CN101403628A - Horizontal gas/gas two-phase composite straight line reference method and apparatus based on gravity force balance - Google Patents
Horizontal gas/gas two-phase composite straight line reference method and apparatus based on gravity force balance Download PDFInfo
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- CN101403628A CN101403628A CNA2008101375305A CN200810137530A CN101403628A CN 101403628 A CN101403628 A CN 101403628A CN A2008101375305 A CNA2008101375305 A CN A2008101375305A CN 200810137530 A CN200810137530 A CN 200810137530A CN 101403628 A CN101403628 A CN 101403628A
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- 230000005484 gravity Effects 0.000 title claims abstract description 17
- 239000002131 composite material Substances 0.000 title claims abstract description 13
- 238000007430 reference method Methods 0.000 title claims description 6
- 238000000034 method Methods 0.000 abstract description 10
- 230000009977 dual effect Effects 0.000 abstract description 2
- 238000005188 flotation Methods 0.000 abstract 4
- 238000005259 measurement Methods 0.000 abstract 1
- 238000005461 lubrication Methods 0.000 description 6
- 238000010586 diagram Methods 0.000 description 3
- 230000007812 deficiency Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 230000002706 hydrostatic effect Effects 0.000 description 2
- 238000009434 installation Methods 0.000 description 2
- 239000007921 spray Substances 0.000 description 2
- 239000000956 alloy Substances 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 230000007123 defense Effects 0.000 description 1
- 230000002950 deficient Effects 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000011159 matrix material Substances 0.000 description 1
- 239000011148 porous material Substances 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 230000003068 static effect Effects 0.000 description 1
- 239000000725 suspension Substances 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
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Abstract
A horizontal gas-gas two phase composite beeline benchmark method and a device based on the gravity balance belong to the technical field of precision instruments and measurement. The method comprises the steps: a balance slideway is constructed below of an orientation slideway, which forms an open external gas support and acts on an anti-thrust plate in the lower part of a flotation guide cover, the gravity balance of the orientation slideway and the balance slideway is designed aiming at the load gravity, under the conditions of satisfying the load gravity of the balance slideway, and the gas film supporting stiffness arrives the maximum or is in the confirmed range of the gas film supporting stiffness; the device comprises the anti-thrust plate fixedly connected with lower part of the flotation guide cover, an anti-thrust flotation dual surface is formed between the anti-thrust plate and the balance slideway, the anti-thrust plate is provided with a throttle structure facing to the balance slideway which is parallel to the orientation slideway. The invention leads the flotation guide cover to have excellent stability, the slideway load capability and the supporting stiffness are greatly improved, the high linear accuracy of the slideway under big load and big stroke is ensured, the structure is simple, and the application scope is wide.
Description
Technical field
The invention belongs to exact instrument and field of measuring technique, particularly a kind of horizontal gas/gas two-phase composite straight line reference method and device based on gravitational equilibrium.
Background technology
Along with the fast development of advanced person's manufacturing and measuring technique, the horizontal linear datum that uses on more and more large-scale, accurate process equipment and the surveying instrument requires also will possess big stroke and high load capability when having high guiding accuracy.Though traditional sliding friction guideway load-bearing capacity is big, guiding accuracy is low because of existing, autokinesis difference and defective such as easily creep, and is replaced by the gas lubrication guide rail gradually.The horizontal linear datum that generally uses in high-end instrument and equipment mostly is the lubricated guide rail of pressurized air at present, but exist following two problems in actual applications: the one, the version of guide rail is the beam with both ends built-in structure, be that guiding rail is in the two ends fixed bearing in working order down, middle vacant state, load gravity all acts on the guiding rail, when guide rail is in big span, the flexural deformation (dotted line is depicted as guiding rail flexural deformation synoptic diagram among Fig. 1) of guiding rail very easily takes place during high capacity, and such distortion mostly is plastic yield, directly destroys the operating accuracy of guide rail; The 2nd, very little and gas has compressive characteristics because of gas viscosity, cause vertical direction gas support stiffness less relatively, load-bearing capacity is little, the vertical direction air-film thickness sharply reduces when bearing excessive load or impact is arranged, cause that very easily the air supporting guide pin bushing directly contacts with guiding rail, " seize " phenomenon takes place, badly damaged guide rail structure.The problems referred to above the earth to the utmost has limited the use of horizontal gas lubrication guide rail in big stroke, high capacity workplace.
From improving the angle of lubricated guide rail support rigidity of pressurized air and load-bearing capacity, novel air hydrostatic slideways such as passive compensation mould guide rail, the inner throttling aerostatic guide way of active, surface throttle aerostatic guide way, static pressure control flow controller aerostatic guide way, automatically controlled throttling aerostatic guide way, exhaust control aerostatic guide way have been put forward at present.These methods all are to take some control measure on guide rail structure, and with acquisition higher stiffness or rigidity controllable, but their structure is very complicated, and control and adjusting are also more loaded down with trivial details; In addition, these methods all do not solve the flexural deformation problem of big stroke, heavy load or super large load lower guideway crossbeam.
The novel air hydrostatic slideway of the employing porous matter throttling that the National University of Defense technology proposes, its ultimate principle is to utilize the microstructure of porous material to carry out throttling, the shallow trench that while is connected with porous matter flow controller in the guide rail surface setting, utilize the impedance of groove to form second throttle, can reach the purpose that improves air guide rail rigidity and load-bearing capacity, but this structure is blocked easily, and can't solve equally also that heavy load is carried and the flexural deformation problem of big stroke lower guideway crossbeam.
Summary of the invention
Purpose of the present invention is exactly the problem that exists at above-mentioned prior art, a kind of horizontal gas/gas two-phase composite straight line reference method based on gravitational equilibrium is proposed, on closed interior gas supporting basis, make up the extraneous gas supporting of an open type, and at bearing the load size, the rigidity and the load-bearing capacity of this extraneous gas supporting of appropriate design, make it balance the acting force that heavy load gravity or large impact produce, reach and significantly improve horizontal gas lubrication guide rail rigidity and load-bearing capacity, reduce or eliminate the diastrophic purpose of guiding rail under the heavy load.The present invention also provides a kind of horizontal gas/gas two-phase composite straight line standard apparatus based on gravitational equilibrium based on said method.
Above-mentioned purpose realizes by following technical scheme:
A kind of horizontal gas/gas two-phase composite straight line reference method based on gravitational equilibrium specifically may further comprise the steps:
A, structure guiding rail form linear datum, and this benchmark is realized by the lubricated guide rail of the totally-enclosed horizontal gas-static of a conventional type;
B, below described guiding rail, make up the balance guide rail, form the supporting of open type extraneous gas;
C, this open type extraneous gas supporting role are on the anti-thrust plate of air supporting guide pin bushing bottom, and at load gravity W
AlwaysCarry out the gravitational equilibrium design of guiding rail and balance guide rail;
D, the supply gas pressure of guiding rail is adjusted to a certain fixed value P between 0.3～0.5MPa
Lead, and the air-film thickness H when finding its support stiffness maximum according to pairing under this pressure " rigidity-air-film thickness " relation curve
Lead
E, again by P
LeadCorresponding " load-air-film thickness " relation curve obtains the load-bearing capacity W of guiding rail this moment
Lead
F, according to W
AlwaysThe load gravity that the balance guide rail is born is designed to: W
Flat=W
Always-W
Lead
G, in 0.4～1.5MPa scope, adjust the supply gas pressure P of balance guide rail
Flat, satisfying the W that is carried as of balance guide rail
FlatUnder the condition, make its air film support stiffness reach maximal value or be in this air film support stiffness and determine in the scope.
A kind of horizontal gas/gas two-phase composite straight line standard apparatus based on gravitational equilibrium, comprise air supporting guide pin bushing, guiding rail, supporting base and balance guide rail, wherein air supporting guide pin bushing and guiding rail are formed oriention benchmark, form the supporting of open type extraneous gas between air supporting guide pin bushing and the balance guide rail, this device also comprises the anti-thrust plate that is fixed on the air supporting guide pin bushing bottom, in the open type extraneous gas supporting that this anti-thrust plate forms, form thrust air supporting idol face between anti-thrust plate and the balance guide rail between air supporting guide pin bushing and balance guide rail; Anti-thrust plate is provided with the throttle structure B towards the balance guide rail; The balance guide rail is parallel to guiding rail and arranges.
Throttle structure B on the anti-thrust plate and the throttle structure A on the air supporting guide pin bushing adopt separately gas-supplying structure separately, perhaps adopt to be communicated with the unified gas-supplying structure in back; Throttle structure B on the anti-thrust plate adopts orifice restriction, slit throttling or porous matter throttle structure, perhaps adopts and mixes throttle structure.
The present invention has following characteristics and beneficial effect:
1, the inventive method is at the applied load size, the supporting of structure dual gas, and the gas suspension power by appropriate design guiding rail and balance guide rail, when balancing load gravity, the extraneous gas that internal gas supports and the balance guide rail the forms supporting that guiding rail is formed reaches maximum support stiffness simultaneously, make air supporting guide pin bushing and load placed on it have excellent stability, this is one of innovative point of difference prior art;
2, apparatus of the present invention are by configuration balance guide rail below guiding rail, foundation is to the balancing of heavy load or super large load, effectively balance load gravity, can the load-bearing capacity of guide rail and support stiffness be improved more than the several times according to practical situations, overcome the deficiency that existing horizontal gas lubrication guide rail rigidity is little, carrying is low, this be the difference prior art innovative point two;
3, the gas equilibrium supporting that the balance guide rail forms among the present invention has with the air supporting guide pin bushing moves and synchronization-moving characteristic, promptly be equivalent to below the air supporting guide pin bushing, install one " mobile supporting base ", can overcome the deficiency of existing gas lubrication guide rail center section poor rigidity, significantly reduce or eliminate the flexural deformation of when heavy duty guiding rail, guarantee that guide rail still has high straight line precision under heavy load or big impact, this be the difference prior art innovative point three;
In addition, the present invention is simple in structure, design and installation simple and convenient, and the scope of application is extensive.
Description of drawings
Fig. 1 is existing horizontal gas lubrication guiding rail flexural deformation synoptic diagram;
Fig. 2 is the horizontal gas/gas two-phase composite straight line standard apparatus structural representation based on gravitational equilibrium;
Fig. 3 is that the A-A of Fig. 2 is to cut-open view;
Fig. 4 is an anti-thrust plate three-dimensional structure synoptic diagram;
Fig. 5 is that the B-B of Fig. 4 is to cut-open view;
Fig. 6 is that the C-C of Fig. 4 is to cut-open view;
Fig. 7 is the structural representation when being communicated with of the throttle structure on anti-thrust plate and the air supporting guide pin bushing.
Among the figure: 1, air supporting guide pin bushing; 2, guiding rail; 3, supporting base; 4, anti-thrust plate; 5, balance guide rail; 6, throttle structure A; 7, air supply pipe A; 8, load; 9, air supply pipe B; 10, throttle structure B; 11, discharge chamber; 12, vent port; 13, transverse air channel; 14, vertical air flue.
Embodiment
Below in conjunction with accompanying drawing embodiments of the invention are elaborated.
As shown in Figure 2, air supporting guide pin bushing 1 and guiding rail 2 constitute the basic structure of the lubricated guide rail of horizontal pressurized air, wherein the both ends of guiding rail 2 are fixed on the supporting base 3, air supporting guide pin bushing 1 is fitted on the guiding rail 2, the two surface that cooperatively interacts is through precise finiss and assembling, and the interior support air film of formation sealing between matching surface.As shown in Figure 3, around air supporting guide pin bushing 1, be provided with throttle structure A 6, be connected with air supply pipe A 7 on the throttle structure A 6, devices such as external pressure governor, oil-water separation system, for guiding rail 2 provides required pressed gas, pressed gas sprays to the corresponding surface of guiding rail 2, forms gas supporting and lubricated, drives air supporting guide pin bushing 1 and load 8 placed on it then along guiding rail 2 tangential movements under motor etc. drives.
The anti-thrust plate 4 that is connected in the bottom of air supporting guide pin bushing 1 as shown in Figure 4, which is provided with throttle structure B 10, this throttle structure B 10 is symmetrically distributed with respect to discharge chamber 11, every row is provided with 8 throttle structures, establishes 4 rows altogether, and has transverse air channel 13 and the vertical air flue 14 of four rows; As Fig. 5, shown in Figure 6, transverse air channel 13 and vertical air flue 14 all connect throttle structure B 10, and adopting whole mode of communicating is guiding rail 2 air feed, guarantees each air feed point pressure equilibrium; The middle part of discharge chamber 11 has the vent port 12 of perforation, helps effluent air is entered in the atmosphere fast, avoids phenomenon generations such as exciting; Air supply pipe B 9 inserts in vertical air flue 14, provides the balance guide rail required pressed gas; The size of anti-thrust plate 4 is by the distribution of load weight and throttle structure B 10 and be provided with definite.
The principle of work of this device and the course of work are: at the gravity W of load 8
AlwaysCarry out the gravitational equilibrium design of guiding rail 2 and balance guide rail 5, at first pressed gas is led to the air supporting workplace that throttle structure A 6 sprays to guiding rail 2, and supply gas pressure is adjusted to a certain fixed value P between 0.3～0.5MPa by air supply pipe A 7
Lead, the air-film thickness H when finding its support stiffness for maximum according to pairing under this pressure " rigidity-air-film thickness " relation curve
LeadAgain by P
LeadCorresponding " load-air-film thickness " relation curve obtains the load-bearing capacity W of guiding rail 2 this moment
LeadGravity W according to load 8
AlwaysThe load gravity that balance guide rail 5 is born is designed to: W
Flat=W
Always-W
LeadIn 0.4～1.0MPa scope, adjust the supply gas pressure P of balance guide rail 5 then
Flat, satisfying the W that is carried as of balance guide rail 5
FlatUnder the condition, make its air film support stiffness reach maximal value or be in this air film support stiffness and determine in the scope, wherein P
FlatBy the pressure governor control that links to each other with air supply pipe B 9; P
LeadAnd P
FlatControl admission pressure separately separately.
Because balance guide rail 5 under this state and guiding rail 2 are except the gravity that balances load 8, also obtained maximum support stiffness simultaneously, even therefore when air supporting guide pin bushing 1 was subjected to big impact, this structure also can effectively suppress, and avoids the infringement to guiding rail 2.Its course of work is: when percussive action has been destroyed air supporting guide pin bushing 1 original equilibrium state, air supporting guide pin bushing 1 departs from original equilibrium position, Feng Bi interior support and the open type external support pressure of being set up and rigidity rise rapidly at short notice simultaneously, till the balance-impact effect, make air supporting guide pin bushing 1 have very high impact stability.
The present invention also can adopt the unified gas-supplying structure in connection back with throttle structure B 10 on the anti-thrust plate 4 and the throttle structure A on the air supporting guide pin bushing 16, as shown in Figure 7.
The horizontal linear datum that makes up based on the present invention has been set up the balancing to heavy load or super large load, effectively balance of the influence of load gravity to guiding rail 2, and can design according to actual operating position, the load-bearing capacity and the support stiffness of guide rail are improved more than the several times, be particularly useful in the high precision large-sized equipment and instrument of big stroke, heavy load.
In addition, the present invention improves the support stiffness and the load-bearing capacity of guide rail because of adopting the auxilliary method that adds the extraneous gas supporting, and therefore the guiding accuracy to original guiding rail 2 does not have influence substantially, and simple in structure, and design and installation are easy.
Claims (4)
1, a kind of horizontal gas/gas two-phase composite straight line reference method based on gravitational equilibrium specifically may further comprise the steps:
A, structure guiding rail form linear datum, and this benchmark is realized by the lubricated guide rail of the totally-enclosed horizontal gas-static of a conventional type;
B, below described guiding rail, make up the balance guide rail, form the supporting of open type extraneous gas; It is characterized in that:
C, this open type extraneous gas supporting role are on the anti-thrust plate of air supporting guide pin bushing bottom, and at load gravity W
AlwaysCarry out the gravitational equilibrium design of guiding rail and balance guide rail;
D, the supply gas pressure of guiding rail is adjusted to 0.3～0.5MP
aBetween a certain fixed value P
Lead, and the air-film thickness H when finding its support stiffness maximum according to pairing under this pressure " rigidity-air-film thickness " relation curve
Lead
E, again by P
LeadCorresponding " load-air-film thickness " relation curve obtains the load-bearing capacity W of guiding rail this moment
Lead
F, according to W
AlwaysThe load gravity that the balance guide rail is born is designed to: W
Flat=W
Always-W
Lead
G, at 0.4～1.5MP
aAdjust the supply gas pressure P of balance guide rail in the scope
Flat, satisfying the W that is carried as of balance guide rail
FlatUnder the condition, make its air film support stiffness reach maximal value or be in this air film support stiffness and determine in the scope.
2, a kind of horizontal gas/gas two-phase composite straight line standard apparatus based on gravitational equilibrium, comprise air supporting guide pin bushing (1), guiding rail (2), supporting base (3) and balance guide rail (5), wherein air supporting guide pin bushing (1) and guiding rail (2) are formed oriention benchmark, form the supporting of open type extraneous gas between air supporting guide pin bushing (1) and the balance guide rail (5), it is characterized in that this device also comprises the anti-thrust plate (4) that is fixed on air supporting guide pin bushing (1) bottom, this anti-thrust plate (4) is positioned at the open type extraneous gas supporting that forms between air supporting guide pin bushing (1) and the balance guide rail (5), forms thrust air supporting idol face between anti-thrust plate (4) and the balance guide rail (5); Anti-thrust plate (4) is provided with the throttle structure B (10) towards balance guide rail (5); Balance guide rail (5) is parallel to guiding rail (2) and arranges.
3, a kind of horizontal gas/gas two-phase composite straight line standard apparatus according to claim 2 based on gravitational equilibrium, it is characterized in that throttle structure B (10) and the throttle structure A (6) on the air supporting guide pin bushing (1) on the anti-thrust plate (4) adopt separately gas-supplying structure separately, perhaps adopt to be communicated with the unified gas-supplying structure in back.
4, a kind of horizontal gas/gas two-phase composite straight line standard apparatus according to claim 2 based on gravitational equilibrium, it is characterized in that the throttle structure B (10) on the anti-thrust plate (4) adopts orifice restriction, slit throttling or porous matter throttle structure, perhaps adopts and mixes throttle structure.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN200810137530A CN100575887C (en) | 2008-11-14 | 2008-11-14 | Horizontal gas/gas two-phase composite straight line reference method and device based on gravitational equilibrium |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN200810137530A CN100575887C (en) | 2008-11-14 | 2008-11-14 | Horizontal gas/gas two-phase composite straight line reference method and device based on gravitational equilibrium |
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| CN101403628A true CN101403628A (en) | 2009-04-08 |
| CN100575887C CN100575887C (en) | 2009-12-30 |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103047358A (en) * | 2012-12-19 | 2013-04-17 | 哈尔滨工业大学 | Eddy-current damping vibration isolator with coplanar air floatation orthogonal decoupling function and angular decoupling function by aid of sliding joint bearing |
| CN103047357A (en) * | 2012-12-19 | 2013-04-17 | 哈尔滨工业大学 | Double-layer orthogonal air floatation decoupling and sliding knuckle bearing angular decoupling eddy-current damping vibration isolator |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104400763B (en) * | 2014-10-29 | 2015-10-07 | 哈尔滨工业大学 | Gas lubrication and frictional damping combined type high rigidity high stability two-dimension adjustment workbench |
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2008
- 2008-11-14 CN CN200810137530A patent/CN100575887C/en not_active Expired - Fee Related
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103047358A (en) * | 2012-12-19 | 2013-04-17 | 哈尔滨工业大学 | Eddy-current damping vibration isolator with coplanar air floatation orthogonal decoupling function and angular decoupling function by aid of sliding joint bearing |
| CN103047357A (en) * | 2012-12-19 | 2013-04-17 | 哈尔滨工业大学 | Double-layer orthogonal air floatation decoupling and sliding knuckle bearing angular decoupling eddy-current damping vibration isolator |
| CN103047357B (en) * | 2012-12-19 | 2014-12-24 | 哈尔滨工业大学 | Double-layer orthogonal air floatation decoupling and sliding knuckle bearing angular decoupling eddy-current damping vibration isolator |
| CN103047358B (en) * | 2012-12-19 | 2014-12-24 | 哈尔滨工业大学 | Eddy-current damping vibration isolator with coplanar air floatation orthogonal decoupling function and angular decoupling function by aid of sliding joint bearing |
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| Publication number | Publication date |
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| CN100575887C (en) | 2009-12-30 |
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Effective date of registration: 20190617 Address after: 150000 Heilongjiang Harbin Dalian economic and Trade Zone, the North Road and Xingkai Road intersection Patentee after: HIT ROBOT GROUP Co.,Ltd. Address before: 150001 No. 92 West straight street, Nangang District, Heilongjiang, Harbin Patentee before: Harbin Institute of Technology |
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Effective date of registration: 20201119 Address after: 241 Renmin East Road, Nanmo Town, Hai'an County, Nantong City, Jiangsu Province, 226000 Patentee after: NANTONG MINGGUANG ELECTRIC WIRE Co.,Ltd. Address before: Room 301, building 2, No.40 xiayuangang East Street, Yuangang village, Tianhe District, Guangzhou, Guangdong Province, 510000 (office only) Patentee before: Guangzhou Boyi Intellectual Property Operation Co.,Ltd. Effective date of registration: 20201119 Address after: Room 301, building 2, No.40 xiayuangang East Street, Yuangang village, Tianhe District, Guangzhou, Guangdong Province, 510000 (office only) Patentee after: Guangzhou Boyi Intellectual Property Operation Co.,Ltd. Address before: 150000 Heilongjiang Province, Harbin City Economic Development Zone haping Road District Dalian road and Xingkai road junction Patentee before: HIT ROBOT GROUP Co.,Ltd. |
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Granted publication date: 20091230 |