CN101067433A - Air spring superlow frequency vibration isolating method and apparatus based on differential electromagnetic actuator - Google Patents
Air spring superlow frequency vibration isolating method and apparatus based on differential electromagnetic actuator Download PDFInfo
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- CN101067433A CN101067433A CN200610150810.0A CN200610150810A CN101067433A CN 101067433 A CN101067433 A CN 101067433A CN 200610150810 A CN200610150810 A CN 200610150810A CN 101067433 A CN101067433 A CN 101067433A
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Abstract
The air spring ultra low frequency vibration separation method and device based on the differential electromagnetic actuator includes the air feed system, the high controlling system, a group of the air spring, the basal body, the electromagnetic actuator which not only provides the negative rigidity but the controlled damping force for the system, the speed sensor, the force sensor, the displacement sensor, the power amplifier, the model/number convertor, the number/model convertor and the controller. The invention provides the negative rigidity and the controlled initiative damping force by the reciprocity of the differential electromagnetic and the gag bit fixed on the basal body and the ground separately which is used in the field of high need for the cross-portrait ultra low frequency vibration separation capability.
Description
Technical field
The invention belongs to the superlow frequency vibration isolating field, the device that particularly a kind of air spring superlow frequency vibration isolating method and this method are used.
Background technique
Advantages such as air spring vibrating insulative basement is effective owing to its low frequency vibration isolation, bearing capacity strong, long service life are widely used in vibrating the isolation field.Along with improving constantly of ultraprecise processing and measurement, micro-nano technology and vlsi circuit accuracy of manufacturing level, the superlow frequency vibration isolating performance and the bearing capacity of vibration insulating foundation are all had higher requirement.Yet present air spring vibrating insulative basement has limited its further application in the superlow frequency vibration isolating field to a great extent because of its superlow frequency vibration isolating performance is undesirable.
Patent US 6,402,118, and B1 " Magnetic Support System " has proposed a kind of magnetic support system.Two kinds of permanent magnets that this system's utilization has a positive negative stiffness are arranged in the both sides of platform, positive negative stiffness is cancelled out each other and realize superlow frequency vibration isolating.But its shortcoming is that bearing capacity is low, can't be used for the super sized type vibration insulating foundation, it requires two positive negative stiffnesses of permanent magnet to offset in addition, and this has proposed harsh requirement to accuracy of manufacturing, be difficult to realize, and whole system is difficult to adapt to the influence of different operating condition and load variations.Patent US2003/0222383 A1 " Magnetic Spring Device with Negative Stiffness " has also proposed a kind of magnetic spring with negative stiffness.This system utilizes three permanent magnets to be arranged in order according to the relative mode of heteropole, and the permanent magnet in the middle of can making has the approximately constant negative stiffness with the bucking-out system self-stiffness, reaches the reduction system frequency, realizes the purpose of superlow frequency vibration isolating.The same existence of its shortcoming is difficult for processing, is difficult to control, and the shortcoming that bearing capacity is low is not suitable for the vibration insulating foundation of carrying super sized type.Patent US5779010 " Suspendedlow-frequency horizontal pendulum isolator for vibration isolation systems " proposes pneumatic spring and single pendulum mechanisms in series with the support stage body.Since the lateral stiffness of single pendulum mechanism much smaller than the pneumatic spring lateral stiffness and longitudinal rigidity much larger than the longitudinal rigidity of pneumatic spring, both series connection can significantly reduce the horizontal isolation frequency of system, realize horizontal superlow frequency vibration isolating.But the method does not obviously improve vertical anti-vibration performance, the horizontal vibration isolation ability of single pendulum mechanism depends on the brachium of single pendulum to a great extent in addition, the long more vibration isolating effect of brachium is good more, desire obtains ultralow isolation frequency and will cause system's vibrating isolation system to have huge size, and therefore its bearing capacity also can descend simultaneously.
People such as Korea S scholar K.G.AHN propose a kind of by electromagnet and the pneumatic spring mixing vibrating isolation system (K.G.AHN that supports in parallel, et al.A Hybrid-type Active Vibration Isolation System UsingNeural Networks.Journal of Sound and Vibration.1996,192 (4), 793-805).Utilize pneumatic spring to realize high bearing capacity, utilize ANN (Artificial Neural Network) Control algorithm controls electromagnet, to realize the optimization of vibrating isolation system anti-vibration performance.Adopt single electromagnet in this scheme, thereby can only adopt approximate processing, can't realize linearization truly, this directly influences its control accuracy.Its controlling method principle complexity, realization difficulty are used so be difficult in the engineering reality in addition.
Summary of the invention:
In order to overcome the deficiency in the above-mentioned prior art, the present invention at first provides a kind of superlow frequency vibration isolating method, utilization is installed in force transducer feedback signal on the armature and regulates matrix height automatically matrix work origin and actuator ouput force are coincided zero point, utilize base current linearization technique and differential arrangement scheme simultaneously, the electromagnetic actuator ouput force is become the linear combination of relative displacement and bias current, and then provide negative stiffness to reduce system frequency for system by control relative displacement component, widen the superlow frequency vibration isolating scope, control bias current component makes it be proportional to substrate speed for system provides active damping force to reduce resonance peak, finally reaches the purpose of superlow frequency vibration isolating.
The present invention also provides a kind of air spring superlow frequency vibration isolating device based on differential electromagnetic actuator on the basis of above-mentioned vibration isolating method, it utilizes the interaction between fixing respectively and matrix and ground differential arrangement electromagnet and the armature, for system provides negative stiffness and controlled active damping force.
Technical solution of the present invention is:
Based on the air spring superlow frequency vibration isolating method of differential electromagnetic actuator, this method may further comprise the steps:
(1) according to pneumatic spring vibrating isolation system self-stiffness K
sDetermine required negative stiffness K with the system frequency ω that desires to reach
N, then by K
NCalculate the base current I in the electromagnetic actuator
0
(2) adjust the pneumatic spring vibrating isolation system and near working depth and in differential electromagnetic actuator, feed base current I
0, every a time period t feedback signal that is installed in force transducer on the differential electromagnetic actuator armature to be done on average, height control system is done once fine setting according to this mean value to the working depth of pneumatic spring, is zero until mean value, finishes Height Adjustment work.
(3) according to pneumatic spring vibrating isolation system matrix movement velocity V
b, the bias current I of control differential electromagnetic actuator
d, make actuator provide one to be proportional to speed V for vibrating isolation system
bActive damping force F
cActive damping force F
cIn conjunction with negative stiffness K
NCan make vibration insulating foundation obtain good superlow frequency vibration isolating performance.
Described air spring superlow frequency vibration isolating method based on differential electromagnetic actuator, the base current I in the described electromagnetic actuator
0Determine K by the negative stiffness that system is required
N
Described air spring superlow frequency vibration isolating method based on differential electromagnetic actuator, bias current I in two electromagnet of differential arrangement in the described electromagnetic actuator
dDirection is opposite, produces damping force F
cDirection and substrate speed V
bDirection is opposite.
Based on the air spring superlow frequency vibration isolating method of differential electromagnetic actuator, the damping force F that described electromagnetic actuator provides
cOnly be subjected to bias current I
dControl is with matrix (4) movement velocity V
bBe directly proportional, be not subjected to the influence of matrix (4) change in displacement, electromagnetic actuator bias current I
dWith damping force F
cBe linear relationship.
Air spring superlow frequency vibration isolating device based on differential electromagnetic actuator, its composition comprises: air supply system (1), height control system (2), one group of pneumatic spring (3), matrix (4), both provided negative stiffness for system, the electromagnetic actuator (5) of controllable damping force is provided for system again, velocity transducer (6), force transducer (7), displacement transducer (8), power amplifier (9), A/D converter (10), D/A (11), controller (12), described air supply system (1) air feed end links to each other with described height control system (2) input end, described height control system (2) output terminal links to each other with each described pneumatic spring (3) inlet hole, the parallel below that is installed in described matrix (4) of described pneumatic spring (3) and described electromagnetic actuator (5), described displacement transducer (8) and described velocity transducer (6) are installed on the described matrix (4), described force transducer (7) two mounting ends are installed in respectively on described electromagnetic actuator (5) and the described matrix (4), the signal output part of described force transducer (7) and described displacement transducer (8) all is connected to the signal receiving terminal of described height control system (2), the signal output part of described velocity transducer (6) links to each other with described A/D converter (11) input end, the output terminal of described A/D converter (11) links to each other with described controller (12) input end, described controller (12) input end links to each other with described D/A (10) input end, described D/A (10) output terminal links to each other with described power amplifier (9) input end, and described power amplifier (9) input end links to each other with described electromagnetic actuator (5) signal receiving terminal.
Described air spring superlow frequency vibration isolating device based on differential electromagnetic actuator, described height control system (2) is by height controller (17), three-position electromagnetic valve (18) is formed, height controller (17) input end links to each other with air supply system (1), the signal receiving terminal links to each other with force transducer (7) with displacement transducer (8) respectively, output terminal links to each other with three-position electromagnetic valve (18) input end, three-position electromagnetic valve (18) output terminal links to each other with pneumatic spring, height control system is done coarse adjustment according to displacement transducer (8) feedback signal, finely tunes according to force transducer (7) feedback signal.
Described air spring superlow frequency vibration isolating device based on differential electromagnetic actuator, it is characterized in that: described electromagnetic actuator (5) is by a pair of electromagnet (13a, 13b), electromagnet stent (14a, 14b), armature (15), armature bracket (16) are formed, two electromagnet (13a, 13b) differential arrangement is at described electromagnet stent (14a, 14b), described armature (15) is installed on the described armature bracket (16) and is positioned at two electromagnet (13a, 13b), (13a 13b) leaves identical gap with two electromagnet.
Described air spring superlow frequency vibration isolating device based on differential electromagnetic actuator, (13a, 13b) differential arrangement feed base current I to a pair of electromagnet in the described electromagnetic actuator (5)
0After, (13a, 13b) opposing side is a same polarity to two electromagnet.
Described air spring superlow frequency vibration isolating device based on differential electromagnetic actuator, described armature bracket (16) is installed on described matrix (4), perhaps with the fixing object of described matrix on, described electromagnet stent (14a) be installed to ground or with the fixing object in ground on.
The present invention has following characteristics and good result:
The present invention forms differential electromagnetic actuator by arrange a pair of electromagnet in the armature bilateral symmetry, and two electromagnet are passed to identical base current.Make differential electromagnetic actuator ouput force by with square being inversely proportional to of relative displacement, the bias current square relation that is directly proportional becomes relative displacement and the linear combination of two of bias currents, realizes linearization truly, helps accurate control.This is one of innovative point of the present invention.
Height control system of the present invention is regulated a matrix height according to the interior at set intervals mean value of force transducer feedback signal that is installed on the armature, until mean value is zero, matrix work origin and actuator ouput force are coincided zero point, can make differential electromagnetic actuator relative displacement component by unidirectional become two-way, become passive spring with controlled negative stiffness, but the part or all of self-stiffness of bucking-out system to reduce system frequency, is widened the vibration isolation scope.This is two of an innovative point of the present invention.
Differential electromagnetic actuator ouput force of the present invention is the linear combination of relative displacement and bias current, and can be system by control relative displacement component provides negative stiffness to reduce system frequency, widens the superlow frequency vibration isolating scope; Control bias current component makes it be proportional to substrate speed, and the system of can be provides active damping force, to reduce resonance peak.Same actuator realizes two kinds of functions, and level of integration and reliability are all by improving significantly.This is three of an innovative point of the present invention.
The present invention adopts differential electromagnetic actuator and pneumatic spring parallel connection with support substrate.Pneumatic spring can guarantee that system has strong bearing capacity and good medium-high frequency anti-vibration performance; Differential electromagnetic actuator does not change the middle and high frequency anti-vibration performance of system when realizing good low frequency, superlow frequency vibration isolating performance.Both have the good anti-vibration performance on the full frequency band in conjunction with making whole vibrating isolation system when keeping high bearing capacity.
Description of drawings
Accompanying drawing 1 is the principle schematic of apparatus of the present invention;
Accompanying drawing 2 is structural representations of apparatus of the present invention;
Accompanying drawing 3 is the height control system principle schematic in apparatus of the present invention;
Accompanying drawing 4 is the differential electromagnetic actuator structural representations among the present invention;
Accompanying drawing 5 is the differential electromagnetic actuator mounting type schematic representation among the present invention;
Accompanying drawing 7 is relation curves of differential electromagnetic actuator ouput force of the present invention and relative displacement and bias current;
Accompanying drawing 8 (a) and accompanying drawing 8 (b) are the differential electromagnetic actuator ouput force overlaps front and back actuator ouput force and bias current zero point with the matrix work origin relation curves;
Accompanying drawing 9 is vibrating isolation system transmissibility correlation curves before and after negative stiffness applies among the present invention;
Accompanying drawing 10 is vibrating isolation system transmissibility correlation curves before and after active damping force applies among the present invention;
Accompanying drawing 11 is differential electromagnetic actuator work front and back vibrating isolation system transmissibility correlation curves among the present invention;
Among the figure, 1 air supply system, 2 height control systems, 3 pneumatic springs, 4 matrixes, 5 differential electromagnetic actuators, 6 velocity transducers, 7 force transducers, 8 displacement transducers, 9 power amplifiers, 10 A/D converters (A/D), 11 D/As (D/A), 12 controllers, 13a electromagnet, 13b electromagnet, 14a electromagnet stent, 14b electromagnet stent, 15 armature, 16 armature brackets, 17 height controllers, 18 are solenoid valve.
Embodiment
A kind of air spring superlow frequency vibration isolating method and the system architecture of device and working principle based on differential electromagnetic actuator of the present invention reaches accompanying drawing in conjunction with the embodiments and is described in detail as follows:
Pneumatic spring isolation mounting one embodiment based on differential electromagnetic actuator of the present invention, the system principle schematic representation comprises as shown in Figure 1: 1 air supply system, 2 height control units, 3 air spring systems, 4 matrixes, 5 differential electromagnetic actuators, 6 velocity transducers, 7 force transducers, 8 displacement transducers, 9 power amplifiers, 10 A/D converters (A/D), 11 D/As (D/A), 12 controllers.Air supply system 1 air feed end links to each other with height control system 2 input ends, height control system 2 output terminals link to each other with each pneumatic spring 3 inlet hole, pneumatic spring 3 and the electromagnetic actuator 5 parallel belows that are installed in matrix 4, displacement transducer 8 and velocity transducer 6 are installed on the matrix 4,7 liang of mounting ends of force transducer are installed in respectively on electromagnetic actuator 5 and the matrix 4, the signal output part of force transducer 7 and displacement transducer 8 all is connected to the signal receiving terminal of height control system 2, the signal output part of velocity transducer 6 links to each other with A/D converter 11 input ends, the output terminal of A/D converter 11 links to each other with controller 12 input ends, controller 12 input ends link to each other with D/A 10 input ends, D/A 10 output terminals link to each other with power amplifier 9 input ends, and power amplifier 9 input ends link to each other with electromagnetic actuator 5 signal receiving terminals.
Fig. 2 is the structural representation of apparatus of the present invention, air spring system 3 and differential electromagnetic actuator 5 parallel layouts with support substrate 4, described electromagnetic actuator 5 be by two electromagnet 13a, 13b, two electromagnet stent 14a, 14b, armature 15 and armature bracket 16 are formed, and Placement as shown in Figure 4.The concrete installation form of differential electromagnetic actuator as shown in Figure 5, electromagnet stent 14a be installed in ground or with the fixing object in ground on, armature bracket 16 be installed in matrix 4 or with the fixing object of matrix 4 on.Under this installation form, the effect between ground and the matrix just is converted to the interaction between electromagnet and the armature, can be system required active controlling force is provided by controlling this active force.
Fig. 3 is the principle schematic of height control system among the present invention, is made up of height controller 17 and three-position electromagnetic valve 18.Height controller 17 makes air spring system 3 directly link to each other with air supply system 1 according to the altitude signal control three-position electromagnetic valve 18 that is installed in displacement transducer 8 feedbacks on the matrix 4, realization is to the inflation of pneumatic spring action, and matrix 4 is adjusted near the working depth; To feeding base current I in the electromagnet
0, utilize force transducer 7 to measure the active force of differential electromagnetic actuator to armature 15, at set intervals measurement signal is done on average if mean value is non-vanishing pneumatic spring 3 to be inflated or exhaust, be zero until mean value.At this moment the work origin of matrix 4 and differential electromagnetic actuator 5 ouput forces coincide zero point, have so far finished Height Adjustment work.
Single electromagnet can be expressed as the armature active force,
Wherein: F is an active force, and k is the coefficient relevant with electromagnet structure, and i is an electric current in the coil, and c is the gap between electromagnet and the armature.Obviously the pass in power and electric current and gap is quadratic relation (relation curve is seen shown in Figure 6), is difficult to accurate control.
The present invention adopts differential arrangement mode as shown in Figure 4 for this reason, and when armature 15 is positioned at two electromagnet 13a, 13b central position, then actuator is zero to the active force of armature 15.If this moment, a relative displacement y took place for ground and matrix 4, and wish one of actuator output and matrix 4 speed V
bThe power that direction is opposite, electromagnet 13a, the 13b of differential arrangement can be expressed as the active force of armature 15 so,
Following formula is gone out to do Taylor at y=0 launch and omit the high-order dimensionless that F=k is arranged
iI-k
yY is k wherein
i=4kI
0/ c
2,
Hence one can see that, and electromagnetic actuator ouput force of the present invention is the linear combination of relative displacement and bias current.
At first analyze the relative displacement component: by the stochastic vibration correlation theory as can be known, matrix 4 will be that stochastic vibration is made at the center with its work origin, and the mean value of matrix 4 working depths in a period of time will level off to the height value at matrix work origin place.The relation of electromagnetic actuator ouput force and relative displacement is not shown in Fig. 8 (a) when matrix 4 work origins and differential electromagnetic actuator 5 ouput forces do not overlap zero point, the relation of electromagnetic actuator ouput force and relative displacement is shown in Fig. 8 (b) during coincidence, obviously Fig. 8 (b) matches with the relation of common passive spring ouput force and relative displacement, but differential electromagnetic actuator 5 embodiments is negative stiffness.And the present invention is in vibration insulating foundation work beginning, makes the work origin of matrix and electromagnetic actuator exert oneself by the working depth of adjusting matrix and coincide zero point that hence one can see that, and differential electromagnetic actuator 5 of the present invention can be vibrating isolation system a negative stiffness K is provided
N, negative stiffness K under the selected situation of electromagnet
NWith base current I
0Be directly proportional.Next analyzes the bias current component, makes the absolute velocity V of its direct ratio and matrix 4 when control bias current component
bThe time, being equivalent to provides a controlled active damping force F for system
c, the active damping coefficient is k
iI/V
b, the relation of electric current and controlled active damping force as shown in Figure 7
Fig. 9 is a vibrating isolation system transmissibility correlation curve before and after negative stiffness applies, wherein dotted line is a systems communicate rate curve when not applying negative stiffness, solid line is to apply systems communicate rate curve behind the negative stiffness, can widen system's superlow frequency vibration isolating scope for vibrating isolation system provides negative stiffness as seen from the figure.Figure 10 is a vibrating isolation system transmissibility correlation curve before and after active damping force applies, wherein dotted line is a systems communicate rate curve when not applying active damping force, solid line is to apply systems communicate rate curve behind the active damping force, as seen from the figure for vibrating isolation system provides active damping force can be when keeping middle and high frequency anti-vibration performance, significantly the improvement system at the resonance region anti-vibration performance.Accompanying drawing 11 is vibrating isolation system transmissibility correlation curves before and after differential electromagnetic actuator 5 work of the present invention, wherein dotted line is a systems communicate rate curve before the differential electromagnetic actuator work, solid line is differential electromagnetic actuator 5 work back systems communicate rate curves, differential electromagnetic actuator 5 of the present invention as seen from the figure not only can be widened the superlow frequency vibration isolating performance of vibrating isolation system, and can not change on the anti-vibration performance basis of other frequency ranges of system significantly elevator system at the resonance region anti-vibration performance.
The present invention adopts pneumatic spring 3 and differential electromagnetic actuator 5 support substrate 4 in parallel, pneumatic spring 3 can guarantee that system has strong bearing capacity and good middle and high frequency anti-vibration performance, and differential electromagnetic actuator 5 can guarantee that system has good low frequency, superlow frequency vibration isolating performance and do not change the anti-vibration performance of other frequency ranges of system.Both combinations can be so that vibrating isolation system has strong bearing capacity and good full frequency band anti-vibration performance.Therefore the present invention can be applied to ultraprecise processing with measurement, optics processing and assembling, the processing of highi degree of accuracy inertia device and the technical field that equipment assembles, the manufacturing of vlsi circuit and micro-nano in-process measurement etc. have high requirements to vibration insulating foundation bearing capacity and superlow frequency vibration isolating performance.
Below in conjunction with the accompanying drawings the specific embodiment of the present invention is illustrated; but these explanations can not be understood that to have limited scope of the present invention; protection scope of the present invention is limited by the claims of enclosing, and any change of carrying out on claims of the present invention basis all is protection scope of the present invention.
Claims (9)
1. air spring superlow frequency vibration isolating method based on differential electromagnetic actuator, it is characterized in that: this method may further comprise the steps:
(1) according to pneumatic spring vibrating isolation system self-stiffness K
sDetermine required negative stiffness K with the system frequency ω that desires to reach
N, then by K
NCalculate the base current I in the electromagnetic actuator
0
(2) adjust the pneumatic spring vibrating isolation system and near working depth and in differential electromagnetic actuator, feed base current I
0, every a time period t feedback signal that is installed in force transducer on the differential electromagnetic actuator armature to be done on average, height control system is done once fine setting according to this mean value to the working depth of pneumatic spring, is zero until mean value, finishes Height Adjustment work.
(3) according to pneumatic spring vibrating isolation system matrix movement velocity V
b, the bias current I of control differential electromagnetic actuator
d, make actuator provide one to be proportional to speed V for vibrating isolation system
bActive damping force F
cActive damping force F
cIn conjunction with negative stiffness K
NCan make vibration insulating foundation obtain good superlow frequency vibration isolating performance.
2. the air spring superlow frequency vibration isolating method based on differential electromagnetic actuator according to claim 1 is characterized in that: the base current I in the described electromagnetic actuator
0Determine K by the negative stiffness that system is required
N
3. a kind of air spring superlow frequency vibration isolating method based on differential electromagnetic actuator according to claim 1 and 2 is characterized in that: bias current I in two of differential arrangement electromagnet in the described electromagnetic actuator
dDirection is opposite, produces damping force F
cDirection and substrate speed V
bDirection is opposite.
4. the air spring superlow frequency vibration isolating method based on differential electromagnetic actuator according to claim 1 is characterized in that: the damping force F that described electromagnetic actuator provides
cOnly be subjected to bias current I
dControl is with matrix (4) movement velocity V
bBe directly proportional, be not subjected to the influence of matrix (4) change in displacement, electromagnetic actuator bias current I
dWith damping force F
cBe linear relationship.
5. air spring superlow frequency vibration isolating device based on differential electromagnetic actuator, its composition comprises: air supply system (1), height control system (2), one group of pneumatic spring (3), matrix (4), both provided negative stiffness for system, the electromagnetic actuator (5) of controllable damping force is provided for system again, velocity transducer (6), force transducer (7), displacement transducer (8), power amplifier (9), A/D converter (10), D/A (11), controller (12), described air supply system (1) air feed end links to each other with described height control system (2) input end, described height control system (2) output terminal links to each other with each described pneumatic spring (3) inlet hole, the parallel below that is installed in described matrix (4) of described pneumatic spring (3) and described electromagnetic actuator (5), described displacement transducer (8) and described velocity transducer (6) are installed on the described matrix (4), described force transducer (7) two mounting ends are installed in respectively on described electromagnetic actuator (5) and the described matrix (4), the signal output part of described force transducer (7) and described displacement transducer (8) all is connected to the signal receiving terminal of described height control system (2), the signal output part of described velocity transducer (6) links to each other with described A/D converter (11) input end, the output terminal of described A/D converter (11) links to each other with described controller (12) input end, described controller (12) input end links to each other with described D/A (10) input end, described D/A (10) output terminal links to each other with described power amplifier (9) input end, and described power amplifier (9) input end links to each other with described electromagnetic actuator (5) signal receiving terminal.
6. the air spring superlow frequency vibration isolating device based on differential electromagnetic actuator according to claim 5, it is characterized in that: described height control system (2) is by height controller (17), three-position electromagnetic valve (18) is formed, height controller (17) input end links to each other with air supply system (1), the signal receiving terminal links to each other with force transducer (7) with displacement transducer (8) respectively, output terminal links to each other with three-position electromagnetic valve (18) input end, three-position electromagnetic valve (18) output terminal links to each other with pneumatic spring, height control system is done coarse adjustment according to displacement transducer (8) feedback signal, finely tunes according to force transducer (7) feedback signal.
7. according to claim 5 or 6 described air spring superlow frequency vibration isolating devices based on differential electromagnetic actuator, it is characterized in that: described electromagnetic actuator (5) is by a pair of electromagnet (13a, 13b), electromagnet stent (14a, 14b), armature (15), armature bracket (16) are formed, two electromagnet (13a, 13b) differential arrangement is at described electromagnet stent (14a, 14b), described armature (15) is installed on the described armature bracket (16) and is positioned at two electromagnet (13a, 13b), (13a 13b) leaves identical gap with two electromagnet.
8. according to claim 5 or 6 described air spring superlow frequency vibration isolating devices based on differential electromagnetic actuator, it is characterized in that: (13a, 13b) differential arrangement feed base current I to a pair of electromagnet in the described electromagnetic actuator (5)
0After, (13a, 13b) opposing side is a same polarity to two electromagnet.
9. the air spring superlow frequency vibration isolating device based on differential electromagnetic actuator according to claim 7, it is characterized in that: described armature bracket (16) is installed on described matrix (4), perhaps with the fixing object of described matrix on, described electromagnet stent (14a) be installed to ground or with the fixing object in ground on.
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- 2006-09-26 CN CNB2006101508100A patent/CN100557263C/en not_active Expired - Fee Related
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| CN110108462A (en) * | 2019-05-19 | 2019-08-09 | 北京工业大学 | A kind of structure testing machine oscillation damping method of actuator servo antrol |
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| CN115217893A (en) * | 2022-07-15 | 2022-10-21 | 哈尔滨工业大学 | Active pneumatic magnetic vibration isolation and active damping transfer device for precision equipment |
| CN115217894A (en) * | 2022-07-15 | 2022-10-21 | 哈尔滨工业大学 | Air floatation vibration isolation and damping protection transfer device and method for large-scale precision equipment |
| CN115217893B (en) * | 2022-07-15 | 2023-09-08 | 哈尔滨工业大学 | Active air-magnetic vibration isolation and active damping transfer device for precision equipment |
| CN115217892B (en) * | 2022-07-15 | 2023-09-08 | 哈尔滨工业大学 | Large-scale precision equipment air supporting vibration isolation and initiative damping transfer device |
| CN115217894B (en) * | 2022-07-15 | 2023-09-19 | 哈尔滨工业大学 | Large-scale precise equipment air floatation vibration isolation and damping protection transfer device and method |
| CN115217893B8 (en) * | 2022-07-15 | 2023-10-10 | 哈尔滨工业大学 | Active air-magnetic vibration isolation and active damping transfer device for precision equipment |
| CN115217890B (en) * | 2022-07-15 | 2023-10-31 | 哈尔滨工业大学 | Large-scale precision equipment gas magnetic vibration isolation and active damping transfer device |
| CN115217889B (en) * | 2022-07-15 | 2023-11-24 | 哈尔滨工业大学 | Large-scale precision equipment gas magnetic vibration isolation and active and passive damping transfer device |
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| CN100557263C (en) | 2009-11-04 |
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