CN103398805A - Three-dimensional nanometer measurement head elastic supported by spiral leaf spring - Google Patents
Three-dimensional nanometer measurement head elastic supported by spiral leaf spring Download PDFInfo
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- CN103398805A CN103398805A CN2013103065713A CN201310306571A CN103398805A CN 103398805 A CN103398805 A CN 103398805A CN 2013103065713 A CN2013103065713 A CN 2013103065713A CN 201310306571 A CN201310306571 A CN 201310306571A CN 103398805 A CN103398805 A CN 103398805A
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Abstract
The invention discloses a three-dimensional nanometer measurement head elastically supported by a spiral leaf spring and belongs to the technical field of a measurement apparatus. The spiral leaf spring elastic supported type three-dimensional nanometer measurement head comprises a shell, focusing measurement heads, a measurement arm and a spiral leaf spring elastic support and is characterized in that the focusing measurement heads are mounted at the upper end part of the shell; three plane reflectors are arranged on the measurement arm; each two of the plane reflectors form an included angle of 180 degrees; the three plane reflectors correspond to the focusing measurement heads one by one; the spiral leaf spring elastic support is fixed on the shell; a measurement ball at the foremost end of each measurement head is fixedly mounted on a measurement rod; and the measurement rod is connected with the lower part of a connection piece through a thread. The three-dimensional nanometer measurement head provided by the invention is high in measurement sensitivity and has nanometer-level measurement sensitivity. The three-dimensional nanometer measurement head provided by the invention uses the spiral leaf spring as elastic support, so that difficulty of generating plastic transformation and good long-term using stability can be realized. The original measurement force of the measurement head is easily adjusted, so that the property stability of the measurement head can be easily ensured.
Description
Technical field
The present invention relates to the surveying instrument technical field, specifically the flexibly mounted three-dimensional manometer gauge head of a kind of flight spring.
Background technology
Guide rail support is the indispensable significant components of precision optical machinery and fine measuring instrument, and different with precision and also different to the requirement of guide rail support with the performance of surveying instrument.Wherein, to transmitting the guide rail support of motion, not only require moving displacement larger, holding capacity and displacement accuracy are also had higher requirements.And to supporting the fine measuring instrument guide rail support spare of micrometric displacement, generally all higher to its accuracy requirement.For the modern precision surveying instrument, the general measure precision is micron order, and high measurement accuracy reaches nanoscale., because high precision measuring instrument often need load certain contact measurement power to measurement component, can contact well with the measuring sensor that guarantees measurand and surveying instrument, but must guarantee this contact force size suitably, the coincidence measurement requirement., for the surveying instrument of nano-precision, require contact force or ergometry less, to guarantee instrument overall measurement precision.
Three dimensional probe, 3-D probe is one of parts of coordinate measuring machine key.The coordinate measuring machine measuring accuracy directly depends on the precision of gauge head, and the elastic bearing indispensable significant components that is gauge head.The elastic bearing effect of fine measuring instrument micrometering head generally has two aspects, namely have the dynamometry source of the supporting of micrometric displacement element and contact measuring head concurrently, common are: biplate spring guide rail support, volute spring supporting, suspension elastic bearing and cross-leaf spring supporting etc., the dynamometry of these flexibly mounted micromotion scopes and generation thereof, physical dimension with elastic supporting element is different and different, minimum dynamometry can reach 0.1mN, maximum dynamometry can be to tens newton, but its micromotion scope is all less, only several microns of minimums.As can be seen from the above analysis, the three dimensional probe, 3-D probe that possesses multi-form resiliency supported possesses different characteristic of property, the gauge head of different performance and precision is also different to the requirement of guide rail support, therefore adopts multi-form measurement component supporting member to become one of gordian technique of three dimensional probe, 3-D probe structural research.For the resiliency supported present situation of present China high-precision three-dimensional gauge head employing and the shortcoming of existence thereof, we design and have invented the flexibly mounted three-dimensional manometer gauge head of a kind of flight spring.
The common elastic bearing gauge head of prior art has following several: volute spring supporting gauge head, sheet spring guide rail support gauge head, cross suspension elastic bearing gauge head, rood beam elastic bearing gauge head, cross-leaf spring supporting gauge head.
Wherein, volute spring supporting gauge head, spiral back-moving spring compress three contact armed levers of gauge head, when gauge head is done three-dimensional fine motion, overcome the micro-pressure of spring, make the V-type sheet that armed lever disengages and measuring-signal occurs, otherwise armed lever resets.But only can realize measurement and the triggering of micron order precision, ergometry is larger, is generally 15N.
Sheet spring guide rail support gauge head is mainly used in electric profile apparatus and atomic force microscope, micro-cantilever supporting contact pilotage, and with the measured piece Surface Contact, this moment, contact pilotage 2 was done fine motion vertically, drove iron core fine motion and produce measuring-signal in telefault.Shortcoming is the gauge head supporting that only can be used for very little micro-nano magnitude fine motion scope., if the fine motion scope is larger, will produce the measuring error that tilts and cause with up and down fine motion and axis due to the gauge head vertical axis.
Cross suspension elastic bearing gauge head selects the larger tinsel of rigidity to form the cross supporting, drives the little swing of gage beam during the gauge head fine motion and produces measuring-signal.Shortcoming is that suspension easily produces plastic yield, causes that the long-time stability of gauge head performance are poor, needs often to adjust the tensile force of suspension, and to keep original performance of gauge head, but this adjustment is difficult to realize.
Rood beam elastic bearing gauge head is comprised of survey ball 1, measuring staff 2, outside framework 3, center connector 4, rood beam 5.Its elastic support structure adopts the rood beam structure, surveys end by rood beam as suspension supporting measuring staff, with the tested surface Surface Contact.Dynamometry is through surveying ball, measuring staff and rood beam, and being delivered to sensitive element is voltage dependent resistor (VDR), realizes the measurement of three-dimensional strength measurement.Existing coupling between dimension, radial effects and calibration matrix is the shortcomings such as approximate solution.
The isotropy of the gauge head performance of cross-leaf spring elastic bearing nano measuring head is poor, has larger anisotropy difference, affects the nanometer measurement precision.In addition, above-mentioned several gauge heads are done the used time bearing the circumference dynamometry, all have the distortion error of pretravel in the circumference all directions.
Summary of the invention
The object of the invention is to the defect that exists for prior art, provide a kind of flight spring flexibly mounted three-dimensional manometer gauge head.
Purpose of the present invention can be achieved through the following technical solutions:
The flexibly mounted three-dimensional manometer gauge head of a kind of flight spring, comprise shell, focus on gauge head, gage beam and flight spring elastic bearing, it is characterized in that, described focusing gauge head is arranged on the upper end of shell, described gage beam is provided with three plane mirrors, and between plane mirror, installation interval is 180 degree.Described flight spring elastic bearing is fixed on shell, is in gauge head survey ball foremost and is fixedly mounted on measuring staff, and measuring staff is connected with the bottom of web member by screw thread.
Described focusing gauge head is arranged on the upper end of shell by set bolt, quantity is three, and is corresponding one by one with plane mirror, and installation interval is 180 degree.
Described flight spring elastic bearing is fixed on shell by web member.
Described flight spring elastic bearing and hold-down nut link into an integrated entity, and hold-down nut is connected with web member.
Fix three plane mirrors on described gage beam, hold-down nut is fixed on web member.
The top cover of described web member has the adjustment spring.
The centre position of described focusing gauge head below is provided with upper end cover, the adjustment screw is installed on described upper end cover, the bottom of described adjustment screw contacts with regulating spring, above the adjustment spring, cushion block is installed, by set screw, cushion block and the regulating spring realization adjustment to flight spring resiliency supported pretightning force.
Beneficial effect of the present invention:
1, the present invention adopts the flight spring as three-dimensional manometer gauge head resiliency supported, while being subjected to responsive to axial force, the displacement deformation of core can guarantee perpendicular to this lip-deep gauge head axis basically with Surface Vertical, and bear when lateral stressed perpendicular to axis E when gauge head, its horizontal force size has along the circumference isotropy with gauge head transversal displacement measurer.
2, three-dimensional manometer gauge head measurement of the present invention is highly sensitive, has nano level measurement sensitivity.
3, three-dimensional manometer gauge head of the present invention adopts the flight spring as resiliency supported, is not easy to produce plastic yield, and long-term stability in use is good.The initial dynamometry of gauge head is easily adjusted, and is easy to guarantee the stability of gauge head.
Description of drawings
Fig. 1 is structural representation of the present invention.
Fig. 2 is vertical view of the present invention.
Fig. 3 is cut-open view of the present invention.
Fig. 4 is flight spring elastic support structure figure.
In figure: 1, shell, 2, set bolt, 3, focus on gauge head, 4, gage beam, 5, cushion block, 6, adjust screw, 7, upper end cover, 8, regulating spring, 9, the hold-down nut I, 10, plane mirror, 11, the web member I, 12, the hold-down nut II, 13, web member II, 14, flight spring elastic bearing, 15, measuring staff, 16, survey ball.
Embodiment
Below in conjunction with specific embodiment, the present invention is described in further detail.
As shown in Figure 1, Figure 2 and Figure 3, the flexibly mounted three-dimensional manometer gauge head of a kind of flight spring comprises: shell 1, set bolt 2, focusing gauge head 3, gage beam 4, cushion block 5, adjustment screw 6, upper end cover 7, adjustment spring 8, hold-down nut I 9, plane mirror 10, web member I 11, hold-down nut II 12, web member II 13, flight spring resiliency supported 14, measuring staff 15, survey ball 16.Three focus on gauge head 3 and are arranged on the upper end of shell 1, three plane mirrors 10 that are provided with gage beam 4 are corresponding one by one, installation interval is 180 degree, flight spring elastic bearing 14 is fixed on shell 1, be in gauge head survey ball 16 foremost and be fixedly mounted on measuring staff 15, measuring staff 15 is connected with the bottom of web member II 13 by screw thread.Focus on gauge head 3 and be arranged on the upper end of shell 1 by set bolt 2.Flight spring elastic bearing 14 is fixed on shell 1 by web member I 11.Flight spring elastic bearing 14 links into an integrated entity with hold-down nut II 12, and hold-down nut II 12 is connected with web member II 13.Hold-down nut I 9 is fixed on web member II 13.The top cover of web member II 13 has the spring 8 of adjustment.The centre position that focuses on gauge head 3 belows is provided with upper end cover 7, be equipped with on described upper end cover 7 and adjust screw 6, the bottom of described adjustment screw 6 contacts with regulating spring 8, above adjustment spring 8, cushion block 5 is installed, by set screw 6, cushion block 5 and the regulating spring 8 realizations adjustment to flight spring resiliency supported pretightning force.
Flight spring resiliency supported 14 is to make by delineating archimedean spiral groove thereon, flight spring resiliency supported 14 is that xsect is the rectangle of b * h, its small end radius of curvature R 1, large end radius of curvature R 2, little broken end place is that starting point arrives the angle theta between any arbitrarily, number of effective coils n, shear modulus G.Three-dimensional manometer gauge head general structure size flexibly mounted according to the flight spring, calculate flight spring elastic bearing original outer diameter D and suffered axial force P and the axial displacement S of flight spring elastic bearing 14 of permission,, through calculating, regulation ﹠ test, determine finally satisfactory best flight spring elastic support structure parameter.Pass between structural parameters and axial force P and axial displacement S is:
Claims (8)
1. flexibly mounted three-dimensional manometer gauge head of flight spring, comprise shell (1), focus on gauge head (3), gage beam (4) and flight spring elastic bearing (14), it is characterized in that, described focusing gauge head (3) is arranged on the upper end of shell (1), described gage beam (4) is provided with three plane mirrors (10), 180 degree of being separated by between each plane mirror (10).Described flight spring elastic bearing (14) is fixed on shell (1), is in gauge head survey ball (16) foremost and is fixedly mounted on measuring staff (15), and measuring staff (15) is connected with the bottom of web member II (13) by screw thread.
2. the flexibly mounted three-dimensional manometer gauge head of flight spring according to claim 1, is characterized in that, described focusing gauge head (3) is arranged on the upper end of shell (1) by set bolt (2), and quantity is three, and is corresponding one by one with plane mirror (10).
3. the flexibly mounted three-dimensional manometer gauge head of flight spring according to claim 1, is characterized in that, described flight spring elastic bearing (14) is fixed on shell (1) by web member I (11).
4. the flexibly mounted three-dimensional manometer gauge head of flight spring according to claim 1, is characterized in that, described flight spring elastic bearing (14) links into an integrated entity with hold-down nut II (12), and hold-down nut II (12) is connected with web member II (13).
5. the flexibly mounted three-dimensional manometer gauge head of flight spring according to claim 1, is characterized in that, fixes three plane mirrors (10) on described gage beam (4), and hold-down nut I (9) is fixed on web member II (13).
6. the flexibly mounted three-dimensional manometer gauge head of flight spring according to claim 1, is characterized in that, the top cover of described web member II (13) has adjustment spring (8).
7. the flexibly mounted three-dimensional manometer gauge head of flight spring according to claim 1, it is characterized in that, the centre position of described focusing gauge head (3) below is provided with upper end cover (7), be equipped with on described upper end cover (7) and adjust screw (6), the bottom of described adjustment screw (6) contacts with regulating spring (8), above adjustment spring (8), cushion block (5) is installed, by set screw (6), cushion block (5) and regulating spring (8) the realization adjustment to flight spring resiliency supported pretightning force.
8. the flexibly mounted three-dimensional manometer gauge head of flight spring according to claim 1, it is characterized in that, described flight spring resiliency supported 14 is to make by delineating archimedean spiral groove thereon, flight spring resiliency supported 14 is that xsect is the rectangle of b * h, its small end radius of curvature R 1, hold greatly radius of curvature R 2, and little broken end place is that starting point arrives the angle theta between any arbitrarily, number of effective coils n, shear modulus G.Three-dimensional manometer gauge head general structure size flexibly mounted according to the flight spring, calculate flight spring elastic bearing original outer diameter D and suffered axial force P and the axial displacement S of flight spring elastic bearing 14 of permission,, through calculating, regulation ﹠ test, determine finally satisfactory best flight spring structure parameter.Pass between structural parameters and axial force P and axial displacement S is:
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
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| CN201310306571.3A CN103398805B (en) | 2013-07-19 | 2013-07-19 | Three-dimensional nanometer measurement head elastically supported by spiral leaf spring |
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| CN201310306571.3A CN103398805B (en) | 2013-07-19 | 2013-07-19 | Three-dimensional nanometer measurement head elastically supported by spiral leaf spring |
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| CN103398805B CN103398805B (en) | 2015-06-10 |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105444695A (en) * | 2015-12-22 | 2016-03-30 | 四川大学 | Probe contact type measuring head enabling elastic element position limiting method-based dynamic characteristic adjustment |
| CN107471085A (en) * | 2017-09-17 | 2017-12-15 | 长春工业大学 | Six-dimensional force device for measuring force and force measuring method based on viscoelastic material polishing |
| CN107830793A (en) * | 2017-10-30 | 2018-03-23 | 安徽理工大学 | A kind of micro-nano Probe Heads of Coordinate Measuring Machines of stiffness variable contact |
Citations (5)
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| CN86105617A (en) * | 1986-06-19 | 1988-03-16 | 雷尼肖公司 | contact sensing probe |
| CN2182388Y (en) * | 1993-11-09 | 1994-11-09 | 哈尔滨工业大学 | High-precision contacting three-dimensional gauge head |
| KR20020037934A (en) * | 2000-11-16 | 2002-05-23 | 유인균 | measure for Jack support |
| CN202048904U (en) * | 2010-09-26 | 2011-11-23 | 中机生产力促进中心 | Measuring head with constant measuring force and rotary measuring ball and without measuring range limitation |
| CN103207035A (en) * | 2013-05-14 | 2013-07-17 | 曹毅 | Force spectrometer for measuring intermolecular forces |
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2013
- 2013-07-19 CN CN201310306571.3A patent/CN103398805B/en not_active Expired - Fee Related
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN86105617A (en) * | 1986-06-19 | 1988-03-16 | 雷尼肖公司 | contact sensing probe |
| CN2182388Y (en) * | 1993-11-09 | 1994-11-09 | 哈尔滨工业大学 | High-precision contacting three-dimensional gauge head |
| KR20020037934A (en) * | 2000-11-16 | 2002-05-23 | 유인균 | measure for Jack support |
| CN202048904U (en) * | 2010-09-26 | 2011-11-23 | 中机生产力促进中心 | Measuring head with constant measuring force and rotary measuring ball and without measuring range limitation |
| CN103207035A (en) * | 2013-05-14 | 2013-07-17 | 曹毅 | Force spectrometer for measuring intermolecular forces |
Non-Patent Citations (1)
| Title |
|---|
| 杨洪涛等: "基于微力测量的微纳米测头系统设计及优化", 《安徽理工大学学报（自然科学版）》, vol. 32, no. 2, 30 June 2012 (2012-06-30), pages 13 - 17 * |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105444695A (en) * | 2015-12-22 | 2016-03-30 | 四川大学 | Probe contact type measuring head enabling elastic element position limiting method-based dynamic characteristic adjustment |
| CN105444695B (en) * | 2015-12-22 | 2019-03-22 | 四川大学 | The probe contact measuring head of dynamic characteristic is adjusted based on elastic element limit method |
| CN107471085A (en) * | 2017-09-17 | 2017-12-15 | 长春工业大学 | Six-dimensional force device for measuring force and force measuring method based on viscoelastic material polishing |
| CN107471085B (en) * | 2017-09-17 | 2023-04-21 | 长春工业大学 | Six-dimensional force measuring device and method based on grinding and polishing of viscoelastic material |
| CN107830793A (en) * | 2017-10-30 | 2018-03-23 | 安徽理工大学 | A kind of micro-nano Probe Heads of Coordinate Measuring Machines of stiffness variable contact |
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| CN103398805B (en) | 2015-06-10 |
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Inventor after: Fei Yetai Inventor after: Yang Hongtao Inventor after: Sun Shuai Inventor after: Zhang Xin Inventor after: Cha Xiaona Inventor before: Yang Hongtao Inventor before: Zhang Dongsu Inventor before: Zhang Wei Inventor before: Sun Shuai Inventor before: Fang Chuanzhi Inventor before: Zhang Jing |
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Free format text: CORRECT: INVENTOR; FROM: YANG HONGTAO ZHANG DONGSU ZHANG WEI SUN SHUAI FANG CHUANZHI ZHANG JING TO: FEI YETAI YANG HONGTAO SUN SHUAI ZHANG XIN CHA XIAONA |
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