CN116221335B - Ultra-low frequency quasi-zero stiffness adjustable vibration isolator - Google Patents

Ultra-low frequency quasi-zero stiffness adjustable vibration isolator Download PDF

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Publication number
CN116221335B
CN116221335B CN202310294485.9A CN202310294485A CN116221335B CN 116221335 B CN116221335 B CN 116221335B CN 202310294485 A CN202310294485 A CN 202310294485A CN 116221335 B CN116221335 B CN 116221335B
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adjusting device
opening
annular
shell
cavity wall
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CN202310294485.9A
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CN116221335A (en
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马跃
张厚根
高景作
尹波
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Dalian Dituo Precision Technology Co.,Ltd.
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Dalian Dituo Electronic Engineering Technology Co ltd
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    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16FSPRINGS; SHOCK-ABSORBERS; MEANS FOR DAMPING VIBRATION
    • F16F15/00Suppression of vibrations in systems; Means or arrangements for avoiding or reducing out-of-balance forces, e.g. due to motion
    • F16F15/02Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems
    • F16F15/023Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems using fluid means
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16FSPRINGS; SHOCK-ABSORBERS; MEANS FOR DAMPING VIBRATION
    • F16F15/00Suppression of vibrations in systems; Means or arrangements for avoiding or reducing out-of-balance forces, e.g. due to motion
    • F16F15/02Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems
    • F16F15/03Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems using magnetic or electromagnetic means
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16FSPRINGS; SHOCK-ABSORBERS; MEANS FOR DAMPING VIBRATION
    • F16F15/00Suppression of vibrations in systems; Means or arrangements for avoiding or reducing out-of-balance forces, e.g. due to motion
    • F16F15/02Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems
    • F16F15/04Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems using elastic means
    • F16F15/06Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems using elastic means with metal springs
    • F16F15/067Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems using elastic means with metal springs using only wound springs
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02TCLIMATE CHANGE MITIGATION TECHNOLOGIES RELATED TO TRANSPORTATION
    • Y02T90/00Enabling technologies or technologies with a potential or indirect contribution to GHG emissions mitigation

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  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Aviation & Aerospace Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Electromagnetism (AREA)
  • Vibration Prevention Devices (AREA)

Abstract

The invention provides an ultralow frequency quasi-zero stiffness adjustable vibration isolator which comprises a shell, a top plate, a supporting rod and an air floatation device, wherein the air floatation device is arranged at the bottom in the shell, the air floatation device comprises a rectangular cavity wall, an additional air chamber is arranged in the rectangular cavity wall, the top of the rectangular cavity wall is connected with a corrugated pipe, the supporting plate is arranged at the top of the corrugated pipe, the supporting plate, the corrugated pipe and the rectangular cavity wall form a main air chamber, an annular transverse plate is transversely arranged in the shell, a first adjusting device is arranged at the bottom of the annular transverse plate, and a second adjusting device is arranged at the inner side of the top of the shell. The invention adopts the air floating device to realize bearing, can meet the bearing requirement of a large-scale precise instrument, reduces the vertical natural frequency of the system through the combination of the main air chamber and the additional air chamber, realizes high negative rigidity through the parallel combination of the pre-pressed metal spring and the magnetic device, and can realize the quasi-zero rigidity requirement of the large-scale precise instrument through the parallel connection of the pre-pressed metal spring and the air floating device with high positive rigidity.

Description

Ultra-low frequency quasi-zero stiffness adjustable vibration isolator
Technical Field
The invention relates to the technical field of vibration isolation devices, in particular to an ultralow frequency quasi-zero stiffness adjustable vibration isolator.
Background
At present, the semiconductor industry rapidly develops, the precision requirement of semiconductor production equipment is higher and higher, the equipment is sensitive to the requirements of environments such as micro-vibration and the like, the yield of the equipment is reduced by a small amount of micro-vibration, and even the equipment cannot work normally, so that the isolation of the micro-vibration is more and more important.
The vibration frequency of the interference generated by the ultra-precise measuring instrument and the ultra-precise machining manufacturing equipment is mainly in the low-frequency vibration within 0.8-100 Hz. The passive vibration isolator is in principle dependent on reducing the natural frequency thereof, filtering out the vibration from the outside, and the vibration isolation effect depends on the natural frequency thereof. But the natural frequency is proportional to the arithmetic square root of the stiffness of the vibration isolator, i.e., the smaller the natural frequency, the smaller the stiffness. It is difficult to break through the looms that achieve low stiffness while not affecting the load bearing. The quasi-zero stiffness vibration isolator is a combined vibration isolator which is obtained by connecting positive and negative stiffness elastic components in parallel at a static flat position. The vibration isolator has larger static rigidity, can bear the weight of isolated equipment, has very low rigidity and even tends to zero when the equipment vibrates at a static balance position, and is beneficial to low-frequency vibration isolation.
Most passive quasi-zero stiffness vibration isolators are designed for a single vibration isolation object only, and once the vibration isolator is manufactured, the structural parameters cannot be changed. Therefore, when vibration isolation quality changes such as overload or underload, the vibration isolator does not have the quasi-zero stiffness characteristic any more, and the vibration isolation performance is reduced or even not as effective as that of a linear vibration isolation system, so that the application range of the vibration isolator is greatly limited. The vibration isolator has the advantages that the quasi-zero stiffness characteristic can be still realized under variable load by a small number of vibration isolators, but vibration isolation quality cannot be changed continuously, the vibration isolator can only keep the quasi-zero stiffness at a plurality of specific quality positions, the application range is small, and the vibration isolation requirement of large load cannot be generally realized.
Disclosure of Invention
The invention aims to provide an ultralow frequency quasi-zero stiffness adjustable vibration isolator so as to solve the problems in the background technology.
The technical scheme of the invention is realized as follows: the utility model provides an ultralow frequency quasi-zero stiffness adjustable vibration isolator, includes shell, roof, bracing piece and air supporting device, air supporting device installs in the bottom in the shell, air supporting device includes rectangular cavity wall, rectangular cavity wall inside is the additional air chamber, rectangular cavity wall top is connected with the bellows, the backup pad is installed at bellows top, backup pad, bellows and rectangular cavity wall constitute the main air chamber, the gas pocket has been seted up at rectangular cavity wall top, rectangular cavity wall installs the intake pipe that pierces through the shell in one side, the bracing piece top is perpendicular to the roof bottom middle connection, the bracing piece bottom is perpendicular to the middle of the backup pad top to be connected, the annular diaphragm is installed to shell inside, the bracing piece passes the annular diaphragm, annular diaphragm bottom installs first adjusting device, first adjusting device includes left adjusting device A, right adjusting device A, lead screw A and ring A, left side of installing at the bracing piece, with annular diaphragm bottom is connected, right adjusting device A installs in the right side of bracing piece, with annular diaphragm bottom is installed in the right side of bracing piece, with annular diaphragm bottom connecting device A, with annular adjusting device A and right side of installing at the inside of the annular diaphragm B, the left side adjusting device is installed to the annular diaphragm B through the annular adjusting device, left side of installing at the inside of the side of the annular diaphragm A and the top is connected with the annular device B respectively, left side adjusting device is installed to the annular device B, left side adjusting device is connected with the inside of the annular device B at the top, left side of the inside is installed at the annular device B, the side of the annular device is connected with the annular device B through the left side of the annular device B and the inside is installed at the side of the annular device B respectively, the inside is connected with the left side of the left side adjusting device B and the inside is installed at the left side of the side adjusting device B respectively, the electromagnetic device is connected with the inner side of the top of the shell, the left adjusting device B and the right adjusting device B are connected through a screw rod B, the bottom of the left adjusting device B and the bottom of the right adjusting device B are respectively provided with a permanent magnet device, the permanent magnet device is composed of a plurality of permanent magnets which are arranged in the same direction, a magnetic isolation plate is arranged between each permanent magnet, the electromagnetic device is respectively arranged below the permanent magnet device, at the top of the annular supporting plate and on the left side and the right side of the supporting rod, the electromagnetic device is composed of a plurality of electromagnetic coils, the magnetic isolation plates are respectively arranged between each electromagnetic coil, the electromagnetic coils are in one-to-one correspondence with the permanent magnets and act as repulsive force, the outer side of the shell is provided with a current regulator, the current regulator is connected with the electromagnetic device through a wire, and a plurality of regulating knobs are arranged on the current regulator, and can respectively control the electromagnetic coils at different positions.
Further, the lead connects the electromagnetic coils at the same corresponding positions on the left side and the right side in series, and the current of the electromagnetic coils at the same positions on the left side and the right side can be adjusted simultaneously through the adjusting knob, so that the magnetic field intensity of the electromagnetic coils is adjusted.
Further, the first adjusting device and the second adjusting device are completely identical in structure, the left adjusting device B comprises a diamond connecting rod A, an upper supporting plate A and a lower supporting plate A are respectively installed at the top and the bottom of the diamond connecting rod A through pins, a fixing block and a bolt A are respectively installed at the left and right joints of the diamond connecting rod A, the left and right ends of the diamond connecting rod A are connected through pins, the right adjusting device B comprises a diamond connecting rod B, an upper supporting plate B and a lower supporting plate B are respectively installed at the top and the bottom of the diamond connecting rod B through pins, a bolt B and a supporting cylinder are respectively installed at the left and right joints of the diamond connecting rod B, a screw rod B penetrating through a shell is connected to the left and right ends of the diamond connecting rod B through pins, a ring B is connected to the top end of the screw rod B through a universal joint, and a stop block is installed between the ring B and the supporting cylinder.
Further, a pneumatic valve is arranged on the air inlet pipe.
Further, a first opening, a second opening and a third opening are formed in one side of the shell, the first opening and the second opening are vertical rectangular holes, and the third opening is a circular hole.
Further, an upper rectangular hole and a lower rectangular hole are respectively formed in the upper portion and the lower portion of the support rod.
Further, the screw rod a of the first adjusting device traverses the lower rectangular hole and passes through the first opening, the screw rod a can move up and down in the lower rectangular hole and the first opening, the screw rod B of the second adjusting device traverses the upper rectangular hole and passes through the second opening, the screw rod B can move up and down in the upper rectangular hole and the second opening, and the wire passes through the third opening.
The beneficial effects of the invention are as follows:
the invention adopts the air floating device to realize bearing, can meet the bearing requirement of a large-scale precise instrument, reduces the vertical natural frequency of the system through the combination of the main air chamber and the additional air chamber, realizes high negative rigidity through the parallel combination of the pre-pressed metal spring and the magnetic device, and can realize the quasi-zero rigidity requirement of the large-scale precise instrument through the parallel connection of the pre-pressed metal spring and the air floating device with high positive rigidity.
The magnetic device adopts a plurality of groups of magnetic components which are connected in parallel, solves the problem of insufficient magnetic force of a single magnetic component, can realize independent adjustment and control of current, can simultaneously realize adjustment of the distance between magnets, and simultaneously connects pre-pressed metal springs in parallel, so that the continuous change of the negative stiffness of the system can be realized, and the system can keep quasi-zero stiffness under the condition of continuous change of vibration isolation quality.
The system has high static rigidity and bearing capacity, can meet the bearing requirement of 3000kg precision instruments, has high positioning precision, can realize vibration control of 1-100 Hz, has bearing capacity and rigidity adjusting capability, can be suitable for precision instruments of different types, and has wide application range and strong universality.
Drawings
Fig. 1 is a schematic structural view of the present invention.
1-a shell, 101-an annular transverse plate, 102-a first opening, 103-a second opening, 104-a third opening, 2-a top plate, 3-a support rod, 301-an upper rectangular hole, 302-a lower rectangular hole, 303-an annular support plate, 4-an air floatation device, 401-a rectangular cavity wall, 402-an additional air chamber, 403-an air hole, 404-a corrugated pipe, 405-a main air chamber, 406-a support plate, 407-an air inlet pipe, 408-an air valve, 5-a first adjusting device, 501-a left adjusting device, 502-a right adjusting device, 503-a screw rod, 504-a circular ring A, 6-a second adjusting device, 601-left adjusting device B, 6011-diamond connecting rod A, 6012-upper supporting plate A, 6013-lower supporting plate A, 6014-fixed block, 6015-bolt A, 602-right adjusting device B, 6021-diamond connecting rod B, 6022-upper supporting plate B, 6023-lower supporting plate B, 6024-bolt B, 6025-supporting cylinder, 6026-stopper, 603-screw rod B, 604-circular ring B, 7-metal spring, 8-permanent magnet device, 801-permanent magnet, 9-electromagnetic device, 901-electromagnetic coil, 10-magnetism isolating plate, 11-current regulator, 12-adjusting knob, 13-wire.
Description of the embodiments
The technical solutions of the present invention will be clearly and completely described in connection with the embodiments, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the invention without making any inventive effort, are intended to be within the scope of the invention.
As shown in figure 1, the ultra-low frequency quasi-zero stiffness adjustable vibration isolator comprises a shell 1, a top plate 2, a supporting rod 3 and an air floating device 4, wherein the air floating device 4 is arranged at the bottom in the shell 1, the air floating device 4 comprises a rectangular cavity wall 401, an additional air chamber 402 is arranged in the rectangular cavity wall 401, a corrugated pipe 404 is connected to the top of the rectangular cavity wall 401, a supporting plate 406 is arranged at the top of the corrugated pipe 404, a main air chamber 405 is formed by the supporting plate 4406, the corrugated pipe 404 and the rectangular cavity wall 401, an air hole 403 is formed in the top of the rectangular cavity wall 401, an air inlet pipe 407 penetrating through the shell 1 is arranged at one side of the rectangular cavity wall 401, the top of the supporting rod 3 is vertically connected with the middle of the bottom of the top plate 2, the bottom of the supporting rod 3 is vertically connected with the middle of the top of the supporting plate 406, an annular transverse plate 101 is transversely arranged in the shell 1, the supporting rod 3 penetrates through the annular transverse plate 101, the first adjusting device 5 is installed to annular diaphragm 101 bottom, first adjusting device 5 includes left adjusting device A501, right adjusting device A502, lead screw A503 and ring A504, left adjusting device A501 installs in the left side of bracing piece 3, is connected with annular diaphragm 101 bottom, right adjusting device A502 installs in the right side of bracing piece 3, is connected with annular diaphragm 101 bottom, left adjusting device A501 and right adjusting device A502 pass through lead screw A503 to be connected, left adjusting device A501 and right adjusting device A502 bottom are connected with metal spring 7 respectively, metal spring 7 bottom is connected with backup pad 406, between shell 1 top inboard and the annular diaphragm 101, annular backup pad 303 is installed to bracing piece 3 left and right sides, second adjusting device 6 is installed to shell 1 top inboard, second adjusting device 6 includes left adjusting device B601, the right adjusting device B602, the lead screw B603 and the circular ring B604, the left adjusting device B601 is arranged on the left side of the supporting rod 3 and is connected with the inner side of the top of the shell 1, the right adjusting device B602 is arranged on the right side of the supporting rod 3 and is connected with the inner side of the top of the shell 1, the left adjusting device B601 and the right adjusting device B602 are connected through the lead screw B603, the bottom of the left adjusting device B601 and the bottom of the right adjusting device B602 are respectively provided with a permanent magnet device 8, the permanent magnet devices 8 are composed of a plurality of permanent magnets 801 which are arranged in the same polar direction, and electromagnetic devices 9 are respectively arranged between each permanent magnet 801, each electromagnetic device 9 is composed of a plurality of electromagnetic coils 901, each electromagnetic coil 901 is provided with a magnetic isolation plate 10, each electromagnetic coil 901 corresponds to each permanent magnet 801 one by one, the outer side of the shell 1 is provided with a current regulator 11, each current regulator 11 is connected with each electromagnetic device 9 through a lead wire 13, each current regulator 901 is provided with a plurality of electromagnetic coils which are respectively provided with a plurality of electromagnetic coils 122, and the positions of the electromagnetic coils can be controlled by the corresponding knobs 122.
The lead 13 connects the electromagnetic coils 901 at the same corresponding positions on the left side and the right side in series, and the current of the electromagnetic coils 901 at the same positions on the left side and the right side can be simultaneously adjusted through the adjusting knob 12, so that the magnetic field intensity of the electromagnetic coils can be adjusted.
The first adjusting device 5 and the second adjusting device 6 have the same structure, the left adjusting device B601 comprises a diamond connecting rod A6011, an upper supporting plate A6012 and a lower supporting plate A6013 are respectively arranged at the top and the bottom of the diamond connecting rod A6011 through pins, a fixing block 6014 and a bolt A6015 are respectively arranged at the left and right connecting ends of the diamond connecting rod A6011, the left and right ends of the diamond connecting rod A6011 are respectively connected through pins, the right adjusting device B602 comprises a diamond connecting rod B6021, an upper supporting plate B6022 and a lower supporting plate B6023 are respectively arranged at the top and the bottom of the diamond connecting rod B6021 through pins, a bolt B6024 and a supporting cylinder 6025 are respectively arranged at the left and right connecting ends of the diamond connecting rod B6021, a screw rod B603 penetrating through a shell 1 is respectively arranged on the bolt A6015 and the bolt B6025, the top end of the screw rod B603 is respectively connected with the fixing block 6014 through a universal joint, a tail end of the screw rod B603 is connected with a ring B603, and a stop block 6026 is arranged between the ring B603 and the supporting cylinder 6025.
The air inlet pipe 407 is provided with a pneumatic valve 408.
A first opening 102, a second opening 103 and a third opening 104 are formed in one side of the shell 1, the first opening 102 and the second opening 103 are vertical rectangular holes, and the third opening 104 is a circular hole.
The upper and lower parts of the support rod 3 are respectively provided with an upper rectangular hole 301 and a lower rectangular hole 302.
The screw rod a503 of the first adjusting device 5 traverses the lower rectangular hole 302 and passes through the first opening 102, the screw rod a503 can move up and down in the lower rectangular hole 302 and the first opening 102, the screw rod B603 of the second adjusting device 6 traverses the upper rectangular hole 301 and passes through the second opening 103, the screw rod B603 can move up and down in the upper rectangular hole 102 and the second opening 103, and the wire 13 passes through the third opening 104.
During installation, firstly, the weight of a load precision instrument is determined, then the air pressure of the air floatation device 1 is controlled through the pneumatic valve 408 according to the weight of the precision instrument, the bearing requirement can be met, then the precision instrument is placed on the top plate 1, then the left adjusting device A and the right adjusting device A which are caused by the screw rod A of the first adjusting device 5 are rotated to downwards push the pre-pressure of the metal spring 7, if the rigidity of the system at the maximum stretching position of the first adjusting device 5 is still positive rigidity, the left adjusting device B and the right adjusting device B which are caused by the screw rod B of the second adjusting device 6 are rotated to the uppermost position, firstly, the first electromagnetic coil 901 is connected, the current is controlled through the adjusting knob 12 of the current regulator 11, if the rigidity of the system is still positive rigidity, the system is rotated to downwards push the screw rod B, if the rigidity of the system is still positive rigidity, the system is stopped to the rigidity, the system is in a zero-zero, the system is rotated to a zero-zero state, the vibration damping effect is achieved when the rigidity of the system is still positive rigidity, the system is in a zero, the vibration is in a zero-zero state, and the vibration is in a zero-zero state when the system is in a zero state.
The foregoing description of the preferred embodiments of the invention is not intended to be limiting, but rather is intended to cover all modifications, equivalents, alternatives, and improvements that fall within the spirit and scope of the invention.

Claims (7)

1. The utility model provides an ultralow frequency quasi-zero stiffness adjustable vibration isolator, which comprises a housing, the roof, bracing piece and air supporting device, its characterized in that, air supporting device installs in the inside bottom of shell, air supporting device includes rectangular cavity wall, rectangular cavity wall inside is the additional air chamber, rectangular cavity wall top is connected with the bellows, the backup pad is installed at bellows top, backup pad, bellows and rectangular cavity wall constitute the main air chamber, the gas pocket has been seted up at rectangular cavity wall top, rectangular cavity wall installs the intake pipe that pierces through the shell in one side, bracing piece top and roof bottom intermediate vertical connection, bracing piece bottom and backup pad top intermediate vertical connection, the annular diaphragm is transversely installed to the inside of shell, the bracing piece passes annular diaphragm, annular diaphragm bottom installs first adjusting device, first adjusting device includes left adjusting device A, right adjusting device A, lead screw A and ring A, left side of installing at the bracing piece, with annular diaphragm bottom connection, right adjusting device A installs in the right side of bracing piece, right side adjusting device A is installed at the right side of bracing piece, annular diaphragm bottom and annular device A is installed through the annular diaphragm A, left side adjusting device and right side connecting with annular spring B, left side adjusting device and right side inside of installing between annular device A and the top respectively, left side adjusting device B are installed to the inside of annular diaphragm, the top is connected with annular device B, left side adjusting device is installed to the inside top and the annular device B is connected with the inside of the annular housing respectively, the right adjusting device B is arranged on the right side of the supporting rod and is connected with the inner side of the top of the shell, the left adjusting device B and the right adjusting device B are connected through a screw rod B, permanent magnetic devices are respectively arranged at the bottoms of the left adjusting device B and the right adjusting device B, each permanent magnetic device consists of a plurality of permanent magnets which are arranged in the same direction, a magnetic isolation plate is arranged between each permanent magnet, electromagnetic devices are respectively arranged below the permanent magnetic devices, at the top of the annular supporting plate and on the left side and the right side of the supporting rod, each electromagnetic device consists of a plurality of electromagnetic coils, the magnetic isolation plates are arranged between each electromagnetic coil, the electromagnetic coils are in one-to-one correspondence with the permanent magnets and act as repulsive force, a current regulator is arranged on the outer side of the shell and is connected with the electromagnetic devices through wires, and a plurality of regulating knobs are arranged on the current regulator, and can respectively control the electromagnetic coils at different positions.
2. The ultralow frequency quasi-zero stiffness adjustable vibration isolator according to claim 1, wherein the wires connect the electromagnetic coils at the same corresponding positions on the left side and the right side in series, and the current of the electromagnetic coils at the same positions on the left side and the right side can be adjusted simultaneously through an adjusting knob, so that the magnetic field intensity of the electromagnetic coils is adjusted.
3. The ultra-low frequency quasi-zero stiffness adjustable vibration isolator according to claim 1, wherein the first adjusting device and the second adjusting device are completely identical in structure, the left adjusting device B comprises a diamond connecting rod A, an upper supporting plate A and a lower supporting plate A are respectively arranged at the top and the bottom of the diamond connecting rod A through pins, a fixing block and a bolt A are respectively arranged at the left and right connecting ends of the diamond connecting rod A, the left and right ends of the diamond connecting rod A are respectively connected through pins, the right adjusting device B comprises a diamond connecting rod B, an upper supporting plate B and a lower supporting plate B are respectively arranged at the top and the bottom of the diamond connecting rod B through pins, a bolt B and a supporting cylinder are respectively arranged at the left and right connecting ends of the diamond connecting rod B, a screw rod B penetrating through a shell is connected to the bolt B through pins, the top end of the screw rod B is connected with the fixing block through a universal joint, a ring B is connected to the tail end of the screw rod B, and a stop block is arranged between the ring B and the supporting cylinder.
4. The ultra-low frequency quasi-zero stiffness adjustable vibration isolator according to claim 1, wherein the air inlet pipe is provided with a pneumatic valve.
5. The ultra-low frequency quasi-zero stiffness adjustable vibration isolator according to claim 1, wherein a first opening, a second opening and a third opening are formed in one side of the housing, the first opening and the second opening are vertical rectangular holes, and the third opening is a circular hole.
6. The ultra-low frequency quasi-zero stiffness adjustable vibration isolator according to claim 1, wherein the upper and lower support rods are respectively provided with an upper rectangular hole and a lower rectangular hole.
7. The ultra-low frequency quasi-zero stiffness adjustable vibration isolator according to claim 1, wherein a screw a of the first adjusting device traverses the lower rectangular hole and passes through the first opening, the screw a is movable up and down within the lower rectangular hole and the first opening, a screw B of the second adjusting device traverses the upper rectangular hole and passes through the second opening, the screw B is movable up and down within the upper rectangular hole and the second opening, and the wire passes through the third opening.
CN202310294485.9A 2023-03-24 2023-03-24 Ultra-low frequency quasi-zero stiffness adjustable vibration isolator Active CN116221335B (en)

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JPH09159225A (en) * 1995-12-06 1997-06-20 Yamaha Motor Co Ltd Heat pump supporting structure
CN101709763A (en) * 2009-12-10 2010-05-19 华中科技大学 Horizontal two-degree-of-freedom vibration isolating mechanism
CN103047346A (en) * 2012-12-19 2013-04-17 哈尔滨工业大学 Magnetic suspension zero-stiffness vibration isolator with angular decoupling function by aid of rolling joint bearing and vibration isolation system with magnetic suspension zero-stiffness vibration isolator
CN104455181A (en) * 2014-10-27 2015-03-25 西安交通大学 Quasi-zero stiffness vibration isolator with annular permanent magnets used for generating negative stiffness
CN205260719U (en) * 2015-12-08 2016-05-25 天津航天机电设备研究所 Positive and negative rigidity parallel mechanism
CN206234312U (en) * 2016-11-11 2017-06-09 中国人民解放军海军工程大学 A kind of adjustable magnetic quasi-zero stiffness vibration isolators of rigidity

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH09159225A (en) * 1995-12-06 1997-06-20 Yamaha Motor Co Ltd Heat pump supporting structure
CN101709763A (en) * 2009-12-10 2010-05-19 华中科技大学 Horizontal two-degree-of-freedom vibration isolating mechanism
CN103047346A (en) * 2012-12-19 2013-04-17 哈尔滨工业大学 Magnetic suspension zero-stiffness vibration isolator with angular decoupling function by aid of rolling joint bearing and vibration isolation system with magnetic suspension zero-stiffness vibration isolator
CN104455181A (en) * 2014-10-27 2015-03-25 西安交通大学 Quasi-zero stiffness vibration isolator with annular permanent magnets used for generating negative stiffness
CN205260719U (en) * 2015-12-08 2016-05-25 天津航天机电设备研究所 Positive and negative rigidity parallel mechanism
CN206234312U (en) * 2016-11-11 2017-06-09 中国人民解放军海军工程大学 A kind of adjustable magnetic quasi-zero stiffness vibration isolators of rigidity

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