CN112857639B - Servo incremental high-precision pressure sensor and using method thereof - Google Patents
Servo incremental high-precision pressure sensor and using method thereof Download PDFInfo
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- CN112857639B CN112857639B CN202110187585.2A CN202110187585A CN112857639B CN 112857639 B CN112857639 B CN 112857639B CN 202110187585 A CN202110187585 A CN 202110187585A CN 112857639 B CN112857639 B CN 112857639B
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L1/00—Measuring force or stress, in general
- G01L1/26—Auxiliary measures taken, or devices used, in connection with the measurement of force, e.g. for preventing influence of transverse components of force, for preventing overload
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
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Abstract
The invention discloses a servo incremental high-precision pressure sensor and a using method thereof, and belongs to the technical field of pressure sensors. The servo incremental high-precision pressure sensor comprises a loading table, pressure sensors, an air bag, a micro-displacement driver, a micro-displacement sensor and a base, wherein the lower side of the air bag is installed on the upper surface of the base, the upper side of the air bag supports the loading table, the micro-displacement driver and the micro-displacement sensor are circumferentially arranged on the upper surface of the base by taking the air bag as a center, the pressure sensors are in one-to-one correspondence with the micro-displacement driver, each pressure sensor is supported by the corresponding micro-displacement driver, and the upper side of each pressure sensor supports the loading table. The invention improves the overall measurement precision and realizes the high-precision measurement of the load increment.
Description
Technical Field
The invention relates to a servo incremental high-precision pressure sensor and a using method thereof, belonging to the technical field of pressure sensors.
Background
Pressure sensors are widely used in various industries, the accuracy of the pressure sensors is closely related to the measuring range, the accuracy is usually expressed as a coefficient of a full measuring range, and the high-accuracy sensors can reach about two ten-thousandth of the full measuring range. Therefore, when the equivalent distance is increased, the accuracy is also deteriorated, and how to realize high accuracy under a large load condition becomes a bottleneck problem of the pressure sensor. On the other hand, in many applications such as a centroid test table and a satellite simulator, the magnitude of initial loading is not always concerned, but the relationship is relative to the load variation of the initial loading, namely, the pressure increment.
Disclosure of Invention
The invention aims to provide a servo incremental high-precision pressure sensor and a using method thereof, which are used for solving the problems in the prior art.
A servo incremental high-precision pressure sensor comprises a loading table, pressure sensors, an air bag, a micro-displacement driver, micro-displacement sensors and a base, wherein the lower side of the air bag is mounted on the upper surface of the base, the upper side of the air bag supports the loading table, the micro-displacement driver and the micro-displacement sensors are circumferentially arranged on the upper surface of the base by taking the air bag as a center, the pressure sensors are in one-to-one correspondence with the micro-displacement drivers, each pressure sensor is supported by the corresponding micro-displacement driver, and the upper sides of the pressure sensors support the loading table.
Further, the loading platform and the base are coaxial circular truncated cones.
Further, the air bag is arranged on the axle center of the loading platform and the base.
Further, the air bag is an air bag with adjustable inflation quantity.
Further, the micro displacement driver and the pressure sensor are coaxial.
Furthermore, the micro-displacement driver and the micro-displacement sensor are uniformly provided with N along the circumferential direction of the air bag, wherein N is more than or equal to 3.
Furthermore, the micro displacement driver and the micro displacement sensor are arranged in a staggered mode in the same circle.
Furthermore, the micro displacement driver and the micro displacement sensor are arranged in the same direction and different circles.
Further, the base is provided with a universal fixing interface.
A use method of a servo incremental high-precision pressure sensor is based on the servo incremental high-precision pressure sensor, and comprises the following steps:
first, according to the operating point load F 0 Adjusting the pressure of the air bag to make the reading of the pressure sensor in the measuring range middle position, and recording the reading P of the micro-displacement sensor i0 And reading F of the pressure sensor i0 Subscript i denotes the number of the pressure sensor or the micro-displacement sensor, i =1,2, \8230, and N, N denotes the total number of the pressure sensors or the micro-displacement sensors; subscript 0 indicates an initial value, and then, a load is applied to the load table with the micro-displacement sensor indicated by P i If, if
And/or
Wherein oa and σ represent a preset displacement accuracy parameter and a displacement distribution parameter, μ, respectively ΔP And σ ΔP Respectively representing the mean and variance of the displacement variation of all the micro-displacement sensors when the load is increased,
adjusting the micro-displacement actuator (4) to mu ΔP And σ ΔP Decrease until mu ΔP < oa and sigma ΔP < σ, reading the pressure sensor reading F at this time i Then the load F on the loading platform (1) relative to the working point 0 The increased load was:
let the relative measurement accuracy of the pressure sensor be r 0 And the measuring range is G, and when the rigidity of the air bag at the working point is k, the relative measurement precision of the newly added load is as follows:
the rigidity k of the working point indicates the change of displacement caused by the tiny change of the load at the working point, and the ratio of the load change amount to the displacement change amount; a represents the relative operating point of the design, i.e. the ratio of the operating point load to the total range of the pressure sensor,
by virtue of the fact that a smaller k and oa are chosen, k is oa, and a larger a is chosen, a 1, resulting in
I.e. a higher measurement accuracy is achieved.
The invention has the following advantages: the invention adopts the air bag as a main support to unload the load of the working point, takes the position of the working point as a balance position, monitors the displacement variation after applying the incremental load through the micro-displacement sensor, reduces the variation to a certain range through the micro-displacement driver, reduces the incremental displacement to the incremental driving force applied in the certain range through the measurement of the small-range high-precision pressure sensor connected with the micro-displacement driver in series, and gives the load increment applied on the loading platform by the resultant force of all the pressure sensors. Because the air bag is used as a main support to unload the load of the working point, the pressure sensor only needs to measure the incremental load, and when the incremental load is small relative to the load of the working point, the pressure sensor with a small measuring range can be selected, so that the measurement accuracy of the incremental load is improved. The error brought by the main support is determined by the rigidity of the main support, the measurement precision of the micro-displacement sensor and the driving resolution of the micro-displacement driver, and the error can be ignored in a small way by selecting the high-precision micro-displacement sensor and the high-resolution micro-displacement driver. Therefore, high-precision measurement of incremental load under large load is realized.
Drawings
FIG. 1 is a front view of a servo incremental high precision pressure sensor of the present invention;
FIG. 2 is a side view of FIG. 1;
FIG. 3 is a schematic perspective view of a servo incremental high accuracy pressure sensor of the present invention;
fig. 4 is a flow chart illustrating a method of using the servo incremental high-precision pressure sensor according to the present invention.
Wherein, 1 is a loading platform, 2 is a pressure sensor, 3 is an air bag, 4 is a micro-displacement driver, 5 is a micro-displacement sensor, and 6 is a base.
Detailed Description
The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be obtained by a person skilled in the art without making any creative effort based on the embodiments in the present invention, belong to the protection scope of the present invention.
Referring to fig. 1-3, in order to solve the requirement of high-precision measurement of incremental loads under large load in applications such as a centroid test table, a satellite simulator and the like, the invention designs a servo incremental high-precision pressure sensor, an air bag 3 at the center balances the initial load of a working point, a high-precision micro-displacement sensor 5 measures the displacement variation caused by the incremental load, a high-resolution micro-displacement driver 4 restores a loading table 1 to the position of the working point, a small-range high-precision pressure sensor 2 connected in series with the micro-displacement driver 4 measures the reading increment required to be applied when the loading table is restored to the working point, and the sum of the reading increments of all the pressure sensors 2 provides the load increment relative to the load of the working point. Because the big initial load of operating point is balanced by gasbag 3, the range of pressure sensor 2 only need full increment load's measurement demand just can, can select for use the pressure sensor 2 of less range, when increment load is very little for initial load, can select for use the pressure sensor 2 of less range to show improvement measurement accuracy.
The invention relates to a servo incremental high-precision pressure sensor, which comprises: the device comprises a loading platform 1, a pressure sensor 2, an air bag 3, a micro-displacement driver 4, a micro-displacement sensor 5 and a base 6.
The loading platform 1 is supported on the upper sides of the pressure sensor 2 and the air bag 3, is used for applying load, can design a standard interface or design a special interface according to the applied load, the center of the loaded load should be close to the geometric center of the loading platform 1, the geometric size of the loading platform 1 needs to consider the geometric size of the air bag 3 and the distribution and size of the pressure sensor 2, the micro displacement driver 4 and the micro displacement sensor 5, generally, the projection can envelop the air bag 3, the pressure sensor 2, the micro displacement driver 4 and the micro displacement sensor 5, and the design can also be carried out according to the constraint of the installation space;
the lower side of a pressure sensor 2 is arranged on a micro-displacement driver 4, the upper side supports a loading platform 1, N pressure sensors are distributed along the circumferential direction of an air bag 3, N =3, 4, 8230, N is usually 3 or 4, the circumferential direction is preferably uniform, the measuring range of the pressure sensor 2 is determined according to the size, the loading position and N of the incremental load to be measured, and the maximum incremental load to be measured is delta F max For example, at the same time, the load is applied through a spherical hinge when being applied, namely, the load is not allowed to be eccentric, and the measuring range of the pressure sensor 2 is satisfied
The lower side of the air bag 3 is arranged on a base 6, the upper side supports the loading platform 1,coaxial with the base 6 and the loading platform 1, is used for bearing the load of the working point on the loading platform 1, can be externally connected with an inflating device to inflate the airbag 3, realizes the adjustment of the rigidity of the airbag 3, the bearing capacity of the airbag 3 needs to be selected according to the size of the loading load, the air supply pressure needs to be determined according to the load size and the needed rigidity of the working point, and the load F of the working point is used as the load 0 For example, the load-bearing capacity of the airbag 3 should satisfy F max ≥F 0 +ΔF max Let us assume that the displacement resolution of the micro-displacement actuator 4 is δ P a The maximum allowable error value due to incomplete resetting of the airbag 3 is δ F s The stiffness of the airbag 3 at the operating point should be such that
If the micro-displacement driver 4 adopts a piezoelectric ceramic actuator, the displacement resolution can reach the nanometer level generally, and delta F s =0.001N for example, the stiffness of the airbag 3 at the operating point only needs to be satisfied
Such stiffness requirements are easily met without special design.
The micro-displacement driver 4 is installed on the base 6 at the lower side, the pressure sensor 2 is supported at the upper side, the micro-displacement driver and the pressure sensor 2 are coaxial, N is distributed along the circumferential direction of the air bag 3, N =3, 4, \8230 \ 8230;, the micro-displacement driver is used for driving the loading platform 1 to recover the working point position, N is the same as the number N of the pressure sensors 2, the stroke and the driving capacity of the micro-displacement driver are required to meet the requirement that the deformation of the air bag 3 is recovered to the working point position after incremental load is applied, the precision of the micro-displacement driver is required to be designed according to the measurement precision of the incremental load, the micro-displacement driver 4 is required to be in the stroke middle position when the working point load is applied, the micro-displacement driver is respectively arranged at two extreme positions of the stroke when the maximum incremental load is increased and reduced, the bearing capacity and the displacement of the micro-displacement driver 4 are comprehensively designed in a unidirectional variation relationship, namely, when the load increment is ensured to be the minimum (negative value is ensured, the output of the micro-displacement driver 4 is not zero, and when the bearing capacity is maximum (positive value is maximum), the micro-displacement driver 4 is not more capable of meeting the maximum bearing capacity, so that the micro-displacement driver 4 is not more than the maximum bearing capacity
With N =4, Δ F max Example of =100N, L max More than or equal to 50N. If the micro-displacement driver 4 is a piezoelectric ceramic actuator, the driving capability can reach hundreds of newtons to thousands of newtons, so the driving capability requirement is very easy to realize.
The lower side of a micro-displacement sensor 5 is arranged on a base 6, N is distributed along the circumferential direction of an air bag 3, N =3, 4, \ 8230and \8230areused for measuring the displacement change of a loading platform 1, wherein N is the same as the number N of pressure sensors 2, the micro-displacement sensor can be distributed in a staggered mode with a micro-displacement driver 4 and the pressure sensors 2 or in the same direction but on different distribution circles during distribution, the measuring range of the micro-displacement sensor can meet the requirement of measuring the deformation increment after the increment load is applied, or a protection device is designed to avoid the deformation increment from being damaged beyond the measuring range, and the displacement resolution delta P is s The design is required according to the measurement accuracy of the incremental load, and the displacement resolution delta P of the micro-displacement driver 4 is required to be higher a Small, i.e. deltaP s ＜δP a If a capacitive sensor is adopted as the micro-displacement sensor 5, the displacement resolution can usually reach sub-nanometer level;
the base 6 is provided with the air bag 3, the micro-displacement sensor 5 and the micro-displacement driver 4 are arranged along the circumferential direction of the air bag 3, and the bottom can be processed with a universal fixed interface or designed with a special connecting interface according to requirements.
When in use, the method is divided into two stages of debugging and calibration and application, as shown in FIG. 4.
Firstly, when the installation needs to ensure that the reading of the pressure sensor 2 is in the measuring range neutral position, the micro displacement driver 4 is also basically in the stroke neutral position. According to the operating point load F 0 The pressure of the air bag 3 is adjusted to enable the display of the pressure sensor 2The number is positioned at the middle position of the measuring range and the reading P of the micro-displacement sensor 5 is recorded i0 And the pressure sensor 2 indicates F i0 The subscript i indicates the number of the pressure sensor 2 or the micro-displacement sensor 5, i =1,2, \ 8230;, N, N indicates the total number of the pressure sensors 2 or the micro-displacement sensors 5; subscript 0 represents an initial value;
then, a load is applied to the loading table 1, and the index of the micro-displacement sensor 5 is P i If the average value of the displacement increment of the loading table 1 is averaged
And/or the variance of the displacement increments of the plurality of micro-displacement sensors 5
Wherein oa and σ represent a preset displacement accuracy parameter and a displacement distribution parameter, μ, respectively ΔP And σ ΔP Respectively, the mean and variance of the amount of change in displacement of all the micro-displacement sensors 5 when an increase in load occurs.
Adjusting the micro-displacement actuator 4 to μ ΔP And σ ΔP Decrease until mu ΔP < oa and sigma ΔP < sigma. Reading the reading F of the pressure sensor 2 at this time i Then the load F on the loading table 1 relative to the working point 0 Increased load of
The measurement error for incremental loads contains two parts: measurement errors of the plurality of pressure sensors 2 and errors due to the airbag 3 not being completely reset. As conservative estimation, the errors of the two parts are directly superposed (when an error propagation formula is adopted for calculation, the comprehensive error is smaller than the result of direct superposition); and the measurement errors of the plurality of pressure sensors 2 are solved using the error propagation principle. Relative measurement precision of pressure sensor 2 is recordedDegree r 0 The measurement range is G, when the rigidity of the air bag 3 at the working point is k, the relative measurement precision of the newly added load is G
The rigidity k of the working point represents the change of displacement caused by small change of the load at the working point, and the ratio of the load change amount to the displacement change amount; a represents the relative operating point of the design, i.e. the ratio of the operating point load to the total range of the pressure sensor 2
By designing and selecting a smaller k and oa (oa) oa (NG) and a larger a (a) 1, it is possible to achieve
I.e. a higher measurement accuracy is achieved. From the foregoing parameters, it is further assumed here that G = L max ＝100N、F 0 =2000N, a =5, r ≈ 0.1r can be obtained 0 I.e. the accuracy is improved by a factor of 10.
The invention provides a servo incremental high-precision sensor aiming at the measurement requirement of high-precision load increment under the condition of large initial load. The sensor adopts an air bag as a main bearing, the position of initial load is used as a balance position, after the load is changed, the micro-displacement sensor 5 is used for monitoring and driving the micro-displacement driver 4, so that the loading platform 1 is restored to the balance position, and the whole body of the small-range high-precision pressure sensor 2 is connected in parallel with the main bearing of the air bag 3 after being connected in series with the micro-displacement driver 4, therefore, the sum of the indication changes of the pressure sensor 2 and the micro-displacement driver gives the load increment of the loading platform. Because the air bag 3 mainly bears the offset initial load, the pressure sensor 2 can select a small-range sensor, the integral measurement precision is improved, and the high-precision measurement of the load increment is realized.
The above embodiments are only used to help understanding the method of the present invention and the core idea thereof, and a person skilled in the art can also make several modifications and decorations on the specific embodiments and application scope according to the idea of the present invention, and these modifications and decorations should also be regarded as the protection scope of the present invention.
Claims (9)
1. A method for using a servo incremental high-precision pressure sensor based on a servo incremental high-precision pressure sensor, the servo incremental high-precision pressure sensor comprises a loading platform (1), pressure sensors (2), an air bag (3), a micro-displacement driver (4), micro-displacement sensors (5) and a base (6), the lower side of the air bag (3) is installed on the upper surface of the base (6), the upper side of the air bag (3) supports the loading platform (1), the micro-displacement driver (4) and the micro-displacement sensors (5) are circumferentially arranged on the upper surface of the base (6) by taking the air bag (3) as the center, the pressure sensors (2) correspond to the micro-displacement drivers (4) one by one, the corresponding micro-displacement drivers (4) of each pressure sensor (2) are supported by, and the upper side of each pressure sensor (2) supports the loading platform (1), the method is characterized in that,
the using method comprises the following steps:
first, according to the operating point load F 0 The pressure of the air bag (3) is adjusted to make the reading of the pressure sensor (2) positioned at the measuring range middle position, and the reading P of the micro-displacement sensor (5) is recorded i0 And the indication F of the pressure sensor (2) i0 Subscript i denotes the number of the pressure sensor or the micro-displacement sensor, i =1,2, \8230, and N, N denotes the total number of the pressure sensors or the micro-displacement sensors; the subscript 0 indicates an initial value of,
then, a load is applied to the loading table (1), and the index of the micro-displacement sensor (5) is P i If it is determined that
And/or
Wherein e and sigma respectively represent preset displacement precision parameters and displacement distribution parameters, mu ΔP And σ ΔP Respectively representing the mean and variance of the displacement variation of all the micro-displacement sensors when the load is increased,
adjusting the micro-displacement actuator (4) to mu ΔP And σ ΔP Decrease until mu ΔP E and σ ΔP < σ, reading the reading F of the pressure sensor (2) at that time i Then the load F on the loading platform (1) relative to the working point 0 The increased load was:
the relative measurement precision of the pressure sensor (2) is recorded as r 0 And the range is G, and when the rigidity of the air bag (3) at the working point is k, the relative measurement precision of the newly added load is as follows:
the rigidity k of the working point indicates the change of displacement caused by the tiny change of the load at the working point, and the ratio of the load change amount to the displacement change amount; a represents the relative operating point of the design, i.e. the ratio of the operating point load to the total range of the pressure sensor,
by designing to choose smaller k and e so that k e < NG and larger a so that a > 1, we get
I.e. a higher measurement accuracy is achieved.
2. Use method of a servo incremental high precision pressure sensor according to claim 1, characterized in that the loading table (1) and the base (6) are coaxial circular tables.
3. Use of a servo incremental high precision pressure sensor according to claim 2, characterized in that the air bag (3) is arranged on the axle center of the loading platform (1) and the base (6).
4. Use of a servo incremental high accuracy pressure sensor according to claim 3, characterized in that the air bag (3) is an air bag with adjustable inflation.
5. Use of a servo incremental high precision pressure sensor according to claim 4, characterized in that the micro displacement driver (4) and the pressure sensor (2) are coaxial.
6. The use method of the servo incremental high-precision pressure sensor is characterized in that N micro-displacement drivers (4) and N micro-displacement sensors (5) are uniformly arranged along the circumferential direction of the air bag (3), wherein N is more than or equal to 3.
7. Use method of a servo incremental high precision pressure sensor according to claim 6, characterized in that the micro displacement driver (4) and the micro displacement sensor (5) are arranged in a staggered way in the same circle.
8. Use method of a servo incremental high precision pressure sensor according to claim 6, characterized in that the micro displacement driver (4) and the micro displacement sensor (5) are arranged in the same direction and in different circles.
9. Use of a servo incremental high precision pressure sensor according to claim 3, characterized in that the base (6) is provided with a universal fixation interface.
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