CN106482886A - Traced to the source apparatus and method based on micro- power of dead-weight balanced hinge - Google Patents
Traced to the source apparatus and method based on micro- power of dead-weight balanced hinge Download PDFInfo
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- CN106482886A CN106482886A CN201611180592.5A CN201611180592A CN106482886A CN 106482886 A CN106482886 A CN 106482886A CN 201611180592 A CN201611180592 A CN 201611180592A CN 106482886 A CN106482886 A CN 106482886A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L5/00—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes
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Abstract
The present invention relates to realizing the measurement of small force value and device of tracing to the source with dead-weight balanced hinge arrangement, for provide small force measurement with trace to the source in apparatus and method, force value transmission mechanism is reasonably selected and is designed, and it is constantly optimized, design the parallelogram linkage having dead-weight balanced mechanism, enabling resolving power by this mechanism is 10‑8The small force measurement of N.For this, the present invention, traced to the source apparatus and method based on micro- power of dead-weight balanced hinge, realize using coaxality measuring mechanism, capacitance gradient measurement apparatus, standard quality and electrostatic force comparison device, with dead-weight balanced flexure hinge mechanism, coaxality measuring mechanism includes two CCD camera, two parallel telecentric lightses and computer；Capacitance gradient measurement apparatus include balancing capacitance electric bridge, nanometer micropositioner and a pair of cylindrical capacitance sensor.Present invention is mainly applied to small power measurement.
Description
Technical field
The present invention relates to realizing the measurement of small force value and device of tracing to the source with dead-weight balanced hinge arrangement, belong to micro-nano force value
Fields of measurement.Concretely relate to trace to the source apparatus and method based on micro- power of dead-weight balanced hinge.
Background technology
At this stage, the force value of micro-nano magnitude has more and more been applied to new material, biological medicine, microelectronics, aviation boat
My god, the numerous areas such as national defence, the key technology in order to promote association area lifts, and various countries are confused for the metering method of micro-nano force value
Confused expansion research.In micro-force measurement system, small force value is changed into can trace to the source standard volume the transmission mechanism that outputs it
The key link of impact force measurement, it does not participate directly in the calculating of force value, but determine measuring system can
The force measurement level reaching.It is desirable to force value transmission mechanism has higher sensitivity and repeatability essence in force measurement system
Degree, suitable degree of freedom limits and good dynamic characteristic.Flexure hinge mechanism no rubs because of it, small volume, gapless and
The feature of stable movement and enjoy favor, and the micro-nano force value of high sensitivity, high stability can be realized by flexible hinge
Measurement.
Content of the invention
For overcoming the deficiencies in the prior art, the present invention is intended to provide a kind of resolving power is up to 10-8N based on dead-weight balanced hinge
Micro- power of chain is traced to the source apparatus and method.Specifically it is simply that small force measurement with trace to the source in apparatus and method, to force value pass
Pass mechanism reasonably to be selected and design, and it is constantly optimized, design and have the parallel of dead-weight balanced mechanism
Quadrilateral hinge mechanism, enabling resolving power by this mechanism is 10-8The small force measurement of N.For this reason, the skill that the present invention adopts
Art scheme is, based on micro- power source tracing method of dead-weight balanced hinge, using coaxality measuring mechanism, capacitance gradient measurement apparatus,
Standard quality is realized with electrostatic force comparison device, with dead-weight balanced flexure hinge mechanism, and coaxality measuring mechanism includes two
CCD camera, two parallel telecentric lightses and computer；Capacitance gradient measurement apparatus include balancing capacitance electric bridge, nanometer micropositioner
And a pair of cylindrical capacitance sensor, cylindrical capacitance sensor structure is coaxially to be pacified by the internal and external electrode of thin-wall tubular structure
Dress；Standard quality and electrostatic force comparison device include standard quality ring, electrical-controlled lifting platform, PID controller, digital sourcemeter and laser
Chi；Measuring process is：
In two mutually orthogonal directions, parallel telecentric lightses and CCD camera are located at cylindrical capacitance sensor respectively
Both sides, for obtaining internal and external electrode edge gray table picture, obtain accurate marginal position by follow-up image procossing, carry out interior
External electrode, with shaft detection and adjustment, brings it about z to displacement by the mobile external electrode of nanometer micropositioner, should using laser ruler measurement
Z, to shift value dz, adopts the variable quantity dC of balancing capacitance bridge measurement cylindrical capacitance sensor capacitance, to complete position simultaneously
Move the measurement of capacitance proportionate relationship dC/dz；After standard quality ring is applied on dead-weight balanced flexure hinge mechanism, band
Dead-weight balanced flexure hinge mechanism drives the interior electrode being secured to connect will produce and the change being in proportion by dynamometry value
Shape；The displacement signal measuring is input in PID controller laser ruler, and control signal is inputted digital sourcemeter by controller, number
Word source table output voltage U, on internal and external electrode, makes interior electrode displacement return to initial rest position, data processing and force value calculate
The dz inputting, dC, U signal are processed, and are calculated electrostatic force by module.
It is the simple chain of simple chain by 4 horizontal directions and 5 vertical direction with dead-weight balanced flexure hinge mechanism
One parallel-crank mechanism of composition, parallel-crank mechanism one end is fixed, each level in parallel-crank mechanism upper and lower side end portion
One flexible hinge of setting；It is provided with a thick stick parallel with the upper and lower side of parallel-crank mechanism in the middle part of parallel-crank mechanism
Bar, is connected by a vertically disposed flexible hinge between its intermediate part and parallel-crank mechanism top, lever one end with parallel
It is connected by four vertically disposed flexible hinges between quadrangular mechanism is following, the lever other end connects counterbalanced procedure agate, adjust thick stick
The counterpoise of boom end makes upper and lower side upper hinge be horizontally situated, thus realizing dead-weight balanced, interior electrode is fixed on and puts down
The corresponding other end in the fixing one end of row quadrangular mechanism.
Between internal and external electrode, the relation between applied voltage U and electrostatic force F is：
Traced to the source device based on micro- power of dead-weight balanced hinge, by coaxality measuring mechanism, capacitance gradient measurement apparatus, standard
Quality is constituted with electrostatic force comparison device, with dead-weight balanced flexure hinge mechanism,
Coaxality measuring mechanism includes two CCD camera, two parallel telecentric lightses and computer；Capacitance gradient measurement dress
Put including balancing capacitance electric bridge, nanometer micropositioner and a pair of cylindrical capacitance sensor, cylindrical capacitance sensor structure is
It is co-axially mounted by the internal and external electrode of thin-wall tubular structure；Standard quality and electrostatic force comparison device include standard quality ring, automatically controlled
Lifting platform, PID controller, digital sourcemeter and laser ruler；
Wherein, in two mutually orthogonal directions, parallel telecentric lightses and CCD camera are located at cylindrical capacitive respectively and pass
Sensor both sides；Nanometer micropositioner is used for moving external electrode and brings it about z to displacement；Laser ruler measurement z is to shift value dz, balance electricity
Capacitance bridge is used for measuring the variable quantity dC of cylindrical capacitance sensor capacitance, to complete displacement-capacitance value proportionate relationship dC/dz
Measurement；After standard quality ring is applied on dead-weight balanced flexure hinge mechanism, with dead-weight balanced flexible hinge machine
Structure drives external electrode will produce and the deformation being in proportion by dynamometry value；The displacement signal measuring is input to by laser ruler
In PID controller, control signal is inputted digital sourcemeter by controller, and digital sourcemeter output voltage U, on internal and external electrode, makes interior electricity
Pole displacement returns to initial rest position, and the dz inputting, dC, U signal are processed, and calculate by data processing and force value computing module
Obtain electrostatic force.
It is the simple chain of simple chain by 4 horizontal directions and 5 vertical direction with dead-weight balanced flexure hinge mechanism
One parallel-crank mechanism of composition, parallel-crank mechanism one end is fixed, each level in parallel-crank mechanism upper and lower side end portion
One flexible hinge of setting；It is provided with a thick stick parallel with the upper and lower side of parallel-crank mechanism in the middle part of parallel-crank mechanism
Bar, is connected by a vertically disposed flexible hinge between its intermediate part and parallel-crank mechanism top, lever one end with parallel
It is connected by four vertically disposed flexible hinges between quadrangular mechanism is following, the lever other end connects counterbalanced procedure agate, adjust thick stick
The counterpoise of boom end makes upper and lower side upper hinge be horizontally situated, thus realizing dead-weight balanced, interior electrode is fixed on and puts down
The corresponding other end in the fixing one end of row quadrangular mechanism.
The feature of the present invention and beneficial effect are：
Through the multiple measurement to small force value and analysis experiment, result show resolving power that the present invention set up up to
10-8N is traced to the source apparatus and method based on micro- power of dead-weight balanced hinge, it is possible to achieve 10-7The measurement of the small force value of N, overcomes
A lot of limitation of existing force value transmission mechanism, such as Conventional parallel quadrilateral hinge are long-term hang be also easy to produce plastic deformation and
Shortcoming, this dead-weight balanced hinge increases the thick stick of a balance hinge own wt on the basis of parallelogram flexible hinge
Linkage, can not only effectively reduce the suspension deflection of hinge moreover it is possible to reduce its rigidity by reducing hinge predeformation, make force value
The resolving power of transmission mechanism significantly improves.
Brief description：
Fig. 1 is the system single unit system schematic diagram of small force measurement and device of tracing to the source；
In figure, the automatically controlled translation of automatically controlled corner moving stage 7- of 1- vibration isolation table 2- light source 3- camera 4- hinge 5- right angle block 6-
Platform
8- microscope 9- manual translation platform 10- manual angle moving stage 11- electrical-controlled lifting platform 12- nanometer displacement platform 13-
Cylindrical condenser 14- micro-cantilever 15- laser ruler 16- hand-operated lifting platform 17- vacuum tank.
Fig. 2 is the structural representation of dead-weight balanced hinge；
Fig. 3 deforms schematic diagram for hinge；
Lever stress figure centered on Fig. 4；
Fig. 5 is 72 hours creep test charts of dead-weight balanced hinge；
Fig. 6 is dead-weight balanced hinge step response spectrum analyses figure；
Fig. 7 is sensing and processing system functional block diagram；
Fig. 8 is the structure chart of cylindrical capacitance sensor.
Specific embodiment
The present invention, based on the small force measuring device of electrostatic field, proposes and devises a kind of resolving power up to 10-8The base of N
Micro- power in dead-weight balanced hinge is traced to the source apparatus and method.Due to finding that in experimentation Conventional parallel quadrilateral hinge is long-term
Suspension is also easy to produce plastic deformation and creep, has therefore carried out corresponding optimization on the basis of traditional parallelogram hinge and has set
Meter, the rigid hinge structure of hinge connection is replaced with flexible resilient hinge, and increases a balance hinge own wt
Leverage, had so both remained the feature that parallelogram hinge limits to freedom of motion, had also reduced the suspension of hinge
Deformation, and hinge stiffness can be made to reduce by reducing hinge predeformation.
The present invention is achieved through the following technical solutions：
Small force measurement and device of tracing to the source include coaxality measuring mechanism, capacitance gradient measurement apparatus, standard quality with
Electrostatic force comparison device etc..Coaxality measuring mechanism includes two technical grade high resolution CCD cameras, two parallel telecentric lightses
And computer；Capacitance gradient measurement apparatus include balancing capacitance electric bridge, nanometer micropositioner and a pair of cylindrical capacitance sensor；
Standard quality and electrostatic force comparison device include standard quality ring, electrical-controlled lifting platform, PID controller and laser ruler.
Based on electrostatic force principle, produce electrostatic dynamic balance small power to be measured using a pair of concentric cylinder capacitor.By electrostatic
Power principle understands that the relation between applied voltage U and electrostatic force F is between internal and external electrode：
After therefore having demarcated capacitance gradient dC/dz before measuring, apply testing force, hinged end position is detected by laser ruler
Move, between internal and external electrode, applied voltage produces electrostatic force, under its effect, hinge deformation is gradually reduced, and is detected by laser ruler
Hinge end section until return to initial position, records magnitude of voltage now, by this magnitude of voltage and the capacitance gradient demarcated, that is,
Its corresponding electrostatic force value can be calculated, i.e. small force value to be measured.
The preferred forms of the present invention can be divided into following step：
Small force measurement and device of tracing to the source include three below module, and module one is coaxality measurement module；Module two
For dC/dz measurement module；Module three is data processing and force value computing module.Coaxality measurement module adopts high-precision coaxial
Spend Measurement Algorithm to realize the accurate measurement of internal and external electrode axiality, in two mutually orthogonal directions, parallel telecentric lightses
It is located at cylindrical capacitance sensor both sides with CCD camera respectively, after so focusing, suitably adjustment time of exposure can obtain clearly
Gray level image, electrode edge is clear, can obtain accurate marginal position by follow-up image procossing；When the same repacking of internal and external electrode
After the completion of surveying and adjusting, capacitance gradient measurement module brings it about z to displacement by the mobile external electrode of nanometer micropositioner, using sharp
Light displacement measurement system measures this displacement dz, adopts the variable quantity dC of balancing capacitance bridge measurement capacitance, to complete dC/ simultaneously
The measurement of dz；When standard quality ring by electrical-controlled lifting platform be applied to resilient support upper after, resilient support and interior electrode will produce and
The deformation being in proportion by dynamometry value.The displacement signal measuring is input in PID controller laser ruler, and controller will be controlled
Signal input digital sourcemeter processed, digital sourcemeter output voltage U, on internal and external electrode, makes interior electrode displacement return to initial balance position
Put.The dz inputting, dC, U signal are processed, and are calculated electrostatic force by data processing and force value computing module.Fig. 1 show micro-
Small value force measures the system single unit system schematic diagram with device of tracing to the source：
Small force value is changed into the standard volume outputting it of can tracing to the source in small force measurement with the amount of tracing to the source system
Transmission mechanism is parallelogram flexible hinge.Hang easily due to finding that in experimentation Conventional parallel quadrilateral hinge is long-term
Produce plastic deformation, and the creep of system is larger.Because compacted strain and stress is relevant, and electrode in the long-term suspension of flexible hinge,
And its fixed form determines its operationally action of gravity to be subject to, and therefore has downward load all the time at hinge thin-walled,
Hinge is made to produce stress and deformation.This stress and deformation are the main causes causing creep.Therefore devise band as shown in Figure 2
Dead-weight balanced flexure hinge mechanism.This mechanism makes hinge only have less deformation at work thin-walled, so not only reduces
Stress, reduces creep during hinge work, improves certainty of measurement；Reduce the initial deformation of hinge again, reduce hinge work
Equivalent stiffness when making, improves force value resolving power.The simple chain by 4 horizontal directions for this mechanism and the list of 5 vertical direction
Hinge forms a parallel-crank mechanism, and all simple chains are all flexible, and material is beryllium-bronze, by parallelogram
Increase a lever, lever is connected by screw with parallel-crank mechanism, adjusts lever end on the basis of linkage
Counterpoise, can adjust hinge level, so originally be conducted oneself with dignity by the hinge that four otch deformation on two arms are born, now
To be balanced by lever.
(1) dead-weight balanced hinge stiffness analysis
In simulation analysis, a power straight down is applied to hinge, obtain deformation as shown in Figure 3.At A point
Vertical displacement is 5.026mm, and horizontal displacement is 0.001mm, and the vertical displacement at B point is 5.1mm, and horizontal displacement is 0.37mm.
During visible movement horizontal displacement negligible that is to say, that vertical four hinges be regarded as " rope " be not involved in firm
During degree calculates, therefore only need to calculate the rigidity of peripheral parallel quadrilateral hinge and the rigidity of center lever.
Analyzed before the rigidity of parallelogram hinge, the rigidity of center lever had been dealt with later, centered on Fig. 4
The stress deformation schematic diagram of lever.
In the presence of power F, lever end moves downward x, and the torsional rigidity of levers support is：
Due toThen the rigidity of leverage is：
According to knowable to geometrical relationship, angular deformation amount θ of five long incision is equal, can be carried in conjunction with formula (2-2)
Dead-weight balanced parallelogram hinge stiffness formula is：
Wherein, f (x) is the functional relation drafted for simplifying rigidity formula, and its specific expression formula isE is the elastic modelling quantity of beryllium-bronze material, and t cuts for hinge
Thickness at mouthful, b is hinge width, and R is the oval major axis radius of otch, and r is minor axis radius, the effective length that l works for hinge,
l2Effective length for lever arm.
Hinge dimensions, t=0.1mm, b=4mm, R=15mm, r=5mm, l=104mm, l are determined according to formula (2-3)2
=138mm, the theoretical stiffness calculating this hinge is 6.9951N/m.
(2) dead-weight balanced hinge creep propertieses
Creep test is carried out to dead-weight balanced hinge, obtains the experimental result shown in Fig. 5.
Achieve the croop property being less than 1 micron in 72 hours, improve the system stability of electrostatic power apparatus.
(3) dead-weight balanced hinge spectrum analyses
In the measurement scheme of the present invention, dead-weight balanced hinge one end is connected to firm banking, the other end and interior electrode phase
Even it is made to be suspended in external electrode.This structure makes hinge easily be affected by extraneous vibration and self-vibration occurs.By to hinge
Vibration frequency specturm analysis, find the resonant frequency of hinge, and according to its frequency of vibration select suitable vibration isolation means with as far as possible
Reduce extraneous vibration to measurement impact.
By frequency-domain function, we can clearly draw resonant frequency F of this dead-weight balanced hingeq=4.5Hz, in resonance
Extraneous vibration near frequency can produce large effect to hinge.
This sensor-based system is based on electrostatic force principle, and force value generating meanss adopt coaxial circles column type capacitance sensor, by interior electricity
Pole is fixed on from heave hand dead-weight balanced flexible hinge one end, and external electrode is fixed.When the quality support being applied to by dynamometry on interior electrode
During disk, interior electrode can follow the displacement that hinge produces vertical direction, and the laser ruler under device can measure and record displacement
The size of amount, according to electrostatic force formula, when voltage puts on internal and external electrode, also can produce the electrostatic force F of vertical direction, pass through
The magnitude of voltage of adjustment internal and external electrode, can produce the change in displacement that different electrostatic force produce in order to electrode interior before balancing, make
Interior electrode remains at equilbrium position, and records corresponding magnitude of voltage U, can be calculated accordingly with the magnitude of voltage of record
Electrostatic force value, this value is equal in magnitude with by dynamometry, it is achieved thereby that the measurement of small force value.Fig. 7 show sensing and place
Reason system functional block diagram.
The specific computational methods of small force value are as follows：The critical component of the micro-nano force value device based on electrostatic force is cylindrical
Capacitance sensor, its structure is as shown in Figure 8.
For coaxial cylindrical capacitance sensor, capacitance gradient dC/dz can be considered constant, and the electrostatic force of its reproduction is with applying
Change in the change of internal and external electrode both end voltage.It is co-axially mounted by the internal and external electrode of thin-wall tubular structure, constitute electrostatic force multiple
Existing mechanism.External electrode is fixed on optical table by fixing and pose adjustment unit, and interior electrode passes through to put down with dead-weight balanced
Row tetragon flexure hinge mechanism is suspended among external electrode, and its relative position is adjusted by position adjustment.Using
The relative displacement of electrode in laser ruler measurement.In interior electrode, dispatch from foreign news agency interpolar applied voltage, system produces initial electrostatic power, now
The position of interior electrode is equilbrium position.External force is applied with automatic loading unit by standard test weight or tested cantilever by cantilever beam fixation
It is added on flexure hinge mechanism and interior electrode.Interior electrode is retrodeviated from equilbrium position by external force.System is fed back using interior electrode displacement
System, by the electric potential difference of electrode, external electrode in changing, makes interior electrode come back to equilbrium position.It is right to be obtained according to following formula
The electrostatic force answered.This electrostatic force is equal in magnitude with external force, in opposite direction.
5th, the reasonability of checking the method and effectiveness.Enter for based on the micro-force measuring device of electrostatic force principle
The analysis of row metering performance and test, realize 10-4N～10-5The static force value of N can be traced to the source measurement.Completed using coaxial cylinders electrode
Built based on the micro-nano force value device of electrostatic force and debug comprehensively.Devise same axial adjustment operational approach, capacitance gradient measurement side
Method, counterweight method of calibration.The theory analysis of the uncertainty according to this device and the actual measured results of capacitance gradient, are based on
The force value relative standard uncertainty of the micro-nano force value device of electrostatic force is less than 2%.
In sum, proposed by the present invention traced to the source apparatus and method based on micro- power of dead-weight balanced hinge, can be achieved to from
The hinge of galassing weighing apparatus is combined with micro-force measurement, overcomes the plasticity that Conventional parallel four side row hinge produces because of long-term suspension
Deformation and creep；By reducing hinge predeformation, reduce the rigidity of system, dynamometry resolving power is up to 10-8Magnitude, be also simultaneously
Less yardstick Force measure lays the first stone.
Claims (5)
1. a kind of micro- power source tracing method based on dead-weight balanced hinge, is characterized in that, using coaxality measuring mechanism, capacitance gradient
Measurement apparatus, standard quality and electrostatic force comparison device, realize with dead-weight balanced flexure hinge mechanism, coaxality measuring mechanism
Including two CCD camera, two parallel telecentric lightses and computer；Capacitance gradient measurement apparatus include balancing capacitance electric bridge, receive
Rice micropositioner and a pair of cylindrical capacitance sensor, cylindrical capacitance sensor structure is by the interior dispatch from foreign news agency of thin-wall tubular structure
Pole is co-axially mounted；Standard quality and electrostatic force comparison device include standard quality ring, electrical-controlled lifting platform, PID controller, digital source
Table and laser ruler；Measuring process is：
In two mutually orthogonal directions, parallel telecentric lightses and CCD camera are located at cylindrical capacitance sensor both sides respectively,
For obtaining internal and external electrode edge gray table picture, accurate marginal position is obtained by follow-up image procossing, carries out interior dispatch from foreign news agency
Extremely with shaft detection and adjustment, z is brought it about to displacement by the mobile external electrode of nanometer micropositioner, using laser ruler measure this z to
Shift value dz, adopts the variable quantity dC of balancing capacitance bridge measurement cylindrical capacitance sensor capacitance, to complete displacement simultaneously
The measurement of capacitance proportionate relationship dC/dz；After standard quality ring is applied on dead-weight balanced flexure hinge mechanism, band is certainly
The flexure hinge mechanism of galassing weighing apparatus drives the interior electrode being secured to connect will produce and the deformation being in proportion by dynamometry value；
The displacement signal measuring is input in PID controller laser ruler, and control signal is inputted digital sourcemeter, digital source by controller
Table output voltage U, on internal and external electrode, makes interior electrode displacement return to initial rest position, data processing and force value computing module
The dz of input, dC, U signal are processed, and be calculated electrostatic force.
2. micro- power source tracing method based on dead-weight balanced hinge as claimed in claim 1, is characterized in that, with dead-weight balanced soft
Property linkage forms a parallel-crank mechanism by the simple chain of 4 horizontal directions and the simple chain of 5 vertical direction,
Parallel-crank mechanism one end is fixed, and parallel-crank mechanism upper and lower side end portion is respectively horizontally disposed with a flexible hinge；Parallel four
It is provided with a lever, its intermediate part and the parallelogram parallel with the upper and lower side of parallel-crank mechanism in the middle part of Bian Xing mechanism
Be connected by a vertically disposed flexible hinge between mechanism top, lever one end and parallel-crank mechanism following between by four
Vertically disposed flexible hinge is connected, and the lever other end connects counterbalanced procedure agate, and the counterpoise adjusting lever end makes upper and lower side
Upper hinge is horizontally situated, thus realizing dead-weight balanced, interior electrode is fixed on relative with the fixing one end of parallel-crank mechanism
The other end answered.
3. the micro- power source tracing method based on dead-weight balanced hinge as claimed in claim 1, is characterized in that, apply between internal and external electrode
Relation between making alive U and electrostatic force F is：
4. a kind of traced to the source device based on micro- power of dead-weight balanced hinge, it is characterized in that, traced to the source based on micro- power of dead-weight balanced hinge
Device, by coaxality measuring mechanism, capacitance gradient measurement apparatus, standard quality and electrostatic force comparison device, with dead-weight balanced
Flexure hinge mechanism is constituted, and coaxality measuring mechanism includes two CCD camera, two parallel telecentric lightses and computer；Electric capacity
Gradient measuring device includes balancing capacitance electric bridge, nanometer micropositioner and a pair of cylindrical capacitance sensor, and cylindrical capacitive passes
Sensor structure is to be co-axially mounted by the internal and external electrode of thin-wall tubular structure；Standard quality and electrostatic force comparison device include standard matter
Amount ring, electrical-controlled lifting platform, PID controller, digital sourcemeter and laser ruler；
Wherein, in two mutually orthogonal directions, parallel telecentric lightses and CCD camera are located at cylindrical capacitance sensor respectively
Both sides；Nanometer micropositioner is used for moving external electrode and brings it about z to displacement；Laser ruler measurement z is to shift value dz, balancing capacitance electricity
Bridge is used for measuring the variable quantity dC of cylindrical capacitance sensor capacitance, to complete the survey of displacement-capacitance value proportionate relationship dC/dz
Amount；After standard quality ring is applied on dead-weight balanced flexure hinge mechanism, with dead-weight balanced flexure hinge mechanism band
Dynamic external electrode will produce and the deformation being in proportion by dynamometry value；The displacement signal measuring is input to PID control by laser ruler
In device processed, control signal is inputted digital sourcemeter by controller, and digital sourcemeter output voltage U, on internal and external electrode, makes interior electrode position
Shifting returns to initial rest position, and the dz inputting, dC, U signal are processed, and are calculated by data processing and force value computing module
Electrostatic force.
5. as claimed in claim 4 traced to the source device based on micro- power of dead-weight balanced hinge, it is characterized in that, with dead-weight balanced soft
Property linkage forms a parallel-crank mechanism by the simple chain of 4 horizontal directions and the simple chain of 5 vertical direction,
Parallel-crank mechanism one end is fixed, and parallel-crank mechanism upper and lower side end portion is respectively horizontally disposed with a flexible hinge；Parallel four
It is provided with a lever, its intermediate part and the parallelogram parallel with the upper and lower side of parallel-crank mechanism in the middle part of Bian Xing mechanism
Be connected by a vertically disposed flexible hinge between mechanism top, lever one end and parallel-crank mechanism following between by four
Vertically disposed flexible hinge is connected, and the lever other end connects counterbalanced procedure agate, and the counterpoise adjusting lever end makes upper and lower side
Upper hinge is horizontally situated, thus realizing dead-weight balanced, interior electrode is fixed on relative with the fixing one end of parallel-crank mechanism
The other end answered.
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| CN109947141A (en) * | 2019-04-15 | 2019-06-28 | 中国航空工业集团公司北京长城计量测试技术研究所 | Optics balancing method micro-nano kinematic system attitude-control device |
| CN114812874A (en) * | 2022-05-10 | 2022-07-29 | 广州航海学院 | Micro-nano force source device, control method, micro-nano force measuring equipment and storage medium |
| CN115290239A (en) * | 2022-07-31 | 2022-11-04 | 天津大学 | Tiny propulsive force measuring device and method based on parallelogram elastic mechanism |
| CN115290228A (en) * | 2022-07-31 | 2022-11-04 | 天津大学 | Capacitive micro-force measuring device and method based on parallelogram elastic mechanism |
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Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN109947141A (en) * | 2019-04-15 | 2019-06-28 | 中国航空工业集团公司北京长城计量测试技术研究所 | Optics balancing method micro-nano kinematic system attitude-control device |
| CN109947141B (en) * | 2019-04-15 | 2021-11-30 | 中国航空工业集团公司北京长城计量测试技术研究所 | Attitude control device of optical balance method micro-nano motion system |
| CN114812874A (en) * | 2022-05-10 | 2022-07-29 | 广州航海学院 | Micro-nano force source device, control method, micro-nano force measuring equipment and storage medium |
| CN115290239A (en) * | 2022-07-31 | 2022-11-04 | 天津大学 | Tiny propulsive force measuring device and method based on parallelogram elastic mechanism |
| CN115290228A (en) * | 2022-07-31 | 2022-11-04 | 天津大学 | Capacitive micro-force measuring device and method based on parallelogram elastic mechanism |
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