CN1373471A

CN1373471A - Micro driving unit having balanced dynamic characteristic

Info

Publication number: CN1373471A
Application number: CN01142798A
Authority: CN
Inventors: J·布兰德特
Original assignee: Hewlett Packard Co
Current assignee: HP Inc
Priority date: 2001-03-07
Filing date: 2001-12-07
Publication date: 2002-10-09
Anticipated expiration: 2021-12-07
Also published as: JP2008213141A; US6583524B2; CN1199154C; HK1048881B; HK1048881A1; JP2002331499A; US20020125789A1; EP1239580A3; JP4173968B2; EP1239580A2

Abstract

A micro-mover system includes an information storage unit having multiple pairs of parallel plates closely spaced from each other to enable the exchange of information. A micro electromechanical system (MEMS) motor is associated with each pair of plates to move one of each pair of parallel plates in a plane parallel to the other plate in each pair to facilitate the exchange of information between each pair of plates. One pair of parallel plates is oriented to move in a direction opposite to another pair of parallel plates. Control circuitry is associated with each MEMS motors to coordinate the plate pair movements associated with that motor, so that the motion of one plate in one set of parallel plates occurs at the same time and in a direction opposite to the movement of the one plate of another set of parallel plates, thereby canceling a substantial level of total momentum arising from movement within the micro-mover system.A method of storing information in a memory storage system utilizes a plurality of pairs of plates, where each pair of plates is associated with a micro-mover for moving at least one plate relative to the other plate in each pair of plates.

Description

Micro driving unit with dynamic perfromance of balance

Technical field

The invention belongs to the field of the micro driving unit (mover) that is used for information stores.More specifically say, the present invention relates to be provided for the micro driving unit of parallel flat formula information storing device, wherein the motion of micro driving unit array is coordinated mutually with the balance dynamic perfromance.

Background technology

Use the memory device (wherein on another piece plate, having recording medium) of parallel flat to need micro driving unit to drive flat board usually and do plane motion respect to one another having the read-write sensor on the one flat plate.Dull and stereotyped aggregate motion in X and Y direction has improved to recording medium transmission data and has transferred out the message transmission rate of data from recording medium.MEMS (micro electro mechanical system) (MEMS) motor is used to make flat board to move relative to each other.A kind of like this MEMS motor is shown in the United States Patent (USP) 5 of authorizing people such as Hoen on November 16th, 1999,986, in No. 381, the array that is driven electrode that the array of one of them drive electrode is installed in a coupling on the surface of a member then is installed on the apparent surface of second member.At voltage mode on the drive electrode and that be driven on the electrode these members are moved relative to each other.The interval of electrode, quantity, pitch and Control of Voltage the motion of a member with respect to another member.

In order to realize the desired high information density of current information storage system and high-speed, very high precision and speed need be arranged in treadmill exercise and in the range of movement of the orthogonal directions of all three X, Y and Z, strict control is arranged.An example of little propulsion electric machine of the high speed and precision control that is used for information storage system like this is to authorize explanation in people's such as Hesterman No. 5,834,864, the United States Patent (USP) on November 10th, 1998.This system has at least one pair of silicon flat board, wherein on plate read-write elements is arranged and a plurality of information stores zone is arranged on another piece.Plate or comprise an etched silicon spring structure so that control scope and the elasticity of this plate on the two boards simultaneously in directions X or the motion of Y direction.Another embodiment uses along the spring on an independent plate and controls moving of X and Y direction simultaneously.

Normally the multiple microfabrication of process forms micro driving unit on one chip, and it is oriented to orthogonal modes.Typically, the independent drive controlling of the micro driving unit of each on chip group utilization and can moving simultaneously.Those flat boards shown in for example in people such as Hesteman can carry out random search or can be in one direction with for example 1000 hertz resonance frequency or vibrate near resonance frequency.Typical plate can have nearly 10,000 sensors of 100 * 100 arrays.Data transmit with parallel byte, can have 300-400 piece flat board to move simultaneously under acceleration reaches the situation of 50 G.35 milligrams the moving-mass because every flat board can be had an appointment, the storage unit that MEMS drives can produce sizable vibration when work.These mechanical stresses can cause the too early wearing and tearing of MEMS motor and cause the possible inaccuracy of data transmission.

Problem uneven and vibration is typically being worked in a vacuum so that make in the application of reducing to minimum from the interference of spuious particle more serious.Owing to lack the damping of atmosphere, increased the possibility of a plurality of vibrations that micro driving unit brought of working simultaneously.The intensity institute that the exquisiteness of work and the structure under the atom definition rank can be vibrated is influence significantly, and this intensity will be can not become problem under the scale of not too little, typeization.Therefore, need to coordinate and action when controlling these information stores parts, thereby the mobile equilibrium of MEMS micro driving unit is provided.

Summary of the invention

The present invention provides coordination to the information storage system that MEMS drives for a plurality of micro driving units, so that it has mobile equilibrium when relative direction moves.The micro driving unit of even number is moved relative to each other, with the inertia imbalance in the bucking-out system.Alternatively, if different flat boards has different moving masses, then the motion of micro driving unit is carried out coordination, so that equal momentum is provided on the relative direction of motion material.

Because dull and stereotyped and micro driving unit generally all will move at X and Y direction, dull and stereotyped relative motion must all will be coordinated at X and Y direction.Information in the time of by byte transmits can utilize two quadrants to produce, and this can use 4 flat boards to each quadrant.Therefore, a preferred embodiment of the present invention is used the group of a plurality of 4 flat boards, and they are driven so that move by relative direction jointly by corresponding micro driving unit.For fear of undesirable moment, plate of the first dull and stereotyped centering of coordinating is installed on first common axis with a plate of the dull and stereotyped centering of second coordination.Another piece plate of the first dull and stereotyped centering then is installed on second common axis with a plate of the 3rd dull and stereotyped centering of coordinating.Each plate of in the array other is all installed similarly, reduces to minimum so that make by moving the dull and stereotyped caused system vibration of momentum.In order to adapt to the motion of each dull and stereotyped relative direction, logical circuit is revised so that adapt to relative motion and data are seemed to data stream be continuous.

Comprise first information storage unit according to micro driving unit optimum system choosing of the present invention ground, it has first pair of parallel flat of close proximity each other, and they are arranged relative to each other and make message exchange become possibility.First MEMS (micro electro mechanical system) (MEMS) motor is associated with first information storage unit, so that at least one block of plate in first pair of parallel-plate moved in being parallel to first pair first plane of another piece plate, thereby is convenient to the message exchange between first pair of flat board.

Second information memory cell has second pair of parallel flat of close proximity each other, and they are arranged relative to each other and make message exchange become possibility.The second pair of parallel flat can cause rightabout reverse movement with respect to the orientation of first pair of parallel flat.The 2nd MEMS motor is associated with second storage unit, so that make at least one block of plate in the parallel-plate in the relative direction a direction and in second plane of another piece flat board that is parallel to second pair of flat board, move, thereby convenient message exchange between second pair of flat board.

Operation circuit is associated so that coordinate the motion of first and second pairs of flat boards with the first and second MEMS motors, thereby make the direction of a plate in the relative direction in second group of parallel-plate move with first group of parallel-plate in moving of a plate take place at one time but direction is opposite so that offset the total momentum that in the micro driving unit system, causes with tangible degree thus because of motion.

In another embodiment of the present invention, first group of selected each dull and stereotyped centering comprises first flat board that moves up along the first party of aiming at the second dull and stereotyped common common axis in selected dull and stereotyped right second group.This is second dull and stereotyped opposite with the moving direction of first flat board, thus relative the moving on a common axis of first and second flat boards aim at, thereby prevented torsion.

Another preferred embodiment of the present invention is included in has many methods to canned data in the accumulator system of flat board.Each all is associated with a micro-thruster to flat board so that at least one flat board moves with respect to another flat board in every pair of flat board.First flat board in first pair of flat board moves by first direction with first momentum.Second flat board in second pair of flat board moves with second momentum that equals first momentum in the opposite direction and substantially with first party.The motion of first and second flat boards is arranged to offset substantially first and second momentum.

Be included in according to the preferred embodiment of another kind of canned data of the present invention and lay a plurality of flat boards in the rectangular array that has 4 pairs of flat boards at least.The top board of first pair of flat board is aimed at first public axis with second block of plate of second pair of plate.The base plate of first pair of plate is aimed at second public axis with the 3rd flat board of the 3rd pair of plate.The mode that each plate is like this aimed at common axis provides momentum compensation and has avoided causing unwanted torsion simultaneously, thereby the vibration in the storage system is reduced to minimum.

Other aspects and advantages of the present invention will become clear from following detailed description, this description taken in conjunction is attached will illustrate principle of the present invention with the mode of giving an example.

Description of drawings

Fig. 1 is each the dull and stereotyped prior art decomposition diagram that shows a preferred embodiment of the invention;

Fig. 2 is the prior art planimetric map that shows according to another piece flat board of second preferred embodiment of the invention;

Fig. 3 is the schematic diagram of explanation each pair plate to moving according to relative direction;

Fig. 4 shows a preferred schematic diagram that moves that moves by relative direction according to the coordinated one-tenth of the array of 4 blocks of plates of the present invention;

Fig. 5 shows another schematic diagram that preferably moves that moves by relative direction according to the coordinated one-tenth of the array of 4 blocks of plates of the present invention; And

Fig. 6 is show 16 pairs of flat plate arrays moving according to the X-Y of having of the present invention preferred

The top plan view of embodiment.

Embodiment

At first with reference to figure 1, provide the skeleton view of the prior art of pair of

plates

10 and 11 here, it is orthogonal that these two flat boards are in the plane relation and their mobile axis that separate each other.Every block of plate comprises

auxiliary silicon spring

14 and 15, and they remain on suspension status with moving link 12 and 13.Each moving link has a surface, can place a recording medium or read/write device on it.

Magnetic driven

device

16 and 17 lays respectively at the above and below of moving

link

12 and 13 so that at a direction mobile member 12, and shown is the Y direction of choosing wantonly, and with the direction drive member 13 of second quadrature, shown is directions X.

Fig. 2 represents an alternate embodiment, and one flat plate 20 wherein is provided, and it has movably plate 22, be designed to can be simultaneously by

silicon spring

24 and 25 and move by X and Y direction, each is mounted to a direction that can respond in the moving direction in two springs.An intermediate plate 26 is connected to spring 24 so that move by directions X, and the inner flat board 22 that moves then is connected to spring 25 so that move by the Y direction.

Fig. 3 shows two pairs of

flat boards

30 and 32, and it has illustrated general conception of the present invention.Dull and stereotyped 30 and 32 aim at and are designed to along public X-axis line and move with relative direction mutually.Dull and stereotyped 30a is designed to move dull and stereotyped 30b by the X-axis line and then is configured to move along the Y-axis line.Dull and stereotyped 32a is moved with the direction opposite with dull and stereotyped 30a moving direction along the X-axis line by standard.Equally, dull and stereotyped 32b is designed to move with the direction opposite with dull and stereotyped 30b moving direction along the Y-axis line.Dull and stereotyped 30 displacement and time are preferably corresponding to dull and stereotyped 32 displacement and time.Dull and stereotyped 30 and 32 can design according to the structure shown in Fig. 1 or 2, perhaps adopt other structure that is suitable for realizing required motion.

Flat board shown in Figure 3 provides some compensation to the relative motion for plate.This arrangement can ideally be worked for the compensation that moves up in east-west along the X-axis line.But because dull and stereotyped the aligning on the Y-axis line, the power of opposite Y direction can be set up moment or revolving force along Z axle (perpendicular to the plane of paper).Equally, at the flat board of aiming on the Y-axis line but on the X-axis line, being provided with aligning to setting up undesirable moment because of the power of opposite directions X.Dull and stereotyped right structure shown in Figure 3 preferably provides some compensation that tackles torsion or compliance to disregard so that torsion can be left in the basket.

Therefore, although as described above two pairs of plates are made up can reduce vibration to a great extent, preferably eliminate torsion with one group of at least 4 pairs of plate.Fig. 4 represents the logic schematic diagram of the preferred embodiment of one group of 4 pairs of flat board aiming at by the above according to use of the present invention.Every block of corresponding plate in the array 40 of 4 couples of dull and stereotyped 41-44 has relative motion.Every block of plate is represented east, west, Nan Hebei at certain any mobile available compass representation E, W, N, S at that time.Indicated direction is arbitrarily, just is used to represent the purpose of relative motion.

As shown in the figure, every block of plate has the corresponding plate that moves by reverse direction on same axis.Therefore, plate 41 and 42 is aimed on the first X-axis line 45, and flat board is aimed on the second X-axis line 48 43 and 44.Equally, flat board is aimed on the first Y-axis line 46 41 and 44, and flat board is then aimed on the second Y-axis line 47 42 and 43.Preferably each dull and stereotyped right relative motion is to realize with same speed (aggregate momentum) in the same time period and in the same distance at synchronization under same quality, thereby thereby makes that might offset momentum fully makes because of the caused vibration of moving respectively of every block of plate and reach minimum.

Specifically, plate 41a westwards moves, and its aggregate momentum is identical when moving with the relative direction (eastwards) of plate 41a direction with plate 42a.Therefore, because plate 41a and 42a aim at along X-axis line 45, the overall movement of plate 41a and 42a has been offset aggregate momentum to each other and has been eliminated vibration on X-axis line 45.Under similar mode, plate 41b is offset by the aggregate momentum south of plate 44b in aggregate momentum in a northerly direction, because this two boards is aimed on Y-axis line 46.

Equally, the aggregate momentum of being exposed to the north of plate 42b is offset towards the aggregate momentum in south by plate 43b along the second Y-axis line 47.Under the same manner, plate 43a aggregate momentum is eastwards offset by the aggregate momentum that plate 44a is exposed to the west along the second X-axis line 48.

Fig. 5 represents the another kind of similar scheme that is used for the balance dynamic perfromance according to of the present invention.Array 50 shows 4 couples of dull and stereotyped 51-54, and their every corresponding flat boards have opposite motion.Each flat board to other two flat boards to aiming at public X and Y-axis line.Each flat board to respect to each contiguous flat board to corresponding motion and relative motion are arranged.

Specifically, dull and stereotyped 51a and 51b westwards and are northwards moved respectively and dull and stereotyped 52a and 52b are moved out the present same time respectively eastwards and southwards and same momentum is arranged.Dull and stereotyped 53a and 53b westwards and are northwards moved respectively, with flat board to 54a and 54b respectively eastwards and to the south moving have identical aggregate momentum.

Therefore, the aggregate momentum of dull and stereotyped 51a and 52a cancels each other out, because they are aimed on the first X-axis line 5.Equally, the aggregate momentum of dull and stereotyped 53a and 54a cancels each other out, because they are aimed on the second X-axis line 58.Under same way as, the aggregate momentum of

plate

51b and 54b cancels each other out along the first Y-axis line 56, and the aggregate momentum of

plate

52b and 53b cancels each other out along the second Y-axis line 57.

According to circumstances also can realize dull and stereotyped other right similar grouping.For example, can have locomitivity on X and the Y-axis simultaneously, as shown in Figure 2, and also have the motion on X and the Y-axis or can be static at another piece plate of this centering at a certain flat board of a centering.In such arrangement, dull and stereotyped right motion will need by design so that contiguous each the dull and stereotyped right motion of compensation, and this depends on the scope and the ability of their motions.

Should be appreciated that must be suitable for adapting to the motion of the different directions of each plate for realizing above-mentioned each dull and stereotyped right required circuit of motion, these directions may be different from the motion of the plate of standard.This modification can the technician of general knowledge finishes in the present technique by having, and may be simply to just with the lead reversal connection so that dull and stereotypedly move by reverse direction.Therefore, this line design be within the scope of conventional line and need not do further to disclose at this.

With reference now to Fig. 6,, represented to take advantage of the top view of 4 arrays 70 here according to 4 of 16 flat boards of another preferred embodiment of the present invention.Every block of plate 72 comprises a movable part 73, it or r/w cell, transmitter array for example, or read the unit, for example array in information stores zone.Every block of plate 72 is being equipped micro driving unit so that move dull and stereotyped 72 movable part 73 at X and Y both direction.Along the moving of X-axis line, and the deflection 76 of Y-axis line is corresponding to part 73 moving along the Y-axis line corresponding to part 73 in the deflection 74 of X-axis line.The power supply wiring sheet that is used for the input and output circuit of XY driving extends around array 70.

Preferably include the one flat plate below plate 72 at least at the array shown in Fig. 6 70, it and dull and stereotyped 72 pairings are to be used as r/w cell or to read the unit, and this depends on the function of plate 72.Because it is plate 72 is all removable at X and Y both direction, therefore preferably static at another piece plate of each dull and stereotyped centering.Should be appreciated that, can settle the flat layer of quite a lot of quantity below every flat board 72, every block of plate and a flat board are to being associated and bringing into play their effect according to the present invention described above.

Other embodiments of the invention for person skilled in the art person by considering this instructions or will being tangible to the disclosed practice of the present invention of moving.Being intended that here, instructions and example are only thought to demonstrate.Real scope and spirit of the present invention will be stipulated in the claim below.

Claims

1. micro driving unit system comprises:

A plurality of flat boards are to the array of (41,42,43,44), each flat board is to having data storage medium (12,13) so that canned data, and they are parallel to each other and very near interval is arranged each other, and at least one block of plate of each centering (for example 41a) can move with respect to another piece plate;

A micro driving unit (16,17) is used for moving at least one block of every pair of flat board (41) movably plate (41a), and moving direction is parallel to said another piece plate (41b) to (41) to make things convenient for message exchange; With

The control actuator that is associated with said micro driving unit (16,17), be used for being controlled at the motion of the flat board (for example 41a) of every pair of flat board (41), thereby the removable flat board (for example 41a, 44a) that makes first quantity is collectively pressed first direction (W) and is moved, and the removable flat board of second quantity (42a, 43a) collectively moved by the second direction (E) opposite with the first direction (W) of the removable flat board (41a, 44a) of first quantity in mobile same time of the mobile flat board (41a, 44a) of first quantity.

2. the described micro driving unit of claim 1 system, control actuator wherein comprises the control of determining distance, the mobile flat board (41a, 44a) that it makes first quantity moves same distance with the mobile flat board (42a, 43a) of second quantity.

3. the described micro driving unit of claim 1 system, control actuator wherein comprises the control of the time of determining, the mobile flat board (41a, 44a) that it makes first quantity moves at one time with the mobile flat board (42a, 43a) of second quantity.

4. the described micro driving unit of claim 1 system, wherein first and second quantity respectively comprise half of removable flat board.

5. the described micro driving unit of claim 1 system, array wherein comprises at least 4 pairs of information stores flat boards (41,42,43,44) rectangular array, dull and stereotyped to being installed in this wise, so that in the adjacent panels of each side of rectangular array to (for example 41,42) be to aim at along public axis (45), each flat board is to (for example 41,42) the mobile direction (N) of first flat board (41b) in is with contiguous identical to the moving direction (N) of first flat board (42b) in (42), and the moving direction (W) of its second flat board (41a) is with contiguous opposite to the moving direction (E) of second flat board (42b) in (42).

Have a plurality of flat boards to the accumulator system of (41,42,43,44) in the method for canned data, each flat board is to being associated with a micro driving unit (16,17), so that one flat plate moves another piece in the flat board is dull and stereotyped with respect to each at least, may further comprise the steps:

(a) first flat board is moved at least with first momentum by first direction (W) to the first flat board in (41) (for example 41a);

(b) second flat board is moved at least with second momentum that equals first momentum substantially by the direction (E) opposite with first direction (W) to the second flat board in (42) (for example 42a); And

(c) arrange the motion of first and second flat boards (41a, 42a) to make it offset first and second momentum approx.

7. the method for the described canned data of claim 6, wherein first flat board (41a) and second flat board (42a) moved along common axis 45 by the approximately uniform time period.

8. the method for the described canned data of claim 6, wherein first flat board (41a) and second flat board (42a) mobile apart from approximately equal.

9. the method for the described canned data of claim 6, wherein the polylith flat board comprises the array of at least 4 pairs of flat boards (41,42,43,44) that are placed in the rectangular array, and the flat board on the top of first pair of flat board (41) (for example 41a) is aimed on first common axis 45 with second flat board (42a) of second pair of flat board (42).

10. the method for the described canned data of claim 9, wherein first flat board is aimed on second common axis 46 with the 3rd flat board (44b) of the 3rd pair of flat board (44) the base platform (for example 41b) of (41).