CN105444695B - The probe contact measuring head of dynamic characteristic is adjusted based on elastic element limit method - Google Patents
The probe contact measuring head of dynamic characteristic is adjusted based on elastic element limit method Download PDFInfo
- Publication number
- CN105444695B CN105444695B CN201510973662.1A CN201510973662A CN105444695B CN 105444695 B CN105444695 B CN 105444695B CN 201510973662 A CN201510973662 A CN 201510973662A CN 105444695 B CN105444695 B CN 105444695B
- Authority
- CN
- China
- Prior art keywords
- module
- elastic element
- gauge head
- probe
- feeler lever
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- A Measuring Device Byusing Mechanical Method (AREA)
Abstract
The invention discloses the probe contact measuring heads that dynamic characteristic is adjusted based on elastic element limit method, are related to workpiece face shape technical field of quality detection.The sensor is mainly made of gauge head module, gauge head supporting module, displacement detection module, measuring force generation module, and the gauge head module includes: probe, feeler lever and position-limit mechanism, can follow the variation movement of measured workpiece surface；The gauge head supporting module is magnetic suspension bearing, and radial supporting force needed for providing gauge head module, the displacement detection module is precise grating, measures the displacement of gauge head module；The measuring force generation module is elastic element.The probe contact measuring head invented has used contactless electromagnetic bearing and elastic element to limit the design adjusted, the following feature of probe and tested surface can be enhanced, the dynamic characteristic and control measuring force of gauge head are promoted, and probe system can be carried out for different materials and the workpiece of different sides type feature and dynamically adjusted and the control of measuring force.
Description
Technical field
The present invention relates to workpiece surface appearance measurement and technical field of quality detection, in particular to a kind of to be based on elastic element
The probe contact measuring head of limit method adjusting dynamic characteristic.
Background technique
Probe contact measuring head is the core devices of accurate topography measurement instrument, is widely used for industry online and offline zero
The measuring surface form of part detects and characterization.
In probe contact measuring head, the dynamic characteristic of gauge head is an important factor for influencing measurement accuracy.Probe contact
Gauge head contacts using probe tip and streaks sample surface, and using the displacement of displacement sensing element detection probe, thus
Characterize the surface topography of sample.However, being visited in measurement process due to being influenced by probe contact measuring head dynamic characteristic
Needle can not be constantly kept in contact with sample surface.This phenomenon causes measurement result pattern distortion and measurement essence occur
Degree reduction etc..
There are many modes for improving probe contact measuring head dynamic characteristic, comprising: the elasticity modulus for improving probe system subtracts
The equivalent mass of small probe system and the damped coefficient etc. for adjusting probe system.The elasticity modulus for improving probe system will lead to survey
The increase measured one's own ability increases a possibility that sample surface and probe system are damaged；Due to by probe system component geometry
The constraint of relationship and mechanical property, the equivalent mass of probe system are difficult effectively to reduce；Adjust the damped coefficient of probe system
It will lead to the raising of technical costs and economic cost.
Summary of the invention
In order to improve the dynamic characteristic of probe contact measuring head and keep lesser measuring force, workpiece surface appearance is realized
Accurate measurement, we have invented the probe contact measuring heads that dynamic characteristic is adjusted based on elastic element limit method.
The present invention relates to the probe contact measuring heads that dynamic characteristic is adjusted based on elastic element limit method, specifically include that
Gauge head module, gauge head supporting module, displacement detection module, measuring force generation module, bearing control module, displacement signal acquisition mould
Block, signal analysis and processing module etc..The gauge head module includes for contacting sample surfaces and perceiving its modification of surface morphology
Probe (1), feeler lever (2) and elastic element position-limit mechanism (3), the probe (1) is fixedly connected on the left-hand end of feeler lever (2)
On face, the feeler lever (2) is arranged in gauge head support module, and the elastic element position-limit mechanism (3) includes L-shaped fixed plate
(3-1), stop screw (3-2) and fastening screw (3-3) are fixed on the side of feeler lever (2) and the position close to left side.
The gauge head supporting module includes sensor base (4) and magnetic suspension bearing (5), the sensor base
(4) be fixed on measurement workbench (8) on, the magnetic suspension bearing (5) is fixedly mounted on sensor base (4), by with
The magneticaction of feeler lever (2), radial support power needed for gauge head module is provided, and pass through bearing control module (10) and signal point
Analyse processing module (12) connection.
The displacement detection module is a kind of precise grating, including scale grating (6-1) and reading head (6-2) are described
Scale grating be nested on feeler lever (2), can be mobile with feeler lever (2)；The reading head (6-2) and scale grating (6-1)
It is corresponding, it is fixedly mounted on sensor base (4), and pass through displacement signal acquisition module (11) and signal analysis and processing module
(12) it connects, for reading the displacement information of feeler lever.
The measuring force generation module is a kind of elastic element (7), and the elastic element (7) is spring or spring
Piece, one end of elastic element (7) are fixedly connected on the right side inner wall of sensor base (4), and the other end is fixedly connected on described
Feeler lever (2) right end face on.Before measurement starts, elastic element (7) are adjusted by position-limit mechanism (3) and are in Pre strained state,
Measurement, which starts rear measured workpiece (9), to be made probe (1) by the further compression elastic element of contact (7) with probe (1) and is tested
The measuring force of horizontal direction is generated between workpiece (9), thus ensure that the good contact between probe (1) and measured workpiece (9),
Being conducive to probe (1) follows the pattern on measured workpiece (9) surface to change and move.
The probe contact measuring head for being adjusted dynamic characteristic based on elastic element limit method as described above, is more further said
It is bright are as follows: the gauge head module is made of probe (1), feeler lever (2) and elastic element position-limit mechanism (3).The probe (1) with
Feeler lever (2) is coaxially connected, and the elastic element position-limit mechanism (3) includes L-shaped fixed plate (3-1), stop screw as shown in Figure 2
(3-2) and fastening screw (3-3), the bottom plate and side plate of the L-shaped fixed plate (3-1) are respectively equipped with threaded hole, and described is tight
Gu screw (3-3) screws in the threaded hole on the bottom plate, and L-shaped fixed plate (3-1) and feeler lever (2) are fastened, described
Stop screw (3-2) screw in the threaded hole on the side plate, and the top of stop screw (3-2) and the sensor base
The inner left wall contact of seat (4).
The probe contact measuring head for being adjusted dynamic characteristic based on elastic element limit method as described above, is more further said
It is bright are as follows: the feeler lever (2) is magnetic material, and the central axes of feeler lever (2) are overlapped with the central axes of magnetic suspension bearing (5), can be along X
Axis direction moves left and right.
The probe contact measuring head for being adjusted dynamic characteristic based on elastic element limit method as described above, is more further said
It is bright are as follows: there are stable radial forces between the magnetic suspension bearing (5) and feeler lever (2), mention for the gauge head module
For reliable radial support.The size of the radial forces according to actual needs, by the signal analysis and processing module
(12) it is adjusted by bearing control module (10), measurement error caused by the Radial Perturbation of gauge head module can be reduced.
The probe contact measuring head for being adjusted dynamic characteristic based on elastic element limit method as described above, is more further said
It is bright are as follows: the elastic element position-limit mechanism (3) is used cooperatively with elastic element (7), by adjusting the first of elastic element (7)
Beginning deformation quantity realizes the coordination and optimization of the dynamic characteristic and measuring force of probe system.Its principle is: the stop screw (3-
2) it screws in the threaded hole on the side plate of the L-shaped fixed plate (3-1), the left side on top and the sensor base (4)
Inner wall contact in side can be such that gauge head module moves left and right, change by adjusting the precession depth of stop screw (3-2) in threaded hole
The pretightning force and initial deformation amount for becoming elastic element (7), to change the dynamic characteristic of probe system.
Beneficial effects of the present invention
The probe contact measuring head invented has used contactless electromagnetic bearing and elastic element to limit the design adjusted,
The following feature that probe and tested surface can be enhanced promotes the dynamic characteristic and control measuring force of gauge head, and can be for not
With material and the workpiece of different sides type feature progress probe system dynamically adjusts and the control of measuring force, is improving measurement accuracy
While the use scope of probe contact measuring head has also been enlarged.
Illustrate attached drawing
Fig. 1 is that the probe contact measuring head overall structure for adjusting dynamic characteristic the present invention is based on elastic element limit method is shown
It is intended to.
Fig. 2 is that the probe contact measuring head position-limit mechanism for adjusting dynamic characteristic the present invention is based on elastic element limit method shows
It is intended to.
Specific embodiment
The present invention relates to the probe contact measuring heads that dynamic characteristic is adjusted based on elastic element limit method, below with reference to attached
The present invention will be further described with embodiment for figure.
The probe contact measuring head for adjusting dynamic characteristic based on elastic element limit method described in Fig. 1 includes: to survey
Head module, gauge head supporting module, displacement detection module, measuring force generation module, bearing control module, displacement signal acquisition mould
Block, signal analysis and processing module etc..The gauge head module is connected and composed by probe 1, feeler lever 2 and elastic element position-limit mechanism 3,
The pattern on sample surface can be followed to change and move；The gauge head supporting module includes sensor base 3 and magnetic suspension
Bearing 4, the sensor base 4 are fixed on measurement workbench 8, and the magnetic suspension bearing 5 is fixed on sensor base 4
On, for providing reliable and stable radial supporting force to gauge head module；The displacement detection module is a kind of precise grating, packet
Scale grating 6-1 and reading head 6-2 are included, the displacement information of gauge head module can be read；The measuring force generation module is elasticity
Element 7, in the present embodiment by taking spring as an example；The signal analysis and processing module 12 is with digital signal processing capability
Computer system.
Specific implementation process of the invention are as follows: measured workpiece 9 is placed on displacement platform and is fixed first, by institute
The sensor base 4 stated is fixed on measurement workbench 8 and remain stationary, and the probe 1 and feeler lever 2 is arranged along the x axis,
The tip of probe 1 is corresponding with the surface of measured workpiece 9, and the top of stop screw 3-2 is contacted with the inner left wall of pedestal 4 makes spring
7 are in Pre strained state.
Secondly it for the requirement of different measured workpieces 9 original state and measuring force different to probe system, is opened in measurement
Before beginning, precession depth of the stop screw 3-2 in L-shaped fixed plate is first adjusted, the initial deformation amount of spring 7 is changed,
To which the original state of probe system and initial measurement power are adjusted to most preferably, can both to guarantee probe and measured workpiece duration
Ground well contacts, and can reduce the abrasion of probe and measured workpiece surface.
Finally under the driving of sweep mechanism, workpiece is moved along Y-axis or Z-direction, due to probe 1 and measured workpiece 9 it
Between there are small measuring force, the microcosmic peak valley fluctuating of workpiece surface will be such that gauge head module moves left and right along the x axis, magnetic suspension shaft
Holding 5 can guarantee the low frictional properties and highly conforming properties of this movement for the radial support power that gauge head module provides., described gauge head edge
The precise grating that the moving left and right of X axis is displaced by detection module 6 perceives and is converted to electric signal, using displacement signal acquisition
Module 11 is transferred in computer system 12, and the computer system 12 can reconstruct measured workpiece table by calculating analysis
Face microscopic appearance.
The gauge head module is mainly provided by magnetic suspension bearing 5 along the supporting force of axis radial direction, the computer system
12 can adjust in real time the control program of magnetic suspension bearing 5 by bearing control module 10, to guarantee that gauge head module stability is suspended in
In magnetic suspension bearing.
Example described above illustrate elastic element 7 using spring, only presently preferred embodiments of the present invention, not to
The limitation present invention；It is all within the ideas and principles of the present invention, any modification, equivalent replacement, improvement and so on should all include
Within protection scope of the present invention.
Claims (3)
1. adjusting the probe contact measuring head of dynamic characteristic based on elastic element limit method, comprising: gauge head module, gauge head support
Module, displacement detection module, measuring force generation module, bearing control module, displacement signal acquisition module, signal analysis and processing mould
Block；It is characterized in that: the gauge head module is made of probe (1), feeler lever (2) and elastic element position-limit mechanism (3), feeler lever (2)
Central axes be overlapped with the central axes of magnetic suspension bearing (5)；Probe (1) in the gauge head module with feeler lever (2) is coaxial connects
It connects, the elastic element position-limit mechanism (3) is fixed on the side of feeler lever (2) and the position close to left side；
The gauge head supporting module includes sensor base (4) and magnetic suspension bearing (5), and the sensor base (4) is solid
It is scheduled in measurement workbench (8), the magnetic suspension bearing (5) is fixedly mounted on sensor base (4), the magnetic suspension
Bearing (5) is connect by bearing control module (10) with signal analysis and processing module (12)；
The displacement detection module is grating scale, including scale grating (6-1) and reading head (6-2), the scale grating
(6-1) is nested on feeler lever (2), and feeler lever (2) can be followed mobile, and the reading head (6-2) and scale grating (6-1) are opposite
It answers, is fixed on the intermediate projections position of sensor base (4), and pass through at displacement signal acquisition module (11) and signal analysis
Manage module (12) connection；
The measuring force generation module is elastic element (7), and the elastic element (7) one end is fixed on sensor base
(4) on, the other end is connect with the right end face of feeler lever (2)；
The elastic element position-limit mechanism (3) includes L-shaped fixed plate (3-1), stop screw (3-2) and fastening screw (3-
3), the bottom plate of the L-shaped fixed plate (3-1) and side plate are respectively equipped with threaded hole, described in the fastening screw (3-3) screws in
Bottom plate on threaded hole and L-shaped fixed plate (3-1) and feeler lever (2) are fastened, the stop screw (3-2) screw in institute
The threaded hole on side plate stated, and the top of stop screw (3-2) is contacted with the inner left wall of the sensor base (4)；
The stop screw (3-2) screws in the threaded hole on the side plate of the L-shaped fixed plate (3-1), top and institute
The inner left wall for the sensor base (4) stated contacts, and the stop screw (3-1) by adjusting elastic element position-limit mechanism (3) exists
Precession depth in threaded hole can be such that gauge head module moves left and right, and change the initial deformation amount of elastic element (7), to change
The dynamic characteristic of probe system, wherein the elastic element (7) is spring or spring leaf.
2. the probe contact measuring head of dynamic characteristic is adjusted based on elastic element limit method as described in claim 1, it is special
Sign is: the feeler lever (2) is magnetic material, and the magnetic suspension bearing (5) is provided by the magneticaction with feeler lever (2)
Radial support power needed for gauge head module.
3. the probe contact measuring head of dynamic characteristic is adjusted based on elastic element limit method as described in claim 1, it is special
Sign is: the signal analysis and processing module is the computer system with digital signal processing capability.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510973662.1A CN105444695B (en) | 2015-12-22 | 2015-12-22 | The probe contact measuring head of dynamic characteristic is adjusted based on elastic element limit method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510973662.1A CN105444695B (en) | 2015-12-22 | 2015-12-22 | The probe contact measuring head of dynamic characteristic is adjusted based on elastic element limit method |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN105444695A CN105444695A (en) | 2016-03-30 |
| CN105444695B true CN105444695B (en) | 2019-03-22 |
Family
ID=55555172
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201510973662.1A Expired - Fee Related CN105444695B (en) | 2015-12-22 | 2015-12-22 | The probe contact measuring head of dynamic characteristic is adjusted based on elastic element limit method |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN105444695B (en) |
Families Citing this family (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106093752B (en) * | 2016-06-20 | 2019-03-12 | 定颖电子(黄石)有限公司 | A kind of test probe card applied to integrated circuit |
| CN106596344A (en) * | 2017-02-13 | 2017-04-26 | 长春理工大学 | Viscosity detecting sensor based on electromagnetic induction |
| CN107272577A (en) * | 2017-07-06 | 2017-10-20 | 天通吉成机器技术有限公司 | A kind of periphery grinding machine on-line measurement and measurer for thickness |
| CN107816958B (en) * | 2017-11-23 | 2023-12-22 | 大连豪森瑞德设备制造有限公司 | Multi-model measuring quick-changing device |
| CN107825115A (en) * | 2017-11-27 | 2018-03-23 | 苏州索力旺新能源科技有限公司 | A kind of photovoltaic junction box assembling detection device |
| CN110243858B (en) * | 2019-06-10 | 2024-03-22 | 佛山科学技术学院 | Plant liquid flow detection device and detection method thereof |
| CN111692984A (en) * | 2020-06-19 | 2020-09-22 | 南京工业大学 | Bridge dynamic deflection measuring device and measuring method based on magnetic suspension technology |
| CN113865542A (en) * | 2021-09-17 | 2021-12-31 | 浙大宁波理工学院 | Measuring device and measuring method for curved surface morphology |
| CN115219750B (en) * | 2022-07-07 | 2024-06-07 | 深圳市斯纳达科技有限公司 | Three-dimensional electric probe seat with force feedback |
Citations (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2411464Y (en) * | 2000-04-04 | 2000-12-20 | 时代集团公司 | Micro-displacement measuring device |
| CN1334436A (en) * | 2000-07-26 | 2002-02-06 | 株式会社三丰 | Measurer |
| CN102538678A (en) * | 2012-01-17 | 2012-07-04 | 北京工业大学 | Measurement device of scanning probe |
| EP2629048A2 (en) * | 2012-02-20 | 2013-08-21 | Tesa Sa | Sensor |
| CN103398805A (en) * | 2013-07-19 | 2013-11-20 | 安徽理工大学 | Three-dimensional nanometer measurement head elastic supported by spiral leaf spring |
| CN104048611A (en) * | 2013-03-12 | 2014-09-17 | 昆山允可精密工业技术有限公司 | Contact type measuring head with controllable measuring force |
| CN104122016A (en) * | 2014-06-24 | 2014-10-29 | 国家电网公司 | Force-limiting device |
| CN104713496A (en) * | 2015-02-11 | 2015-06-17 | 四川大学 | Magnetic suspension contact pin type displacement sensor for micro-topography measurement |
| CN104897099A (en) * | 2015-06-19 | 2015-09-09 | 四川大学 | Measuring force-controllable contact probe type displacement sensor used for micro morphology detection |
-
2015
- 2015-12-22 CN CN201510973662.1A patent/CN105444695B/en not_active Expired - Fee Related
Patent Citations (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2411464Y (en) * | 2000-04-04 | 2000-12-20 | 时代集团公司 | Micro-displacement measuring device |
| CN1334436A (en) * | 2000-07-26 | 2002-02-06 | 株式会社三丰 | Measurer |
| CN102538678A (en) * | 2012-01-17 | 2012-07-04 | 北京工业大学 | Measurement device of scanning probe |
| EP2629048A2 (en) * | 2012-02-20 | 2013-08-21 | Tesa Sa | Sensor |
| CN104048611A (en) * | 2013-03-12 | 2014-09-17 | 昆山允可精密工业技术有限公司 | Contact type measuring head with controllable measuring force |
| CN103398805A (en) * | 2013-07-19 | 2013-11-20 | 安徽理工大学 | Three-dimensional nanometer measurement head elastic supported by spiral leaf spring |
| CN104122016A (en) * | 2014-06-24 | 2014-10-29 | 国家电网公司 | Force-limiting device |
| CN104713496A (en) * | 2015-02-11 | 2015-06-17 | 四川大学 | Magnetic suspension contact pin type displacement sensor for micro-topography measurement |
| CN104897099A (en) * | 2015-06-19 | 2015-09-09 | 四川大学 | Measuring force-controllable contact probe type displacement sensor used for micro morphology detection |
Also Published As
| Publication number | Publication date |
|---|---|
| CN105444695A (en) | 2016-03-30 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN105444695B (en) | The probe contact measuring head of dynamic characteristic is adjusted based on elastic element limit method | |
| CN104897099B (en) | A kind of controllable contact pin type displacement sensor of measuring force for micromorphology detection | |
| CN101458058B (en) | Measuring device | |
| US4669300A (en) | Electromagnetic stylus force adjustment mechanism | |
| CN104713496A (en) | Magnetic suspension contact pin type displacement sensor for micro-topography measurement | |
| CN107907042B (en) | Diameter online measurement device and method | |
| CN102901439A (en) | Contact measuring head for measuring thickness of surface mount technology (SMT) screen plate | |
| CN103234848A (en) | Device for testing nano scratch and friction stick-slip properties of film surfaces | |
| CN201548181U (en) | High-precision straightness inspector | |
| CN110186371A (en) | A kind of overproof continuous measuring device of flatness and its measurement method | |
| CN101852580B (en) | Workpiece length correcting device | |
| CN207487544U (en) | Magnetic suspension contact pilotage displacement sensor | |
| CN202329454U (en) | High-precision measuring device for thread plug gauge based on length measuring instrument | |
| CN209295860U (en) | Calipers inside and outside a kind of bearing thin-walled bakelite retainer | |
| CN204730792U (en) | A kind of hand-held internal diameter guide rail conical surface measurement mechanism | |
| US2763934A (en) | Gauge apparatus | |
| CN106017393B (en) | A kind of measuring device of toe of weld pattern | |
| CN201926436U (en) | Attitude adjusting device of roughness measuring instrument | |
| CN104197853A (en) | Contact type scanning measuring head and measuring method thereof | |
| CN201463872U (en) | Comprehensive test instrument of parallel and torsion of refrigerator compressor crankshaft | |
| CN105387810A (en) | Electromagnetic bearing self-tilting micrometric displacement sensor system with controllable measuring force | |
| CN204757963U (en) | Bat centre of sphere is apart from detection device | |
| CN105466339A (en) | Micro topography detection displacement sensor system based on standard mass block controlling measuring force | |
| CN208476098U (en) | Elevation angle measuring gage | |
| CN202432979U (en) | Surface defect concave-convex quantity measuring system for hot rolled steel plate and coil |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20190322 Termination date: 20191222 |