CN207077197U - A kind of levelling precision closed hydrostatic slideway - Google Patents

A kind of levelling precision closed hydrostatic slideway Download PDF

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Publication number
CN207077197U
CN207077197U CN201720307513.6U CN201720307513U CN207077197U CN 207077197 U CN207077197 U CN 207077197U CN 201720307513 U CN201720307513 U CN 201720307513U CN 207077197 U CN207077197 U CN 207077197U
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CN
China
Prior art keywords
oil
workbench
guide rail
oil cavitie
cavitie
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Expired - Fee Related
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CN201720307513.6U
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Chinese (zh)
Inventor
吴斌
陈亚兴
牛成诚
娄建鹏
冀承成
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Jiangsu Harbaugh Precision Machinery Technology Co Ltd
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Jiangsu Harbaugh Precision Machinery Technology Co Ltd
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Priority to CN201720307513.6U priority Critical patent/CN207077197U/en
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Expired - Fee Related legal-status Critical Current
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Abstract

A kind of levelling precision closed hydrostatic slideway is the utility model is related to, mainly including workbench, guide rail lower plate and base;The workbench is T-shaped;The guide rail lower plate includes lower-left plate and bottom right plate, is fixedly connected respectively with workbench lower surface both sides;Workbench top side offers four oil inlets;The upper and lower surface of the guide rail lower plate rear and front end respectively opens up an oil pocket, and the workbench offers the oil duct for connecting oil inlet and oil pocket with intralamellar part under guide rail, and each oil inlet correspondingly connects same one end, two oil pockets in same level;The base is the U-typed that openend is bent to central axis;In the groove that the openend of the base is formed embedded in workbench and guide rail lower plate.Guide rail oil inlet is arranged to distributed by the utility model, can be offset tilting moment conveniently by with adjusting each oil inlet charge oil pressure, be realized the accurate leveling of workbench.

Description

A kind of levelling precision closed hydrostatic slideway
Technical field
It the utility model is related to Ultra-precision machining technical field, more particularly to a kind of levelling precision enclosed liquid is quiet Press guide rail.
Background technology
Ultra-precision machining technology is the advanced manufacturing technology to grow up from the 1960s, and the processing of part is smart Precision of the degree depending on ultra-precision machine tool.Ultraprecision Machining fully utilize measurement, SERVO CONTROL, optics, environmental Kuznets Curves, The hard-core technology achievement in the fields such as sensing, hydraulic pressure.Ultraprecision Machining field at present, Germany, the U.S., Japan, Britain plus Construction equipment passes through the commercialization course of more than 20 years, and the reliability and maturity of product are very high, domestic technique strength and state's external memory In larger gap, import can only be relied on, but by the limitation such as technical know-how and trade block.As " made in China 2025 " is general The it is proposed of thought, the design and R&D work of ultra-precision machine tool not only become the growth point of new round economy, more bear and revitalize National industry, the important task for realizing revival of nationhood.
Hydrostatic slideway is the basic component of ultra-precision machine tool, is directly decide between each linear motion platform of lathe Relative motion precision and relative positional accuracy, at present market-oriented external Ultra-precision Turning equipment use fluid pressure Guide rail coordinates linear electric motors to realize to cutter, the carrying of workpiece and driving function.It uses Liquid Static-Press Technique, due to ultraprecise Cutting force is smaller, and the high damping characteristic of liquid and the homogenization of oil film help to obtain the machining accuracy of higher amount level.
Hydrostatic slideway is a kind of equipment for bearing load, and the friction type between contact surface is changed to liquid and rubbed by it Wipe, greatly reduce frictional resistance during relative motion, and because fluid film has homogenization, make hydrostatic slideway Kinematic accuracy is higher by least one magnitude of common rail.
Load generally is reduced to be applied to the power and tilting moment of workbench barycenter by Guide Rail Design when calculating.Actual condition Lower load is frequently not to be evenly applied on hydrostatic slideway, but because closed guideway has high rigidity, high-bearing capacity Characteristic, the load on the guide rail of ultra-precision machine tool is smaller in addition, therefore tilting moment adds to ultraprecise caused by load over centre The influence of work precision can be ignored.But for some application scenarios, if causing guide rail to be sent out when running into very big tilting moment It is raw to tilt, but when requiring that the surfaces of movement parts keeps very high levelness again simultaneously, current design is just difficult to .
Utility model content
In order to solve the above-mentioned technical problem, design is a kind of can adjust guide rail upper table face in the case of different loads The hydrostatic slideway of levelness, the utility model provide following technical scheme:
A kind of levelling precision closed hydrostatic slideway, including workbench, guide rail lower plate and base;The workbench It is T-shaped;The guide rail lower plate includes lower-left plate and bottom right plate, is fixedly connected respectively with workbench lower surface both sides;It is described Workbench top side offers four oil inlets;The upper and lower surface of the guide rail lower plate rear and front end respectively opens up an oil pocket, Preceding upper oil cavitie, preceding lower oil cavitie, rear upper oil cavitie, rear lower oil cavitie, the workbench and guide rail lower plate are referred to as according to position relationship Inside offers the oil duct of connection oil inlet and oil pocket, and each oil inlet correspondingly connects same one end, two in same level Individual oil pocket;The base is the U-typed that openend is bent to central axis;The openend of the base is embedded in workbench and guide rail In the groove that lower plate is formed.After the logical oil of guide rail, power is acted by oil pocket, the pressure of fluid in the size and oil pocket of active force It is relevant with area.When load changes, tilting moment is offset by adjusting the charge oil pressure of four oil inlets, realizes work The accurate leveling of platform, the forward and backward height difference of work top are less than 0.5 μm.
Further, the guide rail lower plate is fixedly connected by bolt with workbench lower surface.
Further, the preceding lower oil cavitie, preceding upper oil cavitie, rear upper oil cavitie, the depth of rear lower oil cavitie are consistent, and described front lower The volume of oil pocket is more than the volume of preceding upper oil cavitie, the volume of rear upper oil cavitie is more than the volume of rear lower oil cavitie.When guide rail front end is inclined When covering moment loading and sinking, the oil pocket size of preceding lower oil cavitie is more than preceding upper oil cavitie so as to produce upward effect to sports platform Power, the oil pocket size of rear upper oil cavitie are more than rear lower oil cavitie so as to produce downward active force to sports platform, done so used in workbench The active force of rear and front end produces the torque opposite with load so as to tentatively eliminate the sinking held in face of sports platform.
Further, the volume ratio of the preceding lower oil cavitie and preceding upper oil cavitie is more than the volume of rear upper oil cavitie and rear lower oil cavitie Than.
The beneficial effects of the utility model are:By way of branch fuel feeding so that the charge oil pressure of different oil pockets point It is not adjustable, the mesh of table top leveling will be floated in the case of finally realizing big tilting moment on guide rail by adjusting oil pocket pressure 's.This programme structure design is simple, easily adjusts, suitable for bearing larger tipping load Ultra-precision Turning field.
Brief description of the drawings
Fig. 1, structural representation of the present utility model.
Fig. 2, oil duct of the present utility model and oil pocket schematic diagram.
In figure, direction shown in arrow is front end, 1, workbench, 11, oil inlet, 21, lower-left plate, 22, bottom right plate, 231, preceding Upper oil cavitie, 232, preceding lower oil cavitie, 233, rear upper oil cavitie, 234, rear lower oil cavitie, 24, oil duct, 3, base.
Embodiment
A kind of levelling precision closed hydrostatic slideway as shown in Figure 1-2, including workbench 1, guide rail lower plate and Base 3;The workbench 1 is T-shaped;The guide rail lower plate include lower-left plate 21 and bottom right plate 22, respectively by bolt with The lower surface both sides of workbench 1 are fixedly connected;The top side of workbench 1 offers four oil inlets 11;The guide rail lower plate The upper and lower surface of rear and front end respectively opens up an oil pocket, according to position relationship be referred to as before upper oil cavitie 231, preceding lower oil cavitie 232, Upper oil cavitie 233, rear lower oil cavitie 234 afterwards, the workbench 1 offers with intralamellar part under guide rail connects oil inlet 11 and oil pocket Oil duct 24, each oil inlet 11 is corresponding to connect same one end, two oil pockets in same level;The base 3 is openend The U-typed bent to central axis;In the groove that the openend of the base 3 is formed embedded in workbench 1 and guide rail lower plate.Guide rail After logical oil, power is acted by oil pocket, the size of active force is relevant with the pressure and area of fluid in oil pocket.Load becomes During change, tilting moment is offset by adjusting the charge oil pressure of four oil inlets 11, realizes the accurate leveling of workbench 1, is worked The forward and backward height difference in the face of platform 1 is less than 0.5 μm.
The preceding lower oil cavitie 232, preceding upper oil cavitie 231, rear upper oil cavitie 233, the depth of rear lower oil cavitie 234 are consistent and described The volume of preceding lower oil cavitie 232 is more than the volume of preceding upper oil cavitie 231, the volume of rear upper oil cavitie 233 is more than the body of rear lower oil cavitie 234 Product.When guide rail front end is sunk by tilting moment effect, the oil pocket size of preceding lower oil cavitie 232 be more than preceding upper oil cavitie 231 from And upward active force is produced to sports platform, the oil pocket size of rear upper oil cavitie 233 is more than rear lower oil cavitie 234 so as to be produced to sports platform Downward active force, do so the active force used in the rear and front end of workbench 1 and produce the torque opposite with load so as to tentatively disappear Except the sinking held in face of sports platform.
The volume ratio of the preceding lower oil cavitie 232 and preceding upper oil cavitie 231 is more than the body of rear upper oil cavitie 233 and rear lower oil cavitie 234 Product ratio.
During work, to the fuel feeding of oil inlet 11 of workbench 1, hydraulic oil eventually enters into each oil of guide rail lower plate through oil channel 24 In chamber, the hydraulic oil in oil pocket acts power to base 3 and then floats workbench 1.Toppled clockwise if produced During torque, increase connection front end upper surface oil pocket, rear end lower surface oil pocket oil inlet 11 charge oil pressure, front end following table therewith Face oil pocket, the increase of rear end upper surface oil pocket pressure, produce anticlockwise torque and offset clockwise topple.If production During raw counter clockwise direction tilting moment, increase connection front underside oil pocket, rear end upper surface oil pocket oil inlet 11 fuel feeding The pressure increase of pressure, therewith front end upper surface oil pocket, rear end lower surface oil pocket, produces clockwise torque and offsets the inverse time Topple in pin direction.
Using above-mentioned foundation the utility model desirable embodiment as enlightenment, pass through above-mentioned description, relevant staff Various changes and amendments can be carried out in the range of without departing from this item utility model technological thought completely.This item is practical New technical scope is not limited to the content on specification, it is necessary to determines that its is technical according to right Scope.

Claims (3)

  1. A kind of 1. levelling precision closed hydrostatic slideway, it is characterised in that:Including workbench, guide rail lower plate and base; The workbench is T-shaped;The guide rail lower plate includes lower-left plate and bottom right plate, fixed respectively with workbench lower surface both sides Connection;Workbench top side offers four oil inlets;The upper and lower surface of the guide rail lower plate rear and front end respectively opens up One oil pocket, preceding upper oil cavitie, preceding lower oil cavitie, rear upper oil cavitie, rear lower oil cavitie are referred to as according to position relationship, the workbench with Intralamellar part offers the oil duct of connection oil inlet and oil pocket under guide rail, and each oil inlet correspondingly connects same one end, same level Two oil pockets on face;The base is the U-typed that openend is bent to central axis;The openend of the base is embedded in work In the groove that platform and guide rail lower plate are formed;The preceding lower oil cavitie, preceding upper oil cavitie, rear upper oil cavitie, the depth of rear lower oil cavitie are consistent, and The volume of the preceding lower oil cavitie is more than the volume of preceding upper oil cavitie, the volume of rear upper oil cavitie is more than the volume of rear lower oil cavitie.
  2. A kind of 2. levelling precision closed hydrostatic slideway as claimed in claim 1, it is characterised in that:The guide rail lower plate It is fixedly connected by bolt with workbench lower surface.
  3. A kind of 3. levelling precision closed hydrostatic slideway as claimed in claim 1, it is characterised in that:The preceding lower oil cavitie It is more than the volume ratio of rear upper oil cavitie and rear lower oil cavitie with the volume ratio of preceding upper oil cavitie.
CN201720307513.6U 2017-03-28 2017-03-28 A kind of levelling precision closed hydrostatic slideway Expired - Fee Related CN207077197U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201720307513.6U CN207077197U (en) 2017-03-28 2017-03-28 A kind of levelling precision closed hydrostatic slideway

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201720307513.6U CN207077197U (en) 2017-03-28 2017-03-28 A kind of levelling precision closed hydrostatic slideway

Publications (1)

Publication Number Publication Date
CN207077197U true CN207077197U (en) 2018-03-09

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108817993A (en) * 2018-08-09 2018-11-16 中国工程物理研究院机械制造工艺研究所 A kind of vertical liquid hydrostatic slideway servo feed system
CN112692592A (en) * 2019-10-22 2021-04-23 固安航天兴邦机械制造有限公司 Accurate high strength slip table

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108817993A (en) * 2018-08-09 2018-11-16 中国工程物理研究院机械制造工艺研究所 A kind of vertical liquid hydrostatic slideway servo feed system
CN112692592A (en) * 2019-10-22 2021-04-23 固安航天兴邦机械制造有限公司 Accurate high strength slip table

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CF01 Termination of patent right due to non-payment of annual fee

Granted publication date: 20180309

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