CN201081720Y - Capacitance method tester for testing driving force characteristics of electrostriction material - Google Patents

Capacitance method tester for testing driving force characteristics of electrostriction material Download PDF

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Publication number
CN201081720Y
CN201081720Y CNU2007200465451U CN200720046545U CN201081720Y CN 201081720 Y CN201081720 Y CN 201081720Y CN U2007200465451 U CNU2007200465451 U CN U2007200465451U CN 200720046545 U CN200720046545 U CN 200720046545U CN 201081720 Y CN201081720 Y CN 201081720Y
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China
Prior art keywords
driving force
capacitance
electrostriction
electrostriction material
plate
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Expired - Fee Related
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CNU2007200465451U
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Chinese (zh)
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李建清
吴剑锋
林保平
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Southeast University
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Southeast University
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Abstract

A capacitance method measuring device for the driving force characteristic of electrostriction material relates to the measuring device for the microstrain and micro driving force of the electrostriction material, in particular to a capacitance method measuring device for the electrostriction material characteristic. The utility model comprises a base and a holding frame arranged on the base, which is characterized in that: a static energizing coil is arranged on the holding frame, a capacitance static plate is arranged on the end face of the static energizing coil, an adjustable high voltage source arranged on the base has two ends respectively connected with negative and positive plates, the electrostriction material to be measured is arranged between the two plates, one of the plates is in contact with a three-dimensional micro-displacement platform, the other plate is connected with a support member where a movable energizing coil is arranged, and a capacitance movable plate arranged on the end face of the movable energizing coil faces the capacitance static plate. The utility model realizes the aim of simple structure and easy operation during measurement.

Description

The capacitance method proving installation of electrostriction material driving force characteristic
Technical field:
The utility model relates to electrostriction material microstrain, micro-driving force proving installation, relates in particular to a kind of capacitance method proving installation of electrostriction material characteristic.
Background technology
Non-optical method had line electric-resistivity method (10 by the principle branch during displacement of the lines or strain testing were used -2-20mm), strain resistor method (10 -4-10 2Mm), capacitance method (10 -4-10mm), respond to same footwork (10 -3-10 2Mm), the difference induction method (10 -4-10 -1Mm) etc., it has different measuring speed, scope and precision, as the electric-resistivity method of ruling only is suitable for the low speed occasion for the reliable contact that guarantees resistance, and the difference induction method has than high measurement accuracy but measurement range is limited, and the strain resistor method needs measurand that bigger driving force is arranged.
Electrostriction material need have little deformation and certain driving force simultaneously, and traditional test can only be tested the electrostriction coefficient of free state electrostriction material, research for electrostriction coefficient under stressed loading condition and driving force thereof is very few, so be necessary the driving force performance of electrostriction material is further launched research.A ring very important in the driving force performance study is exactly a micro-force measurement, and micro-force measurement adopts the MEMS device to finish usually, also has the Fibre Optical Sensor of employing, a day equality method to finish.
Capacitance method and differential transformer method are converted into electrical measurement with little distortion measurement, all need to contact the genus contact method with measured surface and measure.Capacitance method has advantages such as response speed is fast, highly sensitive, noise resisting ability is strong, also has bigger measurement range simultaneously and be suitable for the electrostriction material microstrain than high measurement accuracy to measure, for the test of material electrostrictive properties provides reliable approach.
Capacitance type sensor is a very important class in the sensor, its variation with tested non electrical quantity is converted to electric capacitance change, obtain measured variation by the variation that detects electric capacity, but has simple in structure, high resolution non-cpntact measurement, cost is low, response speed is fast, highly sensitive, advantage such as noise resisting ability is strong, and can under mal-conditions such as high temperature, radiation and judder, work, be widely used in the detection of sensing amounts such as pressure, humidity, solid moisture, sense of touch, information fusion imaging, micrometric displacement, thing position, acceleration.The micrometric displacement that little power produces can be converted into little capacitance variations during micro-force measurement, thereby measure little power by measuring little electric capacity.
The utility model content
The purpose of this utility model is the capacitance method proving installation that proposes a kind of simple in structure, a kind of electrostriction material characteristic that test process is convenient to operate, can directly measure microstrain characteristic, the micro-driving force characteristic of tested electrostriction material by this device.
The utility model adopts following technical scheme:
Comprise pedestal 1 and bracing frame 12, bracing frame 12 is located on the pedestal 1, it is characterized in that on bracing frame 12, being provided with and decide field coil 9, on the end face of deciding magnetic coil 9, be provided with capacitor fixed plate 10, on pedestal 1, be provided with adjustable high-voltage power supply 3, the two ends of adjustable high-voltage power supply 3 are connected with negative respectively, positive plate 4,5, this two pole plate 5,6 are used to place electrostriction material to be measured, a pole plate wherein contacts with three-dimensional micrometric displacement platform 2, with support member 7 that wherein another piece pole plate is connected on be provided with moving field coil 8, be provided with electric capacity movable plate electrode 11 on the end face of moving field coil 8, above-mentioned capacitor fixed plate 10 is faced mutually with electric capacity movable plate electrode 11.
The utility model proposes capacitance method electrostriction material characteristic test device, this device detects the micrometric displacement that the generation small strain of electrostriction material under high electric field intensity causes by capacitance method, loads electromagnetic force or produces the balance driving force by solenoid.Little capacitance detecting has adopted the switching mode weak capacitive detection circuit, and this circuit cost is low, also can eliminate simultaneously than the influence of the big a lot of stray capacitance over the ground of measured capacitance to measurement result.
The capacitance method proving installation of electrostriction material driving force characteristic totally comprises adjustable high voltage power supply, fixed pedestal, three-dimensional micrometric displacement platform, high pressure positive/negative plate, measurand film, field coil group, micro-displacement sensing electric capacity and test control circuit thereof.During system works, high-voltage power supply is carried in highfield on the film to be measured, and film produces strain, and the micro-displacement sensing capacitance measurement goes out corresponding micrometric displacement; Under carrying out the stressed loading condition of material electrostriction coefficient when research produce the power load by drive coil; During the research material driving force, offset the micrometric displacement that highfield produces or produce the driving force that equivalent micrometric displacement is measured material indirectly with drive coil, micro-displacement sensing electric capacity can be used as force transducer simultaneously and uses during as elastic body with electrostriction material.
Whole testing device places on the antivibration platform to eliminate the influence of vibration to test result.Comprised a three-dimensional micrometric displacement platform in the device with the sensing capacitance fine setting in the convenient test, this micrometric displacement platform also is applicable to the calibration and the demarcation of little electric capacity and micrometric displacement simultaneously.
Compared with prior art, the utlity model has following advantage:
1. the utility model physical construction is simple;
2. the micrometric displacement switching mode weak capacitive detection circuit of Cai Yonging, this circuit cost is low, also can eliminate simultaneously than the influence of the big a lot of stray capacitance over the ground of measured capacitance to measurement result;
3. adopt test philosophy can measure electrostriction material electric field-electrostriction strain curve under certain pressure, equivalent driving force characteristic and balance driving force characteristic.
Description of drawings:
Fig. 1 is the utility model general structure synoptic diagram, and Figure 1A is a kind of specific embodiment of the present utility model, and Figure 1B is an another kind of specific embodiment of the present utility model, the 1-fixed pedestal, the three-dimensional micrometric displacement platform of 2-, the adjustable high-voltage power supply of 3-, the 4-negative plate, 5-positive plate, 6-electrostriction film, the 7-support member, 8-moves field coil, and 9-decides field coil, 10-electric capacity movable plate electrode, the 11-capacitor fixed plate, the 12-support bar.
Fig. 2 is test result figure of the present utility model, and to detect voltage output be not linear relationship for displacement and little capacitance method when measurement range is very big, but for very little micrometric displacement (in tens micrometer ranges) can think and little electric capacity between have linear relationship.
Fig. 3 is little capacitance measurement electromagnetic force result, the elastic deformation that utilizes capacitance measurement polyurethane under the electromagnetic force effect, to produce, can obtain being carried in magnetic force on the polyurethane elastomer by measuring little capacitance variations, adopted dc coil to produce electromagnetic force in the system, the diagram horizontal ordinate is the voltage that alignment circle two ends are loaded.
Fig. 4 is the electrostriction strain curve that the polyurethane elastomer of different nano barium phthalate content takes place with electric field intensity.
The polyurethane elastomer of the certain nano barium phthalate content of Fig. 5 is electrostriction strain and the variation relation of time under the extra electric field effect.
Embodiment
A kind of capacitance method proving installation of electrostriction material driving force characteristic, comprise: pedestal 1 and support bar 12, support bar 12 is located on the pedestal 1, it is characterized in that on support bar 12, being provided with and decide field coil 9, on the end face of deciding field coil 9, be provided with capacitor fixed plate 10, on pedestal 1, be provided with adjustable high-voltage power supply 3, the two ends of adjustable high-voltage power supply 3 are connected with negative respectively, positive two pole plates 4,5, should be negative, positive two pole plates 4,5 are used to place electrostriction material 6 to be measured, wherein negative plate contacts with three-dimensional micrometric displacement platform 2, on the support member 7 that links to each other with positive plate, be provided with moving field coil 8, be provided with electric capacity movable plate electrode 10 on the end face of moving field coil 8, above-mentioned capacitor fixed plate 11 is faced mutually with electric capacity movable plate electrode 10.
Above-mentioned high-voltage power supply output area 0~10kV, the measuring accuracy 300mV/pF of above-mentioned capacitor fixed plate 10 and electric capacity movable plate electrode 11 formed electric capacity, capacity measurement scope 0~10pF, capacitance method detects micrometric displacement/microstrain, displacement measurement precision 1.9mV/ μ m,
Figure 1A and Figure 1B have reflected two kinds of forms of technique scheme respectively.
During system works, high-voltage power supply is carried in highfield on the film to be measured, and film produces strain, and the micro-displacement sensing capacitance measurement goes out corresponding micrometric displacement; Under carrying out the stressed loading condition of material electrostriction coefficient when research produce the power load by drive coil; During the research material driving force, offset the micrometric displacement that highfield produces or produce the driving force that equivalent micrometric displacement is measured material indirectly with drive coil, micro-displacement sensing electric capacity can be used as force transducer simultaneously and uses during as elastic body with electrostriction material.
Whole testing device places on the antivibration platform to eliminate the influence of vibration to test result.Comprised a three-dimensional micrometric displacement platform in the device with the sensing capacitance fine setting in the convenient test, this micrometric displacement platform also is applicable to the calibration and the demarcation of little electric capacity and micrometric displacement simultaneously.
Utilize the utility model can carry out the electric field-electrostriction strain curve, the electric field under different pressures-electrostriction strain curve of electrostriction material, in the test of balance driving force under the different electric field actions and the performances such as equivalent driving force under different electric field actions.
1) load series high voltage for tested electrostriction film by high-pressure polar plate, voltage range is 0~10kV, serial corresponding strain displacement takes place in film, thereby little capacitance test circuit detects electric field-electrostriction strain curve that the corresponding micrometric displacement of this series obtains this electrostriction material.
2) give the film on-load pressure by solenoid, load series high voltage for tested electrostriction film by high-pressure polar plate, voltage range is 0~10kV, serial corresponding strain displacement takes place in film, and corresponding micrometric displacement obtains the electric field-electrostriction strain curve of this electrostriction material under different pressures thereby little capacitance test circuit detects this series.
3) load series high voltage for tested electrostriction film by high-pressure polar plate, voltage range is 0~10kV, keeping thin film strain for film load balance power by solenoid is zero, thereby obtains the balance driving force of this electrostriction material under different electric field actions.
4) load series high voltage for tested electrostriction film by high-pressure polar plate, voltage range is 0~10kV, serial corresponding strain displacement takes place in film, film is produced for the film on-load pressure by solenoid again and be equal to displacement, thereby obtain the equivalent driving force of this this electrostriction material under different electric field actions.
It is as follows to use this device to detect electrostriction material characteristic step:
(1) tested electrostriction film is cut into 30mm * 30mm size and be clamped in the positive or negative high voltage pole plate, adjust the initial position of capacitive transducer by transferring three-dimensional micrometric displacement platform, making the capacitance measurement output valve is zero.
(2) voltage makes tested electrostriction film that corresponding strain take place on the adjusting high-pressure polar plate, records electric field-electrostriction strain curve by capacitance measurement circuit.
(3) voltage makes tested electrostriction film that corresponding strain take place on the adjusting high-pressure polar plate, by drive coil to tested electrostriction film on-load pressure (load or equivalent strain) or pulling force (counteracting strain), thereby record electric field-electrostriction strain curve, equivalent driving force characteristic and balance driving force characteristic under the certain pressure of material by capacitance measurement circuit.

Claims (2)

1. the capacitance method proving installation of an electrostriction material driving force characteristic, comprise pedestal (1) and bracing frame (12), bracing frame (12) is located on the pedestal (1), it is characterized in that on bracing frame (12), being provided with and decide field coil (9), on the end face of deciding magnetic coil (9), be provided with capacitor fixed plate (10), on pedestal (1), be provided with adjustable high-voltage power supply (3), the two ends of adjustable high-voltage power supply (3) are connected with negative respectively, positive plate (4,5), this two pole plate (5,6) be used to place electrostriction material to be measured between, a pole plate wherein contacts with three-dimensional micrometric displacement platform (2), with support member (7) that wherein another piece pole plate is connected on be provided with moving field coil (8), be provided with electric capacity movable plate electrode (11) on the end face of moving field coil (8), above-mentioned capacitor fixed plate (10) is faced mutually with electric capacity movable plate electrode (11).
2. the capacitance method proving installation of electrostriction material driving force characteristic according to claim 1 is characterized in that being provided with three-dimensional micrometric displacement platform (2) between described pedestal (1) and described wherein a pole plate.
CNU2007200465451U 2007-10-26 2007-10-26 Capacitance method tester for testing driving force characteristics of electrostriction material Expired - Fee Related CN201081720Y (en)

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Application Number Priority Date Filing Date Title
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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN100453964C (en) * 2007-10-12 2009-01-21 东南大学 Electric capacity method testing device for electrostrictive material characteristic
CN112857639A (en) * 2021-02-18 2021-05-28 哈尔滨工业大学 Servo incremental high-precision pressure sensor and application method thereof

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN100453964C (en) * 2007-10-12 2009-01-21 东南大学 Electric capacity method testing device for electrostrictive material characteristic
CN112857639A (en) * 2021-02-18 2021-05-28 哈尔滨工业大学 Servo incremental high-precision pressure sensor and application method thereof
CN112857639B (en) * 2021-02-18 2022-10-11 哈尔滨工业大学 Servo incremental high-precision pressure sensor and using method thereof

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C17 Cessation of patent right
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Granted publication date: 20080702

Termination date: 20101026