part of controller is connected with the signal input part of driver, and the signal output part of driver is connected with solenoid valve.
Described X, Y, Z-direction voice coil motor are cylinder type voice coil motor or plate voice coil motor.
Described X, Y, Z-direction displacement transducer are grating scale, magnetic railings ruler, appearance grid chi or linear potentiometer.
Described X, Y, Z-direction limit switch are mechanical type limit switch, Hall-type limit switch or photoelectric limit switch.
Gas pressure is 0.1MPa～0.8MPa in the described piston cylinder.
Described axial carrying plane air bearing surface, the air-film thickness that radially carries the cylinder air bearing surface are 10 μ m～20 μ m.
The diameter of the cylinder air bearing surface throttle orifice on the described piston cylinder and the plane air bearing surface throttle orifice on the sleeve is φ 0.1mm～φ 1mm.
The good result of technological innovation of the present invention and generation is:
(1) the present invention has abandoned the vibration isolator technological scheme of tradition based on elastic element/mechanism, adopt axial carrying plane air bearing surface, radially carry the cylinder air bearing surface and respectively substantially horizontal and vertical vibration are carried out decoupling zero and vibration isolation, air bearing surface is approximately zero without friction, rigidity, can make vibration isolator obtain approximate zero stiffness characteristic and outstanding superlow frequency vibration isolating performance, having solved prior art limited by structural rigidity, material behavior, rigidity is difficult to further reduction, rigidity and the stable problem that can not take into account.This is that the present invention is different from one of innovative point of prior art.
(2) the present invention adopts displacement transducer chi, limit switch, controller, driver and voice coil motor etc. to consist of the position closed loop feedback control system of vertical direction and substantially horizontal, relative position between the upper and lower mounting plate is accurately controlled, Location accuracy can reach 10 μ m and more than, the problem that can solve effectively that prior art scheme Location accuracy is low, Location accuracy and rigidity and anti-vibration performance can not be taken into account.This is two of the present invention's innovative point of being different from prior art.
(3) the present invention adopts the rolling joint shaft bearing that decoupling zero is carried out in the angular motion between the upper and lower mounting plate, the additional angular rigidity of the friction of rolling joint shaft bearing, wearing and tearing and introducing can be ignored, and can effectively solve the existing method that adopts elastomer to carry out the angle decoupling zero and introduce the problems such as larger additional stiffness, restriction natural frequency and low frequency vibration isolation performance.This is three of the present invention's innovative point of being different from prior art.
(4) the present invention adopts gas pressure sensor, solenoid valve and controller, driver etc. to consist of the pressure closed loop feedback control system, accurately the gas pressure in the control sleeve makes it to keep constant, thrust load to vibration isolator is carried out gravitational equilibrium and compensation, under the effect of radially carrying the cylinder air bearing surface, the piston cylinder of carry load gravity can freely slide up and down with zero stiffness along sleeve, thus the gravitational equilibrium of realizing ideal and zero stiffness vibration isolating effect.This is four of the present invention's innovative point of being different from prior art.
(5) the present invention adopts active actuators that the relative position between the upper and lower mounting plate is carried out ACTIVE CONTROL, the vibration isolator parameter can be according to being regulated in real time by vibration isolation features of the object and working environment variation, thereby adapt to different operating modes, have preferably flexibility, adaptability and stability.This is five of the present invention's innovative point of being different from prior art.
(6) the present invention adopts the electromagnetic damper that replaces permanent magnet array based on magnetic pole, can be integrated in one with vibration isolator well, electromagnetic damper has comparatively ideal linear damping characteristic, but the effective attenuation vibrational energy, reduce the overshoot of motor driving location, the stability of vibration isolator is provided.This is six of the present invention's innovative point of being different from prior art.
Description of drawings
Fig. 1 is the structural representation of the electromagnetic damping zero stiffness vibration isolator of rolling joint shaft bearing angle decoupling zero;
Fig. 2 is the cross-sectional view of the electromagnetic damping zero stiffness vibration isolator of rolling joint shaft bearing angle decoupling zero;
Fig. 3 is the rolling joint shaft bearing structural representation of single ball;
Fig. 4 is the structural representation of the ball retainer of single ball rolling joint shaft bearing;
Fig. 5 is the rolling joint shaft bearing structural representation that is abound with ball;
Fig. 6 is the control structure block diagram of the electromagnetic damping zero stiffness vibration isolator of rolling joint shaft bearing angle decoupling zero;
Fig. 7 is the schematic representation of air bearing surface throttle orifice in plane on the sleeve;
Fig. 8 is the schematic representation of cylinder air bearing surface throttle orifice on the piston cylinder;
Fig. 9 is the cross-sectional view of Z-direction electromagnetic damper;
Figure 10 is the part section structural representation of X, Y-direction electromagnetic damper;
Figure 11 is the Z-direction permanent magnet at the A-A of a kind of mounting type of piston cylinder external cylindrical surface sidewall to sectional view;
Figure 12 is the Z-direction permanent magnet at the A-A of the another kind of mounting type of piston cylinder external cylindrical surface sidewall to sectional view;
Figure 13 is that X, Y-direction permanent magnet are at a kind of mounting type schematic representation of lower installation board upper surface sidewall;
Figure 14 is that X, Y-direction permanent magnet are at the another kind of mounting type schematic representation of lower installation board upper surface sidewall.
Piece number explanation among the figure: 1 upper mounting plate, 2 lower installation boards, 3 clean compressed gas sources, 4 vibration isolator main bodys, 5 piston cylinders, 6 sleeves, 7 rolling joint shaft bearings, the 7a bearing support, the 7b ball retainer, the 7c ball, the 7d bearing support, 8X is to voice coil motor, 9Y is to voice coil motor, 9a Y-direction motor iron yoke, 9b Y-direction magnetic steel of motor, 9c Y-direction motor coil skeleton, 9d Y-direction motor coil, 9e Y-direction motor transitional spare, 10Z is to voice coil motor, 10a Z-direction motor iron yoke, 10b Z-direction magnetic steel of motor, 10c Z-direction motor coil skeleton, 10d Z-direction motor coil, 10e Z-direction motor transitional spare, 11X is to displacement transducer, 12Y is to displacement transducer, 12a Y-direction grating reading head transition piece, 12b Y-direction grating reading head, 12c Y-direction glass raster chi, 13Z is to displacement transducer, 13a Z-direction grating reading head transition piece, 13b Z-direction grating reading head, 13c Z-direction glass raster chi, 14X is to limit switch, 15Y is to limit switch, 15a Y-direction limiting stopper, 15b Y-direction Hall switch, 15c Y-direction limit switch transition piece, 15dY is to the limiting stopper transition piece, 16Z is to limit switch, 16aZ is to limiting stopper, 16b Z-direction Hall switch, 16c Z-direction limit switch transition piece, 17 gas pressure sensors, 18 solenoid valves, 19 controllers, 20 drivers, 21 axial carrying plane air bearing surface, 22 radially carry the cylinder air bearing surface, 23 suction ports, 24 plane air bearing surface throttle orifices, 25 cylinder air bearing surface throttle orifices, 26 tracheaes, 40X is to electromagnetic damper, 40A X-direction permanent magnet, 41Y is to electromagnetic damper, 41A Y-direction permanent magnet, 42Z is to electromagnetic damper, 42AZ is to permanent magnet.
Embodiment
Provide specific embodiments of the invention below in conjunction with accompanying drawing.
A kind of electromagnetic damping zero stiffness vibration isolator of the joint shaft bearing angle decoupling zero of rolling, by upper mounting plate 1, lower installation board 2, clean compressed gas source 3, tracheae 26 and vibration isolator main body 4 form, vibration isolator main body 4 is installed between upper mounting plate 1 and the lower installation board 2, clean compressed gas source 3 is connected with vibration isolator main body 4 by tracheae 26, in the structure of described vibration isolator main body 4, the lower surface of sleeve 6 and lower installation board 2 are by the 21 lubricated and supports of axial carrying plane air bearing surface, piston cylinder 5 back-offs are installed in the sleeve 6, and with sleeve 6 by radially carry cylinder air bearing surface 22 lubricated with support, rolling joint shaft bearing 7 is installed between piston cylinder 5 and the upper mounting plate 1, Z-direction voice coil motor 10, Z-direction displacement transducer 13, Z-direction limit switch 16 is installed between piston cylinder 5 and the sleeve 6, X-direction voice coil motor 8, X-direction displacement transducer 11, X-direction limit switch 14 and Y-direction voice coil motor 9, Y-direction displacement transducer 12, Y-direction limit switch 15 is installed between sleeve 6 and the lower installation board 2; The driving force direction of Z-direction voice coil motor 10 is vertical direction, the driving force direction of X-direction voice coil motor 8 and Y-direction voice coil motor 9 in horizontal plane and mutually vertical, X, Y, Z- direction displacement transducer 11,12,13 consistent with X, Y, Z- direction limit switch 14,15,16 line of action direction and X, Y, Z-direction voice coil motor 8,9,10 driving force direction; X, Y, Z- direction displacement transducer 11,12,13 are connected Y, Z- direction limit switch 14,15,16 and are connected with the signal input part of controller 19 respectively with X, the signal output part of controller 19 is connected with the signal input part of driver 20, and the signal output part of driver 20 is connected with X, Y, Z-direction voice coil motor 8,9,10 respectively; Along X-direction voice coil motor 8 driving force directions X-direction permanent magnet 40A is installed at lower installation board 2 upper surface sidewalls and consists of X-direction electromagnetic damper 40, along Y-direction voice coil motor 9 driving force directions Y-direction permanent magnet 41A is installed at lower installation board 2 upper surface sidewalls and consists of Y-direction electromagnetic damper 41, along Z-direction voice coil motor 10 driving force directions Z-direction permanent magnet 42A is installed at piston cylinder 5 external cylindrical surface sidewalls and consists of Z-direction electromagnetic damper 42, X, Y-direction permanent magnet 40A, the pole orientation of 41A is perpendicular to the upper surface of lower installation board 2, and N, the S utmost point is alternately arranged, the pole orientation of Z-direction permanent magnet 42A is perpendicular to the external cylindrical surface of piston cylinder 5, and N, the S utmost point is alternately arranged, piston cylinder 5 adopts ferromagnetic material with lower installation board 2, and sleeve 6 adopts non-magnetic good conductor material.
X, Y, Z- direction displacement transducer 11,12,13 pairs of X, Y, Z-direction voice coil motor 8,9,10 displacements of exporting are measured, and X, Y, Z- direction limit switch 14,15,16 pairs of X, Y, Z-direction voice coil motor 8,9,10 strokes that move limit; Controller 19 is according to X, Y, Z- direction displacement transducer 11,12,13 and X, Y, Z- direction limit switch 14,15,16 feedback signal, and the relative position between control X, Y, Z-direction voice coil motor 8,9, the 10 pairs of upper and lower mounting plates 1,2 is accurately controlled.
Be provided with gas pressure sensor 17 in the described piston cylinder 5, piston cylinder 5 is provided with suction port 23 and solenoid valve 18, gas pressure sensor 17 is connected with the signal input part of controller 19, the signal output part of controller 19 is connected with the signal input part of driver 20, and the signal output part of driver 20 is connected with solenoid valve 18.
Described X, Y, Z-direction voice coil motor 8,9,10 are cylinder type voice coil motor or plate voice coil motor.
Described X, Y, Z- direction displacement transducer 11,12,13 are grating scale, magnetic railings ruler, appearance grid chi or linear potentiometer.
Described X, Y, Z- direction limit switch 14,15,16 are mechanical type limit switch, Hall-type limit switch or photoelectric limit switch.
Described piston cylinder 5 interior gas pressures are 0.1MPa～0.8MPa.
Described axial carrying plane air bearing surface 21, the air-film thickness that radially carries cylinder air bearing surface 22 are 10 μ m～20 μ m.
Cylinder air bearing surface throttle orifice 25 on the described piston cylinder 5 and the diameter of the plane air bearing surface throttle orifice 24 on the sleeve 6 are φ 0.1mm～φ 1mm.
Provide one embodiment of the present of invention below in conjunction with Fig. 1～Fig. 2, Fig. 6.In the present embodiment, in zero stiffness vibration isolator when work,, lower installation board 2 is installed on the pedestal or basic framework of ground, instrument, upper mounting plate 1 be connected by the load of vibration isolation.X, Y, Z-direction voice coil motor 8,9,10 all adopt the cylinder type voice coil motor.Take Y-direction voice coil motor 9 as example, it mainly comprises the parts such as Y-direction motor iron yoke 9a, Y-direction magnetic steel of motor 9b, Y-direction motor coil skeleton 9c, Y-direction motor coil 9d and Y-direction motor transitional spare 9e.Y-direction motor iron yoke 9a and Y-direction motor coil skeleton 9c are cylindrical shape, and Y-direction magnetic steel of motor 9b is cylindrical, and Y-direction motor coil 9d is around on the Y-direction motor coil skeleton 9c, and Y-direction motor transitional spare 9e provides the mounting structure of Y-direction motor coil skeleton 9c.Y-direction motor iron yoke 9a and Y-direction magnetic steel of motor 9b consist of motor stator, and Y-direction motor coil skeleton 9c, Y-direction motor coil 9d consist of the mover of motor.Pass to electric current during machine operation in the coil, according to electromagnetic theory, hot-wire coil can be subject to the Lorentz force effect in magnetic field, can control the size and Orientation of motor output drive strength by the size and Orientation of control electric current.
X, Y, Z- direction displacement transducer 11,12,13 adopt grating scale.Take Z-direction displacement transducer 13 as example, it mainly comprises the parts such as Z-direction grating reading head transition piece 13a, Z-direction grating reading head 13b and Z-direction glass raster chi 13c, and Z-direction grating reading head transition piece 13a provides the mounting structure of Z-direction grating reading head 13b.In grating scale when work,, Z-direction grating reading head 13b can detect the relative displacement of itself and Z-direction glass raster chi 13c, and gives controller 19 by signal conductor.
X, Y, Z- direction limit switch 14,15,16 adopt the Hall-type limit switch.Take Z-direction limit switch 16 as example, it mainly comprises the parts such as Z-direction limiting stopper 16a, Z-direction Hall switch 16b and Z-direction limit switch transition piece 16c.Two Z-direction Hall switch 16b install back-to-back, and two Z-direction limiting stopper 16a are metallic material, with relative installation of sensitivity end of Z-direction Hall switch 16b.Z-direction limit switch transition piece 16c provides the mounting structure of Z-direction Hall switch 16b.In limit switch when work,, as Z-direction Hall switch 16b during near Z-direction limiting stopper 16a, Z-direction Hall switch 16b provides limit signal, and gives controller 19 by signal conductor.
In the present embodiment, Z-direction voice coil motor 10, Z-direction displacement transducer 13 and Z-direction limit switch 16 are installed between piston cylinder 5 and the sleeve 6, and are installed in piston cylinder 5 inside.
Vibration isolator is realized in the following way to the carrying of load: clean compressed gas source 3 by tracheae 26, through solenoid valve 18, suction port 23 to piston cylinder 5 interior conveying clean compressed airs.Controller 19 is according to the feedback signal of gas pressure sensor 17, the aperture of control solenoid valve 18, adjusting is input to the gas flow in the piston cylinder 5, thereby the pressure of regulating piston cylinder 5 interior clean compressed airs, make active force that clean compressed air makes progress to piston cylinder 5 and the gravity of other component on load, piston cylinder 5 and loading and the piston cylinder 5 balance each other the gravity compensation of realizing ideal and zero stiffness vibration isolating effect.
In the present embodiment, the pressure of piston cylinder 5 interior clean compressed airs is 0.4Mpa, and the effective radius of piston cylinder 5 lower surfaces is 100mm, and then the quality of single vibration isolator carrying is: m=p * π r
2/ g ≈ 1282kg, wherein p is gas pressure, and p=0.4Mpa, r are the effective radius of piston cylinder 5 lower surfaces, and r=100mm, g are gravity accleration, g=9.8m/m
2
Provide an embodiment of single ball rolling joint shaft bearing below in conjunction with Fig. 3～Fig. 4.In the present embodiment, mainly being formed by parts such as bearing support 7a, ball retainer 7b, ball 7c and bearing support 7d of rolling joint shaft bearing 7, ball 7c is single uniform around axial direction, and ball retainer 7b has circular hole in the position of corresponding ball 7c, and the position of ball 7c is kept by ball retainer 7b.
Fig. 5 provides an embodiment who is abound with ball rolling joint shaft bearing.In the present embodiment, ball 7c evenly is abound with on the acting surface of bearing support 7a and bearing support 7d, and ball retainer 7b is the sphere form, and has circular hole in the position of corresponding ball 7c, and the position of ball 7c is kept by ball retainer 7b.
Fig. 7 provides an embodiment of air bearing surface throttle orifice in plane on the sleeve.In the present embodiment, sleeve 6 lower surfaces center on along the circumferential direction uniform 8 plane air bearing surface throttle orifices 24 of the center of circle, and diameter is φ 0.2mm.
Fig. 8 provides an embodiment of cylinder air bearing surface throttle orifice on the piston cylinder.In the present embodiment, along the circumferential direction uniform two arrange cylinder air bearing surface throttle orifices 25 on piston cylinder 5 sidewalls, the quantity of every cribbing discharge orifice is 8, and diameter is φ 0.2mm.
Provided an embodiment of Z-direction electromagnetic damper below in conjunction with Fig. 9, Figure 11.In the present embodiment, vibration isolator has two Z-direction electromagnetic dampers 42, is made of the Z-direction permanent magnet 42A array that is installed in piston cylinder 5 external cylindrical surface sidewalls, piston cylinder 5 adopts No. 45 Steel materials, have higher permeability, sleeve 6 adopts the red copper materials, not magnetic conduction and have high conductivity.Z-direction permanent magnet 42A is bar shaped, and along the driving force direction of Z-direction voice coil motor 10, be that the axial direction of piston cylinder 5 is arranged, pole orientation is perpendicular to the external cylindrical surface of piston cylinder 5, and N, the S utmost point alternately arrange.When sleeve 6 produces the Z-direction relative movement with piston cylinder 5, sleeve 6 cutting magnetic lines and produce electric convolution and damping force, the Z-direction damping force is directly proportional with the Z-direction speed of related movement of piston cylinder 5 with sleeve 6, direction is consistent with the driving force direction of Z-direction voice coil motor 10, reach the consumption vibrational energy, improve the purpose of position stability.
Fig. 9, Figure 12 have provided another embodiment of Z electromagnetic damper.In the present embodiment, vibration isolator has four Z-direction electromagnetic dampers 42, is made of the Z-direction permanent magnet 42A array that is installed in piston cylinder 5 external cylindrical surface sidewalls.Z-direction permanent magnet 42A is bar shaped, and along the driving force direction of Z-direction voice coil motor 10, be that the axial direction of piston cylinder 5 is arranged, pole orientation is perpendicular to the external cylindrical surface of piston cylinder 5, and N, the S utmost point alternately arrange.
Provide an embodiment of X, Y-direction electromagnetic damper below in conjunction with Figure 10, Figure 13.In the present embodiment, vibration isolator has two X-direction electromagnetic dampers 40, two Y-direction electromagnetic dampers 41, consisted of by the X that is installed in lower installation board 2 upper surface sidewalls, Y-direction permanent magnet 40A, 41A array respectively, lower installation board 2 adopts No. 45 Steel materials, have higher permeability, sleeve 6 adopts the red copper materials, not magnetic conduction and have high conductivity.X, Y-direction permanent magnet 40A, 41A are elongate in shape, arrange along X, Y-direction voice coil motor 8,9 driving force direction respectively, and pole orientation is perpendicular to the upper surface of lower installation board 2, and N, the S utmost point alternately arrange.When sleeve 6 produces relative movement with lower installation board 2, sleeve 6 cutting magnetic lines and produce electric convolution and damping force, X, Y-direction damping force are directly proportional with the speed of related movement of lower installation board 2 in X, Y-direction with sleeve 6, direction and X, Y-direction voice coil motor 8,9 driving force direction are consistent, reach the consumption vibrational energy, improve the purpose of position stability.
Figure 10, Figure 14 have provided another embodiment of X, Y-direction electromagnetic damper.In the present embodiment, vibration isolator has 40, one Y-direction electromagnetic dampers 41 of an X-direction electromagnetic damper, is made of the X that is installed in lower installation board 2 upper surface sidewalls, Y-direction permanent magnet 40A, 41A array respectively.X, Y-direction permanent magnet 40A, 41A are elongate in shape, arrange along X, Y-direction voice coil motor 8,9 driving force direction respectively, and pole orientation is perpendicular to the upper surface of lower installation board 2, and N, the S utmost point alternately arrange.
Claims (8)
1. the electromagnetic damping zero stiffness vibration isolator of the joint shaft bearing angle decoupling zero of rolling, by upper mounting plate (1), lower installation board (2), clean compressed gas source (3), tracheae (26) and vibration isolator main body (4) form, vibration isolator main body (4) is installed between upper mounting plate (1) and the lower installation board (2), clean compressed gas source (3) is connected with vibration isolator main body (4) by tracheae (26), it is characterized in that: in the structure of described vibration isolator main body (4), the lower surface of sleeve (6) and lower installation board (2) be lubricated and support by axial carrying plane air bearing surface (21), piston cylinder (5) back-off is installed in the sleeve (6), and with sleeve (6) by radially carry cylinder air bearing surface (22) lubricated with support, rolling joint shaft bearing (7) is installed between piston cylinder (5) and the upper mounting plate (1), Z-direction voice coil motor (10), Z-direction displacement transducer (13), Z-direction limit switch (16) is installed between piston cylinder (5) and the sleeve (6), X-direction voice coil motor (8), X-direction displacement transducer (11), X-direction limit switch (14) and Y-direction voice coil motor (9), Y-direction displacement transducer (12), Y-direction limit switch (15) is installed between sleeve (6) and the lower installation board (2); The driving force direction of Z-direction voice coil motor (10) is vertical direction, the driving force direction of X-direction voice coil motor (8) and Y-direction voice coil motor (9) is in horizontal plane and mutually vertical, and the line of action direction of X, Y, Z-direction displacement transducer (11,12,13) and X, Y, Z-direction limit switch (14,15,16) is consistent with the driving force direction of X, Y, Z-direction voice coil motor (8,9,10); X, Y, Z-direction displacement transducer (11,12,13) are connected Y, Z-direction limit switch (14,15,16) and are connected with the signal input part of controller (19) respectively with X, the signal output part of controller (19) is connected with the signal input part of driver (20), and the signal output part of driver (20) is connected with X, Y, Z-direction voice coil motor (8,9,10) respectively; Along X-direction voice coil motor (8) driving force direction X-direction permanent magnet (40A) is installed at lower installation board (2) upper surface sidewall and is consisted of X-direction electromagnetic damper (40), along Y-direction voice coil motor (9) driving force direction Y-direction permanent magnet (41A) is installed at lower installation board (2) upper surface sidewall and is consisted of Y-direction electromagnetic damper (41), along Z-direction voice coil motor (10) driving force direction Z-direction permanent magnet (42A) is installed at piston cylinder (5) external cylindrical surface sidewall and is consisted of Z-direction electromagnetic damper (42), X, Y-direction permanent magnet (40A, pole orientation 41A) is perpendicular to the upper surface of lower installation board (2), and N, the S utmost point is alternately arranged, the pole orientation of Z-direction permanent magnet (42A) is perpendicular to the external cylindrical surface of piston cylinder (5), and N, the S utmost point is alternately arranged, piston cylinder (5) adopts ferromagnetic material with lower installation board (2), and sleeve (6) adopts non-magnetic good conductor material.
2. the electromagnetic damping zero stiffness vibration isolator of rolling joint shaft bearing angle according to claim 1 decoupling zero, it is characterized in that: be provided with gas pressure sensor (17) in the described piston cylinder (5), piston cylinder (5) is provided with suction port (23) and solenoid valve (18), gas pressure sensor (17) is connected with the signal input part of controller (19), the signal output part of controller (19) is connected with the signal input part of driver (20), and the signal output part of driver (20) is connected with solenoid valve (18).
3. the electromagnetic damping zero stiffness vibration isolator of rolling joint shaft bearing angle according to claim 1 decoupling zero, it is characterized in that: described X, Y, Z-direction voice coil motor (8,9,10) are cylinder type voice coil motor or plate voice coil motor.
4. the electromagnetic damping zero stiffness vibration isolator of rolling joint shaft bearing angle according to claim 1 decoupling zero is characterized in that: described X, Y, Z-direction displacement transducer (11,12,13) are grating scale, magnetic railings ruler, appearance grid chi or linear potentiometer.
5. the electromagnetic damping zero stiffness vibration isolator of rolling joint shaft bearing angle according to claim 1 decoupling zero, it is characterized in that: described X, Y, Z-direction limit switch (14,15,16) are mechanical type limit switch, Hall-type limit switch or photoelectric limit switch.
6. the electromagnetic damping zero stiffness vibration isolator of rolling joint shaft bearing angle according to claim 1 decoupling zero, it is characterized in that: the interior gas pressure of described piston cylinder (5) is 0.1MPa～0.8MPa.
7. the electromagnetic damping zero stiffness vibration isolator of rolling joint shaft bearing angle according to claim 1 decoupling zero is characterized in that: described axial carrying plane air bearing surface (21), the air-film thickness that radially carries cylinder air bearing surface (22) are 10 μ m～20 μ m.
8. the electromagnetic damping zero stiffness vibration isolator of rolling joint shaft bearing angle according to claim 1 decoupling zero, it is characterized in that: the cylinder air bearing surface throttle orifice (25) on the described piston cylinder (5) and the diameter of the plane air bearing surface throttle orifice (24) on the sleeve (6) are φ 0.1mm～φ 1mm.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201210574271.9A CN103062291B (en) | 2012-12-19 | 2012-12-19 | Rolling knuckle bearing angle decoupling electromagnetic damping zero-stiffness vibration isolator |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201210574271.9A CN103062291B (en) | 2012-12-19 | 2012-12-19 | Rolling knuckle bearing angle decoupling electromagnetic damping zero-stiffness vibration isolator |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN103062291A true CN103062291A (en) | 2013-04-24 |
| CN103062291B CN103062291B (en) | 2015-03-25 |
Family
ID=48105084
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201210574271.9A Active CN103062291B (en) | 2012-12-19 | 2012-12-19 | Rolling knuckle bearing angle decoupling electromagnetic damping zero-stiffness vibration isolator |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN103062291B (en) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107061613A (en) * | 2017-05-03 | 2017-08-18 | 武汉理工大学 | Multidimensional active control vibration damping device and method |
| CN110848314A (en) * | 2019-11-20 | 2020-02-28 | 中国人民解放军92578部队 | Multifunctional composite vibration isolator |
| CN113917791A (en) * | 2021-09-22 | 2022-01-11 | 哈尔滨工业大学 | Vibration isolation device for photoetching machine |
| CN116292740A (en) * | 2023-03-24 | 2023-06-23 | 大连地拓电子工程技术有限公司 | Quasi-zero rigidity three-degree-of-freedom active anti-micro-vibration platform |
| CZ309900B6 (en) * | 2017-08-24 | 2024-01-17 | CSc. Ďoubal Stanislav prof. RNDr. Ing. | A method of sensing and measuring mechanical displacements and mechanical vibrations |
Citations (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO1999005573A1 (en) * | 1997-07-22 | 1999-02-04 | Asm Lithography B.V. | Supporting device with gas bearing |
| CN1367744A (en) * | 1999-07-05 | 2002-09-04 | 动力发展有限公司 | Electromagnetic damper for vehicle suspension |
| CN1480787A (en) * | 2002-07-26 | 2004-03-10 | 尼康株式会社 | Damping device, flat table device and exposuring device |
| JP2006307932A (en) * | 2005-04-27 | 2006-11-09 | Sumitomo Heavy Ind Ltd | Vibration isolation system |
| EP1803965A2 (en) * | 2005-12-30 | 2007-07-04 | Integrated Dynamics Engineering GmbH | Insulation geometry of a vibration insulation system |
| US20080193061A1 (en) * | 2007-02-14 | 2008-08-14 | Integrated Dynamics Engineering Gmbh | Air bearing with consideration of high-frequency resonances |
| CN201604761U (en) * | 2009-11-27 | 2010-10-13 | 重庆建设摩托车股份有限公司 | Beach vehicle rear shock absorber joint structure |
| CN102470716A (en) * | 2009-07-10 | 2012-05-23 | 萱场工业株式会社 | Suspension device |
| CN102543217A (en) * | 2012-01-20 | 2012-07-04 | 澳门大学 | Macro-micro driven bidimensional integrated micro positioning platform |
| CN102734379A (en) * | 2012-06-09 | 2012-10-17 | 哈尔滨工业大学 | Active vibration isolating device based on composite support of electromagnetism and static-pressure air floatation |
-
2012
- 2012-12-19 CN CN201210574271.9A patent/CN103062291B/en active Active
Patent Citations (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO1999005573A1 (en) * | 1997-07-22 | 1999-02-04 | Asm Lithography B.V. | Supporting device with gas bearing |
| CN1367744A (en) * | 1999-07-05 | 2002-09-04 | 动力发展有限公司 | Electromagnetic damper for vehicle suspension |
| CN1480787A (en) * | 2002-07-26 | 2004-03-10 | 尼康株式会社 | Damping device, flat table device and exposuring device |
| JP2006307932A (en) * | 2005-04-27 | 2006-11-09 | Sumitomo Heavy Ind Ltd | Vibration isolation system |
| EP1803965A2 (en) * | 2005-12-30 | 2007-07-04 | Integrated Dynamics Engineering GmbH | Insulation geometry of a vibration insulation system |
| US20080193061A1 (en) * | 2007-02-14 | 2008-08-14 | Integrated Dynamics Engineering Gmbh | Air bearing with consideration of high-frequency resonances |
| CN102470716A (en) * | 2009-07-10 | 2012-05-23 | 萱场工业株式会社 | Suspension device |
| CN201604761U (en) * | 2009-11-27 | 2010-10-13 | 重庆建设摩托车股份有限公司 | Beach vehicle rear shock absorber joint structure |
| CN102543217A (en) * | 2012-01-20 | 2012-07-04 | 澳门大学 | Macro-micro driven bidimensional integrated micro positioning platform |
| CN102734379A (en) * | 2012-06-09 | 2012-10-17 | 哈尔滨工业大学 | Active vibration isolating device based on composite support of electromagnetism and static-pressure air floatation |
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107061613A (en) * | 2017-05-03 | 2017-08-18 | 武汉理工大学 | Multidimensional active control vibration damping device and method |
| CZ309900B6 (en) * | 2017-08-24 | 2024-01-17 | CSc. Ďoubal Stanislav prof. RNDr. Ing. | A method of sensing and measuring mechanical displacements and mechanical vibrations |
| CN110848314A (en) * | 2019-11-20 | 2020-02-28 | 中国人民解放军92578部队 | Multifunctional composite vibration isolator |
| CN110848314B (en) * | 2019-11-20 | 2021-08-20 | 中国人民解放军92578部队 | Multifunctional composite vibration isolator |
| CN113917791A (en) * | 2021-09-22 | 2022-01-11 | 哈尔滨工业大学 | Vibration isolation device for photoetching machine |
| CN116292740A (en) * | 2023-03-24 | 2023-06-23 | 大连地拓电子工程技术有限公司 | Quasi-zero rigidity three-degree-of-freedom active anti-micro-vibration platform |
| CN116292740B (en) * | 2023-03-24 | 2023-09-05 | 大连地拓电子工程技术有限公司 | Quasi-zero rigidity three-degree-of-freedom active anti-micro-vibration platform |
Also Published As
| Publication number | Publication date |
|---|---|
| CN103062291B (en) | 2015-03-25 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN103047341B (en) | Vibration isolator with pneumatic flotation ball bearing for angular decoupling and magnetic suspension plane for driving and positioning | |
| CN103047346A (en) | Magnetic suspension zero-stiffness vibration isolator with angular decoupling function by aid of rolling joint bearing and vibration isolation system with magnetic suspension zero-stiffness vibration isolator | |
| CN103062283A (en) | Zero stiffness vibration isolator and vibration isolation system for air floating ball bearing angle decoupling | |
| CN103062291B (en) | Rolling knuckle bearing angle decoupling electromagnetic damping zero-stiffness vibration isolator | |
| CN103047352B (en) | Two-dimensional flexible hinge angle decoupling eddy current damping zero-rigidity vibration isolator | |
| CN103062288B (en) | Electromagnetic damping zero-stiffness vibration isolator with two-dimensional flexible hinge angle decoupling characteristic | |
| CN103062319A (en) | Zero-stiffness vibration isolator with two-dimensional flexible hinge angle decoupling characteristic and vibration isolating system | |
| CN103047338A (en) | Double-layer orthogonal air floatation decoupling and two-dimensional flexible hinge angular decoupling electromagnetic damping vibration isolator | |
| CN103062321A (en) | Zero-rigidity vibration isolator with coplace air flotation orthogonal decoupling and sliding knuckle bearing angle decoupling | |
| CN103062310B (en) | Electromagnetic damping zero-stiffness vibration isolator for air floatation ball bearing angle decoupling | |
| CN103062309A (en) | Eddy-current damping vibration isolator with coplace air flotation orthogonal decoupling and rolling knuckle bearing angle decoupling | |
| CN103047345A (en) | Double-layer orthogonal air floatation decoupling and air floatation ball bearing angular decoupling electromagnetic damping vibration isolator | |
| CN103062308A (en) | Eddy current damping vibration isolator of double-layer air-flotation orthogonal decoupling and rolling knuckle bearing angle decoupling | |
| CN103047339A (en) | Electromagnetic damping vibration isolator with coplanar air floatation orthogonal decoupling function and angular decoupling function by aid of sliding joint bearing | |
| CN103062300A (en) | Rolling knuckle bearing angle decoupling and magnetic levitation plane driving location vibration isolator | |
| CN103032515A (en) | Zero rigidity vibration isolator and vibration isolation system for angularly decoupling sliding oscillating bearing | |
| CN103062307A (en) | Eddy-current damping vibration isolator with coplace air flotation orthogonal decoupling and two-dimensional flexible hinge angle decoupling | |
| CN103047361B (en) | Zero-stiffness vibration isolator with rolling oscillating bearing angle degree decoupling function and vibration isolation system | |
| CN103062289B (en) | Electromagnetic damping vibration isolator of double-layer air-flotation orthogonal decoupling and rolling knuckle bearing angle decoupling | |
| CN103062313A (en) | Eddy current damping zero-stiffness vibration isolator for air floatation ball bearing angle decoupling | |
| CN103062290A (en) | Electromagnetic damping vibration isolator with coplace air flotation orthogonal decoupling and rolling knuckle bearing angle decoupling | |
| CN103062316A (en) | Eddy current damping zero stiffness vibration isolator for flexible membrane angle decoupling | |
| CN103047353B (en) | Eddy-current damping zero-stiffness vibration isolator with angular decoupling function by aid of rolling joint bearing | |
| CN103047360B (en) | Zero-rigidity vibration isolator with double-layer air flotation orthogonal decoupling and rolling knuckle bearing angular decoupling | |
| CN103062315A (en) | Coplane air floatation orthogonal decoupling and flexible membrane angle decoupling eddy-current damping vibration isolator |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant |