CN115217890B - Large-scale precision equipment gas magnetic vibration isolation and active damping transfer device - Google Patents
Large-scale precision equipment gas magnetic vibration isolation and active damping transfer device Download PDFInfo
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- CN115217890B CN115217890B CN202210834997.5A CN202210834997A CN115217890B CN 115217890 B CN115217890 B CN 115217890B CN 202210834997 A CN202210834997 A CN 202210834997A CN 115217890 B CN115217890 B CN 115217890B
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- 238000002955 isolation Methods 0.000 title claims abstract description 125
- 238000013016 damping Methods 0.000 title claims abstract description 49
- 238000000034 method Methods 0.000 claims abstract description 32
- 238000001514 detection method Methods 0.000 claims abstract description 30
- 230000008569 process Effects 0.000 claims abstract description 27
- 230000000670 limiting effect Effects 0.000 claims abstract description 20
- 230000000694 effects Effects 0.000 claims description 20
- 230000036544 posture Effects 0.000 claims description 17
- 238000006073 displacement reaction Methods 0.000 claims description 16
- 238000007667 floating Methods 0.000 claims description 11
- 230000001105 regulatory effect Effects 0.000 claims description 6
- 230000008859 change Effects 0.000 claims description 4
- 230000001276 controlling effect Effects 0.000 claims description 4
- 238000009434 installation Methods 0.000 claims description 2
- 230000009471 action Effects 0.000 abstract description 5
- 238000007599 discharging Methods 0.000 description 7
- 230000003321 amplification Effects 0.000 description 2
- 230000005540 biological transmission Effects 0.000 description 2
- 238000003199 nucleic acid amplification method Methods 0.000 description 2
- 230000021715 photosynthesis, light harvesting Effects 0.000 description 2
- 230000003068 static effect Effects 0.000 description 2
- 230000002238 attenuated effect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 239000000725 suspension Substances 0.000 description 1
Classifications
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16F—SPRINGS; SHOCK-ABSORBERS; MEANS FOR DAMPING VIBRATION
- F16F15/00—Suppression of vibrations in systems; Means or arrangements for avoiding or reducing out-of-balance forces, e.g. due to motion
- F16F15/02—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems
- F16F15/022—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems using dampers and springs in combination
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B60—VEHICLES IN GENERAL
- B60P—VEHICLES ADAPTED FOR LOAD TRANSPORTATION OR TO TRANSPORT, TO CARRY, OR TO COMPRISE SPECIAL LOADS OR OBJECTS
- B60P7/00—Securing or covering of load on vehicles
- B60P7/06—Securing of load
- B60P7/16—Protecting against shocks
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16F—SPRINGS; SHOCK-ABSORBERS; MEANS FOR DAMPING VIBRATION
- F16F15/00—Suppression of vibrations in systems; Means or arrangements for avoiding or reducing out-of-balance forces, e.g. due to motion
- F16F15/02—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems
- F16F15/023—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems using fluid means
- F16F15/0232—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems using fluid means with at least one gas spring
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16F—SPRINGS; SHOCK-ABSORBERS; MEANS FOR DAMPING VIBRATION
- F16F15/00—Suppression of vibrations in systems; Means or arrangements for avoiding or reducing out-of-balance forces, e.g. due to motion
- F16F15/02—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems
- F16F15/023—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems using fluid means
- F16F15/027—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems using fluid means comprising control arrangements
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16F—SPRINGS; SHOCK-ABSORBERS; MEANS FOR DAMPING VIBRATION
- F16F15/00—Suppression of vibrations in systems; Means or arrangements for avoiding or reducing out-of-balance forces, e.g. due to motion
- F16F15/02—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems
- F16F15/03—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems using magnetic or electromagnetic means
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16F—SPRINGS; SHOCK-ABSORBERS; MEANS FOR DAMPING VIBRATION
- F16F15/00—Suppression of vibrations in systems; Means or arrangements for avoiding or reducing out-of-balance forces, e.g. due to motion
- F16F15/02—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems
- F16F15/04—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems using elastic means
- F16F15/046—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems using elastic means using combinations of springs of different kinds
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
- G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
- G01B11/0608—Height gauges
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16F—SPRINGS; SHOCK-ABSORBERS; MEANS FOR DAMPING VIBRATION
- F16F2222/00—Special physical effects, e.g. nature of damping effects
- F16F2222/06—Magnetic or electromagnetic
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16F—SPRINGS; SHOCK-ABSORBERS; MEANS FOR DAMPING VIBRATION
- F16F2228/00—Functional characteristics, e.g. variability, frequency-dependence
- F16F2228/06—Stiffness
- F16F2228/063—Negative stiffness
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16F—SPRINGS; SHOCK-ABSORBERS; MEANS FOR DAMPING VIBRATION
- F16F2228/00—Functional characteristics, e.g. variability, frequency-dependence
- F16F2228/06—Stiffness
- F16F2228/066—Variable stiffness
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16F—SPRINGS; SHOCK-ABSORBERS; MEANS FOR DAMPING VIBRATION
- F16F2230/00—Purpose; Design features
- F16F2230/0047—Measuring, indicating
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16F—SPRINGS; SHOCK-ABSORBERS; MEANS FOR DAMPING VIBRATION
- F16F2230/00—Purpose; Design features
- F16F2230/06—Fluid filling or discharging
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- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Mechanical Engineering (AREA)
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- Transportation (AREA)
- Electromagnetism (AREA)
- General Physics & Mathematics (AREA)
- Vibration Prevention Devices (AREA)
Abstract
The invention relates to a large-scale precise equipment gas-magnetic vibration isolation and active damping transfer device, which belongs to the technical field of transfer equipment, and the technical scheme comprises a transfer trolley, a vibration isolation platform, an air floatation vibration isolation unit, a height detection and control device and a processor, wherein the vibration isolation platform supports the transferred equipment; the vibration isolation device comprises a frame, an air-floatation vibration isolation unit, a height detection and control device, a permanent magnet negative stiffness module, a plurality of vibration isolation platforms, a plurality of active damping units, a plurality of limiting units, a plurality of permanent magnet negative stiffness modules, a plurality of air-floatation vibration isolation units, a plurality of height detection and control devices and a plurality of permanent magnet negative stiffness modules, wherein the air-floatation vibration isolation units, the plurality of active damping units, the plurality of limiting units, the plurality of height detection and control devices and the plurality of permanent magnet negative stiffness modules are respectively arranged at the upper bottom surface and the four inner side surfaces of the frame at intervals in parallel with the vibration isolation platforms. The three-way vibration isolation is realized through the three-way arrangement of the vibration isolation units, the initial vibration isolation frequency is reduced by adopting a mode of connecting positive rigidity and negative rigidity in parallel, the vibration isolation performance is improved by adding the active damping unit and the limiting unit, the safety protection under the action of strong impact is realized, and the problem that the three-way precise vibration isolation and impact protection cannot be realized in the transportation process of large precise equipment in the prior art is solved.
Description
Technical Field
The invention belongs to the technical field of transfer equipment, and particularly relates to a large-scale precise equipment gas-magnetic vibration isolation and active damping transfer device.
Background
Large-scale precision equipment, in particular to large-scale precision equipment subjected to precision assembly, has the characteristics of large volume, large mass, high stability requirement and the like, and has strict requirement on the transportation process during transportation. In the transportation process of large-scale precision equipment, the stable support is required to be kept in a constant posture, the whole performance of the equipment can be influenced by slight vibration in the transportation process, the safety performance of the equipment can be influenced by the impact effect generated by the bumping of the ground, and particularly under the unbalanced load condition, the equipment can be directly offset and turned over due to the strong impact effect generated by the bumping of the ground, so that the safety of the equipment and transportation personnel is threatened.
The air cushion vehicle uses the gas film technology to suspend and support the load, avoids contacting with the ground, generates good vibration isolation effect, and plays an important role in the transportation of precise instruments. The patent number 201010242011.2 discloses an automatic leveling control device for an air cushion suspension transport vehicle, which utilizes signals sent by a high-position photoelectric switch and a low-position photoelectric switch to control the inflation and deflation of an air cushion so as to realize an automatic leveling function. The technical scheme is characterized in that: (1) According to the technical scheme, a good vertical vibration isolation effect is achieved by using the air cushion vehicle, but due to the lack of a negative stiffness device, the initial vibration isolation frequency is higher, and meanwhile, due to the lack of an active damping device, precise regulation and control on system damping cannot be achieved, so that vibration amplification effect at the natural frequency in the transferring process can damage transferred equipment; (2) The technical scheme cannot realize safety protection under the action of strong impact, when the strong impact caused by factors such as ground jolt is applied, huge impact energy cannot be dissipated due to lack of an active damping device and directly acts on the transported equipment to cause damage to the transported equipment, meanwhile, the strong impact instantaneously causes larger relative displacement between the transported equipment and the ground, and the rigid collision of the transported equipment is probably directly caused to cause damage due to lack of a limiting device; (3) According to the technical scheme, the photoelectric switch is adopted as the height sensor, the height of the air cushion transfer trolley cannot be detected and adjusted in real time, the horizontal posture is adjusted by the height adjusting method, the supporting force is not applied in the horizontal direction, and the swing caused by the bumping of the ground in the transfer process cannot be effectively restrained.
The patent number 201310280075.5 discloses an intelligent air cushion transfer vehicle and a control method thereof, and the technical scheme adopts a method of arranging height sensors at four corners of a frame of the air cushion vehicle to feed back the height of a vehicle body relative to the ground in real time, and a remote control main processor controls an air cushion inflation and deflation unit according to the height information of the vehicle body to adjust the fluctuation height of the vehicle body, so that the aim of controlling the posture of the vehicle body is fulfilled. The technical scheme is characterized in that: (1) According to the technical scheme, a good vertical vibration isolation effect is achieved by using the air cushion vehicle, but due to the lack of a negative stiffness device, the initial vibration isolation frequency is higher, and meanwhile, due to the lack of an active damping device, precise regulation and control on system damping cannot be achieved in the transportation process, so that vibration amplification effect at the natural frequency in the transportation process can damage transported equipment; (2) The technical scheme cannot realize safety protection under the action of strong impact, when the strong impact caused by factors such as ground jolt is applied, huge impact energy cannot be dissipated due to lack of an active damping device and directly acts on the transported equipment to cause damage to the transported equipment, meanwhile, the strong impact instantaneously causes larger relative displacement between the transported equipment and the ground, and the rigid collision of the transported equipment is probably directly caused to cause damage due to lack of a limiting device; (3) According to the technical scheme, the height of the air cushion transfer trolley is detected and regulated in real time by the height sensor, so that a constant horizontal posture is guaranteed to a certain extent, but the horizontal posture is regulated by the height regulating method, a supporting force is not applied in the horizontal direction, and the swing caused by the bumping of the ground in the transfer process cannot be restrained.
The patent number 202110749514.7 discloses a three-way vibration damping transfer box and a transfer trolley applied to the same, and the technical scheme is that transverse vibration damping rubber is arranged on four side walls of the transfer box, and three-way vibration isolation is realized in a mode of arranging vertical vibration damping rubber at the bottom of the box. The technical scheme is characterized in that: (1) According to the technical scheme, vibration isolation in three directions is achieved, the initial vibration isolation frequency is high, the transfer operation can be achieved for general precision equipment with low requirements on the vibration environment, the vibration isolation is simple and reliable, but due to the fact that vibration isolation performance of vibration damping rubber is poor and an active damping device is lacked, precise regulation and control on system damping cannot be achieved in the transfer process, and therefore safe transfer of precision equipment with high requirements on the environment vibration cannot be achieved; (2) According to the technical scheme, rubber is adopted for vibration reduction in three directions, when strong impact caused by uneven ground factors is met, huge impact energy can cause the transported equipment to be damaged due to lack of an active damping device; (3) The vibration isolation mode adopted by the technical scheme determines that the posture is not ensured to be constant in the transportation process.
In summary, the existing device for transferring large-scale precise equipment is difficult to realize three-dimensional vibration isolation and attitude regulation, and the initial vibration isolation frequency is high due to the lack of a negative stiffness device; when the large impact caused by uneven pavement and other factors is acted in the transferring process, an active damping device for dissipating huge impact energy is lacked, and the huge impact energy is transmitted to the transferred large precise equipment so as to damage the transferred large precise equipment; by adjusting the horizontal posture in a height-adjusting manner, there is no force in the horizontal direction for horizontal posture adjustment against the rocking action. Therefore, it is needed to provide a gas-magnetic vibration isolation and active damping transfer device for large-scale precise equipment so as to meet the requirements of China in the aspect of transferring the large-scale precise equipment.
Disclosure of Invention
Aiming at the problems in the prior art, the invention aims to provide a gas-magnetic vibration isolation and active damping transfer device for large-scale precise equipment, so as to meet the requirements of precise vibration isolation and safety protection in the transfer process of the large-scale precise equipment in China.
In order to achieve the above object, the present invention provides a technical solution as follows:
the device comprises a transfer trolley, a vibration isolation platform, an air floatation vibration isolation unit, a height detection and control device and a processor, wherein the vibration isolation platform supports the transferred large-scale precise equipment; the air floatation vibration isolation unit is arranged between the upper bottom surface of the frame in the transfer trolley, the four inner side surfaces and the vibration isolation platform in parallel at intervals, and is connected with the frame and the vibration isolation platform; the device comprises an active damping unit for precise vibration isolation and impact energy dissipation, a height detection and control device for detecting horizontal postures and lateral displacements, and permanent magnet negative stiffness modules for reducing the natural frequency of the system, wherein a plurality of permanent magnet negative stiffness modules are respectively arranged between the upper bottom surface and four inner side surfaces of the frame and the vibration isolation platform in parallel at intervals and are connected with the frame and the vibration isolation platform; the limiting units are arranged between the upper bottom surface and the four inner side surfaces of the frame and the vibration isolation platform in parallel at intervals.
Preferably, the air-floating vibration isolation unit comprises an air chamber and an air spring.
Preferably, the height detection and control device comprises a height detection device, a connecting piece and an inflation and deflation unit.
Preferably, the active damping unit comprises an active damper and a speed sensor.
Preferably, the height detection device comprises a grating ruler reading head connecting rod, a grating ruler guide rail and a grating ruler reading head.
The gas-magnetic vibration isolation and active damping transfer device for the large-scale precise equipment provided by the invention has the following effects:
(1) The invention can realize the precise vibration isolation effect in the process of transferring large-scale precise equipment. The high-performance air spring vibration isolator can achieve higher static rigidity and lower dynamic rigidity, the permanent magnet negative rigidity module is added, the dynamic rigidity is further reduced by adopting a mode of parallel connection of positive rigidity and negative rigidity, the natural frequency of a system can be further reduced under the condition of large bearing, higher vibration isolation performance is ensured, meanwhile, the vibration transmission rate at the natural frequency can be further reduced by precisely regulating and controlling the damping of the system by using the active damping unit in parallel connection, and therefore the transfer effect of precise vibration isolation is achieved.
(2) The invention can realize the safety protection effect under the strong impact effect in the transportation process. According to the invention, the active damping unit and the limiting unit are arranged between the vibration isolation platform and the frame, so that impact energy can be rapidly dissipated after the transported equipment is subjected to strong impact in the transportation process, and meanwhile, the existence of the limiting unit can ensure that the transported equipment cannot generate larger displacement to be damaged, thereby realizing the safety protection effect under the strong impact in the transportation process.
(3) The invention can realize that the transported equipment is in a horizontal posture in the transportation process, and can effectively prevent the transported equipment from swinging in the transportation process to cause equipment damage. The invention uses the height detection and control unit to detect the relative displacement between the vibration isolation platform and the frame in real time, and controls the air charging and discharging unit to charge and discharge the air spring in real time through the processor, thereby ensuring that the equipment can stably transport in a constant posture.
Drawings
FIG. 1 is a schematic diagram of a pneumatic-magnetic vibration isolation and active damping transfer device of large-scale precision equipment;
FIG. 2 is a top view of a large precision apparatus pneumatic-magnetic vibration isolation and active damping transfer device without a processor;
FIG. 3 is an enlarged view of section A of FIG. 2;
FIG. 4 is a cross-sectional view A-A of FIG. 2;
fig. 5 is an enlarged view of part B of fig. 4.
Reference numerals in the drawings:
1000. a transfer vehicle; 100. a frame; 200. a vibration isolation platform; 300. large-scale precision equipment; 400. an air floatation vibration isolation unit; 401. a gas chamber; 402. an air spring; 500. an active damping unit; 501. an active damper; 502. a speed sensor; 600. a limit unit; 601. a stopper bracket; 602. a limiter; 700. a height detection and control device; 711. a grating ruler reading head connecting piece; 712. a grating ruler guide rail; 713. a grating ruler reading head; 714. a connecting piece; 710. a height detection device; 720. an air charging and discharging unit; 800. a processor; 900. and the permanent magnet negative stiffness vibration isolation unit.
Detailed Description
The present invention will be further described with reference to the drawings and the specific embodiments in order to make the objects, technical solutions and advantages of the present invention more apparent. It should be understood that the specific embodiments described herein are for purposes of illustration only and are not intended to limit the scope of the invention. All other embodiments, which can be made by those skilled in the art based on the embodiments of the invention without making any inventive effort, are intended to be within the scope of the invention.
The invention provides a large-scale precise equipment gas-magnetic vibration isolation and active damping transfer device, which is shown in figures 1-5, and comprises a transfer trolley, a vibration isolation platform, an air floatation vibration isolation unit, an active damping unit, a height detection and control device, a processor, a limiting unit and a permanent magnet negative stiffness module, wherein the vibration isolation platform supports the transferred large-scale precise equipment; the air floatation vibration isolation units are respectively arranged in parallel at intervals among the upper bottom surface, the four inner side surfaces and the vibration isolation platform of the frame in the transfer vehicle, and are connected with the frame and the vibration isolation platform; the device comprises an active damping unit for precise vibration isolation and impact energy dissipation, a height detection and control device for detecting horizontal postures and lateral displacements, and permanent magnet negative stiffness modules for reducing the natural frequency of the system, wherein a plurality of permanent magnet negative stiffness modules are respectively arranged between the upper bottom surface and four inner side surfaces of the frame and the vibration isolation platform in parallel at intervals and are connected with the frame and the vibration isolation platform; the limiting units are arranged between the upper bottom surface and the four inner side surfaces of the frame and the vibration isolation platform in parallel at intervals.
When the air-floating vibration isolation device is used, a plurality of height detection and control devices 700 are installed at different positions on the same surface in parallel with the air-floating vibration isolation units 400, the processor 800 controls the height detection and control devices 700 to inflate the group of air-floating vibration isolation units 400, the supporting force of transported large-scale precision equipment is provided, vibration generated by the ground is attenuated by the air springs 402 and the permanent magnet negative stiffness modules 900 and then is transmitted to the transported large-scale precision equipment, a plurality of active damping units 500 are installed in parallel with the single group of air-floating vibration isolation units 400, the accurate damping force is provided, and the vibration transmission rate is further reduced. Specifically, the height detection device and control device 700 includes a height detection device 710 and an air charging and discharging unit 720, the height detection device 710 installed on the lower bottom surface of the vibration isolation platform 200 detects the floating height of the vibration isolation platform at the installation position in real time, the height detection device 710 installed on the side surface of the vibration isolation platform detects the horizontal relative displacement between the vibration isolation platform 200 and the vehicle frame 100 in real time, and feeds back the result to the processor 800 for processing, when the transportation equipment receives the vibration action such as bump on the ground, the air charging and discharging unit 720 is controlled to perform the air charging and discharging operation on the air floating vibration isolation unit 400, so that the vibration isolation platform is always kept in a constant horizontal posture, and the anti-swing control of the vibration isolation platform is realized; when receiving strong impact, the active damping unit 500 generates a huge damping effect to realize rapid dissipation of impact energy, but the air floatation vibration isolation unit 400 cannot rapidly adjust the air pressure value inside the air spring 402, so that the vibration isolation platform generates larger relative displacement, and at the moment, the limiting unit 600 contacts with the vibration isolation platform and generates a limiting effect, thereby realizing safety protection of transported large-scale precise equipment.
Specifically, the air-floating vibration isolation unit 400 includes an air chamber 401 and an air spring 402, wherein the air chamber 401 is fixedly installed on the frame 100, the air spring 402 is fixedly installed on the air chamber 401, the upper end of the air spring is fixedly connected to the vibration isolation platform 200, the air paths between the air spring 402 and the air chamber 401 are communicated, and when the air-floating vibration isolation unit 400 is inflated by the air inflation and deflation unit 720, inflation gas firstly enters the air chamber 401 and then enters the corresponding air spring 402.
Specifically, the limiting unit 600 includes a limiter bracket 601 and a limiter 602, where the limiter bracket 601 is fixedly mounted on the frame 100, the limiter 602 is fixedly mounted on the limiter bracket 601, and a certain safety gap is left between the upper end surface of the limiter 602 and the vibration isolation platform 200.
Specifically, the height detecting device 710 and the air charging and discharging unit 720 are fixedly connected to the air chamber 401 of the air-floating vibration isolation unit through a connecting piece 714. The height detection device 710 comprises a grating ruler reading head connecting piece 711, a grating ruler guide rail 712 and a grating ruler reading head 713, wherein the grating ruler reading head 713 is slidably connected to the grating ruler guide rail 712, one end of the grating ruler reading head connecting piece 711 is connected with the grating ruler reading head 713, and the other end is connected with the vibration isolation platform. In the transportation process, when vibration from the ground is transmitted to the vibration isolation platform through the frame 100, the air chamber 401 and the air spring 500 to cause the vibration isolation platform 200 to vibrate, the vibration isolation platform 200 drives the grating ruler reading head 713 to slide on the grating ruler guide rail 712 through the grating ruler reading head connecting piece 711, so that the grating ruler reading is changed, further, the relative displacement change between the frame 100 and the vibration isolation platform 200 at the connecting point is detected in real time, when the displacement change value exceeds a certain range, the inflation and deflation unit 720 is controlled to inflate and deflate the air-float vibration isolation unit 400, the posture adjustment of the vibration isolation platform 200 is realized, and when the displacement change is large, the limiting unit 600 is directly caused to be in contact with the vibration isolation platform 200, and then the safety protection function is realized.
Specifically, the active damping unit 500 includes an active damper 501 and a speed sensor 502.
In conclusion, the invention can realize the precise vibration isolation effect in the process of transferring large-scale precise equipment. The high-performance air spring vibration isolator can achieve higher static stiffness and lower dynamic stiffness, the permanent magnet negative stiffness module 900 is added, the dynamic stiffness is further reduced by adopting a mode of parallel connection of positive stiffness and negative stiffness, the natural frequency of a system can be further reduced under the condition of large bearing, higher vibration isolation performance is ensured, meanwhile, the active damping unit 500 is used for precisely regulating and controlling the damping of the system in parallel connection, and the vibration transmissibility at the natural frequency can be further reduced, so that the transfer effect of precise vibration isolation is achieved.
The invention can realize the safety protection effect under the strong impact effect in the transportation process. The active damping unit 500 and the limiting unit 600 are arranged between the vibration isolation platform 200 and the frame 100, impact energy can be rapidly dissipated after the transported equipment is subjected to strong impact in the transportation process, and the existence of the limiting unit 600 can ensure that the transported equipment cannot generate larger displacement to be damaged, so that the safety protection effect under the strong impact in the transportation process is realized.
The invention can realize that the transported equipment is in a horizontal posture in the transportation process, and can effectively prevent equipment damage caused by swinging of the transported equipment in the transportation process. The invention uses the height detection and control device 700 to detect the relative displacement between the vibration isolation platform 200 and the frame 100 in real time, and controls the air charging and discharging unit 720 to charge and discharge the air spring 402 in real time through the processor 800, thereby ensuring that the equipment can stably transport in a constant posture.
The foregoing examples merely illustrate embodiments of the invention and are described in more detail and are not to be construed as limiting the scope of the invention. It should be noted that it will be apparent to those skilled in the art that several variations and modifications can be made without departing from the spirit of the invention, which are all within the scope of the invention. Accordingly, the scope of protection of the present invention is to be determined by the appended claims.
Claims (1)
1. The gas-magnetic vibration isolation and active damping transfer device for the large-scale precise equipment comprises a transfer trolley (1000), a vibration isolation platform (200), an air floatation vibration isolation unit (400), a height detection and control device (700) and a processor (800), wherein the vibration isolation platform (200) supports the transferred large-scale precise equipment (300); the method is characterized in that: the air-floatation vibration isolation device further comprises an active damping unit (500), a limiting unit (600) and a permanent magnet negative stiffness module (900), wherein the air-floatation vibration isolation unit (400) is arranged between the upper bottom surface of the frame (100) and four inner side surfaces of the transfer trolley (1000) and the vibration isolation platform (200) in parallel at intervals respectively, and is connected with the frame (100) and the vibration isolation platform (200); the device comprises an active damping unit (500) for precisely isolating vibration and dissipating impact energy, a height detection and control device (700) for detecting horizontal postures and lateral displacements, and a permanent magnet negative stiffness module (900) for reducing the natural frequency of the system, wherein a plurality of permanent magnet negative stiffness modules are respectively arranged between the upper bottom surface and four inner side surfaces of the frame (100) and the vibration isolation platform (200) at parallel intervals, and are connected with the frame (100) and the vibration isolation platform (200); the limiting units (600) are arranged in parallel between the upper bottom surface and the four inner side surfaces of the frame (100) and the vibration isolation platform (200) at intervals;
the height detection device and control device (700) comprises a height detection device (710) and an inflation and deflation unit (720), the height detection device (710) comprises a grating ruler reading head connecting piece (711), a grating ruler guide rail (712) and a grating ruler reading head (713), the grating ruler reading head (713) is connected to the grating ruler guide rail (712) in a sliding mode, one end of the grating ruler reading head connecting piece (711) is connected with the grating ruler reading head (713), and the other end of the grating ruler reading head connecting piece is connected with the vibration isolation platform; the height detection device (710) and the inflation and deflation unit (720) are fixedly connected to the air chamber (401) of the air floatation vibration isolation unit through a connecting piece (714);
the air-floatation vibration isolation unit (400) comprises an air chamber (401) and an air spring (402), wherein the air chamber (401) is fixedly arranged on the frame (100), the air spring (402) is fixedly arranged on the air chamber (401), the upper end of the air spring is fixedly connected to the vibration isolation platform (200), the air paths between the air spring (402) and the air chamber (401) are communicated, and when the air-floatation vibration isolation unit (400) is inflated by the inflation and deflation unit (720), inflation gas firstly enters the air chamber (401) and then enters the corresponding air spring (402);
the limiting unit (600) comprises a limiter bracket (601) and a limiter (602), wherein the limiter bracket (601) is fixedly arranged on the frame (100), the limiter (602) is fixedly arranged on the limiter bracket (601), and a safety gap is reserved between the upper end surface of the limiter (602) and the vibration isolation platform (200);
the active damping unit (500) comprises an active damper (501) and a speed sensor (502);
in the transferring process, when vibration from the ground is transmitted to the vibration isolation platform through the frame (100), the air chamber (401) and the air spring (402) to cause the vibration isolation platform (200) to vibrate, the vibration isolation platform (200) drives the grating ruler reading head (713) to slide on the grating ruler guide rail (712) through the grating ruler reading head connecting piece (711), so that the grating ruler reading changes, and further the relative displacement change between the frame (100) and the vibration isolation platform (200) at the connecting point is detected in real time; the height detection device (710) is arranged on the upper bottom surface of the vibration isolation platform (200) and used for detecting the floating height of the vibration isolation platform at the installation position in real time, the height detection device (710) is arranged on the side surface of the vibration isolation platform and used for detecting the horizontal relative displacement between the vibration isolation platform (200) and the vehicle frame (100) in real time, and the result is fed back to the processor (800) for processing;
the permanent magnet negative stiffness module (900) adopts a mode of parallel connection of positive and negative stiffness to further reduce dynamic stiffness, and meanwhile, the active damping unit (500) is used for precisely regulating and controlling system damping in parallel, so that the vibration transmissibility at the natural frequency can be further reduced, and the transfer effect of precise vibration isolation is achieved.
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| CN115217889B (en) * | 2022-07-15 | 2023-11-24 | 哈尔滨工业大学 | Large-scale precision equipment gas magnetic vibration isolation and active and passive damping transfer device |
| CN115727093B (en) * | 2022-12-27 | 2023-06-06 | 大连地拓电子工程技术有限公司 | Rigidity-adjustable double-degree-of-freedom active and passive micro-vibration prevention base |
| CN117249198B (en) * | 2023-11-16 | 2024-02-09 | 苏州声学产业技术研究院有限公司 | Vibration isolation device |
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