CN105202325A - Long-stroke single degree of freedom air-bearing magnetic-drive nano-positioning platform - Google Patents
Long-stroke single degree of freedom air-bearing magnetic-drive nano-positioning platform Download PDFInfo
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- CN105202325A CN105202325A CN201510729158.7A CN201510729158A CN105202325A CN 105202325 A CN105202325 A CN 105202325A CN 201510729158 A CN201510729158 A CN 201510729158A CN 105202325 A CN105202325 A CN 105202325A
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Abstract
The invention discloses a long-stroke single degree of freedom air-bearing magnetic-drive nano-positioning platform, which comprises a solenoid actuator, an air-bearing guide mechanism, a position sensor module and an eddy current retarder module. The solenoid actuator body consists of two parts of a stator and a rotor; the rotor part is provided with a permanent magnet array; the stator three-phase winding adopts a coreless structure. Degree of freedom in five directions of a positioning platform is constrained by the air-bearing guide mechanism through three air bearings in vertical direction and two lateral air bearings in horizontal direction, so as to enable the positioning platform to perform motion only along one direction. The position sensor module is realized by virtue of a high-precision raster rule. The eddy current retarder module comprises two eddy current retarders which are respectively arranged at the front end and the rear end of the solenoid actuator. The nano-positioning platform disclosed by the invention has the advantages of simple structure, direct drive, zero friction, hysteresis-free, haul back interval-free and the like, and nano-grade positioning resolution is reached in motion strokes from tens of millimeters to hundreds of millimeters.
Description
Technical field
The present invention relates to elaborate servo and drive field, particularly relate to a kind of Long Distances single-degree-of-freedom air supporting Magnetic driving nanopositioning stage.
Background technique
Along with the development of nano-fabrication technique, high efficiency nano mechanical processing machine, nanometer laser direct-write lithography machine and the scope that the exposes thoroughly measurement equipment based on AFM propose the requirement simultaneously in large movement travel with Subnano-class resolution, nano grade positioning precision and high bandwidth to motion locating platform.
Patent publication No. is that the patent of invention of 102998899A and 103883849A adopts flexible hinge and piezoelectric constant to combine to realize nanometer positioning, this Direct driver type piezoelectric actuator has the positioning resolution of Subnano-class, but processing in the horizontal direction and measuring range only have tens microns, even if employing enlarger, stroke can only reach hundreds of micron.Indirect-type piezoelectric actuator (such as adopting the piezoelectric linear motor of standing-wave ultrasonic principle, looper driving principle) is although can realize Large travel range and nano level positioning resolution, but the low repetitive positioning accuracy of this kind of piezoelectric actuator, makes it be not suitable for being applied on a large scale nanoprocessing continuously and scanning survey equipment.Patent publication No. is the patent of invention of 102629122A, grand/micro-combination that be made up of linear servo-actuator and micromotion platform pair servo motion platform not only complex structure, bulky is proposed, and when grand movement, switching between grand, micromotion limits the bandwidth of whole platform, reduces the efficiency of nanoprocessing and scanning survey.Therefore, those skilled in the art is devoted to the large-stroke nanometer locating platform developing a kind of new configuration.
Summary of the invention
Because the above-mentioned defect of prior art, technical problem to be solved by this invention how to make the precision of existing large-stroke nanometer locating platform improve, designs simplification, volume-diminished.
For achieving the above object, the invention provides a kind of Long Distances single-degree-of-freedom air supporting Magnetic driving nanopositioning stage, comprise locating platform basic machine and locating platform controller, described locating platform basic machine comprises Electromagnetic Drive actuator, air supporting guide mechanism and eddy current damper module, wherein, described Electromagnetic Drive actuator is configured to the change producing the displacement of electromagnetic force implementation platform; Described air supporting guide mechanism is configured to platform is only moved along a direction; Described eddy current damper module is configured to produce damping force, to shorten the positioning time of locating platform.
Further, described Electromagnetic Drive actuator is made up of stator and mover, and described stator is formed by three-phase windings copper wire winding, the electric phase difference of every phase winding 120 degree, adopts non iron-core structure; Described mover is made up of magnetic array, and the arrangement of described magnetic array is configured to guarantee that the side magnetic intensity towards winding is strong, and the side magnetic intensity of winding is weak dorsad; The phase place of described three-phase stator winding electrical current and size are configured to the size changing locating platform single-degree-of-freedom direction thrust.
Further, described air supporting guide mechanism comprises marble guide rail, the first air supporting module, the second air supporting module, the 3rd air supporting module, the 4th air supporting module and the 5th air supporting module; Described first air supporting module is configured to the degrees of freedom limiting locating platform Vertical direction, described second air supporting module is configured to the degrees of freedom limiting locating platform pitch orientation, described 3rd air supporting module is configured to the degrees of freedom limiting locating platform beat direction, described 4th air supporting module is configured to the degrees of freedom limiting locating platform substantially horizontal, and described 5th air supporting module is configured to the degrees of freedom limiting locating platform yaw direction.
Further, described eddy-current damping module is made up of copper coin and winding, and described copper coin is fixed on the stator of locating platform, moves with locating platform; Winding is around on silicon steel plate, and two windings form closed magnetic field; At the same speed, in controlled winding, the size of electric current is configured to the power of controlling magnetic field, thus controls the size of damping force.
Further, described locating platform controller adopts linear drive circuit to control, and comprises master controller, A/D change-over circuit, D/A change-over circuit, Linear Amplifer module, current sensor and position transducer; Described master controller is configured to run control algorithm and locating platform driving algorithm; The current signal that described A/D change-over circuit is configured to described current sensor exports is sampled, and completes locating platform current loop control; The digital current signal that described D/A change-over circuit is configured to described master controller exports is converted to analog current signal; Described Linear Amplifer module is configured to amplify described analog current signal, drives staor winding; Described current sensor is configured to gather stator current signal; Described position transducer is configured to the position gathering locating platform mover.
Further, the framework of described stator adopts aluminum alloy material.
Further, described magnetic array is adhered on the framework of described stator.
Further, the described magnetic array of four magnet block formation is configured to an electric cycle of formation.
Further, described first air supporting module, described second air supporting module and the arrangement triangular in shape of described 3rd air supporting module.
Further, described first air supporting module, described second air supporting module, described 3rd air supporting module, described 4th air supporting module and described 5th air supporting module adopt the air-bearing of porous type vacuum preloading.
Single-degree-of-freedom air supporting Magnetic driving nanopositioning stage described in patent of the present invention comprises locating platform basic machine and locating platform controller.Locating platform body described in patent of the present invention comprises Electromagnetic Drive actuator, air supporting guide mechanism, position transducer and eddy current damper module.Electromagnetic Drive actuator produces the change of electromagnetic force implementation platform displacement; Air supporting guide mechanism is used for limiting the degrees of freedom in other directions of platform, and platform is only moved along a direction; Position transducer is the position feed back signal of locating platform; Eddy current damper module produces damping force, to shorten the positioning time of locating platform.
Electromagnetic Drive actuator described in patent of the present invention is made up of stator and mover, and stator is formed by three-phase windings copper wire winding, the electric phase difference of every phase winding 120 degree, adopts non iron-core structure; Mover is made up of magnetic array, and the arrangement of magnetic array is guaranteed in the side magnetic intensity towards winding strong, and the side magnetic intensity of winding is weak dorsad.Change phase place and the size of three-phase stator winding electrical current, the thrust in locating platform single-degree-of-freedom direction can be changed.
Locating platform controller described in patent of the present invention adopts linear drive circuit to control, overcome digital signal and drive the noise brought, comprise the modules such as master controller, A/D change-over circuit, D/A change-over circuit, Linear Amplifer module, current sensor and position transducer collection.Master controller completes control algorithm, locating platform drives algorithm; A/D change-over circuit is sampled to the current signal that current sensor exports, and completes locating platform current loop control; The digital current signal that controller exports is converted to analog current signal by D/A change-over circuit; Linear Amplifer module is amplified current signal, drives staor winding; Current sensor gathers stator current signal; Position transducer gathers the position of locating platform mover.
Eddy-current damping module described in patent of the present invention is made up of copper coin and winding.Copper coin is fixed on the stator of locating platform, moves with locating platform; Winding is around on silicon steel plate, and two windings form closed magnetic field.At the same speed, in controlled winding, the size of electric current can the power of controlling magnetic field, thus controls the size of damping force.
Patent of the present invention proposes a kind of Long Distances single-degree-of-freedom air supporting Magnetic driving nanopositioning stage, meets nanoprocessing and scanning survey equipment to the motion of locating platform Long Distances and the requirement of nano grade positioning precision.The single-degree-of-freedom air supporting Magnetic driving nanopositioning stage proposed has that structure is simple, Direct driver, without friction, without sluggish and without making the return trip empty the advantages such as gap, reach nano level positioning resolution tens in hundreds of millimetres of movement stroke.
Be described further below with reference to the technique effect of accompanying drawing to design of the present invention, concrete structure and generation, to understand object of the present invention, characteristic sum effect fully.
Accompanying drawing explanation
Fig. 1 is the nanopositioning stage general illustration of a preferred embodiment of the present invention;
Fig. 2 is the nanopositioning stage basic machine schematic diagram of a preferred embodiment of the present invention;
Fig. 3 is the electromagnetic actuators schematic diagram of a preferred embodiment of the present invention;
Fig. 4 is the air-float guide rail structural representation of a preferred embodiment of the present invention;
Fig. 5 is the eddy-current damping module diagram of a preferred embodiment of the present invention;
Fig. 6 is the nanopositioning stage controller architecture schematic diagram of a preferred embodiment of the present invention.
Embodiment
Below in conjunction with concrete case study on implementation, the present invention is described in detail.
As shown in Figure 1, patent of the present invention proposes a kind of Long Distances single-degree-of-freedom air supporting Magnetic driving nanopositioning stage, comprises locating platform basic machine 100, locating platform controller 200.Current signal in locating platform controller 200 collection machinery body 100 and position signal, and the motion controlling that basic machine 100 realizes large-stroke nanometer class precision on single-degree-of-freedom direction.
As shown in Figure 2, basic machine 100 includes electromagnetic actuators 110, air supporting guide mechanism 120, position feedback grating scale 130 and eddy-current damping module 140.Electromagnetic actuators 110 comprises stator and mover, stator three-phase A winding 112, B winding 113 and C winding 114 according to phase difference 120 around on rotor frame 111, as shown in Figure 3.In order to produce desirable sinusoidal wave Magnetic flux density as far as possible at stator and mover gap, reduce teeth groove to the impact of electromagnetic actuators 110 counterelectromotive force, rotor frame 111 adopts aluminum alloy material.Permanent magnet array 116 is fixed on mover framework 115 by adhesive glue.The permanent magnet of permanent magnet array 116 puts in order as shown in Figure 3, and in figure, arrow represents magnetic direction, and four permanent magnet blocks form an electric cycle.Permanent magnet array 116 has strong magnetic field at stator and mover gap, and above permanent magnet array, magnetic intensity is weak.
Fig. 4 illustrates air-float guide rail schematic diagram, and in figure, marble guide rail 121 and 125 is surface of contact of air supporting module.Wherein air supporting module 122, air supporting module 123 and air supporting module 124 arrangement triangular in shape, the degrees of freedom in restriction locating platform Vertical direction, pitch orientation and beat direction; Air supporting module 126 and air supporting module 127 limit the degrees of freedom of locating platform substantially horizontal and yaw direction.Locating platform is made to carry out straight line motion along a direction by five air supporting modules and guide rail.Air-bearing adopts the air supporting module of porous type vacuum preloading.
As shown in Figure 5, this module copper coin 141, lower winding 142, upper winding 143 and winding frame 144 form the structure of eddy current damper module.The winding of lower winding 142 and upper winding 143 is connected in series, and makes magnetic direction from upper winding 143 to lower winding 142 or from lower winding 142 to upper winding 143, passes perpendicularly through copper coin 141.Together with copper coin 141 is fixing with the mover of locating platform, locating platform mover drives copper coin 141 to move when mobile, and the eddy current signal formed in such copper coin produces certain damping force.The size of current controlled in lower winding 143 and upper winding 142 can control the size of damping force.
The Control system architecture figure of nanopositioning stage as shown in Figure 6, comprises master controller 210, A/D conversion 220, current sensor 230, Linear Amplifer module 240, D/A conversion 250 and grating scale 260.The highi degree of accuracy grating scale of output signal 1Vpp reaches nano level resolution through segmentation, is used for the displacement of sensor nano locating platform mover.Master controller 210 adopts industrial control computer, completes the control of nanopositioning stage electric current loop, speed ring and position ring.The current signal of current sensor 230 conversion nano locating platform staor winding is voltage signal.A/D modular converter 220 adopts 18 and above high-resolution switching device to improve the control accuracy of electric current.D/A modular converter 250 is converted to analog current signal the digital current signal that master controller 210 calculates, and adopts 18 and above high-resolution switching device.Linear Amplifer module 240 carries out power amplification rear driving nanopositioning stage staor winding analog current signal, adopts Linear Amplifer module PA12 device to amplify.
More than describe preferred embodiment of the present invention in detail.Should be appreciated that the ordinary skill of related domain just design according to the present invention can make many modifications and variations without the need to creative work.Therefore, all technician in the art, all should by the determined protection domain of claims under this invention's idea on the basis of existing technology by the available technological scheme of logical analysis, reasoning, or a limited experiment.
Claims (10)
1. a Long Distances single-degree-of-freedom air supporting Magnetic driving nanopositioning stage, comprise locating platform basic machine and locating platform controller, it is characterized in that, described locating platform basic machine comprises Electromagnetic Drive actuator, air supporting guide mechanism and eddy current damper module, wherein, described Electromagnetic Drive actuator is configured to the change producing the displacement of electromagnetic force implementation platform; Described air supporting guide mechanism is configured to platform is only moved along a direction; Described eddy current damper module is configured to produce damping force, to shorten the positioning time of locating platform.
2. a kind of Long Distances single-degree-of-freedom air supporting Magnetic driving nanopositioning stage according to claim 1, it is characterized in that, described Electromagnetic Drive actuator is made up of stator and mover, and described stator is formed by three-phase windings copper wire winding, the electric phase difference of every phase winding 120 degree, adopts non iron-core structure; Described mover is made up of magnetic array, and the arrangement of described magnetic array is configured to guarantee that the side magnetic intensity towards winding is strong, and the side magnetic intensity of winding is weak dorsad; The phase place of described three-phase stator winding electrical current and size are configured to the size changing locating platform single-degree-of-freedom direction thrust.
3. a kind of Long Distances single-degree-of-freedom air supporting Magnetic driving nanopositioning stage according to claim 1, it is characterized in that, described air supporting guide mechanism comprises marble guide rail, the first air supporting module, the second air supporting module, the 3rd air supporting module, the 4th air supporting module and the 5th air supporting module; Described first air supporting module is configured to the degrees of freedom limiting locating platform Vertical direction, described second air supporting module is configured to the degrees of freedom limiting locating platform pitch orientation, described 3rd air supporting module is configured to the degrees of freedom limiting locating platform beat direction, described 4th air supporting module is configured to the degrees of freedom limiting locating platform substantially horizontal, and described 5th air supporting module is configured to the degrees of freedom limiting locating platform yaw direction.
4. a kind of Long Distances single-degree-of-freedom air supporting Magnetic driving nanopositioning stage according to claim 1, it is characterized in that, described eddy-current damping module is made up of copper coin and winding, and described copper coin is fixed on the stator of locating platform, moves with locating platform; Winding is around on silicon steel plate, and two windings form closed magnetic field; At the same speed, in controlled winding, the size of electric current is configured to the power of controlling magnetic field, thus controls the size of damping force.
5. a kind of Long Distances single-degree-of-freedom air supporting Magnetic driving nanopositioning stage according to claim 1, it is characterized in that, described locating platform controller adopts linear drive circuit to control, and comprises master controller, A/D change-over circuit, D/A change-over circuit, Linear Amplifer module, current sensor and position transducer; Described master controller is configured to run control algorithm and locating platform driving algorithm; The current signal that described A/D change-over circuit is configured to described current sensor exports is sampled, and completes locating platform current loop control; The digital current signal that described D/A change-over circuit is configured to described master controller exports is converted to analog current signal; Described Linear Amplifer module is configured to amplify described analog current signal, drives staor winding; Described current sensor is configured to gather stator current signal; Described position transducer is configured to the position gathering locating platform mover.
6. a kind of Long Distances single-degree-of-freedom air supporting Magnetic driving nanopositioning stage according to claim 2, is characterized in that, the framework of described stator adopts aluminum alloy material.
7. a kind of Long Distances single-degree-of-freedom air supporting Magnetic driving nanopositioning stage according to claim 2, it is characterized in that, described magnetic array is adhered on the framework of described stator.
8. a kind of Long Distances single-degree-of-freedom air supporting Magnetic driving nanopositioning stage according to claim 2, is characterized in that, the described magnetic array of four magnet block formation is configured to an electric cycle of formation.
9. a kind of Long Distances single-degree-of-freedom air supporting Magnetic driving nanopositioning stage according to claim 3, is characterized in that, described first air supporting module, described second air supporting module and the arrangement triangular in shape of described 3rd air supporting module.
10. a kind of Long Distances single-degree-of-freedom air supporting Magnetic driving nanopositioning stage according to claim 3, it is characterized in that, described first air supporting module, described second air supporting module, described 3rd air supporting module, described 4th air supporting module and described 5th air supporting module adopt the air-bearing of porous type vacuum preloading.
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| CN107612232A (en) * | 2017-09-27 | 2018-01-19 | 西安工程大学 | The miniature planar motor apparatus and its driving method of a kind of electromagnetic digital array of actuators |
| CN112548598A (en) * | 2020-12-03 | 2021-03-26 | 佛山市华道超精科技有限公司 | Mode switching rigid-flexible coupling motion platform and control method |
| CN112631084A (en) * | 2020-12-30 | 2021-04-09 | 安徽地势坤光电科技有限公司 | Automatic laser direct writing device |
| CN113029235A (en) * | 2021-02-25 | 2021-06-25 | 哈尔滨工业大学 | Small-stroke nanoscale motion platform and heat-related hysteresis data measuring method |
| CN114362471A (en) * | 2021-12-10 | 2022-04-15 | 浙江大学杭州国际科创中心 | Two-stage multi-degree-of-freedom space position precision stabilizing system |
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| CN114362471A (en) * | 2021-12-10 | 2022-04-15 | 浙江大学杭州国际科创中心 | Two-stage multi-degree-of-freedom space position precision stabilizing system |
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