CN115217890B - Large-scale precision equipment gas magnetic vibration isolation and active damping transfer device - Google Patents
Large-scale precision equipment gas magnetic vibration isolation and active damping transfer device Download PDFInfo
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- CN115217890B CN115217890B CN202210834997.5A CN202210834997A CN115217890B CN 115217890 B CN115217890 B CN 115217890B CN 202210834997 A CN202210834997 A CN 202210834997A CN 115217890 B CN115217890 B CN 115217890B
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- vibration isolation
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- isolation platform
- frame
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- 238000002955 isolation Methods 0.000 title claims abstract description 125
- 238000013016 damping Methods 0.000 title claims abstract description 49
- 238000000034 method Methods 0.000 claims abstract description 32
- 238000001514 detection method Methods 0.000 claims abstract description 30
- 230000008569 process Effects 0.000 claims abstract description 27
- 230000000670 limiting effect Effects 0.000 claims abstract description 20
- 230000000694 effects Effects 0.000 claims description 20
- 230000036544 posture Effects 0.000 claims description 17
- 238000006073 displacement reaction Methods 0.000 claims description 16
- 238000007667 floating Methods 0.000 claims description 11
- 230000001105 regulatory effect Effects 0.000 claims description 6
- 230000008859 change Effects 0.000 claims description 4
- 230000001276 controlling effect Effects 0.000 claims description 4
- 238000009434 installation Methods 0.000 claims description 2
- 230000009471 action Effects 0.000 abstract description 5
- 238000007599 discharging Methods 0.000 description 7
- 230000003321 amplification Effects 0.000 description 2
- 230000005540 biological transmission Effects 0.000 description 2
- 238000003199 nucleic acid amplification method Methods 0.000 description 2
- 230000021715 photosynthesis, light harvesting Effects 0.000 description 2
- 230000003068 static effect Effects 0.000 description 2
- 230000002238 attenuated effect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 239000000725 suspension Substances 0.000 description 1
Classifications
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16F—SPRINGS; SHOCK-ABSORBERS; MEANS FOR DAMPING VIBRATION
- F16F15/00—Suppression of vibrations in systems; Means or arrangements for avoiding or reducing out-of-balance forces, e.g. due to motion
- F16F15/02—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems
- F16F15/022—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems using dampers and springs in combination
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B60—VEHICLES IN GENERAL
- B60P—VEHICLES ADAPTED FOR LOAD TRANSPORTATION OR TO TRANSPORT, TO CARRY, OR TO COMPRISE SPECIAL LOADS OR OBJECTS
- B60P7/00—Securing or covering of load on vehicles
- B60P7/06—Securing of load
- B60P7/16—Protecting against shocks
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16F—SPRINGS; SHOCK-ABSORBERS; MEANS FOR DAMPING VIBRATION
- F16F15/00—Suppression of vibrations in systems; Means or arrangements for avoiding or reducing out-of-balance forces, e.g. due to motion
- F16F15/02—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems
- F16F15/023—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems using fluid means
- F16F15/0232—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems using fluid means with at least one gas spring
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16F—SPRINGS; SHOCK-ABSORBERS; MEANS FOR DAMPING VIBRATION
- F16F15/00—Suppression of vibrations in systems; Means or arrangements for avoiding or reducing out-of-balance forces, e.g. due to motion
- F16F15/02—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems
- F16F15/023—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems using fluid means
- F16F15/027—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems using fluid means comprising control arrangements
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16F—SPRINGS; SHOCK-ABSORBERS; MEANS FOR DAMPING VIBRATION
- F16F15/00—Suppression of vibrations in systems; Means or arrangements for avoiding or reducing out-of-balance forces, e.g. due to motion
- F16F15/02—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems
- F16F15/03—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems using magnetic or electromagnetic means
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16F—SPRINGS; SHOCK-ABSORBERS; MEANS FOR DAMPING VIBRATION
- F16F15/00—Suppression of vibrations in systems; Means or arrangements for avoiding or reducing out-of-balance forces, e.g. due to motion
- F16F15/02—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems
- F16F15/04—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems using elastic means
- F16F15/046—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems using elastic means using combinations of springs of different kinds
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
- G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
- G01B11/0608—Height gauges
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16F—SPRINGS; SHOCK-ABSORBERS; MEANS FOR DAMPING VIBRATION
- F16F2222/00—Special physical effects, e.g. nature of damping effects
- F16F2222/06—Magnetic or electromagnetic
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16F—SPRINGS; SHOCK-ABSORBERS; MEANS FOR DAMPING VIBRATION
- F16F2228/00—Functional characteristics, e.g. variability, frequency-dependence
- F16F2228/06—Stiffness
- F16F2228/063—Negative stiffness
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16F—SPRINGS; SHOCK-ABSORBERS; MEANS FOR DAMPING VIBRATION
- F16F2228/00—Functional characteristics, e.g. variability, frequency-dependence
- F16F2228/06—Stiffness
- F16F2228/066—Variable stiffness
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16F—SPRINGS; SHOCK-ABSORBERS; MEANS FOR DAMPING VIBRATION
- F16F2230/00—Purpose; Design features
- F16F2230/0047—Measuring, indicating
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16F—SPRINGS; SHOCK-ABSORBERS; MEANS FOR DAMPING VIBRATION
- F16F2230/00—Purpose; Design features
- F16F2230/06—Fluid filling or discharging
Landscapes
- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Mechanical Engineering (AREA)
- Acoustics & Sound (AREA)
- Aviation & Aerospace Engineering (AREA)
- Transportation (AREA)
- Electromagnetism (AREA)
- General Physics & Mathematics (AREA)
- Vibration Prevention Devices (AREA)
Abstract
Description
Claims (1)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN202210834997.5A CN115217890B (en) | 2022-07-15 | 2022-07-15 | Large-scale precision equipment gas magnetic vibration isolation and active damping transfer device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN202210834997.5A CN115217890B (en) | 2022-07-15 | 2022-07-15 | Large-scale precision equipment gas magnetic vibration isolation and active damping transfer device |
Publications (2)
Publication Number | Publication Date |
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CN115217890A CN115217890A (en) | 2022-10-21 |
CN115217890B true CN115217890B (en) | 2023-10-31 |
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CN202210834997.5A Active CN115217890B (en) | 2022-07-15 | 2022-07-15 | Large-scale precision equipment gas magnetic vibration isolation and active damping transfer device |
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CN (1) | CN115217890B (en) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN115217889B (en) * | 2022-07-15 | 2023-11-24 | 哈尔滨工业大学 | Large-scale precision equipment gas magnetic vibration isolation and active and passive damping transfer device |
CN115727093B (en) * | 2022-12-27 | 2023-06-06 | 大连地拓电子工程技术有限公司 | Rigidity-adjustable double-degree-of-freedom active and passive micro-vibration prevention base |
CN117249198B (en) * | 2023-11-16 | 2024-02-09 | 苏州声学产业技术研究院有限公司 | Vibration isolation device |
Citations (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5141201A (en) * | 1988-11-07 | 1992-08-25 | Bridgestone Corporation | Vibration damping apparatus for transportation |
DE10326625A1 (en) * | 2003-06-13 | 2005-01-05 | Contitech Vibration Control Gmbh | Active spring damper mechanism for damping mechanical vibration e.g. for automobile engine mounting, has setting device for active control of support spring effect |
CN101067432A (en) * | 2006-09-26 | 2007-11-07 | 哈尔滨工业大学 | Air spring vibro-damping mount with magnetic suspension unit |
CN101067433A (en) * | 2006-09-26 | 2007-11-07 | 哈尔滨工业大学 | Air spring superlow frequency vibration isolating method and apparatus based on differential electromagnetic actuator |
CN101701616A (en) * | 2009-11-20 | 2010-05-05 | 中国科学院上海光学精密机械研究所 | Active vibration isolation platform |
CN104343885A (en) * | 2013-08-09 | 2015-02-11 | 上海微电子装备有限公司 | High-precision magnetic suspension active damping equipment |
JP2016138592A (en) * | 2015-01-27 | 2016-08-04 | 株式会社竹中工務店 | Seismic isolation structure |
CN111022567A (en) * | 2019-12-23 | 2020-04-17 | 哈尔滨恒信精密气浮科技有限公司 | High-precision self-leveling air spring vibration isolation table |
CN111336210A (en) * | 2018-12-19 | 2020-06-26 | 中国石油大学(华东) | Hybrid vibration control device and method based on negative stiffness and variable damping and application |
CN211809258U (en) * | 2020-04-01 | 2020-10-30 | 广西科技大学鹿山学院 | Commodity circulation transportation damping device |
CN215922034U (en) * | 2021-07-12 | 2022-03-01 | 湖北迈创专用车有限公司 | Effectual tipper facial make-up of resistance to compression |
-
2022
- 2022-07-15 CN CN202210834997.5A patent/CN115217890B/en active Active
Patent Citations (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5141201A (en) * | 1988-11-07 | 1992-08-25 | Bridgestone Corporation | Vibration damping apparatus for transportation |
DE10326625A1 (en) * | 2003-06-13 | 2005-01-05 | Contitech Vibration Control Gmbh | Active spring damper mechanism for damping mechanical vibration e.g. for automobile engine mounting, has setting device for active control of support spring effect |
CN101067432A (en) * | 2006-09-26 | 2007-11-07 | 哈尔滨工业大学 | Air spring vibro-damping mount with magnetic suspension unit |
CN101067433A (en) * | 2006-09-26 | 2007-11-07 | 哈尔滨工业大学 | Air spring superlow frequency vibration isolating method and apparatus based on differential electromagnetic actuator |
CN101701616A (en) * | 2009-11-20 | 2010-05-05 | 中国科学院上海光学精密机械研究所 | Active vibration isolation platform |
CN104343885A (en) * | 2013-08-09 | 2015-02-11 | 上海微电子装备有限公司 | High-precision magnetic suspension active damping equipment |
JP2016138592A (en) * | 2015-01-27 | 2016-08-04 | 株式会社竹中工務店 | Seismic isolation structure |
CN111336210A (en) * | 2018-12-19 | 2020-06-26 | 中国石油大学(华东) | Hybrid vibration control device and method based on negative stiffness and variable damping and application |
CN111022567A (en) * | 2019-12-23 | 2020-04-17 | 哈尔滨恒信精密气浮科技有限公司 | High-precision self-leveling air spring vibration isolation table |
CN211809258U (en) * | 2020-04-01 | 2020-10-30 | 广西科技大学鹿山学院 | Commodity circulation transportation damping device |
CN215922034U (en) * | 2021-07-12 | 2022-03-01 | 湖北迈创专用车有限公司 | Effectual tipper facial make-up of resistance to compression |
Non-Patent Citations (2)
Title |
---|
光学仪器隔微振系统的负刚度特性分析与验证;闻荣伟等;《光电子.激光》;第24卷(第12期);2355-2358页 * |
面向精密气磁隔振的磁斥力负刚度装置的优化设计;赵亚敏等;《振动与冲击》;第第40卷卷(第第20期期);9-14页 * |
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CN115217890A (en) | 2022-10-21 |
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SE01 | Entry into force of request for substantive examination | ||
CB03 | Change of inventor or designer information |
Inventor after: Cheng Zhongyi Inventor after: Cui Junning Inventor after: Wang Zhisheng Inventor after: Jin Mingrui Inventor after: Tang Ran Inventor after: Tan Jiubin Inventor before: Cheng Zhongyi Inventor before: Cui Junning Inventor before: Wang Zhisheng Inventor before: Jin Mingrui Inventor before: Tang Ran Inventor before: Tan Jiubin |
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