CN103047356B - Electromagnetic damping zero-rigidity vibration isolator with flexible film for angular decoupling - Google Patents
Electromagnetic damping zero-rigidity vibration isolator with flexible film for angular decoupling Download PDFInfo
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- CN103047356B CN103047356B CN201210575220.8A CN201210575220A CN103047356B CN 103047356 B CN103047356 B CN 103047356B CN 201210575220 A CN201210575220 A CN 201210575220A CN 103047356 B CN103047356 B CN 103047356B
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Abstract
The invention belongs to the technical field of precision vibration isolation and discloses an electromagnetic damping zero-rigidity vibration isolator with a flexible film for angular decoupling. A lower mounting plate and a sleeve of a vibration isolator body are lubricated and supported through a pneumatic flotation face, and attenuation of vibration energy and improvement of positioning stability are realized through an electromagnetic damper. Angular motion freedom degree between an upper mounting plate and the lower mounting plate is decoupled through the flexible film, and a voice coil motor, a displacement sensor, a limiting switch, a controller and a drive form a position closed loop feedback control system to precisely control relative position of the upper mounting plate and the lower mounting plate. The electromagnetic damping zero-rigidity vibration isolator has the advantages of three-dimensional zero rigidity, high positioning precision and angular decoupling, extremely low inherent frequency and outstanding ultralow-frequency vibration isolation performance can be obtained, and accordingly the problem of high-performance vibration isolation in ultra precise measurement instruments and processing equipment, especially step scanning photoetching machines can be effectively solved.
Description
Technical field
The invention belongs to accurate vibration isolation technical field, relate generally to the electromagnetic damping Zero-rigidity vibration isolator of a kind of flexible membrane angle decoupling zero.
Background technique
Along with improving constantly of Ultra-precision Turning and measuring accuracy, ambient vibration becomes the key factor that restriction Ultra-precision Turning equipment improves with surveying instrument precision and performance.Especially step-by-step scanning photo-etching device is the vlsi circuit process unit of representative, technology-intensive degree and complexity high, key technical index all reaches the limit of prior art, represent the highest level of Ultra-precision Turning equipment, precision isolation system becomes the core key technology in this type of equipment; The live width of step-by-step scanning photo-etching device has reached 22nm and following, silicon chip positioning precision and alignment precision all reach a few nanometer, and work stage movement velocity reaches more than 1m/s, work stage acceleration reaches tens times of gravity accleration, and this proposes new challenge to existing vibration isolation technique.First, lithography machine needs for metering system and photoetched object lens provide the working environment of " super quiet ", need again to drive simultaneously work stage at full speed with High acceleration motion, this proposes extremely harsh requirement to the anti-vibration performance of vibrating isolation system, and the natural frequency in its three directions all needs to reach below 1Hz; Secondly, relative position between each parts of lithography machine, the distance of such as photoetched object lens and silicon chip surface, all there is very strict requirement, and under the control being in position closed loop feedback control system, require that the relative positional accuracy between the upper and lower mounting plate of vibration isolator reaches 10 μm of magnitudes, the positioning precision of traditional vibration isolator can not meet the demands far away.
According to theory of vibration isolation, the natural frequency of passive type vibration isolator is directly proportional to rigidity, be inversely proportional to load quality, therefore, under the prerequisite that load quality is certain, the rigidity reducing vibration isolator is the effective way reducing natural frequency, improve low frequency and superlow frequency vibration isolating performance.There are the intrinsic contradictions of static bearing capacity and rigidity in the vibration isolator of the forms such as conventional air bellows, restrict by the factor such as material behavior, structural rigidity simultaneously, will reduce its rigidity, especially level further very difficult to rigidity.For this problem, " pendulum " formula structure is incorporated in air cushion shock absorber by researcher, reaches object (the 1.Nikon Corporation.Vibration Isolator With Low Lateral Stiffness. U.S. Patent Publication No.: US20040065517A1 reducing vibration isolator horizontal rigidity; 2.U.S.Philips Corporation.Positioning Device with a Force Actuator System for Compensating Center-of-gravity Displacements, and Lithographic Device Provided with Such A Positioning Device. U.S. Patent number: US005844664A).The method can reduce the horizontal rigidity of air cushion shock absorber to a certain extent, promotes its low frequency vibration isolation performance.The method Problems existing is: 1) restrict by material behavior and structural rigidity, the vertical limited extent reduced to rigidity with level of vibration isolator; 2) the vertical and level of air cushion shock absorber is all very poor to positioning precision, cannot meet the requirement of photoetching process; 3) lower horizontal rigidity to be reached and need larger pendulum length, cause vibration isolator height excessive, easily string membrane resonance occurs, poor stability.
By visible to the analysis of existing air cushion shock absorber technological scheme, existing air cushion shock absorber is difficult to meet the requirement of lithography machine to ultralow rigidity and high position precision.IDE company of Germany proposes a kind of vibration isolator technological scheme (1.Integrated Dynamics Engineering GmbH.Isolatorgeometrie Eines Schwingungsisolationssystem. european patent number: EP1803965A2 of abandoning tradition rubber air spring; 2.Integrated Dynamics Engineering GmbH.Schwingungsisolationssystem Mit Pneumatischem Tiefpassfilter. european patent number: EP1803970A2; 3.Integrated Dynamics Engineering GmbH.Air Bearing with Consideration of High-Frequency Resonances. U.S. Patent Publication No.: US20080193061A1).Program employing is vertical carries out decoupling zero and vibration isolation to air bearing surface to the vibration of all directions with level, can reach extremely low rigidity and natural frequency.Program Problems existing is: 1) in public technology scheme, vibration isolator cannot realize accurate location; 2), in patent EP1803965A2, there is not the angular motion degrees of freedom around horizontal rotational shaft between upper and lower mounting plate, the angular rigidity in this direction and natural frequency are all very high; Patent EP1803970A2 and US20080193061A1 adopts block rubber to provide angular motion degrees of freedom around horizontal rotational shaft for upper and lower mounting plate, but because block rubber angular rigidity is very large, effectively cannot carry out angular motion freedom decoupling, there is frictional force between angular motion freedom decoupling mechanism part and introduce additional stiffness, restriction anti-vibration performance.
ASML company of Holland it is also proposed similar vibration isolator technological scheme (1.U.S.Philips Corp, ASM Lithography B.V. Pneumatic Support Device with A Controlled Gas Supply, and Lithographic Device Provided with Such A Support Device. U.S. Patent number: US006144442A; 2.Koninklijke Philips Electronics N.V., ASM Lithography B.V. Lithographic Pneumatic Support Device with Controlled Gas Supply. International Patent Publication No.: WO99/22272; 3.ASML Netherlands B.V. Support Device, Lithographic Apparatus, and Device Manufacturing Method Employing A Supporting Device, and A Position Control System Arranged for Use in A Supporting Device. U.S. Patent number: US007084956B2; 4.ASML Netherlands B.V. Support Device, Lithographic Apparatus, and Device Manufacturing Method Employing A Supporting Device and A Position Control System Arranged for Use in A Supporting Device. european patent number: EP1486825A1).In patent US006144442A and WO99/22272, closed-loop feedback control is carried out to bleed pressure, reach and improve the stability of vibration isolator and the object of performance; On upper mounting plate, be provided with vibration transducer in patent US007084956B2 and EP1486825A1, introduce with reference to vibration system simultaneously, promoted the anti-vibration performance of vibration isolator by control algorithm.But propose technological scheme and still do not solve the accurate location of vibration isolator and the angular motion freedom decoupling problem of upper and lower mounting plate.
Summary of the invention
The object of the invention is for vlsi circuit process units such as ultra precise measurement instrument and process units, especially step-by-step scanning photo-etching device an urgent demand of the low natural frequency of vibration isolator, high position precision, the electromagnetic damping Zero-rigidity vibration isolator of a kind of flexible membrane angle decoupling zero is provided, vibration isolator has three-dimensional ultralow rigidity and extremely low natural frequency, accurately can locate and angle decoupling zero between upper and lower mounting plate, thus effectively solve the accurate vibration isolation problem in ultra precise measurement instrument and process unit, especially step-by-step scanning photo-etching device.
Technical solution of the present invention is:
The electromagnetic damping Zero-rigidity vibration isolator of a kind of flexible membrane angle decoupling zero, by upper mounting plate, lower installation board, clean compressed gas source, tracheae and vibration isolator main body composition, vibration isolator main body is arranged between upper mounting plate and lower installation board, clean compressed gas source is connected with vibration isolator main body by tracheae, in the structure of described vibration isolator main body, the lower surface of sleeve and lower installation board are by axial carrying plane air bearing surface lubrication and support, flexible membrane is arranged on the upper end of sleeve, and compressed and sealing by trim ring, the top board of pressing plate assembly is relative with press table is fitted to the upper of flexible membrane, lower surface, and clamp flexible membrane, upper surface and the upper mounting plate of top board are rigidly connected, Z-direction voice coil motor, Z-direction displacement transducer and Z-direction limit switch are arranged between pressing plate assembly and sleeve, and X is arranged on sleeve and lower installation board between to displacement transducer, X to limit switch and Y-direction voice coil motor, Y-direction displacement transducer, Y-direction limit switch to voice coil motor, X, the driving force direction of Z-direction voice coil motor is vertical direction, X is mutually vertical in horizontal plane to the driving force direction of voice coil motor and Y-direction voice coil motor, and X, Y, Z-direction displacement transducer are consistent with the driving force direction of X, Y, Z-direction voice coil motor with the line of action direction of X, Y, Z-direction limit switch, X, Y, Z-direction displacement transducer are connected with the signal input part of controller respectively with X, Y, Z-direction limit switch, and the signal output part of controller is connected with the signal input part of driver, and the signal output part of driver is connected with X, Y, Z-direction voice coil motor respectively, along X to voice coil motor driving force direction, X is installed at lower installation board upper surface sidewall and forms X to electromagnetic damper to permanent magnet, along Y-direction voice coil motor driving force direction, Y-direction permanent magnet is installed at lower installation board upper surface sidewall and forms Y-direction electromagnetic damper, the pole orientation of X, Y-direction permanent magnet is perpendicular to the upper surface of lower installation board, and N, S pole is alternately arranged, lower installation board adopts ferromagnetic material, and sleeve adopts non-magnetic good conductor material.
Gas pressure sensor is provided with in described sleeve, sleeve is provided with suction port and solenoid valve, gas pressure sensor is connected with the signal input part of controller, and the signal output part of controller is connected with the signal input part of driver, and the signal output part of driver is connected with solenoid valve.
Described X, Y, Z-direction voice coil motor are cylinder type voice coil motor or plate voice coil motor.
Described X, Y, Z-direction displacement transducer are grating scale, magnetic railings ruler, appearance grid chi or linear potentiometer.
Described X, Y, Z-direction limit switch are mechanical type limit switch, Hall-type limit switch or photoelectric limit switch.
Described flexible membrane is rubber membrane.
In described sleeve, gas pressure is 0.1MPa ~ 0.8MPa.
The air-film thickness of described axial carrying plane air bearing surface is 10 μm ~ 20 μm.
The diameter of the plane air bearing surface throttle orifice on described sleeve is φ 0.1mm ~ φ 1mm.
The good result of technological innovation of the present invention and generation is:
(1) the present invention adopts axial carrying plane air bearing surface to isolate Horizontal Vibration, air bearing surface is approximately zero without friction, rigidity, vibration isolator can be made to obtain substantially horizontal approximate zero stiffness characteristics and outstanding superlow frequency vibration isolating performance, solve prior art to limit by structural rigidity, material behavior, vibration isolator horizontal rigidity is difficult to further reduction, the problem that rigidity and stability can not be taken into account.This is one of the present invention's innovative point being different from prior art.
(2) the present invention adopts displacement transducer, limit switch, controller, driver and voice coil motor etc. to form the position closed loop feedback control system of vertical direction and substantially horizontal, relative position between upper and lower mounting plate is accurately controlled, positioning precision can reach 10 μm of levels and more than, effectively can solve that prior art positioning precision is low, problem that positioning precision and rigidity, anti-vibration performance can not be taken into account.This is the innovative point two that the present invention is different from prior art.
(3) the present invention adopts flexible membrane diagonal motion degrees of freedom to carry out decoupling zero, and flexible membrane is without friction, without wearing and tearing, and introducing additional angular rigidity can ignore, and the technological scheme that effectively can solve the decoupling zero of existing employing elastomer introduces the problem of larger additional stiffness.This is the innovative point three that the present invention is different from prior art.
(4) the present invention adopts gas pressure sensor, solenoid valve and controller, driver forms pressure closed loop feedback control system, gas pressure in accurate control sleeve makes it to keep constant, gravitational equilibrium and compensation are carried out to the thrust load of vibration isolator, flexible membrane rigidity near equilibrium position is approximately zero, the upper and lower pressing plate of carry load gravity and upper mounting plate can ultralow rigidity slide up and down, thus the gravity compensation of realizing ideal and zero stiffness vibration isolating effect.This is the innovative point four that the present invention is different from prior art.
(5) the present invention adopts active actuators to carry out ACTIVE CONTROL to the relative position between upper and lower mounting plate, vibration isolator parameter can regulate in real time according to being changed by vibration isolation features of the object and working environment, thus adapt to different operating modes, there is good flexibility, adaptability and stability.This is the innovative point five that the present invention is different from prior art.
(6) the present invention proposes a kind of electromagnetic damper replacing permanent magnet array based on magnetic pole, can be integrated in one with vibration isolator well, and there is comparatively ideal linear damping characteristic, can effective attenuation vibrational energy, reduce the overshoot that motor drives location, the stability of vibration isolator is provided.This is the innovative point six that the present invention is different from prior art.
Accompanying drawing explanation
Fig. 1 is the structural representation of the electromagnetic damping Zero-rigidity vibration isolator of flexible membrane angle decoupling zero;
Fig. 2 is the cross-sectional view of the electromagnetic damping Zero-rigidity vibration isolator of flexible membrane angle decoupling zero;
Fig. 3 is the control structure block diagram of the electromagnetic damping Zero-rigidity vibration isolator of flexible membrane angle decoupling zero;
Fig. 4 is the schematic diagram of plane air bearing surface throttle orifice on sleeve;
Fig. 5 is the part section structural representation of X, Y-direction electromagnetic damper;
Fig. 6 is that X, Y-direction permanent magnet are at a kind of mounting type schematic diagram of lower installation board upper surface sidewall;
Fig. 7 is that X, Y-direction permanent magnet are at the another kind of mounting type schematic diagram of lower installation board upper surface sidewall.
In figure, piece number illustrates: 1 upper mounting plate, 2 lower installation boards, 3 clean compressed gas sources, 4 vibration isolator main bodys, 5 flexible membranes, 6 sleeves, 7 pressing plate assemblies, 7a top board, 7b press table, 8 X are to voice coil motor, 9 Y-direction voice coil motors, 9a Y-direction motor iron yoke, 9b Y-direction magnetic steel of motor, 9c Y-direction motor coil framework, 9d Y-direction motor coil, 9e Y-direction motor transitional part, 10Z is to voice coil motor, 10a Z-direction motor iron yoke, 10b Z-direction magnetic steel of motor, 10c Z-direction motor coil framework, 10d Z-direction motor coil, 10e Z-direction motor transitional part, 11 X are to displacement transducer, 12 Y-direction displacement transducers, 12a Y-direction grating reading head transition piece, 12b Y-direction grating reading head, 12c Y-direction glass raster chi, 13 Z-direction displacement transducers, 13a Z-direction grating reading head transition piece, 13b Z-direction grating reading head, 13c Z-direction glass raster chi, 14 X are to limit switch, 15 Y-direction limit switches, 15aY is to limiting stopper, 15b Y-direction Hall switch, 15c Y-direction limit switch transition piece, 15d Y-direction limiting stopper transition piece, 16 Z-direction limit switches, 16a Z-direction limiting stopper, 16b Z-direction Hall switch, 16c Z-direction limit switch transition piece, 17 gas pressure sensors, 18 solenoid valves, 19 controllers, 20 drivers, 21 axial carrying plane air bearing surface, 22 trim rings, 23 suction ports, 24 plane air bearing surface throttle orifices, 26 tracheaes, 40 X are to electromagnetic damper, 40A X is to permanent magnet, 41 Y-direction electromagnetic dampers, 41AY is to permanent magnet.
Embodiment
Specific embodiments of the invention are provided below in conjunction with accompanying drawing.
The electromagnetic damping Zero-rigidity vibration isolator of a kind of flexible membrane angle decoupling zero, by upper mounting plate 1, lower installation board 2, clean compressed gas source 3, tracheae 26 and vibration isolator main body 4 form, vibration isolator main body 4 is arranged between upper mounting plate 1 and lower installation board 2, clean compressed gas source 3 is connected with vibration isolator main body 4 by tracheae 26, in the structure of described vibration isolator main body 4, the lower surface of sleeve 6 and lower installation board 2 are by axial carrying plane air bearing surface 21 lubrication and support, flexible membrane 5 is arranged on the upper end of sleeve 6, and compressed and sealing by trim ring 22, the top board 7a of pressing plate assembly 7 is relative with press table 7b is fitted to the upper of flexible membrane 5, lower surface, and clamp flexible membrane 5, upper surface and the upper mounting plate 1 of top board 7a are rigidly connected, Z-direction voice coil motor 10, Z-direction displacement transducer 13 and Z-direction limit switch 16 are arranged between pressing plate assembly 7 and sleeve 6, and X is arranged on sleeve 6 and lower installation board 2 between to displacement transducer 11, X to limit switch 14 and Y-direction voice coil motor 9, Y-direction displacement transducer 12, Y-direction limit switch 15 to voice coil motor 8, X, the driving force direction of Z-direction voice coil motor 10 is vertical direction, X is mutually vertical in horizontal plane to the driving force direction of voice coil motor 8 and Y-direction voice coil motor 9, and X, Y, Z-direction displacement transducer 11,12,13 are consistent with the driving force direction of X, Y, Z-direction voice coil motor 8,9,10 with the line of action direction of X, Y, Z-direction limit switch 14,15,16, X, Y, Z-direction displacement transducer 11,12,13 are connected with the signal input part of controller 19 respectively with X, Y, Z-direction limit switch 14,15,16, the signal output part of controller 19 is connected with the signal input part of driver 20, and the signal output part of driver 20 is connected with X, Y, Z-direction voice coil motor 8,9,10 respectively, along X to voice coil motor 8 driving force direction, X is installed at lower installation board 2 upper surface sidewall and forms X to electromagnetic damper 40 to permanent magnet 40A, along Y-direction voice coil motor 9 driving force direction, Y-direction permanent magnet 41A is installed at lower installation board 2 upper surface sidewall and forms Y-direction electromagnetic damper 41, the pole orientation of X, Y-direction permanent magnet 40A, 41A is perpendicular to the upper surface of lower installation board 2, and N, S pole is alternately arranged, lower installation board 2 adopts ferromagnetic material, and sleeve 6 adopts non-magnetic good conductor material.
The displacement that X, Y, Z-direction displacement transducer 11,12,13 couples of X, Y, Z-direction voice coil motor 8,9,10 export is measured, and the stroke that X, Y, Z-direction limit switch 14,15,16 couples of X, Y, Z-direction voice coil motor 8,9,10 move limits; Controller 19 is according to the feedback signal of X, Y, Z-direction displacement transducer 11,12,13 and X, Y, Z-direction limit switch 14,15,16, and control X, Y, Z-direction voice coil motor 8,9,10 accurately control the relative position between upper and lower mounting plate 1,2.
Gas pressure sensor 17 is provided with in described sleeve 6, sleeve 6 is provided with suction port 23 and solenoid valve 18, gas pressure sensor 17 is connected with the signal input part of controller 19, the signal output part of controller 19 is connected with the signal input part of driver 20, and the signal output part of driver 20 is connected with solenoid valve 18.
Described X, Y, Z-direction voice coil motor 8,9,10 are cylinder type voice coil motor or plate voice coil motor.
Described X, Y, Z-direction displacement transducer 11,12,13 are grating scale, magnetic railings ruler, appearance grid chi or linear potentiometer.
Described X, Y, Z-direction limit switch 14,15,16 are mechanical type limit switch, Hall-type limit switch or photoelectric limit switch.
Described flexible membrane 5 is rubber membrane.
In described sleeve 6, gas pressure is 0.1MPa ~ 0.8MPa.
The air-film thickness of described axial carrying plane air bearing surface 21 is 10 μm ~ 20 μm.
The diameter of the plane air bearing surface throttle orifice 24 on described sleeve 6 is φ 0.1mm ~ φ 1mm.
One embodiment of the present of invention are provided below in conjunction with Fig. 1 ~ Fig. 3.In the present embodiment, during vibration isolator work, lower installation board 2 is arranged on ground, the pedestal of instrument or basic framework, and upper mounting plate 1 is connected with by the load of vibration isolation.X, Y, Z-direction voice coil motor 8,9,10 all adopt cylinder type voice coil motor.For Y-direction voice coil motor 9, it mainly comprises the parts such as Y-direction motor iron yoke 9a, Y-direction magnetic steel of motor 9b, Y-direction motor coil framework 9c, Y-direction motor coil 9d and Y-direction motor transitional part 9e.Y-direction motor iron yoke 9a and Y-direction motor coil framework 9c is cylindrical shape, and Y-direction magnetic steel of motor 9b is cylindrical, and Y-direction motor coil 9d is around on Y-direction motor coil framework 9c, and Y-direction motor transitional part 9e provides the mounting structure of Y-direction motor coil framework 9c.Y-direction motor iron yoke 9a and Y-direction magnetic steel of motor 9b forms motor stator, and Y-direction motor coil framework 9c, Y-direction motor coil 9d form electric mover.Pass to electric current in coil during machine operation, according to electromagnetic theory, hot-wire coil can be subject to Lorentz force effect in magnetic field, can be controlled the size and Orientation of motor output drive strength by the size and Orientation controlling electric current.
In the present embodiment, flexible membrane 5, trim ring 22 with the mounting type of sleeve 6 are: along the circumferential direction thread mill drilling on sleeve 6, trim ring 22, flexible membrane 5 along the circumferential direction process through hole, adopt screw that trim ring 22 is compressed flexible membrane 5 to be assemblied on sleeve 6, utilize the elasticity of flexible membrane 5 material to play the effect of sealing.The mounting type of top board 7a, press table 7b and flexible membrane 5 is similar with it.
X, Y, Z-direction displacement transducer 11,12,13 adopt grating scale.For Z-direction displacement transducer 13, it mainly comprises the parts such as Z-direction grating reading head transition piece 13a, Z-direction grating reading head 13b and Z-direction glass raster chi 13c, and Z-direction grating reading head transition piece 13a provides the mounting structure of Z-direction grating reading head 13b.During grating scale work, the relative displacement of itself and Z-direction glass raster chi 13c can detect by Z-direction grating reading head 13b, and gives controller 19 by signal conductor.
X, Y, Z-direction limit switch 14,15,16 adopt Hall-type limit switch.For Z-direction limit switch 16, it mainly comprises the parts such as Z-direction limiting stopper 16a, Z-direction Hall switch 16b and Z-direction limit switch transition piece 16c.Two Z-direction Hall switch 16b install back-to-back, and two Z-direction limiting stopper 16a are metallic material, are mounted opposite with the sensitivity end of Z-direction Hall switch 16b.Z-direction limit switch transition piece 16c provides the mounting structure of Z-direction Hall switch 16b.During limit switch work, when Z-direction Hall switch 16b is close to Z-direction limiting stopper 16a, Z-direction Hall switch 16b provides limit signal, and gives controller 19 by signal conductor.
In the present embodiment, Z-direction voice coil motor 10, Z-direction displacement transducer 13 and Z-direction limit switch 16 are installed in the inside of sleeve 6.
The carrying of vibration isolator to load realizes in the following way: clean compressed gas source 3 by tracheae 26, carry clean compressed air through solenoid valve 18, suction port 23 in sleeve 6.Controller 19 is according to the feedback signal of gas pressure sensor 17, the aperture of Controlling solenoid valve 18, regulate the gas flow be input in sleeve 6, thus the pressure of clean compressed air in regulating sleeve 6, clean compressed air is balanced each other to the gravity of pressing plate assembly 7 and flexible membrane 5 active force upwards and load and pressing plate assembly 7, the gravity of other component that loads on pressing plate assembly 7.In the equilibrium position of flexible membrane 5, the vertical stiffness of flexible membrane 5 is approximately zero, and lateral stiffness is then very large relative to the lateral stiffness of axial carrying air bearing surface 21.Therefore, sleeve 6 vertically can move up and down with approximate zero rigidity near the equilibrium position of flexible membrane 5, thus has outstanding superlow frequency vibration isolating performance.
In the present embodiment, in sleeve 6, the pressure of clean compressed air is 0.4MPa, and the effective radius of press table 7b and flexible membrane 5 lower surface is 100mm, then the quality of single vibration isolator carrying is: m=p × π r
2/ g ≈ 1282kg, wherein p is gas pressure, and p=0.4MPa, r are the effective radius of press table 7b and flexible membrane 5 lower surface, and r=100mm, g are gravity accleration, g=9.8m/s
2.
Fig. 4 provides an embodiment of plane air bearing surface throttle orifice on sleeve.In the present embodiment, sleeve 6 lower surface is along the circumferential direction uniform 8 plane air bearing surface throttle orifices 24 around the center of circle, and diameter is φ 0.2mm.
An embodiment of X, Y-direction electromagnetic damper is provided below in conjunction with Fig. 5, Fig. 6.In the present embodiment, vibration isolator has two X to electromagnetic damper 40, two Y-direction electromagnetic dampers 41, respectively by being arranged on the X of lower installation board 2 upper surface sidewall, Y-direction permanent magnet 40A, 41A array forms, lower installation board 2 adopts No. 45 Steel materials, have higher permeability, sleeve 6 adopts red copper material, not magnetic conduction and have high conductivity.X, Y-direction permanent magnet 40A, 41A are elongate in shape, and the driving force direction respectively along X, Y-direction voice coil motor 8,9 is arranged, pole orientation is perpendicular to the upper surface of lower installation board 2, and N, S pole is alternately arranged.When sleeve 6 produces relative movement with lower installation board 2, sleeve 6 cutting magnetic line and produce electric convolution and damping force, X, the Y-direction speed of related movement of X, Y-direction damping force and sleeve 6 and lower installation board 2 are directly proportional, direction is consistent with the driving force direction of X, Y-direction voice coil motor 8,9, thus reach consumption vibrational energy, improve the object of position stability.
Fig. 5, Fig. 7 give another embodiment of X, Y-direction electromagnetic damper.In the present embodiment, vibration isolator has an X to electromagnetic damper 40, a Y-direction electromagnetic damper 41, respectively by being arranged on the X of lower installation board 2 upper surface sidewall, Y-direction permanent magnet 40A, 41A array forms.
Claims (9)
1. the electromagnetic damping Zero-rigidity vibration isolator of flexible membrane angle decoupling zero, by upper mounting plate (1), lower installation board (2), clean compressed gas source (3), tracheae (26) and vibration isolator main body (4) composition, vibration isolator main body (4) is arranged between upper mounting plate (1) and lower installation board (2), clean compressed gas source (3) is connected with vibration isolator main body (4) by tracheae (26), it is characterized in that: in the structure of described vibration isolator main body (4), the lower surface of sleeve (6) and lower installation board (2) are by axial carrying plane air bearing surface (21) lubrication and support, flexible membrane (5) is arranged on the upper end of sleeve (6), and compressed and sealing by trim ring (22), the top board (7a) of pressing plate assembly (7) is relative with press table (7b) is fitted to the upper of flexible membrane (5), lower surface, and clamp flexible membrane (5), upper surface and the upper mounting plate (1) of top board (7a) are rigidly connected, Z-direction voice coil motor (10), Z-direction displacement transducer (13) and Z-direction limit switch (16) are arranged between pressing plate assembly (7) and sleeve (6), and X is arranged on sleeve (6) and lower installation board (2) between to displacement transducer (11), X to limit switch (14) and Y-direction voice coil motor (9), Y-direction displacement transducer (12), Y-direction limit switch (15) to voice coil motor (8), X, the driving force direction of Z-direction voice coil motor (10) is vertical direction, X is mutually vertical in horizontal plane to the driving force direction of voice coil motor (8) and Y-direction voice coil motor (9), and X, Y, Z-direction displacement transducer (11,12,13) are consistent with the driving force direction of X, Y, Z-direction voice coil motor (8,9,10) with the line of action direction of X, Y, Z-direction limit switch (14,15,16), X, Y, Z-direction displacement transducer (11,12,13) are connected with the signal input part of controller (19) respectively with X, Y, Z-direction limit switch (14,15,16), the signal output part of controller (19) is connected with the signal input part of driver (20), and the signal output part of driver (20) is connected with X, Y, Z-direction voice coil motor (8,9,10) respectively, along X to voice coil motor (8) driving force direction, X is installed at lower installation board (2) upper surface sidewall and forms X to electromagnetic damper (40) to permanent magnet (40A), along Y-direction voice coil motor (9) driving force direction, Y-direction permanent magnet (41A) is installed at lower installation board (2) upper surface sidewall and forms Y-direction electromagnetic damper (41), X, Y-direction permanent magnet (40A, pole orientation 41A) is perpendicular to the upper surface of lower installation board (2), and N, S pole is alternately arranged, lower installation board (2) adopts ferromagnetic material, sleeve (6) adopts non-magnetic good conductor material.
2. the electromagnetic damping Zero-rigidity vibration isolator of flexible membrane angle according to claim 1 decoupling zero, it is characterized in that: in described sleeve (6), be provided with gas pressure sensor (17), sleeve (6) is provided with suction port (23) and solenoid valve (18), gas pressure sensor (17) is connected with the signal input part of controller (19), the signal output part of controller (19) is connected with the signal input part of driver (20), and the signal output part of driver (20) is connected with solenoid valve (18).
3. the electromagnetic damping Zero-rigidity vibration isolator of flexible membrane angle according to claim 1 decoupling zero, is characterized in that: described X, Y, Z-direction voice coil motor (8,9,10) are cylinder type voice coil motor or plate voice coil motor.
4. the electromagnetic damping Zero-rigidity vibration isolator of flexible membrane angle according to claim 1 decoupling zero, is characterized in that: described X, Y, Z-direction displacement transducer (11,12,13) are grating scale, magnetic railings ruler, appearance grid chi or linear potentiometer.
5. the electromagnetic damping Zero-rigidity vibration isolator of flexible membrane angle according to claim 1 decoupling zero, is characterized in that: described X, Y, Z-direction limit switch (14,15,16) are mechanical type limit switch, Hall-type limit switch or photoelectric limit switch.
6. the electromagnetic damping Zero-rigidity vibration isolator of flexible membrane angle according to claim 1 decoupling zero, is characterized in that: described flexible membrane (5) is rubber membrane.
7. the electromagnetic damping Zero-rigidity vibration isolator of flexible membrane angle according to claim 1 decoupling zero, is characterized in that: described sleeve (6) interior gas pressure is 0.1MPa ~ 0.8MPa.
8. the electromagnetic damping Zero-rigidity vibration isolator of flexible membrane angle according to claim 1 decoupling zero, is characterized in that: the air-film thickness of described axial carrying plane air bearing surface (21) is 10 μm ~ 20 μm.
9. the electromagnetic damping Zero-rigidity vibration isolator of flexible membrane angle according to claim 1 decoupling zero, is characterized in that: the diameter of the plane air bearing surface throttle orifice (24) on described sleeve (6) is φ 0.1mm ~ φ 1mm.
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| Application Number | Priority Date | Filing Date | Title |
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| CN201210575220.8A CN103047356B (en) | 2012-12-19 | 2012-12-19 | Electromagnetic damping zero-rigidity vibration isolator with flexible film for angular decoupling |
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| CN201210575220.8A CN103047356B (en) | 2012-12-19 | 2012-12-19 | Electromagnetic damping zero-rigidity vibration isolator with flexible film for angular decoupling |
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| CN103047356B true CN103047356B (en) | 2015-02-11 |
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| CN201210575220.8A Active CN103047356B (en) | 2012-12-19 | 2012-12-19 | Electromagnetic damping zero-rigidity vibration isolator with flexible film for angular decoupling |
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