CN100467902C - Air spring vibro-damping mount with magnetic suspension unit - Google Patents

Air spring vibro-damping mount with magnetic suspension unit Download PDF

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Publication number
CN100467902C
CN100467902C CNB2006101508083A CN200610150808A CN100467902C CN 100467902 C CN100467902 C CN 100467902C CN B2006101508083 A CNB2006101508083 A CN B2006101508083A CN 200610150808 A CN200610150808 A CN 200610150808A CN 100467902 C CN100467902 C CN 100467902C
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China
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magnetic suspension
suspension unit
air spring
pneumatic spring
air
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CN101067432A (en
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谭久彬
刘彦
王雷
姚绍明
杨文国
鲁云峰
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Harbin Institute of Technology
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Harbin Institute of Technology
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Abstract

The air spring vibrating isolation base with the magnetic suspension unit includes the: the basal body, a group of air spring, the air feed system, the high controlling system, many magnetic suspension units, the low stiffness righting device. The input of the air feed system and the high controlling system are connected with each other. The output of the high controlling system is connected with every air spring; the magnetic suspension unit is connected to the air feed system. The magnetic suspension and the air spring are connected under the basal body in series to support it; the side of the basal body is installed with the low rigidity righting device. The invention can be proper for the super high air spring isolation base in the condition of not changing the bearing ability of the vibration separation system.

Description

The air spring vibrating insulative basement that has magnetic suspension unit
Technical field
The invention belongs to the superlow frequency vibration isolating field, especially a kind of air spring vibrating insulative basement.
Background technique
Advantages such as air spring vibrating insulative basement is effective owing to its low frequency vibration isolation, insensitive to load variations, long service life are widely used in vibrating the isolation field.Along with improving constantly of ultraprecise processing and measurement, micro-nano technology and vlsi circuit accuracy of manufacturing level, to the ultralow frequency demands for higher performance of vibration isolation.Yet present air spring vibrating insulative basement causes horizontal stroke because of pneumatic spring horizontal stroke, longitudinal rigidity intercouple, vertically the superlow frequency vibration isolating performance can't be taken into account, and this has limited its further application in the superlow frequency vibration isolating field to a great extent.
Patent US5779010 " Suspended low-frequency horizontal pendulum isolatorfor vibration isolation systems " propose pneumatic spring and single pendulum mechanisms in series with the support stage body.Since the lateral stiffness of single pendulum mechanism much smaller than the pneumatic spring lateral stiffness and longitudinal rigidity much larger than the longitudinal rigidity of pneumatic spring, both connect the equivalent lateral stiffness in back near single pendulum mechanism lateral stiffness, the equivalence longitudinal rigidity is near the pneumatic spring longitudinal rigidity, thereby the lateral stiffness of vibrating isolation system depends on the lateral stiffness of single pendulum, the longitudinal rigidity that longitudinal rigidity depends on pneumatic spring.It can solve the horizontal vibration isolation of vibrating isolation system that brings because of the coupling of pneumatic spring horizontal stroke, longitudinal rigidity and the vertical problem that can not take into account of vibration isolation.But the horizontal vibration isolation ability of single pendulum mechanism depends on the brachium of single pendulum to a great extent, the long more vibration isolating effect of brachium is good more, desire obtains ultralow isolation frequency and will cause system's vibrating isolation system to have huge size, this also is its a very big weakness, its bearing capacity is not high in addition, is unsuitable for carrying the super sized type vibration insulating foundation.
The flexibility of pressure bladder of utilizing patent CN1487216A " vibration isolator of falling the pendulum type pneumatic " realizes and the vertical vibration isolation on ground, relies on the horizontal hunting of pendulum to realize horizontal vibration isolation.It also can solve the horizontal vibration isolation of vibrating isolation system that brings because of the coupling of pneumatic spring horizontal stroke, longitudinal rigidity and the vertical problem that can not take into account of vibration isolation.But all will be applied on the interior ball of base because it all are carried, thereby its bearing capacity is not high, is unsuitable for carrying the super sized type vibration insulating foundation.
The lot of domestic and international scholar proposes to adopt the ACTIVE CONTROL method to realize superlow frequency vibration isolating (1.K.G.AHN in addition, et al.A Hybrid-type Active Vibration Isolation System Using Neural Networks.Journal of Sound and Vibration.1996,192 (4), 793-805.; 2.Yoshiya Nakamura, etal.Development of Active 6-DOF Microvibration Control System Using GiantMagnetostrictive Actuator.SPIE 1999,229-240), its principle is to adopt initiatively actuator and pneumatic spring parallel connection, select the motion of suitable active control strategies control actuator for use, reach the purpose of vibration damping.The shortcoming of this method is the control principle complexity, realizes difficulty, may causes system's instability.
" a kind of air spring vibrating insulative basement that has gas-film lubrication unit " that is proposed by the inventor has good superlow frequency vibration isolating performance and good bearing capacity before this, but because the restriction of the bearing capacity of gas-film lubrication unit, make it only be suitable for the less relatively medium and small or large-scale vibration insulating foundation of quality, and can't satisfy the super sized type vibration insulating foundation demands for bearing capacity.
Summary of the invention
The present invention proposes a kind of air spring vibrating insulative basement that has magnetic suspension unit, to satisfy the super sized type vibration insulating foundation to demands for bearing capacity, can be under the condition that does not change the vibrating isolation system bearing capacity, increase substantially the horizontal stroke of vibration insulating foundation, vertical superlow frequency vibration isolating performance, can effectively solve existing air spring vibrating insulative basement horizontal stroke, the vertical problem that can not take into account of vibration isolation.
Technical solution of the present invention is:
The air spring vibrating insulative basement that has magnetic suspension unit, its composition comprises: matrix 5, one group of pneumatic spring 4, air supply system 1, height control system 2, a plurality of magnetic suspension units 3, low rigidity righting device 6, described air supply system 1 links to each other with described height control system 2 input ends, described height control system 2 output terminals link to each other respectively with each described pneumatic spring 4, described magnetic suspension unit 3 and described pneumatic spring 4 are installed in series under described matrix 5, connected with described magnetic suspension unit 3 by described pneumatic spring 4 and to support described matrix 5, described low rigidity righting device 6 is installed in described matrix 5 sides.
Described a kind of air spring vibrating insulative basement that has magnetic suspension unit, described magnetic suspension unit 3 place on the pneumatic spring 4 or under.
Described a kind of air spring vibrating insulative basement that has magnetic suspension unit, described low rigidity righting device 6 are flexible air-bag or metal coil spring or nonmetal rubber.
Described a kind of air spring vibrating insulative basement that has magnetic suspension unit, described magnetic suspension unit 3 is made up of a pair of electromagnet 7 or permanent magnet 8, and two electromagnet 7 or permanent magnet 8 arrangements are serial fashions, and opposing side is a same polarity.
The present invention has following characteristics and good result:
The present invention adopts novel series connection vibration insulation structure, utilize magnetic suspension unit lateral bearing ability to level off to zero and the longitudinal load-bearing ability is higher than the characteristic of pneumatic spring, not only make the lateral stiffness of vibration insulating foundation be reduced to the rigidity of the low rigidity righting device of its side, and make longitudinal rigidity become magnetic suspension unit and pneumatic spring series connection equivalent stiffness.
Control principle of the present invention belongs to open loop control, compares the ACTIVE CONTROL system and has saved detection link and feedback element, has not only saved cost but also do not have stability problem.
The present invention becomes as a whole with magnetic suspension unit with the separate device organic combination of pneumatic spring script, and its function is merged mutually with structure.Utilize magnetic suspension unit lateral bearing ability to level off to zero and the longitudinal load-bearing ability is higher than the characteristic of pneumatic spring, not only make the lateral stiffness of vibration insulating foundation be reduced to the rigidity of the low rigidity righting device of its side, and make longitudinal rigidity reach magnetic suspension unit and pneumatic spring series connection equivalent stiffness, the horizontal stroke of vibration insulating foundation, vertical superlow frequency vibration isolating be can realize simultaneously, existing air spring vibrating insulative basement horizontal stroke, the vertical anti-vibration performance problem that influences each other, can't take into account solved.By magnetic suspension unit reasonable in design and the suitable low rigidity righting device of selection, can make the vertical natural frequency of vibration insulating foundation reduce to below the 0.7Hz, laterally natural frequency is reduced to 0.2Hz~0.5Hz.This is one of innovative point that is different from prior art;
The cascaded structure support substrate that the present invention adopts magnetic suspension unit and pneumatic spring to form, utilize the longitudinal load-bearing ability of magnetic suspension unit to be higher than the characteristic of the longitudinal load-bearing ability of pneumatic spring, can guarantee effectively that vibration insulating foundation has very strong bearing capacity, overcome existing single pendulum or fallen the shortcoming of pendulum and pneumatic spring cascaded structure bearing capacity difference, satisfied large-scale and super sized type vibration insulating foundation when carrying out superlow frequency vibration isolating to the specific (special) requirements of bearing capacity, be more suitable for being used for quality and all very big super sized type vibration insulating foundation of volume.This be different from prior art innovative point two.
Present design adopts foolproof structure, only in conventional air spring vibration isolation basis, add magnetic suspension unit and low rigidity righting device, can solve present air spring vibrating insulative basement horizontal stroke, the vertical problem that can not take into account of vibration isolation, improve the two-way superlow frequency vibration isolating performance of vibration insulating foundation.The contrast active control technology, the present invention can save and detect link and feedback element, not only saved cost but also do not had stability problem, and simple in structure, be easy to realize.
Description of drawings
Accompanying drawing 1 is a kind of air spring vibrating insulative basement structural representation that has magnetic suspension unit of the present invention;
Accompanying drawing 2 is height control system principle schematic of the present invention;
Accompanying drawing 3 is magnetic suspension unit and pneumatic spring tandem arrangement mode schematic representation among the present invention, and wherein magnetic suspension unit is positioned on the pneumatic spring;
Accompanying drawing 4 is magnetic suspension unit and pneumatic spring tandem arrangement mode schematic representation among the present invention, and wherein pneumatic spring is positioned on the magnetic suspension unit;
Accompanying drawing 5 is magnetic suspension unit structural representations of the present invention; Be composed in series by two electromagnet, opposing side is a same polarity;
Accompanying drawing 6 is magnetic suspension unit structural representations of the present invention; Be composed in series by two permanent magnets, opposing side is a same polarity;
Accompanying drawing 7 is magnetic suspension unit structural representations of the present invention; Be composed in series by an electromagnet and a permanent magnet, opposing side is a same polarity;
Among the figure, 1 air-channel system, 2 height control systems, 3 magnetic suspension units, 4 pneumatic springs, 5 matrixes, 6 low rigidity centralizing systems, 7 electromagnet, 8 permanent magnets, 9 height controllers, 10 displacement transducers, 11 three-position electromagnetic valves.
Embodiment
The system architecture of a kind of air spring vibrating insulative basement that has a magnetic suspension unit of the present invention and working principle reach accompanying drawing in conjunction with the embodiments and are described in detail as follows:
A kind of air spring vibrating insulative basement one embodiment who has magnetic suspension unit of the present invention, structure as shown in Figure 1, comprise: matrix 5, a plurality of pneumatic spring 4, a plurality of magnetic suspension unit 3, the series arrangement support substrate 5 that magnetic suspension unit 3 and pneumatic spring 4 are formed, matrix 5 side arrangement are hanged down rigidity righting device 6.
Because magnetic suspension unit 3 lateral bearing abilities level off to zero, thereby its equivalent lateral stiffness of connecting with pneumatic spring 4 is zero, and equivalent longitudinal rigidity is,
k = k 1 × k 2 k 1 + k 2 ≤ k 1
Wherein k is equivalent longitudinal rigidity, k 1Be pneumatic spring 4 longitudinal rigidities, k 2Be magnetic suspension unit 3 longitudinal rigidities.So cascaded structure support substrate 5 of magnetic suspension unit 3 and pneumatic spring 4 compositions, can make the vibration insulating foundation lateral stiffness level off to zero and longitudinal rigidity also has decline to a certain degree, in order to guarantee the vibration insulating foundation lateral stability, at the low rigidity righting device 6 of matrix 5 side arrangement.By magnetic suspension unit reasonable in design 3 and the suitable low rigidity righting device 6 of selection, can significantly improve the horizontal stroke of vibration insulating foundation, vertical superlow frequency vibration isolating performance simultaneously.
Height control system 2 effects are to regulate the lengthwise position of matrix 5 to overcome the influence that load variations causes the vibration insulating foundation performance.Application at present height control mode more widely is a feedback control, as shown in Figure 2.It comprises: height controller 9, displacement transducer 10 and three-position electromagnetic valve 11.Height controller 9 makes gas circuit realize inflation (air supply system 1 links to each other with pneumatic spring 4 with three-position electromagnetic valve 11 via height controller 9), maintenance, three kinds of states of exhaust (pneumatic spring 4 links to each other with atmosphere via three-position electromagnetic valve 11) according to the altitude signal control three-position electromagnetic valve 11 that is installed in displacement transducer 10 feedbacks on the matrix 5.
Fig. 3 and Fig. 4 have exemplified the tandem arrangement mode of two kinds of magnetic suspension units 3 and pneumatic spring 4, and magnetic suspension unit 3 both can be installed between matrix 5 and the pneumatic spring 4, also can be installed between pneumatic spring 4 and the ground.Whole system compact structure easy for installation.
Fig. 5, Fig. 6 and Fig. 7 have illustrated three kinds of implementations of magnetic suspension unit.Magnetic suspension unit among Fig. 6 is made up of two electromagnet, and these two electromagnet tandem arrangement and same polarity are relative; Magnetic suspension unit among Fig. 7 is made up of two permanent magnets, and these two permanent magnet tandem arrangement and same polarity are relative; Magnetic suspension unit among Fig. 8 is made up of an electromagnet and a permanent magnet, and these two magnet tandem arrangement and same polarity are relative.
The bearing capacity of the magnetic suspension unit among the present invention is to rely on the repulsion between two magnet to provide.For electromagnet, the size of repulsion depends on that the water cross section of the Number of ampere turns of coil, iron core is long-pending, the air gap height between the magnet etc.; For permanent magnet, the size of repulsion depends on the length of the material of permanent magnet, the direction of magnetization, the area of magnet, the air gap height between magnet etc.And the extensive use of magnet in magnetic suspension train also illustrated that from theoretical and angle of practical application its bearing capacity will be higher than the bearing capacity of pneumatic spring.So adopt pneumatic spring and magnetic suspension unit series connection support substrate, can guarantee that vibrating isolation system has strong bearing capacity, thereby overcome existing single pendulum or fall the shortcoming of pendulum and pneumatic spring cascaded structure bearing capacity difference, satisfied the super sized type vibration insulating foundation when carrying out superlow frequency vibration isolating to demands for bearing capacity.Air spring vibrating insulative basement contrast active control technology of the present invention in addition can save and detect link and feedback element, has not only saved cost but also do not have stability problem.
Below in conjunction with the accompanying drawings the specific embodiment of the present invention is illustrated; but these explanations can not be understood that to have limited scope of the present invention; protection scope of the present invention is limited by the claims of enclosing, and any change of carrying out on claims of the present invention basis all is protection scope of the present invention.

Claims (5)

1. air spring vibrating insulative basement that has magnetic suspension unit, its composition comprises: matrix (5), one group of pneumatic spring (4), air supply system (1), height control system (2), a plurality of magnetic suspension units (3), low rigidity righting device (6), it is characterized in that: described air supply system (1) links to each other with described height control system (2) input end, described height control system (2) output terminal links to each other respectively with each described pneumatic spring (4), described magnetic suspension unit (3) and described pneumatic spring (4) are installed in series under described matrix (5), connected with described magnetic suspension unit (3) by described pneumatic spring (4) and to support described matrix (5), described low rigidity righting device (6) is installed in described matrix (5) side.
2. a kind of air spring vibrating insulative basement that has magnetic suspension unit according to claim 1 is characterized in that: described magnetic suspension unit (3) place on the pneumatic spring (4) or under.
3. a kind of air spring vibrating insulative basement that has magnetic suspension unit according to claim 1 and 2 is characterized in that: described low rigidity righting device (6) is flexible air-bag or metal coil spring or nonmetal rubber.
4. a kind of air spring vibrating insulative basement that has magnetic suspension unit according to claim 1 and 2, it is characterized in that: described magnetic suspension unit (3) is made up of a pair of electromagnet (7) or permanent magnet (8), two electromagnet (7) or permanent magnet (8) arrangement are serial fashions, and opposing side is a same polarity.
5. a kind of air spring vibrating insulative basement that has magnetic suspension unit according to claim 3, it is characterized in that: described magnetic suspension unit (3) is made up of a pair of electromagnet (7) or permanent magnet (8), two electromagnet (7) or permanent magnet (8) arrangement are serial fashions, and opposing side is a same polarity.
CNB2006101508083A 2006-09-26 2006-09-26 Air spring vibro-damping mount with magnetic suspension unit Expired - Fee Related CN100467902C (en)

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