CN103047358A - Eddy-current damping vibration isolator with coplanar air floatation orthogonal decoupling function and angular decoupling function by aid of sliding joint bearing - Google Patents
Eddy-current damping vibration isolator with coplanar air floatation orthogonal decoupling function and angular decoupling function by aid of sliding joint bearing Download PDFInfo
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- CN103047358A CN103047358A CN2012105752388A CN201210575238A CN103047358A CN 103047358 A CN103047358 A CN 103047358A CN 2012105752388 A CN2012105752388 A CN 2012105752388A CN 201210575238 A CN201210575238 A CN 201210575238A CN 103047358 A CN103047358 A CN 103047358A
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Abstract
The invention discloses an eddy-current damping vibration isolator with a coplanar air floatation orthogonal decoupling function and an angular decoupling function by the aid of a sliding joint bearing, and belongs to the technical field of precision vibration isolation. Space between a sleeve of a vibration isolator body and a lower mounting plate and space between a piston barrel and the sleeve are respectively lubricated and supported by air floatation planes, eddy-current dampers are used for attenuating vibration energy and improving the positioning stability, the degree of freedom of horizontal linear movement between an upper mounting plate and the lower mounting plate is decoupled by coplanar orthogonal air floatation guide rails, the degree of freedom of angular movement between the upper mounting plate and the lower mounting plate is decoupled by the sliding joint bearing, and voice coil motors, displacement sensors, limit switches, a controller and a driver form a position closed-loop feedback control system to precisely control relative positions of the upper mounting plate and the lower mounting plate. The eddy-current damping vibration isolator has the advantages of zero three-dimensional stiffness, high positioning precision and capabilities of decoupling the degree of freedom of linear movement and decoupling the degree of freedom of angular movement, and can effectively realize high-performance vibration isolation for ultra-precision measuring instruments and processing equipment, and particularly for step-scan lithography machines.
Description
Technical field
The invention belongs to the accurate vibration isolation technical field, relate generally to the eddy-current damping vibration isolator of a kind of coplanar air supporting crossing decoupling and the decoupling zero of arthrodia bearing angle.
Background technique
Along with improving constantly of ultraprecise processing and measuring accuracy, ambient vibration becomes the key factor that restriction ultraprecise process unit and surveying instrument precision and performance improve.Especially step-by-step scanning photo-etching device is the vlsi circuit process unit of representative, technology-intensive degree and complexity are high, key technical index has all reached the limit of prior art, represented the highest level of ultraprecise process unit, the ultraprecise vibration isolation becomes the core key technology in this type of equipment; The live width of step-by-step scanning photo-etching device has reached 22nm and following, silicon chip Location accuracy and alignment precision all reach several nanometers, and the work stage movement velocity reaches more than the 1m/s, and the work stage acceleration reaches tens times of gravity accleration, and this has proposed new challenge to existing vibration isolation technique.At first, lithography machine need to provide for metering system and photoetched object lens the working environment of " super quiet ", simultaneously again the demand motive work stage at full speed with High acceleration motion, this anti-vibration performance to vibrating isolation system has proposed extremely harsh requirement, and the natural frequency of its three directions all needs to reach below the 1Hz; Secondly, relative position between each parts of lithography machine, the distance of photoetched object lens and silicon chip surface for example, all has very strict requirement, and be under the control of position closed loop feedback control system, require the relative positional accuracy between the upper and lower mounting plate of vibration isolator to reach 10 μ m magnitudes, the Location accuracy of traditional vibration isolator can not meet the demands far away.
According to theory of vibration isolation, the natural frequency of passive type vibration isolator is directly proportional with rigidity, is inversely proportional to load quality, therefore under the certain prerequisite of load quality, the rigidity that reduces vibration isolator is the effective way that reduces natural frequency, improves low frequency and superlow frequency vibration isolating performance.There are the intrinsic contradictions of static bearing capacity and rigidity in the vibration isolator of the forms such as conventional air spring, restricted by the factors such as material behavior, structural rigidity, and it is very difficult to rigidity further to reduce its rigidity, especially level.For this problem, the researcher is incorporated into " pendulum " formula structure in the air cushion shock absorber, reaches purpose (the 1.Nikon Corporation.Vibration Isolator With Low Lateral Stiffness. U.S. Patent Publication No.: US20040065517A1 that reduces the vibration isolator horizontal rigidity; 2.U.S.Philips Corporation.Positioning Device with a Force Actuator Systemfor Compensating Center-of-gravity Displacements, and Lithographic Device Provided with Such APositioning Device. U.S. Patent number: US005844664A).The method can reduce the horizontal rigidity of air cushion shock absorber to a certain extent, promotes its low frequency vibration isolation performance.The problem that the method exists is: restricted by material behavior and structural rigidity, vibration isolator is vertical limited to the amplitude of stiffness degradation with level; 2) the vertical and level of air cushion shock absorber is all very poor to Location accuracy, can't satisfy the requirement of photoetching process; 3) will reach lower horizontal rigidity needs larger pendulum length, causes the vibration isolator height excessive, the string membrane resonance occurs easily, poor stability.
By to the analysis of existing air cushion shock absorber technological scheme as seen, existing air cushion shock absorber is difficult to satisfy lithography machine to the requirement of ultralow rigidity and high position precision.Germany IDE company has proposed a kind of vibration isolator technological scheme (1.Integrated Dynamics Engineering GmbH.Isolatorgeometrie EinesSchwingungsisolationssystem. european patent number: EP1803965A2 of abandoning tradition rubber air spring; 2.Integrated Dynamics EngineeringGmbH.Schwingungsisolationssystem Mit Pneumatischem Tiefpassfilter. european patent number: EP1803970A2; 3.Integrated Dynamics Engineering GmbH.Air Bearing with Consideration ofHigh-Frequency Resonances. U.S. Patent Publication No.: US20080193061A1).This scheme adopts vertical and level is carried out decoupling zero and vibration isolation to air bearing surface to the vibration of all directions, can reach extremely low rigidity and natural frequency.The problem that this scheme exists is: 1) in the public technology scheme, vibration isolator can't be realized accurate location; 2) among the patent EP1803965A2, do not have the angular motion degrees of freedom around horizontal rotational shaft between the upper and lower mounting plate, the angular rigidity of this direction and natural frequency are all very high; Patent EP1803970A2 and US20080193061A1 adopt block rubber to provide angular motion degrees of freedom around horizontal rotational shaft for upper and lower mounting plate, but because the block rubber angular rigidity is very large, can't effectively carry out the angular motion freedom decoupling, there is frictional force between the decoupling mechanism component and introduces larger additional stiffness, restriction natural frequency and low frequency vibration isolation performance.
Holland ASML company has also proposed similar vibration isolator technological scheme (1.U.S.Philips Corp, ASM LithographyB.V.Pneumatic Support Device with A Controlled Gas Supply, and Lithographic Device Providedwith Such A Support Device. U.S. Patent number: US006144442A; 2.Koninklijke Philips ElectronicsN.V., ASM Lithography B.V.Lithographic Pneumatic Support Device with Controlled Gas Supply. International Patent Publication No.: WO99/22272; 3.ASML Netherlands B.V.Support Device, LithographicApparatus, and Device Manufacturing Method Employing A Supporting Device, and A PositionControl System Arranged for Use in A Supporting Device. U.S. Patent number: US007084956B2; 4.ASML Netherlands B.V.Support Device, Lithographic Apparatus, and Device ManufacturingMethod Employing A Supporting Device and A Position Control System Arranged for Use in ASupporting Device. european patent number: EP1486825A1).Among patent US006144442A and the WO99/22272 bleed pressure is carried out closed-loop feedback control, reach the stability of raising vibration isolator and the purpose of performance; Be provided with vibration transducer at upper mounting plate among patent US007084956B2 and the EP1486825A1, introduce simultaneously with reference to vibration system, promote the anti-vibration performance of vibration isolator by control algorithm.But the technological scheme that proposes still not effectively do not solve the accurate location of vibration isolator and the angular motion freedom decoupling problem of upper and lower mounting plate.
Summary of the invention
The objective of the invention is for ultra precise measurement instrument and process unit, especially the vlsi circuit process unit such as step-by-step scanning photo-etching device is to the low natural frequency of vibration isolator, the an urgent demand of high position precision, the eddy-current damping vibration isolator of a kind of coplanar air supporting crossing decoupling and the decoupling zero of arthrodia bearing angle is provided, vibration isolator all has approximate zero rigidity and extremely low natural frequency in three-dimensional, on, can accurately locate and the 3 d-line freedom of movement between the lower installation board, the angular motion freedom decoupling, thus ultra precise measurement instrument and process unit effectively solved, especially the accurate vibration isolation problem in the step-by-step scanning photo-etching device.
Technical solution of the present invention is:
The eddy-current damping vibration isolator of a kind of coplanar air supporting crossing decoupling and the decoupling zero of arthrodia bearing angle, by upper mounting plate, lower installation board, clean compressed gas source, tracheae and vibration isolator main body form, the vibration isolator main body is installed between upper mounting plate and the lower installation board, clean compressed gas source is connected with the vibration isolator main body by tracheae, in the structure of described vibration isolator main body, the lower surface of sleeve and lower installation board be lubricated and support by axial carrying plane air bearing surface, the piston cylinder back-off is installed in the sleeve, and with sleeve by radially carry the cylinder air bearing surface lubricated with support, the arthrodia bearing is installed between piston cylinder and the upper mounting plate, sleeve and X-direction air-float guide rail be lubricated and guiding by X-direction guide rail air bearing surface, X-direction air-float guide rail and lower installation board be lubricated and support by Z-direction bearing air-float face, Y-direction air-float guide rail and lower installation board are rigidly connected, and the two ends of X-direction air-float guide rail and Y-direction air-float guide rail be lubricated and guiding by Y-direction guide rail air bearing surface; The Z-direction voice coil motor, the Z-direction displacement transducer, the Z-direction limit switch, the Z-direction eddy current damper is installed between piston cylinder and the sleeve, the X-direction voice coil motor, the X-direction displacement transducer, the X-direction limit switch, X-direction eddy current damper and Y-direction voice coil motor, the Y-direction displacement transducer, the Y-direction limit switch, the Y-direction eddy current damper is installed between sleeve and the lower installation board, the driving force direction of Z-direction voice coil motor is vertical direction, the driving force direction of X-direction voice coil motor and Y-direction voice coil motor is in horizontal plane and mutually vertical, X, Y, Z-direction displacement transducer and X, Y, line of action direction and the X of Z-direction limit switch, Y, the driving force direction of Z-direction voice coil motor is consistent, X, Y, the damping force direction of Z-direction eddy current damper respectively with X, Y, the driving force direction of Z-direction voice coil motor is consistent; X, Y, Z-direction displacement transducer are connected Y, Z-direction limit switch and are connected with the signal input part of controller respectively with X, the signal output part of controller is connected with the signal input part of driver, and the signal output part of driver is connected with X, Y, Z-direction voice coil motor respectively.
The X-direction permanent magnet that described X-direction eddy current damper is installed along X-direction voice coil motor driving force direction by sleeve lower surface sidewall consists of, the Y-direction permanent magnet that the Y-direction eddy current damper is installed along Y-direction voice coil motor driving force direction by sleeve lower surface sidewall consists of, the Z-direction permanent magnet that the Z-direction eddy current damper is installed along Z-direction voice coil motor driving force direction by sleeve inner cylindrical surface sidewall consists of, the pole orientation of X, Y, Z-direction permanent magnet is perpendicular to the surface of sleeve, and N, the S utmost point are alternately arranged, sleeve adopts ferromagnetic material, and piston cylinder and lower installation board adopt non-magnetic good conductor material.
Be provided with gas pressure sensor in the described piston cylinder, piston cylinder is provided with suction port and solenoid valve, gas pressure sensor is connected with the signal input part of controller, and the signal output part of controller is connected with the signal input part of driver, and the signal output part of driver is connected with solenoid valve.
Described X, Y, Z-direction voice coil motor are cylinder type voice coil motor or plate voice coil motor.
Described X-direction air-float guide rail and Y-direction air-float guide rail are single rail structure or two guide rail structure.
Described X, Y, Z-direction displacement transducer are grating scale, magnetic railings ruler, appearance grid chi or linear potentiometer.
Described X, Y, Z-direction limit switch are mechanical type limit switch, Hall-type limit switch or photoelectric limit switch.
Gas pressure is 0.1MPa～0.8MPa in the described piston cylinder.
Described axial carrying plane air bearing surface, the air-film thickness that radially carries cylinder air bearing surface, X-direction guide rail air bearing surface, Y-direction guide rail air bearing surface and Z-direction bearing air-float face are 10 μ m～20 μ m.
The diameter of the cylinder air bearing surface throttle orifice on the described piston cylinder and the plane air bearing surface throttle orifice 24 on the sleeve 6 is φ 0.1mm～φ 1mm.
The good result of technological innovation of the present invention and generation is:
(1) the present invention has abandoned the vibration isolator technological scheme of tradition based on elastic element/mechanism, adopt axial carrying plane air bearing surface, radially carry the cylinder air bearing surface respectively to level to carrying out decoupling zero and vibration isolation with vertical vibration, air bearing surface is without friction, rigidity is approximately zero, can make vibration isolator obtain approximate zero stiffness characteristic and outstanding superlow frequency vibration isolating performance, having solved prior art limited by structural rigidity, material behavior, rigidity is difficult to further reduction, rigidity and the stable problem that can not take into account.This is that the present invention is different from one of innovative point of prior art.
(2) the present invention adopts displacement transducer, limit switch, controller, driver and voice coil motor etc. to consist of the position closed loop feedback control system of vertical direction and substantially horizontal, relative position between the upper and lower mounting plate is accurately controlled, Location accuracy can reach 10 μ m levels and more than, the problem that can solve effectively that prior art scheme Location accuracy is low, Location accuracy and rigidity, anti-vibration performance can not be taken into account.This is two of the present invention's innovative point of being different from prior art.
(3) the present invention adopts coplanar quadrature air-float guide rail and arthrodia bearing that the horizontal rectilinear motion degrees of freedom between the upper and lower mounting plate of vibration isolator and angular motion degrees of freedom are carried out decoupling zero, air-float guide rail is without friction and wear, it is less and have a larger bearing capacity that the arthrodia bearing is introduced frictional force, can be to upper and lower mounting plate, be that freedom of movement between vibration isolator and the load carries out abundant decoupling zero, effectively solve the existing technological scheme such as elastomer decoupling zero that adopts and introduce the problems such as larger additional stiffness, restriction natural frequency and low frequency vibration isolation performance.This is three of the present invention's innovative point of being different from prior art.
(4) the present invention adopts gas pressure sensor, solenoid valve and controller, driver etc. to consist of the pressure closed loop feedback control system, accurately the gas pressure in the control sleeve makes it to keep constant, thrust load to vibration isolator is carried out gravitational equilibrium and compensation, under the effect of radially carrying the cylinder air bearing surface, the piston cylinder of carry load gravity can freely slide up and down with zero stiffness along sleeve, thus the gravitational equilibrium of realizing ideal and zero stiffness vibration isolating effect.This is four of the present invention's innovative point of being different from prior art.
(5) the present invention adopts active actuators that the relative position between the upper and lower mounting plate is carried out ACTIVE CONTROL, the vibration isolator parameter can be according to being changed in real time adjusting by vibration isolation features of the object and working environment, thereby adapt to different operating modes, have preferably flexibility, adaptability and stability.This is five of the present invention's innovative point of being different from prior art.
(6) the present invention adopts the eddy current damper that replaces permanent magnet array based on magnetic pole, can be integrated in one with vibration isolator well, eddy current damper has comparatively ideal linear damping characteristic, but the effective attenuation vibrational energy, reduce the overshoot of motor driving location, the stability of vibration isolator is provided.This is six of the present invention's innovative point of being different from prior art.
Description of drawings
Fig. 1 is the structural representation of the eddy-current damping vibration isolator of removing coplanar air supporting crossing decoupling behind the upper mounting plate and the decoupling zero of arthrodia bearing angle;
Fig. 2 is the cross-sectional view of the eddy-current damping vibration isolator of coplanar air supporting crossing decoupling and the decoupling zero of arthrodia bearing angle;
Fig. 3 is axial carrying plane air bearing surface, radially carries the schematic representation of cylinder air bearing surface, X-direction guide rail air bearing surface and Z-direction bearing air-float face;
Fig. 4 is the schematic representation of Y-direction guide rail air bearing surface;
Fig. 5 is the tube-in-tube structure schematic representation;
Fig. 6 is the structural representation of arthrodia bearing;
Fig. 7 is the control structure block diagram of the eddy-current damping vibration isolator of coplanar air supporting crossing decoupling and the decoupling zero of arthrodia bearing angle;
Fig. 8 is the schematic representation of air bearing surface throttle orifice in plane on the sleeve;
Fig. 9 is the schematic representation of cylinder air bearing surface throttle orifice on the piston cylinder;
Figure 10 is the cross-sectional view of eddy current damper;
Figure 11 is the Z-direction permanent magnet at the A-A of a kind of mounting type of sleeve lower surface sidewall to sectional view;
Figure 12 is the Z-direction permanent magnet at the A-A of the another kind of mounting type of sleeve lower surface sidewall to sectional view;
Figure 13 is that X, Y-direction permanent magnet are at a kind of mounting type schematic representation of sleeve lower surface sidewall;
Figure 14 is that X, Y-direction permanent magnet are at the another kind of mounting type schematic representation of sleeve lower surface sidewall.
Piece number explanation among the figure: 1 upper mounting plate, 2 lower installation boards, 3 clean compressed gas sources, 4 vibration isolator main bodys, 5 piston cylinders, 6 sleeves, 7 arthrodia bearings, the 7a bearing support, the 7b bearing support, 8X is to voice coil motor, 8a X-direction motor iron yoke, 8b X-direction magnetic steel of motor, 8c X-direction motor coil skeleton, 8d X-direction motor coil, 9Y is to voice coil motor, 10Z is to voice coil motor, 10aZ is to motor iron yoke, 10b Z-direction magnetic steel of motor, 10c Z-direction motor coil skeleton, 10d Z-direction motor coil, 10e Z-direction motor transitional spare, 11X is to displacement transducer, 11aX is to the grating reading head transition piece, 11b X-direction grating reading head, 11c X-direction glass raster chi, 12Y is to displacement transducer, 13Z is to displacement transducer, 13a Z-direction grating reading head transition piece, 13b Z-direction grating reading head, 13c Z-direction glass raster chi, 14X is to limit switch, 14a X-direction limiting stopper, 14b X-direction Hall switch, 14cX is to the limit switch transition piece, 14d X-direction limiting stopper transition piece, 15Y is to limit switch, 16Z is to limit switch, 16a Z-direction limiting stopper, 16b Z-direction Hall switch, 16c Z-direction limit switch transition piece, 17 gas pressure sensors, 18 solenoid valves, 19 controllers, 20 drivers, 21 axial carrying plane air bearing surface, 22 radially carry the cylinder air bearing surface, 23 suction ports, 24 plane air bearing surface throttle orifices, 25 cylinder air bearing surface throttle orifices, 26 tracheaes, 29X is to air-float guide rail, 30Y is to air-float guide rail, 31X direction guiding rail air bearing surface, 32Y direction guiding rail air bearing surface, 33Z is to the bearing air-float face, 40X is to eddy current damper, 40AX is to permanent magnet, 41Y is to eddy current damper, 41A Y-direction permanent magnet, 42Z is to eddy current damper, 42A Z-direction permanent magnet.
Embodiment
Provide specific embodiments of the invention below in conjunction with accompanying drawing.
The eddy-current damping vibration isolator of a kind of coplanar air supporting crossing decoupling and the decoupling zero of arthrodia bearing angle, by upper mounting plate 1, lower installation board 2, clean compressed gas source 3, tracheae 26 and vibration isolator main body 4 form, vibration isolator main body 4 is installed between upper mounting plate 1 and the lower installation board 2, clean compressed gas source 3 is connected with vibration isolator main body 4 by tracheae 26, in the structure of described vibration isolator main body 4, the lower surface of sleeve 6 and lower installation board 2 are by the 21 lubricated and supports of axial carrying plane air bearing surface, piston cylinder 5 back-offs are installed in the sleeve 6, and with sleeve 6 by radially carry cylinder air bearing surface 22 lubricated with support, arthrodia bearing 7 is installed between piston cylinder 5 and the upper mounting plate 1, sleeve 6 lubricates and guiding by X-direction guide rail air bearing surface 31 with X-direction air-float guide rail 29, X-direction air-float guide rail 29 lubricates by Z-direction bearing air-float face 33 with lower installation board 2 and supports, Y-direction air-float guide rail 30 is rigidly connected with lower installation board 2, and the two ends of X-direction air-float guide rail 29 and Y-direction air-float guide rail 30 are by Y-direction guide rail air bearing surface 32 lubricated and guiding; Z-direction voice coil motor 10, Z-direction displacement transducer 13, Z-direction limit switch 16, Z-direction eddy current damper 42 are installed between piston cylinder 5 and the sleeve 6, and X-direction voice coil motor 8, X-direction displacement transducer 11, X-direction limit switch 14, X-direction eddy current damper 40 and Y-direction voice coil motor 9, Y-direction displacement transducer 12, Y-direction limit switch 15, Y-direction eddy current damper 41 are installed between sleeve 6 and the lower installation board 2; The driving force direction of Z-direction voice coil motor 10 is vertical direction, the driving force direction of X-direction voice coil motor 8 and Y-direction voice coil motor 9 is in horizontal plane and mutually vertical, X, Y, Z- direction displacement transducer 11,12,13 consistent with X, Y, Z- direction limit switch 14,15,16 line of action direction and X, Y, Z-direction voice coil motor 8,9,10 driving force direction, X, Y, Z-direction eddy current damper 40,41,42 damping force direction are consistent with X, Y, Z-direction voice coil motor 8,9,10 driving force direction respectively; X, Y, Z- direction displacement transducer 11,12,13 are connected Y, Z- direction limit switch 14,15,16 and are connected with the signal input part of controller 19 respectively with X, the signal output part of controller 19 is connected with the signal input part of driver 20, and the signal output part of driver 20 is connected with X, Y, Z-direction voice coil motor 8,9,10 respectively.
X, Y, Z- direction displacement transducer 11,12,13 pairs of X, Y, Z-direction voice coil motor 8,9,10 displacements of exporting are measured, and X, Y, Z- direction limit switch 14,15,16 pairs of X, Y, Z-direction voice coil motor 8,9,10 strokes that move limit; Controller 19 is according to X, Y, Z- direction displacement transducer 11,12,13 and X, Y, Z- direction limit switch 14,15,16 feedback signal, and the relative position between control X, Y, Z-direction voice coil motor 8,9, the 10 pairs of upper and lower mounting plates 1,2 is accurately controlled.
The X-direction permanent magnet 40A that described X-direction eddy current damper 40 is installed along X-direction voice coil motor 8 driving force directions by sleeve 6 lower surface sidewalls consists of, the Y-direction permanent magnet 41A that Y-direction eddy current damper 41 is installed along Y-direction voice coil motor 9 driving force directions by sleeve 6 lower surface sidewalls consists of, the Z-direction permanent magnet 42A that Z-direction eddy current damper 42 is installed along Z-direction voice coil motor 10 driving force directions by sleeve 6 inner cylindrical surface sidewalls consists of, X, Y, Z-direction permanent magnet 40A, 41A, the pole orientation of 42A is perpendicular to the surface of sleeve 6, and N, the S utmost point is alternately arranged, sleeve 6 adopts ferromagnetic material, and piston cylinder 5 adopts non-magnetic good conductor material with lower installation board 2.
Be provided with gas pressure sensor 17 in the described piston cylinder 5, piston cylinder 5 is provided with suction port 23 and solenoid valve 18, gas pressure sensor 17 is connected with the signal input part of controller 19, the signal output part of controller 19 is connected with the signal input part of driver 20, and the signal output part of driver 20 is connected with solenoid valve 18.
Described X, Y, Z-direction voice coil motor 8,9,10 are cylinder type voice coil motor or plate voice coil motor.
Described X-direction air-float guide rail 29 and Y-direction air-float guide rail 30 are single rail structure or two guide rail structure.
Described X, Y, Z- direction displacement transducer 11,12,13 are grating scale, magnetic railings ruler, appearance grid chi or linear potentiometer.
Described X, Y, Z- direction limit switch 14,15,16 are mechanical type limit switch, Hall-type limit switch or photoelectric limit switch.
Described piston cylinder 5 interior gas pressures are 0.1MPa～0.8MPa.
Described axial carrying plane air bearing surface 21, the air-film thickness that radially carries cylinder air bearing surface 22, X-direction guide rail air bearing surface 31, Y-direction guide rail air bearing surface 32 and Z-direction bearing air-float face 33 are 10 μ m～20 μ m.
Cylinder air bearing surface throttle orifice 25 on the described piston cylinder 5 and the diameter of the plane air bearing surface throttle orifice 24 on the sleeve 6 are φ 0.1mm～φ 1mm.
Provide one embodiment of the present of invention below in conjunction with Fig. 1～Fig. 5, Fig. 8.In the present embodiment, the pedestal of lower installation board 2 and ground, instrument or basic framework etc. are rigidly connected during vibration isolator work, and upper mounting plate 1 is rigidly connected with load or platform.X, Y, Z-direction voice coil motor 8,9,10 all adopt the cylinder type voice coil motor.Take X-direction voice coil motor 8 as example, it mainly is comprised of X-direction motor iron yoke 8a, X-direction magnetic steel of motor 8b, X-direction motor coil skeleton 8c, X-direction motor coil 8d.X-direction motor iron yoke 8a and X-direction motor coil skeleton 8c are cylindrical shape, and X-direction magnetic steel of motor 8b is cylindrical, and X-direction motor coil 8d is around on the X-direction motor coil skeleton 8c.X-direction motor iron yoke 8a and X-direction magnetic steel of motor 8b consist of motor stator, and X-direction motor coil skeleton 8c and X-direction motor coil 8d consist of electric mover.In the Z-direction voice coil motor 10, Z-direction motor transitional spare 10e provides the mounting structure of Z-direction motor coil skeleton 10c.Pass to electric current during machine operation in the coil, according to electromagnetic theory, hot-wire coil can be subject to the Lorentz force effect in magnetic field, can control the size and Orientation of motor output drive strength by the size and Orientation of control electric current.
X, Y, Z- direction displacement transducer 11,12,13 adopt grating scale.Take Z-direction displacement transducer 13 as example, it mainly comprises the parts such as Z-direction grating reading head transition piece 13a, Z-direction grating reading head 13b and Z-direction glass raster chi 13c.Z-direction grating reading head transition piece 13a provides the mounting structure of Z-direction grating reading head 13b.In grating scale when work,, Z-direction grating reading head 13b can detect the relative displacement of itself and Z-direction glass raster chi 13c, and gives controller 19 by signal conductor.
X, Y, Z- direction limit switch 14,15,16 adopt the Hall-type limit switch.Take Z-direction limit switch 16 as example, it mainly comprises the parts such as Z-direction limiting stopper 16a, Z-direction Hall switch 16b and Z-direction limit switch transition piece 16c.Two Z-direction Hall switch 16b install back-to-back, and two Z-direction limiting stopper 16a are metallic material, with relative installation of sensitivity end of Z-direction Hall switch 16b.Z-direction limit switch transition piece 16c provides the mounting structure of Z-direction Hall switch 16b.In limit switch when work,, as Z-direction Hall switch 16b during near Z-direction limiting stopper 16a, Z-direction Hall switch 16b provides limit signal, and gives controller 19 by signal conductor.
In the present embodiment, Z-direction voice coil motor 10, Z-direction displacement transducer 13 and Z-direction limit switch 16 are installed between piston cylinder 5 and the sleeve 6, and are installed in piston cylinder 5 inside.
Vibration isolator is realized in the following way to the carrying of load: clean compressed gas source 3 by tracheae 26, through solenoid valve 18, suction port 23 to piston cylinder 5 interior conveying clean compressed airs.Controller 19 is according to the feedback signal of gas pressure sensor 17, the aperture of control solenoid valve 18, adjusting is input to the gas flow in the piston cylinder 5, thereby the pressure of regulating piston cylinder 5 interior clean compressed airs, make active force and load, the piston cylinder 5 that clean compressed air makes progress to piston cylinder 5 and the gravity that loads on other component on the piston cylinder 5 balance each other the gravity compensation of realizing ideal and zero stiffness vibration isolating effect.
In the present embodiment, the pressure of piston cylinder 5 interior clean compressed airs is 0.4Mpa, and the effective radius of piston cylinder 5 lower surfaces is 100mm, and then the quality of single vibration isolator carrying is: m=p * π r
2/ g ≈ 1282kg, wherein p is gas pressure, and p=0.4Mpa, r are the effective radius of piston cylinder 5 lower surfaces, and r=100mm, g are gravity accleration, g=9.gm/m
2
Fig. 2 provides a kind of mode of execution of arthrodia bearing.Arthrodia bearing 7 mainly is comprised of bearing support 7a and bearing support 7b, it is secondary that protruding sphere on concave spherical surface on the bearing support 7b and the bearing support 7a consists of sliding movement, adopt the liquid or solid oiling agent to be lubricated, the angular motion degrees of freedom between the upper and lower mounting plate 1,2 is carried out decoupling zero.
Fig. 6 provides the another kind of mode of execution of arthrodia bearing.Have protruding sphere on the bearing support 7b, and the formation of the concave spherical surface on bearing support 7a sliding movement is secondary, adopts the liquid or solid oiling agent to be lubricated, the angular motion degrees of freedom between the upper and lower mounting plate 1,2 is carried out decoupling zero.
Fig. 8 provides an embodiment of air bearing surface throttle orifice in plane on the sleeve.In the present embodiment, sleeve 6 lower surfaces center on along the circumferential direction uniform 8 plane air bearing surface throttle orifices 24 of the center of circle, and diameter is φ 0.2mm.
Fig. 9 provides an embodiment of cylinder air bearing surface throttle orifice on the piston cylinder.In the present embodiment, along the circumferential direction uniform two arrange cylinder air bearing surface throttle orifices 25 on piston cylinder 5 sidewalls, the quantity of every row's cylinder air bearing surface throttle orifice 25 is 8, and diameter is φ 0.2mm.
Provide an embodiment of Z-direction eddy current damper below in conjunction with Figure 10, Figure 11.In the present embodiment, vibration isolator has two Z-direction eddy current dampers 42, is made of the Z-direction permanent magnet 42A array that is installed in sleeve 6 inner cylindrical surface sidewalls, sleeve 6 adopts No. 45 Steel materials, have higher permeability, piston cylinder 5 adopts the red copper materials, not magnetic conduction and have high conductivity.Z-direction permanent magnet 42A is bar shaped, and along the driving force direction of Z-direction voice coil motor 10, be that the axial direction of sleeve 6 is arranged, pole orientation is perpendicular to the inner cylindrical surface of sleeve 6, and N, the S utmost point alternately arrange.When sleeve 6 produces the Z-direction relative movement with piston cylinder 5, piston cylinder 5 cutting magnetic lines and produce electric convolution and damping force, the Z-direction damping force is directly proportional with the Z-direction speed of related movement of piston cylinder 5 with sleeve 6, the driving force direction of direction and Z-direction voice coil motor 10, be that the axial direction of sleeve 6 is consistent, reach the consumption vibrational energy, improve the purpose of position stability.
Figure 10, Figure 12 have provided another embodiment of Z eddy current damper.In the present embodiment, vibration isolator has four Z-direction eddy current dampers 42, is made of the Z-direction permanent magnet 42A array that is installed in sleeve 6 inner cylindrical surface sidewalls.Z-direction permanent magnet 42A is bar shaped, and along the driving force direction of Z-direction voice coil motor 10, be that the axial direction of sleeve 6 is arranged, pole orientation is perpendicular to the inner cylindrical surface of sleeve 6, and N, the S utmost point alternately arrange.
Provide an embodiment of X, Y-direction eddy current damper below in conjunction with Figure 10, Figure 13.In the present embodiment, vibration isolator has two X-direction eddy current dampers 40, two Y-direction eddy current dampers 41, consisted of by the X that is installed in sleeve 6 lower surface sidewalls, Y-direction permanent magnet 40A, 41A array respectively, sleeve 6 adopts No. 45 Steel materials, have higher permeability, lower installation board 2 adopts the red copper materials, not magnetic conduction and have high conductivity.X, Y-direction permanent magnet 40A, 41A are elongate in shape, arrange along X, Y-direction voice coil motor 8,9 driving force direction respectively, and pole orientation is perpendicular to the lower surface of sleeve 6, and N, the S utmost point alternately arrange.When sleeve 6 produces relative movement with lower installation board 2, lower installation board 2 cutting magnetic lines and produce electric convolution and damping force, X, Y-direction damping force are directly proportional with the speed of related movement of lower installation board 2 in X, Y-direction with sleeve 6, direction and X, Y-direction voice coil motor 8,9 driving force direction are consistent, reach the consumption vibrational energy, improve the purpose of position stability.
Figure 10, Figure 14 have provided another embodiment of X, Y-direction eddy current damper.In the present embodiment, vibration isolator has 40, one Y-direction eddy current dampers 41 of an X-direction eddy current damper, is made of the X that is installed in sleeve 6 lower surface sidewalls, Y-direction permanent magnet 40A, 41A array respectively.X, Y-direction permanent magnet 40A, 41A are elongate in shape, arrange along X, Y-direction voice coil motor 8,9 driving force direction respectively, and pole orientation is perpendicular to the lower surface of sleeve 6, and N, the S utmost point alternately arrange.
Claims (10)
1. the eddy-current damping vibration isolator of a coplanar air supporting crossing decoupling and the decoupling zero of arthrodia bearing angle, by upper mounting plate (1), lower installation board (2), clean compressed gas source (3), tracheae (26) and vibration isolator main body (4) form, vibration isolator main body (4) is installed between upper mounting plate (1) and the lower installation board (2), clean compressed gas source (3) is connected with vibration isolator main body (4) by tracheae (26), it is characterized in that: in the structure of described vibration isolator main body (4), the lower surface of sleeve (6) and lower installation board (2) be lubricated and support by axial carrying plane air bearing surface (21), piston cylinder (5) back-off is installed in the sleeve (6), and with sleeve (6) by radially carry cylinder air bearing surface (22) lubricated with support, arthrodia bearing (7) is installed between piston cylinder (5) and the upper mounting plate (1), sleeve (6) lubricates and guiding by X-direction guide rail air bearing surface (31) with X-direction air-float guide rail (29), X-direction air-float guide rail (29) and lower installation board (2) lubricated and support by Z-direction bearing air-float face (33), Y-direction air-float guide rail (30) is rigidly connected with lower installation board (2), and the two ends of X-direction air-float guide rail (29) and Y-direction air-float guide rail (30) be lubricated and guiding by Y-direction guide rail air bearing surface (32); Z-direction voice coil motor (10), Z-direction displacement transducer (13), Z-direction limit switch (16), Z-direction eddy current damper (42) is installed between piston cylinder (5) and the sleeve (6), X-direction voice coil motor (8), X-direction displacement transducer (11), X-direction limit switch (14), X-direction eddy current damper (40) and Y-direction voice coil motor (9), Y-direction displacement transducer (12), Y-direction limit switch (15), Y-direction eddy current damper (41) is installed between sleeve (6) and the lower installation board (2), the driving force direction of Z-direction voice coil motor (10) is vertical direction, the driving force direction of X-direction voice coil motor (8) and Y-direction voice coil motor (9) is in horizontal plane and mutually vertical, X, Y, Z-direction displacement transducer (11,12,13) and X, Y, Z-direction limit switch (14,15,16) line of action direction and X, Y, Z-direction voice coil motor (8,9,10) driving force direction is consistent, X, Y, Z-direction eddy current damper (40,41,42) damping force direction respectively with X, Y, Z-direction voice coil motor (8,9,10) driving force direction is consistent; X, Y, Z-direction displacement transducer (11,12,13) are connected Y, Z-direction limit switch (14,15,16) and are connected with the signal input part of controller (19) respectively with X, the signal output part of controller (19) is connected with the signal input part of driver (20), and the signal output part of driver (20) is connected with X, Y, Z-direction voice coil motor (8,9,10) respectively.
2. the eddy-current damping vibration isolator of coplanar air supporting crossing decoupling according to claim 1 and the decoupling zero of arthrodia bearing angle, it is characterized in that: the X-direction permanent magnet (40A) that described X-direction eddy current damper (40) is installed along X-direction voice coil motor (8) driving force direction by sleeve (6) lower surface sidewall consists of, the Y-direction permanent magnet (41A) that Y-direction eddy current damper (41) is installed along Y-direction voice coil motor (9) driving force direction by sleeve (6) lower surface sidewall consists of, the Z-direction permanent magnet (42A) that Z-direction eddy current damper (42) is installed along Z-direction voice coil motor (10) driving force direction by sleeve (6) inner cylindrical surface sidewall consists of, X, Y, Z-direction permanent magnet (40A, 41A, pole orientation 42A) is perpendicular to the surface of sleeve (6), and N, the S utmost point is alternately arranged, sleeve (6) adopts ferromagnetic material, and piston cylinder (5) adopts non-magnetic good conductor material with lower installation board (2).
3. the eddy-current damping vibration isolator of coplanar air supporting crossing decoupling according to claim 1 and the decoupling zero of arthrodia bearing angle, it is characterized in that: be provided with gas pressure sensor (17) in the described piston cylinder (5), piston cylinder (5) is provided with suction port (23) and solenoid valve (18), gas pressure sensor (17) is connected with the signal input part of controller (19), the signal output part of controller (19) is connected with the signal input part of driver (20), and the signal output part of driver (20) is connected with solenoid valve (18).
4. the eddy-current damping vibration isolator of coplanar air supporting crossing decoupling according to claim 1 and the decoupling zero of arthrodia bearing angle, it is characterized in that: described X, Y, Z-direction voice coil motor (8,9,10) are cylinder type voice coil motor or plate voice coil motor.
5. the eddy-current damping vibration isolator of coplanar air supporting crossing decoupling according to claim 1 and the decoupling zero of arthrodia bearing angle, it is characterized in that: described X-direction air-float guide rail (29) and Y-direction air-float guide rail (30) are single rail structure or two guide rail structure.
6. the eddy-current damping vibration isolator of coplanar air supporting crossing decoupling according to claim 1 and the decoupling zero of arthrodia bearing angle is characterized in that: described X, Y, Z-direction displacement transducer (11,12,13) are grating scale, magnetic railings ruler, appearance grid chi or linear potentiometer.
7. the eddy-current damping vibration isolator of coplanar air supporting crossing decoupling according to claim 1 and the decoupling zero of arthrodia bearing angle, it is characterized in that: described X, Y, Z-direction limit switch (14,15,16) are mechanical type limit switch, Hall-type limit switch or photoelectric limit switch.
8. the eddy-current damping vibration isolator of coplanar air supporting crossing decoupling according to claim 1 and the decoupling zero of arthrodia bearing angle, it is characterized in that: the interior gas pressure of described piston cylinder (5) is 0.1MPa～0.8MPa.
9. the eddy-current damping vibration isolator of coplanar air supporting crossing decoupling according to claim 1 and the decoupling zero of arthrodia bearing angle is characterized in that: described axial carrying plane air bearing surface (21), the air-film thickness that radially carries cylinder air bearing surface (22), X-direction guide rail air bearing surface (31), Y-direction guide rail air bearing surface (32) and Z-direction bearing air-float face (33) are 10 μ m～20 μ m.
10. the eddy-current damping vibration isolator of coplanar air supporting crossing decoupling according to claim 1 and the decoupling zero of arthrodia bearing angle, it is characterized in that: the cylinder air bearing surface throttle orifice (25) on the described piston cylinder (5) and the diameter of the plane air bearing surface throttle orifice (24) on the sleeve (6) are φ 0.1mm～φ 1mm.
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| CN201210575238.8A CN103047358B (en) | 2012-12-19 | 2012-12-19 | Eddy-current damping vibration isolator with coplanar air floatation orthogonal decoupling function and angular decoupling function by aid of sliding joint bearing |
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| CN201210575238.8A CN103047358B (en) | 2012-12-19 | 2012-12-19 | Eddy-current damping vibration isolator with coplanar air floatation orthogonal decoupling function and angular decoupling function by aid of sliding joint bearing |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105202325A (en) * | 2015-10-30 | 2015-12-30 | 上海交通大学 | Long-stroke single degree of freedom air-bearing magnetic-drive nano-positioning platform |
Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5765800A (en) * | 1995-10-04 | 1998-06-16 | Ebara Corporation | Vibration damping apparatus |
| CN1595299A (en) * | 2004-06-25 | 2005-03-16 | 清华大学 | Ultra-precise silicon wafer positioning system with balance weight damping apparatus |
| JP2006322531A (en) * | 2005-05-18 | 2006-11-30 | Oiles Ind Co Ltd | Air slider with aerostatic journal bearing |
| US7267196B2 (en) * | 2004-02-12 | 2007-09-11 | The Boeing Company | Method and apparatus for reducing acoustic noise |
| CN101398636A (en) * | 2008-09-17 | 2009-04-01 | 华中科技大学 | Precision vibration damping assembly and vibration damping platform composed of the assembly |
| CN101403629A (en) * | 2008-11-14 | 2009-04-08 | 哈尔滨工业大学 | Vertical straight line reference method and apparatus based on external support type gas/gas two-phase combination |
| CN101403628A (en) * | 2008-11-14 | 2009-04-08 | 哈尔滨工业大学 | Horizontal gas/gas two-phase composite straight line reference method and apparatus based on gravity force balance |
| CN102734379A (en) * | 2012-06-09 | 2012-10-17 | 哈尔滨工业大学 | Active vibration isolating device based on composite support of electromagnetism and static-pressure air floatation |
-
2012
- 2012-12-19 CN CN201210575238.8A patent/CN103047358B/en active Active
Patent Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5765800A (en) * | 1995-10-04 | 1998-06-16 | Ebara Corporation | Vibration damping apparatus |
| US7267196B2 (en) * | 2004-02-12 | 2007-09-11 | The Boeing Company | Method and apparatus for reducing acoustic noise |
| CN1595299A (en) * | 2004-06-25 | 2005-03-16 | 清华大学 | Ultra-precise silicon wafer positioning system with balance weight damping apparatus |
| JP2006322531A (en) * | 2005-05-18 | 2006-11-30 | Oiles Ind Co Ltd | Air slider with aerostatic journal bearing |
| CN101398636A (en) * | 2008-09-17 | 2009-04-01 | 华中科技大学 | Precision vibration damping assembly and vibration damping platform composed of the assembly |
| CN101403629A (en) * | 2008-11-14 | 2009-04-08 | 哈尔滨工业大学 | Vertical straight line reference method and apparatus based on external support type gas/gas two-phase combination |
| CN101403628A (en) * | 2008-11-14 | 2009-04-08 | 哈尔滨工业大学 | Horizontal gas/gas two-phase composite straight line reference method and apparatus based on gravity force balance |
| CN102734379A (en) * | 2012-06-09 | 2012-10-17 | 哈尔滨工业大学 | Active vibration isolating device based on composite support of electromagnetism and static-pressure air floatation |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105202325A (en) * | 2015-10-30 | 2015-12-30 | 上海交通大学 | Long-stroke single degree of freedom air-bearing magnetic-drive nano-positioning platform |
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