CN115217894A - Air floatation vibration isolation and damping protection transfer device and method for large-scale precision equipment - Google Patents

Air floatation vibration isolation and damping protection transfer device and method for large-scale precision equipment Download PDF

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Publication number
CN115217894A
CN115217894A CN202210835016.9A CN202210835016A CN115217894A CN 115217894 A CN115217894 A CN 115217894A CN 202210835016 A CN202210835016 A CN 202210835016A CN 115217894 A CN115217894 A CN 115217894A
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China
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vibration isolation
air
height value
precision equipment
frame
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CN202210835016.9A
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CN115217894B (en
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崔俊宁
程钟义
唐然
边星元
谭久彬
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Harbin Institute of Technology
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Harbin Institute of Technology
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    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16FSPRINGS; SHOCK-ABSORBERS; MEANS FOR DAMPING VIBRATION
    • F16F15/00Suppression of vibrations in systems; Means or arrangements for avoiding or reducing out-of-balance forces, e.g. due to motion
    • F16F15/02Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems
    • F16F15/022Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems using dampers and springs in combination
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B60VEHICLES IN GENERAL
    • B60PVEHICLES ADAPTED FOR LOAD TRANSPORTATION OR TO TRANSPORT, TO CARRY, OR TO COMPRISE SPECIAL LOADS OR OBJECTS
    • B60P7/00Securing or covering of load on vehicles
    • B60P7/06Securing of load
    • B60P7/16Protecting against shocks
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16FSPRINGS; SHOCK-ABSORBERS; MEANS FOR DAMPING VIBRATION
    • F16F15/00Suppression of vibrations in systems; Means or arrangements for avoiding or reducing out-of-balance forces, e.g. due to motion
    • F16F15/02Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems
    • F16F15/023Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems using fluid means
    • F16F15/0232Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems using fluid means with at least one gas spring
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16FSPRINGS; SHOCK-ABSORBERS; MEANS FOR DAMPING VIBRATION
    • F16F15/00Suppression of vibrations in systems; Means or arrangements for avoiding or reducing out-of-balance forces, e.g. due to motion
    • F16F15/02Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems
    • F16F15/023Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems using fluid means
    • F16F15/027Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems using fluid means comprising control arrangements
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00Measuring arrangements characterised by the use of optical techniques
    • G01B11/02Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/06Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
    • G01B11/0608Height gauges
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16FSPRINGS; SHOCK-ABSORBERS; MEANS FOR DAMPING VIBRATION
    • F16F2228/00Functional characteristics, e.g. variability, frequency-dependence
    • F16F2228/06Stiffness
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16FSPRINGS; SHOCK-ABSORBERS; MEANS FOR DAMPING VIBRATION
    • F16F2228/00Functional characteristics, e.g. variability, frequency-dependence
    • F16F2228/06Stiffness
    • F16F2228/066Variable stiffness
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16FSPRINGS; SHOCK-ABSORBERS; MEANS FOR DAMPING VIBRATION
    • F16F2230/00Purpose; Design features
    • F16F2230/0047Measuring, indicating
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16FSPRINGS; SHOCK-ABSORBERS; MEANS FOR DAMPING VIBRATION
    • F16F2230/00Purpose; Design features
    • F16F2230/06Fluid filling or discharging

Abstract

The invention relates to an air-flotation vibration isolation and damping protection transfer device and method for large-scale precision equipment, belonging to the technical field of transfer equipment, and the technical scheme comprises a frame, a vibration isolation platform, an air-flotation vibration isolation unit, a passive damper, a limiting unit, a height detection and control device and a processor, wherein the vibration isolation platform supports the transferred equipment; the air-flotation vibration isolation unit, the passive damper, the limiting unit and the height detection and control device are respectively arranged in parallel between the upper bottom surface and four inner side surfaces of the frame and the vibration isolation platform at intervals. Three-way vibration isolation is realized by arranging the three-way vibration isolation units, swinging and shaking can be effectively inhibited while the attitude is constant in the transferring process, the vibration isolation performance is improved by adding the damping units and the limiting units, safety protection under the strong impact effect is realized, and the transferring problem that three-way precision vibration isolation and impact protection cannot be realized in the transferring process of large precision equipment in the prior art is solved.

Description

Air floatation vibration isolation and damping protection transfer device and method for large-scale precision equipment
Technical Field
The invention belongs to the technical field of transfer equipment, and particularly relates to an air floatation vibration isolation and damping protection transfer device and method for large-scale precision equipment.
Background
Large-scale precision equipment, especially after precision assembly, often has characteristics such as big volume, big quality, high stationarity requirement, and the operation process is requested badly when transporting. Large-scale precision equipment need guarantee invariable gesture and stable support at the transportation in-process, and slight vibration often can influence equipment wholeness ability in the transportation, and the impact effect that ground jolted the production also can exert an influence to the security performance of equipment, especially under the unbalance loading condition, the strong impact effect that ground jolted the production can directly lead to equipment skew, upset, causes the threat to equipment itself and transportation personnel's safety.
The air cushion vehicle utilizes the gas film technology to support the load in a suspension manner, avoids the contact with the ground, produces good vibration isolation effect and plays an important role in the transportation of precision instruments. The patent No. 201010242011.2 discloses an automatic leveling control device for an air cushion suspension transport vehicle, which utilizes signals sent by high and low photoelectric switches to control air charging and discharging of an air cushion, so as to realize an automatic leveling function. The technical scheme is characterized in that: (1) According to the technical scheme, the air cushion vehicle is utilized to realize a good vertical vibration isolation effect, but due to the lack of a damping device, the vibration amplification effect at the natural frequency in the transferring process can damage the transferred equipment; (2) The technical scheme can not realize safety protection under the action of strong impact, when the strong impact is caused by factors such as ground bump and the like, huge impact energy can not be dissipated and then directly acts on the transported equipment to cause the transported equipment to be damaged, meanwhile, the strong impact instantaneously causes larger relative displacement between the transported equipment and the ground, and the transported equipment can be directly caused to generate rigid collision to cause damage due to the lack of a limiting device; (3) According to the technical scheme, the photoelectric switch is used as the height sensor, the height of the air cushion transfer trolley cannot be detected and adjusted in real time, the horizontal posture is adjusted by a height adjusting method, supporting force is not applied in the horizontal direction, and swing caused by ground jolt in the transfer process cannot be effectively restrained.
The patent No. 201310280075.5 discloses an intelligent air cushion transfer vehicle and a control method thereof, the technical scheme adopts a method of arranging height sensors at four corners of a frame of the air cushion transfer vehicle to feed back the height of a vehicle body relative to the ground in real time, and a remote control main processor controls an air cushion inflation and deflation unit according to vehicle body height information to realize the adjustment of the fluctuation height of the vehicle body and achieve the purpose of controlling the posture of the vehicle body. The technical scheme is characterized in that: (1) According to the technical scheme, the air cushion vehicle is used for realizing a good vertical vibration isolation effect, but due to the lack of a damping device, the vibration amplification effect at the natural frequency in the transferring process can damage the transferred equipment; (2) The technical scheme can not realize safety protection under the action of strong impact, when the high-impact energy is caused by factors such as ground jolt, huge impact energy cannot be dissipated and then directly acts on transported equipment to cause the damage of the transported equipment, meanwhile, the strong impact action instantly causes larger relative displacement between the transported equipment and the ground, and the rigid collision of the transported equipment can be directly caused to cause the damage due to the lack of a limiting device; (3) According to the technical scheme, the height sensor is adopted to detect and adjust the height of the air cushion transfer trolley in real time, constant horizontal posture is guaranteed to a certain extent, but the horizontal posture is adjusted by a height adjusting method, supporting force is not applied in the horizontal direction, and swing caused by ground bumping in the transferring process cannot be restrained.
The patent No. 202110749514.7 discloses a three-dimensional damping transfer box and a transfer handcart of using thereof, and this technical scheme installs horizontal damping rubber on four lateral walls of transfer box, has realized the three-dimensional vibration isolation in the mode of vertical damping rubber of box bottom installation. The technical scheme is characterized in that: (1) The technical scheme realizes the vibration isolation effect in three directions, can realize the transfer operation of general precision equipment with low requirement on the vibration environment, is simple and reliable, but cannot realize the safe transfer of the precision equipment with high requirement on the environmental vibration because the vibration isolation performance of the vibration-damping rubber is poor; (2) According to the technical scheme, rubber is adopted for vibration reduction in three directions, and when strong impact generated by factors such as uneven ground is met, a dissipation device for impact energy is lacked, so that the transferred equipment is damaged due to the huge impact energy; (3) The vibration isolation mode that this technical scheme adopted has decided that it can't guarantee that the posture is invariable in the transportation.
In conclusion, the existing device and method for transferring large precision equipment are difficult to give consideration to three-direction vibration isolation and posture regulation, the horizontal posture is regulated in a height regulating mode, acting force for horizontal posture regulation aiming at the swinging action is not generated in the horizontal direction, and meanwhile, when strong impact action caused by factors such as uneven road surface is encountered in the transferring process, an energy dissipation device is lacked, impact energy cannot be dissipated, and the transferred large precision equipment is damaged due to the fact that huge impact energy is transferred to the transferred large precision equipment. Therefore, it is urgently needed to provide an air floatation vibration isolation and damping protection transfer device and method for large-scale precision equipment so as to meet the requirements of China on the transfer aspect of large-scale precision equipment.
Disclosure of Invention
Aiming at the problems in the prior art, the invention aims to provide a device and a method for air floatation vibration isolation and damping protection transfer of large-scale precision equipment, so as to meet the requirements of precision vibration isolation and safety protection in the transfer process of the large-scale precision equipment in China.
In order to achieve the above object, the present invention provides a technical solution as follows:
a large-scale precision equipment air flotation vibration isolation and damping protection transfer device comprises a frame, a vibration isolation platform, an air flotation vibration isolation unit, a passive damper, a height detection and control device and a processor, wherein the vibration isolation platform supports the transferred large-scale precision equipment, and a plurality of air flotation vibration isolation units are respectively arranged between the upper bottom surface and four inner side surfaces of the frame and the vibration isolation platform in parallel at intervals and are connected with the frame and the vibration isolation platform; the passive dampers are respectively arranged in parallel between the upper bottom surface, the four inner side surfaces and the vibration isolation platform at intervals, and are connected with the frame and the vibration isolation platform; the height detection and control devices for detecting horizontal postures and lateral displacements are respectively arranged in parallel at intervals among the upper bottom surface of the frame, the four inner side surfaces and the vibration isolation platform and are all connected with the frame and the vibration isolation platform; the limiting units are arranged among the upper bottom surface of the frame, the four inner side surfaces and the vibration isolation platform in parallel at intervals.
Preferably, the air flotation vibration isolation unit comprises an air chamber and an air spring.
Preferably, the height detection and control device comprises a height detection device, a connecting piece and an air inflation and deflation unit.
Preferably, the height detection device comprises a grating ruler reading head connecting rod, a grating ruler guide rail and a grating ruler reading head.
In order to achieve the above object, another technical solution provided by the present invention is as follows:
the utility model provides a large-scale precision equipment air supporting vibration isolation and damping protection transfer method, uses above large-scale precision equipment air supporting vibration isolation and damping protection transfer device which characterized in that: the method comprises the following steps:
step 1, placing the transported large-scale precision equipment on a vibration isolation platform;
step 2, inputting a set floating height value and an insensitive zone value through a processor;
step 3, inputting a control value by the proportional valve 721 and opening the electromagnetic valve 722;
step 4, detecting the actual floating height value in real time by the height detection device;
and 5, the processor judges the actual floating height value returned by the height detection device in real time and controls the air charging and discharging unit to charge and discharge air to the air flotation vibration isolation unit according to the judgment result.
Preferably, the real-time determining step includes: step 1, comparing the actual floating height value with a set lower limit height value, if the actual floating height value is larger than/equal to the set lower limit height value, performing step 2, otherwise, increasing the air pressure controlled by a proportional valve 721 to inflate the air spring; and 2, comparing the actual floating height value with the set upper limit height value, if the actual floating height value is smaller than or equal to the set upper limit height value, keeping the air pressure controlled by the proportional valve 721 unchanged, and otherwise, reducing the air pressure controlled by the proportional valve 721 to deflate the control spring.
Preferably, the set lower height is equal to the set float height minus the deadband value, and the set upper height is equal to the set float height plus the deadband value.
The air-flotation vibration isolation and damping protection transfer device and method for the large-scale precision equipment, provided by the invention, have the following effects:
(1) The invention can realize the precise vibration isolation effect in the transfer process of large-scale precise equipment. The high-performance air spring vibration isolator can realize higher static rigidity and lower dynamic rigidity, can ensure higher vibration isolation performance under the condition of large load, and can further reduce the vibration transmission rate at the natural frequency by parallelly using the passive damper to increase the system damping, thereby realizing the precise vibration isolation effect in the transportation process of large-scale precise equipment.
(2) The invention can realize the safety protection effect under the action of strong impact in the transferring process. According to the invention, the passive damper and the limiting unit are arranged between the vibration isolation platform and the frame, so that the device to be transported can be subjected to a strong impact action in the transportation process, the impact energy can be rapidly dissipated, and meanwhile, the existence of the limiting unit can ensure that the device to be transported cannot generate larger displacement to be damaged, so that the safety protection effect under the strong impact action in the transportation process is realized.
(3) The invention can realize that the transported equipment is in a horizontal posture in the transporting process, and can effectively prevent the equipment from being damaged due to the swing of the transported equipment in the transporting process. The invention uses the height detection and control unit to detect the relative displacement between the vibration isolation platform and the frame in real time, and controls the air charging and discharging unit to charge and discharge the air spring in real time through the processor, thereby ensuring that the equipment can be stably transported in a constant posture.
Drawings
FIG. 1: the whole schematic diagram of the air floatation vibration isolation and damping protection transfer device of the large-scale precision equipment;
FIG. 2: a front view of a large-scale precision equipment air-flotation vibration isolation and damping protection transfer device without a frame;
FIG. 3: is a partial enlarged view of the height detection device of fig. 2;
FIG. 4: a left view of the air floatation vibration isolation and damping protection transfer device of the large-scale precision equipment without a frame;
FIG. 5: height and attitude adjustment block diagrams.
Reference numbers in the figures:
100. a frame; 200. a vibration isolation platform; 300. large-scale precision equipment; 400. an air flotation vibration isolation unit; 401. an air chamber; 402. an air spring; 500. a passive damper; 600. a limiting unit; 601. a stopper bracket; 602. a stopper; 700. a height detection and control device; 711. a grating ruler reading head connecting piece; 712. a grating scale guide rail; 713. a grating ruler reading head; 714. a connecting member; 710. a height detection device; 720. an air charging and discharging unit; 721. a proportional valve; 722. an electromagnetic valve; 800. a processor;
a. a set float height value; b. no band-induced value; c. an actual float height value; d. a set lower height limit; e. a set upper limit height.
Detailed Description
In order to make the objects, technical solutions and advantages of the present invention more apparent, the present invention will be further described with reference to the accompanying drawings and specific embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the invention and are not intended to limit the invention. All other embodiments, which can be obtained by a person skilled in the art without making any creative effort based on the embodiments in the present invention, belong to the protection scope of the present invention.
Example 1
The invention provides an air-flotation vibration isolation and damping protection transfer device for large-scale precision equipment, which comprises a frame 100, a vibration isolation platform 200, an air-flotation vibration isolation unit 400, a passive damper 500, a height detection and control device 700 and a processor 800, wherein the vibration isolation platform 200 supports the transferred large-scale precision equipment 300, the air-flotation vibration isolation unit 400 is respectively arranged in parallel between the upper bottom surface, four inner side surfaces and the vibration isolation platform 200 of the frame 100 at intervals, and is connected with the frame 100 and the vibration isolation platform 200; the vibration isolation platform further comprises a limiting unit 600, a plurality of passive dampers 500 for precise vibration isolation and impact energy dissipation are respectively arranged in parallel between the upper bottom surface and four inner side surfaces of the frame 100 and the vibration isolation platform 200 at intervals, and are all connected with the frame 100 and the vibration isolation platform 200; the height detection and control device 700 for detecting the horizontal posture and the lateral displacement is provided in parallel with a plurality of vibration isolation platforms 200 between the upper bottom surface and four inner side surfaces of the vehicle frame 100, and is connected to the vehicle frame 100 and the vibration isolation platforms 200; the limiting units 600 are arranged in parallel between the upper bottom surface of the frame 100, the four inner side surfaces of the frame and the vibration isolation platform 200 at intervals.
When the air floatation vibration isolation device is used, a plurality of height detection and control devices 700 are arranged in parallel with the air floatation vibration isolation unit 400 at different positions on the same surface, the processor 800 controls the height detection and control devices 700 to inflate the air floatation vibration isolation unit 400, so that supporting force of a transported large-scale precision device is provided, vibration generated by the ground is attenuated by the air spring 402 and then transmitted to the transported large-scale precision device, a plurality of passive dampers 500 are arranged in parallel with the single-group air floatation vibration isolation unit 400, so that damping force related to vibration speed is provided, and the vibration transmission rate at the natural frequency is further reduced. Specifically, the height detection device and control device 700 comprises a height detection device 710 and an air inflation and deflation unit 720, the height detection device 710 arranged on the lower bottom surface of the vibration isolation platform 200 detects the floating height of the vibration isolation platform at the installation position in real time, the height detection device 710 arranged on the side surface of the vibration isolation platform detects the horizontal relative displacement between the vibration isolation platform 200 and the frame 100 in real time, and feeds the result back to the processor 800 for processing, when the transfer equipment is impacted by ground bump and the like, the air inflation and deflation unit 720 is controlled to perform air inflation and deflation operation on the air flotation vibration isolation unit 400, so that the vibration isolation platform is always kept in a constant horizontal posture, and the anti-swing control of the vibration isolation platform is realized; when strong impact is received, the passive damper 500 dissipates vibration energy rapidly, but the air flotation vibration isolation unit 400 cannot achieve rapid adjustment of the air pressure value inside the air spring 402, so that the vibration isolation platform generates large relative displacement, and the limiting unit 600 contacts with the vibration isolation platform 200 and generates a limiting effect, so that safety protection of the transported large-scale precision equipment is achieved.
Specifically, the air flotation vibration isolation unit 400 includes an air chamber 401 and an air spring 402, wherein the air chamber 401 is fixedly mounted on the frame 100, the air spring 402 is fixedly mounted on the air chamber 401, the upper end of the air spring 402 is fixedly connected to the vibration isolation platform 200, and the air path between the air spring 402 and the air chamber 401 is communicated.
Specifically, the limiting unit 600 includes a limiter bracket 601 and a limiter 602, wherein the limiter bracket 601 is fixedly mounted on the frame 100, the limiter 602 is fixedly mounted on the limiter bracket 601, and a certain safety gap is left between the upper end surface of the limiter 602 and the vibration isolation platform 200.
Specifically, the height detection device 710 and the inflation/deflation unit 720 are fixedly connected to the air chamber 401 of the air flotation vibration isolation unit 400 through a connecting member 714. The height detection device 710 comprises a grating scale reading head connector 711, a grating scale guide rail 712 and a grating scale reading head 713, wherein the grating scale reading head 711 is connected to the grating scale guide rail 712 in a sliding manner, one end of the grating scale reading head connector 711 is connected with the grating scale reading head 713, and the other end of the grating scale reading head connector 711 is connected with the vibration isolation platform. In the transferring process, after vibration from the ground is transmitted to the vibration isolation platform through the vehicle frame 100, the air chamber 402 and the air spring 500 to cause the vibration isolation platform 200 to vibrate, the vibration isolation platform 200 drives the grating ruler reading head 713 to slide on the grating ruler guide rail 712 through the grating ruler reading head connecting piece 711, so that the reading change of the grating ruler is caused, and the relative displacement change between the vehicle frame 100 and the vibration isolation platform 200 at the connecting point is detected in real time.
Example 2
The invention provides an air-flotation vibration isolation and damping protection transfer method for large-scale precision equipment, which comprises the following steps as shown in figure 5:
step 1, placing the transferred large-scale precision equipment 300 on a vibration isolation platform 200;
step 2, inputting a set floating height value a and an insensitive zone value b through a processor 800;
step 3, inputting a control value by the proportional valve 721 and opening the electromagnetic valve 722;
step 4, the height detection device 710 detects the actual floating height value c in real time;
and 5, the processor 800 judges the actual floating height value c returned by the height detection device 710 in real time, and controls the air charging and discharging unit 720 to charge and discharge air to the air flotation vibration isolation unit 400 according to the judgment result.
In step 2, the actual floating height value c of the air spring should be greater than/equal to a set lower limit height value d and less than/equal to a set upper limit height value e, wherein the set lower limit height value d is the set floating height value a minus the insensitive zone value b, and the set upper limit height value e is the set floating height value a plus the insensitive zone value b. The dead band value b is a range in which the actual float height value c is not inflated or deflated in the vicinity of the set float height value a, and if the height detected by each height detection and control device 700 is within this range, it is considered that the vibration isolation platform 200 is in a constant posture.
In step 3, a control value of the proportional valve 721 is input, and the electromagnetic valve 722 is opened before initialization operation is performed on the proportional valve 721, the control value of the proportional valve 721 is calculated according to the load of the air spring 402 and the mass of the large-scale precision equipment subjected to vibration isolation, and the control value is an air pressure value corresponding to the height which can enable the air spring 402 to float and set according to theoretical calculation.
In step 4, the real-time detection of the actual floating height value c is performed by the height detection device 710, and in the case of ground vibration, the vibration generated on the ground is transmitted to the vibration isolation platform 200 through the frame 100, the air flotation vibration isolation unit 400, the passive damper 500 and the limiting unit 600, and the vibration isolation platform 200 vibrates and drives the grating scale reading head 713 to slide on the grating scale guide rail 712 through the grating scale reading head connector 711, so that the real-time detection of the relative displacement between the installation of the height detection device 710 and the workshop is performed.
The passive damper 500 generates a corresponding damping force under the driving of the relative displacement change between the vibration isolation platform 200 and the vehicle frame 100, and further attenuates the vibration at the natural frequency transmitted to the vibration isolation platform 200, thereby reducing the vibration transmission rate at the natural frequency and avoiding the damage of the transferred large-scale precision equipment 300 caused by the overlarge vibration at the natural frequency.
Under the general slight vibration condition, spacing unit 600 and vibration isolation platform 200 contactless to the inoperative leads to the vibration isolation platform to produce great displacement in the twinkling of an eye when the uneven strong impact such as jolting that produces of ground is used, and the real-time judgement and the operation of inflating and deflating in step 5 can not be to this kind of change quick response, effective control, and at this moment, spacing unit 600 plays limiting displacement, prevents that the vibration isolation platform from producing great displacement and leading to being transported precision equipment and destroyed. The limiter 602 may be a laminated rubber isolator.
In step 5, the step of real-time judgment comprises: step 1, comparing the actual floating height value c with a set lower limit height value d, if the actual floating height value c is larger than or equal to the set lower limit height value d, performing step 2, otherwise, increasing the air pressure controlled by a proportional valve 721 to inflate the air spring; and 2, comparing the actual floating height value c with a set upper limit height value e, if the actual floating height value c is larger than or equal to the set upper limit height value e, reducing the air pressure controlled by the proportional valve 721 to deflate the control spring, otherwise, keeping the air pressure controlled by the proportional valve 721 unchanged, and keeping the vibration isolation system in a normal working state.
In conclusion, the vibration isolation device can realize the precise vibration isolation effect in the transfer process of large-scale precise equipment. The high-performance air spring vibration isolator can realize higher static rigidity and lower dynamic rigidity, can ensure good vibration isolation performance under the condition of large load, and can further reduce the vibration at the natural frequency by parallelly using the passive damper 500 to increase the system damping, thereby realizing the precise vibration isolation effect in the transportation process of large-scale precise equipment.
The invention can realize the safety protection effect under the action of strong impact in the transfer process. According to the invention, the passive damper 500 and the limiting unit 600 are arranged between the vibration isolation platform 200 and the frame 100, the transferred equipment can be rapidly dissipated aiming at impact energy after being subjected to strong impact in the transferring process, and the existence of the limiting unit 600 can ensure that the transferred equipment cannot be damaged due to larger displacement, so that the safety protection effect under the strong impact in the transferring process is realized.
The invention can realize that the transported equipment is in a horizontal posture in the transporting process, and can effectively prevent the equipment from being damaged due to the swing of the transported equipment in the transporting process. The invention uses the height detection and control device 700 to detect the relative displacement between the vibration isolation platform 200 and the frame 100 in real time, and controls the air charging and discharging unit 720 to charge and discharge the air spring 402 in real time through the processor 800, thereby ensuring that the equipment can be stably transported in a constant posture.
The above-mentioned embodiments only express the embodiments of the present invention, and the description thereof is more specific and detailed, but not construed as limiting the scope of the present invention. It should be noted that various changes and modifications can be made by those skilled in the art without departing from the spirit of the invention, and these changes and modifications are all within the scope of the invention. Therefore, the protection scope of the present patent should be subject to the appended claims.

Claims (7)

1. A large-scale precision equipment air-flotation vibration isolation and damping protection transfer device comprises a frame (100), a vibration isolation platform (200), an air-flotation vibration isolation unit (400), a passive damper (500), a height detection and control device (700) and a processor (800), wherein the vibration isolation platform (200) supports a large-scale precision equipment (300) to be transferred, and a plurality of air-flotation vibration isolation units (400) are respectively arranged in parallel between the upper bottom surface, four inner side surfaces and the vibration isolation platform (200) of the frame (100) at intervals and are connected with the frame (100) and the vibration isolation platform (200); the method is characterized in that: the vibration isolation device is characterized by further comprising limiting units (600), wherein a plurality of passive dampers (500) for precise vibration isolation and impact energy dissipation are arranged in parallel at intervals among the upper bottom surface, four inner side surfaces and the vibration isolation platform (200) of the frame (100) and are connected with the frame (100) and the vibration isolation platform (200); the height detection and control devices (700) for detecting horizontal postures and lateral displacements are respectively arranged in parallel at intervals among the upper bottom surface of the frame (100), four inner side surfaces and the vibration isolation platform (200), and are connected with the frame (100) and the vibration isolation platform (200); the limiting units (600) are arranged among the upper bottom surface, the four inner side surfaces and the vibration isolation platform (200) of the frame (100) in parallel at intervals.
2. A large-scale precision equipment air flotation vibration isolation and damping protection transfer method, which uses the large-scale precision equipment air flotation vibration isolation and damping protection transfer device of claim 1, and is characterized in that: the method comprises the following steps:
step 1, placing the transferred large-scale precision equipment (300) on a vibration isolation platform (200);
step 2, inputting a set floating height value (a) and an insensitive zone value (b) through a processor (800);
step 3, inputting a control value by the proportional valve 721 and opening the electromagnetic valve 722;
step 4, detecting the actual floating height value (c) in real time by the height detection device (710);
and 5, the processor (800) judges the actual floating height value (c) returned by the height detection device (710) in real time, and controls the air charging and discharging unit (720) to charge and discharge air to the air flotation vibration isolation unit (400) according to the judgment result.
3. The large-scale precision equipment air flotation vibration isolation and damping protection transfer device according to claim 1, characterized in that: the air floatation vibration isolation unit (400) comprises an air chamber (401) and an air spring (402).
4. The large-scale precision equipment air flotation vibration isolation and damping protection transfer device according to claim 1, characterized in that: the height detection and control device (700) comprises a height detection device (710), a connecting piece (714) and an air inflation and deflation unit (720).
5. The large-scale precision equipment air flotation vibration isolation and damping protection transfer device according to claim 1 or claim 4, characterized in that: the height detection device (710) comprises a grating scale reading head connecting rod (711), a grating scale guide rail (712) and a grating scale reading head (713).
6. The air flotation vibration isolation and damping protection transfer method for the large-scale precision equipment as claimed in claim 2, wherein the method comprises the following steps: the real-time judging step comprises the following steps:
step 1, comparing the actual floating height value (c) with a set lower limit height value (d), if the actual floating height value (c) is larger than/equal to the set lower limit height value (d), performing step 2, otherwise, increasing the control air pressure of a proportional valve 721 to inflate the air spring;
and 2, comparing the actual floating height value (c) with the set upper limit height value (e), if the actual floating height value (c) is smaller than or equal to the set upper limit height value (e), keeping the air pressure controlled by the proportional valve 721 unchanged, and otherwise, reducing the air pressure controlled by the proportional valve 721 to deflate the control spring.
7. The air flotation vibration isolation and damping protection transfer method for the large-scale precision equipment according to claim 2 or claim 6, characterized in that: the set lower height value (d) is equal to the set float height value (a) minus the dead band value (b), and the set upper height value (e) is equal to the set float height value (a) plus the dead band value (b).
CN202210835016.9A 2022-07-15 2022-07-15 Large-scale precise equipment air floatation vibration isolation and damping protection transfer device and method Active CN115217894B (en)

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