CN101701616A - Active vibration isolation platform - Google Patents

Active vibration isolation platform Download PDF

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Publication number
CN101701616A
CN101701616A CN200910199149A CN200910199149A CN101701616A CN 101701616 A CN101701616 A CN 101701616A CN 200910199149 A CN200910199149 A CN 200910199149A CN 200910199149 A CN200910199149 A CN 200910199149A CN 101701616 A CN101701616 A CN 101701616A
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motor
platform
output
sensor
vibration isolation
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张涛
刘芳
徐嘉
黄宏彪
赵芳芳
孙平平
朱健强
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Shanghai Institute of Optics and Fine Mechanics of CAS
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Shanghai Institute of Optics and Fine Mechanics of CAS
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Abstract

The invention relates to an active vibration isolation platform which comprises a platform, a sensor, a controller and an electrical actuator. The active vibration isolation platform has the working principle that the sensor measures the vibrations of the groundsill and platform; the controller controls the output of the electrical actuator according to the measurement signal of the sensor and a certain control algorithm; the rotor of the motor is connected with the platform through an actuating spring, and outputs displacement or angular displacement according to the control command of the controller; the displacement output is converted to force output by the actuating spring, or the angular displacement output is converted to a moment output, thereby reducing the platform vibrations; high-frequency noise can not be transferred by the electrical actuator of the invention; and the electrical actuator of the invention has larger output stroke and output force.

Description

The active vibration isolation platform
Technical field
The present invention relates to vibration control, particularly a kind of active vibration isolation platform.
Background technique
Usually the method for vibration control has three kinds: weaken vibration source intensity, vibration isolation and absorbing.Vibration isolation is exactly the components and parts that increase attenuation vibration between vibration source and damping body, generally speaking, the passive vibration isolation device that employing is made of spring and damper (PVI-Passive Vibration Isolation), air cushion shock absorber for example, it has reliably obtained extensive use because of performance simple in structure.But passive vibration isolation has its intrinsic shortcoming: at first be that resonance is amplified and high frequency attenuation is conflicting to the requirement of damping ratio, damping ratio must be taken all factors into consideration during design, compromise selection; Secondly for the effective bandwith that increases vibration isolator need reduce the natural frequency of vibration isolator, but considering that structure realizes and precision of equipment installation that the support stiffness of vibration isolator can not be too low, is the low-frequency vibration that can not decay of passive vibration isolation device once more.
A method that addresses the above problem is to increase sensor, controller and actuator in PVI, constitutes active vibration isolation device (AVI-Active Vibration Isolation), obtains better static stability and dynamic performance.Actuator is general and PVI is in parallel or series connection is used, the high-frequency vibration isolation performance of system is owing to the restriction of actuator output bandwidth worsens when parallel connection, actuator need be born huge static load when series connection, and this has proposed harsh requirement to actuator, causes system cost sharply to rise simultaneously.Actuator rigidity and load stiffness coupling are one of most important aspects of considering when selecting the suitable actuation device, and the output displacement of actuator should be not less than the displacement of vibration source.
At present the actuator of generally using has: electronic/electromagnetic actuator, hydraulic actuator, pneumatic actuator, reaction mass block actuator, magnetostrictive actuator, piezoelectric actuator, marmem actuator.Hydraulic actuator can produce bigger displacement and ouput force, but output bandwidth is limited and equipment is complicated, the effective bandwith of same pneumatic actuator and marmem actuator is also limited, be no more than 10Hz, the output displacement of piezoelectric actuator and magnetostrictive actuator is very limited, is difficult to competent low-frequency vibration control.
The AVI that the STACIS active vibration isolation platform of TMC Corp.'s exploitation has adopted piezoelectric actuator and PVI series connection to constitute, because actuator will be born whole loads, the piezoelectric actuator diameter of selecting for use is 25.4mm, high 32mm is with high costs.
Summary of the invention
Technical problem to be solved by this invention is: overcome the limitation of existing pneumatic spring vibration-isolating platform in medium and low frequency vibration isolation ability, overcome output displacement and the isoparametric gap of output rigidity that existing actuator exists simultaneously, a kind of active vibration isolation platform is provided, and design having and have bigger output displacement under the situation of certain ouput force, can be used for described active vibration isolation platform with the air cushion shock absorber motor actuator of using in parallel.
Technological scheme of the present invention is:
A kind of active vibration isolation platform, characteristics are that its structure comprises platform and a plurality of single-degree-of-freedom vibration isolation module that a plurality of pneumatic springs support, described single-degree-of-freedom vibration isolation module is by the motor actuator, first sensor, controller, second sensor constitutes, described motor actuator is made of motor with mover or rotor and stator and driving spring, described pneumatic spring is connected between ground and the described platform, the stator of described motor is fixedlyed connected with described ground, the mover of described motor or rotor are connected with described platform by described driving spring, described first sensor is measured the vibration information of described platform, the vibration information of the described ground of described second sensor measurement, the output terminal of described first sensor, the signal output part of the output terminal of second sensor and the mover of described motor or rotor links to each other with the signal input part of described controller, and the signal output part of described controller links to each other with the control end of the driving power of described motor.
Described motor is linear stepping motor or electric rotating machine.
Described motor actuator is to be made of linear stepping motor and driving spring: a L type base plate, be fixed on the long slab length direction of described L type base plate with four bolts and four L type postive stop baffles stator respectively described linear stepping motor, four block buffering pads are bonded at respectively on described four L type postive stop baffles, and be positioned at the both sides of two ends of described linear stepping motor mover stroke, described linear stepping motor mover is crossed on the stator of described linear stepping motor, fixed block of the roof anchorage of described linear stepping motor mover, described driving spring is connected between described fixed block and the described platform, is fixed on the ground by the short slab of bolt with L type base plate.
Described driving spring is subjected to tensile stress when working.
The power output that described controller is controlled the motor actuator according to the oscillating signal and the default control law of described platform of described first sensor, second sensor measurement, and by described driving spring the power that is converted into is exported in the displacement of motor and exported, or the angular displacement of motor output is converted into moment output, or the angular displacement of motor output is converted into moment output by leading screw, thereby reduce the vibration of platform.
Utilize the vibration of sensor measurement ground and platform, controller is restrained controlled signal according to these signals according to expectant control, and control motor actuator is exported a certain size power, reduces the platform vibration.Wherein the technological scheme of motor actuator is to utilize linear motor rotor to promote driving spring, driving spring is converted into power output to the displacement of motor output, perhaps electric rotating machine is converted into straight line motion by ball screw rotatablely moving, promote the spring ouput force by slide block, perhaps directly the angular displacement of rotary motor rotor output is converted into moment output, owing to can accurately control the output displacement or the angular displacement of motor, thereby can accurately control ouput force or moment.The resolution of ouput force is relevant with spring rate by the repetitive positioning accuracy of motor, can obtain wide parameter range of choice as required.Utilized the driving spring ability of large deformation is arranged simultaneously, satisfied air cushion shock absorber in working order and huge gap is arranged and between the off working state the requirement of motor actuator.
The present invention has the following advantages:
Satisfied and of the harsh requirement of the air cushion shock absorber actuator of using in parallel parameter;
Can design motor actuator delivery stroke and ouput force easily, fill up the blank of existing motor actuator.
Description of drawings
Fig. 1 is an active vibration isolation platform one degree of freedom modeling schematic representation of the present invention;
Fig. 2 is the plan view of motor actuator of the present invention;
Fig. 3 is the plan view of Fig. 2 invention motor actuator;
Fig. 4 is the power output performance figure of motor actuator of the present invention;
Fig. 5 is the power output performance figure of motor actuator of the present invention.
Embodiment
Below with reference to embodiment and accompanying drawing the present invention is described further, but should limit protection scope of the present invention with this.
See also Fig. 1 earlier, Fig. 1 is an active vibration isolation platform one degree of freedom modeling schematic representation of the present invention, active vibration isolation platform of the present invention, its structure comprises platform 1 and a plurality of single-degree-of-freedom vibration isolation module that a plurality of pneumatic springs 2 support, described single-degree-of-freedom vibration isolation module is by motor actuator 3, first sensor 6, controller 7, second sensor 8 constitutes, described motor actuator 3 is made of motor with mover or rotor 13 and stator 12 and driving spring 14, described pneumatic spring 2 is connected between ground 9 and the described platform 1, the stator 12 of described motor is fixedlyed connected with described ground 9, the mover of described motor or rotor 13 are connected with described platform 1 by described driving spring 14, described first sensor 6 is measured the vibration information of described platform 1, described second sensor 8 is measured the vibration information of described ground 9, the output terminal of described first sensor 6, the signal output part of the output terminal of second sensor 8 and the mover of described motor or rotor 13 links to each other with the signal input part of described controller 7, and the signal output part of described controller 7 links to each other with the control end of the driving power of described motor.Described driving spring 14 is subjected to tensile stress when working.
Its working principle is that oscillating signal, second sensor 8 of first sensor 6 measuring tables 1 measured the oscillating signal of ground 9 and be input to controller 7, the carry-out bit shifting signal of motor actuator 3 also feeds back to controller 7, via controller 7 calculates according to control law and obtains control signal, through amplifying rear driving motor output displacement, thereby 14 pairs of platforms 1 of driving spring apply different pulling force, to reduce the vibration of platform 1.Platform 1 is supported by 3 pneumatic springs at least, and a motor actuator can only be controlled a translational degree of freedom of platform 1, if the six-freedom degree of control platform needs six motor actuator at least.
Fig. 2 is the plan view of linear stepping motor motor actuator of the present invention, and Fig. 3 is the plan view of Fig. 2 invention motor actuator.Described motor actuator 3 is to be made of linear stepping motor and driving spring 14: a L type base plate 18, use four bolts 22 respectively, 23,24,25 and four L type postive stop baffles 10,16,101,161 stators 12 with described linear stepping motor are fixed on the long slab length direction of described L type base plate 18, four block buffering pads 11,15,111,151 are bonded at described four L type postive stop baffles 10 respectively, 16,101, on 161, and be positioned at the both sides of two ends of described linear stepping motor mover 13 strokes, described linear stepping motor mover 13 is crossed on the stator 12 of described linear stepping motor, fixed block 17 of the roof anchorage of described linear stepping motor mover 13, described driving spring 14 is connected between described fixed block 17 and the described platform 1, is fixed on the ground 9 by the short slab of bolt 21 with L type base plate 18.
The end of electric mover 13 strokes contacts with cushion pad 11 or cushion pad 15, bear the stressed of the overwhelming majority, prevent to damage stepper motor, pneumatic spring 2 under off working state owing to emit inner air, the length of pneumatic spring 2 reduces, thereby cause platform 1 in working order and certain displacement arranged between the off working state, to the requirement of motor actuator 3 is that a end that its driving spring 14 is connected with platform 1 is not damaged when producing same big displacement, because motor actuator 3 of the present invention driving spring 14 when work is subjected to tensile stress, under off working state tensile stress diminish or driving spring 14 under pressure stress for statically indeterminate structure, be in instability status when pressure stress is excessive, thereby reduce the stressed of motor actuator 3 movers 13, can not damage stepper motor, can meet this requirement.
The design of motor actuator is selected with linear electric motor:
The stroke Lm of linear stepping motor mover 13, repetitive positioning accuracy D m, maximum ouput force F m, top speed V m, maximum acceleration a m, driving spring 14 rigidity k mK, initial length L Spring, pneumatic spring 2 inflated conditions and non-inflated state height difference are h, platform 1 quality m, and damping c,
In Fig. 1, if the ouput force of motor actuator 3 is f (t), then the motion equation of platform 1 is:
m x · · o ( t ) + c ( x · o ( t ) - x · i ( t ) ) + k ( x o ( t ) - x i ( t ) ) + f ( t ) = 0 - - - ( 1 )
The control law that following formula is carried out laplace transformation and employing is:
Figure G2009101991496D0000051
F (s) wherein, X o(s), X i(s) be respectively f (t), x o(t), x i(t) laplace transformation can obtain the transfer function of platform 1:
G ( s ) = cs + k ( m + m a ) s 2 + ( c + c a ) s + ( k + k a ) - - - ( 3 )
Reasonably design control law promptly designs m a, c a, k aParameter obtains the amplitude versus frequency characte of expectation, obtains the ouput force of motor actuator 3 again according to formula (2) control law, determines that the ouput force to motor actuator 3 requires in the frequency range in ACTIVE CONTROL:
f(t)＝L -1{[m as 2+c as+k a]X o(s)} (4)
X wherein o(t) be the vibration input of active vibration isolation platform working environment.Also can select other control laws, the requirement of acquisition to motor actuator ouput force uses the same method.
The no dead band of output and prevent the spring unstability when guaranteeing motor actuator 3 work need apply pretension to the motor actuator, and motor actuator 3 is in tensile stress state when working, so the maximum ouput force of linear stepping motor should satisfy:
F m≥L mk mK (5)
The extreme length that plastic deformation does not take place driving spring 14 is L Out, then the maximum effectively output displacement of motor actuator 3 is:
L m?max＝L out-L spring-L m (6)
Guarantee driving spring 14 plastic-less deformation after the deformation of compression h length simultaneously, ignore the DC component of the ouput force of motor actuator 3, if the output displacement of linear stepping motor mover 13 is L, then effective ouput force of motor actuator 3 is:
f m＝-Lk mK，L∈[-L m/2，L m/2] (7)
The maximum effectively ouput force of motor actuator 3 is:
f m max = 1 2 × L m k m K - - - ( 8 )
The resolution of the ouput force of motor actuator 3 is:
f mres＝k mKD m (9)
Can be according to formula (8) and (9) and the rigidity k that the requirement of motor actuator is taken all factors into consideration driving spring 14 mK, the rigidity that increases driving spring 14 can increase the maximum effectively ouput force of motor actuator 3, but reduce the ouput force resolution of motor actuator 3, should guarantee the rigidity of the rigidity of driving spring 14 simultaneously, prevent that dither is along 3 propagation of motor actuator much smaller than pneumatic spring 2.By and select the stroke L of suitable stepper motor mWith repetitive positioning accuracy D mBecause driving spring 14 can produce bigger deformation, motor actuator 3 normal power output also can be arranged under the bigger situation of output change in displacement, so the delivery stroke of motor actuator 3 can satisfy the requirement of ACTIVE CONTROL.
Under quasi-static situation, the maximum effectively ouput force of motor actuator 3 is subjected to stepper motor stroke L mInfluence, its maximum effectively ouput force is:
F out＝f m?max (10)
Along with the raising of frequency of okperation, the output of motor actuator begins to be subjected to linear stepping motor top speed V mWith maximum acceleration a mInfluence, when:
V m 2 ≤ L m a m - - - ( 11 )
Effective ouput force of motor actuator 3 is subjected to the top speed V of stepper motor mover 13 mThe frequency range of restriction is:
f VL = 1 2 · V m a m L m a m + V m 2 ≤ f ≤ f VH = a m 4 V m - - - ( 12 )
The maximum ouput force of this wave band motor actuator is:
F out = f m max · 1 L m · [ V m 2 a m + V m ( 1 2 f - 2 V m a m ) ] - - - ( 13 )
Effective ouput force of motor actuator 3 is subjected to linear stepping motor mover maximum acceleration a mThe frequency range of restriction is:
f ≥ f VH = a m 4 V m - - - ( 14 )
The maximum ouput force of this wave band motor actuator 3 is:
F out = f m max · 1 L m · a m 16 f 2 - - - ( 15 )
The power output performance of motor actuator as shown in Figure 4, its longitudinal axis is represented dimensionless ouput force F Out/ f M max, abscissa is represented frequency of okperation, the Hz of unit.When:
V m 2 ≥ L m a m - - - ( 16 )
Linear stepping motor does not reach its top speed in the course of the work, and the power output capability of motor actuator is subjected to stepper motor maximum acceleration a during high frequency mInfluence, this threshold frequency is:
f c = 1 4 · a m L m - - - ( 17 )
The motor actuator is operated in frequency f cBelow, its power output performance is with (10), and when being higher than this frequency, its power output performance is with (15), as shown in Figure 5.
According to formula (10), (13) and (15) and to the requirement of motor actuator 3, determine rate request and acceleration requirement to stepper motor.
Consider the repetitive positioning accuracy D of stepper motor mover 13 m, the work cutoff frequency of motor actuator is:
f cut = a m 32 D m - - - ( 18 )
On this cutoff frequency, the motor actuator does not have effective output, shows as passive device.
In the embodiment shown in Figure 2, motor can be that stepper motor or the actuating motor that rotates is converted into displacement output to angular displacement output by ball screw.If the rotation positioning precision is θ, maximum angular rate is α, and maximum angular acceleration is β, and the helical pitch of ball screw is l r, stroke is L rThen
D m＝l rθ/360 (19)
V m＝l rα/360 (20)
a m＝l rβ/360 (21)
L m＝L r (22)
Narration according to the front designs the motor actuator then.
Experiment shows: sensor measurement foundation vibration of the present invention and platform vibration, the output that controller is controlled the motor actuator according to measurement signal and certain control algorithm of sensor, electric mover or rotor are connected with platform by driving spring, electric mover or rotor are according to the control command output displacement or the angular displacement of controller, by driving spring displacement output is converted into power output, perhaps angular displacement output is converted into moment output, reduces the platform vibration; The present invention has overcome the limitation of existing pneumatic spring vibration-isolating platform in medium and low frequency vibration isolation ability, existing actuator output displacement that exists and the problem of exporting the isoparametric gap of rigidity have been overcome simultaneously, dither can not transmit by motor actuator of the present invention simultaneously, and the motor actuator has bigger delivery stroke.

Claims (5)

1. active vibration isolation platform, feature is that its structure comprises platform (1) and a plurality of single-degree-of-freedom vibration isolation module that a plurality of pneumatic springs (2) support, described single-degree-of-freedom vibration isolation module is by motor actuator (3), first sensor (6), controller (7), second sensor (8) constitutes, described motor actuator (3) is made of motor with mover or rotor (13) and stator (12) and driving spring (14), described pneumatic spring (2) is connected between ground (9) and the described platform (1), the stator of described motor (12) is fixedlyed connected with described ground (9), the mover of described motor or rotor (13) are connected with described platform (1) by described driving spring (14), described first sensor (6) is measured the vibration information of described platform (1), described second sensor (8) is measured the vibration information of described ground (9), the output terminal of described first sensor (6), the signal output part of the output terminal of second sensor (8) and the mover of described motor or rotor (13) links to each other with the signal input part of described controller (7), and the signal output part of described controller (7) links to each other with the control end of the driving power of described motor.
2. according to claim 1 active vibration isolation platform, it is characterized in that described motor is linear stepping motor or electric rotating machine.
3. according to claim 2 active vibration isolation platform, it is characterized in that, described motor actuator (3) is to be made of linear stepping motor and driving spring (14): a L type base plate (18), use four bolts (22 respectively, 23,24,25) and four L type postive stop baffles (10,16,101,161) stator (12) with described linear stepping motor is fixed on the long slab length direction of described L type base plate (18), four block buffering pads (11,15,111,151) be bonded at described four L type postive stop baffles (10 respectively, 16,101,161) on, and be positioned at the both sides of two ends of described linear stepping motor mover (13) stroke, described linear stepping motor mover (13) is crossed on the stator (12) of described linear stepping motor, a fixed block of the roof anchorage of described linear stepping motor mover (13) (17), described driving spring (14) is connected between described fixed block (17) and the described platform (1), is fixed on the ground (9) by the short slab of bolt (21) with L type base plate (18).
4. according to claim 2 active vibration isolation platform, it is characterized in that, be subjected to tensile stress during described driving spring (14) work.
5. according to claim 2 active vibration isolation platform, it is characterized in that, the power output that described controller (7) is controlled the motor actuator according to the oscillating signal and the default control law of described platform of described first sensor, second sensor measurement, and by described driving spring the power that is converted into is exported in the displacement of motor and exported, or the angular displacement of motor output is converted into moment output, or the angular displacement of motor output is converted into moment output by leading screw, thereby reduce the vibration of platform.
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