CN115217889B - Large-scale precision equipment gas magnetic vibration isolation and active and passive damping transfer device - Google Patents
Large-scale precision equipment gas magnetic vibration isolation and active and passive damping transfer device Download PDFInfo
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- CN115217889B CN115217889B CN202210834985.2A CN202210834985A CN115217889B CN 115217889 B CN115217889 B CN 115217889B CN 202210834985 A CN202210834985 A CN 202210834985A CN 115217889 B CN115217889 B CN 115217889B
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- 238000002955 isolation Methods 0.000 title claims abstract description 123
- 238000013016 damping Methods 0.000 title claims abstract description 56
- 238000000034 method Methods 0.000 claims abstract description 32
- 238000001514 detection method Methods 0.000 claims abstract description 29
- 230000008569 process Effects 0.000 claims abstract description 27
- 230000000694 effects Effects 0.000 claims abstract description 20
- 230000000670 limiting effect Effects 0.000 claims abstract description 18
- 230000036544 posture Effects 0.000 claims description 17
- 238000006073 displacement reaction Methods 0.000 claims description 16
- 238000007667 floating Methods 0.000 claims description 10
- 230000008859 change Effects 0.000 claims description 4
- 238000009434 installation Methods 0.000 claims 1
- 238000007599 discharging Methods 0.000 description 7
- 230000009471 action Effects 0.000 description 4
- 230000001105 regulatory effect Effects 0.000 description 4
- 230000005540 biological transmission Effects 0.000 description 3
- 230000003321 amplification Effects 0.000 description 2
- 230000001276 controlling effect Effects 0.000 description 2
- 238000003199 nucleic acid amplification method Methods 0.000 description 2
- 230000009467 reduction Effects 0.000 description 2
- 230000003068 static effect Effects 0.000 description 2
- 230000002238 attenuated effect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000000725 suspension Substances 0.000 description 1
Classifications
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16F—SPRINGS; SHOCK-ABSORBERS; MEANS FOR DAMPING VIBRATION
- F16F15/00—Suppression of vibrations in systems; Means or arrangements for avoiding or reducing out-of-balance forces, e.g. due to motion
- F16F15/02—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems
- F16F15/022—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems using dampers and springs in combination
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B60—VEHICLES IN GENERAL
- B60P—VEHICLES ADAPTED FOR LOAD TRANSPORTATION OR TO TRANSPORT, TO CARRY, OR TO COMPRISE SPECIAL LOADS OR OBJECTS
- B60P7/00—Securing or covering of load on vehicles
- B60P7/06—Securing of load
- B60P7/16—Protecting against shocks
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16F—SPRINGS; SHOCK-ABSORBERS; MEANS FOR DAMPING VIBRATION
- F16F15/00—Suppression of vibrations in systems; Means or arrangements for avoiding or reducing out-of-balance forces, e.g. due to motion
- F16F15/02—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems
- F16F15/023—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems using fluid means
- F16F15/0232—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems using fluid means with at least one gas spring
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16F—SPRINGS; SHOCK-ABSORBERS; MEANS FOR DAMPING VIBRATION
- F16F15/00—Suppression of vibrations in systems; Means or arrangements for avoiding or reducing out-of-balance forces, e.g. due to motion
- F16F15/02—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems
- F16F15/023—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems using fluid means
- F16F15/027—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems using fluid means comprising control arrangements
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16F—SPRINGS; SHOCK-ABSORBERS; MEANS FOR DAMPING VIBRATION
- F16F15/00—Suppression of vibrations in systems; Means or arrangements for avoiding or reducing out-of-balance forces, e.g. due to motion
- F16F15/02—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems
- F16F15/03—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems using magnetic or electromagnetic means
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16F—SPRINGS; SHOCK-ABSORBERS; MEANS FOR DAMPING VIBRATION
- F16F15/00—Suppression of vibrations in systems; Means or arrangements for avoiding or reducing out-of-balance forces, e.g. due to motion
- F16F15/02—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems
- F16F15/04—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems using elastic means
- F16F15/046—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems using elastic means using combinations of springs of different kinds
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
- G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
- G01B11/0608—Height gauges
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16F—SPRINGS; SHOCK-ABSORBERS; MEANS FOR DAMPING VIBRATION
- F16F2228/00—Functional characteristics, e.g. variability, frequency-dependence
- F16F2228/06—Stiffness
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16F—SPRINGS; SHOCK-ABSORBERS; MEANS FOR DAMPING VIBRATION
- F16F2228/00—Functional characteristics, e.g. variability, frequency-dependence
- F16F2228/06—Stiffness
- F16F2228/063—Negative stiffness
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16F—SPRINGS; SHOCK-ABSORBERS; MEANS FOR DAMPING VIBRATION
- F16F2228/00—Functional characteristics, e.g. variability, frequency-dependence
- F16F2228/06—Stiffness
- F16F2228/066—Variable stiffness
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16F—SPRINGS; SHOCK-ABSORBERS; MEANS FOR DAMPING VIBRATION
- F16F2230/00—Purpose; Design features
- F16F2230/0047—Measuring, indicating
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16F—SPRINGS; SHOCK-ABSORBERS; MEANS FOR DAMPING VIBRATION
- F16F2230/00—Purpose; Design features
- F16F2230/06—Fluid filling or discharging
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02T—CLIMATE CHANGE MITIGATION TECHNOLOGIES RELATED TO TRANSPORTATION
- Y02T90/00—Enabling technologies or technologies with a potential or indirect contribution to GHG emissions mitigation
Abstract
The invention relates to a pneumatic-magnetic vibration isolation and active-passive damping transfer device for large-scale precision equipment, which belongs to the technical field of transfer equipment, and the pneumatic-magnetic vibration isolation and active-passive damping transfer device comprises a frame, a vibration isolation platform, an air floatation vibration isolation unit, a height detection and control device, a processor, an active damping unit, a limiting unit, a permanent magnet negative stiffness module and a passive damper, wherein the vibration isolation platform supports the transferred equipment; the air floatation vibration isolation unit, the active damping unit, the limiting unit, the height detection and control device, the permanent magnet negative stiffness module and the passive damper are respectively arranged at the upper bottom surface and four inner side surfaces of the frame and the vibration isolation platform in parallel at intervals. The safety protection under the effects of three-dimensional precise vibration isolation and strong impact is realized by adopting a mode of connecting positive and negative rigidity with active and passive damping in parallel, and the problem that the transfer of the three-dimensional precise vibration isolation and impact protection cannot be realized in the transfer process of large precise equipment in the prior art is solved.
Description
Technical Field
The invention belongs to the technical field of transfer equipment, and particularly relates to a large-scale precise equipment pneumatic-magnetic vibration isolation and active-passive damping transfer device.
Background
Large-scale precision equipment, in particular to large-scale precision equipment subjected to precision assembly, has the characteristics of large volume, large mass, high stability requirement and the like, and has strict requirement on the transportation process during transportation. In the transportation process of large-scale precision equipment, the constant posture and stable support are always required to be kept, the whole performance of the equipment is often influenced by slight vibration in the transportation process, the impact effect generated by bumping on the ground can also influence the safety performance of the equipment, and particularly under the unbalanced load condition, the strong impact effect generated by bumping on the ground can directly lead to the deviation and overturning of the equipment, thereby threatening the safety of the equipment and transportation personnel.
The air cushion vehicle uses the gas film technology to suspend and support the load, avoids contacting with the ground, generates good vibration isolation effect, and plays an important role in the transportation of precise instruments. The patent number 201010242011.2 discloses an automatic leveling control device for an air cushion suspension transport vehicle, which utilizes signals sent by a high-position photoelectric switch and a low-position photoelectric switch to control the inflation and deflation of an air cushion so as to realize an automatic leveling function. The technical scheme is characterized in that: (1) According to the technical scheme, a good vertical vibration isolation effect is achieved by using the air cushion vehicle, but due to the lack of a negative stiffness device, the initial vibration isolation frequency is higher, and meanwhile due to the lack of a damping device, the vibration amplification effect at the natural frequency in the transferring process can damage the transferred equipment; (2) The technical scheme cannot realize safety protection under the action of strong impact, when the strong impact caused by factors such as ground jolt is acted, huge impact energy cannot be dissipated and then directly acts on the transported equipment to cause the damage of the transported equipment, meanwhile, the strong impact acts on the transported equipment to cause larger relative displacement between the transported equipment and the ground at the moment, and the rigid collision of the transported equipment is probably directly caused to be damaged due to the lack of a limiting device; (3) According to the technical scheme, the photoelectric switch is adopted as the height sensor, the height of the air cushion transfer trolley cannot be detected and adjusted in real time, the horizontal posture is adjusted by the height adjusting method, the supporting force is not applied in the horizontal direction, and the swing caused by the bumping of the ground in the transfer process cannot be effectively restrained.
The patent number 201310280075.5 discloses an intelligent air cushion transfer vehicle and a control method thereof, and the technical scheme adopts a method of arranging height sensors at four corners of a frame of the air cushion vehicle to feed back the height of a vehicle body relative to the ground in real time, and a remote control main processor controls an air cushion inflation and deflation unit according to the height information of the vehicle body to adjust the fluctuation height of the vehicle body, so that the aim of controlling the posture of the vehicle body is fulfilled. The technical scheme is characterized in that: (1) According to the technical scheme, a good vertical vibration isolation effect is achieved by using the air cushion vehicle, but due to the lack of a negative stiffness device, the initial vibration isolation frequency is higher, and meanwhile due to the lack of a damping device, the vibration amplification effect at the natural frequency in the transferring process can damage the transferred equipment; (2) The technical scheme cannot realize safety protection under the action of strong impact, when the strong impact caused by factors such as ground jolt is acted, huge impact energy cannot be dissipated and then directly acts on the transported equipment to cause the damage of the transported equipment, meanwhile, the strong impact acts on the transported equipment to cause larger relative displacement between the transported equipment and the ground at the moment, and the rigid collision of the transported equipment is probably directly caused to be damaged due to the lack of a limiting device; (3) According to the technical scheme, the height of the air cushion transfer trolley is detected and regulated in real time by the height sensor, so that a constant horizontal posture is guaranteed to a certain extent, but the horizontal posture is regulated by the height regulating method, a supporting force is not applied in the horizontal direction, and the swing caused by the bumping of the ground in the transfer process cannot be restrained.
The patent number 202110749514.7 discloses a three-way vibration damping transfer box and a transfer trolley applied to the same, and the technical scheme is that transverse vibration damping rubber is arranged on four side walls of the transfer box, and three-way vibration isolation is realized in a mode of arranging vertical vibration damping rubber at the bottom of the box. The technical scheme is characterized in that: (1) According to the technical scheme, vibration isolation in three directions is achieved, the initial vibration isolation frequency is high, the transfer operation can be achieved for general precision equipment with low requirements on the vibration environment, the operation is simple and reliable, but the safe transfer of the precision equipment with high requirements on the environment vibration cannot be achieved due to the fact that the vibration isolation performance of vibration reduction rubber is poor; (2) According to the technical scheme, rubber is adopted for vibration reduction in three directions, when strong impact caused by uneven ground factors is met, a damping device for dissipating impact energy is absent, and huge impact energy can cause the transported equipment to be damaged; (3) The vibration isolation mode adopted by the technical scheme determines that the posture is not ensured to be constant in the transportation process.
In summary, the existing device for transferring large-scale precise equipment is difficult to realize three-dimensional vibration isolation and attitude regulation, and the initial vibration isolation frequency is high due to the lack of a negative stiffness device; when the impact energy is applied to the large-scale precise equipment to be transported due to the fact that the impact energy is not dissipated, a damping device for dissipating the impact energy is lacking in the process of transporting the large-scale precise equipment to be transported, and the large-scale precise equipment to be transported is damaged due to the fact that the large-scale impact energy is transmitted to the large-scale precise equipment to be transported; by adjusting the horizontal posture in a height-adjusting manner, there is no force in the horizontal direction for horizontal posture adjustment against the rocking action. Therefore, it is needed to provide a gas-magnetic vibration isolation and active-passive damping transfer device for large-scale precision equipment so as to meet the requirements of China on the aspect of transferring the large-scale precision equipment.
Disclosure of Invention
Aiming at the problems in the prior art, the invention aims to provide a pneumatic-magnetic vibration isolation and active-passive damping transfer device for large-scale precision equipment, so as to meet the requirements of precision vibration isolation and safety protection of the large-scale precision equipment in the transfer process of China.
In order to achieve the above object, the present invention provides a technical solution as follows:
the device comprises a frame, a vibration isolation platform, an air floatation vibration isolation unit, a height detection and control device and a processor, wherein the vibration isolation platform supports the transported large-scale precision equipment; the air floatation vibration isolation unit is respectively arranged between the upper bottom surface of the middle frame, the four inner side surfaces and the vibration isolation platform in parallel at intervals, and is connected with the frame and the vibration isolation platform; the device comprises an active damping unit for precisely isolating vibration and dissipating impact energy, a height detection and control device for detecting horizontal postures and lateral displacements, a permanent magnet negative stiffness module for reducing the natural frequency of a system, and a plurality of passive dampers which are respectively arranged at intervals in parallel between the upper bottom surface of the frame, four inner side surfaces and the vibration isolation platform and are connected with the frame and the vibration isolation platform; the limiting units are arranged at intervals between the upper bottom surface of the frame, the four inner side surfaces and the vibration isolation platform in parallel.
Preferably, the air-floating vibration isolation unit comprises an air chamber and an air spring.
Preferably, the height detection and control device comprises a height detection device, a connecting piece and an inflation and deflation unit.
Preferably, the active damping unit includes a damper and a speed sensor.
Preferably, the height detection device comprises a grating ruler reading head connecting rod, a grating ruler guide rail and a grating ruler reading head.
The air floatation vibration isolation and damping protection transfer device for the large-scale precise equipment provided by the invention has the following effects:
(1) The invention can realize the precise vibration isolation effect in the process of transferring large-scale precise equipment. The high-performance air spring vibration isolator can realize higher static stiffness and lower dynamic stiffness, the permanent magnet negative stiffness module is added, the dynamic stiffness is further reduced by adopting a mode of parallel connection of positive stiffness and negative stiffness, the natural frequency of a system can be further reduced under the condition of large bearing, higher vibration isolation performance is ensured, meanwhile, the active damping unit and the passive damper are used in parallel to increase the damping of the system, the vibration transmission rate at the natural frequency can be further reduced, and the precise vibration isolation effect in the process of transferring large precise equipment is realized
(2) The invention can realize the safety protection effect under the strong impact effect in the transportation process. According to the invention, the active damping unit, the limiting unit and the passive damper are arranged between the vibration isolation platform and the frame, when the transported equipment is subjected to strong impact in the transportation process, the active damping and the passive damping are connected in parallel to generate larger damping force, so that the impact energy can be rapidly dissipated, the vibration isolation platform is safe and reliable, and the limiting unit is arranged between the vibration isolation platform and the frame, so that the transported equipment can be prevented from being damaged due to larger displacement, and the safety protection effect under the strong impact in the transportation process is realized.
(3) The invention can realize that the transported equipment is in a horizontal posture in the transportation process, and can effectively prevent the transported equipment from swinging in the transportation process to cause equipment damage. The invention uses the height detection and control unit to detect the relative displacement between the vibration isolation platform and the frame in real time, and controls the air charging and discharging unit to charge and discharge the air spring in real time through the processor, thereby ensuring that the equipment can stably transport in a constant posture.
Drawings
FIG. 1 is a schematic diagram of a pneumatic-magnetic vibration isolation and active-passive damping protection transfer device for large-scale precision equipment
Fig. 2 highlights a view of the active damping unit 500, the permanent magnet negative stiffness module 900 and the passive damper 1000 in part a in fig. 1
FIG. 3 is a top view of a controller-free pneumatic-magnetic vibration isolation and active-passive damping protection transfer device for large precision equipment
FIG. 4 is a front view of a pneumatic-magnetic vibration isolation and active-passive damping protection transfer device for large precision equipment without a frame and a controller
Fig. 5 highlights a view of the active damping unit 500 and the height detection and control device 700 in part B of fig. 4
FIG. 6 is a left side view of a large-scale precision equipment pneumatic-magnetic vibration isolation and active-passive damping protection transfer device without a frame and a controller
FIG. 7 is a top view of a pneumatic-magnetic vibration isolation and active-passive damping protection transfer device for large precision equipment without a frame and a controller
Reference numerals in the drawings:
100. a frame; 200. a vibration isolation platform; 300. large-scale precision equipment; 400. an air floatation vibration isolation unit; 401. a gas chamber; 402. an air spring; 500. an active damping unit; 501. an active damper; 502. a speed sensor; 600. a limit unit; 601. a stopper bracket; 602. a limiter; 700. a height detection and control device; 710. a height detection device; 711. a grating ruler reading head connecting piece; 712. a grating ruler guide rail; 713. a grating ruler reading head; 714. a connecting piece; 720. an air charging and discharging unit; 800. a processor; 900. a permanent magnet negative stiffness module; 1000. a passive damper.
Detailed Description
The present invention will be further described with reference to the drawings and the specific embodiments in order to make the objects, technical solutions and advantages of the present invention more apparent. It should be understood that the specific embodiments described herein are for purposes of illustration only and are not intended to limit the scope of the invention. All other embodiments, which can be made by those skilled in the art based on the embodiments of the invention without making any inventive effort, are intended to be within the scope of the invention.
The invention provides a large-scale precision equipment pneumatic-magnetic vibration isolation and active-passive damping protection transfer device, which is shown in fig. 1-7 and comprises a frame 100, a vibration isolation platform 200, an air-floatation vibration isolation unit 400, an active damping unit 500, a limiting unit 600, a height detection and control device 700, a processor 800, a permanent magnet negative stiffness module 900 and a passive damper 1000, wherein the vibration isolation platform 200 supports the transferred large-scale precision equipment 300, the air-floatation vibration isolation unit 400 and the permanent magnet negative stiffness module 900 are respectively arranged in parallel at intervals between the upper bottom surface and four inner side surfaces of the frame 100 and the vibration isolation platform 200, and are respectively connected with the frame 100 and the vibration isolation platform 200, the active damping unit 500 and the passive damper 1000 for precisely isolating and dissipating impact energy, the height detection and control device 700 for detecting horizontal postures and lateral displacements, and the permanent magnet negative stiffness module 900 for reducing the natural frequency of a system are respectively arranged in parallel at intervals between the upper bottom surface of the frame 100 and four inner side surfaces of the frame 100 and the vibration isolation platform 200, and are respectively connected with the frame 100 and the vibration isolation platform 200 at intervals between the four inner side surfaces of the frame 100 and the vibration isolation platform 200.
When the air-floating vibration isolation device is used, a plurality of height detection and control devices 700 are installed at different positions on the same surface in parallel with the air-floating vibration isolation units 400, the processor 800 controls the height detection and control devices 700 to inflate the group of air-floating vibration isolation units 400, the supporting force of transported large-scale precise equipment is provided, vibration generated by the ground is attenuated by the air springs 402 and the permanent magnet negative stiffness modules 900 and then is transmitted to the transported large-scale precise equipment, and a plurality of active damping units 500 are installed in parallel with the single group of air-floating vibration isolation units 400, so that the damping of the system can be precisely regulated and controlled, and the vibration transmission rate at the natural frequency is further reduced. Specifically, the height detection and control device 700 includes a height detection device 710 and an air charging and discharging unit 720, the height detection device 710 mounted on the upper bottom surface of the vibration isolation platform 200 detects the floating height of the vibration isolation platform at the mounting position in real time, the height detection device 710 mounted on the side surface of the vibration isolation platform detects the horizontal relative displacement between the vibration isolation platform 200 and the vehicle frame 100 in real time, and feeds back the result to the processor 800 for processing, when the transportation equipment receives the vibration action such as bump on the ground, the air charging and discharging unit 400 is charged and discharged by controlling the air charging and discharging unit 720, so that the vibration isolation platform is always kept in a constant horizontal posture, and the anti-swing control of the vibration isolation platform is realized; when receiving strong impact, the active damping unit 500 generates a larger damping force according to the vibration speed, and meanwhile, the passive damper 1000 also generates a corresponding damping force, and the active damping is connected in parallel to rapidly dissipate impact energy, so that the air floatation vibration isolation unit 400 is safe and reliable, but the air floatation vibration isolation unit 400 cannot rapidly adjust the air pressure value inside the air spring 402, so that the vibration isolation platform generates a larger relative displacement, and at the moment, the limiting unit 600 contacts with the vibration isolation platform and generates a limiting effect, so that the safety protection of transported large-scale precise equipment is realized.
Specifically, the air-floating vibration isolation unit 400 includes an air chamber 401 and an air spring 402, wherein the air chamber 401 is fixedly installed on the frame 100, the air spring 402 is fixedly installed on the air chamber 401, the upper end of the air spring is fixedly connected to the vibration isolation platform 200, the air paths between the air spring 402 and the air chamber 401 are communicated, and when the air-floating vibration isolation unit 400 is inflated by the air inflation and deflation unit 720, inflation gas firstly enters the air chamber 401 and then enters the corresponding air spring 402.
Specifically, the active damping unit 500 includes an active damper 501 and a speed sensor 502.
Specifically, the limiting unit 600 includes a limiter bracket 601 and a limiter 602, where the limiter bracket 601 is fixedly mounted on the frame 100, the limiter 602 is fixedly mounted on the limiter bracket 601, and a certain safety gap is left between the upper end surface of the limiter 602 and the vibration isolation platform 200.
Specifically, the height detecting device 710 and the air charging and discharging unit 720 are fixedly connected to the air chamber 401 of the air-floating vibration isolation unit through a connecting piece 714. The height detection device 710 comprises a grating ruler reading head connecting piece 711, a grating ruler guide rail 712 and a grating ruler reading head 713, wherein the grating ruler reading head 711 is slidably connected to the grating ruler guide rail 712, one end of the grating ruler reading head connecting piece 711 is connected with the grating ruler reading head 713, and the other end of the grating ruler reading head connecting piece 711 is connected with the vibration isolation platform. In the transportation process, when vibration from the ground is transmitted to the vibration isolation platform through the frame 100, the air chamber 401 and the air spring 402 to cause the vibration isolation platform 200 to vibrate, the vibration isolation platform 200 drives the grating ruler reading head 713 to slide on the grating ruler guide rail 712 through the grating ruler reading head connecting piece 711, so that the grating ruler reading is changed, further, the relative displacement change between the frame 100 and the vibration isolation platform 200 at the connecting point is detected in real time, when the displacement change value exceeds a certain range, the inflation and deflation unit 720 is controlled to inflate and deflate the air-float vibration isolation unit 400, the posture adjustment of the vibration isolation platform 200 is realized, and when the displacement change is large, the limiting unit 600 is directly caused to be in contact with the vibration isolation platform 200, and then the safety protection function is realized.
In conclusion, the invention can realize the precise vibration isolation effect in the process of transferring large-scale precise equipment. The high-performance air spring vibration isolator can achieve higher static stiffness and lower dynamic stiffness, the permanent magnet negative stiffness module 900 is added, the dynamic stiffness is further reduced by adopting a mode of parallel connection of positive stiffness and negative stiffness, the natural frequency of a system can be further reduced under the condition of large bearing, higher vibration isolation performance is guaranteed, meanwhile, the active damping unit 500 and the passive damper 1000 are used in parallel to increase system damping, the vibration transmission rate at the natural frequency can be further reduced, and therefore the precise vibration isolation effect in the transfer process is achieved.
The invention can realize the safety protection effect under the strong impact effect in the transportation process. According to the invention, the active damping unit 500, the limiting unit 600 and the passive damper 1000 are arranged between the vibration isolation platform 200 and the frame 100, and after the transported equipment is subjected to strong impact in the transportation process, the active damping and the passive damping are connected in parallel to generate larger damping force, so that the impact energy can be rapidly dissipated, the vibration isolation platform is safe and reliable, and the limiting unit 600 is arranged between the vibration isolation platform and the frame, so that the transported equipment can be prevented from being damaged due to larger displacement, and the safety protection effect under the strong impact in the transportation process is realized.
The invention can realize that the equipment to be transported is in a horizontal posture in the transportation process, and can effectively prevent the equipment from being damaged due to swinging in the transportation process. The invention uses the height detection and control device 700 to detect the relative displacement between the vibration isolation platform 200 and the frame 100 in real time, and controls the air charging and discharging unit 720 to charge and discharge the air spring 402 in real time through the processor 800, thereby ensuring that the equipment can stably transport in a constant posture.
The foregoing examples merely illustrate embodiments of the invention and are described in more detail and are not to be construed as limiting the scope of the invention. It should be noted that it will be apparent to those skilled in the art that several variations and modifications can be made without departing from the spirit of the invention, which are all within the scope of the invention. Accordingly, the scope of protection of the present invention is to be determined by the appended claims.
Claims (2)
1. The air-magnetic vibration isolation and active-passive damping transfer device for the large-scale precise equipment comprises a frame (100), a vibration isolation platform (200), an air-floatation vibration isolation unit (400), a height detection and control device (700) and a processor (800), wherein the vibration isolation platform (200) supports the transferred large-scale precise equipment (300); the method is characterized in that: the vibration isolation device further comprises an active damping unit (500), a limiting unit (600), a permanent magnet negative stiffness module (900) and a passive damper (1000), wherein the air floatation vibration isolation unit (400) is arranged between the upper bottom surface of the frame (100) and the four inner side surfaces and the vibration isolation platform (200) in parallel at intervals respectively, and is connected with the frame (100) and the vibration isolation platform (200); the device comprises an active damping unit (500) for precisely isolating vibration and dissipating impact energy, a height detection and control device (700) for detecting horizontal postures and lateral displacements, a permanent magnet negative stiffness module (900) for reducing the natural frequency of a system, and passive dampers (1000) which are respectively arranged in parallel at intervals between the upper bottom surface and four inner side surfaces of the frame (100) and the vibration isolation platform (200) and are connected with the frame (100) and the vibration isolation platform (200); the limiting units (600) are arranged in parallel between the upper bottom surface of the frame (100) and the four inner side surfaces and the vibration isolation platform (200) at intervals;
the height detection and control device (700) comprises a height detection device (710) and an inflation and deflation unit (720), the height detection device (710) comprises a grating ruler reading head connecting piece (711), a grating ruler guide rail (712) and a grating ruler reading head (713), the grating ruler reading head (713) is connected to the grating ruler guide rail (712) in a sliding mode, one end of the grating ruler reading head connecting piece (711) is connected with the grating ruler reading head (713), and the other end of the grating ruler reading head connecting piece is connected with the vibration isolation platform; the height detection device (710) and the inflation and deflation unit (720) are fixedly connected to the air chamber (401) of the air floatation vibration isolation unit through a connecting piece (714);
the air-floatation vibration isolation unit (400) comprises an air chamber (401) and an air spring (402), wherein the air chamber (401) is fixedly arranged on the frame (100), the air spring (402) is fixedly arranged on the air chamber (401), the upper end of the air spring is fixedly connected to the vibration isolation platform (200), the air paths between the air spring (402) and the air chamber (401) are communicated, and when the air-floatation vibration isolation unit (400) is inflated by the inflation and deflation unit (720), inflation gas firstly enters the air chamber (401) and then enters the corresponding air spring (402);
in the transferring process, when vibration from the ground is transmitted to the vibration isolation platform through the frame (100), the air chamber (401) and the air spring (402) to cause the vibration isolation platform (200) to vibrate, the vibration isolation platform (200) drives the grating ruler reading head (713) to slide on the grating ruler guide rail (712) through the grating ruler reading head connecting piece (711), so that the grating ruler reading changes, and further the relative displacement change between the frame (100) and the vibration isolation platform (200) is detected in real time; the height detection device (710) is arranged on the upper bottom surface of the vibration isolation platform (200) and used for detecting the floating height of the vibration isolation platform at the installation position in real time, the height detection device (710) is arranged on the side surface of the vibration isolation platform and used for detecting the horizontal relative displacement between the vibration isolation platform (200) and the vehicle frame (100) in real time, and the result is fed back to the processor (800) for processing;
the permanent magnet negative stiffness module (900) adopts a mode of parallel connection of positive and negative stiffness to further reduce dynamic stiffness, and can further reduce vibration transmissivity at a natural frequency, so that a transfer effect of precise vibration isolation is achieved, and meanwhile, a passive damper (1000) and an active damping unit (500) are used in parallel to precisely regulate and control system damping, so that rapid dissipation of impact energy is achieved, and transfer safety is guaranteed.
2. The large-scale precision equipment gas-magnetic vibration isolation and active-passive damping transfer device according to claim 1, wherein the device is characterized in that: the limiting unit (600) comprises a limiter bracket (601) and a limiter (602), wherein the limiter bracket (601) is fixedly arranged on the frame (100), the limiter (602) is fixedly arranged on the limiter bracket (601), and a certain safety gap is reserved between the upper end face of the limiter (602) and the vibration isolation platform (200).
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