CN115217892B - Large-scale precision equipment air supporting vibration isolation and initiative damping transfer device - Google Patents

Large-scale precision equipment air supporting vibration isolation and initiative damping transfer device Download PDF

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Publication number
CN115217892B
CN115217892B CN202210835008.4A CN202210835008A CN115217892B CN 115217892 B CN115217892 B CN 115217892B CN 202210835008 A CN202210835008 A CN 202210835008A CN 115217892 B CN115217892 B CN 115217892B
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China
Prior art keywords
vibration isolation
isolation platform
air
frame
unit
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CN115217892A (en
Inventor
崔俊宁
程钟义
崔文文
边星元
谭久彬
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Harbin Institute of Technology
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Harbin Institute of Technology
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    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16FSPRINGS; SHOCK-ABSORBERS; MEANS FOR DAMPING VIBRATION
    • F16F15/00Suppression of vibrations in systems; Means or arrangements for avoiding or reducing out-of-balance forces, e.g. due to motion
    • F16F15/02Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems
    • F16F15/022Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems using dampers and springs in combination
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B60VEHICLES IN GENERAL
    • B60PVEHICLES ADAPTED FOR LOAD TRANSPORTATION OR TO TRANSPORT, TO CARRY, OR TO COMPRISE SPECIAL LOADS OR OBJECTS
    • B60P7/00Securing or covering of load on vehicles
    • B60P7/06Securing of load
    • B60P7/16Protecting against shocks
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16FSPRINGS; SHOCK-ABSORBERS; MEANS FOR DAMPING VIBRATION
    • F16F15/00Suppression of vibrations in systems; Means or arrangements for avoiding or reducing out-of-balance forces, e.g. due to motion
    • F16F15/02Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems
    • F16F15/023Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems using fluid means
    • F16F15/0232Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems using fluid means with at least one gas spring
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16FSPRINGS; SHOCK-ABSORBERS; MEANS FOR DAMPING VIBRATION
    • F16F15/00Suppression of vibrations in systems; Means or arrangements for avoiding or reducing out-of-balance forces, e.g. due to motion
    • F16F15/02Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems
    • F16F15/023Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems using fluid means
    • F16F15/027Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems using fluid means comprising control arrangements
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00Measuring arrangements characterised by the use of optical techniques
    • G01B11/02Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/06Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
    • G01B11/0608Height gauges
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16FSPRINGS; SHOCK-ABSORBERS; MEANS FOR DAMPING VIBRATION
    • F16F2228/00Functional characteristics, e.g. variability, frequency-dependence
    • F16F2228/06Stiffness
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16FSPRINGS; SHOCK-ABSORBERS; MEANS FOR DAMPING VIBRATION
    • F16F2228/00Functional characteristics, e.g. variability, frequency-dependence
    • F16F2228/06Stiffness
    • F16F2228/066Variable stiffness
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16FSPRINGS; SHOCK-ABSORBERS; MEANS FOR DAMPING VIBRATION
    • F16F2230/00Purpose; Design features
    • F16F2230/0047Measuring, indicating
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16FSPRINGS; SHOCK-ABSORBERS; MEANS FOR DAMPING VIBRATION
    • F16F2230/00Purpose; Design features
    • F16F2230/06Fluid filling or discharging

Abstract

The invention relates to an air floatation vibration isolation and active damping device for large-scale precision equipment, which belongs to the technical field of transfer equipment. The three-way arrangement of the vibration isolation units realizes three-way vibration isolation, can ensure constant posture and effectively inhibit swinging and shaking simultaneously in the transportation process, and the addition of the active damping units realizes precise damping regulation and vibration isolation, and meanwhile, the addition of the limiting units realizes safety protection under the action of strong impact, so that the transportation problem that the three-way precise vibration isolation and impact protection cannot be realized in the transportation process of large precise equipment in the prior art is solved.

Description

Large-scale precision equipment air supporting vibration isolation and initiative damping transfer device
Technical Field
The invention belongs to the technical field of transfer equipment, and particularly relates to an air floatation vibration isolation and active damping transfer device for large-scale precise equipment.
Background
Large-scale precision equipment, in particular to large-scale precision equipment subjected to precision assembly, has the characteristics of large volume, large mass, high stability requirement and the like, and has strict requirement on the transportation process during transportation. In the transportation process of large-scale precision equipment, the stable support is required to be kept in a constant posture, the whole performance of the equipment can be influenced by slight vibration in the transportation process, the safety performance of the equipment can be influenced by the impact effect generated by the bumping of the ground, and particularly under the unbalanced load condition, the equipment can be directly offset and turned over due to the strong impact effect generated by the bumping of the ground, so that the safety of the equipment and transportation personnel is threatened.
The air cushion vehicle uses the gas film technology to suspend and support the load, avoids contacting with the ground, generates good vibration isolation effect, and plays an important role in the transportation of precise instruments. The patent number 201010242011.2 discloses an automatic leveling control device for an air cushion suspension transport vehicle, which utilizes signals sent by a high-position photoelectric switch and a low-position photoelectric switch to control the inflation and deflation of an air cushion so as to realize an automatic leveling function. The technical scheme is characterized in that: (1) According to the technical scheme, a good vertical vibration isolation effect is achieved by using the air cushion vehicle, but due to the lack of an active damping device, precise regulation and control on system damping cannot be achieved in the transferring process, so that vibration amplification at the natural frequency can damage transferred equipment; (2) The technical scheme cannot realize safety protection under the action of strong impact, when the strong impact caused by factors such as ground jolt is acted, huge impact energy cannot be dissipated and then directly acts on the transported equipment to cause the damage of the transported equipment, meanwhile, the strong impact acts on the transported equipment to cause larger relative displacement between the transported equipment and the ground at the moment, and the rigid collision of the transported equipment is probably directly caused to be damaged due to the lack of a limiting device; (3) According to the technical scheme, the photoelectric switch is adopted as the height sensor, the height of the air cushion transfer trolley cannot be detected and adjusted in real time, the horizontal posture is adjusted by the height adjusting method, the supporting force is not applied in the horizontal direction, and the swing caused by the bumping of the ground in the transfer process cannot be effectively restrained.
The patent number 201310280075.5 discloses an intelligent air cushion transfer vehicle and a control method thereof, and the technical scheme adopts a method of arranging height sensors at four corners of a frame of the air cushion vehicle to feed back the height of a vehicle body relative to the ground in real time, and a remote control main processor controls an air cushion inflation and deflation unit according to the height information of the vehicle body to adjust the fluctuation height of the vehicle body, so that the aim of controlling the posture of the vehicle body is fulfilled. The technical scheme is characterized in that: (1) According to the technical scheme, a good vertical vibration isolation effect is achieved by using the air cushion vehicle, but due to the lack of an active damping device, precise regulation and control on system damping cannot be achieved in the transferring process, so that vibration amplification at the natural frequency can damage transferred equipment; (2) The technical scheme cannot realize safety protection under the action of strong impact, when the strong impact caused by factors such as ground jolt is acted, huge impact energy cannot be dissipated and then directly acts on the transported equipment to cause the damage of the transported equipment, meanwhile, the strong impact acts on the transported equipment to cause larger relative displacement between the transported equipment and the ground at the moment, and the rigid collision of the transported equipment is probably directly caused to be damaged due to the lack of a limiting device; (3) According to the technical scheme, the height of the air cushion transfer trolley is detected and regulated in real time by the height sensor, so that a constant horizontal posture is guaranteed to a certain extent, but the horizontal posture is regulated by the height regulating method, a supporting force is not applied in the horizontal direction, and the swing caused by the bumping of the ground in the transfer process cannot be restrained.
The patent number 202110749514.7 discloses a three-way vibration damping transfer box and a transfer trolley applied to the same, and the technical scheme is that transverse vibration damping rubber is arranged on four side walls of the transfer box, and three-way vibration isolation is realized in a mode of arranging vertical vibration damping rubber at the bottom of the box. The technical scheme is characterized in that: (1) According to the technical scheme, vibration isolation in three directions is achieved, transfer operation can be achieved for general precision equipment with low requirements on vibration environment, the vibration isolation is simple and reliable, but due to the fact that vibration isolation performance of vibration damping rubber is poor and an active damping device is lacked, precise regulation and control on system damping cannot be achieved in the transfer process, and therefore safe transfer of precision equipment with high requirements on environment vibration cannot be achieved; (2) According to the technical scheme, rubber is adopted for vibration reduction in three directions, when strong impact caused by uneven ground factors is met, a dissipation device for impact energy is absent, and huge impact energy can cause the transported equipment to be damaged; (3) The vibration isolation mode adopted by the technical scheme determines that the posture is not ensured to be constant in the transportation process.
In sum, the current device towards large-scale precision equipment transportation is difficult to compromise three-dimensional vibration isolation and gesture regulation and control, adjusts the horizontal gesture through height-adjusting's mode, does not have the effort to swaying the effect and carry out horizontal gesture regulation on the horizontal direction, lacks active damping device, consequently can't realize the accurate regulation and control of system damping and then reduce the vibration amplification effect of natural frequency department in transportation process, simultaneously, when meet the strong impact effect that the factor such as road surface unevenness arouses in transportation process, lack energy dissipation device, can't dispel impact energy, huge impact energy transmits to by transporting on the large-scale precision equipment and leads to being destroyed by transporting large-scale precision equipment. Therefore, it is needed to provide an air floatation vibration isolation and active damping transfer device for large-scale precise equipment so as to meet the requirements of China in the aspect of transferring the large-scale precise equipment.
Disclosure of Invention
Aiming at the problems in the prior art, the invention aims to provide the air floatation vibration isolation and active damping transfer device for the large-scale precise equipment, so as to meet the transfer requirements of the large-scale precise equipment in precise vibration isolation and safety protection in China.
In order to achieve the above object, the present invention provides a technical solution as follows:
the air floatation vibration isolation and active damping transfer device for the large-scale precise equipment comprises a frame, a vibration isolation platform, an air floatation vibration isolation unit, a height detection and control device and a processor, wherein the vibration isolation platform supports the transferred large-scale precise equipment; the air floatation vibration isolation unit is respectively arranged between the upper bottom surface of the frame, the four inner side surfaces and the vibration isolation platform in parallel at intervals, and is connected with the frame and the vibration isolation platform; the active damping unit for precise vibration isolation and impact energy dissipation and the height detection and control device for detecting horizontal postures and lateral displacements are respectively arranged in parallel at intervals among the upper bottom surface, the four inner side surfaces and the vibration isolation platform of the frame, and are connected with the frame and the vibration isolation platform; the limiting units are arranged at intervals between the upper bottom surface of the frame, the four inner side surfaces and the vibration isolation platform in parallel.
Preferably, the air-floating vibration isolation unit comprises an air chamber and an air spring.
Preferably, the height detection and control device comprises a height detection device, a connecting piece and an inflation and deflation unit.
Preferably, the active damping unit comprises an active damper and a speed sensor.
Preferably, the height detection device comprises a grating ruler reading head connecting rod, a grating ruler guide rail and a grating ruler reading head.
The air floatation vibration isolation and active damping transfer device for the large-scale precise equipment provided by the invention has the following effects:
(1) The invention can realize the precise vibration isolation effect in the process of transferring large-scale precise equipment. The high-performance air spring vibration isolator can achieve higher static rigidity and lower dynamic rigidity, can ensure higher vibration isolation performance under the condition of large bearing, and can further reduce vibration transmissibility at natural frequency by precisely regulating and controlling system damping through the active damping units in parallel connection.
(2) The invention can realize the safety protection effect under the strong impact effect in the transportation process. According to the invention, the active damping unit and the limiting unit are arranged between the vibration isolation platform and the frame, when the transported equipment is subjected to strong impact in the transportation process, a larger damping force can be generated to rapidly dissipate impact energy, and meanwhile, the existence of the limiting unit can ensure that the transported equipment cannot generate larger displacement to be damaged, so that the safety protection effect under the strong impact in the transportation process is realized.
(3) The invention can realize that the transported equipment is in a horizontal posture in the transportation process, and can effectively prevent the transported equipment from swinging in the transportation process to cause equipment damage. The invention uses the height detection and control unit to detect the relative displacement between the vibration isolation platform and the frame in real time, and controls the air charging and discharging unit to charge and discharge the air spring in real time through the processor, thereby ensuring that the equipment can stably transport in a constant posture.
Drawings
FIG. 1 is a schematic diagram of a large-scale precision equipment air-floatation vibration isolation and active damping transfer device
FIG. 2 is an enlarged partial view of the active damping unit 500 of FIG. 1
FIG. 3 is a front view of a large precision equipment air floatation vibration isolation and active damping transfer device without a frame and a processor
Fig. 4 highlights a view of the active damping unit 500 and the height detection and control device 700 in detail a in fig. 3
FIG. 5 is a top view of a large precision equipment air floatation vibration isolation and active damping transfer device without a frame and a processor
Reference numerals in the drawings:
100. a frame; 200. a vibration isolation platform; 300. large-scale precision equipment; 400. an air floatation vibration isolation unit; 401. a gas chamber; 402. an air spring; 500. an active damping unit; 501. an active damper; 502. a speed sensor; 600. a limit unit; 601. a stopper bracket; 602. a limiter; 700. a height detection and control device; 710. a height detection device; 711. a grating ruler reading head connecting piece; 712. a grating ruler guide rail; 713. a grating ruler reading head; 714. a connecting piece; 720. an air charging and discharging unit; 800. a processor.
Detailed Description
The present invention will be further described with reference to the drawings and the specific embodiments in order to make the objects, technical solutions and advantages of the present invention more apparent. It should be understood that the specific embodiments described herein are for purposes of illustration only and are not intended to limit the scope of the invention. All other embodiments, which can be made by those skilled in the art based on the embodiments of the invention without making any inventive effort, are intended to be within the scope of the invention.
The invention provides an air floatation vibration isolation and active damping transfer device for large-scale precise equipment, which is shown in fig. 1-5, and comprises a frame 100, a vibration isolation platform 200, an air floatation vibration isolation unit 400, an active damping unit 500, a limiting unit 600, a height detection and control device 700 and a processor 800, wherein the vibration isolation platform 200 supports the transferred large-scale precise equipment 300; the air-floating vibration isolation units 400 are respectively arranged in parallel at intervals between the upper bottom surface of the frame 100 and the four inner side surfaces and the vibration isolation platform 200, and are connected with the frame 100 and the vibration isolation platform 200; the active damping unit 500 for precise vibration isolation and impact energy dissipation, and the height detection and control device 700 for detecting horizontal posture and lateral displacement are respectively arranged in parallel at intervals between the upper bottom surface of the frame 100 and the four inner side surfaces and the vibration isolation platform 200, and are both connected with the frame 100 and the vibration isolation platform 200; the limiting units 600 are arranged in parallel at intervals between the upper bottom surface and the four inner side surfaces of the frame 100 and the vibration isolation platform 200.
When the vibration isolator is used, the plurality of height detection and control devices 700 are installed at different positions on the same surface in parallel with the air floatation vibration isolation units 400, the processor 800 is used for controlling the height detection and control devices 700 to inflate the group of air floatation vibration isolation units 400, the supporting force of transported large-scale precision equipment is provided, vibration generated by the ground is attenuated by the air springs 402 and then transmitted to the transported large-scale precision equipment, the plurality of active damping units 500 are installed in parallel with the single group of air floatation vibration isolation units 400, the damping precision regulation and control effect can be realized according to the vibration speed of the vibration isolation platform 200, and the vibration transmission rate at the natural frequency is further attenuated. Specifically, the height detection device and control device 700 includes a height detection device 710 and an air charging and discharging unit 720, the height detection device 710 installed on the lower bottom surface of the vibration isolation platform 200 detects the floating height of the vibration isolation platform at the installation position in real time, the height detection device 710 installed on the side surface of the vibration isolation platform detects the horizontal relative displacement between the vibration isolation platform 200 and the vehicle frame 100 in real time, and feeds back the result to the processor 800 for processing, when the transfer equipment is impacted by bump on the ground or the like, the air charging and discharging operation is performed on the air floating vibration isolation unit 400 by controlling the air charging and discharging unit 720, so that the vibration isolation platform is always kept in a constant horizontal posture, and the anti-swing control of the vibration isolation platform is realized; the active damping unit 500 comprises an active damper 501 and a speed sensor 502, the active damper 501 is connected with the vibration isolation platform and the vehicle frame, the speed sensor 502 is installed on the vibration isolation platform and is located near the active damper 501, the speed sensor detects the vibration speed at the installation position of the speed sensor in real time and transmits the vibration speed to the processor, the processor processes the vibration speed to control the active damper to generate a precise damping force so as to realize precise damping adjustment vibration isolation, and when strong impact is received, the active damper 501 is controlled to generate a larger damping force so as to realize quick dissipation of vibration energy, and meanwhile, the air floatation vibration isolation unit 400 cannot realize quick adjustment of the air pressure value inside the air spring 402, so that the vibration isolation platform generates larger relative displacement, and the limiting unit 600 contacts with the vibration isolation platform and generates a limiting effect so as to realize safety protection of transported large-sized precise equipment.
Specifically, the air-floating vibration isolation unit 400 includes an air chamber 401 and an air spring 402, wherein the air chamber 401 is fixedly installed on the frame 100, the air spring 402 is fixedly installed on the air chamber 401, the upper end of the air spring is fixedly connected to the vibration isolation platform 200, the air paths between the air spring 402 and the air chamber 401 are communicated, and when the air-floating vibration isolation unit 400 is inflated by the air inflation and deflation unit 720, inflation gas firstly enters the air chamber 401 and then enters the corresponding air spring 402.
Specifically, the limiting unit 600 includes a limiter bracket 601 and a limiter 602, where the limiter bracket 601 is fixedly mounted on the frame 100, the limiter 602 is fixedly mounted on the limiter bracket 601, and a certain safety gap is left between the upper end surface of the limiter 602 and the vibration isolation platform 200.
Specifically, the height detecting device 710 and the air charging and discharging unit 720 are fixedly connected to the air chamber 401 of the air-floating vibration isolation unit through a connecting piece 714. The height detection device 710 comprises a grating ruler reading head connecting piece 711, a grating ruler guide rail 712 and a grating ruler reading head 713, wherein the grating ruler reading head 713 is slidably connected to the grating ruler guide rail 712, one end of the grating ruler reading head connecting piece 711 is connected with the grating ruler reading head 713, and the other end is connected with the vibration isolation platform. In the transportation process, when vibration from the ground is transmitted to the vibration isolation platform through the frame 100, the air chamber 401 and the air spring 500 to cause the vibration isolation platform 200 to vibrate, the vibration isolation platform 200 drives the grating ruler reading head 713 to slide on the grating ruler guide rail 712 through the grating ruler reading head connecting piece 711, so that the grating ruler reading is changed, further displacement change of the frame 100 and the vibration isolation platform 200 at the connecting point is detected in real time, when a displacement change value exceeds a certain range, the inflation and deflation unit 720 is controlled to inflate and deflate the air-float vibration isolation unit 400, so that posture adjustment of the vibration isolation platform 200 is realized, and when the displacement change is large, the limit unit 600 is directly caused to be in contact with the vibration isolation platform 200, and then a safety protection function is realized.
In conclusion, the invention can realize the precise vibration isolation effect in the process of transferring large-scale precise equipment. The high-performance air spring vibration isolator can achieve higher static rigidity and lower dynamic rigidity, can ensure higher vibration isolation performance under the condition of large bearing, and can further reduce vibration at natural frequency to achieve the transfer effect of precise vibration isolation by precisely regulating and controlling system damping by using the active damping unit 500 in parallel.
The invention can realize the safety protection effect under the strong impact effect in the transportation process. The active damping unit 500 and the limiting unit 600 are arranged between the vibration isolation platform 200 and the frame 100, and the transported equipment can generate larger damping force to rapidly dissipate impact energy after being subjected to strong impact in the transportation process, and the existence of the limiting unit 600 can ensure that the transported equipment cannot generate larger displacement to be damaged, so that the safety protection effect under the strong impact in the transportation process is realized.
The invention can realize that the transported equipment is in a horizontal posture in the transportation process, and can effectively prevent the transported equipment from swinging in the transportation process to cause equipment damage. The invention uses the height detection and control device 700 to detect the relative displacement between the vibration isolation platform 200 and the frame 100 in real time, and controls the air charging and discharging unit 720 to charge and discharge the air spring 402 in real time through the processor 800, thereby ensuring that the equipment can stably transport in a constant posture.
The foregoing examples merely illustrate embodiments of the invention and are described in more detail and are not to be construed as limiting the scope of the invention. It should be noted that it will be apparent to those skilled in the art that several variations and modifications can be made without departing from the spirit of the invention, which are all within the scope of the invention. Accordingly, the scope of protection of the present invention is to be determined by the appended claims.

Claims (1)

1. The air floatation vibration isolation and active damping transfer device for the large-scale precise equipment comprises a frame (100), a vibration isolation platform (200), an air floatation vibration isolation unit (400), a height detection and control device (700) and a processor (800), wherein the vibration isolation platform (200) supports the transferred large-scale precise equipment (300); the method is characterized in that: the vibration isolation device further comprises an active damping unit (500) and a limiting unit (600), wherein the air floatation vibration isolation unit (400) is arranged between the upper bottom surface of the frame (100) and the four inner side surfaces and the vibration isolation platform (200) in parallel at intervals, and is connected with the frame (100) and the vibration isolation platform (200); the active damping unit (500) for precise vibration isolation and impact energy dissipation and the height detection and control device (700) for detecting horizontal postures and lateral displacements are respectively arranged in parallel at intervals between the upper bottom surface and four inner side surfaces of the frame (100) and the vibration isolation platform (200), and are connected with the frame (100) and the vibration isolation platform (200); the limiting units (600) are arranged in parallel between the upper bottom surface of the frame (100) and the four inner side surfaces and the vibration isolation platform (200) at intervals;
the air-floatation vibration isolation unit (400) comprises an air chamber (401) and an air spring (402), wherein the air chamber (401) is fixedly arranged on the frame (100), the air spring (402) is fixedly arranged on the air chamber (401), the upper end of the air spring is fixedly connected to the vibration isolation platform (200), the air paths between the air spring (402) and the air chamber (401) are communicated, and when the air-floatation vibration isolation unit (400) is inflated by the inflation and deflation unit (720), inflation gas firstly enters the air chamber (401) and then enters the corresponding air spring (402);
the height detection and control device (700) comprises a height detection device (710) and an inflation and deflation unit (720), the height detection device (710) comprises a grating ruler reading head connecting piece (711), a grating ruler guide rail (712) and a grating ruler reading head (713), the grating ruler reading head (713) is connected to the grating ruler guide rail (712) in a sliding mode, one end of the grating ruler reading head connecting piece (711) is connected with the grating ruler reading head (713), and the other end of the grating ruler reading head connecting piece is connected with the vibration isolation platform; the height detection device (710) and the inflation and deflation unit (720) are fixedly connected to the air chamber (401) of the air floatation vibration isolation unit (400) through a connecting piece (714);
the limiting unit (600) comprises a limiter bracket (601) and a limiter (602), wherein the limiter bracket (601) is fixedly arranged on the frame (100), the limiter (602) is fixedly arranged on the limiter bracket (601), and a certain safety gap is reserved between the upper end surface of the limiter (602) and the vibration isolation platform (200);
in the transferring process, when vibration from the ground is transmitted to the vibration isolation platform through the frame (100), the air chamber (401) and the air spring (402) to cause the vibration isolation platform (200) to vibrate, the vibration isolation platform (200) drives the grating ruler reading head (713) to slide on the grating ruler guide rail (712) through the grating ruler reading head connecting piece (711), so that the grating ruler reading changes, and further the relative displacement change between the frame (100) and the vibration isolation platform (200) at the connecting point is detected in real time;
the height detection device (710) is arranged on the lower bottom surface of the vibration isolation platform (200) and used for detecting the floating height of the vibration isolation platform at the installation position in real time, the height detection device (710) is arranged on the side surface of the vibration isolation platform and used for detecting the horizontal relative displacement between the vibration isolation platform (200) and the vehicle frame (100) in real time, and the result is fed back to the processor (800) for processing;
the active damping unit (500) comprises an active damper (501) and a speed sensor (502), the active damper (501) is connected with the vibration isolation platform and the frame, the speed sensor (502) is installed on the vibration isolation platform and is located near the active damper (501), the speed sensor detects the vibration speed at the installation position in real time and transmits the vibration speed to the processor, and the processor controls the active damper to generate precise damping force after processing, so that precise damping adjustment vibration isolation is realized.
CN202210835008.4A 2022-07-15 2022-07-15 Large-scale precision equipment air supporting vibration isolation and initiative damping transfer device Active CN115217892B (en)

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CN115217889B (en) * 2022-07-15 2023-11-24 哈尔滨工业大学 Large-scale precision equipment gas magnetic vibration isolation and active and passive damping transfer device
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